An in-plane torsion-type four-mass MEMS gyroscope

Abstract

The present invention discloses an in-plane torsion pendulum type four-mass MEMS gyroscope, comprising: a substrate layer and a device layer structure, wherein the device layer structure comprises a driving double-end clamped beam, a driving frame, a Coriolis mass, a driving coupling clamped beam, a driving coupling folded beam, a detection double-end clamped beam, a detection frame, a detection truss, a detection coupling beam, and a detection frame fulcrum; the device layer structure also comprises a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system, and a detection output closed-loop control signal system. The present invention forms a fully differential quasi-three-dimensional motion of the overall structure of the MEMS gyroscope through an in-plane four-mass torsion pendulum type fully differential architecture, and the total inertia of the motion in any proportional superposition direction at any time in the plane is always zero, thereby realizing the all-round vibration isolation and decoupling of the MEMS gyroscope from the surrounding environment, and achieving comprehensive and effective suppression of the influence of typical interferences such as temperature, environmental shock, and vibration on the accuracy of the gyroscope.

Description

Technical Field

[0001] The present invention relates to the field of gyroscopes, and in particular to an in-plane torsion-type four-mass MEMS gyroscope. Background Art

[0002] A MEMS gyroscope is an instrument that precisely measures angular velocity or angle signals through vibration. Improving the accuracy of a gyroscope depends primarily on whether the resonator structure can separate external interference from the vibration characteristics of the resonant sensitive structure as much as possible.

[0003] In the prior art, there are two types of structures that can achieve this vibration separation:

[0004] One is the butterfly-wing double torsion pendulum method, which is an out-of-plane angular vibration working mode. However, its processing technology is difficult and the technology is immature, and stable mass production cannot be achieved, making it a pain point in product application.

[0005] Another way is to adopt a four-mass architecture, which is an in-plane linear vibration working mode. Currently, the MEMS manufacturing process for this type of structure is relatively mature and can be mass-produced.

[0006] However, this type of in-plane four-mass linear vibration structure is currently large in size, the linear vibration distance spans the side length of the chip, and its vibration reliability performance is poor, making it unsuitable for application in many industrial scenarios. Summary of the Invention

[0007] In view of the shortcomings of the prior art, the present invention aims to provide an in-plane torsion-type four-mass MEMS gyroscope with high reliability.

[0008] The above technical objectives of the present invention are achieved through the following technical solutions: an in-plane torsion-type four-mass MEMS gyroscope, comprising:

[0009] substrate layer;

[0010] a device layer structure fixed on the substrate layer via corresponding anchor points;

[0011] The device layer structure comprises:

[0012] Driving double-end clamped beam, driving frame, Coriolis mass block, driving coupled clamped beam, driving coupled folding beam, detecting double-end clamped beam, detecting frame, detecting truss, detecting coupled beam and detecting frame fulcrum;

[0013] One end of the driving double-end clamped beam is connected to the anchor point and fixed to the substrate layer, and the other end is connected to the driving frame. One end of the detecting double-end clamped beam is connected to the driving frame, and the other end is connected to the Coriolis mass block. One end of the driving coupling clamped beam is connected to the Coriolis mass block, and the other end is connected to the detecting truss. The other end of the detecting truss is connected to the detecting frame.

[0014] The two ends of the detection coupling beam are respectively connected to the detection frames on its left and right sides, so as to achieve modal separation of the detection frames. One end of the detection frame fulcrum is connected to the detection frame, and the other end is connected to the anchor structure. The two ends of the drive coupling folding beam are respectively connected to the drive frames on its left and right sides, so as to ensure that the two connected drive frames move in the same direction during operation.

[0015] The drive frame and the Coriolis mass block together constitute the drive loop mass, and the structure is symmetrical about the Y axis. The detection frame and the Coriolis mass block together constitute the detection loop mass, and the structure is symmetrical about the X axis. At the same time, the entire MEMS gyroscope structure is a fully decoupled design;

[0016] The device layer structure further includes:

[0017] Push-pull driving force system, driving end differential detection output signal system, differential detection output signal system and detection output closed-loop control signal system;

[0018] The push-pull driving force system provides a push-pull driving force for the MEMS gyroscope, the driving end differential detection output signal system provides a differential detection output signal for the MEMS gyroscope driving end, the differential detection output signal system provides a differential detection output signal for the MEMS gyroscope, and the detection output closed-loop control signal system provides a detection output closed-loop control signal for the MEMS gyroscope.

[0019] In a preferred example, the present invention can be further configured as follows: the push-pull driving force system includes a driving positive electrode comb tooth pair and a driving negative electrode comb tooth pair, the driving positive electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, and the driving negative electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, and the driving positive electrode comb tooth pair and the driving negative electrode comb tooth pair and the correspondingly connected electrodes will form a group of differential capacitor electrodes, and are symmetrically distributed on the left and right sides, and symmetrical about the Y axis.

[0020] In a preferred example, the present invention can be further configured as follows: there are N pairs of driven positive electrode comb teeth, which are designed as variable area comb teeth, and there are N pairs of driven negative electrode comb teeth, which are designed as variable area comb teeth.

[0021] In a preferred example, the present invention can be further configured as follows: the drive-end differential detection output signal system includes a drive detection positive electrode comb tooth pair and a drive detection negative electrode comb tooth pair, the drive detection positive electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, and the drive detection negative electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, the drive detection positive electrode comb tooth pair and the drive detection negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, and symmetrical about the Y axis.

[0022] In a preferred example, the present invention can be further configured as follows: there are N pairs of drive detection positive electrode comb teeth, which are designed as variable area comb teeth, and there are N pairs of drive detection negative electrode comb teeth, which are designed as variable area comb teeth.

[0023] In a preferred example, the present invention can be further configured as follows: the differential detection output signal system includes a detection positive electrode comb tooth pair and a detection negative electrode comb tooth pair, the detection positive electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, and the detection negative electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, the detection positive electrode comb tooth pair and the detection negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, and symmetrical about the X-axis.

[0024] In a preferred example, the present invention can be further configured as follows: there are N pairs of positive electrode comb teeth for detection, which are designed with variable gap comb teeth; there are N pairs of negative electrode comb teeth for detection, which are designed with variable gap comb teeth.

[0025] In a preferred example, the present invention can be further configured as follows: the detection output closed-loop control signal system includes a detection feedback positive electrode comb tooth pair and a detection feedback negative electrode comb tooth pair, the detection feedback positive electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, and the detection feedback negative electrode comb tooth pair is fixed to the substrate layer through corresponding anchor points, the detection feedback positive electrode comb tooth pair and the detection feedback negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, and symmetrical about the X-axis.

[0026] In a preferred example, the present invention can be further configured as follows: there are N pairs of detection feedback positive electrode comb teeth, which are designed as variable gap comb teeth, and there are N pairs of detection feedback negative electrode comb teeth, which are designed as variable gap comb teeth.

[0027] In a preferred example, the present invention can be further configured as follows: the materials of the substrate layer and the device layer structure are both silicon.

[0028] In summary, the present invention has the following beneficial effects:

[0029] 1. The fully differential in-plane four-mass torsion pendulum architecture achieves fully differential quasi-three-dimensional motion for the MEMS gyroscope's overall structure. The total inertia of any in-plane motion in any proportional and superimposed direction at any time is always zero, achieving all-round vibration isolation and decoupling of the MEMS gyroscope from the surrounding environment, effectively suppressing the effects of typical interference such as temperature, environmental shock, and vibration on the gyroscope's accuracy.

[0030] 2. This technology solves the current problems of difficult processing technology and low yield of out-of-plane angular vibration gyroscope structures, achieving high performance characteristics comparable to that of angular vibration gyroscopes. It also avoids the problems of large size and poor vibration reliability of in-plane linear vibration gyroscope structures, further improving gyroscope performance.

[0031] 3. Each working module adopts a differential capacitor design, which eliminates most of the common-mode interference noise and greatly improves the signal-to-noise ratio of the device. Through the closed-loop control working mode, the linearity of the device is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural diagram of an embodiment;

[0033] Figure 2 is a schematic diagram of a driving frame structure of an embodiment;

[0034] Figure 3 is a schematic diagram of a detection framework structure of an embodiment;

[0035] Figure 4 Schematic diagram of the working principle of the detection framework of the embodiment.

[0036] Figure markings: 1. substrate layer; 2. anchor point; 3. driving double-ended clamped beam; 4. driving frame; 5. driving coupled clamped beam; 6. detecting double-ended clamped beam; 7. anchor point; 8. driving negative electrode comb tooth pair; 9. anchor point; 10. driving positive electrode comb tooth pair; 11. anchor point; 12. driving detection positive electrode comb tooth pair; 13. anchor point; 14. driving detection negative electrode comb tooth pair; 15. Coriolis mass block; 16. detection frame; 17. detecting coupled beam; 18. detecting frame support; 19. detecting truss; 20. driving coupled folding beam; 21. anchor point; 22. detecting negative electrode comb tooth pair; 23. anchor point; 24. detecting feedback negative electrode comb tooth pair; 25. anchor point; 26. detecting positive electrode comb tooth pair; 27. anchor point; 28. detecting feedback positive electrode comb tooth pair. DETAILED DESCRIPTION

[0037] The following is combined with Figure 1-4 The present invention is described in further detail.

[0038] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, an in-plane torsion pendulum four-mass MEMS gyroscope includes a substrate layer 1 and a device layer structure, the device layer structure is fixed on the substrate layer 1 through corresponding anchor points, and the materials of the substrate layer 1 and the device layer structure are both silicon.

[0039] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the device layer structure includes a driving double-end clamped beam 3, a driving frame 4, a Coriolis mass block 15, a driving coupled clamped beam 5, a driving coupled folded beam 20, a detection double-end clamped beam 6, a detection frame 16, a detection truss 19, a detection coupling beam 17 and a detection frame fulcrum 18.

[0040] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the driving coupling fixed beam 5 coincides with the X-axis, the driving coupling folding beam 20 coincides with the Y-axis, one end of the driving double-end fixed beam 3 is connected to the anchor point 2 and fixed to the substrate layer 1, and the other end is connected to the driving frame 4, one end of the detection double-end fixed beam 6 is connected to the driving frame 4, and the other end is connected to the Coriolis mass block 15, one end of the driving coupling fixed beam 5 is connected to the Coriolis mass block 15, and the other end is connected to the detection truss 19, and the other end of the detection truss 19 is connected to the detection frame 16.

[0041] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the driving frame 4 and the Coriolis mass block 15 together constitute the driving loop mass, and the structure is symmetrical about the Y axis. The detection frame 16 and the Coriolis mass block 15 together constitute the detection loop mass, and the structure is symmetrical about the X axis. At the same time, the entire MEMS gyroscope structure is a fully decoupled design.

[0042] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the two ends of the detection coupling beam 17 are respectively connected to the detection frames 16 on its left and right, so as to enable modal separation of the detection frames 16. One end of the detection frame fulcrum 18 is connected to the detection frame 16, and the other end is connected to the anchor structure. The two ends of the drive coupling folding beam 20 are respectively connected to the drive frames 4 on its left and right, so as to ensure that the two connected drive frames 4 move in the same direction during operation.

[0043] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the device layer structure further includes a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system, and a detection output closed-loop control signal system.

[0044] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the push-pull driving force system includes a driving positive electrode comb tooth pair 10 and a driving negative electrode comb tooth pair 8. The driving positive electrode comb tooth pair 10 is fixed to the substrate layer 1 through the corresponding anchor point 9, and the driving negative electrode comb tooth pair 8 is fixed to the substrate layer 1 through the corresponding anchor point 7.

[0045] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, there are N pairs of driving positive electrode comb teeth 10, which are designed as variable area comb teeth, and there are N pairs of driving negative electrode comb teeth 8, which are designed as variable area comb teeth.

[0046] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the driving positive electrode comb tooth pair 10 and the driving negative electrode comb tooth pair 8 and the corresponding connected electrodes will form a group of differential capacitance electrodes, and are symmetrically distributed on the left and right sides, symmetrical about the Y axis, to provide push-pull driving force for the MEMS gyroscope.

[0047] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the drive-end differential detection output signal system includes a drive detection positive electrode comb tooth pair 12 and a drive detection negative electrode comb tooth pair 14. The drive detection positive electrode comb tooth pair 12 is fixed to the substrate layer 1 through the corresponding anchor point 11, and the drive detection negative electrode comb tooth pair 14 is fixed to the substrate layer 1 through the corresponding anchor point 13.

[0048] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, there are N pairs of drive detection positive electrode comb teeth 12, which are designed as variable area comb teeth, and there are N pairs of drive detection negative electrode comb teeth 14, which are designed as variable area comb teeth.

[0049] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4As shown, the drive detection positive electrode comb tooth pair 12 and the drive detection negative electrode comb tooth pair 14 respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, symmetrical about the Y axis, to provide differential detection output signals for the MEMS gyroscope drive end.

[0050] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the differential detection output signal system includes a detection positive electrode comb tooth pair 26 and a detection negative electrode comb tooth pair 22. The detection positive electrode comb tooth pair 26 is fixed to the substrate layer 1 through the corresponding anchor point 25, and the detection negative electrode comb tooth pair 22 is fixed to the substrate layer 1 through the corresponding anchor point 21.

[0051] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, there are N pairs of positive electrode comb teeth 26 for detection, which are designed with variable gap comb teeth, and there are N pairs of negative electrode comb teeth 22 for detection, which are designed with variable gap comb teeth.

[0052] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the detection positive electrode comb tooth pair 26 and the detection negative electrode comb tooth pair 22 respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, symmetrical about the X-axis, to provide differential detection output signals for the MEMS gyroscope.

[0053] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, the detection output closed-loop control signal system includes a detection feedback positive electrode comb tooth pair 28 and a detection feedback negative electrode comb tooth pair 24. The detection feedback positive electrode comb tooth pair 28 is fixed to the substrate layer 1 through the corresponding anchor point 27, and the detection feedback negative electrode comb tooth pair 24 is fixed to the substrate layer 1 through the corresponding anchor point 23.

[0054] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 As shown, there are N pairs of detection feedback positive electrode comb teeth 28, which are designed with variable gap comb teeth, and there are N pairs of detection feedback negative electrode comb teeth 24, which are designed with variable gap comb teeth.

[0055] like Figure 1 、 Figure 2 、 Figure 3 、 Figure 4As shown, the detection feedback positive electrode comb tooth pair 28 and the detection feedback negative electrode comb tooth pair 24 respectively form a group of differential capacitance electrodes with the corresponding connected electrodes, and are symmetrically distributed on the left and right sides, symmetrical about the X-axis, to provide detection output closed-loop control signals for the MEMS gyroscope.

[0056] The in-plane torsion pendulum working principle of the MEMS gyroscope of the present invention is as follows:

[0057] When the MEMS gyroscope is working normally, it is mainly based on the principle of the Coriolis effect. The gyroscope drive loop first makes the drive structure maintain constant amplitude and constant frequency oscillation under the action of the driving force. When there is an external angular velocity, the Coriolis mass block 15 generates a Coriolis force under this effect, causing the detection comb structure of the MEMS gyroscope detection loop to undergo micro-displacement, which in turn causes the capacitance of the detection comb teeth of the detection loop to change. The corresponding capacitance detection is performed through the external interface circuit, and the comb teeth are fed back through the detection loop for closed-loop adjustment and control, ultimately achieving the measurement of angular velocity.

[0058] By innovatively designing the detection truss 19, the detection frame support 18 and the detection coupling beam 17 in the detection loop, the detection frame 16 produces butterfly-wing motion under the action of the Coriolis force, thereby driving the detection positive electrode comb tooth pair 26 and the detection negative electrode comb tooth pair 22 distributed on the detection frame 16 to undergo in-plane torsion, successfully realizing a fully differential detection method for the in-plane angular vibration of the four mass blocks.

[0059] Through this in-plane four-mass torsion-pendulum fully differential architecture, the MEMS gyroscope's overall structure forms a fully differential quasi-three-dimensional motion. The total inertia of motion in any proportion and superposition direction in the plane at any time is always zero, realizing all-round vibration isolation and decoupling of the MEMS gyroscope from the surrounding environment, and achieving comprehensive and effective suppression of the impact of typical interferences such as temperature, environmental shock, and vibration on the gyroscope's accuracy.

[0060] In addition, the current problems of difficult processing technology and low yield of out-of-plane angular vibration gyroscope structures have been successfully solved, and high performance characteristics comparable to those of shoulder-to-shoulder angular vibration gyroscopes have been achieved. At the same time, the problems of large size and poor vibration reliability of in-plane linear vibration gyroscope structures have been avoided, further improving the performance of the gyroscope.

[0061] Each working module adopts a differential capacitor design, which eliminates most of the common-mode interference noise and greatly improves the signal-to-noise ratio of the device. Through closed-loop control working mode, the linearity of the device is better.

[0062] The specific embodiments are merely explanations of the present invention and are not limitations of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the embodiments as needed. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. An in-plane torsion-type four-mass MEMS gyroscope, characterized by: include: substrate layer (1); A device layer structure is fixed on the substrate layer (1) via corresponding anchor points; The device layer structure comprises: Driving a double-end fixed-support beam (3), a driving frame (4), a Coriolis mass block (15), driving a coupled fixed-support beam (5), driving a coupled folding beam (20), detecting a double-end fixed-support beam (6), a detecting frame (16), a detecting truss (19), detecting a coupled beam (17), and a detecting frame fulcrum (18); One end of the driving double-end fixed beam (3) is connected to the anchor point (2) and fixed to the substrate layer (1), and the other end is connected to the driving frame (4); one end of the detecting double-end fixed beam (6) is connected to the driving frame (4), and the other end is connected to the Coriolis mass block (15); one end of the driving coupling fixed beam (5) is connected to the Coriolis mass block (15), and the other end is connected to the detecting truss (19); the other end of the detecting truss (19) is connected to the detecting frame (16); The two ends of the detection coupling beam (17) are respectively connected to the detection frames (16) on the left and right thereof, so as to separate the detection frames (16) modally; one end of the detection frame fulcrum (18) is connected to the detection frame (16), and the other end is connected to the anchor structure; the two ends of the drive coupling folding beam (20) are respectively connected to the drive frames (4) on the left and right thereof, so as to ensure that the two connected drive frames (4) move in the same direction during operation; The driving frame (4) and the Coriolis mass block (15) together constitute a driving loop mass, and the structure is symmetrical about the Y axis; the detection frame (16) and the Coriolis mass block (15) together constitute a detection loop mass, and the structure is symmetrical about the X axis; and the entire MEMS gyroscope structure is a fully decoupled design; The device layer structure further includes: Push-pull driving force system, driving end differential detection output signal system, differential detection output signal system and detection output closed-loop control signal system; The push-pull driving force system provides a push-pull driving force for the MEMS gyroscope, the driving end differential detection output signal system provides a differential detection output signal for the MEMS gyroscope driving end, the differential detection output signal system provides a differential detection output signal for the MEMS gyroscope, and the detection output closed-loop control signal system provides a detection output closed-loop control signal for the MEMS gyroscope.

2. The in-plane torsion-type four-mass MEMS gyroscope according to claim 1, characterized in that: The push-pull driving force system includes a driving positive electrode comb tooth pair (10) and a driving negative electrode comb tooth pair (8), wherein the driving positive electrode comb tooth pair (10) is fixed to the substrate layer (1) via a corresponding anchor point (9), and the driving negative electrode comb tooth pair (8) is fixed to the substrate layer (1) via a corresponding anchor point (7). The driving positive electrode comb tooth pair (10) and the driving negative electrode comb tooth pair (8) respectively form a group of differential capacitance electrodes with correspondingly connected electrodes, and are symmetrically distributed on the left and right sides, respectively, and symmetrically about the Y axis.

3. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 2, characterized in that: The driving positive electrode comb teeth pair (10) has N pairs, which are designed as variable area comb teeth, and the driving negative electrode comb teeth pair (8) has N pairs, which are designed as variable area comb teeth.

4. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 1, characterized in that: The drive-end differential detection output signal system comprises a drive detection positive electrode comb tooth pair (12) and a drive detection negative electrode comb tooth pair (14), wherein the drive detection positive electrode comb tooth pair (12) is fixed to the substrate layer (1) via a corresponding anchor point (11), and the drive detection negative electrode comb tooth pair (14) is fixed to the substrate layer (1) via a corresponding anchor point (13), and the drive detection positive electrode comb tooth pair (12) and the drive detection negative electrode comb tooth pair (14) respectively form a group of differential capacitance electrodes with correspondingly connected electrodes, and are symmetrically distributed on the left and right sides, and are symmetrical about the Y axis.

5. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 4, characterized in that: The driving detection positive electrode comb tooth pair (12) has N pairs, which are designed as a variable area comb tooth, and the driving detection negative electrode comb tooth pair (14) has N pairs, which are designed as a variable area comb tooth.

6. The in-plane torsion-type four-mass MEMS gyroscope according to claim 1, characterized in that: The differential detection output signal system comprises a detection positive electrode comb tooth pair (26) and a detection negative electrode comb tooth pair (22), wherein the detection positive electrode comb tooth pair (26) is fixed to the substrate layer (1) via a corresponding anchor point (25), and the detection negative electrode comb tooth pair (22) is fixed to the substrate layer (1) via a corresponding anchor point (21), and the detection positive electrode comb tooth pair (26) and the detection negative electrode comb tooth pair (22) respectively form a group of differential capacitance electrodes with correspondingly connected electrodes, and are symmetrically distributed on the left and right sides, respectively, and are symmetrical about the X axis.

7. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 6, characterized in that: The detection positive electrode comb teeth pair (26) has N pairs, which are designed as variable gap comb teeth, and the detection negative electrode comb teeth pair (22) has N pairs, which are designed as variable gap comb teeth.

8. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 1, characterized in that: The detection output closed-loop control signal system comprises a detection feedback positive electrode comb tooth pair (28) and a detection feedback negative electrode comb tooth pair (24), wherein the detection feedback positive electrode comb tooth pair (28) is fixed to the substrate layer (1) via a corresponding anchor point (27), and the detection feedback negative electrode comb tooth pair (24) is fixed to the substrate layer (1) via a corresponding anchor point (23), and the detection feedback positive electrode comb tooth pair (28) and the detection feedback negative electrode comb tooth pair (24) respectively form a group of differential capacitance electrodes with correspondingly connected electrodes, and are symmetrically distributed on the left and right sides, and are symmetrical about the X axis.

9. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 8, characterized in that: The detection feedback positive electrode comb teeth pair (28) has N pairs, which are designed as variable gap comb teeth, and the detection feedback negative electrode comb teeth pair (24) has N pairs, which are designed as variable gap comb teeth.

10. The in-plane torsion yaw four-mass MEMS gyroscope according to claim 1, characterized in that: The materials of the substrate layer (1) and the device layer structure are both silicon.

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