Manufacturing apparatus and method for manufacturing components by additive manufacturing of powder materials, and method for generating a defined intensity distribution of an energy beam

Abstract

The present invention relates to a manufacturing device (1) for additive manufacturing of components from powder materials, the manufacturing device having: a beam generation device (3) configured to generate an energy beam (5); a scanning device (7) configured to displace the energy beam (5) within a working area (9) to a plurality of irradiation positions (11) in order to manufacture a component from powder material arranged in the working area (9) by means of the energy beam (5); a deflection device (13) configured to displace the energy beam (5) at one of the plurality of irradiation positions (11) within a beam area (15) to a plurality of beam positions (17); and a control device (19) operatively connected to the deflection device (13) and configured to control the deflection device (13) and to generate a defined intensity distribution within the beam area (15) by means of at least one operating parameter of the predefined deflection device (13), wherein the at least one operating parameter is selected from the group comprising the following parameters: the dwell time at the beam positions (17), the beam position density distribution within the beam area (15), the frequency distribution of the beam positions (17), and an intensity influencing parameter for influencing the intensity of the energy beam (5) deflected to the beam positions (17) respectively.

Description

Field of the Invention

[0001] The present invention relates to a manufacturing apparatus and method for additively manufacturing a component from powder material, and to a method for generating a defined intensity distribution of an energy beam. Background Art

[0002] During the additive manufacturing of a component from powder material, an energy beam is typically displaced to a predetermined irradiation position within the working area, in particular along a predetermined irradiation path to a predetermined irradiation position within the working area, in order to locally solidify the powder material arranged in the working area. This is particularly repeated layer by layer in the successively arranged powder material layers in the working area in order to ultimately obtain a three-dimensional component made of solidified powder material. In certain cases, irradiating the powder material with energy beams having different intensity distributions is beneficial for various manufacturing tasks, in particular for various components to be manufactured, and also for different regions within the component to be manufactured, and even for different regions within the same powder material layer in the working area. Appropriately selecting the intensity distribution can in particular contribute to increasing productivity. Generating a suitable, adapted intensity distribution in an optical energy beam by means of conventional beam shaping, in particular by means of refractive or interference optical elements, is generally complex and not flexibly utilisable. In particular, during individual manufacturing operations, especially within the powder material layer, it is only difficult to switch between different intensity distributions. In addition, conventional beam shaping methods only allow a limited selection of intensity distributions to be achieved, so the applicability of said methods is also limited. Summary of the Invention

[0003] The object of the present invention is to provide a manufacturing apparatus and method for additively manufacturing a component from powder material, and a method for generating a defined intensity distribution of an energy beam, wherein said disadvantages are at least reduced, preferably avoided.

[0004] This object is solved by providing the teaching of the present technology, in particular the teaching of the independent claims and the embodiments disclosed in the dependent claims and the description.

[0005] This task is solved in particular by providing a manufacturing device for the additive manufacturing of components from powder materials, said manufacturing device having a beam generation device configured to generate an energy beam. The manufacturing device further has a scanning device configured to displace the energy beam within a working area to a plurality of irradiation positions in order to manufacture a component from the powder material arranged in the working area by means of the energy beam. In addition, the manufacturing device has a deflection device configured to displace the energy beam at one of the plurality of irradiation positions within a beam area to a plurality of beam positions. The manufacturing device also has a control device which is operatively connected to the deflection device and which is configured to control the deflection device, and in a first alternative, to generate a defined intensity distribution in the beam area by displacing the energy beam within the beam area and by means of at least one operating parameter of the predefined deflection device. Here, the at least one operating parameter is selected from the group comprising the following parameters: dwell time at the beam position, beam position density distribution in the beam area, frequency distribution of the beam positions, and intensity influencing parameters for influencing the intensity of the energy beam deflected to the beam positions respectively. In a second alternative, or additionally, the control device is operatively connected to the deflection device and the control device is configured to control the deflection device and to generate a defined intensity distribution in the beam area by allocating the energy beam to simultaneously displace the energy beam to at least two beam positions, wherein the spacing between the two beam positions can be variably set in at least one direction.

[0006] In this way, in particular, a defined intensity distribution can be easily and quickly predefined and a defined intensity distribution can be generated without a specific device associated therewith that is specifically dedicated to the intensity distribution. In particular, it is possible to easily and quickly switch between different intensity distributions. Thus, the manufacturing device can very flexibly generate a suitable intensity distribution in accordance with the corresponding component to be manufactured and / or the corresponding area of the component to be manufactured. Thus, the manufacturing device exhibits a particularly high productivity. In addition, by selecting a particularly suitable intensity distribution, the quality of the components manufactured by the manufacturing device can be improved. Since there is no need for interference optical elements, in particular refractive or static optical elements, that are specifically adapted to the intensity distribution, the design costs of the manufacturing device are low despite its flexible applicability, especially in terms of not requiring different types of devices for generating different intensity distributions. The manufacturing device proposed here can also switch between the most efficient, especially also rapid, component manufacturing and the manufacturing of components with particularly high quality by appropriately controlling the scanning device on the one hand and the deflection device on the other hand, especially also by locally variably adjusting the material properties of the generated component, for example, the hardness of the area of the component surface is greater than the hardness of the interior of the component.

[0007] Additive manufacturing of components or additive manufacturing is in particular understood to mean the construction of components layer by layer from powder materials, in particular powder bed-based methods for manufacturing components in a powder bed, in particular manufacturing methods selected from the group comprising the following parameters: selective laser sintering, laser metal fusion (LMF), direct metal laser melting (DMLM), laser net shape manufacturing (LNSM) and laser engineered net shaping (LENS). Thus, the manufacturing device is in particular set up for carrying out at least one of the aforementioned additive manufacturing methods or additive manufacturing methods.

[0008] In general, an energy beam is understood to mean a directional radiation capable of transmitting energy. Generally speaking, the directional radiation can be particle radiation or wave radiation. In particular, the energy beam propagates through physical space along a propagation direction and, in the process, transmits energy along its propagation direction. In particular, with the aid of the energy beam, local deposition of energy in the working area is possible.

[0009] In a preferred configuration, the energy beam is a working beam. The working beam is in particular understood to mean a pre-directed, continuous or pulsed electromagnetic radiation which, in terms of its wavelength or wavelength range, is suitable for additive or additive manufacturing of components from powder materials, in particular for sintering or melting powder materials. The working beam is in particular understood to mean a laser beam which can be generated continuously or in pulsed mode. The working beam preferably has a wavelength or wavelength range within the visible electromagnetic spectrum, or within the infrared electromagnetic spectrum, or within the overlap range between the infrared and visible ranges of the electromagnetic spectrum.

[0010] The working area is in particular understood to mean the area, in particular a plane or a surface, in which the powder material is arranged and which is locally irradiated by the energy beam to locally solidify the powder material. In particular, the powder materials are arranged in layers one above the other in the working area and are locally irradiated with the energy beam in order to manufacture the component layer by layer.

[0011] The irradiation position is in particular understood to mean the location within the working area at which energy is locally deposited into the working area by means of the energy beam, in particular into the powder material arranged there. The scanning device is preferably set up to displace the energy beam within the working area along an irradiation path, where the irradiation path consists of a time sequence of irradiation positions successively swept over by the energy beam. In this case, the individual irradiation positions can be arranged at a distance from one another or can overlap in some other way. The irradiation path can in particular be a path continuously scanned by the energy beam.

[0012] The beam area is in particular understood here to mean the area at the irradiation position within which a defined intensity distribution is generated. Here, the beam area in particular has a planar extent which is greater than the cross-section of the energy beam projected onto the working area.

[0013] Therefore, the deflection device is specifically arranged to shift the energy beam to a fixed irradiation position within the beam area, in particular at each irradiation position, thereby irradiating the energy beam to a fixed irradiation position within the working area, a defined area (beam area), which is larger than the cross-section of the energy beam projected onto the working area; in contrast, the scanning device is arranged to shift the energy beam between the individual irradiation positions, thereby enabling the deflection device to sweep the energy beam across different locations of a new beam area. Therefore, the deflection device is used for the local deflection of the energy beam at the irradiation position, while the scanning device is used for the overall displacement of the energy beam within the working area.

[0014] Therefore, the scanning device and the deflection device are particularly different in terms of the possible displacement length scalar. The scanning device is preferably arranged to sweep the energy beam across the entire working area, while the deflection device is arranged to locally deflect the energy beam at the irradiation positions predetermined by the scanning device within the beam area, where the corresponding beam area is much smaller than the working area. In particular, the beam area preferably has a length scalar in the range of a few (i.e., less than ten) millimeters to a few centimeters, preferably having a planar extension in the range of a few square millimeters to a few square centimeters, while the working area has a length scalar in the range of a few decimeters to up to several meters, preferably having a planar extension in the range of a few square decimeters to a few square meters.

[0015] On the one hand, the scanning device and on the other hand the deflection device are preferably also different in terms of the time scalar during which the energy beam is deflected. In particular, the deflection of the energy beam by the deflection device within the beam area preferably occurs on a shorter time scalar, in particular a much shorter time scalar, than the deflection of the energy beam by the scanning device within the working area, i.e., than the change from one irradiation position to the next. In this way, it is advantageously possible to appropriately shift the energy beam to each irradiation position predetermined by the instantaneous setting of the scanning device within the beam area by means of the deflection device, and a defined intensity distribution can be generated quasi-statically. The time scalar during which the energy beam can be deflected by the deflection device is preferably 10 to 1000 times, preferably 20 to 200 times, preferably 40 to 100 times, or more times smaller than the time scalar during which the energy beam is deflected by the scanning device.

[0016] The generated intensity distribution is in particular also quasi-static with regard to the melting process of the powder material, where the time scalar for deflecting the energy beam by the deflection device is significantly shorter than the characteristic interaction time between the energy beam and the powder material. Averaged over time, the dynamically generated intensity distribution thus interacts with the powder material in the same way as the statically generated intensity distribution.

[0017] The intensity distribution is in particular understood here as the surface power density distribution on the surface irradiated by the energy beam, in particular the surface scanned by the energy beam. Thus, the intensity distribution in particular includes the local surface power density, in particular the intensity of the energy beam, and the spatial distribution of the surface power density, as parameters that are preferably independently variable from each other. The term "power" in particular relates to the average power over a time scalar that generates a quasi-static intensity distribution at one of the irradiation positions within the beam region.

[0018] At least one operating parameter of the deflection device is in particular a displacement parameter or an intensity influencing parameter.

[0019] The displacement parameter is in particular understood here as a parameter that at least partially determines the displacement of the energy beam within the beam region. The displacement parameter in particular determines, for example, how long the energy beam stays at a defined beam position, how the different beam positions within the beam region are arranged relative to each other, and how or how often the energy beam moves to a defined beam position. Thus, in particular, the following operating parameters are displacement parameters: the dwell time at the beam position, the beam position density distribution in the beam region, and the frequency distribution of the beam positions.

[0020] Here, the dwell time at the beam position is in particular the time interval during which the energy beam stays at a defined beam position within the beam region before shifting to the next beam position. Thus, the dwell time directly determines the energy deposited at the beam position. Preferably, the dwell time can also be derived from the displacement speed of the energy beam within the beam region.

[0021] The beam position density distribution in the beam region is in particular understood as the manner in which the surface density of the beam positions in the configured beam region is configured, in particular how high the surface density of the beam positions is, and whether the surface density of the beam positions in the beam region is uniform, i.e., in particular constant or variable, and whether and possibly how the surface density of the beam positions in the beam region changes. Here, the higher the local intensity in the beam region, the higher the surface density of the beam positions, where the lower the local intensity, the lower the surface density of the beam positions. The beam position density distribution is preferably in particular derived from the spacing between adjacent beam positions within the beam region.

[0022] The frequency distribution of the beam positions is in particular understood as a measure of the frequency with which an energy beam moves to or irradiates the individual beam positions within the beam area. In particular, a configuration is possible in which the energy beam (which may have a constant dwell time at different beam positions) reaches at least some of the beam positions in the beam area several times. If it is assumed that the density distribution of the beam positions in the beam area is uniform (i.e., constant), then if the energy beam moves to all beam positions with the same frequency, the intensity distribution is unchanged or has a constant intensity in the beam area. By moving the energy beam to different beam positions with different frequencies, or irradiating different beam positions with energy beams of different frequencies, an intensity distribution that deviates from constancy or uniformity can be generated. This is because more energy is deposited at the beam positions that are addressed more frequently than at the beam positions that are hit less often.

[0023] The energy or fluence of the energy beam is preferably constant over time. According to a preferred configuration, the intensity distribution within the beam area, i.e., the intensity distribution, thus depends only on the corresponding predetermination of at least one shift parameter.

[0024] In this case, it is obvious that the intensity distribution is influenced by the corresponding selection of the dwell time at the beam positions, the density distribution of the beam positions in the beam area, and / or the frequency distribution of the beam positions in the beam area.

[0025] Therefore, by correspondingly predetermining at least one shift parameter in the beam area, an intensity distribution can be generated very easily and flexibly.

[0026] Alternatively or additionally, at least one operating parameter is an intensity influencing parameter. The intensity influencing parameter is adapted to influence, in particular to change, the corresponding intensity of the energy beam that has been deflected to the beam position, in particular the energy or fluence of the energy beam.

[0027] According to a preferred configuration, in this way, in particular by appropriately predetermining the shift parameter and the intensity influencing parameter, the peripheral region of the generated intensity distribution can be smoothed, since preferably in addition to appropriately predetermining the shift parameter, the intensity of the energy beam is also appropriately changed there, in particular by incrementally or continuously decaying the intensity of the energy beam towards the periphery.

[0028] The intensity of the energy beam is preferably variable additionally or alternatively by changing the intensity of the energy beam provided by the beam generating device, in particular by appropriately controlling the beam generating device.

[0029] The control device preferably selects from a group including the following parameters: a computer, in particular a personal computer (PC), a plug-in card or a control card, and an FPGA board. In a preferred configuration, the control device is an RTC6 control card of SCANLAB GmbH, in particular the control card of the current configuration available on the priority date of this property right.

[0030] The control device is preferably arranged to synchronize the scanning device with the deflection device by means of a digital RF synthesizer, wherein the RF synthesizer is controlled via a programmable FPGA board. Additionally, preferably, the relatively slow movement of the scanning device and the fast movement of the deflection device are separated by means of a frequency divider. Preferably, the position values and predetermined values of the beam distribution are calculated, that is, the intensity distribution and the shape of the beam area, and then they are converted into a time synchronization frequency preset of the RF synthesizer in the FPGA board. Before doing so, it is necessary to allocate the beam distribution space to an irradiation position in a corresponding powder material layer, which is preferably already executed in the construction processor. The construction processor writes the corresponding data into a file, which is then preferably used by the control device. Alternatively or additionally, it is preferably possible to select from a predetermined beam distribution.

[0031] According to a further aspect of the invention, the control device is arranged to change the intensity distribution by changing at least one operating parameter, in particular at least one shift parameter and / or at least one intensity influencing parameter. Thus, the intensity distribution can be advantageously adapted particularly appropriately in an easy and rapid manner.

[0032] According to a further aspect of the invention, the control device is arranged to generate an intensity distribution as a Gaussian intensity distribution. This can in particular also be a Gaussian distribution elongated along a direction within the working area, wherein in a preferred configuration, the longest range axis of the Gaussian distribution can extend perpendicular to the irradiation path of the energy beam, that is, perpendicular to the determined local shift direction of the energy beam in the working area, or along the irradiation path of the energy beam. Of course, the longest range axis of the Gaussian distribution can also extend at an angle to the irradiation path.

[0033] Alternatively, the intensity distribution can be generated as a non-Gaussian intensity distribution.

[0034] Alternatively or additionally, the control device is arranged to generate an intensity distribution as a constant intensity distribution, in particular to generate the intensity distribution in the form of a flat-top beam.

[0035] Alternatively or additionally, the control device is arranged to generate an intensity distribution as an asymmetric or distorted intensity distribution.

[0036] Thus, the control device is particularly capable of generating a variety of different intensity distributions, in particular any intensity distribution.

[0037] According to a further aspect of the invention, the control device is arranged to additionally predetermine the shape of the beam area by controlling the deflection device.

[0038] The shape of the beam area is here in particular understood as the geometry of the outer boundary of the beam area, or equivalently, the shape of the quasi-static surface within the beam area swept by the energy beam. This corresponds to the quasi-static cross-sectional distribution of the energy radiation with which the corresponding irradiation positions of the working area are irradiated.

[0039] The control device is preferably arranged to generate the shape of the beam area as a circular shape, an annular shape (in particular a toroidal or circular ring shape), a polygon, a rectangle, in particular an elongated shape with rounded ends and / or an irregular shape.

[0040] The control device is preferably in particular arranged to predetermine the beam distribution by controlling the deflection device, wherein the beam distribution includes the shape of the beam area and in addition also the intensity distribution within the beam area. Thus, the manufacturing device can particularly flexibly adapt the irradiation of the working area using the energy beam to the conditions of the manufactured component, in particular also to changing conditions, in particular locally different conditions.

[0041] According to a further aspect of the invention, the control device is arranged to change the intensity distribution during the manufacture of the component, in particular within the working area, by changing at least one operating parameter, in particular at least one displacement parameter and / or at least one intensity influencing parameter. In this way, the intensity distribution can be flexibly adapted to different conditions or requirements during component manufacture. Particularly preferably, the control device is arranged to change the intensity distribution within the same powder material layer by changing at least one operating parameter during the layer-by-layer construction of the component. This enables a very particularly flexible adaptation of the intensity distribution. For example, a different intensity distribution can be selected for the peripheral region of the produced component, i.e. in particular its surface, than for the inner region within the peripheral region of the component.

[0042] Alternatively or additionally, the control device is preferably arranged to change the shape of the beam area during the manufacture of the component, in particular within the working area, by changing at least one operating parameter, in particular at least one displacement parameter and / or at least one intensity influencing parameter. In this way, the shape of the beam area can be flexibly adapted to different conditions or requirements during component manufacture. Particularly preferably, the control device is arranged to change the shape of the beam area within the same powder material layer by changing at least one operating parameter during the layer-by-layer construction of the component. This enables a very particularly flexible adaptation of the shape of the beam area. For example, a different beam area shape can be selected for the peripheral region of the produced component than for the inner region within the peripheral region of the component.

[0043] Alternatively or additionally, the intensity distribution and / or the shape of the beam area can be selected in particular depending on whether the contour, core, overhang area, covering layer area or body area of the produced component is machined.

[0044] In this case, the contour is the boundary or outer boundary of the area to be cured or already cured within the powder material layer. The core is the area inside the contour of the powder material layer.

[0045] The overhang area is the area within the powder material layer below which, i.e. in the powder material layer located below this area, there is uncured powder material. Such an overhang is also referred to as "down skin". This term also denotes the lowermost powder material layer including the cured powder material, i.e. the bottom surface of the component.

[0046] The covering layer area is the area within the powder material layer above which, i.e. in the powder material layer located above this area, there is uncured powder material. Such a covering layer area is also referred to as "up skin". This term also denotes the uppermost powder material layer still including the cured powder material, i.e. the top surface or uppermost surface of the component.

[0047] The body area is the area within the powder material layer which is surrounded by cured powder material on all sides, in particular within the powder material layer but also above and below the freshly machined powder material layer in the finished component. Such an area is also referred to as "in skin".

[0048] For fine structures of components, for example of the order of magnitude of the beam area, as well as for coarser structures, larger structures, in particular two-dimensional structures, different intensity distributions and / or shapes of the beam area can also be used. If appropriate, fine structures, in particular included structural segments, can be produced by controlling only the deflection device and generating a local beam distribution at a fixed irradiation position, without the need to control the scanning device, in particular by generating a beam distribution in the form of the structural segments to be formed by appropriate control of the deflection device.

[0049] The predetermination of the intensity distribution depending on the instantaneous irradiation position and / or the shape of the beam area also makes it possible to influence the produced component structure via the intensity distribution situation. For example, when irradiating under changed temperature gradients and curing conditions, the grain structure of the produced component changes. In this way, in particular, it is also possible to influence, in particular locally change, local intensity values or surface hardness.

[0050] In particular, the outer surface of the component can be hardened by curing powder material that generates greater hardness in the upper or lower skin region of a plurality of powder material layers arranged directly below or above it. Correspondingly, the contour lines can also be cured to have greater hardness over a wider range in each powder material layer.

[0051] According to a further aspect of the invention, the deflection device is arranged upstream of the scanning device in the direction of propagation of the energy beam, that is to say in the direction of propagation of the energy radiation in space. This represents a particularly suitable configuration for flexibly generating the intensity distribution and / or the shape of the beam area. Here, the term "upstream" means that when the energy beam propagates along the propagation direction, the energy beam first reaches the deflection device, whereupon the energy beam then reaches the scanning device.

[0052] According to a further aspect of the invention, the deflection device has at least one acousto-optic deflector.

[0053] In particular, an acousto-optic deflector is understood to be an element having a solid body that is transparent to the energy beam and to which sound waves, in particular ultrasonic waves, are applied, where the energy beam is deflected in a manner depending on the frequency of the sound waves applied to the transparent solid body when passing through the transparent solid body. In the process, in particular, a grating is generated by the sound waves in the transparent solid body. Advantageously, such an acousto-optic deflector can deflect the energy beam through an angular range very quickly, the angular range being predetermined by the frequency of the sound waves generated in the transparent solid body. In particular, a switching speed of up to 1 MHz can be obtained in the process. In particular, the switching time of such an acousto-optic deflector is significantly faster than the typical switching time of conventional scanner optical units, in particular galvanometer scanners, which are typically used to displace the energy beam within the working area of manufacturing devices of the type discussed here. Therefore, such an acousto-optic deflector can be particularly suitable for generating a quasi-static intensity distribution in the beam area.

[0054] The efficiency of a modern acousto-optic deflector in deflecting the energy beam into a predetermined angular range of first-order diffraction is at least 90%, so such an acousto-optic deflector is very suitable as a deflection device for the manufacturing device proposed here. In particular, the material used that is transparent to the energy beam and the appropriately high-intensity input-coupled ultrasonic waves are decisive for the high efficiency.

[0055] According to a preferred configuration, an intensity influencing parameter is predetermined by operating or using at least one acousto-optic deflector as an acousto-optic modulator. Alternatively or additionally, the intensity of the acoustic wave in the transparent solid body coupled to at least one acousto-optic deflector is preferably predetermined as the intensity influencing parameter. In this way, the intensity of the energy beam deflected to the corresponding beam position can be influenced very easily. In particular, the deflection intensity of the energy beam is preferably related, preferably linearly related, to the intensity of the acoustic wave radiated into the transparent solid body.

[0056] In a preferred configuration, the deflection device has two acousto-optic deflectors, which are oriented non-parallel to each other, preferably perpendicular to each other. Therefore, it can be advantageous for the energy beam to be deflected in two non-parallel directions, in particular perpendicular directions, to each other. The acousto-optic deflectors oriented non-parallel to each other, preferably perpendicular to each other, are preferably arranged successively along the propagation direction of the energy beam.

[0057] Here, "downstream" is particularly understood to mean that when the energy beam propagates along the propagation direction, the energy beam reaches the element arranged downstream of the other element after the other element, similar to the definition of "upstream" given above.

[0058] In an improvement of the present invention, the deflection device has at least one electro-optic deflector, preferably two electro-optic deflectors, which are oriented non-parallel to each other, particularly perpendicular to each other. The deflection of the electro-optic deflector (EOD) is based on refraction when passing through an optically transparent material. In the case of using one or two EODs, the foregoing embodiment with acousto-optic deflectors can be changed by replacing one or two of the acousto-optic deflectors with EODs respectively.

[0059] According to a further aspect of the present invention, the control device is arranged to excite acoustic waves (acoustic waves) having at least two acoustic wavelengths, in particular standing waves, in at least one acousto-optic deflector, and preferably to change at least one of the acoustic wavelengths, in particular continuously or in discrete steps.

[0060] This is advantageous because two beam positions in the deflection direction of the deflection device can be exposed simultaneously, while the region between the two beam positions is not exposed to the laser beam. In addition, the spacing between the two beam positions can be changed by changing one of the acoustic wavelengths. Additionally, the intensity distribution of the diffracted energy beam between the first beam position and the second beam position in the beam positions can be set by setting the amplitudes of the two acoustic waves. Acoustic waves having more than two acoustic wavelengths are also conceivable, such that the diffracted energy beam can be guided to more than two positions simultaneously. Therefore, two or more positions of the energy beam can form overlapping and / or spaced-apart beam position lines.

[0061] Generally speaking, the advantage of using beam shifting with AOD is that, since the periodic variations in the refractive index merge with each other in time and basically no diffractive transition behavior is formed, the area between the starting position and the ending position is not exposed to the laser beam due to changing the acoustic wavelength in discrete steps. Accordingly, the energy input is restricted to the starting position and the ending position; this corresponds to a sudden change in acousto-optic deflection.

[0062] In a preferred configuration, the control device is arranged to also excite acoustic waves, in particular standing waves, having at least two acoustic wavelengths in the second acousto-optic deflector, preferably to change at least one of the acoustic wavelengths, in particular continuously or in discrete steps.

[0063] In addition to the aforementioned advantages, this enables the diffracted energy beam to be guided to beam positions arranged in a grid simultaneously. In the simplest case (where two acousto-optic deflectors are oriented perpendicular to each other and each has two different wavelengths), for example, a grid of four beam positions can be created, and the beam positions are arranged at the corners of a rectangle. However, more complex grids with more than two beam positions in one or both directions of the grid are also conceivable. In addition, the intensity distribution of the diffracted energy beam can also be set independently of each other by setting the amplitudes of multiple acoustic wavelengths in each of the acousto-optic deflectors. The orientation of the acousto-optic deflectors relative to each other can also be changed, whereby, for example, a grid in the shape of a rhombus or a parallelogram can be formed by four beam positions.

[0064] According to a further aspect of the invention, the manufacturing device has a beam splitter mirror downstream of the deflection device and upstream of the scanning device along the propagation direction of the energy beam, and the beam splitter mirror is arranged to separate the zero-order split beam and the first-order split beam of the energy beam. In particular, if the deflection device has an acousto-optic deflector, the deflection device produces a non-diffracted zero-order split beam and a diffracted or deflected first-order split beam due to its grating-like configuration. Only the first-order split beam is intended for irradiating the working area. With the aid of the beam splitter mirror, the split beams of different orders can then be advantageously separated from each other, and in doing so, only the first-order split beam is transmitted to the working area, in particular to the scanning device. The zero-order split beam is preferably deflected by the beam splitter mirror into the beam trap.

[0065] This implementation is correct for the use of exactly one acousto-optic deflector. In a preferred configuration, if two acousto-optic deflectors are used that are not oriented parallel to each other, preferably perpendicular to each other, the corresponding diffraction orders should also be considered cumulatively: as the useful beam, the ultimate intention is to use the split beam, which initially impinges on the second acousto-optic deflector as the first-order split beam of the first acousto-optic deflector and is then diffracted again by the second acousto-optic deflector as the first-order split beam. In this case, the useful beam as the "first-order split beam" can be said to be the first first-order split beam. To keep the implementation simple, only the first order is mentioned hereinafter.

[0066] In particular, the separation mirror preferably has a through hole in the surface that is reflective for the energy beam, and the first-order split beam passes through the through hole of the separation mirror towards the working area, in particular towards the scanning device. In contrast, the zero-order split beam, preferably also the unwanted split beams of higher orders than the first order, impinge on the reflective surface and are deflected by the separation mirror into the beam trap.

[0067] Preferably, the separation mirror is arranged near the intermediate focus of the telescope. This enables the split beams of different orders to be separated particularly clearly.

[0068] Preferably, the separation mirror is not arranged exactly at the intermediate focus of the telescope, in particular in order to avoid damage to the separation mirror due to too high a power density of the energy beam.

[0069] Preferably, the separation mirror is arranged at a spacing of one-fifth of the focal length of the telescope offset from the intermediate focus along the propagation direction, preferably offset in front of the intermediate focus along the propagation direction. This ensures, first, the clear separation of the different split beams of different orders and, second, that the power density of the energy beam on the separation mirror is low enough to avoid damage to the separation mirror by the energy beam.

[0070] The telescope is preferably a 1:1 telescope, i.e., in particular, it has neither the characteristic of reducing the beam nor the characteristic of magnifying the beam. In particular, the telescope performs two tasks. Specifically, in addition to separating the different split beams of different orders, it preferably images the beam rotation point (also called the pivot point) to a point downstream along the propagation direction of the telescope, where the imaged beam rotation point is preferably located at the pivot point of the downstream scanning device or at the point of the minimum aperture.

[0071] Strictly speaking, this consideration also only applies to the use of a single acousto-optic deflector. If two acousto-optic deflectors are used that are not oriented parallel to each other, preferably perpendicular to each other, two beam rotation points are obtained, specifically, one beam rotation point for each acousto-optic deflector. However, if the two acousto-optic deflectors are arranged as close as possible one downstream of the other along the propagation direction, a single, imaginary common beam rotation point can be assumed very approximately and then arranged between the acousto-optic deflectors.

[0072] According to a further aspect of the invention, the scanning device has at least one scanner, in particular a galvanometer scanner, a piezoelectric scanner, a polygon scanner, a MEMS scanner and / or a working head or processing head displaceable relative to the working area. The scanning device proposed here is particularly suitable for displacing an energy beam between a plurality of irradiation positions within the working area.

[0073] A working head or processing head displaceable relative to the working area is here in particular understood as an integrated component of a manufacturing device, which integrated component has at least one radiation outlet for at least one energy beam, wherein the integrated component (i.e. the working head) as a whole is displaceable relative to the working area along at least one displacement direction, preferably along two mutually perpendicular displacement directions. Such a working head can in particular be implemented in a gantry design or be guided by a robot. The working head can in particular be configured as a robot's manipulator.

[0074] According to a further aspect of the invention, the beam generating device is configured as a laser. Thus, the energy beam is advantageously generated as a strong beam of coherent electromagnetic radiation, in particular a strong beam of coherent light.

[0075] According to a further aspect of the invention, the manufacturing device is provided for selective laser sintering. Alternatively or additionally, the manufacturing device is provided for selective laser melting. The configuration of the manufacturing device has proven to be particularly advantageous.

[0076] According to a further aspect of the invention, the manufacturing device is provided such that the time scalar for deflecting the energy beam by the deflection device is 10 to 1000 times, preferably 20 to 200 times, preferably 40 to 100 times, or more times smaller than the time scalar for deflecting the energy beam by the scanning device. Of course, in addition to the deflection device, the scanning device can also be provided with a very high dynamics of the same order of magnitude as the deflection device, but the productivity increase achievable thereby is typically disproportionate to the required additional costs, so that for example it is sufficient for the scanning device to have one of the embodiments in the foregoing examples and only the deflection device can deflect on one of the foregoing shorter time scalars.

[0077] This task is also solved by providing a method for generating a defined intensity distribution of an energy beam in a beam area on a working area of a manufacturing device, which manufacturing device is used for the additive manufacturing of components from powder materials. In a first alternative, a defined intensity distribution is generated here by shifting the energy beam within the beam area and predetermining at least one operating parameter of the energy beam, where the at least one operating parameter is selected from the group comprising the following parameters: the dwell time of the beam position in the beam area, the beam position density distribution in the beam area, the frequency distribution of the beam positions in the beam area, and an intensity influencing parameter for influencing the deflection of the energy beam to the respective intensity of the beam position. In a second alternative or additionally, a defined intensity distribution is generated by allocating the energy beam, whereby the energy beam is simultaneously shifted to at least two beam positions, where the spacing between the two beam positions is variable in at least one direction. In particular, the advantages already described in connection with the manufacturing device result from the method described above.

[0078] According to a further aspect of the invention, a defined shape of the beam area is additionally generated by predetermining at least one operating parameter. Thus, the intensity distribution and the defined shape of the beam area can be generated in a highly flexible manner.

[0079] According to a further aspect of the invention, the shape and / or the intensity distribution of the beam area is / are changed by changing at least one operating parameter. In this way, the beam area can be highly flexibly adapted in its shape and / or its intensity distribution, in particular to match existing requirements and / or to increase productivity.

[0080] According to a further aspect of the invention, an intensity distribution is additionally generated, preferably modified, by changing the intensity of the energy beam provided by the beam generation device, in particular by controlling the beam generation device. Advantageously, another degree of freedom is thus available for influencing the intensity of the energy beam. If a laser that can easily and quickly change the intensity of the generated energy beam is used as the beam generation device, this influence can be achieved in a particularly simple manner.

[0081] According to a further aspect of the invention, the time scalar during which the energy beam is deflected by the deflection device within the beam area is 10 to 1000 times, preferably 20 to 200 times, preferably 40 to 100 times, or more times smaller than the time scalar during which the energy beam is deflected by the scanning device. In particular, the advantages already described in the embodiments of the manufacturing device result from the method described above.

[0082] Finally, the task is also achieved by providing a method for additive manufacturing of components from powder materials. The manufacturing device according to the invention, or a manufacturing device according to any of the foregoing embodiments, is used in combination with the method. Alternatively or additionally, the method according to the invention for generating a defined intensity distribution of an energy beam, or such a method according to any of the foregoing embodiments, is used in combination with the method. In combination with the method for additive manufacturing, in particular, the advantages already described in connection with the manufacturing device and / or the method for generating a defined intensity distribution are obtained.

[0083] In a preferred configuration, during the manufacturing of the component, in particular within the working area, in particular within the same powder material layer during the layer-by-layer construction of the component, the shape and / or the intensity distribution of the beam area is changed by changing at least one operating parameter. Description of the Drawings

[0084] The present invention will be explained in detail below with the aid of the drawings, in which:

[0085] Figure 1 A view of an embodiment of a manufacturing device for additive manufacturing of components from powder materials is shown;

[0086] Figure 2 A schematic illustration of different intensity distributions is shown,

[0087] Figure 3 A schematic illustration of a plurality of different shapes of the beam area is shown, and

[0088] Figure 4 A schematic illustration for explaining electro-optical deflection in additive manufacturing is shown. Detailed Description of the Invention

[0089] Figure 1 A schematic illustration of an embodiment of a manufacturing device 1 is shown, which is configured for additive manufacturing of components from powder materials. The manufacturing device 1 has a beam generation device 3, which is configured to generate an energy beam 5. The manufacturing device 1 also has a scanning device 7, which is configured to displace the energy beam 5 to a plurality of irradiation positions 11 within the working area 9 in order to manufacture a component from the powder material arranged in the working area 9 by means of the energy beam 5.

[0090] The manufacturing device 1 has a deflection device 13, which is configured to displace the energy beam 5 at one of the plurality of irradiation positions 11 within the beam area 15 to a plurality of beam positions 17.

[0091] The manufacturing device 1 has a control device 19, which is operatively connected to the deflection device 13, and the control device is configured to control the deflection device 13 and to generate a defined intensity distribution in the beam region 15 by means of at least one operating parameter of the predefined deflection device 13. Here, the at least one operating parameter is selected from the group comprising the following parameters: the dwell time at the beam position 17, the beam position density distribution in the beam region 15, the frequency distribution of the beam positions 17, and an intensity influencing parameter for influencing the intensity of the energy beam 5 deflected to the beam position 17 respectively.

[0092] In this way, a defined intensity distribution, in particular as a quasi-static intensity distribution, can be achieved in a simple and highly flexible manner, wherein in particular even complex intensity distributions which can only be achieved very difficultly or not at all with conventional beam shaping elements, in particular as a static intensity distribution, can be easily achieved.

[0093] At least one operating parameter of the deflection device is in particular a displacement parameter or an intensity influencing parameter.

[0094] The control device 19 is in particular configured to change the intensity distribution by changing at least one operating parameter.

[0095] The control device 19 is in particular configured to generate an intensity distribution as a Gaussian intensity distribution, a non-Gaussian intensity distribution, a constant intensity distribution, an asymmetric or distorted intensity distribution.

[0096] The control device 19 is in particular configured to additionally predetermine the shape of the beam region 15, wherein the control device 19 is configured to predetermine a beam distribution, in particular by controlling the deflection device 13, which beam distribution comprises the shape of the beam region 15 and the intensity distribution in the beam region 15.

[0097] The control device 19 is in particular configured to change the intensity distribution and / or the shape of the beam region 15 during the manufacture of the component, in particular within the working area 9, by changing at least one operating parameter. This can in particular be carried out within the same powder material layer, for example in order to expose different regions of the powder material layer (in particular an enclosing region on the one hand and an inner region on the other hand) to different intensity distributions and / or shapes of the beam region. Alternatively or additionally, the intensity distribution and / or the shape of the beam region can in particular be selected depending on whether the contour, the core, the overhang region, the covering layer region or the main body region of the component produced is being machined.

[0098] The deflection device 13 is in particular arranged upstream of the scanning device 7 in the propagation direction of the energy beam 5.

[0099] The deflection device 13 in particular has at least one acousto-optic deflector 21, in particular two acousto-optic deflectors 21, which are oriented non-parallel to each other, preferably perpendicular to each other, specifically a first acousto-optic deflector 21.1 and a second acousto-optic deflector 21.2. In particular, the acousto-optic deflectors 21 oriented perpendicular to each other allow the energy beam 5 to be deflected in two mutually perpendicular directions, and thus in particular allow two-dimensional scanning of the beam region 15. The acousto-optic deflector 21 is preferably additionally controlled as an acousto-optic modulator, and / or the intensity of the acoustic wave in the transparent solid body of at least one of the two acousto-optic deflectors 21 is changed in order to change the intensity of the energy beam 5.

[0100] The manufacturing device 1 also has a beam splitter mirror 23 downstream of the deflection device 13 and upstream of the scanning device 7 along the propagation direction of the energy beam 5, which is arranged to separate the zero-order beam split of the energy beam 5 from the first-order beam split. For this purpose, the beam splitter mirror 23 has a through hole 25, in particular the through hole is arranged in the surface 27 of the beam splitter mirror 23, which surface is reflective for the energy beam 5, and the through hole completely penetrates the beam splitter mirror 23. In this case, the first-order beam split that is intended to be transmitted to the scanning device 7 in the desired manner is guided through the through hole 25 and thus finally reaches the scanning device 7. In contrast, the unwanted zero-order beam split and optionally also unwanted higher-order beam splits impinge on the reflective surface 27 and are deflected into the beam trap 29.

[0101] The beam splitter mirror 23 is in particular arranged near the intermediate focus 31 of the telescope 33, in particular not exactly in the plane of the intermediate focus 31, and is particularly preferably arranged at a spacing offset by one fifth of the focal length of the telescope 33 along the propagation direction, in particular offset in front of the intermediate focus 31. Advantageously, this prevents the reflective surface 27 from being impacted by an excessive power density of the energy beam 5.

[0102] The telescope 33 preferably has a first lens 35 and a second lens 37. The telescope is preferably designed as a 1:1 telescope. Preferably, the telescope 33 has a focal length of 500 mm.

[0103] The function of the telescope 33 is preferably twofold: firstly, the telescope 33 enables the energy beams 5 of different orders deflected by the deflection device 13 to be separated particularly advantageously and clearly, especially also in the case of the arrangement of the beam splitter mirror 23 selected here; secondly, the telescope 33 preferably images the imaginary, common beam rotation point 39 of the deflection device 13 advantageously onto the pivot point 41 of the scanning device 7.

[0104] Alternatively, the telescope 33 preferably images the beam rotation point 39 onto the point of minimum aperture.

[0105] For a compact arrangement of the manufacturing device 1 to be facilitated, the energy beam 5 is preferably deflected multiple times by the deflection mirror 43.

[0106] The scanning device 7 preferably has at least one scanner, in particular a galvanometer scanner, a piezoelectric scanner, a polygon scanner, a MEMS scanner, and / or a working head.

[0107] The beam generation device 3 is preferably configured as a laser.

[0108] The manufacturing device 1 is preferably provided for selective laser sintering and / or for selective laser melting.

[0109] As part of a method for generating a defined intensity distribution of the energy beam 5 in the beam region 15 on the working area 9, the defined intensity distribution is preferably generated by at least one operating parameter of a predetermined energy beam, the at least one operating parameter being selected from the group comprising the following parameters: the dwell time of the beam position 17 in the beam region 15, the density distribution of the beam positions in the beam region 15, the frequency distribution of the beam positions 17 in the beam region 15, and the intensity influencing parameter for influencing the intensity of the energy beam 5 deflected to the beam position 17 respectively.

[0110] Additionally, the defined shape of the beam region 15 is preferably generated by a predetermined at least one operating parameter.

[0111] The shape and / or intensity distribution of the beam region 15 is preferably changed by changing at least one operating parameter.

[0112] As part of a method for additive manufacturing of a component from a powder material, the manufacturing device 1 proposed here is preferably used, and / or a method of the aforementioned type is used. Preferably, during the manufacturing of the component, in particular within the working area 9, the shape and / or intensity distribution of the beam region 15 is changed by changing at least one operating parameter.

[0113] By changing the intensity of the energy beam 5 provided by the beam generation device 3, in particular by controlling the beam generation device 3, an intensity distribution is preferably additionally generated and preferably changed.

[0114] Figure 2 A schematic view shows a plurality of intensity distributions generated, for example, by the deflection device 13 in the beam region 15.

[0115] Here, a) shows a first Gaussian intensity distribution 45.

[0116] In b), a second non-Gaussian intensity distribution 47 is shown, wherein in particular the maximum of the intensity distribution moves within the beam region 15, preferably towards the front in the shift direction of the beam region 15 on the working area 9.

[0117] In c), a third asymmetric or distorted intensity distribution 49 is shown, in which not only is the maximum value, in particular, arranged eccentrically within the beam region 15, but also the intensity in the intensity distribution is much higher on the right than on the left within the beam region 15.

[0118] Figure 3 Schematic views of various shapes of the beam region 15 are shown.

[0119] In this case, in a), a first circular shape 51 of the beam region 15 is shown.

[0120] In b), a second polygonal, in particular hexagonal, shape 53 of the beam region 15 is shown.

[0121] In c), a third rectangular shape 55 of the beam region 15 is shown.

[0122] In d), a fourth elongated shape 57 of the beam region 15 with rounded ends is shown.

[0123] Finally, in e), a fifth annular, toroidal or circular-ring shape 59 of the beam region 15 is shown.

[0124] Figure 4 The adjustable deflection of the energy beam 5 by means of the EOD 131 is schematically shown, wherein by applying a voltage, the refractive index or the refractive-index gradient of the optically transparent material of the EOD 131 is adjustable. The deflection of the laser beam 133 varies according to the applied voltage, and the laser beam preferably impinges again on the EOD 131 at the Brewster angle and exits from the EOD at a correspondingly adjustable deflection angle. Thus, the deflected laser beam 133A can be transmitted to Figure 1 the scanning device 7 in the arrangement of. The voltage source 135 enables precise adjustment of the voltage, which is applied, for example, between the upper and lower sides of the prismatic crystal forming Figure 3 the EOD 131 in. The refractive index or the refractive-index gradient and thus the deflection of the energy beam 5 can be adjusted according to the adjusted voltage. Supplementary reference is made to "Electro-optic and acousto-optic laser beam scanners" regarding the refractive properties present at the EOD; G.R.B.E. et al., Physics Procedia 56 (2014) 29 - 39.

Claims

1. A manufacturing device (1) for additive manufacturing of components from powder materials, having: - a beam generation device (3) configured to generate an energy beam (5), - a scanning device (7) configured to displace the energy beam (5) within a working area (9) to a plurality of irradiation positions (11) in order to manufacture a component from powder materials arranged in the working area (9) by means of the energy beam (5), - a deflection device (13) configured to displace the energy beam (5) at one of the plurality of irradiation positions (11) within a beam area (15) to a plurality of beam positions (17), and - a control device (19) operatively connected to the deflection device (13) and configured to control the deflection device (13) and to generate a defined intensity distribution within the beam area (15) by: a.) distributing the energy beam (5) in order to displace the energy beam (5) simultaneously to at least two beam positions (17), wherein the spacing between the two beam positions (17) can be variably set in at least one direction, and / or b.) displacing the energy beam (5) within the beam area (15) and predetermining at least one operating parameter of the deflection device (13), wherein the at least one operating parameter is selected from the group comprising the following parameters: dwell time at the beam positions (17), beam position density distribution within the beam area (15), frequency distribution of the beam positions (17), and an intensity influencing parameter for influencing the intensity of the energy beam (5) deflected to the respective beam positions (17), wherein the manufacturing device (1) has a separation mirror (23) downstream of the deflection device (13) and upstream of the scanning device (7) in the propagation direction of the energy beam (5), the separation mirror being configured to separate the zero - order beam splitting from the first - order beam splitting of the energy beam (5).

2. The manufacturing device (1) according to claim 1, wherein the control device (19) is configured to change the intensity distribution by changing the at least one operating parameter.

3. The manufacturing device (1) according to claim 1 or 2, wherein the control device (19) is configured to generate an intensity distribution as a Gaussian intensity distribution, non - Gaussian intensity distribution, constant intensity distribution, asymmetric or distorted intensity distribution.

4. The manufacturing device (1) according to claim 1 or 2, wherein the control device (19) is configured to additionally predetermine the shape of the beam area (15) by controlling the deflection device (13).

5. The manufacturing device (1) according to claim 1 or 2, wherein the control device (19) is configured to change the intensity distribution and / or the shape of the beam area (15) by changing the at least one operating parameter during the manufacturing of the component.

6. The manufacturing device (1) according to claim 1 or 2, wherein The deflection device (13) is arranged upstream of the scanning device (7) in the propagation direction of the energy beam (5).

7. The manufacturing device (1) according to claim 1 or 2, wherein, the deflection device (13) has at least one acousto-optic deflector (21).

8. The manufacturing device (1) according to claim 1 or 2, wherein, the deflection device (13) has at least one electro-optic deflector (21).

9. The manufacturing device (1) according to claim 7, wherein, the control device (19) is configured to excite acoustic waves with at least two acoustic wavelengths in the at least one acousto-optic deflector (21).

10. The manufacturing device (1) according to claim 1 or 2, wherein, the scanning device (7) has at least one scanner and / or a working head displaceable relative to the working area (9).

11. The manufacturing device (1) according to claim 1 or 2, wherein, the beam generating device (3) is configured as a laser.

12. The manufacturing device (1) according to claim 1 or 2, wherein, the manufacturing device (1) is configured for selective laser sintering and / or for selective laser melting.

13. The manufacturing device (1) according to claim 1 or 2, wherein, the time scalar by which the energy beam (5) can be deflected by the deflection device (13) is 10 to 1000 times smaller than the time scalar by which the energy beam (5) is deflected by the scanning device (7).

14. The manufacturing device (1) according to claim 1, wherein, the beam splitter mirror (23) is arranged near the intermediate focus (31) of the telescope (33).

15. The manufacturing device (1) according to claim 1, wherein, the beam splitter mirror (23) is arranged near the intermediate focus (31) of the telescope (33) and is arranged to be offset by a distance of 1 / 5 focal length relative to the intermediate focus (31) along the propagation direction.

16. The manufacturing device (1) according to claim 4, wherein, the control device (19) is configured to predetermine a beam distribution by controlling the deflection device (13), the beam distribution including the shape of the beam region and the intensity distribution in the beam region (15).

17. The manufacturing device (1) according to claim 1 or 2, wherein, the control device (19) is configured to change the intensity distribution and / or the shape of the beam region (15) by changing the at least one operating parameter within the working area (9) during the manufacture of a component.

18. The manufacturing device (1) according to claim 7, wherein, the deflection device (13) has two acousto-optic deflectors (21) oriented non-parallel to each other.

19. The manufacturing device (1) according to claim 7, wherein, the deflection device (13) has two acousto-optic deflectors (21) oriented perpendicular to each other.

20. The manufacturing device (1) according to claim 8, wherein, the deflection device (13) has two electro-optic deflectors (21) oriented non-parallel to each other.

21. The manufacturing device (1) according to claim 8, wherein, the deflection device (13) has two electro - optical deflectors (21) oriented perpendicular to each other.

22. The manufacturing device (1) according to claim 9, wherein, the acoustic wave is a standing wave.

23. The manufacturing device (1) according to claim 9, wherein, the control device (19) is arranged to change at least one of the acoustic wavelengths.

24. The manufacturing device (1) according to claim 9, wherein, the control device (19) is arranged to change at least one of the acoustic wavelengths continuously or in discrete steps.

25. The manufacturing device (1) according to claim 10, wherein, the scanner is a galvanometer scanner, a piezoelectric scanner, a polygon scanner or a MEMS scanner.

26. The manufacturing device (1) according to claim 1 or 2, wherein, the time scalar for the energy beam (5) to be deflected by the deflection device (13) is 20 to 200 times smaller than the time scalar for the energy beam (5) to be deflected by the scanning device (7).

27. The manufacturing device (1) according to claim 1 or 2, wherein, the time scalar for the energy beam (5) to be deflected by the deflection device (13) is 40 to 100 times smaller than the time scalar for the energy beam (5) to be deflected by the scanning device (7).

28. A method for generating a defined intensity distribution of an energy beam (5) in a beam region (15) on a working area (9) of a manufacturing device (1) according to claims 1 to 27, wherein, the defined intensity distribution is generated by: a.) distributing the energy beam (5), whereby the energy beam (5) is simultaneously shifted to at least two beam positions (17), wherein the spacing between the two beam positions (17) can be variably set in at least one direction, and / or b.) shifting the energy beam (5) within the beam region (15) and predetermining at least one operating parameter of the energy beam (5), wherein the at least one operating parameter is selected from the group consisting of: the residence time at the beam position (17) in the beam region (15), the beam position density distribution in the beam region (15), the frequency distribution of the beam positions (17) in the beam region (15), and an intensity influencing parameter for influencing the intensity of the energy beam (5) deflected to the beam position (17) respectively.

29. The method according to claim 28, wherein, additionally, a defined shape of the beam region (15) is generated by predetermining the at least one operating parameter.

30. The method according to claim 28 or 29, wherein, the shape and / or the intensity distribution of the beam region (15) is changed by changing the at least one operating parameter.

31. The method according to claim 28 or 29, wherein, additionally, the intensity distribution is generated or changed by changing the intensity of the energy beam (5) provided by the beam generating device (3).

32. The method according to claim 28 or 29, wherein, the time scalar for deflecting the energy beam (5) by the deflection device (13) within the beam region (15) is 10 to 1000 times smaller than the time scalar for deflecting the energy beam (5) by the scanning device (7).

33. The method according to claim 32, wherein, the intensity distribution is generated or changed by controlling the beam generation device (3).

34. The method according to claim 28 or 29, wherein, the time scalar for deflecting the energy beam (5) by the deflection device (13) within the beam region (15) is 20 to 200 times smaller than the time scalar for deflecting the energy beam (5) by the scanning device (7).

35. The method according to claim 28 or 29, wherein, the time scalar for deflecting the energy beam (5) by the deflection device (13) within the beam region (15) is 40 to 100 times smaller than the time scalar for deflecting the energy beam (5) by the scanning device (7).

36. A method for additive manufacturing of a component from powder material, wherein, a manufacturing device (1) according to any one of claims 1 to 27 is used, and / or a method according to any one of claims 28 to 35 is used, wherein the shape and / or the intensity distribution of the beam region (15) is changed by changing the at least one operating parameter within the working area during the manufacturing of the component.

Images