Precision equipment and large travel two-degree-of-freedom space double parallel L-shaped flexible hinge mechanism

Abstract

The present application discloses a precision device and a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform, comprising an elastic guiding mechanism of a square frame structure, wherein each group of L-shaped elastic beams comprises two L-shaped elastic beams stacked in the axial direction of the square frame structure, the middle connecting parts of the two elastic guiding modules are respectively located on two opposite frames of the square frame structure and are connected one-to-one, the connecting components of the two elastic guiding modules are respectively located on the other two opposite frames of the square frame structure, and both comprise a motion connecting part and a fixed connecting part stacked in the axial direction and respectively connected to the motion platform and the base surface; the first ends of the two L-shaped elastic beams of each group of L-shaped elastic beams located on the same frame are both connected to the middle connecting part located on the same side; the second ends of the two L-shaped elastic beams of each group of L-shaped elastic beams located on the same frame are respectively connected to the motion connecting part and the fixed connecting part located on the same side.

Description

Technical Field

[0001] The present application belongs to the technical field of structural design of precision equipment, and specifically relates to a precision equipment and a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform. Background Art

[0002] In some precision engineering fields, the motion platform can move relative to the base surface (such as the ground) driven by a driving mechanism, and then carry some equipment (such as detection equipment) to perform corresponding precision work. In order to constrain the motion platform and achieve the performance requirements of high-precision motion, the precision equipment involved in the relevant technology will support the motion platform through a guide mechanism. Specifically, the guide mechanism is supported between the base surface and the motion platform, thereby constraining the motion platform, so that the motion platform can perform high-precision motion in the direction of the preset degree of freedom.

[0003] The guiding mechanisms involved in the related technologies are air-floating guide rails, magnetic suspension guide rails, and of course, elastic guiding mechanisms. Although air-floating guide rails and magnetic suspension guide rails can meet the requirements of large travel and high-precision motion, they have limitations such as high cost, complex mechanism, difficult installation, large size, and high requirements for the use environment. Compared with air-floating guide rails and magnetic suspension guide rails, elastic guiding mechanisms have the advantages of simple structure and easy manufacturing, which can achieve high-precision guidance and are more suitable for the guidance of high-precision motion platforms.

[0004] However, the elastic guide mechanism involved in the related art will cause the motion platform to produce undesirable coupling motion and parasitic motion during the process of deformation and guidance. Obviously, this will lead to poor motion accuracy of the motion platform, and the guiding stroke of the elastic guide mechanism involved in the related art is not large, which will lead to greater limitations on the motion of the motion platform, and thus it is unable to drive the equipment it carries to perform precision work within a large stroke range. Summary of the invention

[0005] The purpose of the embodiments of the present application is to disclose a precision device and a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform, which can solve the problems of small guide stroke and poor motion accuracy of the elastic guide mechanism described in the background technology.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In the first aspect, the present application discloses a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform. The disclosed large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism includes an elastic guide mechanism of a square frame structure, and the elastic guide mechanism includes two elastic guide modules. The two elastic guide modules each include two groups of L-shaped elastic beams, two intermediate connecting parts and a connecting assembly. Each group of L-shaped elastic beams includes two L-shaped elastic beams stacked in the axial direction of the square frame structure. The intermediate connecting parts of the two elastic guide modules are respectively located on two opposite borders of the square frame structure, and one The connecting components of the two elastic guide modules are respectively located on the other two opposite frames of the square frame structure, and both include a moving connection part and a fixed connection part which are stacked in the axial direction and respectively connected to the moving platform and the base surface; the first ends of the two L-shaped elastic beams of each group of L-shaped elastic beams located on the same frame are connected to the middle connection part located on the same side; the second ends of the two L-shaped elastic beams of each group of L-shaped elastic beams located on the same frame are respectively connected to the moving connection part and the fixed connection part located on the same side, and the right-angled parts of each group of L-shaped elastic beams form the corners of the square frame structure.

[0008] In the second aspect, an embodiment of the present application discloses a precision device, which includes a motion platform and the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism described above, and the opposite ends of the motion platform are respectively connected to the motion connection parts of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism.

[0009] The technical solution adopted in this application can achieve the following beneficial effects:

[0010] The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform disclosed in an embodiment of the present application improves the structure of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism in the related art, and replaces the straight elastic beam in the series double parallelogram structure with an L-shaped elastic beam. The spatial double parallelogram structure in which two L-shaped elastic beams are connected in series in the present application retains the characteristic of motion decoupling, and also increases the characteristic of doubling the stroke of the series parallelogram. In addition, the series parallelogram structure formed by the conventional straight elastic beams has only a single degree of freedom. If the series parallelogram structure formed by the straight elastic beams is to have double degrees of freedom, at least two straight elastic beams are required. In the present application, two straight elastic beams with different single degrees of freedom are used to form a series parallelogram, which leads to a complex structure. In the present application, the L-shaped elastic beam itself has degrees of freedom in two directions, so that the spatial double parallelogram structure formed by the L-shaped elastic beam has degrees of freedom in two directions. Therefore, while satisfying the degrees of freedom in two directions, the present application can reduce the number of single parallelograms to be set. That is to say, the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism in the present application has the advantages of simple structure, high motion accuracy, large guide stroke and small occupied area, and can be used to solve the problems of small guide stroke and poor motion accuracy of the elastic guide mechanism described in the background technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the design principle of a two-degree-of-freedom flexible hinge mechanism;

[0012] Figure 2 It is a structural schematic diagram of a symmetrical two-degree-of-freedom flexible hinge mechanism;

[0013] Figure 3 yes Figure 2 Schematic diagram of a single degree of freedom structure after structural deformation;

[0014] Figure 4 It is a structural schematic diagram of a serially connected single-degree-of-freedom flexible hinge mechanism;

[0015] Figure 5 It is a schematic diagram of the overall structure of a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism disclosed in an embodiment of the present application;

[0016] Figure 6 It is a structural schematic diagram of a single L-shaped elastic beam that can be connected to the intermediate connection part and the moving connection part or the fixed connection part respectively disclosed in the embodiment of the present application;

[0017] Figure 7 It is a structural schematic diagram of an elastic guide module disclosed in an embodiment of the present application;

[0018] Figure 8 yes Figure 7 Schematic diagram of part of the structure.

[0019] Description of reference numerals:

[0020] 10- elastic guide mechanism;

[0021] 1-straight elastic beam, 2-moving end, 3-fixed end, 4-middle platform;

[0022] 20-Movement platform;

[0023] 100-elastic guide mechanism, 110-elastic guide module, 111-L-shaped elastic beam, 112-middle connecting part, 113-moving connecting part, 114-fixed connecting part;

[0024] 200-Motion platform. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0027] In the process of designing a flexible hinge mechanism with two degrees of freedom, it is necessary to solve the problems of freedom constraint design of the flexible hinge mechanism and motion decoupling between the two axes. Figure 1 The design principle of the flexible hinge mechanism of the common two-degree-of-freedom motion platform 20 is that the L-shaped elastic beam includes two linear elastic beams 1, and the two linear elastic beams 1 can respectively realize translational motion along the X-axis direction and the Y-axis direction, and are composed of Figure 1It can be seen that when the moving platform 20 connected to the moving end 2 of the linear elastic beam 1 along the X-axis direction is subjected to the driving force F along the Y-axis direction, the moving end 2 drives the moving platform 20 to not only have a translational motion with a distance Y1 along the Y-axis direction, but also have a translational motion with a distance X1 along the X-axis direction, and a rotational motion with a rotation angle β in the XY plane.

[0028] In practical applications, designers only want to see that the moving end 2 of the linear elastic beam 1 drives the moving platform 20 to move in the direction of applying the driving force, while the displacement in other directions is the movement that the designers do not want to exist. Designers do not want the above-mentioned moving end 2 to drive the moving platform 20 to move in other directions as the coupled movement and parasitic movement of the moving end, that is, the coupled movement and parasitic movement of the moving platform 20. The motion decoupling between the two axes is mainly to eliminate the coupled movement of the moving end 2 of the L-shaped elastic beam driving the moving platform 20.

[0029] In order to achieve motion decoupling of the motion platform 20 at the motion end 2 of the L-shaped elastic beam, the designers designed the following Figure 2 The elastic guide mechanism 10 shown. Figure 2 In the embodiment, four L-shaped elastic beams are connected in parallel and then symmetrically designed, that is, the moving ends of the four L-shaped elastic beams are connected to the moving platform 20 on two opposite frames one by one, and the fixed ends 3 of the four L-shaped elastic beams are connected to the other two opposite frames one by one, so that the four connected moving ends 2 are symmetrically connected to the opposite sides of the moving platform 20. When the moving platform 20 is driven by a driving force, it will move. Moreover, due to the symmetrical design, when the elastic guide mechanism 10 undergoes translational motion along the X-axis or along the Y-axis, the off-axis translational motion and the rotational motion in the plane generated by the moving end of the linear elastic beam 1 will be exactly opposite to the moving end at the opposite side and cancel each other out. In other words, Figure 2 The symmetrical parallelogram structure shown in the figure can theoretically eliminate the coupled motion of the moving end portion 2 of the L-shaped elastic beam.

[0030] From the above analysis of the L-shaped elastic beam, it can be seen that the L-shaped elastic beam has the advantages of simple structure and can realize movement in two degrees of freedom. The L-shaped elastic beam has a straight elastic beam 1 extending along the X-axis direction and a straight elastic beam 1 extending along the Y-axis direction. Compared with the straight elastic beam 1 extending along the Y-axis direction, the straight elastic beam 1 extending along the X-axis direction has greater rigidity in the X-axis direction. Similarly, compared with the straight elastic beam 1 extending along the X-axis direction, the straight elastic beam 1 extending along the Y-axis direction has greater rigidity in the Y-axis direction, so that when the L-shaped elastic beam is subjected to a single degree of freedom translation movement, the straight elastic beam 1 distributed along the direction of the degree of freedom can be equivalent to a rigid body. For example, when the elastic guide mechanism 10 is translated along the X-axis direction, the straight elastic beam 1 along the X-axis direction can be equivalent to a rigid body, so as to simplify the analysis of the single degree of freedom translation movement of the elastic guide mechanism 10.

[0031] Figure 3 Shown is an elastic guide mechanism 10, Figure 3 for Figure 2 A schematic diagram of a single degree of freedom structure after structural deformation, Figure 3 The two single-degree-of-freedom parallelogram structures shown in the figure form a composite parallelogram structure after being connected in parallel. When the linear elastic beam 1 distributed along the X-axis direction is regarded as a steel body in the X-axis direction, a driving force is applied to the X-axis direction of the composite parallelogram structure, and a simple translational motion along the X-axis direction can be obtained, that is, the two superimposed parallelogram structures will produce translations along the Y-axis direction and rotations around the Z-axis direction with equal deformation magnitude and opposite directions, and thus cancel each other out. Similarly, when the linear elastic beam 1 distributed along the Y-axis direction is regarded as a steel body in the Y-axis direction, a driving force is applied to the Y-axis direction of the composite parallelogram structure, and a simple translational motion along the Y-axis direction can also be obtained. However, the way of superimposing the two parallelograms in parallel increases the stiffness in the direction of their degrees of freedom, which makes it easier to operate compared to the conventional parallelogram structure. Figure 2 For a single parallelogram structure, under the same driving force, the displacement of the composite parallelogram structure along the force direction is reduced, that is, the working stroke of the elastic guide mechanism 10 is reduced. In other words, the composite parallelogram structure formed by the L-shaped elastic beam has the ability to achieve a simple, motion-decoupled two-degree-of-freedom translation motion, but at the same time has the disadvantage of a smaller stroke range.

[0032] In one variation, the parallel composite parallelogram structure is that the opposite edges of the two parallelogram structures are connected to the motion platform 20, and the opposite edges are connected to the base surface, thereby achieving a parallel relationship. However, as described in the previous paragraph, the parallel composite parallelogram structure will increase the stiffness in the direction of the degree of freedom, making it more difficult to deform, thereby affecting the working stroke. In other words, the movement of the motion platform 20 will be more restricted and cannot perform precision movement with a larger stroke.

[0033] In order to solve the problem of small travel range of parallel compound parallelogram structure, Figure 4 A spatial double parallelogram structure in series is shown. The spatial double parallelogram structure is formed by connecting two single parallelogram structures in series. The spatial double parallelogram structures in series are also stacked in the axial direction (equivalent to bending the series structure to reduce the occupied area). The spatial double parallelogram structure in series is essentially to connect a parallelogram structure (i.e., the first parallelogram structure) to the moving end of another parallelogram structure (i.e., the second parallelogram structure), so that the first parallelogram structure can be connected to the base surface through the second parallelogram structure to achieve the purpose of series connection.

[0034] Stiffness is the ability of a material or component to resist deformation. The stiffness of a first component of a specified length is constant. When a first driving force is applied to the first component in a direction perpendicular to the extension direction of the first component, the deformation of the first component in the direction perpendicular to the extension direction of the first component is constant. When two first components of the same specification are connected in series to form a second component, the stiffness of the second component is halved compared to the first component, so that when the first driving force is applied to the second component, the deformation of the second component in the direction perpendicular to the extension direction of the first component is approximately twice the deformation of the first component. The same is true for the ability of the series-connected spatial double parallelogram structure to achieve greater deformation. It is easier to deform, so that it can produce greater deformation when the same driving force is applied, and can drive the motion platform to perform precision motion with a larger stroke.

[0035] exist Figure 4 When a driving force is applied to the moving end 2 of the spatial double parallelogram structure, the displacement of the moving end 2 of the spatial double parallelogram is twice that of the moving end 2 of the single parallelogram, compared with the same driving force applied to the moving end 2 of the single parallelogram. In other words, the serially connected spatial double parallelogram structure has the advantage of increasing the working stroke of the elastic guide mechanism 10, and the two parallelogram structures of the spatial double parallelogram are serially stacked in the axial direction, which is conducive to reducing the footprint of the spatial double parallelogram in the XY plane.

[0036] pass Figures 1 to 4After understanding the advantages and disadvantages of the L-shaped elastic beam, the parallelogram formed by the L-shaped elastic beam, the parallel composite parallelogram and the series-connected spatial double parallelogram, the large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application is described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0037] like Figure 5-Figure 8 As shown, an embodiment of the present application discloses a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform. The disclosed large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism includes an elastic guide mechanism 100 with a square frame structure. The elastic guide mechanism 100 with a square frame structure is a spatial double parallelogram structure mainly formed by an L-shaped elastic beam 111.

[0038] The elastic guide mechanism 100 includes two elastic guide modules 110, each of which includes two groups of L-shaped elastic beams 111, two intermediate connecting parts 112 and connecting components. Each group of L-shaped elastic beams 111 includes two L-shaped elastic beams 111 stacked in the axial direction of the square frame structure. The intermediate connecting parts 112 of the two elastic guide modules 110 are respectively located on two opposite frames of the square frame structure and are connected one by one. The connecting components of the two elastic guide modules 110 are respectively located on the other two opposite frames of the square frame structure. , and both include a moving connection part 113 and a fixed connection part 114 which are stacked in the axial direction and respectively connected to the moving platform 200 and the base surface; the first ends of the two L-shaped elastic beams 111 of each group of L-shaped elastic beams 111 located on the same frame are connected to the middle connection part 112 located on the same side; the second ends of the two L-shaped elastic beams 111 of each group of L-shaped elastic beams 111 located on the same frame are respectively connected to the moving connection part 113 and the fixed connection part 114 located on the same side, and the right-angle parts of each group of L-shaped elastic beams 111 form the corners of the square frame structure.

[0039] In this application, if Figure 8As shown, the two L-shaped elastic beams 111 of each group of L-shaped elastic beams 111 are connected in series, that is, the two L-shaped elastic beams 111 are connected in series through the middle connecting portion 112 to form a group of L-shaped elastic beams 111. The elastic guide mechanism 100 of the frame structure may include four groups of L-shaped elastic beams 111 in parallel, that is, each elastic guide module 110 has four first ends, and the eight first ends of the two elastic guide modules 110 are correspondingly connected to the four middle connecting portions 112 on two opposite frames. At the same time, each elastic guide module 110 also has two moving connecting portions 113 and two fixed connecting portions 113 located on the other two opposite frames. 14. The motion connection part 113 and the fixed connection part 114 located on the same frame are overlapped in the axial direction. The two second ends of the two elastic guide modules 110 located on the same frame are connected to the corresponding motion connection parts 113. The other two second ends of the two elastic guide modules 110 located on the same frame are connected to the corresponding fixed connection parts 114. The motion connection part 113 is connected to the motion platform 200 to drive the motion platform 200 to move, so that the motion connection part 113 can play a guiding role on the motion platform 200. The fixed connection part 114 is connected to the base surface to fix the position of the fixed connection part 114.

[0040] The series structure of each group of L-shaped elastic beams 111 is Figure 4 The principle of the series structure is the same as in Figure 4 The spatial double parallelogram in series is composed of a linear elastic beam 1, and the two parallelogram structures in series share the middle platform 4, so that the middle platform 4 and the fixed end 3 are both fixed, and only the moving end 2 has a degree of freedom in a direction perpendicular to the linear elastic beam 1 of the moving end 2. In this application, an L-shaped elastic beam 111 is used to replace Figure 4 The linear elastic beam 1 in the present application has two degrees of freedom due to the L-shaped elastic beam 111 having two degrees of freedom. Figure 5 The large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism shown has two degrees of freedom. Figure 8 The spatial double parallel L-shaped elastic beams 111 in series are shown as Figure 7 The partial structure of the elastic guide module 110 shown in the figure is stacked in the axial direction, which is beneficial to reducing the footprint of the series-connected spatial double parallel L-shaped elastic beams 111.

[0041] like Figure 8 The spatial double parallel L-shaped elastic beams 111 in series shown in the figure are a group of L-shaped elastic beams 111. The elastic guide mechanism 100 disclosed in the embodiment of the present application includes 4 groups Figure 8The spatial double parallel L-shaped elastic beams 111 connected in series as shown form a symmetrical spatial double parallelogram structure disclosed in the embodiment of the present application, so that the large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application also has the characteristic of doubling the motion stroke, and the symmetrical parallelogram structure has the characteristic of motion decoupling, which is beneficial to improving the motion accuracy of the two-degree-of-freedom translational motion, so that the symmetrical spatial double parallelogram structure disclosed in the embodiment of the present application can improve the motion stroke and reduce the footprint while ensuring the motion accuracy.

[0042] The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform disclosed in an embodiment of the present application improves the structure of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism in the related art, and uses an L-shaped elastic beam 111 to replace the straight elastic beam 1 in the series double parallelogram structure, so that the spatial double parallelogram structure formed by the two L-shaped elastic beams 111 in series in the present application retains the characteristic of motion decoupling while also increasing the characteristic of doubling the stroke of the series parallelogram. In addition, the series parallelogram structure formed by the conventional straight elastic beams 1 has only a single degree of freedom. If the series parallelogram structure formed by the straight elastic beams 1 is to have double degrees of freedom, at least The simultaneous arrangement of two parallelograms in series formed by two straight elastic beams 1 with different single degrees of freedom leads to a complex structure. In the present application, the L-shaped elastic beam 111 itself has degrees of freedom in two directions, so that the L-shaped elastic beam 111 forms a spatial double parallelogram structure in series with degrees of freedom in two directions. Therefore, while satisfying the degrees of freedom in two directions, the present application can reduce the number of single parallelograms to be arranged. That is to say, the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism in the present application has the advantages of simple structure, high motion accuracy, large guide stroke and small occupied area, and can be used to solve the problems of small guide stroke and poor motion accuracy of the elastic guide mechanism described in the background technology.

[0043] At the same time, compared to Figure 2 In the flexible hinge mechanism, in the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application, the bending area of ​​the L-shaped elastic beam 111 is used to replace the intermediate platform 4 at the corner of the square frame structure, which is beneficial to reducing the material used in manufacturing the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism, thereby reducing the cost of manufacturing the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism, and at the same time, it is beneficial to reduce the overall weight of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism, thereby helping to improve the dynamic response performance of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism when being driven.

[0044] In the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application, in each elastic guide module 110, the two L-shaped elastic beams 111 of the same group of L-shaped elastic beams 111 can be arranged in a close fit in the stacking direction. Of course, in a preferred embodiment, in each elastic guide module 110, the two L-shaped elastic beams 111 of the same group of L-shaped elastic beams 111 can be arranged at intervals in the stacking direction, and the motion connection part 113 and the fixed connection part 114 are arranged at intervals in the stacking direction.

[0045] In the above case, the fixed connection part 114 needs to be connected to the base surface to fix the fixed connection part 114, and the moving connection part 113 needs to be connected to the moving platform 200 to enable the moving connection part 113 to drive the moving platform 200 to move, that is, there is relative movement between the moving connection part 113 and the fixed connection part 114, and the moving connection part 113 and the fixed connection part 114 are arranged at intervals in the stacking direction so that there is a gap between the moving connection part 113 and the fixed connection part 114, thereby avoiding wear when relative movement occurs between the moving connection part 113 and the fixed connection part 114, and further avoiding friction between the moving connection part 113 and the fixed connection part 114 to affect the range and accuracy of the working stroke of the moving platform 200.

[0046] In a further technical solution, in each elastic guide module 110, the first end of each L-shaped elastic beam 111 and the corresponding intermediate connection part 112 can be an integral structure, and the second end of each L-shaped elastic beam 111 and the corresponding movable connection part 113 or fixed connection part 114 can be an integral structure. In this case, the integral structure can be easily manufactured. Specifically, the first end and the corresponding intermediate connection part 112 can be connected by bonding, clamping and connecting parts. Similarly, the second end and the corresponding movable connection part 113 or fixed connection part 114 can also be connected by bonding, clamping and connecting parts. This application does not specifically limit the connection method between the first end and the corresponding intermediate connection part 112, and between the second end and the corresponding movable connection part 113 or fixed connection part 114.

[0047] In the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application, the two correspondingly connected intermediate connecting parts 112 of the two elastic guide modules 110 can be an integrated structure, so that the correspondingly connected intermediate connecting parts 112 of the two elastic guide modules 110 are easy to manufacture. Specifically, the two correspondingly connected intermediate connecting parts 112 of the two elastic guide modules 110 can be connected by bonding, clamping, and connecting pieces, and the present application does not specifically limit the connection method between the two correspondingly connected intermediate connecting parts 112 of the two elastic guide modules 110.

[0048] The motion connection part 113 of the large-stroke two-degree-of-freedom space double-parallel L-shaped flexible hinge mechanism may also produce displacement in the axial direction during the actual movement process. In order to reduce the displacement of the motion connection part 113 in the axial direction, in an optional technical solution, the elastic guide mechanism 100 can be multiple and stacked in the axial direction. In this case, the multiple elastic guide mechanisms 100 stacked in the axial direction are equivalent to being arranged in parallel, which is beneficial to improving the stiffness of the elastic guide mechanism 100 in the axial direction, thereby reducing the displacement of the motion connection part 113 in the axial direction, and even avoiding the displacement of the motion connection part 113 in the axial direction, which is beneficial to improving the movement accuracy of the large-stroke two-degree-of-freedom space double-parallel L-shaped flexible hinge mechanism. Optionally, such as Figure 5 As shown, Figure 5 A schematic diagram of two elastic guides 100 superimposed in the axial direction is shown.

[0049] In a more specific technical solution, there can be two elastic guide mechanisms 100, wherein the motion connection portion 113 of one elastic guide mechanism 100 is opposite to and connected to the motion connection portion 113 of the other elastic guide mechanism 100; and the fixed connection portion 114 of one elastic guide mechanism 100 is opposite to the fixed connection portion 114 of the other elastic guide mechanism 100. In this case, since the motion connection portions 113 in the two elastic guide mechanisms 100 are opposite to and connected to each other, the motion connection portions 113 in the two elastic guide mechanisms 100 are relatively close to each other, and since the motion platform 200 is connected to the motion connection portions 113, the connection between the two relatively close motion connection portions 113 and the motion platform 200 is also relatively convenient, which is beneficial to the connection operation of the staff.

[0050] Optionally, in the large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism disclosed in the embodiment of the present application, the motion connection portion 113 of one elastic guide mechanism 100 and the relative motion connection portion 113 of the other elastic guide mechanism 100 can be an integrated structure. In this case, the relative motion connection portions 113 in the two elastic guide mechanisms 100 can be integrated to form a larger motion connection portion 113, so that the motion platform 200 only needs to be connected to the motion connection portion 113 of the integrated structure to achieve connection with the large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism, which can further improve the convenience of connecting the large-stroke two-degree-of-freedom spatial double parallel L-shaped flexible hinge mechanism to the motion platform 200.

[0051] In order to increase the overall rigidity of the large-stroke two-degree-of-freedom space double parallel L-shaped flexible hinge mechanism, in an optional technical solution, the material used to manufacture the elastic guide mechanism can be an aviation material, which has the advantages of light weight and good mechanical properties. Specifically, the aviation material can be a metal material, an organic polymer material, an inorganic non-metallic material, and a composite material. This application does not limit the specific materials used to manufacture the large-stroke two-degree-of-freedom space double parallel L-shaped flexible hinge mechanism.

[0052] An embodiment of the present application discloses a precision device, which includes a motion platform 200 and any of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanisms described above, and the opposite ends of the motion platform 200 are respectively connected to the motion connection parts 113 of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism, so that the connection position between the motion platform 200 and the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism is relatively symmetrical, which is conducive to achieving the connection stability between the motion platform 200 and the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism.

[0053] In a further technical solution, in the precision equipment disclosed in the embodiment of the present application, the motion platform 200 can be located within the frame-shaped structure, which is beneficial for the precision equipment to occupy a smaller volume.

[0054] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0055] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism for supporting a motion platform, characterized in that: An elastic guide mechanism (100) comprising a square frame structure, the elastic guide mechanism (100) comprising two elastic guide modules (110), the two elastic guide modules (110) each comprising two groups of L-shaped elastic beams (111), two intermediate connecting parts (112) and a connecting assembly, each group of L-shaped elastic beams (111) comprising two L-shaped elastic beams (111) stacked in the axial direction of the square frame structure, the intermediate connecting parts (112) of the two elastic guide modules (110) being respectively located on two opposite frames of the square frame structure and connected in a one-to-one correspondence, the connecting assemblies of the two elastic guide modules (110) being respectively located on the other two opposite frames of the square frame structure and each comprising a moving connecting part (113) and a fixed connecting part (114) stacked in the axial direction and respectively connected to a moving platform (200) and a base surface; The first ends of the two L-shaped elastic beams (111) of each group of L-shaped elastic beams (111) located on the same frame are connected to the middle connecting portion (112) located on the same side; the second ends of the two L-shaped elastic beams (111) of each group of L-shaped elastic beams (111) located on the same frame are respectively connected to the moving connecting portion (113) and the fixed connecting portion (114) located on the same side, and the right-angled portions of each group of L-shaped elastic beams (111) form the corners of the square frame structure; In each of the elastic guide modules (110), the first end of each of the L-shaped elastic beams (111) and the corresponding intermediate connection portion (112) are an integral structure, and the second end of each of the L-shaped elastic beams (111) and the corresponding moving connection portion (113) or the fixed connection portion (114) are an integral structure.

2. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 1 is characterized in that: In each of the elastic guide modules (110), the two L-shaped elastic beams (111) of the same group of L-shaped elastic beams (111) are arranged at intervals in the stacking direction, and the moving connection portion (113) and the fixed connection portion (114) are arranged at intervals in the stacking direction.

3. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 1 is characterized in that: The two correspondingly connected middle connecting parts (112) of the two elastic guide modules (110) are an integrated structure.

4. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 1, characterized in that: The elastic guide mechanisms (100) are multiple and are stacked in the axial direction.

5. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 4 is characterized in that: There are two elastic guide mechanisms (100), wherein the motion connection portion (113) of one of the elastic guide mechanisms (100) is opposite to the motion connection portion (113) of the other elastic guide mechanism (100) and is connected; The fixed connection portion (114) of one of the elastic guide mechanisms (100) is arranged opposite to the fixed connection portion (114) of the other elastic guide mechanism (100).

6. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 5, characterized in that: The motion connection portion (113) of one of the elastic guide mechanisms (100) and the opposite motion connection portion (113) of the other elastic guide mechanism (100) are an integrated structure.

7. The large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to claim 1, characterized in that: The material used to manufacture the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism is any one of metal materials, organic polymer materials, inorganic non-metallic materials and composite materials.

8. A precision device, characterized in that: It comprises a motion platform (200) and a large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism according to any one of claims 1 to 7, wherein two opposite ends of the motion platform (200) are respectively connected to the motion connection part (113) of the large-stroke two-degree-of-freedom spatial double-parallel L-shaped flexible hinge mechanism.

9. The precision device according to claim 8, characterized in that: The motion platform (200) is located within the square frame structure.

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