A photovoltaic cell and photovoltaic module

By forming protrusions on the surface of the photovoltaic cell substrate as markers, the problem of silicon wafer damage caused by laser processing depressions is solved, simplifying the processing steps and improving the performance and recognition rate of photovoltaic cells.

CN116154013BActive Publication Date: 2026-01-23ZHEJIANG JINKO SOLAR CO LTD +1
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Patent Information

Application Number
CN202111398021.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-11-19
Publication Date
2026-01-23
Estimated Expiration
2041-11-19

AI Technical Summary

Technical Problem

In photovoltaic cells, the large depth of the indentation formed by laser processing results in a large thickness of the damaged layer on the silicon wafer, which affects the quality of the cell and increases the complexity of the processing.

Method used

A raised portion is formed on the substrate surface as a marker, with a height of 0 micrometers < h ≤ 15 micrometers. By setting an annular raised portion on the substrate surface for marking, damage to the substrate is reduced, and a uniform textured layer is formed through texturing to improve the performance of photovoltaic cells.

Benefits of technology

It reduces damage to the substrate caused by marking, simplifies the processing steps, improves the overall performance and recognition rate of photovoltaic cells, and meets the needs of actual use.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to a photovoltaic cell and a photovoltaic module, wherein a base of the photovoltaic cell is provided with at least one protruding part, the protruding height of the protruding part relative to the base surface is h, and 0 microns < h <= 15 microns. The protruding part is used to form a mark on the base surface. The mark is formed on the base surface to facilitate the tracing of the photovoltaic cell. Compared with the scheme of tracing the photovoltaic cell by adopting a recessed part, the damage of the protruding part to the base is smaller, the influence of the mark on the base can be reduced, the overall performance of the photovoltaic cell is improved, and the actual use demand is more met.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar energy, in particular to a photovoltaic cell and a photovoltaic module. BACKGROUND

[0002] With the development of technology, the application of solar energy technology is more and more widely used. In the process of processing photovoltaic cells, in order to facilitate the tracking of photovoltaic cells, a recess is usually formed on the surface of a silicon wafer by laser processing, and a two-dimensional code is formed by a plurality of recesses to store relevant processing information. However, the depth of the recess formed by laser irradiation on the surface of the silicon wafer is large, which results in a large thickness of the damage layer of the silicon wafer, and has a great influence on the quality of the photovoltaic cell. SUMMARY

[0003] The present application provides a photovoltaic cell and a photovoltaic module, which are used to solve the problem of large damage to the substrate when a mark is set on the photovoltaic cell.

[0004] The present application provides a photovoltaic cell, which comprises a substrate, wherein the substrate is provided with at least one protruding part, and the protruding part is used to form a mark.

[0005] The protruding part has a protruding height h relative to the surface of the substrate in the thickness direction of the photovoltaic cell, and 0 microns < h < 15 microns.

[0006] By forming a mark on the surface of the substrate to facilitate the tracking of the photovoltaic cell, compared with the scheme of tracking the photovoltaic cell by using a recess, the damage to the substrate by using the protruding part is smaller, which can reduce the influence of the mark on the substrate, and is conducive to improving the overall performance of the photovoltaic cell and meeting the actual use requirements.

[0007] In a possible implementation, the protruding part is annular.

[0008] Compared with setting an overall columnar protrusion on the surface of the substrate, the volume of the annular protrusion is smaller, and the identification feature is more obvious to facilitate identification.

[0009] In a possible implementation, the width of the protruding part is w, and 1 microns < w < 20 microns.

[0010] The width of the protruding part is set to 2 microns to 6 microns. According to actual detection, when the size of the annular protrusion meets the above conditions, the annular protrusion can be easily identified by an identification device, and the overall volume of the protruding part is also small, which can reduce the influence of the mark on the reflectivity and other performances of the substrate, thereby being conducive to improving the overall performance of the photovoltaic cell.

[0011] In a possible implementation, the substrate is provided with a recess, and the recess is located on the inner side of the protruding part.

[0012] By such a design, the height difference between the top and the bottom of the protruding part can be increased, facilitating the identification of the protruding part. Since the protruding part itself protrudes relative to the surface of the base, when the recessed part is arranged, the recessed part only needs to extend into the base to a shallow depth to form a relatively obvious height difference with the top of the protruding part, thereby facilitating the identification of the protruding part. Since the protruding part extends into the base to a shallow depth, the damage layer of the base is small during processing, which can reduce the influence of the damage layer on the base and is conducive to improving the quality of the photovoltaic cell.

[0013] In a possible implementation, the depth of the bottom wall of the recessed part relative to the surface of the base is less than 6 microns.

[0014] By such a design, the damage layer after processing is shallow. Since the thickness of the damage layer is shallow, a step of removing the damage layer can not be separately performed.

[0015] In a possible implementation, the base is subjected to texturing treatment, and the texture of the surface of the protruding part is consistent with the texture of the surface of the base at positions where the protruding part is not arranged.

[0016] When the texturing treatment is performed, the surface of the protruding part can also be textured to make the surface of the protruding part also have a texture (for example, a pyramid texture). By texturing, the reflectivity of the photovoltaic assembly can be reduced, which is conducive to the absorption of light by the photovoltaic assembly and can improve the photoelectric conversion efficiency, thereby improving the overall efficiency of the photovoltaic cell and better meeting actual use requirements.

[0017] In a possible implementation, outside the protruding part and within a range of a distance of not more than 0.5 mm from the center of the protruding part, the height of the lowest point of the base is n.

[0018] The height of the highest point of the protruding part is m, and m-n is greater than 1 micron.

[0019] By making the height difference between the highest point of the protruding part and the lowest point around the protruding part greater than 1 micron, the characteristics of the protruding part can be more obvious, and the protruding part can be more easily detected, thereby facilitating the identification of the mark of the base and the tracing of the photovoltaic cell.

[0020] In a possible implementation, the base is provided with a plurality of protruding parts, and the protruding parts are arranged at intervals.

[0021] By such a design, a preset pattern can be formed on the base, thereby facilitating the identification of different photovoltaic cells through the pattern and the tracing of the production of the photovoltaic cells.

[0022] In a possible implementation, the plurality of protrusions are used to form at least one of a serial code, a data matrix code, and a bar code.

[0023] Generally, the substrate has a corresponding code, which can be converted into a pattern by a corresponding compiling language or compiling method, and stored in the identification code. When tracing, the identification code is compiled by a corresponding reading device and reading program to obtain the code. Such design has higher security and is more in line with actual use requirements. Compared with directly setting the code on the substrate, the identification code can reduce the space occupied by the mark on the substrate, reduce the impact of the mark on the photovoltaic cell, and help improve the overall performance of the photovoltaic cell.

[0024] The application also provides a photovoltaic module, which comprises the photovoltaic cell according to any one of the above.

[0025] The application relates to a photovoltaic cell and a photovoltaic module, wherein the substrate of the photovoltaic cell is provided with at least one protrusion, the protrusion has a protruding height h relative to the surface of the substrate, and 0 microns < h < 15 microns. The protrusion is used to form a mark on the surface of the substrate. The mark is formed on the surface of the substrate to facilitate the tracing of the photovoltaic cell. Compared with the scheme of tracing the photovoltaic cell by using a recess, the damage to the substrate caused by the protrusion is smaller, the impact of the mark on the substrate can be reduced, the overall performance of the photovoltaic cell can be improved, and the design is more in line with actual use requirements.

[0026] It should be understood that the foregoing general description and the following detailed description are only exemplary and cannot limit the application. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A partial schematic view of the substrate of the photovoltaic cell provided by the application;

[0028] Figure 2 A partial sectional view of the substrate of the photovoltaic cell provided by the application;

[0029] Figure 3 A schematic view of the substrate of the photovoltaic cell provided by the application;

[0030] Figure 4 A data table of different embodiments provided by the application.

[0031] REFERENCE SIGNS:

[0032] 1 - substrate;

[0033] 2 - protrusion;

[0034] 3 - recess;

[0035] 4 - grid line.

[0036] The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate embodiments consistent with the application and, together with the description, serve to explain the principles of the application. DETAILED DESCRIPTION

[0037] For better understanding of the technical solutions of the present application, the embodiments of the present application are described in detail below with reference to the drawings.

[0038] It should be clear that the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0039] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms "a", "said" and "the" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0040] It should be understood that the term "and / or" used herein is only to describe the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can represent the three cases of A alone, A and B together, and B alone. In addition, the character " / " herein generally represents an "or" relationship between the front and rear associated objects.

[0041] It should be noted that the "up", "down", "left", "right" and other directional words described in the embodiments of the present application are described from the angle shown in the drawings, and should not be understood as a limitation on the embodiments of the present application. In addition, it should be understood in the context that when referring to an element connected to another element "on" or "under", it can be directly connected to another element "on" or "under" or indirectly connected to another element "on" or "under" through an intermediate element.

[0042] With the development of technology, the application of solar technology is more and more widely used. In the process of processing photovoltaic cells, in order to facilitate the tracing of photovoltaic cells, a recess is usually formed on the surface of a silicon wafer by laser processing, and a plurality of recesses form a two-dimensional code to store relevant information. However, the depth of the recess formed by laser irradiation on the surface of the silicon wafer is relatively large, usually greater than 8 microns, which leads to a relatively large thickness of the damage layer of the silicon wafer, and the damage layer will cause abnormal texturing and coating, which has a great influence on the quality of the photovoltaic cell. Therefore, an etching step is needed after laser processing to remove the damage layer. Such a way extra increases the process flow, which leads to a complex processing process and affects the actual production efficiency.

[0043] In view of this, the embodiments of the present application provide a photovoltaic cell and a photovoltaic module, to solve the problem that the damage to the substrate is large when a mark is set on the photovoltaic cell, thereby affecting the conversion efficiency of the cell.

[0044] As shown in Figure 1 and Figure 2 The embodiments of the present application provide a photovoltaic cell, wherein the photovoltaic cell comprises a substrate 1, which can generally adopt a silicon wafer. The silicon wafer surface has at least one protruding part 2, and along the thickness direction of the photovoltaic module, the protruding height of the protruding part 2 relative to the surface of the substrate 1 is h, 0 microns < h ≤ 15 microns, the protruding part 2 is used to form a mark to facilitate the differentiation of different photovoltaic cells and the active tracing of the information of the photovoltaic cell.

[0045] Compared with setting a recess directly on the surface of the substrate 1, the mark is set by setting the protruding part 2 on the surface of the substrate 1, which can reduce the damage to the substrate 1 when the mark is set, thereby being beneficial to improve the quality of the silicon wafer and can save the step of taking out the damaged layer. The protruding height h of the protruding part 2 can be 0.1 microns, 1 microns, 5 microns, 10 microns, 15 microns, etc., and generally the height h of the protruding part 2 is 0.2 microns to 4 microns to reduce the influence of the protruding part 2 on the grid lines of the substrate 1. Compared with forming a recess on the surface of the substrate 1, forming the protruding part 2 on the surface of the substrate 1 can also form a height difference on the surface of the substrate 1 to form a mark, which is convenient for detection. For example, a low-angle light source can be arranged to irradiate the substrate, and an imaging device can be used to generate a detection picture. In the detection picture, the target annular protruding part has a better contrast compared with the non-target background part (non-mark area), and the mark is analyzed by extracting and converting the pattern formed by the annular protrusion to complete the analysis. In addition, since the mark is a protruding structure and does not extend into the substrate 1, the damage to the substrate 1 can be reduced, which is beneficial to improve the quality of the photovoltaic cell.

[0046] As shown in Figure 1 In a possible implementation, the protruding part 2 is annular.

[0047] During the marking process, a laser with specific parameters can be used to process the substrate 1 to obtain an annular protrusion. Specifically, the laser parameters are as follows: wavelength: 1059-1065 nm, pulse duration: 10-100 ns, pulse repetition frequency: 500-2000 kHz, laser power percentage: 70-75%, and scanning times: 1 time. Through actual tests, the parameters can be used to process the annular protrusion on the surface of the substrate 1 and will not affect the subsequent cell manufacturing process (such as texturing, film coating, etc.).

[0048] In addition, compared with the overall columnar protrusion arranged on the surface of the substrate, the annular protrusion has a smaller volume and a more obvious identification feature to facilitate identification. In some embodiments, when the flatness of the surface of the substrate 1 is low, it is more difficult to identify the columnar protrusion, and the columnar protrusion is easily confused with other protrusions (such as the pyramid morphology formed by texturing), which reduces the identification rate of the mark, increases the identification difficulty, and even cannot be identified, so that the related information of the photovoltaic cell cannot be obtained, and the photovoltaic cell cannot be traced. In the present application, the annular protrusion is used for marking, and when the flatness of the substrate 1 is low, the annular protrusion can be better distinguished from other protrusions, so as to facilitate the identification of the mark of the substrate 1, and the information (process flow, product parameters, etc.) of the photovoltaic cell can be traced.

[0049] As shown in Figure 2 In a possible implementation, the width w of the protrusion part 2 is 1-20 microns, and the width of the annular protrusion is calculated as half of the difference between the inner diameter and the outer diameter, that is, the width of the annular.

[0050] The width of the protrusion part 2 can be 1 micron, 5 microns, 10 microns, 15 microns, 20 microns, etc. Alternatively, the width of the protrusion part 2 is set to 2-6 microns. Through actual detection, when the size of the annular protrusion meets the above conditions, it can be easily identified by the identification equipment, and the overall volume of the protrusion part 2 is also small, which can reduce the influence of the mark on the reflectivity and other performances of the substrate 1, thereby facilitating the improvement of the overall performance of the photovoltaic cell.

[0051] As shown in Figure 2 In a possible implementation, the substrate 1 is provided with a recess part 3, and the recess part 3 is located on the inner side of the protrusion part 2, that is, inside the annular protrusion.

[0052] Through such a design, the height difference between the top and the bottom of the protrusion part 2 can be increased, and the protrusion part 2 can be easily identified. Since the protrusion part 2 protrudes relative to the surface of the substrate 1, when the recess part 3 is arranged, the recess part 3 only needs to extend into the substrate 1 to a shallow depth to form a more obvious height difference with the top of the protrusion part 2, thereby facilitating the identification of the protrusion part 2. Since the depth of the protrusion part 2 extending into the substrate 1 is shallow, the damage layer of the substrate 1 is small during the processing process, which can reduce the influence of the damage layer on the substrate 1, and is beneficial to improve the quality of the photovoltaic cell.

[0053] Specifically, in a possible implementation, the depth d of the bottom wall of the recess part 3 relative to the surface of the substrate 1 is less than 6 microns, that is, the distance of the recess part 3 extending into the substrate 1 is less than 6 microns.

[0054] Through actual detection, when the substrate 1 is cut, a cutting damage layer of 1-2 microns is usually formed. When the substrate 1 is processed and marked by using the above method and data, the damage layer on the side of the substrate 1 provided with the protruding portion 2 is usually less than 4 microns after the annular protrusion is formed. Usually, only one side is provided with a mark, and the damage layer on the side of the substrate 1 provided with the protruding portion 2 includes cutting damage and laser processing damage, and the damage layer on the side of the substrate 1 not provided with the protruding portion 2 usually only includes a cutting damage layer. Compared with the scheme of marking by providing a recess on the surface of the substrate 1, the damage layer after processing of the scheme provided in the embodiment is shallower. Since the thickness of the damage layer is shallower, a step of removing the damage layer is not required. Usually, the preparation of a photovoltaic cell includes a texturing process, and a surface of the substrate 1 is formed into a textured surface, such as a pyramid textured surface, by chemical means. Since the thickness of the damage layer is smaller in the scheme provided in the application, the damage layer can be removed by the texturing process when the texturing process is performed, and a step of removing the damage layer is not required, thereby simplifying the processing procedure and making the processing difficulty more in line with actual use requirements.

[0055] In a possible implementation, when processing, the substrate 1 is subjected to a texturing process to form a textured layer on the surface of the substrate 1. Specifically, the surface of the protruding portion 2 and the surface of the substrate 1 not provided with the protruding portion 2 are subjected to the texturing process to form the textured layer, and the topographies of the textured layers are consistent. It should be noted that the "consistent topography" can mean completely consistent topography or substantially consistent topography, for example, topography of the same or similar structure.

[0056] When the texturing process is performed, the surface of the protruding portion 2 can also be textured to make the surface of the protruding portion 2 also have a textured layer (for example, a pyramid textured surface). The texturing process can reduce the reflectivity of the photovoltaic assembly, which is conducive to the absorption of light by the photovoltaic assembly and can improve the photoelectric conversion efficiency, thereby improving the overall efficiency of the photovoltaic cell and making the processing difficulty more in line with actual use requirements. Since the processing technology of the protruding portion 2 is the same as that of the position of the substrate 1 not provided with the protruding portion 2 when the texturing process is performed, the topography of the textured layer formed on the surface of the protruding portion 2 is consistent with that of the textured layer formed on the surface of the substrate 1, and both form a pyramid textured surface. Since the protruding portion 2 is protruded relative to the surface of the substrate 1, the pyramid textured layer formed on the side surface of the protruding portion 2 and the bottom surface of the pyramid textured layer formed at the junction of the protruding portion 2 and the substrate 1 have a height difference, resulting in different areas of the side surfaces of the pyramid structures in the pyramid textured layer, but the protruding directions of the pyramid structures are all along the thickness direction of the photovoltaic cell.

[0057] After the texturing process, the annular protrusions are retained, the annular protrusions have a height of 0.3-2 um and a width of 2-20 um, and the texturing process can completely remove the laser damage layer formed during the processing of the annular protrusions. Meanwhile, the inside and outside of the annular protrusions and the surface of the annular protrusions are formed with the same pyramid texture as the surface of the substrate 1, and the pyramids are perpendicular to the surface of the substrate 1. The pyramids on the inner and outer slopes of the protrusions are also perpendicular to the surface of the substrate 1, and the slope on the outer side of the protrusions is larger than the slope on the inner side of the protrusions. During the texturing and subsequent processes, the silicon wafer has no shadow in the marked area under photoluminescence (PL) test.

[0058] In a possible implementation, the height of the highest point of the protrusion 2 is m, the center of the protrusion 2 is taken as the center of a circle, the distance from the center to the circle is less than or equal to 0.5 mm, and is located in the range outside the protrusion 2, the height of the lowest point of the substrate 1 is n, and m-n is greater than 1 um. The height difference can be the height difference after texturing.

[0059] In actual detection, a 3D microscope or a scanning electron microscope (SEM) can be selected as the detection tool to detect the specified area. In the area, the height between the highest point of the protrusion 2 and the lowest point of the surrounding substrate 1 detected is greater than 1 um, and the area is detected to be qualified. When one or more specified areas are detected to be qualified, the protrusion 2 is qualified, or multiple specified areas of the same protrusion 2 are detected, the average value of the highest points of the specified areas is m, and the average value of the lowest points of the specified areas is n. When m-n is greater than 1 um, it indicates that the protrusion 2 is qualified. Specifically, the number of positions of the specified area can be set according to the actual situation. The height of the protrusion 2 formed by laser design and processing is relatively uniform, and generally four or five specified areas can be set.

[0060] By making the height difference between the highest point of the protrusion 2 and the lowest point around it greater than 1 um, the characteristics of the protrusion 2 are more obvious, and it is more convenient to detect the protrusion 2, thereby facilitating the identification of the mark of the substrate 1 and the tracing of the photovoltaic cell.

[0061] In a possible implementation, the surface of the substrate 1 is provided with a plurality of protrusions 2, and the protrusions 2 are arranged at intervals. Specifically, the protrusions 2 can be arranged according to a predetermined rule to form a predetermined pattern.

[0062] Through such a design, a predetermined pattern can be formed on the substrate 1, thereby facilitating the identification of different photovoltaic cells through the pattern and the tracing of the production of the photovoltaic cells.

[0063] AsFigure 3 As shown, in one possible implementation, the plurality of protrusions 2 can form at least one pattern of identification codes such as serial codes, data matrix codes, and barcodes.

[0064] Typically, substrate 1 has a corresponding code, which can be converted into a graphic using a suitable compilation language or method and stored in an identification code. During traceability, the identification code is compiled using a corresponding reading device and program to retrieve the code. This design offers higher security and better meets practical application needs. Compared to directly setting the code on substrate 1, using an identification code reduces the space occupied by the marking on substrate 1, minimizing the impact of the marking on the photovoltaic cells and improving the overall performance of the photovoltaic cells.

[0065] like Figure 3 As shown, since the identification code is provided by multiple protrusions 2 spaced apart, the grid line 4 can be avoided by the gap between the protrusions 2, thereby reducing the possibility of interference between the identification code and the grid line 4.

[0066] Based on the photovoltaic cells involved in the above embodiments, this application also provides a photovoltaic module. The photovoltaic module may include the photovoltaic cells involved in any of the above embodiments. Since the photovoltaic cells have the above technical effects, the photovoltaic module including the photovoltaic cells also has the corresponding technical effects.

[0067] During identification and tracing, a low-angle, high-intensity light illumination method can be used to create good contrast between the portion with the raised portion 2 and the portion without the annular raised portion, facilitating the detection of the raised portion 2. This is beneficial for extracting and converting the pattern formed by the raised portion 2 during mark analysis to complete the analysis. Actual testing using the solution provided in this application embodiment shows that the accuracy rate for mark identification of photovoltaic cells / photovoltaic modules is 99% to 99.5% in practical use. The illumination angle ranges from 1° to 3°.

[0068] like Figure 4 As shown, by testing different data implementation examples, the following results were obtained: Figure 4 The data table shown illustrates this. Based on embodiments 1 and 2, it can be concluded that the higher the height of the protrusion 2 and the greater the height difference between it and the surface of the substrate 1 (silicon wafer), the higher the recognition rate of the protrusion 2, and the higher the accuracy of reading the identification code during traceability. Based on embodiments 2 and 3, it can be seen that the larger the width of the protrusion 2, the easier it is to be identified. Based on embodiments 4 to 6, it can be seen that if the height, width, and depth of the protrusion 2 are all increased simultaneously, that is, the more pronounced the protrusion 2 is relative to the substrate 1 (silicon wafer), the easier it is to be identified, thereby increasing the recognition accuracy of the identification code formed by the protrusion 2 and facilitating the traceability of photovoltaic cells.

[0069] In the scheme provided by the embodiments of the present application, optionally, the height of the protruding part 2 is 0.2-4 um, and the width is 2-6 um. As can be seen from the table, in this range, the characteristics of the protruding part 2 of the No. 5 embodiment are most obvious, and the recognition rate is the highest. The data range of the No. 6 embodiment exceeds the above-mentioned optional range, and the recognition rate is the same as that of the No. 5 embodiment. However, through actual testing, since the overall size of the protruding part 2 is increased, the thickness of the laser damage layer formed in the process of processing the protruding part 2 is also increased. When the data range of the protruding part 2 exceeds the above-mentioned optional range, the laser damage layer cannot be completely removed by the texturing process, and when the electroluminescent (EL) test is performed, it is easy to form a shadow, and an additional step of removing the laser damage layer is required. Therefore, without significantly better recognition rate than the No. 5 embodiment, after comprehensive consideration, the data of the No. 5 embodiment can be selected in actual processing, without affecting the EL test, and has a higher recognition rate.

[0070] The embodiments of the present application provide a photovoltaic cell and a photovoltaic module, wherein the substrate 1 of the photovoltaic cell is provided with at least one protruding part 2, and the protruding height of the protruding part 2 relative to the surface of the substrate 1 is h, 0 microns < h < 15 microns. The protruding part 2 is used to form a mark on the surface of the substrate 1. By forming a mark on the surface of the substrate 1, the photovoltaic cell is traced, compared with the scheme of tracing the photovoltaic cell by using the recessed part 3, the damage to the substrate 1 by using the protruding part 2 is smaller, which can reduce the influence of the mark on the substrate 1, is conducive to improving the overall performance of the photovoltaic cell, and is more in line with the actual use demand.

[0071] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Those skilled in the art can make various modifications and changes to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A photovoltaic cell, characterized in that, The photovoltaic cell includes a substrate, the substrate having at least one protrusion for forming a mark; Along the thickness direction of the photovoltaic cell, the protrusion height of the protrusion relative to the substrate surface is h, where 0 micrometers < h ≤ 15 micrometers; The protrusion is annular; The substrate is processed using a laser with specific parameters to obtain an annular protrusion. The laser parameters are as follows: wavelength: 1059~1065nm, pulse duration: 10~100ns, pulse repetition frequency: 500~2000kHz, laser power percentage: 70~75%, number of scans:

1. The substrate is a silicon wafer.

2. The photovoltaic cell according to claim 1, characterized in that, The width of the protrusion is w, where 1 micrometer ≤ w ≤ 20 micrometers.

3. The photovoltaic cell according to claim 1, characterized in that, The base is provided with a recessed portion, which is located inside the protrusion.

4. The photovoltaic cell according to claim 3, characterized in that, The depth of the bottom wall of the recess relative to the surface of the substrate is less than 6 micrometers.

5. The photovoltaic cell according to any one of claims 1 to 4, characterized in that, The substrate is subjected to a flocking process, and the flocking layer on the surface of the protrusion has the same morphology as the flocking layer at the location on the substrate where the protrusion is not located.

6. The photovoltaic cell according to claim 5, characterized in that, The height of the lowest point of the base is n, located outside the protrusion and within a range no greater than 0.5 mm from the center of the protrusion. The height of the highest point of the protrusion is m, and mn is greater than 1 micrometer.

7. The photovoltaic cell according to any one of claims 1 to 4, characterized in that, The base is provided with a plurality of protrusions, and the protrusions are spaced apart.

8. The photovoltaic cell according to claim 7, characterized in that, The plurality of protrusions are used to form at least one of a sequence code, a data matrix code, and a barcode.

9. A photovoltaic module, characterized in that, The photovoltaic module includes the photovoltaic cell according to any one of claims 1 to 8.

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