Sponge roller for cleaning

Abstract

A sponge roller (1) for cleaning has a sponge body (3) in a cylindrical shape and a core (2) in a shaft shape. The sponge body (3) is made of a porous material having continuous pores and having elasticity in a wet state. The core (2) is inserted through an inner diameter portion of the sponge body (3) and fixedly supports an inner peripheral surface of the sponge body (3). The core (2) is made of a sintered body of a porous material having continuous pores.

Description

Technical Field

[0001] This invention relates to a sponge roller for cleaning. Background Technology

[0002] In the manufacturing processes of aluminum hard disks, glass disks, wafers, photomasks, or liquid crystal glass substrates, high-precision grinding, also known as polishing, is performed using various abrasive particles such as silicon oxide, aluminum oxide, and cerium dioxide to achieve extremely high surface precision. After polishing, the surface of the workpiece is covered with abrasive particles and grinding debris, which require thorough cleaning to remove.

[0003] As cleaning methods after polishing, ultrasonic cleaning and water jet cleaning are used. However, to achieve higher cleaning efficiency and reduce damage to the substrate, scrubbing cleaning using a sponge made of elastic porous material (such as polyvinyl acetal porous material) is widely used. Furthermore, cleaning solutions typically include not only dimethyl ether (DI) water but also various agents suitable for different substrates, such as acids, alkalis, and solvents. For example, known cleaning solutions for silicon wafers include mixtures of ammonia and hydrogen peroxide, dilute hydrofluoric acid, and mixtures of hydrochloric acid and hydrogen peroxide.

[0004] Elastic porous sponges come in various shapes. Among them, a brush-roller-shaped sponge with multiple protrusions on the outer circumference of a cylinder is suitable for scrubbing and cleaning (cleaning process). By rotating the sponge while continuously contacting the tip of each protrusion with the surface of the object being cleaned, a good cleaning effect can be achieved. Because the object being cleaned only contacts the protrusions of the sponge, compared with a flat sponge without protrusions, it has the advantages of less friction and less damage to the object being cleaned, or that impurities can easily pass through the protrusions with the cleaning fluid and be removed from the object being cleaned.

[0005] In the cleaning process, a dedicated cleaning device corresponding to each substrate is typically used, and a cleaning sponge roller is constructed using a sponge body and a core. The core is inserted through the inner diameter of the sponge body, fixing the inner circumferential surface of the sponge body. The two ends of the core are connected to the rotation drive unit of the cleaning device, and the cleaning sponge roller is mounted on the cleaning device. The sponge body and the core are rotated together while the sponge body is in contact with the object being cleaned (in the case of a sponge body with protrusions, the protrusions and the object being cleaned).

[0006] There are also devices that supply cleaning fluid to the object being cleaned or the sponge from the top or side via nozzles, and to further improve cleaning capacity, the cleaning fluid is supplied from the inside of the core to the inside of the sponge.

[0007] A known technique for supplying cleaning fluid from the inside of the core to the inner surface (inner circumferential surface) of the sponge is to provide multiple small holes extending from the inner hole to the outer circumferential surface of the core on a hollow cylindrical rigid core having an axially extending inner hole. One end of the core is supported by a shaft support on the drive rotation side of the cleaning device in a manner that prevents relative rotation, and the other end is supported by a shaft support on the driven rotation side of the cleaning device in a manner that prevents relative rotation. One end of the inner hole is closed, and the other end is open. At the other end of the core supported by the shaft support on the driven rotation side, the inner hole communicates with the cleaning fluid supply path of the cleaning device. The cleaning fluid is introduced into the inner hole of the core from the cleaning fluid supply path, supplied to the inner circumferential surface of the sponge from the inner hole through the multiple small holes, and flows out to the outer surface of the sponge through the continuous pores of the sponge.

[0008] Existing technical documents

[0009] Patent documents

[0010] Patent Document 1: International Publication No. 2009 / 147747

[0011] Patent Document 2: Japanese Patent No. 4965253

[0012] Patent Document 3: Japanese Patent No. 5032497

[0013] Patent Document 4: Japanese Patent No. 6027101 Summary of the Invention

[0014] The problem that the invention aims to solve

[0015] When initially using the cleaning sponge roller in the cleaning device, a pre-cleaning process is performed to improve the cleanliness of the sponge itself before actual scrubbing. Specifically, after installing the sponge in the cleaning device, a dummy wafer is used for scrubbing. During the pre-cleaning process, for example, a control wafer is used midway to count the actual number of defects on the wafer, and the process is completed when the number of defects is confirmed to be below a certain threshold. Alternatively, the required number of wafers to be processed (a predetermined number of wafers) until the number of defects on the wafer is sufficiently reduced is predetermined, and the process is completed when the predetermined number of wafers has been cleaned.

[0016] However, in the case of conventional cores with multiple small holes extending from the inner core to the outer circumferential surface, the location and number of the outlets (small holes) for water to flow from the core to the sponge are fixed. Therefore, even after cleaning is initiated, there are areas on the sponge where water does not actually pass through. Since subsequent use may cause water to pass through these unpassed areas, this could potentially lead to wafer contamination. In other words, because the location of water discharge from the core is limited to a specific position (the position of the small holes), the state within the sponge may deviate.

[0017] Furthermore, in the aforementioned conventional cores where the location and number of water outlets (holes) for the sponge are fixed, even during the wiping and cleaning process after startup, deviations in the water flow through the sponge may occur due to location (the water flow becomes uneven). If the water flow is uneven, the concentration of the solution supplied directly from the sponge to the wafer becomes uneven, potentially preventing the entire area of ​​the wafer from being cleaned evenly.

[0018] Therefore, the object of the present invention is to provide a cleaning sponge roller that can suppress deviations in water flow.

[0019] Methods for solving problems

[0020] To achieve the above objectives, the cleaning sponge roller of the present invention comprises a cylindrical sponge body and a shaft-shaped core. The sponge body is made of a porous material having continuous pores and being elastic in a wet state. The core is inserted through the inner diameter portion of the sponge body and fixedly supports the inner circumferential surface of the sponge body. The core is made of a sintered porous body having continuous pores.

[0021] In the above structure, the core is composed of a porous sintered body with continuous pores. Therefore, the continuous pores of the sintered body become a passageway (water passage) for water (e.g., washing water) from the inside of the core (sintered body) to the outer peripheral surface. Thus, compared to the case where water passage holes are formed on the core without continuous pores, the water passage can be uniformly and finely arranged without unevenness, and deviations in the amount of water flowing through the sponge can be suppressed.

[0022] The core is preferably composed of an organic sintered body (resin sintered body, sintered plastic). This is because, in the case of an organic sintered body, there is no concern about the impact of metal melting on cleaning, unlike with metal sintered bodies (sintered metals). In addition, its processability and rigidity are superior to those of inorganic sintered bodies (ceramics).

[0023] The sintered body can be either cylindrical or cylindrical, but a cylindrical shape is preferred to reduce pressure loss during water flow. Furthermore, the cross-sectional shape of either the cylindrical or cylindrical shape is not limited to a circle; it can also be other shapes (e.g., polygonal).

[0024] The average pore size of the sintered body is preferably 5 μm to 800 μm, and the porosity is preferably 30% to 50%. This is because if the average pore size is small and the porosity is low, the pressure loss during water flow will increase, and if the average pore size is large and the porosity is high, sufficient strength may not be guaranteed.

[0025] The sponge can also be fixed to the core by integrating with the sintered body through the continuous pores of the sintered body. The inner diameter side of the sponge enters the fine continuous pores of the sintered body, and continuously integrates with the core in a dense state. Therefore, compared with the case where water passages are formed on the core without continuous pores and the sponge enters the water passages, the sponge can be firmly fixed to the core.

[0026] In addition, in order to suppress the increase of pressure loss during water flow when using a cylindrical core, it is preferable not to fill the entire area of ​​the inner diameter of the core with sponge, but to ensure that the space (water flow space) is connected along the axial direction.

[0027] Invention Effects

[0028] According to the present invention, deviations in water flow can be suppressed. Attached Figure Description

[0029] Figure 1 This is a side view of a cleaning sponge roller according to an embodiment of the present invention.

[0030] Figure 2 This is a 3D diagram of the core.

[0031] Figure 3 It is a photograph taken of the outer peripheral surface of the end of the core.

[0032] Figure 4 This is a perspective view showing an example of a mold used to shape a cleaning sponge roller.

[0033] Figure 5 This is a cross-sectional view illustrating an example of a manufacturing method for a cleaning sponge roller.

[0034] Figure 6 This is a photograph taken of the end face of the cleaning sponge roller.

[0035] Figure 7 The diagrams show the core of the comparative example. (a) is a side view, and (b) is a cross-sectional view of (a) from VIIb to VIIb.

[0036] Figure 8 This is a table showing the results of the water permeability test.

[0037] Figure 9 These are photographs taken during the water flow process of an embodiment.

[0038] Figure 10 These are photographs taken of the comparative example under water flow conditions.

[0039] Figure 11 This is a diagram used to illustrate the durability test (1).

[0040] Figure 12This is a table showing the results of the durability test (1).

[0041] Figure 13 This is a diagram used to illustrate the durability test (2).

[0042] Figure 14 This is a table showing the results of the durability test (2). Detailed Implementation

[0043] Reference Figures 1-5 A cleaning sponge roller (hereinafter referred to as sponge roller) 1 according to one embodiment of the present invention will be described.

[0044] like Figure 1 As shown, the sponge roller 1 has a cylindrical sponge body 3 and a shaft-shaped core (rotating shaft) 2.

[0045] The corpus cavernosum 3 has a plurality of protrusions 5 that protrude from its outer peripheral surface 4 at a substantially uniform density. Each protrusion 5 is cylindrical and integrally protrudes from its base end on the outer peripheral surface 4 of the corpus cavernosum 3 toward its top (front end). The shape of the protrusions 5 is not limited to a cylindrical shape and can also be other shapes. Alternatively, the protrusions 5 may not be provided on the outer peripheral surface 4 of the corpus cavernosum 3, but instead a flat curved surface may be formed.

[0046] The sponge 3 is composed of a polyvinyl alcohol acetal-based porous material (PVAt-based porous material) with fine, continuous pores, exhibiting elasticity in a moist state. PVAt-based porous materials harden in a dry state and soften in a moist state. Furthermore, PVAt-based porous materials possess excellent water absorption and retention properties, displaying good softness and moderate resilience when wet, as well as excellent abrasion resistance.

[0047] Core 2 is inserted through the inner diameter portion of sponge body 3, and fixedly supports the inner circumferential surface of sponge body 3. In this embodiment, core 2 is as follows... Figure 2 The shape shown is cylindrical, but the shape of core 2 is not limited to cylindrical, and can also be other shapes (such as a cylindrical shape with a polygonal cross-section, a cylindrical shape, a column shape with a polygonal cross-section, etc.).

[0048] Core 2 is composed of a porous sintered body with continuous pores. Figure 3 This is a photograph of the outer peripheral surface of the end of core 2. It can be seen that the outer peripheral surface of core 2 is slightly uneven due to the fine pores. In this embodiment, core 2 is composed of an organic sintered body. The raw materials (raw materials) of the organic sintered body are not particularly limited, and for example, polypropylene, ultra-high density polyethylene, high density polyethylene, low density polyethylene, polymethyl methacrylate, polystyrene, ethylene vinyl acetate, fluoropolymers, polyvinyl chloride, PEEK (polyether ether ketone resin), etc., can be used.

[0049] In this embodiment, the sponge 3 is fixed to the core 2 by being integrated with the sintered body through continuous pores entering the sintered body. In the case of the sponge 3 made of PVAt-based porous raw materials, it can be obtained, for example, by the following method: One or more polyvinyl alcohols (raw materials) with an average degree of polymerization of 500 to 3000 and a saponification degree of 80% or more are mixed to form an aqueous solution; aldehydes as crosslinking agents, inorganic acids as catalysts, and starch as pore-forming agents are added to this aqueous solution; and the mixture is then injected... Figure 4 as well as Figure 5 The mixture is placed in the mold 11 as shown and reacted at 40–80°C. After being removed from the mold 11, the porosity-forming agent and other substances are removed by washing with water.

[0050] Mold 11 has an outer mold 12, an inner mold 13, a base plate 14, and a cover 15. Both the outer mold 12 and the inner mold 13 are cylindrical. The inner mold 13 has an outer diameter that is the same as or slightly smaller than the inner diameter of the outer mold 12, and is inserted into the outer mold 12. The core 2 is inserted approximately at the center of the inner mold 13. The base plate 14 seals the lower ends of the outer mold 12 and the inner mold 13, and supports the lower end of the core 2. The cover 15 fits into the inner circumferential surface of the upper end of the outer mold 12. The core 2 is positioned by the base plate 14 and the cover 15.

[0051] A generally cylindrical space 16 for forming the sponge 3 is defined between the inner circumferential surface of the inner mold 13 and the outer circumferential surface of the core 2. Multiple through holes 17 for forming protrusions 5 are formed on the inner mold 13, each through hole 17 communicating with the space 16. The mixture is injected into the space 16 from an injection nozzle 18 inserted between the outer mold 12 and the cover 15, and flows from the space 16 into each through hole 17. Simultaneously, air within the through holes 17 moves into the space 16 and is released into the atmosphere from the upper end of the space 16. Thus, the mixture reliably fills the ends of the through holes 17.

[0052] The sponge 3 is removed from the mold 11 and washed with water together with the core 2. Since the core 2 is made of a sintered body with continuous pores, the mixture injected from the injection nozzle 18 flows through the continuous pores of the core 2 and fills the inner diameter portion of the core 2, and the sponge 3 is continuously formed from the outer periphery of the core 2 to the inner diameter portion.

[0053] In this way, the inner diameter side of the sponge 3 enters the fine continuous pores of the sintered body and is continuously integrated with the core 2 in a dense state. Therefore, compared with the case where water passage holes are formed on the core without continuous pores and the sponge enters the water passage holes, the sponge 3 can be firmly fixed to the core 2.

[0054] The sponge roller 1 can be appropriately used for scrubbing and cleaning. Scrubbing and cleaning refers to the process of removing particles centered on the slurry-like abrasive from the surface being cleaned after chemical mechanical polishing (CMP) using a polyurethane pad or similar material. Distilled water, alkaline solutions (e.g., ammonia), or acidic solutions (e.g., dilute hydrofluoric acid) are used as cleaning solutions.

[0055] In use Figure 1 When the sponge roller 1 shown is used for scrubbing and cleaning, for example, one end and the other end of the core 2 are supported in a manner that prevents relative rotation on the drive rotation side and the driven rotation side of the cleaning device (not shown), respectively. At the other end of the core 2 supported by the driven rotation side shaft support, the inner diameter portion of the core 2 is connected to the cleaning fluid supply path of the cleaning device. The cleaning fluid is introduced into the inner diameter portion of the core 2 from the cleaning fluid supply path, and supplied from the inner diameter portion to the inner circumferential surface of the sponge 3 through the continuous pores of the sintered body, and flows out to the outer surface of the sponge 3 through the continuous pores of the sponge 3.

[0056] There is a non-supported area of ​​sponge on core 2 that does not overlap with sponge body 3. Figure 1 In the case of two ends (as in the example), to prevent water leakage (leakage of cleaning fluid) from the outer peripheral surface of the non-supported area of ​​the sponge, the sealing member 6 can also cover the outer peripheral surface of the non-supported area of ​​the sponge. In addition to a sheet wound around the outer peripheral surface of the sintered body and a covering layer coated on the outer peripheral surface of the sintered body, the sealing member 6 can also be an annular member (including flanges that restrict the axial (length direction) movement and displacement of the sponge 3) installed on the outer peripheral surface of the sintered body.

[0057] The average pore size of the sintered body is preferably 5 μm to 800 μm, and the porosity is preferably 30% to 50%. This is because if the average pore size is small and the porosity is low, the pressure loss during water flow will increase, and if the average pore size is large and the porosity is high, sufficient strength may not be guaranteed.

[0058] The porosity mentioned above refers to the value calculated by the following formula (1) based on the apparent volume and absolute volume of the cuboid sintered body after it has been thoroughly dried in a dryer using a dry automatic densitometer.

[0059] Porosity (%) = (apparent volume - absolute volume) / apparent volume × 100…(1)

[0060] The aforementioned average pore size is the average of the diameters of multiple pores present in the internal structure of the sintered body. The average pore size value specified in this embodiment is a value measured using a mercury porosimeter.

[0061] To suppress the increase in pressure loss when supplying cleaning water (cleaning fluid) from the cleaning device to the inner diameter portion of the core 2, it is preferable not to fill the inner diameter portion of the core 2 with sponge body 3, but to ensure an axially connected space (water passage space). Therefore, in this embodiment, after the sponge body 3 is formed, excess sponge body that has invaded the inner diameter portion of the core 2 during the formation of the sponge body 3 is removed. Furthermore, to prevent the formation of excess sponge body in the inner diameter portion of the core 2, a cylindrical or cylindrical blocking shaft 19 (see reference) that prevents the mixture from flowing into the inner diameter portion from the inner circumference of the core 2 can also be used. Figure 5 The mixture is injected while the core 2 is inserted into the inner diameter portion.

[0062] Example

[0063] Next, the embodiments of the present invention will be described in comparison with comparative examples.

[0064] <Example>

[0065] Polyvinyl alcohol is prepared into an aqueous solution, and aldehydes as crosslinking agents, acids as catalysts, and starch as pore-forming materials are added to this aqueous solution to form a mixture, such as... Figure 4 as well as Figure 5 As shown, the mixture is injected into the mold 11 with the core 2 attached, and reacted at 40-80°C to generate the sponge 3. After the sponge 3 and the core 2 are removed from the mold, the pore-forming material is removed by washing with water, and the excess sponge in the inner diameter of the core 2 is cut off to produce the sponge roller 1.

[0066] Core 2 uses a cylindrical polypropylene resin sintered body (outer diameter 30mm, inner diameter 18mm, length 300mm) with pore size (void diameter) of 60μm to 150μm and porosity (void rate) of 30% to 35%.

[0067] Figure 6 This is a photograph of the end face of the sponge roller 1 after the excess sponge has been removed from the inner diameter portion of core 2. (Example:) Figure 6 As shown, it was confirmed that the sponge entered the interior of the sintered body, and the sponge and the core became one to form a sponge roller.

[0068] <Comparative Example>

[0069] like Figure 7 As shown, a sponge roller 21 was manufactured using a core 22 with 80 outlets 23 (2.6 mm in diameter) formed on the outer circumferential surface of a polyvinyl chloride tube (outer diameter 32 mm, inner diameter 26 mm, length 300 mm) that communicate with the inner diameter portion. The 80 outlets 23 are arranged at 90° intervals in four locations (four directions) in the circumferential direction and at equal intervals in 20 locations in the longitudinal direction (axial direction).

[0070] <Water permeability test>

[0071] Regarding the sponge roller 1 of the embodiment and the sponge roller 21 of the comparative example, the situation in which water is supplied from one end of the core 2, 22 to the inner diameter portion of the core 2, 22, and the supplied water flows from the inner diameter portion of the core 2, 22 to the sponge body 3 and flows out from the outer peripheral surface of the sponge body 3 was observed and evaluated.

[0072] To evaluate water permeability, a container for receiving water flowing down from the outer periphery of the sponge 3 was placed below the sponge 3. The interior of the container was divided into five sections at equal intervals along its length. Figure 1 (Areas A to E shown). In each area A to E, the amount of water flowing down and accumulating within 1 minute was measured. The difference between the maximum (maximum amount) and the minimum (minimum amount) of the water volume in each of the five locations in areas A to E (water volume difference) was calculated as an index of the deviation in water flow caused by different axial positions. The water flow performance of the embodiment and the comparative example was evaluated.

[0073] In the experiment, the water volume difference was calculated for each case where the water supply (set water volume) to cores 2 and 22 was 250 mL / min, 500 mL / min, 1000 mL / min, 1500 mL / min, and 2000 mL / min. A water volume difference of less than 50 mL was considered good (○), a difference exceeding 50 mL but less than 100 mL was considered acceptable (△), and a difference exceeding 100 mL was considered unacceptable (×). The experimental results are expressed as follows: Figure 8 middle.

[0074] like Figure 8 As shown, in the comparative examples, when the set water flow rate was 1000 mL and 1500 mL per minute, the difference between the maximum and minimum flow rates (water flow difference) was less than 100 mL. However, at other water flow rates, the difference exceeded 100 mL, resulting in a non-compliance. In particular, it can be seen that at lower water flow rates (250 mL / min and 500 mL / min), the deviation in water flow rate caused by different axial positions was relatively large.

[0075] In contrast, in the embodiments, it can be seen that: regardless of the water volume, the water volume difference is less than 50mL, the deviation of water flow caused by different axial positions is small, and water flows out uniformly from the outer peripheral surface of the sponge 3 in the axial (length direction).

[0076] Furthermore, during the initial stage of water circulation, the outflow of water from the outer periphery of the sponge 3 was observed by supplying a fluorescent liquid (water mixed with fluorescent paint), and the embodiment and comparative example were compared. Photographs showing the embodiment are shown below. Figure 9In the middle, photos of comparative examples are shown. Figure 10 In. Figure 9 as well as Figure 10 In this system, the darker the color, the less water flows through the area; as the color lightens, the more water flows through. Therefore, the smaller the difference in color depth, the smaller the deviation in water flow.

[0077] In the comparative examples, such as Figure 10 As shown, it can be seen that more water flows out from near the center of the sponge's axial direction. In contrast, in the embodiment, as... Figure 9 As shown, water flows out uniformly from the entire axial region of the sponge.

[0078] <Durability Test (1)>

[0079] An external force was applied to the sponge 3, and it was confirmed in both the embodiment and the comparative example whether or not torsion (movement of the sponge 3 relative to the rotational direction of the cores 2 and 22) occurred.

[0080] Sponge rollers 1 and 21 (cores 2 and 22) are mounted on a simulated scrubbing and cleaning device (illustration omitted) and rotated at 800 rpm. To easily confirm whether any twisting has occurred, [further details are needed]. Figure 11 As shown, the substrate (glass plate) 30 was arranged at an angle relative to the sponge rollers 1 and 21 (the distance L1 from the axis at one end of the cores 2 and 22 to the outer peripheral surface of the sponge 3 was set to be 2 mm shorter than the distance L2 from the axis at the other end of the cores 2 and 22 to the outer peripheral surface of the sponge 3) so as to apply a greater force between the sponge 3 and the cores 2 and 22 at the start of rotation. The time until the rotation speed reached 800 rpm was set to the lower limit of the motor, 0.2 seconds, and the presence of torsion was checked while changing the pressing amount. The pressing amount increased by 0.5 mm each time from 0 mm (approximately no-load contact) to 4.5 mm. The test results are shown in... Figure 12 middle.

[0081] exist Figure 12 In the diagram, ○ indicates no torsion, and × indicates torsion. In the comparative example, under conditions of excessive force compared to normal use, torsion occurred after an indentation of 2.5 mm. On the other hand, in the embodiment, no torsion occurred at any indentation level.

[0082] <Durability Test (2)>

[0083] An external force was applied to the sponge 3, and it was confirmed in both the embodiment and the comparative example whether or not axial movement of the sponge 3 relative to the cores 2 and 22 occurred.

[0084] like Figure 13As shown, sponge rollers 1 and 21 were dropped from a specified height H onto the floor surface with their axes of cores 2 and 22 vertically aligned. The experiment aimed to confirm whether any offset (axial relative movement) occurred between the sponge body 3 and cores 2 and 22 from their initial state. The drop height H was set to 0.25m and 0.5m. The test results are presented in... Figure 14 middle.

[0085] exist Figure 14 In the diagram, ○ indicates no offset, and × indicates an offset. In the comparative example, offsets occurred in both cases when falling from heights of 0.25m and 0.5m, whereas no offset occurred in the embodiment.

[0086] Based on the results of the above tests, it was confirmed that the sponge roller 1 of the embodiment has superior water permeability and durability compared to the sponge roller 21 of the comparative example.

[0087] Furthermore, the present invention is not limited to the above-described embodiments, examples, and variations thereof, which are described as examples. Even in ways other than the above-described embodiments, various changes can be made according to the design, etc., as long as they do not depart from the technical concept of the present invention.

[0088] For example, the raw material of sponge 3 is not limited to PVAt-based porous raw materials, as long as it is a porous raw material with continuous pores and elasticity in a wet state.

[0089] Industrial applicability

[0090] This invention can be widely used as a cleaning sponge roller.

[0091] Explanation of reference numerals in the attached figures

[0092] 1, 21: Cleaning sponge roller

[0093] 2, 22: core

[0094] 3: Corpus cavernosum

[0095] 4: The outer periphery of the corpus cavernosum

[0096] 5: Protrusions of the corpus cavernosum

Claims

1. A sponge roller for cleaning, characterized in that, have: A cylindrical sponge, composed of a porous material with continuous pores and elasticity in a wet state; and A shaft-shaped core is inserted through the inner diameter of the sponge body to fixally support the inner circumferential surface of the sponge body; The core is composed of a porous sintered body with continuous pores. The sintered body has an average pore size of 5 μm to 800 μm and a porosity of 30% to 50%. The sponge is fixed to the core by integrating with the sintered body through continuous pores.

2. The cleaning sponge roller according to claim 1, characterized in that, The core is composed of an organic sintered body.

3. The cleaning sponge roller according to claim 1, characterized in that, The sintered body is cylindrical in shape.

4. The cleaning sponge roller according to claim 2, characterized in that, The sintered body is cylindrical in shape.

Images