Substrate transport device

Abstract

The present invention provides a substrate transport device that changes from a mode of individually supplying and adjusting a lubricating liquid toward a bearing portion provided at a transport shaft to an integrated mode of uniformly supplying and adjusting the lubricating liquid, can make the immersion capacity with the bearing portion uniform, improve the lubrication and cleaning quality, and eliminate a power module for supplying the lubricating liquid, simplify a complicated piping structure, and thus can reduce the risk of leakage. To this end, the present invention includes a bearing housing rotatably supporting a transport shaft with a bearing as a medium and having a lubricating liquid storage portion in which a lubricating liquid is filled at a first liquid level, and a lubricating liquid supply portion supplying the lubricating liquid to the lubricating liquid storage portion. The present invention discloses the following features, that is, the lubricating liquid supply portion includes a supply tank communicating with the lubricating liquid storage portion through a supply flow path and filled with a lubricating liquid at a second liquid level, and a liquid level adjusting portion keeping the first liquid level and the second liquid level the same.

Description

TECHNICAL FIELD

[0001] The present invention relates to a substrate transfer device, and more particularly, to a substrate transfer device in which a mode of individually supplying and adjusting a lubricating liquid from a bearing part provided at a transfer shaft where a substrate is transferred is changed to an integrated mode of uniformly supplying and adjusting a lubricating liquid, so that a dipping capacity of a lubricating liquid of each bearing can be uniformed to improve a lubrication and cleaning quality, and a power module for supplying a lubricating liquid can be excluded to simplify a complicated piping structure, so that a risk of a leak can be reduced. BACKGROUND

[0002] A flat panel display device goes through a variety of processing procedures, such as an evaporation procedure for forming a thin film or a pattern on a process substrate, a baking procedure, a polishing procedure, a developing procedure, and an etching procedure, etc.

[0003] Among the above-mentioned various substrate processing procedures, a substrate transfer device for transferring a process substrate to each processing procedure and device must be provided in terms of automation and efficiency.

[0004] The substrate transfer device basically includes a transfer shaft having a transfer roller supporting a substrate, and such a transfer shaft uses a bearing to reduce a rotational resistance. Also, the bearing is designed to be kept in a state of being dipped in a lubricating liquid to reduce friction and clean foreign substances generated by the friction.

[0005] Figure 1 is a schematic view shown centering on a bearing housing and a lubricating liquid supply part of a conventional substrate transfer device.

[0006] REFERENCE Figure 1 The conventional substrate transfer device is configured to include a transfer shaft 1, a bearing housing 3 rotatably supporting the transfer shaft 1 with a bearing B as a medium and filled with a lubricating liquid for cleaning and lubrication of the bearing B, a lubricating liquid supply part 4 supplying the lubricating liquid to the bearing housing 3, and a lubricating liquid discharge part 6 discharging the lubricating liquid of the bearing housing 3.

[0007] Such a conventional substrate transfer device has the following problems.

[0008] First, a supply flow path 5 connecting the bearing housing 3 and the lubricating liquid supply part 4 and a discharge flow path 7 connecting the bearing housing 3 and the lubricating liquid discharge part 6 are configured by a complicated piping structure, and there is a problem in that a risk of a leak is increased due to many connection points of the complicated piping structure, and a difficulty in maintenance management is caused in turn.

[0009] In addition, at a piping connection point, the lubricating liquid can be leaked or there is a stagnant interval, and in this case, bacteria can be generated in the piping, and thus a substrate can be contaminated.

[0010] Further, flow regulating valves 8 that regulate the flow rate of the lubricating liquid are respectively provided on the supply flow paths 5 that connect the respective bearing housings 3 and the lubricating liquid supply portions 4, so that the flow rate of the lubricating liquid can be individually regulated.

[0011] Likewise, flow regulating valves (not shown) that regulate the flow rate of the lubricating liquid are respectively provided on the discharge flow paths 7 that connect the respective bearing housings 3 and the lubricating liquid discharge portions 6, so that the flow rate of the lubricating liquid can be individually regulated.

[0012] In this case, it is difficult to control the supply amount of the lubricating liquid filled in each of the large number of bearing housings 3, and there is a problem in that the amount of work for regulating and setting the supply amount of the lubricating liquid increases. If the supply amount of the lubricating liquid for each bearing housing 3 deviates, the lubrication and cleaning effect of the bearing B can be reduced.

[0013] Further, if the lubrication and cleaning quality of each bearing B provided on the transfer shaft 1 deviates, resulting in the generation of foreign matter or the like and a reduction in durability, the substrate transferred on the transfer shaft 1 can be damaged or contaminated.

[0014] As a prior art document, there is Korean Registered Patent Gazette No. 1077486 (published on October 27, 2011). SUMMARY

[0015] TECHNICAL PROBLEM

[0016] The object of the present application for solving the above-mentioned problems is to provide a substrate transfer apparatus in which the manner of individually supplying and regulating the lubricating liquid from the bearing portions provided at the transfer shaft is changed to an integrated manner of uniformly supplying and regulating the lubricating liquid, so that the immersion capacity of the lubricating liquid for each bearing can be uniform to improve the lubrication and cleaning quality, and a power module for supplying the lubricating liquid can be excluded, simplifying a complicated piping structure, so that the risk of leakage can be reduced.

[0017] The problems to be solved by the present application are not limited to the above-mentioned technical problems, and other technical problems not mentioned can be clearly understood by those skilled in the art to which the present application pertains through the following description.

[0018] MEANS FOR SOLVING THE PROBLEMS

[0019] The substrate transport apparatus according to the embodiment of the present application for solving the above problems is characterized by including: a transport shaft for transporting a substrate; a bearing housing rotatably supporting the transport shaft with a bearing as a medium, and having a lubricating liquid storage portion in which a lubricating liquid for cleaning and lubricating the bearing is filled at a first liquid level; and a lubricating liquid supply portion supplying the lubricating liquid to the lubricating liquid storage portion, wherein the lubricating liquid supply portion includes: a supply tank communicating with the lubricating liquid storage portion through a supply flow path, and filled with a lubricating liquid at a second liquid level; and a liquid level adjusting portion maintaining the first liquid level and the second liquid level the same.

[0020] In the substrate transport apparatus according to the embodiment of the present application, the liquid level adjusting portion can include: a replenishment tank filled with a lubricating liquid; and a valve provided at a discharge port of the replenishment tank, which opens the discharge port of the replenishment tank to replenish the lubricating liquid to the supply tank when the lubricating liquid filled in the supply tank is lower than the second liquid level.

[0021] At this time, the valve can be a float valve.

[0022] In the substrate transport apparatus according to the embodiment of the present application, a lubricating liquid discharge portion having a discharge tank communicating with the lubricating liquid storage portion through a discharge flow path, which discharges the lubricating liquid when the lubricating liquid filled in the lubricating liquid storage portion rises higher than the first liquid level, can be further included.

[0023] In the substrate transport apparatus according to the embodiment of the present application, a shaft frame supporting the bearing housing can be further included, and at this time, the supply flow path and the discharge flow path can be formed inside the shaft frame and the bearing housing.

[0024] Effects of the Invention

[0025] According to the present application, the way of individually supplying and adjusting the lubricating liquid from the bearing portion provided at the transport shaft can be changed to an integrated way of uniformly supplying and adjusting the lubricating liquid, so that the dipping capacity of the lubricating liquid of each bearing can be made uniform to improve the lubricating and cleaning quality.

[0026] According to the present application, the lubricating liquid of the lubricating liquid supply portion is uniformly supplied to the bearing housing side using the siphon principle, so that the power module and the valve unit for supplying and discharging the lubricating liquid can be greatly reduced in size, and thus the structure of the apparatus can be simplified and the maintenance cost can be reduced.

[0027] According to the present application, the supply flow path and the discharge flow path are integrated in the shaft frame and the bearing housing while being simplified, so that the complex piping structure can be simplified and the risk of leakage can be greatly reduced, and thus the maintenance management can be easily performed, and the damage and contamination of the substrate can be prevented.

[0028] It should be understood that the effects of the present application are not limited to the above-mentioned effects, and include all effects that can be inferred from the configurations of the present application described in the detailed description or claims of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a schematic view that illustrates a bearing housing, a lubricating liquid supply portion, and a lubricating liquid discharge portion of a conventional substrate transport apparatus as the center.

[0030] Figure 2 is a schematic view that illustrates a transport shaft of a substrate transport apparatus according to an embodiment of the present application.

[0031] Figure 3 is a schematic view that illustrates a bearing housing and a lubricating liquid supply portion of a substrate transport apparatus according to an embodiment of the present application as the center.

[0032] Figure 4 is a schematic view that illustrates a bearing housing, a lubricating liquid supply portion, and a lubricating liquid discharge portion of a substrate transport apparatus according to another embodiment of the present application as the center.

[0033] Figure 5 is a schematic view that illustrates a bearing housing and a shaft frame of a substrate transport apparatus according to another embodiment of the present application as the center.

[0034] BRIEF DESCRIPTION OF DRAWINGS

[0035] 10: Transport shaft 20: Shaft frame

[0036] 30: Bearing housing 40: Lubricating liquid supply portion

[0037] 50: Supply flow path 60: Lubricating liquid discharge portion

[0038] 70: Discharge flow path DETAILED DESCRIPTION

[0039] Hereinafter, with reference to the drawings, a preferred embodiment of the present application that can specifically achieve the above-mentioned problems will be described. In describing the present embodiment, for the same structure, the same name and the same reference numeral can be used, and additional description thereof can be omitted.

[0040] Figure 2 is a schematic view that illustrates a transport shaft of a substrate transport apparatus according to an embodiment of the present application, Figure 3 is a schematic view that illustrates a bearing housing and a lubricating liquid supply portion of a substrate transport apparatus according to an embodiment of the present application as the center.

[0041] REFERENCE Figure 2 and Figure 3According to the substrate transport apparatus of the present embodiment, the transport shaft 10, the bearing housing 30, and the lubricating liquid supply portion 40 can be included.

[0042] The transport shaft 10 can be arranged in the transport direction of the substrate, and can have a transport roller 11 that contacts the substrate.

[0043] In each of the transport shafts 10, at least both end portions can be rotatably supported by the bearing housing 30.

[0044] The bearing housing 30 can rotatably support at least both end portions of the transport shaft 10 with the bearing B as an intermediary.

[0045] The bearing housing 30 can include a lower bearing housing and an upper bearing housing, and can have a lubricating liquid storage portion 31 that is filled with the lubricating liquid L inside the lower bearing housing or the upper bearing housing. Hereinafter, only a case where the lubricating liquid storage portion is provided at the lower bearing housing will be described.

[0046] In the lubricating liquid storage portion 31, the lubricating liquid can be filled to a first liquid level height H1. That is, at least a portion of the bearing B can be dipped in the lubricating liquid.

[0047] The lubricating liquid serves to reduce the friction of the bearing B and to clean foreign matter generated by the friction, and various kinds of lubricating liquids can be used. For example, as the lubricating liquid, either DIW (Deionized Water) or IPA (Isopropyl Alcohol) can be used, or a mixed liquid obtained by diluting IPA in DIW can be used. In the case where the mixed liquid of DIW and IPA is used, even if a long period of stagnation occurs, the generation of bacteria can be suppressed.

[0048] The lubricating liquid supply portion 40 can supply the lubricating liquid to the lubricating liquid storage portion 31.

[0049] The lubricating liquid supply portion 40 does not have a separate supply module such as a pump, but can supply the lubricating liquid filled inside to the lubricating liquid storage portion 31 side using the siphon principle in an atmospheric pressure state.

[0050] The lubricating liquid supply portion 40 can include a supply tank 41 and a liquid level adjusting portion 43.

[0051] The supply tank 41 can be in communication with the lubricating liquid storage portion 31 through a supply flow path 50, and the lubricating liquid can be filled to a second liquid level height H2 inside the supply tank 41. At this time, the second liquid level height H2 can be the same as the first liquid level height H1.

[0052] That is, the lubricating liquid filled in the supply tank 41 can be naturally filled to the lubricating liquid storage portion 31 by the siphon principle at this time, and the lubricating liquid filled in the lubricating liquid storage portion 31 can continue to maintain the pre-set first liquid level height H1.

[0053] The liquid level adjusting portion 43 can maintain the second liquid level height H2 of the supply tank 41 constant to maintain the pre-set first liquid level height H1 and the second liquid level height H2 the same.

[0054] The liquid level adjusting portion 43 can include a replenishment tank 44 filled with the lubricating liquid and a valve 45 provided at a discharge port of the replenishment tank 44.

[0055] That is, when the lubricating liquid filled in the supply tank 41 changes to be lower than the second liquid level height H2, the valve 45 can open the discharge port of the replenishment tank 44 and replenish the lubricating liquid of the replenishment tank 44 to the supply tank 41.

[0056] As the valve 45, a Float valve can be used.

[0057] Figure 4 is a schematic view centering on a bearing housing, a lubricating liquid supply portion, and a lubricating liquid discharge portion of a substrate transport apparatus according to another embodiment of the present application.

[0058] Referring to Figure 4 , the substrate transport apparatus according to the present embodiment can further include a lubricating liquid discharge portion 60.

[0059] The lubricating liquid discharge portion 60 can include a discharge tank, and the discharge tank can communicate with the lubricating liquid storage portion 31 through a discharge flow path 70.

[0060] Although not illustrated, a spill valve can be provided between the discharge flow path 70 and the bearing housing 30.

[0061] Thus, when the lubricating liquid filled in the lubricating liquid storage portion 31 rises higher than the pre-set first liquid level height H1, the remaining lubricating liquid of the lubricating liquid storage portion 31 can be discharged to the discharge tank through the discharge flow path 70.

[0062] Figure 5 is a schematic view centering on a bearing housing and a shaft frame of a substrate transport apparatus according to another embodiment of the present application.

[0063] Referring to Figure 4 and Figure 5 , the substrate transport apparatus can further include a shaft frame 20 supporting the bearing housing 30.

[0064] The supply flow path 50 and the discharge flow path 70 can be formed inside the shaft frame 20 and the bearing housing 30.

[0065] The supply flow path 50 can include a main supply flow path 53 and a supply branch pipe 51, and the discharge flow path 70 can include a main discharge flow path 73 and a discharge branch pipe 71.

[0066] The main supply flow path 53 can be formed through the shaft frame 20 in a length direction to communicate with the lubricating liquid supply part 40, and the main discharge flow path 73 can be formed through the shaft frame 20 in a length direction to communicate with the lubricating liquid discharge part 60 in parallel with the main supply flow path 53.

[0067] Further, the supply branch pipe 51 branched from the main supply flow path 53 and connected to the lubricating liquid receiving part 31 and the discharge branch pipe 71 branched from the main discharge flow path 73 and connected to the lubricating liquid receiving part 31 can be formed through the shaft frame 20 and the bearing housing 30.

[0068] Accordingly, the lubricating liquid of the lubricating liquid supply part 40 can be uniformly supplied to the main supply flow paths 53 formed at the plurality of shaft frames 20 using the siphon principle, and the lubricating liquid supplied to the main supply flow path 53 can be uniformly supplied to the plurality of lubricating liquid receiving parts 31 through the plurality of supply branch pipes 51.

[0069] A sealing member for preventing leakage of the lubricating liquid flowing in the supply branch pipe 51 and the discharge branch pipe 71 can be disposed between the shaft frame 20 and the bearing housing 30.

[0070] As such, by integrally forming the supply flow path 50 connecting the bearing housing 30 and the lubricating liquid supply part 40 and the discharge flow path 70 connecting the bearing housing 30 and the lubricating liquid discharge part 60 inside the shaft frame 20 and the bearing housing 30, a conventional complicated piping structure can be simplified, and due to the simplification of the piping structure, the risk of leakage of the lubricating liquid can be greatly reduced.

[0071] Further, it is preferable that the discharge branch pipe 71 has a discharge port 72 connected to the lowest bottom surface 31b of the lubricating liquid receiving part 31. Accordingly, during the discharge of the lubricating liquid, the lubricating liquid present at the bottom surface 31b of the lubricating liquid receiving part 31 can be preferentially discharged, and when the lubricating liquid is replaced, the lubricating liquid of the lubricating liquid receiving part 31 can be completely discharged without remaining.

[0072] Further, a flow regulating valve 55 can be provided at the supply branch pipe 51 branched from the main supply flow path 53 and connected to the lubricating liquid receiving part 31, and the amount of the lubricating liquid supplied to each lubricating liquid receiving part 31 can also be individually adjusted by the flow regulating valve 55.

[0073] As described above, the substrate transport apparatus according to the present application does not separately supply and regulate the lubricating liquid toward the bearings B provided at the transport shaft 10, but adopts an integrated manner of uniformly supplying and regulating, and thus can make the impregnation amount of each of the bearings B with the lubricating liquid uniform and improve the lubrication and cleaning quality.

[0074] Further, the substrate transport apparatus according to the present application uniformly supplies the lubricating liquid of the lubricating liquid supply part 40 to the bearing housing side by the siphon principle, and thus can greatly reduce the power module and the valve unit for supplying and discharging the lubricating liquid, and thus can simplify the structure of the apparatus and greatly reduce the maintenance cost.

[0075] Further, the substrate transport apparatus according to the present application integrally forms the supply flow path 50 and the discharge flow path 70 in the shaft frame 20 and the bearing housing 30 while simplifying them, and thus can simplify the complicated piping structure and greatly reduce the risk of leakage, and thus easily perform the maintenance management, and can prevent the damage and contamination of the substrate.

[0076] As described above, the preferred embodiments of the present application have been described with reference to the accompanying drawings, however, those skilled in the art can make various modifications or changes to the present application within the scope of the concept and the field of the present application recited in the claims.

Claims

1. A substrate transport apparatus, characterized by, Comprising: a transfer shaft for transferring a substrate; a bearing housing rotatably supporting the transfer shaft with a bearing as an intermediary, and having a lubricating liquid receiving portion in which a first liquid level of lubricating liquid for cleaning and lubricating the bearing is filled; a lubricating liquid supply portion supplying lubricating liquid to the lubricating liquid receiving portion; and a shaft frame supporting the bearing housing, the lubricating liquid supply portion includes: a supply tank communicating with the lubricating liquid receiving portion through a supply flow path, and filled with a second liquid level of lubricating liquid; and a liquid level adjusting portion keeping the first liquid level and the second liquid level the same, the lubricating liquid filled in the supply tank in an atmospheric pressure state is naturally filled into the lubricating liquid receiving portion through the supply flow path using a siphon principle, and the lubricating liquid filled in the lubricating liquid receiving portion keeps the first liquid level, the shaft frame is formed with a main supply flow path and a main discharge flow path through and parallel to each other in the length direction inside, the bearing housing is formed with a supply branch pipe and a discharge branch pipe through inside, the supply branch pipe is branched from the main supply flow path and connected with the lubricating liquid receiving portion, and the discharge branch pipe is branched from the main discharge flow path and connected with the lubricating liquid receiving portion. the liquid level adjusting portion includes: a replenishment tank filled with lubricating liquid; and 2. The substrate transport apparatus of claim 1, wherein, a valve provided at a discharge outlet of the replenishment tank, and opening the discharge outlet of the replenishment tank to replenish lubricating liquid into the supply tank when the lubricating liquid filled in the supply tank is lower than the second liquid level. The valve is a float valve. Further comprising:

3. The substrate transport apparatus of claim 2, wherein, a lubricating liquid discharge portion having a discharge tank communicating with the lubricating liquid receiving portion through a discharge flow path, and discharging lubricating liquid when the lubricating liquid filled in the lubricating liquid receiving portion rises higher than the first liquid level.

4. The substrate transport apparatus of claim 1, wherein, ​ ​

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