A fixing fixture and fixing method suitable for sample tissue characterization

Abstract

The present invention provides a fixing fixture and fixing method suitable for sample tissue characterization, belonging to the technical field of sample preparation and tissue characterization, wherein the fixing fixture comprises: a base suitable for installation on an electron microscope sample stage; an inclined mounting surface provided on the base; a fixture body with a receiving space provided therein, the fixture body being suitable for sliding installation on the mounting surface or an optical microscope or a scanning electron microscope; and a stopper. The fixing fixture suitable for sample tissue characterization provided by the present invention has a base suitable for installation on an electron microscope sample stage, a receiving space provided on the fixture body, a sample being placed in the receiving space, and the sample being tested after the fixture body is installed on the base or the electron microscope sample stage. The fixture has a simple structure, is easy to manufacture, is low in cost, and is easy to use. Furthermore, the fixture body can be selected to be installed directly on the electron microscope sample stage or installed on the electron microscope sample stage through the base according to the test needs, so as to ensure the required angle for testing.

Description

Technical Field

[0001] The present invention relates to the technical field of sample preparation and tissue characterization, and in particular to a fixing fixture and a fixing method suitable for sample tissue characterization. Background Art

[0002] To analyze a material's structural characteristics and failure mechanisms, it's necessary to characterize its microstructure. With the development and application of new materials, materials with irregular shapes and large size variations require microstructure characterization. For example, the shapes and sizes of materials used in industrial gas turbines differ significantly from those used in microchips. Currently, microstructure characterization requires mechanical polishing of the sample, followed by vibration or electrolytic polishing, and chemical or electrolytic etching, as needed.

[0003] For small samples with irregular shapes, the method currently used is grinding and polishing after mounting. The disadvantage of mounting is that it is not conducive to removing the sample after polishing, so the sample cannot be conveniently electropolished or electrolytically corroded, and breaking the mounted sample is a waste of time and cannot guarantee that the sample surface will not be damaged. In addition, the conductivity of the sample will be reduced after mounting. For large samples with irregular shapes, it is difficult to ensure the surface flatness of the observed surface when the sample is polished by hand. At the same time, since it is impossible to ensure that the opposite side of the observed surface remains parallel to it, it cannot be placed horizontally on conventional OM, SEM and other equipment with the probe facing downward. This makes the preparation of irregularly shaped samples a key issue restricting tissue characterization.

[0004] For EBSD microstructure characterization of irregularly shaped samples, the heavy weight and reduced conductivity of mounted samples can easily cause sample drift during data acquisition when placed on a conventional 70° tilted EBSD stage, compromising EBSD microstructure characterization. Placing a pre-mounted sample holder on a conventional EBSD stage also presents sample drift. Furthermore, conventional EBSD stages generally cannot accommodate multiple mounted samples or pre-mounted holders simultaneously.

[0005] Electron Backscattered Diffraction (EBSD) is a technology for measuring crystal orientation based on a scanning electron microscope. It can quantitatively characterize microstructures from millimeter to nanometer scales within a scanning electron microscope. The sample observation surface needs to be at a certain angle to the horizontal direction.

[0006] A scanning electron microscope (SEM) is an observation method between a transmission electron microscope and an optical microscope. It uses a narrow, focused, high-energy electron beam to scan a sample. The interaction between the beam and the material stimulates various physical information, which is then collected, amplified, and re-imaged to characterize the microscopic morphology of the material. The sample observation surface must be parallel to the horizontal.

[0007] An optical microscope (OM) is an optical instrument that uses optical principles to magnify and image tiny objects that are indistinguishable to the human eye, allowing people to extract microstructural information. The sample observation surface needs to be parallel to the horizontal direction.

[0008] In order to solve the sample preparation and tissue characterization problems of irregularly shaped samples, it is of great significance to invent a sample preparation fixture and tissue characterization method that can meet the needs of various irregularly shaped samples and can be polished by handheld mechanical grinding or with an automatic grinding and polishing machine, while being easy to disassemble to facilitate subsequent vibration or electrolytic polishing, chemical or electrolytic corrosion. Summary of the Invention

[0009] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art of difficulty in preparing irregularly shaped samples and inability to effectively fix the samples during subsequent characterization, thereby providing a fixing fixture and fixing method suitable for sample tissue characterization.

[0010] To solve the above technical problems, the present invention provides a fixing fixture suitable for sample tissue characterization, comprising:

[0011] A base, suitable for mounting on an electron microscope sample stage;

[0012] The base is provided with an inclined mounting surface;

[0013] A fixture body, having an interior space for accommodating a sample, wherein the fixture body is adapted to be slidably mounted on the mounting surface or the optical microscope or scanning electron microscope;

[0014] A stopper is movably connected to the mounting surface, and the stopper is suitable for preventing the clamp body from sliding on the mounting surface.

[0015] Optionally, a slide groove is provided at the bottom of the clamp body, and a slide rail is provided on the mounting surface.

[0016] Optionally, the slide groove is a dovetail groove.

[0017] Optionally, the clamp body is provided with a plurality of through holes;

[0018] The fastener is adapted to extend into the accommodating space through the through hole and abut against the sample.

[0019] Optionally, the clamp body is cylindrical, one end of which is open and recessed inward to form the accommodation space;

[0020] The through holes are evenly distributed on the circumference of the cylindrical clamp body.

[0021] Optionally, at least two arc-shaped grooves are formed on the mounting surface, and the stopper is suitable for being inserted into the arc-shaped grooves.

[0022] Optionally, the inner diameter of the arc-shaped groove matches the diameter of the cylindrical clamp body.

[0023] Optionally, the base has two mounting surfaces arranged opposite to each other, and both mounting surfaces are suitable for mounting the fixture body.

[0024] A fixing method is also provided, comprising the above-mentioned fixing fixture suitable for sample tissue characterization, and further comprising the following steps:

[0025] Determine which tissue representation the sample is from OM, SEM and EBSD;

[0026] If the sample is for OM and SEM tissue characterization, select a fixture body corresponding to the sample size and place the sample into the holding space inside the fixture body;

[0027] Fix the sample with fasteners;

[0028] Install the fixture body with the fixed sample on the electron microscope sample stage for testing;

[0029] If the sample is to be characterized by EBSD, select a fixture body corresponding to the sample size and place the sample into the holding space inside the fixture body;

[0030] Fix the sample with fasteners;

[0031] Select a stopper that matches the size of the fixture body and insert it into the arc-shaped groove. Slide the fixture body onto the mounting surface until the fixture body contacts the stopper.

[0032] Install the base with the fixed sample onto the electron microscope sample stage for inspection.

[0033] Optionally, when fixing the sample, the method further includes adjusting the angle of the sample so that the surface to be observed of the sample is parallel to the bottom surface of the fixture body, and grinding and polishing the sample.

[0034] The technical solution of the present invention has the following advantages:

[0035] 1. The present invention provides a fixing fixture suitable for sample tissue characterization. The base is suitable for installation on the electron microscope sample stage. A storage space is provided on the fixture body. The sample is placed in the storage space. After the fixture body is installed on the base or the electron microscope sample stage, the sample is tested. The fixture has a simple structure, is easy to manufacture, is low in cost, and is easy to use. In addition, the fixture body can be installed directly on the electron microscope sample stage or installed on the electron microscope sample stage through the base according to the detection needs to ensure the required angle for detection.

[0036] 2. The fixture provided by this invention, suitable for sample microstructure characterization, addresses both the shortcomings of conventional mounting of small, irregularly shaped samples and the shortcomings of hand-grinding large samples. It also addresses the problem of horizontal placement on conventional downward-facing OM and SEM instruments, as well as sample drift and poor conductivity during EBSD microstructure characterization. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0038] Figure 1 A schematic structural diagram of the fixture body provided in Example 1 of the present invention being installed on a base;

[0039] Figure 2 A front view of the clamp body provided in Example 1 of the present invention installed on a base;

[0040] Figure 3 for Figure 2 Sectional view at A-A in the middle;

[0041] Figure 4 A schematic structural diagram of the clamp body provided in Example 1 of the present invention;

[0042] Figure 5 A front view of the clamp body provided in Example 1 of the present invention;

[0043] Figure 6 for Figure 5 Cross-sectional view at B-B in the middle;

[0044] Figure 7 A schematic structural diagram of a stopper provided in Example 1 of the present invention;

[0045] Figure 8 A front view of a stopper provided in Example 1 of the present invention;

[0046] Figure 9 for Figure 8 Sectional view at C-C in the middle;

[0047] Figure 10 A schematic structural diagram of a base provided in Example 1 of the present invention;

[0048] Figure 11 A front view of the base provided in Example 1 of the present invention;

[0049] Figure 12 for Figure 11 Cross-sectional view at D-D in the middle;

[0050] Figure 13 A side view of the base provided in Example 1 of the present invention.

[0051] Description of reference numerals:

[0052] 1. Base; 11. Mounting surface; 111. Arc-shaped groove; 2. Clamp body; 21. Accommodation space; 22. Through hole; 23. Slide groove; 3. Slide rail; 4. Stopper. DETAILED DESCRIPTION

[0053] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0054] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0055] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0056] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0057] Example 1

[0058] This embodiment provides a specific embodiment of a fixing fixture suitable for sample tissue characterization, such as Figures 1 to 13 As shown, the fixing fixture includes a base 1, a fixture body 2, and a stopper 4. The base 1 is suitable for being mounted on the electron microscope sample stage, and the fixture body 2 can be mounted on the base 1 or directly mounted on the electron microscope sample stage. The base 1 is provided with an inclined mounting surface 11. When the fixture body 2 is mounted on the base 1, it is mounted on the mounting surface 11 on the base 1, and the stopper 4 is also mounted on the mounting surface 11. The stopper 4 can prevent the fixture body 2 from sliding on the mounting surface 11. When performing OM, SEM or EBSD tissue characterization on the sample, the sample can be placed in the accommodating space 21 in the fixture body 2 according to the test requirements, and then the fixture body 2 can be selected to be directly mounted on the electron microscope sample stage, or the fixture body 2 can be first mounted on the base 1 and then the base 1 can be mounted on the electron microscope sample stage. According to the test requirements, the technician can choose to mount the fixture body 2 with the sample directly on the electron microscope sample stage or to mount it on the electron microscope sample stage through the base 1. Since the mounting surface 11 on the base 1 has a certain inclination, the angles of the samples presented by the two mounting methods are different, which is more convenient for testing the sample.

[0059] In this embodiment, Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 As shown, a slide rail 3 is provided on one of the bottom of the fixture body 2 and the mounting surface 11, and a slide groove 23 is provided on the other side to match the slide rail 3. Specifically, the slide groove 23 is provided on the bottom of the fixture body 2, and the slide rail 3 is provided on the mounting surface 11. The slide groove 23 is a dovetail groove, and the corresponding cross-section of the slide rail 3 is trapezoidal. The dovetail groove design ensures a more stable sliding connection between the fixture body 2 and the base 1.

[0060] In this embodiment, the fixture body 2 is provided with a plurality of through-holes 22. Fasteners can extend through the through-holes 22 into the accommodation space 21 and abut against the sample, thereby restricting movement of the sample and achieving the effect of positioning the sample. Specifically, the through-holes 22 can be threaded holes, and the fasteners can be screws. When the screws are screwed in, the ends of the screws abut against the sample, thereby limiting the sample's position.

[0061] The fixture body 2 is cylindrical, with one end open and recessed inward to form a receiving space 21. Through-holes 22 are evenly distributed around the circumference of the cylindrical fixture body 2, limiting the sample's periphery and ensuring a good sample fixation. Through-holes 22 may also be provided on the bottom of the fixture body 2. The bottom fasteners, which limit the sample's position, ensure that the sample's observed surface is parallel to the bottom surface of the fixture body 2. Furthermore, the bottom through-holes 22 are countersunk to prevent the ends of the fasteners from protruding from the surface of the fixture body 2, thereby affecting the sliding installation between the fixture body 2 and the mounting surface 11 or the electron microscope sample stage.

[0062] In this embodiment, at least two arc-shaped grooves 111 are provided on the mounting surface 11, into which the stopper 4 can be inserted. Specifically, the inner diameter of the arc-shaped groove 111 matches the diameter of the cylindrical clamp body 2, and multiple arc-shaped grooves 111 can be provided according to the model of the cylindrical clamp body 2. Figure 7 、 Figure 8 and Figure 9 As shown, the stopper 4 is an arc-shaped plate, and there are multiple of them, corresponding to the number of the arc-shaped grooves 111 and the inner diameter of the arc-shaped grooves 111 .

[0063] When performing OM and SEM tissue characterization tests, the sample surface needs to remain flat. The fixture body 2 with the sample only needs to be directly mounted on the scanning electron microscope through the dovetail groove or placed directly on the optical microscope. The scanning electron microscope is provided with a track corresponding to the dovetail groove.

[0064] When performing EBSD tissue characterization testing, the sample needs to be tilted at a certain angle. At this time, the fixture body 2 needs to be installed on the base 1 first, and then the base 1 needs to be installed on the electron microscope sample stage. According to the size of the sample, the model of the fixture body 2 is selected, and then the matching arc groove 111 is selected according to the model of the fixture body 2. The corresponding stopper 4 is inserted into the matching arc groove 111. The fixture body 2 is installed on the mounting surface 11 through the cooperation of the slide groove 23 and the slide rail 3. The fixture body 2 slides to contact with the stopper 4. The stopper 4 prevents the fixture body 2 from continuing to slide, thereby limiting the fixture body 2. Specifically, the extension direction of the slide rail 3 is the tilt direction of the mounting surface 11. The stopper 4 is arranged below the fixture body 2 to prevent the fixture body 2 from continuing to slide downward. Under the action of gravity of the fixture body 2, it will not slide upward. Specifically, the brake is an arc plate that matches the arc groove 111 and is suitable for being inserted into the arc groove 111. Specifically, a dovetail groove is provided on the bottom surface of the base 1, and a track corresponding to the dovetail groove is provided on the electron microscope sample stage. The base 1 is installed on the electron microscope sample stage through the cooperation between the dovetail groove and the track.

[0065] Specifically, such as Figure 10 、 Figure 11 、 Figure 12 and Figure 13 As shown, during EBSD microstructure characterization, the sample plane needs to be tilted 70°, so the mounting surface 11 of the base 1 in this embodiment has an inclination angle of 70°. Bases 1 with mounting surfaces 11 of different inclination angles can also be provided according to actual detection conditions.

[0066] Specifically, the base 1 is provided with two mounting surfaces 11 that are opposite to each other. Both mounting surfaces 11 can be used to mount the fixture body 2 , and two samples can be placed at the same time for tissue characterization.

[0067] In this embodiment, the materials selected for each structure are all metal materials with good electrical conductivity, which ensures good electrical conductivity during the detection process.

[0068] Specific examples:

[0069] For OM microstructure characterization, the sample surface to be observed is a flat surface measuring 70 mm x 20 mm, while the remaining five surfaces are curved, with a maximum height difference of 25 mm between the upper and lower surfaces. The fixture body 2 is cylindrical, with a receiving space 21 measuring 80 mm x 80 mm x 30 mm. The bottom and circumferential sides of the fixture body have threaded holes that connect to the receiving space 21 and are suitable for screw passage.

[0070] Place the sample with the surface to be observed facing downward in the accommodation space 21, and fix the sample in the accommodation space 21 by tightening the screws on the bottom and circumferential side, making sure that the surface to be observed is parallel to the bottom surface of the fixture body 2;

[0071] The fixture that fixed the sample was mechanically polished, and then chemically etched. The sample was then placed on an optical microscope with the surface to be observed facing upwards for OM structure characterization.

[0072] For SEM microstructure characterization, the sample surface to be observed is a flat surface measuring 7mm x 4mm, while the remaining five surfaces are curved, with a maximum height difference of 3mm between the top and bottom surfaces. The fixture body 2 is cylindrical, with a receiving space 21 measuring Φ8mm x 4mm defined within it. Threaded holes for screws are defined on the bottom and circumferential sides, communicating with the receiving space 21.

[0073] Place the sample with the surface to be observed facing downward in the holding space 21 and secure the sample in the holding space 21 by tightening one screw on the bottom and four screws on the circumferential side, ensuring that the surface to be observed is parallel to the bottom surface of the fixture.

[0074] The fixed fixture body 2 is placed in an automatic grinding and polishing machine for mechanical grinding and polishing. After the mechanical grinding and polishing is completed, the sample is taken out and electrolytically corroded. Then, it is placed back in the fixture body 2 and placed with the surface to be observed facing upward in a scanning electron microscope for SEM tissue characterization.

[0075] During EBSD microstructure characterization, the sample surface to be observed is a flat surface measuring 6mm x 5mm, while the remaining five surfaces are curved, with a maximum height difference of 3mm between the upper and lower surfaces. The fixture body 2 is cylindrical and defines a receiving space 21 measuring Φ7mm x 4mm. The maximum diameter of the fixture body 2 is 10mm, and threaded holes are defined on the bottom and circumferential sides, connecting to the receiving space 21 and for receiving concave-end screws.

[0076] Place the sample with the surface to be observed facing downward in the holding space 21, and fix the sample in the holding space 21 by tightening the screws on the bottom and circumferential side, making sure that the surface to be observed is parallel to the bottom surface of the fixture;

[0077] The fixture body 2 that fixes the sample is mechanically polished, and then vibrated or electrolytically polished after the mechanical polishing is completed;

[0078] Select a fastener with an inner diameter of 10 mm, i.e., a curved plate, according to the size of the clamp body 2, and insert the curved plate into the corresponding curved groove 111 on the mounting surface 11 of the base 1;

[0079] Insert the bottom groove 23 of the fixture body 2 with the polished sample into the slide rail 3 on the mounting surface 11 of the base 1 until the remaining curved plates are in contact;

[0080] A dovetail groove is provided at the bottom of the base 1 , and the dovetail groove at the bottom of the base 1 with the fixture body 2 is inserted into the electron microscope sample stage to directly perform EBSD structure characterization.

[0081] The fixing fixture provided in this embodiment has a simple structure, is easy to make, has low cost and is easy to use. The use of the fixture to fix irregularly shaped samples can not only solve the shortcomings brought about by the inlay of traditional small-sized irregularly shaped samples, but also solve the shortcomings brought about by hand-held polishing of large-sized samples. At the same time, it also solves the problem that the samples cannot be placed horizontally on conventional OM, SEM and other equipment with the probe facing downward. In addition, the EBSD sample stage provided by the present invention uses a method combining a guide rail and a support ring to fix the fixture, which is simple and effective. At the same time, the EBSD sample stage provided by the present invention can take into account the use of fixtures of different sizes, and can simultaneously install two fixtures for EBSD tissue characterization, which not only solves the drift problem caused by the excessive weight of the fixture and the problem of insufficient conductivity caused by the inlay, but also saves the time of repeatedly loading and vacuuming the samples when characterizing multiple samples by EBSD. Finally, according to the subsequent OM, SEM and EBSD tissue characterization requirements, vibration or electrolytic polishing, chemical or electrolytic corrosion can be flexibly performed, effectively improving the sample preparation efficiency.

[0082] Example 2

[0083] This embodiment provides a specific implementation of the fixation method, using the fixation fixture suitable for sample tissue characterization in Example 1, and further comprising the following steps:

[0084] Determine which tissue representation the sample is from OM, SEM and EBSD;

[0085] If the sample is to be characterized by OM and SEM, select a fixture body 2 corresponding to the sample size and place the sample into the receiving space 21 inside the fixture body 2;

[0086] Install the fixture body 2 with the fixed sample on the electron microscope sample stage for testing;

[0087] If the sample is to be characterized by EBSD, select a fixture body 2 corresponding to the sample size and place the sample into the receiving space 21 in the fixture body 2;

[0088] Select a stopper 4 that matches the size of the clamp body 2 and insert it into the arc-shaped groove 111 , and slide the clamp body 2 onto the mounting surface 11 until the clamp body 2 abuts against the stopper 4 ;

[0089] The base 1 with the fixed sample is mounted on the electron microscope sample stage for detection.

[0090] When the sample is fixed, the steps of adjusting the angle of the sample so that the surface to be observed of the sample is parallel to the bottom surface of the fixture body 2 and polishing the sample are also included.

[0091] After grinding and polishing, the sample can be subjected to electrolytic corrosion, electrolytic polishing, chemical corrosion, etc. as needed, and then placed on the electron microscope sample stage for tissue characterization.

[0092] After the sample is placed in the accommodating space 21 in the fixture body 2 , the sample needs to be limited by fasteners.

[0093] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A fixture suitable for sample tissue characterization, characterized in that: include: A base (1) suitable for mounting on an electron microscope sample stage; The base (1) is provided with an inclined mounting surface (11); A fixture body (2) is provided with a receiving space (21) suitable for receiving a sample, and the fixture body (2) is suitable for being slidably mounted on the mounting surface (11) or an optical microscope or a scanning electron microscope; A stopper (4) is movably connected to the mounting surface (11), and the stopper (4) is suitable for preventing the clamp body (2) from sliding on the mounting surface (11).

2. The fixing fixture suitable for sample tissue characterization according to claim 1, characterized in that: A sliding groove (23) is provided at the bottom of the clamp body (2), and a sliding rail (3) is provided on the mounting surface (11).

3. The fixing fixture suitable for sample tissue characterization according to claim 2, characterized in that: The sliding groove (23) is a dovetail groove.

4. The fixing fixture suitable for sample tissue characterization according to claim 1, characterized in that: The clamp body (2) is provided with a plurality of through holes (22); The fastener is adapted to extend into the accommodating space (21) through the through hole (22) and abut against the sample.

5. The fixing fixture suitable for sample tissue characterization according to claim 4, characterized in that: The clamp body (2) is cylindrical, one end of which is open and recessed inward to form the accommodation space (21); The through holes (22) are evenly distributed on the circumference of the cylindrical clamp body (2).

6. The fixing fixture suitable for sample tissue characterization according to claim 1, characterized in that: At least two arc-shaped grooves (111) are provided on the mounting surface (11), and the stopper (4) is suitable for being inserted into the arc-shaped grooves (111).

7. The fixing fixture suitable for sample tissue characterization according to claim 6, characterized in that: The inner diameter of the arc-shaped groove (111) matches the diameter of the cylindrical clamp body (2).

8. The fixing fixture suitable for sample tissue characterization according to any one of claims 1 to 7, characterized in that: The base (1) has two mounting surfaces (11) arranged opposite to each other, and both mounting surfaces (11) are suitable for mounting the clamp body (2).

9. A fixing method comprising the fixing fixture for sample tissue characterization according to any one of claims 1 to 8, characterized in that: The following steps are also included: Determine which tissue representation the sample is from OM, SEM and EBSD; If the sample is to be characterized by OM and SEM, a fixture body (2) corresponding to the sample size is selected, and the sample is placed in the receiving space (21) in the fixture body (2); Fix the sample with fasteners; The fixture body (2) with the fixed sample is mounted on the electron microscope sample stage for testing; If the sample is to be characterized by EBSD, a fixture body (2) corresponding to the size of the sample is selected, and the sample is placed in the accommodation space (21) in the fixture body (2); Fix the sample with fasteners; Select a stopper (4) corresponding to the size of the clamp body (2) and insert it into the arc-shaped groove (111), and slide the clamp body (2) onto the mounting surface (11) until the clamp body (2) abuts against the stopper (4); The base (1) with the fixed sample is mounted on the electron microscope sample stage for detection.

10. The fixing method according to claim 9, characterized in that: When fixing the sample, the method also includes adjusting the angle of the sample so that the surface to be observed of the sample is parallel to the bottom surface of the fixture body (2), and performing grinding, polishing and etching on the sample.

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