Laser reference debugging device for optical probe and use method

Through the laser benchmark debugging device and method, the focal length and positioning error problems in the in-situ detection of optical probes are solved, high-precision and stable optical probe measurement is achieved, the detection efficiency and range are improved, and it is suitable for laser benchmark debugging of optical probes.

CN116214266BActive Publication Date: 2025-09-26CHINA STATE SHIPBUILDING CORP NO 707 RES INST
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Patent Information

Application Number
CN202211425226.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-11-15
Publication Date
2025-09-26
Estimated Expiration
2042-11-15

AI Technical Summary

Technical Problem

In the in-situ detection of optical probes, there are problems such as difficulty in determining the focal length, difficulty in calibrating the focal length after zooming, the flatness of the workpiece affecting the measurement accuracy, and inaccurate measurement caused by positioning errors of machining center machine tools, which affect measurement accuracy and efficiency.

Method used

A laser reference debugging device is used, including a magnetic suction block, a laser unit battery compartment, a mounting base, a laser unit fine-tuning mechanism and a coarse-adjusting lever mechanism. It is fixed on the machine tool by magnetic adsorption. Combined with the laser unit and optical probe, precise focal length and positioning calibration are achieved by adjusting the laser focus and spot.

Benefits of technology

It improves the measurement accuracy and efficiency of in-situ detection of optical probes, ensures accurate focal length, reduces position drift, expands the detection range, meets zoom requirements, and can cooperate with the machine tool servo system for high-precision measurement.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to a laser reference debugging device for an optical probe and a method for using the device. The device comprises: a magnetic suction block, a laser unit battery compartment, a mounting base, an X-axis fine-tuning mechanism for a first laser unit, an X-axis fine-tuning mechanism for a second laser unit, a Y-axis fine-tuning mechanism for a first laser unit, a Y-axis fine-tuning mechanism for a second laser unit, a coarse adjustment rod mechanism for a first laser unit, a coarse adjustment rod mechanism for a second laser unit, a first laser unit placement compartment, and a second laser unit placement compartment. The two X-axis fine-tuning mechanisms and the two Y-axis fine-tuning mechanisms each utilize a lead screw and nut adjustment mechanism. The two X-axis fine-tuning mechanisms are respectively mounted in two rectangular mounting cavities on the mounting base. The X-axis fine-tuning bases of the two X-axis fine-tuning mechanisms are respectively connected to the two Y-axis fine-tuning mechanisms, the two coarse adjustment rods are respectively connected to the two Y-axis fine-tuning mechanisms, and the two placement compartments are respectively connected to the two coarse adjustment rods. The present invention enables in-situ precise measurement.
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Description

Technical Field

[0001] The invention belongs to the technical field of mechanical processing, and in particular relates to a laser reference debugging device for an optical probe and a use method thereof. Background Art

[0002] There are several advantages to using optical probes to detect workpieces after machining in a machining center:

[0003] The optical probe does not contact the workpiece during the in-situ detection measurement process, so the workpiece will not be scratched or deformed due to the contact of the measuring tool during the measurement process.

[0004] The measurement process of the optical probe in-situ detection is carried out without the workpiece leaving the workstation. If the measurement result is unsatisfactory, the workpiece can be repaired directly. Compared with the workpiece that needs to be repaired after off-site detection, its advantages are:

[0005] The processing efficiency is higher. After the inspection, the parameters can be modified directly to proceed with the processing.

[0006] Higher machining accuracy. Because the workpiece is not disassembled, no secondary clamping errors are introduced. The machining zero point is consistent with that before in-situ inspection.

[0007] Measurement data guides more accurate repair and processing data. Off-site inspection provides range values ​​for shape and dimensions, such as those used for parallelism and coaxiality. In-site inspection, on the other hand, can pinpoint deviation data at specific coordinate positions, facilitating modification of processing parameters.

[0008] Optical probes offer a wide range of in-situ inspection capabilities. While off-site inspection is limited by the instrumentation, it can be challenging to measure tiny holes, narrow, shallow grooves, and intersection lines. However, optical in-situ inspection is not limited.

[0009] Although optical in-situ detection has the above advantages, there are several difficulties in the actual measurement process:

[0010] 1. It is difficult to determine the focal length. The focal length refers to the distance between the lens and the workpiece being measured when a clear magnified image is obtained. It is affected by the installation of the optical lens and the accuracy of the lens itself. During the focusing process of the image, the focal point of a clear image is not a fixed point but a small distance within a range (the higher the accuracy of the lens and the more vertical the angle of incident light relative to the lens, the smaller the focal length range of the clear image). This will cause errors in the judgment. Secondly, the clear image obtained is a magnified area on the measured surface, not a sufficiently small point on the boundary of the measured dimension. If the magnified area is uneven and the boundary of the dimension to be measured is at the low point of this magnified area, then the magnified image at this time is actually an enlarged image of the high points around the boundary of the measured dimension, resulting in image distortion and affecting measurement accuracy.

[0011] 2. When using a zoom lens to measure workpieces, the focal length is difficult to calibrate after zooming, resulting in large measurement errors. Due to the structural limitations of optical in-situ inspection instruments, when measuring the bottom surface dimensions of deep grooves and narrow slots, or the taper of tiny holes, optical in-situ inspection instruments cannot penetrate deep into narrow slots and small holes. In this case, it is necessary to adjust the focal length to a higher magnification distance so that the instrument can measure the top surface of narrow slots and small holes. However, during the zoom process, the lens moves up and down, resulting in perpendicularity errors relative to the angle of incidence. This makes it difficult to determine the focal length, affecting measurement accuracy.

[0012] 3. Optical probe detection is affected by workpiece flatness, resulting in measurement errors. When using an optical probe to measure a workpiece, there is a certain height difference between the two ends of the measured dimension boundary. This can cause one end to be clear and the other to be blurred. The blurred end makes it difficult to determine the actual measurement position, resulting in measurement errors.

[0013] 4. Positioning errors in machining centers can lead to inaccurate measurement data using optical probes. Optical probe measurement methods include: software measurement and true-to-scale inspection on the output image; and calibrating a measurement baseline on a magnified image and moving it with the machine tool servo system to collect movement data. The latter method primarily relies on the positioning accuracy of the machine tool's movement. If the positioning accuracy of a machining center decreases due to wear of the guide rails and lead screws after long-term use, the measurement data from optical probes may be inaccurate.

[0014] For the reasons mentioned above, if the focusing accuracy of the optical probe can be guaranteed during in-situ detection, the measurement error caused by the workpiece flatness can be resolved, and the positioning accuracy of the machine tool movement can be calibrated before measurement, the measurement accuracy of the optical probe can be guaranteed, and the measurement data can be accurate and reliable. Summary of the Invention

[0015] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a laser reference debugging device for an optical probe and a method for using the same.

[0016] One of the above-mentioned purposes of the present invention is achieved through the following technical solution:

[0017] A laser reference debugging device for an optical probe, characterized by comprising: a magnetic suction block, a laser unit battery compartment, a mounting base, an X-axis fine-tuning mechanism for a first laser unit, an X-axis fine-tuning mechanism for a second laser unit, a Y-axis fine-tuning mechanism for a first laser unit, a Y-axis fine-tuning mechanism for a second laser unit, a coarse adjustment lever mechanism for a first laser unit, a coarse adjustment lever mechanism for a second laser unit, a first laser unit placement compartment, and a second laser unit placement compartment; the first laser unit X-axis fine-tuning mechanism, the second laser unit X-axis fine-tuning mechanism, the first laser unit Y-axis fine-tuning mechanism, and the second laser unit Y-axis fine-tuning mechanism all employing a lead screw and nut adjustment mechanism;

[0018] The mounting base is provided with two rectangular mounting cavities on the left and right, and a long slot is provided at the upper end of the middle partition between the two rectangular mounting cavities, and a threaded hole is provided at the lower end of the magnetic suction block. The mounting base is fixed to the bottom of the magnetic suction block by screws inserted into the long slot and the threaded hole at the lower end of the magnetic suction block; an external protrusion is provided at the middle position outside the front end of the mounting base, and a laser power switch is installed on the external protrusion. An optical probe mounting hole is provided near the rear end of the middle partition of the mounting base;

[0019] The laser unit battery compartment is bonded to the magnetic suction block, in which batteries and power supply components are installed, and leads connected to the laser power switch are led out from the lead holes provided on the battery compartment;

[0020] The first laser unit X-axis fine-tuning mechanism and the second laser unit X-axis fine-tuning mechanism are respectively installed in two rectangular mounting cavities on the mounting base; the first laser unit X-axis fine-tuning mechanism and the first laser unit X-axis fine-tuning mechanism are respectively connected to the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism arranged below through their respective X-axis fine-motion bases, and the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism are mirror-imaged; the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism are respectively connected to the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism located below through their respective Y-axis fine-motion bases, and the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism are mirror-imaged; the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism are respectively connected to the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism The adjustment rod mechanism is composed of a first coarse adjustment rod and a second coarse adjustment rod. The upper end of the first coarse adjustment rod is fixedly connected to the lower end of the corresponding Y-axis fine-motion base in a manner that it can be rotated and adjusted 180° around the Y-axis, and the lower end of the first coarse adjustment rod is fixedly connected to the upper end of the second coarse adjustment rod in a manner that it can be rotated and adjusted 360°; the upper ends of the first laser unit placement chamber and the second laser unit placement chamber are respectively fixedly connected to the lower ends of the second coarse adjustment rods of the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism in a manner that they can be rotated and adjusted 180° around the Y-axis, and the first laser unit placement chamber and the second laser unit placement chamber are mirror-imaged; the first laser unit placement chamber and the second laser unit placement chamber are both composed of a laser unit placement rod and a laser unit pressure cover through threads, and the interior of the two constitutes a laser emitting unit mounting cavity, and microholes for light transmission are provided on the laser unit pressure cover.

[0021] Furthermore: scale lines along the X-axis direction are set on the left and right sides of the mounting base, and scale lines along the Y-axis direction are set on the front side of the X-axis fine-motion base.

[0022] The second object of the present invention is achieved by the following technical solution:

[0023] A method for using the laser reference debugging device for an optical probe is characterized by:

[0024] Accurately measuring a spatial point includes the following steps:

[0025] Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base, rotate it along the mounting hole to the appropriate working position and then fix it; install the laser emitting unit into the laser unit placement rod, insert the wires into the control switch and use the laser unit gland to press it tightly; at this time, the optical probe, laser emitting unit and laser reference debugging device become a main body;

[0026] Step 2: Magnetically attach the magnetic block in the laser reference debugging device to the machine tool spindle box, and properly pre-tighten the connecting screws between the magnetic block and the mounting base to ensure that the entire device does not fall off and can be moved along the long slot in the mounting base;

[0027] Step 3: Use a dial indicator to level the side of the mounting base with the scale line and the machine tool's x-axis to ensure that this surface is parallel to the machine tool's x-axis; then tighten the screws connecting the magnetic chuck and the mounting base to ensure that the entire device is stable and reliable;

[0028] Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and debug the machine tool and optical probe to obtain a clear magnified image. Use the machine tool servo system to move the laser reference debugging device, measure the standard size in the micrometer, and read the actual movement data in the machine tool NC system. Compare the actual movement data with the calibrated size of the micrometer to determine whether the actual positioning error of the current machine tool meets the measurement conditions. If the positioning error is greater than 0.01mm, it means that the machine tool screw guide rail is severely worn and needs to be repaired. If the positioning error is between 0.005mm and 0.001mm, the measurement conditions are met.

[0029] Step 5. Turn on the laser power switch in the laser reference debugging device. The laser emitting device will emit two laser beams through the 0.05mm tiny hole in the center of the laser unit cover. At this time, adjust the angle position of the first coarse adjustment rod and the extension length of the second coarse adjustment rod so that two circular light spots appear in the magnified image and are roughly on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment rod to make the two light spots as close as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment rods.

[0030] Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the light spot of the first laser unit to the center of the current magnified image, that is, on the standard dimension line of the micrometer; then fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit, and slowly bring the light spot of the second laser unit closer to the light spot of the first laser unit until the two light spots touch, there is no gap between the centers of the two light spots, and they become one large light spot. The shooting angle of the first and second laser units is fixed, and the focus and the Z-axis direction of the optical probe are the focal length distance of the current clear image. The laser focus is also the crosshair in optical detection. At this time, the focal length adjustment of the optical probe is completed;

[0031] Step 7. Use the machine tool servo system to move the laser reference debugging device and the optical probe to the position above the workpiece to be measured; use the machine tool servo system to slowly lower the Z axis height. At this time, two light spots can be seen on the surface of the workpiece to be measured as two light spots on the magnified image. Then continue to lower the Z axis height in units of 0.001mm. It will be found that the two light spots will gradually get closer until they become the large light spot image in step 6 again. At this time, the height distance between the optical probe and the workpiece to be measured is the previous appropriate focal length; then move the X and Y axes of the machine tool so that the center of the light spot coincides with the boundary of one side of the measured dimension. At this time, the X, Y, and Z axis data of the machine tool are cleared;

[0032] Step 8: Repeat step 7 to make the center of the light spot in the magnified image coincide with another measured dimension boundary of the workpiece; the X, Y, and Z axis data of the machine tool are the actual position and size of the workpiece, and the measurement is now complete;

[0033] Step 9: After the measurement is completed, the mounting base, optical probe and laser reference debugging device can be removed together, and the laser emission switch can be turned off.

[0034] The third object of the present invention is achieved by the following technical solutions:

[0035] A method for using the laser reference debugging device for an optical probe is characterized by:

[0036] To accurately measure a plane point, the following steps are included:

[0037] Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base, rotate it along the mounting hole to the appropriate working position, and lock it with threads; install the laser emitting unit into the laser unit mounting rod, insert the wires into the control switch, and use the laser unit gland to tighten it; at this point, the optical probe, laser emitting unit, and laser reference debugging device become a main body;

[0038] Step 2: Magnetically attach the magnetic block in the laser reference debugging device to the machine tool spindle box, and properly pre-tighten the screws connecting the magnetic block and the mounting base to ensure that the entire device does not fall off and can be moved along the long slot on the mounting base;

[0039] Step 3: Use a dial indicator to level the side of the mounting base with the scale line and the machine tool x-axis to ensure that this surface is parallel to the machine tool x-axis; then tighten the connecting screws between the magnetic suction block and the mounting base to ensure that the entire device is stable and reliable;

[0040] Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and adjust the focal length of the machine tool and the optical probe so that a clear magnified image of the entire tiny hole or deep groove is obtained on the display receiving the optical probe signal;

[0041] Step 5: Turn on the laser power switch in the laser reference debugging device. The laser emitting device will emit two laser beams through the 0.05mm tiny hole in the center of the laser unit cover. At this time, adjust the angle position of the first coarse adjustment rod and the extension length of the second coarse adjustment rod so that two circular light spots appear in the magnified image and are roughly on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment rod to make the two light spots as close as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment rods. The light spots will move slightly during the locking period, but this will not affect the subsequent debugging steps.

[0042] Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the first laser unit's spot to the boundary line of the measured dimension in the current magnified image. Then, fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit to slowly bring the second laser unit's spot closer to the first laser unit's spot until the two spots touch and overlap with each other without a gap in the center. At this time, observe the values ​​of the second laser unit's fine-tuning mark in the X and Y directions and record the obtained value A.

[0043] Step 7: Move the X and Y fine-tuning knobs of the second laser unit to move the light source of the second laser unit away from the current measured dimension boundary until the edge of the light spot on the same side coincides with the other measured dimension boundary. Then, observe the X and Y values ​​of the second laser unit's fine-tuning mark and record the obtained value B. The measured length dimension at this time is BA.

[0044] Step 9: After the measurement is completed, the mounting base, optical probe and laser reference debugging device can be removed together, and the laser emission switch can be turned off.

[0045] The present invention has the following advantages and positive effects:

[0046] 1. The clamping of the device of the present invention is stable and reliable. When the laser reference debugging device and the optical probe are moved during the measurement process, position drift will not occur, thereby improving the measurement accuracy.

[0047] 2. The present invention can realize in-situ detection. Compared with the offline detection that requires the workpiece to be disassembled, the measurement efficiency is high and the repair work of unqualified workpieces is more timely.

[0048] 3. The present invention provides higher measurement accuracy for optical in-situ detection. The two laser beam focal points are unique. During the measurement process, the measured target point, the laser beam focal point, and the magnified image incident point are combined into one, ensuring the accuracy of the focal length of the optical measurement process. The measurement accuracy is between 0.005mm and 0.001mm.

[0049] 4. The present invention meets the use characteristics of the zoom optical probe. After the zoom optical probe is zoomed, the focal point at that time can be captured at any time, making the in-situ detection range of the optical probe wider.

[0050] 5. The present invention has various measuring methods. It can cooperate with the machine tool servo system to measure a large range of workpieces, and can also use its own micro-measuring mechanism to measure small holes and deep grooves.

[0051] 6. The laser beam does not damage the workpiece during measurement. Since the laser light source passes through the 0.05mm hole on the laser unit cover, the light intensity has been weakened and will not irritate the eyes when the enlarged graph is viewed.

[0052] 7. The clamping device of the present invention is safe and reliable. After adjusting the focal length once, the focal length of the optical probe does not change and can be used directly next time. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 Schematic diagram of the overall structure of the laser reference debugging device of the present invention;

[0054] Figure 2 This is a schematic diagram of the magnetic suction block of the present invention;

[0055] Figure 3 This is a schematic diagram of the battery compartment cover of the present invention;

[0056] Figure 4 This is a schematic diagram of the battery compartment of the present invention;

[0057] Figure 5 This is a schematic diagram of the installation base of the present invention;

[0058] Figure 6 Schematic diagram of the laser X-axis fine-tuning mechanism of the present invention;

[0059] Figure 7 Schematic diagram of the X and Y fine-tuning knobs of the present invention;

[0060] Figure 8 This is a schematic diagram of the front end bearing cover of the X-axis of the present invention;

[0061] Figure 9 This is a schematic diagram of the X-axis rear end bearing cover A of the present invention;

[0062] Figure 10This is a schematic diagram of the X-axis rear end bearing cover B of the present invention;

[0063] Figure 11 Schematic diagram of the inner ring covers of the X and Y bearings of the present invention;

[0064] Figure 12 Schematic diagram of the laser Y-axis fine-tuning mechanism of the present invention;

[0065] Figure 13 This is a schematic diagram of the X-axis fine-motion base of the present invention;

[0066] Figure 14 Schematic diagram of the Y-axis micro-motion base of the present invention;

[0067] Figure 15 This is a schematic diagram of the Y-axis front end bearing cover A of the present invention;

[0068] Figure 16 Schematic diagram of the Y-axis front end bearing cover B of the present invention;

[0069] Figure 17 This is a schematic diagram of the Y-axis rear end bearing cover of the present invention;

[0070] Figure 18 Schematic diagram of the first and second laser coarse adjustment lever mechanisms of the present invention;

[0071] Figure 19 This is a schematic diagram of the first coarse adjustment rod of the present invention;

[0072] Figure 20 This is a schematic diagram of the second coarse adjustment rod of the present invention;

[0073] Figure 21 This is a schematic diagram of the laser unit placement chamber of the present invention;

[0074] Figure 22 This is a schematic diagram of the laser unit cover of the present invention. DETAILED DESCRIPTION

[0075] The structure of the present invention will be further described below with reference to the accompanying drawings and through examples. It should be noted that the present examples are descriptive rather than restrictive.

[0076] A laser reference debugging device for an optical probe, please refer to specific 1-22, the invention point of which is: mainly including a magnetic suction block 1, a laser unit battery compartment 2, a mounting base 3, a first laser unit X-axis fine-tuning mechanism 10, a second laser unit X-axis fine-tuning mechanism 11, a first laser unit Y-axis fine-tuning mechanism 5, a second laser unit Y-axis fine-tuning mechanism 4, a first laser unit coarse adjustment rod mechanism 7, a second laser unit coarse adjustment rod mechanism 6, a first laser unit placement chamber 9 and a second laser unit placement chamber 8.

[0077] The mounting base is the basic mounting component of the device. The mounting base adopts a frame structure with two spaced-apart rectangular cavities 3.4 on the left and right, and an external boss 3.6 provided in the middle position outside the front end. The two rectangular cavities are used to install the first laser unit X-axis fine-tuning mechanism and the second laser unit X-axis fine-tuning mechanism respectively. The front and rear side walls of the two rectangular mounting cavities are provided with aligned bearing holes 3.1, guide rod mounting holes 3.5 aligned on both sides of the bearing holes, and multiple threaded holes. A long slotted hole 3.3 is provided at the upper end of the middle partition between the two rectangular cavities for inserting a screw to connect with the magnetic suction block. An optical probe mounting hole 3.2 is provided at the end of the middle partition away from the external boss for installing the optical probe. The above-mentioned external boss is used to install the laser power switch 10.

[0078] The laser unit battery compartment includes a battery compartment cover 2.1 and a battery compartment body 2.2. The X-axis fine-tuning mechanism of the first laser unit and the second laser unit share the same component shapes and assembly relationships, both utilizing a precision screw-nut structure. These components include an X-axis fine-tuning knob 11, an X-axis front-end bearing cap 12, an X-axis lead screw 15, X-axis rear-end bearing caps A17 and B20, a front-end bearing 13, a rear-end bearing 18, an X-axis fine-motion base, two X-axis guide rods 14, two X-axis anti-backlash springs 16, and an X-bearing inner race pressure cap 19.

[0079] The parts of the Y-axis fine-tuning mechanism of the first laser unit and the Y-axis fine-tuning mechanism of the second laser unit are in a mirror-image relationship, including the X-axis fine-tuning base 21 (a common structural component of the X-axis fine-tuning mechanism and the corresponding Y-axis fine-tuning mechanism), the Y-axis screw 28, the left end bearing, the right end bearing, two Y-axis guide rods 23, two Y-axis anti-backlash springs 22, the Y-axis right end bearing cover 29, the Y-axis left end bearing cover A24, the Y-axis fine-tuning knob 26, the Y-axis fine-tuning base 27, the Y-axis left end bearing cover B25, and the Y-bearing inner ring pressure cover.

[0080] The parts of the coarse adjustment rod mechanism of the first laser unit and the coarse adjustment rod mechanism of the second laser unit are in a mirror image relationship, and both include a first coarse adjustment rod 30 and a second coarse adjustment rod 31 .

[0081] The parts of the first laser unit placement chamber and the second laser unit placement chamber are in a mirror image relationship, and both include a laser unit placement rod 32 and a laser unit pressure cover 33.

[0082] The entire assembly is connected to the machining center's spindle box via the top and side surfaces of the magnetic block. An M5 threaded hole 1.1 is provided at the bottom of the magnetic block. This is connected to the mounting base via an M5 screw threaded through a slotted hole in the mounting base. The magnetic block can be moved along the slotted hole in the mounting base, allowing the entire assembly to be adjusted to the optimal working position.

[0083] Place two AAA batteries and the power supply components into the laser unit battery compartment. Lead the wires through the lead hole 2.2.1 on the battery compartment, and close the battery compartment cover. Use double-sided tape to attach the laser unit battery compartment to any side of the magnetic block. The battery compartment allows for flexible placement without affecting the overall operation of the device. Lead the wires from the lead hole in the battery compartment to the laser power switch mentioned above. Lead wires from the laser power switch to control the first and second laser units.

[0084] The optical probe consists of an electron microscope and a mounting bracket. The bracket holds the electron microscope at one end and features a stud with a threaded connection hole at the other. The stud is inserted into the optical probe mounting hole on the right side of the mounting base and rotated along the hole to adjust the working angle. The optical probe is then secured to the mounting base with a screw.

[0085] Installation position and matching relationship of each component of the X-axis fine-tuning mechanism of the first laser unit:

[0086] The front and rear end bearings are respectively installed in the front and rear bearing holes of a rectangular cavity in the mounting base. The ends of the X-axis screw are rotatably connected to the inner holes of the front and rear bearings. The front end of the X-axis screw is fixedly connected to the rear end of the X-axis fine-tuning knob, pressing against the inner ring of the front end bearing. The rear end of the X-axis screw is fixedly connected to the inner ring pressure cover of the X-bearing, pressing against the inner ring of the rear end bearing. The front end X-axis bearing cover is fixed to the exterior of the front side wall of the rectangular mounting cavity with screws and is in pressurized contact with the outer ring of the front end bearing. The rear end X-axis bearing cover A and the rear end X-axis bearing cover B are respectively disposed inside and outside the rear side wall of the rectangular cavity. The rear end X-axis bearing cover B is fixedly connected to the corresponding rear side wall of the rectangular mounting cavity with screws, and the rear end X-axis bearing cover A and the rear end X-axis bearing cover B are respectively in pressurized contact with the outer rings of the rear end bearings. The rear end X-axis bearing cover A is interlocked with the X-axis screw and two X-axis guide rods. The two X-axis guide rods are disposed on either side of the X-axis screw, one on the left and one on the right. The ends of the two X-axis guide rods are fixedly connected to the guide rod mounting holes on the front and rear side walls of the rectangular cavity. The upper end of the X-axis fine-motion base is provided with an X-axis nut hole 21.1 and guide rod insertion holes 21.2 located on both sides of the nut hole. The upper portion of the X-axis fine-motion base is inserted into the rectangular cavity, connected to the X-axis screw rod through its X-axis nut hole, and forms a guide insertion fit with the two guide rods through the guide rod insertion holes on both sides. Two X-axis anti-backlash springs are respectively mounted on the two X-axis guide rods. The rear ends of the two X-axis anti-backlash springs contact the bottom surfaces of the waist grooves 17.1 at both ends of the X-axis rear end bearing cover A. The front ends of the two X-axis anti-backlash springs are in pressing contact with the X-axis fine-motion base, which can eliminate the gap along the X-axis movement, making the movement smoother and the displacement more accurate.

[0087] In addition, a circumferential vernier scale is located on the outer surface of the right end of the X-axis fine-tuning knob. An X-axis vernier reference line 12.2 is located on the front side of the X-axis front bearing cap, directly above the screw thread hole 12.1. These two lines work together to achieve precise control of X-axis fine-tuning. The displacement range of the aforementioned X-axis fine-tuning base is 4cm. One rotation of the X-axis fine-tuning knob is divided into 50 equal parts, and the pitch of the X-axis screw is 0.2mm. Therefore, one click of the X-axis fine-tuning knob is 0.004mm.

[0088] In addition, an external protrusion is provided on one side of the X-axis fine-motion base, which forms an X-axis moving reference edge 21.3. The X-axis moving reference edge cooperates with the scale line provided on the corresponding outer surface of the mounting base. When performing X-direction fine adjustment, the X-direction displacement can be clearly displayed, which facilitates X-direction adjustment.

[0089] The above-mentioned second laser unit X-axis fine-tuning mechanism is arranged at another rectangular cavity of the mounting base. The installation position and matching relationship of each component refer to the installation position and matching relationship of each corresponding component of the above-mentioned first laser unit X-axis fine-tuning mechanism, and will not be repeated here.

[0090] The installation positions and matching relationships of the various components of the Y-axis fine-tuning mechanism of the first laser unit are as follows:

[0091] The lower portion of the X-axis fine-motion base is provided with bearing holes 21.5 on both sides of the wall perpendicular to the nut hole. Guide rod mounting holes 21.4 are provided directly above and below the bearing holes. Multiple threaded holes are provided around the bearing holes. The X-axis fine-motion base is the base of the Y-axis fine-tuning mechanism. The specific connection structure is as follows:

[0092] The left and right bearings of the first laser unit's Y-axis fine-tuning mechanism are installed in the bearing mounting holes at both ends of the X-axis fine-tuning base. The two ends of the Y-axis screw are connected to the inner holes of the bearings. The left end of the Y-axis screw is fixedly connected to the right end of the Y-axis fine-tuning knob and presses against the inner race of the left bearing. The right end of the Y-axis screw is fixedly connected to the Y-bearing inner race cover and presses against the inner race of the right bearing. The right Y-axis bearing cover is fixedly mounted on the outside of the lower right side wall of the X-axis fine-tuning base with screws and presses against the outer race of the rear end bearing. The left Y-axis bearing cover A and the left Y-axis bearing cover B are fixedly connected to the inside and outside of the lower left side wall of the X-axis fine-tuning base, respectively, and press against the outer race of the front end bearing. Two Y-axis guide rods are arranged parallel to the upper and lower sides of the Y-axis screw and are fixedly installed in the upper and lower guide rod mounting holes, respectively. The upper portion of the Y-axis fine-motion base is provided with a nut 27.1 and two guide rod insertion holes located above and below the nut. An external protrusion is provided on one side of the upper portion of the Y-axis fine-motion base, forming a Y-axis movement reference edge 27.3. A threaded hole 27.2 is provided on the lower portion of the Y-axis fine-motion base for connecting to the coarse adjustment lever mechanism of the first laser unit. The upper portion of the Y-axis fine-motion base is embedded in the X-axis fine-motion base, mating with the Y-axis lead screw through the nut and forming a guide insertion with the two Y-axis guide rods through the two guide rod insertion holes. Two Y-axis anti-backlash springs are respectively mounted on the two Y-axis guide rods, with both sides in pressurized contact with the X-axis fine-motion base and the Y-axis fine-motion base, respectively. This eliminates backlash along the Y-axis movement, ensuring smoother movement and more accurate displacement. The Y-axis fine-motion base can be moved along the Y-axis lead screw by rotating the Y-axis fine-tuning knob.

[0093] In addition, a circumferential vernier scale line 11.1 is located on the outer surface of the right end of the Y-axis fine-tuning knob. A Y-axis vernier reference line 25.1 is located on the outside of bearing cap B at the left end of the Y-axis, directly above the Y-screw hole 25.2. These two lines work together to achieve precise control of Y-axis fine-tuning. The displacement range of the Y-axis fine-tuning base is 1 cm. One turn of the Y-axis fine-tuning knob is divided into 50 equal parts, and the pitch of the Y-axis screw is 0.2 mm. Therefore, one click of the Y-axis fine-tuning knob is 0.004 mm.

[0094] In addition, a scale line 21.6 is provided on the lower front side surface of the X-axis fine-motion base. The scale line cooperates with the above-mentioned Y-axis movement reference edge. When performing Y-direction fine adjustment, the Y-direction displacement can be clearly displayed, which facilitates Y-direction adjustment.

[0095] The above-mentioned second laser unit Y-axis fine-tuning mechanism is installed on the X-axis fine-tuning base in the second laser unit X-axis fine-tuning mechanism. The installation position and matching relationship of each component can refer to the installation position and matching relationship of each corresponding component of the above-mentioned first laser unit Y-axis fine-tuning mechanism, and will not be repeated here.

[0096] The upper end of the first coarse adjustment rod in the coarse adjustment lever mechanism of the first laser unit is provided with a bolt hole 30.1, which connects to the threaded hole on the lower portion of the Y-axis fine adjustment base of the Y-axis fine adjustment mechanism of the first laser unit via a through-bolt. The rod can rotate 180° about the Y-axis, allowing coarse adjustment of the position of the coarse adjustment rod mechanism of the first laser unit. The lower portion of the first coarse adjustment rod is provided with a rod hole 30.2, and three radial screw holes are provided in the rod hole position for connecting to the upper portion of the second coarse adjustment rod. The upper portion of the second coarse adjustment rod is a thin rod 31.1, which is inserted into the rod hole of the first coarse adjustment rod and fastened with three radial screws. It can be rotated 360° around the centerline of the rod hole to meet various working angle requirements. The lower portion of the second coarse adjustment rod in the coarse adjustment lever mechanism of the first laser unit is provided with a connecting hole 31.2, which is screwed to the upper portion of the laser unit placement rod in the first laser unit placement compartment. The rod can be rotated 180° along the Y-axis, allowing fine adjustment of the position of the coarse adjustment rod mechanism of the first laser unit.

[0097] The first coarse adjustment rod in the coarse adjustment rod mechanism of the second laser unit is connected to the lower part of the Y-axis fine adjustment base of the Y-axis fine adjustment mechanism of the second laser unit. The specific connection method refers to the corresponding structure of the coarse adjustment rod mechanism of the first laser unit, which will not be repeated here.

[0098] The lower inner portion of the laser unit mounting rod of the first laser unit mounting compartment features a through-hole, allowing the laser unit to be installed into the hole and wires to be routed out to connect to the laser power switch. The lower outer portion of the laser unit mounting rod is threadedly connected to the laser unit gland, securing the laser unit. A tiny 0.05mm hole 33.1 is located at the lower portion of the laser unit gland, ensuring a sufficiently small laser point source.

[0099] There are two methods for using a laser reference debugging device for an optical probe:

[0100] Method 1: To accurately measure a spatial point, you need to determine the focal length of the current magnified image and output a tiny laser dot to provide a reference for subsequent measurements. This includes the following steps:

[0101] Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base. Rotate it along the mounting hole to the desired working position and secure it with the screws. Install the laser unit into the laser unit mounting rod, then insert the wires into the control switch and tighten them with the laser unit gland. The optical probe, laser unit, and laser reference debugging device now form a single unit.

[0102] Step 2: Magnetically attract the magnetic block in the laser reference debugging device to the machine tool spindle box, and appropriately pre-tighten the connecting screws between the magnetic block and the mounting base to ensure that the entire device does not fall off and can move along the long slot hole in the mounting base.

[0103] Step 3: Use a dial indicator to level the side of the mounting base with the scale line with the machine tool x-axis to ensure that this surface is parallel to the machine tool x-axis; then tighten the screws connecting the magnetic suction cup and the mounting base to ensure that the entire device is stable and reliable.

[0104] Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and debug the machine tool and optical probe to obtain a clear magnified image. Use the machine tool servo system to move the laser reference debugging device, measure the standard dimensions on the micrometer, and read the actual movement data in the machine tool NC system. Compare the actual movement data with the calibrated dimensions of the micrometer to determine whether the actual positioning error of the current machine tool meets the measurement conditions. If the positioning error is greater than 0.01mm, the machine tool's lead screw guide is severely worn and requires repair. If the positioning error is between 0.005mm and 0.001mm, the measurement conditions are met.

[0105] Step 5: Turn on the laser power switch in the laser reference debugging device. The laser emitter will emit two laser beams through the tiny 0.05mm hole in the center of the laser unit cover. Now adjust the angle of the first coarse adjustment lever and the extension of the second coarse adjustment lever so that two circular light spots appear in the magnified image and are roughly aligned on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment lever to bring the two light spots as close together as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment levers. The light spots will move slightly during tightening, but this will not affect the subsequent debugging steps.

[0106] Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the first laser unit's spot to the center of the currently magnified image, that is, on the standard dimension line of the micrometer. Then, fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit, slowly bringing the second laser unit's spot closer to the first laser unit's spot until the two spots touch, leaving no gap between the centers and forming a single large spot. The first and second laser units have a fixed shooting angle, and the focus and the optical probe's Z-axis direction are the focal length distance of the current clear image. The laser focus also serves as the crosshair in optical testing, completing the focus adjustment of the optical probe.

[0107] Step seven, use the machine tool servo system to move the laser reference debugging device and the optical probe to the position above the workpiece to be measured; use the machine tool servo system to slowly lower the Z-axis height. At this time, two light spots can be seen on the surface of the workpiece to be measured as two light spots on the enlarged image. Then continue to lower the Z-axis height in units of 0.001mm. It will be found that the two light spots will gradually get closer until they become the large light spot image in step six again. At this time, the height distance between the optical probe and the workpiece to be measured is the previous appropriate focal length; then move the X and Y axes of the machine tool so that the center of the light spot coincides with the boundary of one side of the measured dimension. At this time, the X, Y, and Z axis data of the machine tool are cleared.

[0108] Step 8: Repeat step 7 to make the center of the light spot in the magnified image coincide with another measured dimension boundary of the workpiece; the X, Y, and Z axis data of the machine tool are the actual position and size of the workpiece, and the measurement is now complete;

[0109] Step 9. After the measurement is completed, the mounting base, optical probe, and laser reference debugging device can be removed together, and the laser emission switch can be turned off. If it is used next time, the magnetic suction block can be used to attach it to the machine tool spindle box again. It is no longer necessary to ensure that the side of the mounting base with the scale line is parallel to the machine tool x-axis. Since the current optical probe focal length and the two laser angle points have not changed, the workpiece measurement can be directly carried out according to steps 7 and 8.

[0110] Method of use 2: Perform precise measurement of plane points, such as using the micro-measurement conditions of the laser reference debugging device of the optical probe to measure the shape of workpieces such as tiny holes and deep grooves.

[0111] Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base, rotate it along the mounting hole to the appropriate working position, and lock it with threads; install the laser emitting unit into the laser unit placement rod, insert the wires into the control switch and tighten it with the laser unit pressure cover; at this time, the optical probe, laser emitting unit and laser reference debugging device become a main body.

[0112] Step 2: Magnetically attract the magnetic block in the laser reference debugging device to the machine tool spindle box, and properly pre-tighten the connecting screws between the magnetic block and the mounting base to ensure that the entire device does not fall off and can move along the long slot on the mounting base.

[0113] Step 3: Use a dial indicator to level the side of the mounting base with the scale line with the machine tool x-axis to ensure that this surface is parallel to the machine tool x-axis; then tighten the connecting screws between the magnetic suction block and the mounting base to ensure that the entire device is stable and reliable.

[0114] Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and adjust the focal length of the machine tool and the optical probe so that a clear magnified image of the entire tiny hole or deep groove can be obtained on the display receiving the optical probe signal.

[0115] Step 5: Turn on the laser power switch in the laser reference debugging device. The laser emitting device will emit two laser beams through the tiny 0.05mm hole in the center of the laser unit cover. At this time, adjust the angle of the first coarse adjustment rod and the extension length of the second coarse adjustment rod so that two circular light spots appear in the magnified image and are roughly aligned on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment rod to bring the two light spots as close as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment rods. The light spots will move slightly during the tightening period, but this will not affect the subsequent debugging steps.

[0116] Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the light spot of the first laser unit to the boundary line of the measured dimension in the current magnified image; then fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit to slowly bring the light spot of the second laser unit closer to the light spot of the first laser unit until the two light spots touch each other and there is no gap between the centers of the two light spots, forming a large light spot; at this time, observe the values ​​of the X and Y directions of the fine-tuning mark of the second laser unit and record the obtained value A.

[0117] Step 7: Move the X and Y fine-tuning knobs of the second laser unit to move the light spot of the second laser unit away from the current measured dimension boundary until the edge of the light spot on the same side coincides with the other measured dimension boundary; then observe the values ​​of the X and Y directions of the fine-tuning mark of the second laser unit and record the obtained value B; the length dimension measured at this time is BA.

[0118] Step 9: After the measurement is completed, the mounting base, optical probe and laser reference debugging device can be removed together, and the laser emission switch can be turned off.

[0119] Although the embodiments and drawings of the present invention are disclosed for illustrative purposes, those skilled in the art will understand that various replacements, changes and modifications are possible without departing from the spirit of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. A laser reference debugging device for an optical probe, characterized in that: It includes a magnetic suction block, a laser unit battery compartment, a mounting base, an X-axis fine-tuning mechanism for the first laser unit, an X-axis fine-tuning mechanism for the second laser unit, a Y-axis fine-tuning mechanism for the first laser unit, a Y-axis fine-tuning mechanism for the second laser unit, a coarse adjustment rod mechanism for the first laser unit, a coarse adjustment rod mechanism for the second laser unit, a first laser unit placement compartment, and a second laser unit placement compartment; the X-axis fine-tuning mechanism for the first laser unit, the X-axis fine-tuning mechanism for the second laser unit, the Y-axis fine-tuning mechanism for the first laser unit, and the Y-axis fine-tuning mechanism for the second laser unit all adopt a lead screw and nut adjustment mechanism; The mounting base is provided with two rectangular mounting cavities on the left and right, and a long slot is provided at the upper end of the middle partition between the two rectangular mounting cavities, and a threaded hole is provided at the lower end of the magnetic suction block. The mounting base is fixed to the bottom of the magnetic suction block by screws inserted into the long slot and the threaded hole at the lower end of the magnetic suction block; an external protrusion is provided at the middle position outside the front end of the mounting base, and a laser power switch is installed on the external protrusion. An optical probe mounting hole is provided near the rear end of the middle partition of the mounting base; The laser unit battery compartment is bonded to the magnetic suction block, in which batteries and power supply components are installed, and leads connected to the laser power switch are led out from the lead holes provided on the battery compartment; The first laser unit X-axis fine-tuning mechanism and the second laser unit X-axis fine-tuning mechanism are respectively installed in two rectangular mounting cavities on the mounting base; the first laser unit X-axis fine-tuning mechanism and the first laser unit X-axis fine-tuning mechanism are respectively connected to the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism arranged below through their respective X-axis fine-motion bases, and the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism are mirror-imaged; the first laser unit Y-axis fine-tuning mechanism and the second laser unit Y-axis fine-tuning mechanism are respectively connected to the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism located below through their respective Y-axis fine-motion bases, and the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism are mirror-imaged; the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism are respectively connected to the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism The adjustment rod mechanism is composed of a first coarse adjustment rod and a second coarse adjustment rod. The upper end of the first coarse adjustment rod is fixedly connected to the lower end of the corresponding Y-axis fine-motion base in a manner that it can be rotated and adjusted 180° around the Y-axis, and the lower end of the first coarse adjustment rod is fixedly connected to the upper end of the second coarse adjustment rod in a manner that it can be rotated and adjusted 360°; the upper ends of the first laser unit placement chamber and the second laser unit placement chamber are respectively fixedly connected to the lower ends of the second coarse adjustment rods of the first laser unit coarse adjustment rod mechanism and the second laser unit coarse adjustment rod mechanism in a manner that they can be rotated and adjusted 180° around the Y-axis, and the first laser unit placement chamber and the second laser unit placement chamber are mirror-imaged; the first laser unit placement chamber and the second laser unit placement chamber are both composed of a laser unit placement rod and a laser unit pressure cover through threads, and the interior of the two constitutes a laser emitting unit mounting cavity, and microholes for light transmission are provided on the laser unit pressure cover.

2. The laser reference debugging device for an optical probe according to claim 1, characterized in that: Scale lines along the X direction are set on the left and right sides of the mounting base, and scale lines along the Y direction are set on the front side of the X-axis fine-motion base.

3. A method for using the laser reference debugging device for an optical probe according to claim 2, characterized in that: Accurately measuring a spatial point includes the following steps: Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base, rotate it along the mounting hole to the appropriate working position and then fix it; install the laser emitting unit into the laser unit placement rod, insert the wires into the control switch and use the laser unit gland to press it tightly; at this time, the optical probe, laser emitting unit and laser reference debugging device become a main body; Step 2: Magnetically attach the magnetic block in the laser reference debugging device to the machine tool spindle box, and properly pre-tighten the connecting screws between the magnetic block and the mounting base to ensure that the entire device does not fall off and can be moved along the long slot in the mounting base; Step 3: Use a dial indicator to level the side of the mounting base with the scale line and the machine tool's x-axis to ensure that this surface is parallel to the machine tool's x-axis; then tighten the screws connecting the magnetic chuck and the mounting base to ensure that the entire device is stable and reliable; Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and debug the machine tool and optical probe to obtain a clear magnified image; use the machine tool servo system to move the laser reference debugging device, measure the standard size in the micrometer, and read the actual movement data in the machine tool NC system; compare the actual movement data with the calibrated size of the measured micrometer to determine whether the actual positioning error of the current machine tool meets the measurement conditions. If the positioning error is greater than 0.01mm, it means that the machine tool screw guide is severely worn and needs to be repaired. If the positioning error is between 0.005mm and 0.001mm, the measurement conditions are met. Step 5. Turn on the laser power switch in the laser reference debugging device. The laser emitting device will emit two laser beams through the tiny hole in the center of the laser unit cover. At this time, adjust the angle position of the first coarse adjustment rod and the extension length of the second coarse adjustment rod so that two circular light spots appear in the magnified image and are roughly on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment rod to make the two light spots as close as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment rods. Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the light spot of the first laser unit to the center of the current magnified image, that is, the standard size limit of the micrometer; then fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit to slowly bring the light spot of the second laser unit closer to the light spot of the first laser unit until the two light spots touch each other and there is no gap between the centers of the two light spots and they become a coincident light spot. At this time, since the emission angles of the first and second laser units are fixed, the intersection of the two rays is the only point in space, and the focal length of the current clear magnified image in the Z-axis direction is obtained. The laser focus is also the crosshair in optical detection. At this time, the focal length adjustment of the optical probe is completed; Step 7. Use the machine tool servo system to move the laser reference debugging device and the optical probe to the position above the workpiece to be measured; use the machine tool servo system to slowly lower the Z axis height. At this time, two light spots can be seen on the surface of the workpiece to be measured as two light spots on the magnified image. Then continue to lower the Z axis height in units of 0.001mm. It will be found that the two light spots will gradually get closer until they become the overlapping light spot image in step 6 again. At this time, the height distance between the optical probe and the workpiece to be measured is the previous appropriate focal length; then move the X and Y axes of the machine tool so that the center of the light spot coincides with the boundary of one side of the measured dimension. At this time, the X, Y, and Z axis data of the machine tool are cleared; Step 8: Repeat step 7 to make the center of the light spot in the magnified image coincide with another measured dimension boundary of the workpiece; the X, Y, and Z axis data of the machine tool are the actual position and size of the workpiece, and the measurement is now complete; Step 9: After the measurement is completed, the mounting base, optical probe and laser reference debugging device can be removed together, and the laser emission switch can be turned off.

4. A method for using the laser reference debugging device for an optical probe according to claim 2, characterized in that: To accurately measure a plane point, the following steps are included: Step 1: Outside the machine tool, install the optical probe into the optical probe mounting hole on the mounting base, rotate it along the mounting hole to the appropriate working position, and lock it with threads; install the laser emitting unit into the laser unit mounting rod, insert the wires into the control switch, and use the laser unit gland to tighten it; at this point, the optical probe, laser emitting unit, and laser reference debugging device become a main body; Step 2: Magnetically attach the magnetic block in the laser reference debugging device to the machine tool spindle box, and properly pre-tighten the screws connecting the magnetic block and the mounting base to ensure that the entire device does not fall off and can be moved along the long slot on the mounting base; Step 3: Use a dial indicator to level the side of the mounting base with the scale line and the machine tool x-axis to ensure that this surface is parallel to the machine tool x-axis; then tighten the connecting screws between the magnetic suction block and the mounting base to ensure that the entire device is stable and reliable; Step 4: Place the microscope micrometer on the machine tool workbench, turn on the optical probe, and adjust the focal length of the machine tool and the optical probe so that a clear magnified image of the entire tiny hole or deep groove is obtained on the display receiving the optical probe signal; Step 5: Turn on the laser power switch in the laser reference debugging device. The laser emitting device will emit two laser beams through the 0.05mm tiny hole in the center of the laser unit cover. At this time, adjust the angle position of the first coarse adjustment rod and the extension length of the second coarse adjustment rod so that two circular light spots appear in the magnified image and are roughly on a straight line parallel to the X-axis. Then adjust the angle of the second coarse adjustment rod to make the two light spots as close as possible. After adjustment, tighten the locking screws of the first and second coarse adjustment rods. The light spots will move slightly during the locking period, but this will not affect the subsequent debugging steps. Step 6: First, turn the x-axis and y-axis fine-tuning knobs of the first laser unit to fine-tune the first laser unit's spot to the boundary line of the measured dimension in the current magnified image. Then, fine-tune the x-axis and y-axis fine-tuning knobs of the second laser unit to slowly bring the second laser unit's spot closer to the first laser unit's spot until the two spots touch and overlap with each other without a gap in the center. At this time, observe the values ​​of the second laser unit's fine-tuning mark in the X and Y directions and record the obtained value A. Step 7: Move the X and Y fine-tuning knobs of the second laser unit to move the light source of the second laser unit away from the current measured dimension boundary until the edge of the light spot on the same side coincides with the other measured dimension boundary. Then, observe the X and Y values ​​of the second laser unit's fine-tuning mark and record the obtained value B. The measured length dimension at this time is BA. Step 9: After the measurement is completed, the mounting base, optical probe and laser reference debugging device can be removed together, and the laser emission switch can be turned off.

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