Optoelectronic sensing system and method thereof

Abstract

The present application provides a photoelectric sensing device, a photoelectric sensing system and a method thereof, wherein the photoelectric sensing device includes a diffusion film for introducing a light to be measured, a filter element having a plurality of filter coatings for filtering a detection light beam from the light to be measured, and a sensing circuit for sensing the detection light beam, and the photoelectric sensing device can provide a dual-band sensing function. In addition, the photoelectric sensing system and the operation method thereof of the present application include coupling a plurality of incident lights into first coupled light by a secondary light coupling element, coupling the first coupled light into second coupled light by a primary light coupling element, forming fluorescence by a part of the second coupled light passing through an erbium-doped optical fiber, and respectively arranging a first photoelectric sensing device and a second photoelectric sensing device on the secondary light coupling element and the erbium-doped optical fiber to monitor the state of blue laser light and fluorescence, thereby providing an instant monitoring effect.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of photoelectric sensing, and in particular to a photoelectric sensing device capable of sensing a dual-band light beam, a photoelectric sensing system and a method thereof. BACKGROUND

[0002] With the rise of issues such as 5G and electric vehicles, the precision of metal material (such as copper) processing and the demand for using metal sheets for heat dissipation will increase, resulting in the importance of the processing quality and efficiency of metal processing equipment. Nowadays, laser processing equipment is mainly used as a processing tool. Traditional laser processing equipment uses a 1064 nanometer (nm) band laser light source. However, with the advancement of technology, a 450 nm band blue light laser has recently been developed to replace the traditional 1064 nm band laser light source. The 450 nm band blue light laser has a better absorption rate (3-12 times) than the traditional 1064 nm laser light source, and thus the blue light laser can provide more effective processing quality and efficiency.

[0003] Generally, the laser light source of a laser processing equipment needs to be provided with a laser diode array formed by a plurality of laser diodes. The laser light of each laser diode is coupled through a plurality of front-end couplers, and then the laser light coupled by the front-end couplers is collected by a power coupler to form high-power laser light. Subsequently, the laser light is transmitted to the rear-end laser output head through an optical fiber for laser light output. However, since the laser fiber usually uses a plurality of laser diodes and is coupled multiple times, when the laser light output power decreases and needs to be checked, the optical fibers between each laser diode and the front-end coupler, the front-end coupler and the power coupler, and the power coupler and the laser output head need to be cut off one by one, and then an optical detector is connected to detect the problem point causing the power decrease for troubleshooting. In other words, taking 14 laser diodes as an example, if the power of each laser diode is to be checked, at least 28 times of optical fiber cutting and welding are required between the laser diode and the front-end coupler. If there is no abnormality in each laser diode, the power between the front-end coupler and the power coupler and the power coupler and the laser output head also needs to be checked in sequence to find the final problem point. This not only has high cost but also is time-consuming. In addition, since the current blue light laser is expensive and the photo detector (PD) used to detect the laser light power is also expensive, the use and maintenance cost of the blue light laser processing equipment is high.

[0004] Therefore, how to provide a monitoring device for protecting the blue light laser system in real time, effectively and at a low cost, so as to efficiently perform internal inspection and feedback of the blue light laser system, will become a problem to be considered for the next generation of blue light laser processing, and is also a goal urgently pursued by the personnel in the technical field. SUMMARY

[0005] To solve the problems of the prior art, the present application discloses a photoelectric sensing device, a photoelectric sensing system and a method thereof to provide an instant monitoring effect.

[0006] The photoelectric sensing device of the present application comprises a diffusion film for homogenizing the incoming light to be measured, a filter element disposed on the diffusion film and comprising an optical substrate and a plurality of filter coatings formed on the surface of the optical substrate for filtering out a detection beam when the light to be measured passes through, and a sensing circuit disposed on the filter element for converting the received detection beam into a sensing signal.

[0007] The present application also discloses a photoelectric sensing system comprising at least one light coupling element for receiving a plurality of incident lights to couple into at least one first coupled light, a main light coupling element connected to one end of the at least one light coupling element and receiving the first coupled light to couple into a second coupled light, an erbium-doped optical fiber connected to the other end of the main light coupling element for the second coupled light to pass through to form a fluorescent light, at least one first photoelectric sensing device correspondingly disposed at the at least one light coupling element for detecting the first coupled light to generate a first sensing signal, and a second photoelectric sensing device disposed at the erbium-doped optical fiber for detecting the fluorescent light to generate a second sensing signal, wherein the first sensing signal and the second sensing signal are used to determine the states of the first coupled light and the second coupled light, respectively.

[0008] The present application also discloses a photoelectric sensing method comprising disposing at least one light coupling element to receive a plurality of incident lights and couple into at least one first coupled light, disposing a main light coupling element connected to the at least one light coupling element to receive and couple the first coupled light to form a second coupled light, disposing an erbium-doped optical fiber connected to the main light coupling element for the second coupled light to pass through to form a fluorescent light, disposing at least one first photoelectric sensing device at the at least one light coupling element to detect the first coupled light to generate a first sensing signal, disposing a second photoelectric sensing device at the erbium-doped optical fiber to detect the fluorescent light to generate a second sensing signal, and determining the states of the first coupled light and the second coupled light through the first sensing signal and the second sensing signal.

[0009] From the above, the photoelectric sensing device of the present application filters out the detection beams of 450nm and 530nm from the light to be measured by using the diffusion film and the filtering element with multiple filtering coatings, and then the sensing circuit senses the detection beams to achieve the effect of double-band sensing. Furthermore, the photoelectric sensing system and method of the present application sets the first photoelectric sensing element and the second photoelectric sensing element at the secondary light coupling element and the erbium-doped optical fiber, respectively, to perform double-band detection of 450nm and 530nm, respectively, so as to achieve the purpose of real-time monitoring, and provide a debugging method, so that the maintenance personnel can quickly find out the place where the problem occurs, so as to achieve the effect of problem elimination as soon as possible. BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 It is a perspective structural exploded view of the photoelectric sensing device of the present application.

[0011] Figure 2 It is a side view of the photoelectric sensing device of the present application.

[0012] Figure 3 It is an architectural diagram of the photoelectric sensing system of the present application.

[0013] Figure 4 It is a step diagram of the photoelectric sensing method of the present application.

[0014] Figure 5 It is a debugging flowchart of the photoelectric sensing method of the present application.

[0015] Figure 6 It is a detection flowchart of the photoelectric sensing method of the present application.

[0016] SYMBOL DESCRIPTION

[0017] 1: photoelectric sensing device

[0018] 11: diffusion film

[0019] 12: filtering element

[0020] 121: filtering coating

[0021] 122: optical substrate

[0022] 13: sensing circuit

[0023] 3: photoelectric sensing system

[0024] 31: secondary light coupling element

[0025] 311: detection part

[0026] 32: primary light coupling element

[0027] 33: erbium-doped optical fiber

[0028] 34: first photoelectric sensing device

[0029] 35: second photoelectric sensing device

[0030] 36: laser light source

[0031] 501~506: flow

[0032] 601~608: flow

[0033] S401~S406: step DETAILED DESCRIPTION

[0034] The technical content of the present application is described below by specific embodiments, and those skilled in the art can easily understand the advantages and effects of the present application from the content disclosed in the description. However, the present application can also be implemented or applied by other different embodiments.

[0035] Figure 1 It is a perspective structural exploded view of the photoelectric sensing device of the present application, Figure 2 It is a side view of the photoelectric sensing device of the present application, please refer to. As shown in the figure, the photoelectric sensing device 1 of the present application includes a diffusion film 11, a filter element 12 and a sensing circuit 13, wherein the light beam to be detected is introduced through the diffusion film 11, the light beam of the waveband to be detected is filtered out through the filter element 12, and then the light sensing is carried out by the sensing circuit 13 to generate the sensing result, so as to judge the state of the detected light beam, and then as the basis for whether the laser system is adjusted. The structure of the photoelectric sensing device 1 of the present application is described in detail as follows.

[0036] The diffusion film 11 is used to homogenize the introduced light to be measured, specifically, the light to be measured can be a waveband range of light beam, for example, the waveband range includes blue light with wavelength of 450 nm and / or green light with wavelength of 530 nm, in addition, the light to be measured can also be a specific wavelength of light beam, for example, 450 nm blue light or 530 nm green light.

[0037] The filter element 12 is arranged on the diffusion film 11 to filter the light to be measured from the diffusion film 11, in other words, the filter element 12 includes a plurality of filter coatings 121 for filtering the light to be measured and an optical substrate 122 for forming the plurality of filter coatings 121 on the surface, when receiving the light to be measured, the filter element 12 filters out the detection light beam by the plurality of filter coatings 121, wherein each layer of the plurality of filter coatings 121 has a different refractive index, and the filter coatings with different refractive indexes are stacked to filter out the detection light beam for inspection from the light to be measured, for example, the detection light beam with wavelength of 450 nm (i.e. blue light) and the detection light beam with wavelength of 530 nm (i.e. fluorescent light or green light)

[0038] Specifically, the plurality of filter coatings 121 of the filter element 12 can be a halogen-containing compound layer, a group 16 (ⅥA group) compound layer, a group 15 (VA group) compound layer, a group 5 (VB group) compound layer, or a combination of two, three or four layers of the aforementioned, wherein the halogen-containing compound can be a fluorine compound, the group 16 compound can be a sulfur compound, the group 15 compound can be a nitrogen compound, and the group 5 compound can be a niobium compound; for example, if the present application is used in a blue light processing technology and needs to detect light beams of 450 nm and 530 nm, the filter coating 121 of the present application can be designed as three layers, for example, a combination of a fluorine compound layer, a sulfur compound layer and a nitrogen compound layer is used to form a coating structure that can simultaneously monitor light beams of two wavebands (i.e. 450 nm and 530 nm), or if detection of light beams of other wavebands is desired, the filter coating 121 can be designed in other combinations as needed, for example, a four-layer filter coating 121 can be composed of a combination of a fluorine compound layer, a sulfur compound layer, a nitrogen compound layer and a niobium compound layer, that is, the filter element 12 of the present application can select and adjust the refractive index of the filter coating 121 according to the characteristics (such as the wavelength band) of the light beam to be detected, therefore, the filter coating 121 of the filter element 12 of the present application is not limited to the aforementioned form.

[0039] In addition, the optical substrate 122 can be an optical diffusion substrate, which is a plastic substrate made of plastic material, that is, the filter element 12 of the present application can filter the light beams passing through the filter element 12 by the combination of the optical substrate 122 and the plurality of filter coatings 121, in addition, the optical substrate 122 can also be used to form a diffusion film 11 on the other surface opposite to the plurality of filter coatings 121 to support the diffusion film 11 and the plurality of filter coatings 121. Accordingly, since the optical diffusion substrate of the present application is made of plastic, the manufacturing cost can be reduced.

[0040] The sensing circuit 13 is used to sense the received light beams to convert the sensed light beams into electronic signals (such as voltage signals). Specifically, the sensing circuit 13 is arranged on the filter element 12, which can be in contact with the filter coating 121 attached to the filter element 12 to directly receive the detection light beams filtered out by the filter element 12 from the filter element 12, and the detection light beams are correspondingly converted into sensing signals by the photoelectric conversion function of the sensing circuit 13.

[0041] The present application is practically applied to a blue laser processing device, which has a plurality of light coupling elements for collecting a plurality of incident lights, and further has an erbium-doped fiber for interacting with the blue laser to generate fluorescence. The erbium-doped fiber can absorb part of the energy level of the blue laser to generate fluorescence through the frequency conversion phenomenon of the laser. The photoelectric sensing device 1 of the present application is covered on the light coupling elements or the erbium-doped fiber with one side of the diffusion film 11, so that the diffusion film 11 guides and homogenizes the light beams of the blue laser or the fluorescence from the light coupling elements or the erbium-doped fiber. The first detection light beams are filtered from the light beams of the blue laser or the second detection light beams are filtered from the fluorescence through the optical substrate 122 and the plurality of filter coatings 121 of the filter element 12. The first detection light beams or the second detection light beams can be converted into the first sensing signals or the second sensing signals, respectively, by the sensing circuit 13 arranged on the filter element 12. Then, the state of the blue laser corresponding to the blue laser processing device can be derived according to the first sensing signals or the second sensing signals (e.g. the size of the optical power). Thus, the failure or other problems affecting the processing effect of the blue laser processing device can be found immediately, so that the maintenance personnel can quickly find the problem and eliminate the failure or the problem according to the sensing results provided by the photoelectric sensing device 1. The detailed debugging and detection processes will be described below.

[0042] Figure 3 The architecture diagram of the photoelectric sensing system of the present application is shown in FIG. 1. As shown in the figure, the photoelectric sensing system 3 of the present application includes a secondary light coupling element 31, a primary light coupling element 32, an erbium-doped fiber 33, a first photoelectric sensing device 34, and a second photoelectric sensing device 35. The secondary light coupling element 31 couples a plurality of incident lights to form first coupled light. The first coupled light is collected and coupled by the primary light coupling element 32 to form second coupled light. The second coupled light passes through the erbium-doped fiber 33 and is transmitted to an output end (e.g. a laser processing output head). When the second coupled light passes through the erbium-doped fiber 33, the erbium-doped fiber 33 absorbs part of the energy level of the second coupled light to form divergent fluorescence. The first photoelectric sensing device 34 and the second photoelectric sensing device 35 are used to sense the first coupled light and the fluorescence, respectively, to determine and derive the state of the first coupled light and the second coupled light. The system architecture of the photoelectric sensing system 3 of the present application is described in detail as follows.

[0043] The secondary light coupling element 31 is used to receive a plurality of incident lights to couple them into first coupled light. In detail, the secondary light coupling element 31 has a detection portion 311, which can be a detection hole or a light-transmissive detection surface formed on a surface of the secondary light coupling element 31. The first photoelectric sensing device 34 detects the first coupled light through the detection portion 311.

[0044] In an embodiment, the beams of the plurality of lasers generated by the plurality of laser light sources 36 form a plurality of incident lights, wherein the present application provides a plurality of incident lights by using a plurality of laser diodes as the laser light sources, and further forms a laser light source array. Specifically, the laser light sources of the present application can be blue laser diodes, which generate blue laser light as the incident light, and thus the first coupled light coupled by the secondary light coupling element 31 includes a blue light beam of 430 nm. Hereinafter, the optoelectronic sensing system 3 of the present application will be described by taking a blue laser system as an example.

[0045] In the present embodiment, a laser light source array having fourteen blue laser diodes generating blue laser light is taken as an example, wherein the secondary light coupling element 31 can be an N x 1 light coupling element. As shown in the figure, the secondary light coupling element 31 of the present application uses a 2 x 1 light coupling element. For example, seven secondary light coupling elements 31 can be arranged in the present embodiment, and each secondary light coupling element 31 receives laser beams from two laser diodes in the laser light source array as incident light. Thus, the secondary light coupling element 31 receives two incident lights and couples them into the first coupled light. Therefore, a plurality of secondary light coupling elements 31 will form a plurality of first coupled lights, which are then transmitted to the primary light coupling element 32 through optical fibers.

[0046] The primary light coupling element 32 is connected to the plurality of secondary light coupling elements 31 through optical fibers and receives a plurality of first coupled lights from each secondary light coupling element 31. The primary light coupling element 32 couples the plurality of first coupled lights into the second coupled light. As described above, in the present embodiment, the primary light coupling element 32 is a 7 x 1 light coupling element, which is connected to each secondary light coupling element 31 and couples the received plurality of first coupled lights into the second coupled light with high power. Then, the high-power second coupled light is transmitted to the output end through the optical fiber.

[0047] The erbium-doped fiber 33 is connected to the primary light coupling element 32 through an optical fiber to transmit the second coupled light. Specifically, the erbium-doped fiber 33 is fused to the optical fiber between the primary light coupling element 32 and the output end, which receives the second coupled light from the primary light coupling element 32 and transmits the second coupled light to the output end to provide laser processing. The erbium-doped fiber 33 is a gain fiber doped with special ions, which can absorb part of the energy levels of the blue laser light when the second coupled light passes through, and thus part of the second coupled light is converted into 530 nm fluorescent light and diverges outside the erbium-doped fiber 33. That is, the present application uses the erbium-doped fiber 33 to convert a small part of the second coupled light into low-power fluorescent light, which achieves the effect of attenuating a small amount of the second coupled light without affecting the power of the second coupled light output by the output end of the laser processing.

[0048] The first photoelectric sensing device 34 is disposed at the light coupling element 31 for detecting the first coupling light to generate a first sensing signal. As mentioned above, the first photoelectric sensing device 34 is disposed at the light coupling element 31 for detecting the power of the first coupling light. In this embodiment, seven first photoelectric sensing devices 34 are disposed at the light coupling element 31 for detecting the first coupling light.

[0049] In one embodiment, the first photoelectric sensing device 34 includes a diffusion film for homogenizing the first coupling light, a filter element having a plurality of filter coatings for filtering a first detection beam from the first coupling light, and a sensing circuit for converting the first detection beam into a first sensing signal. In detail, the first photoelectric sensing device 34 can filter a first detection beam having a wavelength of 450 nm from the first coupling light, and generate a first sensing signal according to the first detection beam, so that the state of the first coupling light can be checked immediately. In other words, the present application can be applied to a blue laser processing device for detecting the state of the blue laser processing device.

[0050] The second photoelectric sensing device 35 is disposed outside the erbium-doped fiber 33 for detecting the fluorescence emitted by the erbium-doped fiber 33 to generate a second sensing signal.

[0051] In one embodiment, the second photoelectric sensing device 35 includes a diffusion film for homogenizing the fluorescence, a filter element having a plurality of filter coatings for filtering a second detection beam from the fluorescence, and a sensing circuit for converting the second detection beam into a second sensing signal. In detail, the second photoelectric sensing device 35 can filter a second detection beam having a wavelength of 530 nm from the fluorescence, and generate a second sensing signal according to the second detection beam. In other words, the present application can generate the fluorescence based on the erbium-doped fiber 33, and the power of the fluorescence is linearly related to the power of the second detection beam. Therefore, the power of the fluorescence can be directly detected by the second photoelectric sensing device 35 to determine the overall energy of the second coupling light, so that the purpose of immediate monitoring can be achieved.

[0052] As mentioned above, the photoelectric sensing system 3 can detect the first coupling light by the first photoelectric sensing device 34 to generate a first sensing signal, and detect the fluorescence by the second photoelectric sensing device 35 to generate a second sensing signal, so that the state of the first coupling light and the second coupling light can be determined. When the power of the first coupling light or the fluorescence changes, the problem of the device can be further determined, such as the problem of the light coupling element 31, the main light coupling element 32, or the laser light source 36, so that the problem can be eliminated.

[0053] In one embodiment, the present application further comprises a processing unit storing the first threshold value and the second threshold value and connected to the first photoelectric sensing device 34 and the second photoelectric sensing device 35, wherein the processing unit determines the state of the first coupled light and the second coupled light by comparing the first sensing signal with the first threshold value and the second sensing signal with the second threshold value, respectively. The first sensing signal and the second sensing signal can be voltage signals, and the first threshold value and the second threshold value can be the lowest or highest voltage value or a range of voltage values. In one embodiment, the processing unit can be a computer or a server, or an electronic device with a storage unit and a processor capable of processing data.

[0054] Figure 4 A flowchart of the photoelectric sensing method of the present application. As shown in the figure, please refer to Figure 3 The photoelectric sensing method of the present application comprises the following steps.

[0055] In step S401, at least one coupling element is used to couple a plurality of incident lights to form at least one first coupled light. The present application provides at least one coupling element 31 with a detection portion 311 to receive a plurality of incident lights and couple them into at least one first coupled light. A plurality of laser light sources 36 are provided to form a laser light source array, so as to generate a plurality of incident lights, which are transmitted to the corresponding coupling element 31 through an optical fiber.

[0056] In step S402, a main coupling element is used to couple the at least one first coupled light to form a second coupled light. In short, a main coupling element 32 connected to each coupling element 31 is provided to receive and couple the at least one first coupled light to form a second coupled light.

[0057] In step S403, part of the second coupled light passes through an erbium-doped optical fiber to form fluorescence. In short, an erbium-doped optical fiber 33 connected to the main coupling element 32 is provided for the second coupled light to pass through. The erbium-doped optical fiber 33 is arranged between the main coupling element 32 and an output end and transmits the second coupled light to the output end. When the second coupled light passes through, the erbium-doped optical fiber 33 absorbs part of the energy level of the blue laser light based on the doping of special ions, so that part of the second coupled light forms fluorescence and diverges outside the erbium-doped optical fiber 33.

[0058] In step S404, a first photoelectric sensing device is used to detect the first coupled light. In short, a first photoelectric sensing device 34 is arranged on the corresponding coupling element 31, so that the first photoelectric sensing device 34 detects the first coupled light through the detection portion 311 to generate a first sensing signal.

[0059] In one embodiment, the first photoelectric sensing device 34 of the present application comprises a diffusion film for homogenizing the first coupled light, a filter element having a plurality of filter coatings and capable of filtering at least one first detection beam from the first coupled light, and a sensing circuit for converting the first detection beam into a first sensing signal, wherein the first photoelectric sensing device 34 filters a first detection beam having a wavelength of 450 nm from the first coupled light and generates a first sensing signal in response to the first detection beam, thereby inferring the state of the first coupled light.

[0060] In step S405, the fluorescence is detected by the second photoelectric sensing device. In other words, the second photoelectric sensing device 35 is disposed outside the erbium-doped fiber 33 and detects the fluorescence to generate a second sensing signal.

[0061] In one embodiment, the second photoelectric sensing device 35 of the present application comprises a diffusion film for homogenizing the fluorescence, a filter element having a plurality of filter coatings and capable of filtering a second detection beam from the fluorescence, and a sensing circuit for converting the second detection beam into a second sensing signal, wherein the second photoelectric sensing device 35 filters a second detection beam having a wavelength of 530 nm from the fluorescence and generates a second sensing signal in response to the second detection beam, thereby inferring the state of the second coupled light through the second sensing signal.

[0062] In step S406, the states of the first coupled light and the second coupled light are determined. The present application can determine the states of the corresponding first coupled light and second coupled light based on the magnitudes of the first sensing signal and the second sensing signal.

[0063] In one embodiment, the states of the first coupled light and the second coupled light can be determined by a processing unit having stored therein first and second threshold values and connected to the at least one first photoelectric sensing device 34 and the second photoelectric sensing device 35, i.e., the processing unit determines the states of the first coupled light and the second coupled light by comparing the first sensing signal with the first threshold value and the second sensing signal with the second threshold value, respectively.

[0064] In one embodiment, when the photoelectric sensing system of the present application is capable of detecting blue laser light having a wavelength of 450 nm and green fluorescence having a wavelength of 530 nm, the first sensing signal must be higher than the energy excited in the foregoing steps and less than a set range value, such as 270 microwatts (µw) < first sensing signal < 280 microwatts (µw); in addition, the second sensing signal must be higher than the energy collected in the foregoing steps, such as 570 microwatts (µw) < second sensing signal.

[0065] Figure 5A flowchart of the debugging procedure of the photoelectric sensing method of the present application. As shown in the figure, the present application, based on the states of the first coupled light and the second coupled light as described above, carries out a debugging procedure including the following.

[0066] In procedure 501, the state of the fluorescence is detected. When the output power of the laser beam of the laser processing device is reduced, the state of the fluorescence at the erbium-doped fiber is checked by the second photoelectric sensing device, and at this time, it is checked whether the power of the fluorescence detected by the second photoelectric sensing device (second sensing signal) is less than the second threshold value.

[0067] In procedure 502, the order-coupling elements are checked. When the power of the fluorescence detected by the second photoelectric sensing device is less than the second threshold value, it indicates that the second coupled light is in a state of signal attenuation, and at this time, the order-coupling elements at the front end are checked.

[0068] In procedure 503, the fiber is cut to check the laser light sources. When it is found that the signal of the first coupled light detected by the order-coupling element is attenuated, the laser light sources connected to the order-coupling element are cut off for checking the laser light sources one by one, that is, the powers of the multiple incident lights are further checked when the at least one first coupled light and the second coupled light are in the attenuated state. Specifically, since a single order-coupling element is connected to multiple laser light sources, taking the case of two laser light sources connected to a single order-coupling element as an example, since the signal of the first coupled light detected by the order-coupling element is attenuated, the two laser light sources connected to the order-coupling element are further cut off for detection, which can quickly find out the laser light source causing the signal attenuation and eliminate the problem, so it is not necessary to detect each laser light source, thereby improving the efficiency of debugging.

[0069] In procedure 504, the light transmission efficiency of the main coupling element is checked. When the second coupled light is in the attenuated state and the at least one first coupled light is in the normal state, the light transmission efficiency of the main coupling element is checked. In detail, when it is found that the first coupled light detected by the order-coupling element is in the normal state, that is, the laser light sources at the front end are all normal, it indicates that the problem causing the power reduction occurs in the main coupling element between the order-coupling element and the erbium-doped fiber, and thus the light transmission efficiency of the main coupling element is checked in this procedure.

[0070] In the flowchart 505, it is determined whether the light beam backfiring phenomenon occurs. That is, when the second coupled light is in the weakened state and the at least one first coupled light is in the enhanced state, it is determined whether the second coupled light has the reflection phenomenon. In detail, when the first coupled light is in the enhanced state, the cause can be that the light beam returns along the original path (i.e. sequentially along the paths of the erbium-doped optical fiber, the main coupling light element, and the secondary coupling light element) from the laser processing output head, that is, the scattered or diffused light beam, so that the first photoelectric sensing device additionally senses the backfired light beam, which will cause damage to the laser light source. Therefore, the cause of the light beam backfiring phenomenon caused by the laser processing output head or the laser processing process must be checked.

[0071] In the flowchart 506, the light transmission efficiency of the secondary coupling light element is determined. In addition, when the second photoelectric sensing device sensing signal is in the weakened state and the at least one first photoelectric sensing device sensing signal is in the enhanced state, it can also be caused by the deterioration of the light transmission efficiency of the secondary coupling light element. Therefore, in this case, the light transmission efficiency of the at least one secondary coupling light element also needs to be determined.

[0072] Figure 6 The flowchart of the photoelectric sensing method of the present application is shown. In brief, the present application uses a processing unit to monitor the front-end laser light source (such as blue light laser) or the rear-end fluorescent light through the first photoelectric sensing device and the second photoelectric sensing device, and the monitoring process is as follows.

[0073] In the flowcharts 601-603, the processing unit monitors the first sensing signal and the second sensing signal returned by the first photoelectric sensing device and the second photoelectric sensing device. In brief, it is compared whether the first sensing signal is lower than the first threshold value (but still needs to be higher than the previously excited energy) to determine whether the front-end laser light source and the secondary coupling light element have abnormal conditions, and it is compared whether the second sensing signal is lower than the second threshold value to determine whether the light transmission efficiency of the main coupling light element is normal.

[0074] If both the flowcharts 602 and 603 are normal, it proceeds to the flowchart 604, that is, if there is no abnormality in the comparison of the first sensing signal and the second sensing signal, it is determined that the laser light source and the coupling light elements are normally operated. Otherwise, in the flowcharts 605-606, when the front-end blue light has abnormal conditions, such as energy reduction, power instability, or backfiring phenomenon, the system operation is stopped first, and the sensing information of the first photoelectric sensing device and the second photoelectric sensing device is used to find the problem and the abnormal component, so that the laser light source and the secondary coupling light element are repaired, and the correct state is returned to the processing unit after the problem is solved, so that the system continues to operate.

[0075] In addition, when the fluorescence of the detection backend is abnormal, such as the energy of the laser beam of the front-end import is abnormal, the system operation is stopped first, and the problem is found according to the sensing information of the first photoelectric sensing device and the second photoelectric sensing device, and the abnormal module is found to perform backend detection, that is, whether the over-light efficiency of the main coupling light element is abnormal, and after the problem is excluded, the correct state is returned to the processing unit to make the system continue to operate.

[0076] In summary, the photoelectric sensing device of the present application filters the detection light beams of 450 nm and 530 nm by using the filter element with multiple filter coatings, and then senses by using the sensing circuit to achieve the effect of double-band sensing. The photoelectric sensing system and method with the aforementioned photoelectric sensing device set the first photoelectric sensing element and the second photoelectric sensing element at the secondary coupling light element and the erbium-doped optical fiber, respectively, to perform double-band detection of 450 nm and 530 nm, respectively, to achieve the purpose of real-time monitoring. Furthermore, the present application provides a debugging method, so that maintenance personnel can quickly find the place where the problem occurs to quickly solve the problem.

[0077] The above embodiments are only illustrative and not intended to limit the present application. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application is defined by the claims attached to the present application, and should be included in the disclosed technical content as long as it does not affect the effect and implementation purpose of the present application.

Claims

1. An optoelectronic sensing system, characterized in that, The system comprises: at least one light coupling element configured to receive a plurality of incident lights to couple into at least one first coupled light; a main light coupling element connected to one end of the at least one light coupling element and configured to receive the first coupled light to couple into a second coupled light; an erbium-doped fiber connected to another end of the main light coupling element and configured to pass the second coupled light to form a fluorescence from a portion of the second coupled light; at least one first photoelectric sensing device correspondingly disposed at the at least one light coupling element and configured to detect the first coupled light to generate a first sensing signal; and a second photoelectric sensing device disposed at the erbium-doped fiber and configured to detect the fluorescence to generate a second sensing signal, wherein the first sensing signal and the second sensing signal are respectively used to determine a state of the first coupled light and the second coupled light. The system further comprises a processing unit having a first threshold value and a second threshold value and connected to the at least one first photoelectric sensing device and the second photoelectric sensing device, the processing unit being configured to compare the first sensing signal with the first threshold value and the second sensing signal with the second threshold value respectively to determine the state of the first coupled light and the second coupled light.

2. The optoelectronic sensing system of claim 1, wherein, The system further comprises a plurality of laser light sources configured to generate the plurality of incident lights.

3. The optoelectronic sensing system of claim 1, wherein, The at least one first photoelectric sensing device respectively comprises:

4. The optoelectronic sensing system of claim 1, wherein, a diffusion film configured to homogenize the first coupled light; a filter element having a plurality of filter coatings configured to filter a first detection light beam from the first coupled light; and a sensing circuit configured to convert the first detection light beam into the first sensing signal. The second photoelectric sensing device comprises:

5. The optoelectronic sensing system of claim 1, wherein, a diffusion film configured to homogenize the fluorescence; a filter element having a plurality of filter coatings configured to filter a second detection light beam from the fluorescence; and a sensing circuit configured to convert the second detection light beam into the second sensing signal. The at least one first photoelectric sensing device filters a detection light beam having a wavelength of 450 nanometers (nm) from the first coupled light.

6. The optoelectronic sensing system of claim 1, wherein, The second photoelectric sensing device filters a detection light beam having a wavelength of 530 nanometers (nm) from the fluorescence.

7. The optoelectronic sensing system of claim 1, wherein, The system comprises:

8. A method of optoelectronic sensing, the method comprising: at least one light coupling element configured to receive a plurality of incident lights to couple into at least one first coupled light; a main light coupling element connected to one end of the at least one light coupling element and configured to receive the first coupled light to couple into a second coupled light; an erbium-doped fiber connected to another end of the main light coupling element and configured to pass the second coupled light to form a fluorescence from a portion of the second coupled light; at least one first photoelectric sensing device correspondingly disposed at the at least one light coupling element and configured to detect the first coupled light to generate a first sensing signal; and a second photoelectric sensing device disposed at the erbium-doped fiber and configured to detect the fluorescence to generate a second sensing signal, wherein the first sensing signal and the second sensing signal are respectively used to determine a state of the first coupled light and the second coupled light. ​ ​ 9. The optoelectronic sensing method of claim 8, wherein, The step of judging the state of the first coupled light and the second coupled light comprises: setting a processing unit storing a first threshold value and a second threshold value and connecting the at least one first photoelectric sensing device and the second photoelectric sensing device, and judging the state of the first coupled light and the second coupled light by comparing the first sensing signal with the first threshold value and the second sensing signal with the second threshold value, respectively.

10. The optoelectronic sensing method of claim 8, wherein, The plurality of incident lights are from a plurality of laser light sources.

11. The optoelectronic sensing method of claim 8, wherein, When it is judged that the first coupled light and the second coupled light are both in the weakened state, the power of the plurality of incident lights is confirmed.

12. The optoelectronic sensing method of claim 8, wherein, When the second coupled light is in the weakened state and the first coupled light is in the normal state, the over-light efficiency of the main light coupling element is detected.

13. The optoelectronic sensing method of claim 8, wherein, When the second coupled light is in the weakened state and the first coupled light is in the enhanced state, the over-light efficiency of the at least one light coupling element or whether the second coupled light appears reflection is confirmed.

14. The optoelectronic sensing method of claim 8, wherein, The at least one first photoelectric sensing device comprises a diffusion film for homogenizing the first coupled light, a filter element having a plurality of filter coatings for filtering a first detection light beam from the first coupled light, and a sensing circuit for converting the first detection light beam into the first sensing signal.

15. The optoelectronic sensing method of claim 8, wherein, The second photoelectric sensing device comprises a diffusion film for homogenizing the fluorescent light, a filter element having a plurality of filter coatings for filtering a second detection light beam from the fluorescent light, and a sensing circuit for converting the second detection light beam into the second sensing signal.

16. The optoelectronic sensing method of claim 8, wherein, The at least one first photoelectric sensing device filters a detection light beam with a wavelength of 450 nm from the first coupled light.

17. The optoelectronic sensing method of claim 8, wherein, The second photoelectric sensing device filters a detection light beam with a wavelength of 530 nm from the fluorescent light.

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