A three-axis magnetic sensor inspection and calibration device and inspection and calibration system

Abstract

The present invention relates to a three-axis magnetic sensor inspection and calibration device and an inspection and calibration system. The inspection and calibration device comprises a first coil, a second coil, and a third coil, which are nested with each other. The axes of the first coil, the second coil, and the third coil are respectively in a first direction, a second direction, and a third direction. The first coil, the second coil, and the third coil are located on the same side of a test station in the third direction. The third coil is located between the middle of the first coil and the second coil in the third direction and the test station, so that when the first coil is energized, a uniform magnetic field in the first direction is generated at the test station. When the second coil is energized, a uniform magnetic field in the second direction is generated at the test station. When the third coil is energized, a uniform magnetic field in the third direction is generated at the test station. The first direction, the second direction, and the third direction are perpendicular to each other.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic sensors, and in particular to a testing and calibration device and a testing and calibration system for a three-axis magnetic sensor. Background Art

[0002] Electronic compasses based on magnetic sensor technology are increasingly being used in electronic products to provide users with navigational convenience. In recent years, demand for magnetic sensors has evolved from two-axis planar magnetic sensors to three-axis full-space magnetic sensors. Three-axis magnetic sensors play a vital role in applications such as smartphones and car navigation. However, limitations in material and mechanical processes during manufacturing can lead to zero-point offset errors in the sensors, affecting accuracy. Therefore, three-axis magnetic sensors require verification and calibration of their magnetic performance parameters.

[0003] During the inspection and calibration process of the three-axis magnetic sensor, it is necessary to measure the output of the three-axis magnetic sensor in magnetic field environments with different directions. In order to reduce the measurement error caused by external factors, the magnetic field environment used for testing needs to be relatively uniform. However, the magnetic field uniformity zone generated by the traditional Helmholtz coil is at the geometric center of the Helmholtz coil (located inside the coil). Therefore, when performing the test, it is necessary to move the three-axis magnetic sensor to be tested into the coil and remove the three-axis magnetic sensor that has completed the test from the coil one by one. This greatly reduces the test efficiency, makes it difficult to perform large-scale testing, and increases the difficulty of implementing automated testing. Summary of the Invention

[0004] Based on this, it is necessary to address the problem that in the prior art, the magnetic field uniformity zone generated by the Helmholtz coil is at the geometric center of the Helmholtz coil (located inside the coil). Therefore, when conducting a test, it is necessary to move the three-axis magnetic sensor to be tested into the coil and move the three-axis magnetic sensor that has completed the test out of the coil one by one, which greatly reduces the test efficiency and increases the difficulty of achieving large-scale testing and automated testing. A three-axis magnetic sensor inspection and calibration device and an inspection and calibration system are provided to improve the above-mentioned defects.

[0005] A three-axis magnetic sensor inspection and calibration device is used to inspect and calibrate the three-axis magnetic sensor placed at a test station, the inspection and calibration device comprising a first coil, a second coil, and a third coil that are nested with each other;

[0006] The axes of the first coil, the second coil and the third coil are respectively the first direction, the second direction and the third direction, and the first coil, the second coil and the third coil are located on the same side of the test station in the third direction, and the third coil is located between the middle of the whole formed by the first coil and the second coil in the third direction and the test station, so that when the first coil is energized, a uniform magnetic field in the first direction is generated at the test station, when the second coil is energized, a uniform magnetic field in the second direction is generated at the test station, and when the third coil is energized, a uniform magnetic field in the third direction is generated at the test station; wherein, the first direction, the second direction and the third direction are perpendicular to each other.

[0007] In one embodiment, the width dimension of the first coil in the first direction is b1, the width dimension of the second coil in the second direction is b2, the width dimension of the third coil in the third direction is b3, and the width dimension of the uniform magnetic field required for inspecting and calibrating the three-axis magnetic sensor of the test station is b4; wherein b1, b2 and b3 are all greater than or equal to 3×b4.

[0008] In one embodiment, the first coil includes a first frame and a first coil winding, wherein the first coil winding is formed by a wire extending along the first frame and being wound multiple times;

[0009] Wherein, b1 is the width dimension of the first frame in the first direction.

[0010] In one embodiment, the second coil includes a second frame and a second coil winding, wherein the second coil winding is formed by extending a wire along the second frame and winding a plurality of turns;

[0011] Wherein, b2 is the width dimension of the second frame in the second direction.

[0012] In one embodiment, the third coil includes a third frame and a third coil winding, and the third coil winding is formed by a wire extending along the third frame and being wound multiple times;

[0013] Wherein, b3 is the width dimension of the third frame in the third direction.

[0014] In one embodiment, the second coil is sleeved outside the first coil, and the third coil is sleeved outside the second coil; the third coil is located between the middle of the second coil in the third direction and one end close to the test station.

[0015] In one embodiment, a side of the third coil facing the test station is flush with an end of the second coil facing the test station.

[0016] In one embodiment, the first coil is sleeved outside the second coil, and the third coil is sleeved outside the first coil; the third coil is located between the middle of the first coil in the third direction and one end close to the test station.

[0017] In one embodiment, a side of the third coil facing the test station is flush with an end of the first coil facing the test station.

[0018] In one embodiment, the inspection and calibration device further includes a standard magnetic sensor, which is disposed at the test station and is used to monitor the magnetic field of the test station.

[0019] A three-axis magnetic sensor inspection and calibration system includes a loading device, a testing machine, an unloading device, and the inspection and calibration device as described in any of the above embodiments;

[0020] The loading device is used to load the three-axis magnetic sensor onto the test machine, the test machine is used to support the three-axis magnetic sensor on the test station, and the unloading device is used to unload the three-axis magnetic sensor on the test machine.

[0021] In actual use, the above-mentioned three-axis magnetic sensor inspection and calibration device and inspection and calibration system first place the three-axis magnetic sensor to be tested at a test station. Then, the first coil is energized (the second and third coils are de-energized), causing the first coil to generate a uniform magnetic field in a first direction at the test station. This applies a uniform magnetic field in the first direction to the three-axis magnetic sensor at the test station, thereby inspecting and calibrating the output of the three-axis magnetic sensor in the first direction. Then, the second coil is energized (the first and third coils are de-energized), causing the second coil to generate a uniform magnetic field in a second direction at the test station. This applies a uniform magnetic field in the second direction to the three-axis magnetic sensor at the test station, thereby inspecting and calibrating the output of the three-axis magnetic sensor in the second direction. Then, the third coil is energized (the first and second coils are de-energized), causing the third coil to generate a uniform magnetic field in a third direction at the test station. This applies a uniform magnetic field in the third direction to the three-axis magnetic sensor at the test station, thereby inspecting and calibrating the output of the three-axis magnetic sensor in the third direction.

[0022] In this way, by setting the first coil, the second coil, the third coil and the relative coordination and positional relationship with the test station, the first coil, the second coil and the third coil can respectively generate uniform magnetic fields in different directions at the test station, and the test station is located on the same side of the first coil, the second coil and the third coil, rather than inside the first coil, the second coil and the third coil. Compared with the prior art in which the test station is located at the geometric center of the Helmholtz coil (located inside the Helmholtz coil), the test station in the present application is located on the same side of the first coil, the second coil and the third coil, which facilitates the loading and unloading operations of the test station, is conducive to improving the test efficiency of the three-axis magnetic sensor, and is conducive to realizing large-scale automated testing operations of the three-axis magnetic sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the structure of a three-axis magnetic sensor inspection and calibration device according to one embodiment of the present invention;

[0024] Figure 2 for Figure 1 A front view of the inspection and calibration device for the three-axis magnetic sensor is shown;

[0025] Figure 3 for Figure 1 The positional relationship between the standard magnetic sensor and the magnetic sensor to be tested in the inspection and calibration device of the three-axis magnetic sensor is shown;

[0026] Figure 4 This is the magnetic field distribution diagram at the test station when the first coil is energized;

[0027] Figure 5 This is the magnetic field distribution diagram at the test station when the third coil is energized;

[0028] Figure 6 A magnetic field distribution curve diagram at the geometric center of the first coil and at the test station when the third coil is energized;

[0029] Figure 7 The figure is a magnetic field distribution curve diagram of the test station when the first coil is energized under conditions of different width sizes of the first frame. DETAILED DESCRIPTION

[0030] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0033] In the present invention, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0034] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0036] See also Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a three-axis magnetic sensor inspection and calibration device for inspecting and calibrating a three-axis magnetic sensor B located at a test station A. The inspection and calibration device includes a first coil 10, a second coil 20, and a third coil 30. The first coil 10, the second coil 20, and the third coil 30 are nested within each other, with the axes of the first coil 10, the second coil 20, and the third coil 30 oriented in a first direction X, a second direction Y, and a third direction Z, respectively. The first coil 10, the second coil 20, and the third coil 30 are located on the same side of the test station A in the third direction Z. The third coil 30 is located between the center of the entire assembly of the first coil 10 and the second coil 20 in the third direction Z and the test station A. This ensures that when the first coil 10 is energized, it generates a uniform magnetic field in the first direction X at the test station A; when the second coil 20 is energized, it generates a uniform magnetic field in the second direction Y at the test station A; and when the third coil 30 is energized, it generates a uniform magnetic field in the third direction Z at the test station A. The first direction X, the second direction Y, and the third direction Z are perpendicular to each other.

[0037] It should be noted that the axial direction of the first coil 10 refers to the direction perpendicular to the plane enclosed by the first coil 10, the axial direction of the second coil 20 refers to the direction perpendicular to the plane enclosed by the second coil 20, and the axial direction of the third coil 30 refers to the direction perpendicular to the plane enclosed by the third coil 30. In addition, the middle of the entirety formed by the first coil 10 and the second coil 20 in the third direction Z refers to the middle of the first coil 10 and the second coil 20 located relatively outside in the third direction Z. For example, when the second coil 20 is located outside the first coil 10, that is, the second coil 20 is sleeved outside the first coil 10, the middle of the entirety formed by the first coil 10 and the second coil 20 in the third direction Z refers to the middle of the second coil 20 in the third direction Z.

[0038] In actual use, the above-described three-axis magnetic sensor inspection and calibration device is first placed in a test station A. The first coil 10 is then energized (while the second and third coils 20 and 30 are de-energized), causing the first coil 10 to generate a uniform magnetic field in a first direction X at the test station A. This applies a uniform magnetic field in the first direction X to the three-axis magnetic sensor B at the test station A, thereby inspecting and calibrating the output of the three-axis magnetic sensor B in the first direction X. The second coil 20 is then energized (while the first and third coils 10 and 30 are de-energized), causing the second coil 20 to generate a uniform magnetic field in a second direction Y at the test station A. This applies a uniform magnetic field in the second direction Y to the three-axis magnetic sensor B at the test station A, thereby inspecting and calibrating the output of the three-axis magnetic sensor B in the second direction Y. Then, the third coil 30 is energized (the first coil 10 and the second coil 20 are de-energized), so that the third coil 30 generates a uniform magnetic field in the third direction Z at the test station A, that is, a uniform magnetic field in the third direction Z is applied to the three-axis magnetic sensor B located at the test station A, thereby testing and calibrating the output of the three-axis magnetic sensor B in the third direction Z.

[0039] Thus, by arranging the first coil 10, the second coil 20, and the third coil 30 and their relative coordination and positional relationship with the test station A, the first coil 10, the second coil 20, and the third coil 30 can each generate a uniform magnetic field of different directions at the test station A. Moreover, the test station A is located on the same side of the first coil 10, the second coil 20, and the third coil 30, rather than inside the first coil 10, the second coil 20, and the third coil 30. Compared with the prior art in which the test station A is located at the geometric center of the Helmholtz coil (located inside the Helmholtz coil), the test station A in the present application is located on the same side of the first coil 10, the second coil 20, and the third coil 30, facilitating the loading and unloading operations of the test station A, improving the testing efficiency of the three-axis magnetic sensor B, and facilitating the large-scale automated testing of the three-axis magnetic sensor B. That is, multiple three-axis magnetic sensors B can be placed on the test station A at one time to complete inspection and calibration. For example, the inspection and calibration device of the three-axis magnetic sensor of the present invention can be used in conjunction with a test machine for wafer testing and / or final testing. While performing wafer testing and / or final testing, it can also inspect and calibrate the magnetic properties of multiple three-axis magnetic sensors B at one time.

[0040] In addition, compared with traditional Helmholtz coils, the inspection and calibration device of the three-axis magnetic sensor of the present application only requires three sets of coils to generate uniform magnetic fields in three directions at the test station A. It has a simple structure, a small size and is easy to process.

[0041] It should be noted that when the first coil 10 is energized (the second coil 20 and the third coil 30 are de-energized), in addition to generating a magnetic field in the first direction X, the test station A also generates a magnetic field in the second direction Y and a magnetic field in the third direction Z. The magnetic field intensities of the magnetic field in the second direction Y and the magnetic field in the third direction Z are relatively weak and can be ignored. The magnetic field in the first direction X has a relatively strong magnetic field intensity and good uniformity, so it can be approximately considered that the magnetic field at the test station A at this time is a uniform magnetic field in the first direction X. In other words, the uniform magnetic field mentioned herein is not uniform in an absolute sense, but rather approximately uniform.

[0042] Figure 4 The figure shows the magnetic field distribution at the test station A when the first coil 10 is energized (the second coil 20 and the third coil 30 are de-energized), where Bx represents the magnetic field in the first direction X, By represents the magnetic field in the second direction Y, and Bz represents the magnetic field in the third direction Z. Figure 4 As can be seen, the magnetic field in the first direction X is relatively uniform and has the highest magnetic field strength. The magnetic field strengths in the second direction Y and the third direction Z are relatively small and negligible. Therefore, when the first coil 10 is energized (the second coil 20 and the third coil 30 are de-energized), the magnetic field at test station A can be approximately considered a uniform magnetic field in the first direction X, meeting the requirements for testing and calibrating the output of the three-axis magnetic sensor B in the first direction X.

[0043] Similarly, when the second coil 10 is energized (the first and third coils 10 and 30 are de-energized), the magnetic field distribution at test station A is as follows: the magnetic field intensities in the first direction X and the third direction Z are both negligible, while the magnetic field in the second direction Y is relatively strong and uniform. Therefore, when the second coil 20 is energized (the first and third coils 10 and 30 are de-energized), the magnetic field at test station A can be approximately considered a uniform magnetic field in the second direction Y, meeting the requirements for testing and calibrating the output of the three-axis magnetic sensor B in the second direction Y.

[0044] Figure 5 The magnetic field distribution at the test station A is shown when the third coil 30 is energized (the first coil 10 and the second coil 20 are de-energized). Figure 4 As can be seen, the magnetic field strengths in the first direction X and the second direction Y are both small and negligible. The magnetic field strength in the third direction Z is relatively large and uniform. Therefore, when the third coil 30 is energized (the first coil 10 and the second coil 20 are de-energized), the magnetic field at test station A can be approximately considered a uniform magnetic field in the third direction Z, meeting the requirements for testing and calibrating the output of the three-axis magnetic sensor B in the third direction Z.

[0045] It should be noted that the magnetic fields in the third direction Z generated by energizing the first coil 10 and the second coil 20 are both non-uniform. Therefore, when energizing the third coil 30 to test and calibrate the output of the three-axis magnetic sensor B in the third direction Z, the first coil 10 and the second coil 20 must be de-energized. However, when energizing the first coil 10 to test and calibrate the output of the three-axis magnetic sensor B in the first direction X, it is not mandatory that the second coil 20 and the third coil 30 be de-energized. Similarly, when energizing the second coil 20 to test and calibrate the output of the three-axis magnetic sensor B in the second direction Y, it is not mandatory that the first coil 10 and the third coil 30 be de-energized.

[0046] See Figures 1 to 2 As shown, specifically, the second coil 20 is arranged outside the first coil 10, and the third coil 30 is arranged outside the second coil 20. In this way, when the first coil 10, the second coil 20 and the third coil 30 are installed, it is helpful to adjust the position of the third coil 30 relative to the whole formed by the first coil 10 and the second coil 20, so that the third coil 30 is located between the middle of the whole formed by the first coil 10 and the second coil 20 in the third direction Z and the test station A.

[0047] See Figures 1 to 2 As shown, specifically, when the second coil 20 is sleeved outside the first coil 10, the third coil 30 is sleeved between the middle portion of the second coil 20 in the third direction Z and the end closest to the test station A. That is, the third coil 30 is positioned close to the test station A in the third direction Z. This ensures that when the third coil 30 is energized, a uniform magnetic field in the third direction Z is generated at the test station A. Furthermore, this facilitates the coordinated arrangement of the third coil 30 and the second coil 20, thereby securing the third coil 30 to the second coil 20.

[0048] Furthermore, when the third coil 30 is sleeved outside the second coil 20, the side of the third coil 30 facing the test station A is flush with the end of the second coil 20 facing the test station A (specifically, Figure 2 In the illustrated embodiment, the bottom of the third coil 30 is flush with the bottom of the second coil 20. This allows the third coil 30 to be positioned as close to the test station A as possible, ensuring that the third coil 30 generates a uniform magnetic field in the third direction Z at the test station A when energized. This facilitates assembly of the third coil 30 and the second coil 20.

[0049] See Figures 1 to 2As shown, specifically, the geometric centers of the first coil 10 and the second coil 20 coincide, and the geometric center of the third coil 30 is located between the geometric centers of the first coil 10 and the second coil 20 and the test station A. In other words, the projection of the geometric centers of the first coil 10 and the second coil 20 along the third direction Z onto the plane enclosed by the third coil 30 coincides with the geometric center of the third coil 30, and the geometric centers of the test station A and the third coil 30 are positioned relative to each other in the third direction Z. This facilitates assembly and alignment while also avoiding the need to move and adjust the position of the three-axis magnetic sensor B within the test station A when switching the magnetic field direction to better meet inspection and calibration requirements.

[0050] Figure 6 The figure shows the magnetic field distribution near the geometric center of the first coil 10 (located inside the first coil 10 ) and at the test station A when the third coil 30 is energized alone. Figure 6 The curve at the top is the magnetic field distribution curve near the geometric center of the first coil 10. Figure 6 The curve at the bottom is the magnetic field distribution curve at test station A. Figure 6 It can be seen that compared to the magnetic field distribution near the geometric center of first coil 10, the magnetic field at test station A is more uniform, and thus can better meet the requirements for testing and calibrating three-axis magnetic sensor B. Although the magnetic field intensity at test station A is slightly lower than the magnetic field intensity near the geometric center of first coil 10, the magnetic field intensity at test station A can be increased by increasing the number of coil turns and / or increasing the current, ensuring that the magnetic field intensity at test station A meets the requirements for testing and calibrating three-axis magnetic sensor B.

[0051] The inventor creatively obtained through experiments Figure 7 The magnetic field distribution curve shown in the figure shows that the coil width affects the magnetic field uniformity and intensity at test station A. Under the same conditions (number of coil turns, current, etc.), increasing the coil width improves the magnetic field uniformity at test station A, but reduces the magnetic field intensity.

[0052] See Figures 1 to 2To ensure that the magnetic field uniformity at test station A meets the requirements for testing and calibrating the three-axis magnetic sensor, in one embodiment, the width of the first coil 10 in the first direction X is b1, the width of the second coil 20 in the second direction Y is b2, and the width of the third coil 30 in the third direction Z is b3. The required uniform magnetic field width at test station A is b4, and b1, b2, and b3 are all greater than or equal to 3×b4. This improves the magnetic field uniformity at test station A while ensuring that the uniform magnetic field width at test station A meets the requirements. Consequently, the requirements for magnetic field uniformity and uniform magnetic field width are met during testing and calibration, ensuring the accuracy of testing and calibration of the three-axis magnetic sensor B.

[0053] See Figures 1 to 2 As shown, specifically, the first coil 10 includes a first frame 11 and a first coil winding 13 wound on the first frame 11. The first frame 11 is a rectangular frame, and the first coil winding 13 is formed by extending a wire along the four sides of the first frame 11 and winding a plurality of turns. The second coil 20 includes a second frame 21 and a second coil winding 23 wound on the second frame 21. The second frame 21 is a rectangular frame, and the second coil winding 23 is formed by extending a wire along the four sides of the second frame 21 and winding a plurality of turns. The third coil 30 includes a third frame 31 and a third coil winding 33 wound on the third frame 31. The third frame 31 is a rectangular frame, and the third coil winding 33 is formed by extending a wire along the four sides of the third frame 31 and winding a plurality of turns.

[0054] The second frame 21 is sleeved outside the first frame 11, and the third frame 31 is sleeved outside the second frame 21. It is understandable that in other embodiments not shown, the first frame 11 can also be sleeved outside the second frame 21, and the third frame 31 can be sleeved outside the first frame 11.

[0055] The axial direction of the first frame 11 is the first direction X, the axial direction of the second frame 21 is the second direction Y, and the axial direction of the third frame 31 is the third direction Z. It can be understood that the axial direction of the first frame 11 refers to the direction perpendicular to the plane enclosed by the first frame 11, that is, the direction perpendicular to the extension direction of the four sides of the first frame 11, that is, Figure 2 Similarly, the axial direction of the second frame 21 refers to the direction perpendicular to the plane enclosed by the second frame 21, that is, the direction perpendicular to the extension direction of the four sides of the second frame 21, that is, Figure 2 The axial direction of the third frame 31 refers to the direction perpendicular to the plane enclosed by the third frame 31, that is, the direction perpendicular to the extending direction of the four sides of the third frame 31, ie, Figure 2 The up and down directions shown in .

[0056] It is understandable that in other embodiments not shown, the first frame 11 , the second frame 21 and the third frame 31 may also be configured to have other shapes, such as circular, which is not limited here.

[0057] It should be noted that the first coil winding 13, the second coil winding 23, and the third coil winding 33 are each independently electrically connected to the same or different power sources via wires, thereby enabling independent power supply or disconnection of the first coil winding 13, the second coil winding 23, and the third coil winding 33. Furthermore, when powered, the current in the wires of the same coil winding flows in the same direction.

[0058] Furthermore, b1 is the width of the first frame 11 in the first direction X. b2 is the width of the second frame 21 in the second direction Y. b3 is the width of the third frame 31 in the third direction Z. The width b4 of the uniform magnetic field required at test station A refers to the width of the uniform magnetic field in the first direction X required to complete the inspection and calibration of the three-axis magnetic sensor B at test station A. The specific value of b4 can be set based on the required test dimensions of one or more magnetic sensors B to be inspected and calibrated and is not limited here.

[0059] Figure 7 The figure shows the influence of the change of the width of the first frame 11 on the magnetic field distribution at the test station A when the first coil winding 13 is energized and the second coil winding 23 and the third coil winding 33 are both de-energized. Figure 7 From top to bottom, the first curve is the magnetic field distribution at the test station A when the width of the first frame 11 is 14 mm; the second curve is the magnetic field distribution at the test station A when the width of the first frame 11 is 18 mm; the third curve is the magnetic field distribution at the test station A when the width of the first frame 11 is 20 mm; the fourth curve is the magnetic field distribution at the test station A when the width of the first frame 11 is 24 mm. Figure 7 It can be seen that as the width of the first frame 11 becomes wider, the uniformity of the magnetic field at the test station A becomes better and the magnetic field intensity becomes lower.

[0060] Specifically, the magnetic field strength of the uniform magnetic field in the first direction X at test station A can be adjusted by controlling the current of the first coil winding 13 and / or the number of turns of the first coil winding 13. That is, when the current of the first coil winding 13 and / or the number of turns of the first coil winding 13 are increased, the magnetic field strength of the uniform magnetic field at test station A also increases, thereby offsetting the weakening effect of the magnetic field strength caused by the increase in b1. Similarly, the magnetic field strength of the uniform magnetic field in the second direction Y or the third direction Z at test station A can be controlled by controlling the current of the second coil winding 23 or the number of turns of the third coil winding 33. That is, when the current of the second coil winding 23 or the number of turns of the third coil winding 33 are increased, the magnetic field strength of the uniform magnetic field at test station A also increases, thereby offsetting the weakening effect of the magnetic field strength caused by the increase in b2 or b3.

[0061] Furthermore, the first frame 11, the second frame 21 and the third frame 31 are locked and fixed by a locking mechanism, so that the first frame 11, the second frame 21 and the third frame 31 are fixed relative to each other. Optionally, the locking mechanism can be a screw locking mechanism.

[0062] Furthermore, the first frame 11 , the second frame 21 , the third frame 31 and the locking mechanism are all made of non-magnetic materials to avoid interference with the uniform magnetic field of the test station A.

[0063] It should be noted that the second coil 20 is not limited to being sheathed outside the first coil 10, and the third coil 30 is not limited to being sheathed outside the second coil. In other embodiments, the first coil 10 may be sheathed outside the second coil 20, and the third coil 30 may be sheathed outside the first coil 10. In this way, when the first coil 10, the second coil 20, and the third coil 30 are installed, it is convenient to adjust the position of the third coil 30 relative to the entire structure of the first coil 10 and the second coil 20, so that the third coil 30 is located between the center of the entire structure of the first coil 10 and the second coil 20 in the third direction Z and the test station A. As a result, when the first coil 10 is energized, a uniform magnetic field in the first direction X is generated at the test station A; when the second coil 20 is energized, a uniform magnetic field in the second direction Y is generated at the test station A; and when the third coil 30 is energized, a uniform magnetic field in the third direction Z is generated at the test station A.

[0064] Furthermore, when the first coil 10 is arranged outside the second coil 20, the third coil 30 is arranged between the middle part of the first coil 10 in the third direction Z and the end close to the test station A, so that the third coil 30 is arranged close to the test station A in the third direction Z, thereby ensuring that a uniform magnetic field in the third direction Z is generated at the test station A when the third coil 30 is energized, and it is beneficial for the third coil 30 and the first coil 10 to be arranged in coordination, so that the third coil 30 is installed and fixed on the first coil 10.

[0065] Furthermore, when the third coil 30 is arranged outside the first coil 10, the side of the third coil 30 facing the test station A is flush with the end of the first coil 10 facing the test station A. On the one hand, the third coil 30 can be set as close to the test station A as possible to ensure that the third coil 30 generates a uniform magnetic field in the third direction Z at the test station A when powered on; on the other hand, it is conducive to the assembly of the third coil 30 and the first coil 10.

[0066] See Figures 1 to 3 In an embodiment of the present invention, the inspection and calibration apparatus further includes a standard magnetic sensor 40, which is disposed at test station A and is configured to monitor the uniform magnetic field at test station A. Thus, during the inspection and calibration of the three-axis magnetic sensor B, the uniform magnetic field at test station A is monitored using the standard magnetic sensor 40, thereby preventing the accuracy of the inspection and calibration of the three-axis magnetic sensor B from being affected by coil problems.

[0067] Furthermore, there are two standard magnetic sensors 40, which are respectively disposed on opposite sides of the test station A, thereby more accurately monitoring the magnetic field of the test station A. Of course, in other embodiments, multiple standard magnetic sensors 40 may be provided to simultaneously monitor the magnetic field at various locations of the test station A, and this is not limited here.

[0068] Based on the above-mentioned three-axis magnetic sensor inspection and calibration device, the present invention also provides a three-axis magnetic sensor inspection and calibration system. This three-axis magnetic sensor inspection and calibration system includes a loading device, a test bench, an unloading device, and the above-mentioned three-axis magnetic sensor inspection and calibration device. The loading device is used to load one or more three-axis magnetic sensors B onto the test bench. The test bench is used to support the three-axis magnetic sensors B on it at a test station A, allowing the inspection and calibration device to inspect and calibrate the three-axis magnetic sensors B on the test bench. The unloading device is used to unload the three-axis magnetic sensors B from the test bench.

[0069] Thus, in actual use, first, the three-axis magnetic sensor B to be tested is loaded onto the test machine, so that the test machine supports the three-axis magnetic sensor B at the test station A. Then, the inspection and calibration device inspects and calibrates the output of the three-axis magnetic sensor B supported on the test station A in three directions. After the inspection and calibration are completed, the unloading device unloads the three-axis magnetic sensor B from the test machine, allowing the loading device to continue loading the next (or next batch) of three-axis magnetic sensors B to be tested onto the test machine, thereby realizing automated testing operations.

[0070] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0071] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A three-axis magnetic sensor inspection and calibration device for inspecting and calibrating a three-axis magnetic sensor placed at a test station, characterized in that: The inspection and calibration device includes a first coil, a second coil and a third coil which are nested with each other; The axes of the first coil, the second coil and the third coil are respectively the first direction, the second direction and the third direction, and the first coil, the second coil and the third coil are located on the same side of the test station in the third direction, and the third coil is located between the middle of the whole formed by the first coil and the second coil in the third direction and the test station, so that when the first coil is energized, a uniform magnetic field in the first direction is generated at the test station, when the second coil is energized, a uniform magnetic field in the second direction is generated at the test station, and when the third coil is energized, a uniform magnetic field in the third direction is generated at the test station; wherein, the first direction, the second direction and the third direction are perpendicular to each other.

2. The inspection and calibration device for a three-axis magnetic sensor according to claim 1, characterized in that: The width dimension of the first coil in the first direction is b1, the width dimension of the second coil in the second direction is b2, the width dimension of the third coil in the third direction is b3, and the width dimension of the uniform magnetic field required for inspecting and calibrating the three-axis magnetic sensor of the test station is b4; wherein b1, b2 and b3 are all greater than or equal to 3×b4.

3. The inspection and calibration device for a three-axis magnetic sensor according to claim 2, characterized in that: The first coil includes a first frame and a first coil winding, wherein the first coil winding is formed by a wire extending along the first frame and being wound multiple times; Wherein, b1 is the width dimension of the first frame in the first direction.

4. The inspection and calibration device for a three-axis magnetic sensor according to claim 2, characterized in that: The second coil includes a second frame and a second coil winding, wherein the second coil winding is formed by a wire extending along the second frame and being wound multiple times; Wherein, b2 is the width dimension of the second frame in the second direction.

5. The inspection and calibration device for a three-axis magnetic sensor according to claim 2, characterized in that: The third coil includes a third frame and a third coil winding, wherein the third coil winding is formed by extending a wire along the third frame and winding a plurality of turns; Wherein, b3 is the width dimension of the third frame in the third direction.

6. The inspection and calibration device for a three-axis magnetic sensor according to any one of claims 1 to 5, characterized in that: The second coil is sleeved outside the first coil, and the third coil is sleeved outside the second coil; the third coil is located between the middle of the second coil in the third direction and one end close to the test station.

7. The inspection and calibration device for a three-axis magnetic sensor according to claim 6, characterized in that: A side of the third coil facing the test station is flush with an end of the second coil facing the test station.

8. The inspection and calibration device for a three-axis magnetic sensor according to any one of claims 1 to 5, characterized in that: The first coil is sleeved outside the second coil, and the third coil is sleeved outside the first coil; the third coil is located between the middle of the first coil in the third direction and one end close to the test station.

9. The inspection and calibration device for a three-axis magnetic sensor according to claim 8, characterized in that: A side of the third coil facing the test station is flush with an end of the first coil facing the test station.

10. The inspection and calibration device for a three-axis magnetic sensor according to any one of claims 1 to 5, characterized in that: The inspection and calibration device further comprises a standard magnetic sensor, which is arranged at the test station and is used to monitor the magnetic field of the test station.

11. A three-axis magnetic sensor inspection and calibration system, characterized in that: It comprises a loading device, a testing machine, an unloading device and the inspection and calibration device according to any one of claims 1 to 10; The loading device is used to load the three-axis magnetic sensor onto the test machine, the test machine is used to support the three-axis magnetic sensor on the test station, and the unloading device is used to unload the three-axis magnetic sensor on the test machine.

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