pump

Abstract

A pump (10) is provided with a diaphragm (11), a flow path forming member (15), a pump chamber (101), and a thin film valve (13). The diaphragm (11) is provided with a piezoelectric element (12) that vibrates by deformation, and is provided with a gap (114) at an outer periphery. The flow path forming member (15) is provided opposite the diaphragm (11), and has a hole (151) in a region opposite the diaphragm (11). The pump chamber (101) is surrounded by the diaphragm (11) and the flow path forming member (15), and has a central region that communicates with the hole (151), and an outer edge region that communicates with the gap (114). The thin film valve (13) is provided in the pump chamber (101). When the pressure in the central region is lower than the pressure in the outer edge region, the thin film valve (13) abuts against the diaphragm (11) and the flow path forming member (15).

Description

[0001] This application is a divisional application of application No. 2019 8 0035 219.6 (International Application No. PCT / JP2019 / 012658), filed on November 25, 2020, entitled "Pump". Technical Field

[0002] This invention relates to pumps that utilize piezoelectric elements. Background Technology

[0003] In the past, as shown in Patent Documents 1, 2 and 3, various pumps have been designed that utilize piezoelectric elements to transport fluids.

[0004] The pumps shown in Patent Documents 1, 2, and 3 utilize vibrations generated by a piezoelectric element to transport fluid. By using a piezoelectric element, the pumps described in Patent Documents 1, 2, and 3 achieve miniaturization and reduced height.

[0005] In addition, the pumps described in Patent Documents 1, 2, and 3 have a rectifier mechanism for unidirectional fluid delivery.

[0006] Patent Document 1: International Publication No. 2016 / 175185

[0007] Patent Document 2: Japanese Patent Application Publication No. 2009-74418

[0008] Patent Document 3: International Publication No. 2016 / 013390

[0009] However, the pump structures described in Patent Documents 1, 2, and 3 have certain limitations in terms of pump characteristics. Pump characteristics are represented by pressure or flow rate; the greater the pressure that can be increased, the better the pump characteristics, and the greater the flow rate that can be increased, the better the pump characteristics.

[0010] Furthermore, in the pump structures described in Patent Documents 1, 2, and 3, the pump characteristics are sometimes limited by the rectifier mechanism. Summary of the Invention

[0011] Therefore, the object of the present invention is to provide a pump with rectification function and excellent pump characteristics.

[0012] The pump of the present invention includes a plate-shaped component, a flow path forming component, a pump chamber, and a first diaphragm valve. The plate-shaped component includes a vibrating plate with a piezoelectric element disposed on one main surface, a support plate, and a plurality of support components connecting the vibrating plate and the support plate and supporting the vibrating plate so that it can vibrate along the main surface direction, and a first vent is provided between the plurality of support components. The flow path forming component is disposed opposite to the plate-shaped component, and a second vent is provided in the region of the flow path forming component opposite to the plate-shaped component. The pump chamber is formed by the plate-shaped component, the flow path forming component, and sidewall components connected to the plate-shaped component and the flow path forming component, and has a central region communicating with the second vent and an outer edge region communicating with the first vent. The first diaphragm valve is disposed within the pump chamber. When the pressure in the central region is lower than the pressure in the outer edge region, the first diaphragm valve abuts against the vibrating plate and the flow path forming component.

[0013] In this structure, with the second vent as the intake port and the first vent as the outlet port, the reverse flow of fluid from the void side toward the pump chamber during intake is suppressed.

[0014] Furthermore, the pump of the present invention preferably has the following structure. In plan view, a first diaphragm valve is positioned such that a second vent is located within the area enclosed by the outer end of the first diaphragm valve, which is fixed to a vibrating plate or flow path forming member, allowing the area on the outer end side to deform.

[0015] In this structure, the aforementioned reverse inflow can be suppressed with a simple design.

[0016] Furthermore, the pump of the present invention preferably has the following structure: Viewed from above, the central region of the vibrating plate has a thick portion whose thickness from one main surface to another is greater than that of the outer end of the vibrating plate. The first diaphragm valve is annular, and the inner end of the annular first diaphragm valve is arranged along the outer edge of the thick portion.

[0017] In this structure, the first diaphragm valve can be easily and precisely positioned to achieve the aforementioned actions.

[0018] Furthermore, the pump of the present invention preferably has the following structure: The pump includes a second diaphragm valve. Viewed from above, the second diaphragm valve is positioned closer to the second vent than the first diaphragm valve is positioned at the periphery of the second vent. When the pressure in the central region of the pump chamber is higher than the pressure in the outer region, the second diaphragm valve abuts against the vibrating plate and the aforementioned flow path forming components.

[0019] In this structure, leakage of fluid from the second vent, which serves as the suction port, is further suppressed when the fluid accumulated in the pump chamber is discharged to the gap at the outer edge.

[0020] In addition, preferably in the pump of the present invention, the second diaphragm valve is fixed to the vibrating plate or the flow path forming component and the region on the outer end side is deformable.

[0021] In this structure, the second diaphragm valve can perform the above-mentioned functions, and the second diaphragm valve can be implemented with a simple structure.

[0022] Alternatively, the pump of the present invention may also have the following structure: The pump includes a plate-shaped component, a flow path forming component, a pump chamber, and a third diaphragm valve.

[0023] The plate-shaped component includes a vibrating plate on one main surface with a piezoelectric element, a support plate, and multiple support components that connect the vibrating plate and the support plate and support the vibrating plate so that it can vibrate along the main surface direction, and a first vent is provided between the multiple support components. A flow path forming component is disposed opposite to the plate-shaped component, and a second vent is provided in the region of the flow path forming component opposite to the plate-shaped component.

[0024] The pump chamber is formed by a plate-shaped component, a flow path forming component, and a sidewall component connected to the plate-shaped component and the flow path forming component, and has a central region communicating with a second vent and an outer edge region communicating with a first vent. A third diaphragm valve is disposed in the pump chamber. When the pressure in the central region is higher than the pressure in the outer edge region, the third diaphragm valve abuts against the vibrating plate and the flow path forming component.

[0025] In this structure, leakage of fluid towards the void side during discharge is suppressed when the second vent is used as the outlet and the first vent is used as the inlet.

[0026] Furthermore, the pump of the present invention preferably has the following structure. In plan view, the third diaphragm valve is positioned such that the second vent is located within the area enclosed by the outer end of the third diaphragm valve. The third diaphragm valve is fixed to a vibrating plate or flow path forming member, and the central region is deformable.

[0027] In this structure, the aforementioned leakage can be suppressed with a simple design.

[0028] Furthermore, the pump of the present invention preferably has the following structure: Viewed from above, the central region of the vibrating plate has a thick portion whose thickness from one main surface to another is greater than that of the outer end of the vibrating plate. The third diaphragm valve is annular, with its inner end arranged along the outer edge of the thick portion.

[0029] In this structure, the third diaphragm valve can be easily and precisely positioned to achieve the aforementioned actions.

[0030] Alternatively, the pump of the present invention may also have the following structure: The pump includes a fourth diaphragm valve. Viewed from above, the fourth diaphragm valve is positioned closer to the second vent than the third diaphragm valve is positioned around the second vent. When the pressure in the central region of the pump chamber is lower than the pressure in the outer region, the fourth diaphragm valve abuts against the vibrating plate and the flow path forming member.

[0031] In this structure, the reverse flow of fluid through the second vent, which serves as the discharge outlet, is further suppressed when fluid is drawn into the pump chamber from the gap at the outer edge.

[0032] Furthermore, the pump of the present invention preferably has the following structure: A fourth diaphragm valve is fixed to a vibrating plate or a flow path forming member, allowing the central region to deform.

[0033] In this structure, the fourth diaphragm valve can perform the above-mentioned functions, and the fourth diaphragm valve can be implemented with a simple structure.

[0034] Alternatively, the pump of the present invention may have the following structure: The pump includes a flat plate component, a flow path forming component, a pump chamber, a fifth diaphragm valve, a third vent, and a fourth vent. The flat plate component includes a vibrating plate with a piezoelectric element disposed on one main surface, a support plate, and a support member that connects the outer edge of the vibrating plate to the support plate and supports the vibrating plate so that it can vibrate along the main surface direction. The flow path forming component is disposed opposite to the flat plate component. The pump chamber is formed by the flat plate component, the flow path forming component, and a side wall component connected to the flat plate component and the flow path forming component. The fifth diaphragm valve is fixed to the flat plate component or the flow path forming component and is disposed at a position overlapping the vibrating plate inside the pump chamber when viewed from above. The third vent is formed in the flat plate component, and the fourth vent is formed in the flow path forming component.

[0035] Viewed from above, the third and fourth vents are positioned with the fifth diaphragm valve between them. Corresponding to the vibration of the vibrating plate, the fifth diaphragm valve switches between a position where it contacts the flow path forming component and a position where it does not, thus changing the flow resistance between the third and fourth vents.

[0036] In this structure, the fifth diaphragm valve suppresses the backflow of fluid in the pump chamber.

[0037] Therefore, it is possible to transport fluid from the outer edge of the pump chamber to the central area or from the central area to the outer edge.

[0038] In this case, preferably in the pump of the present invention, the fifth diaphragm valve is configured to suppress fluid discharge from the central region of the pump chamber to the outer edge region and to allow fluid to flow from the outer edge region to the central region. In this configuration, during discharge, the vibrating plate is close to the flow path forming member, so the fifth diaphragm valve easily comes into contact; during suction, the vibrating plate moves away from the flow path forming member, so the fifth diaphragm valve is less likely to come into contact. Therefore, backflow during discharge is easily suppressed, and inflow during suction is easily promoted.

[0039] Furthermore, the pump of the present invention preferably has any of the following structures: In plan view, the flow path forming member has a protrusion protruding toward the vibrating plate side at the position overlapping with the fifth diaphragm valve. In plan view, the vibrating plate has a protrusion protruding toward the flow path forming member side at the position overlapping with the fifth diaphragm valve.

[0040] In this structure, the fifth diaphragm valve can switch between the contacting and non-contacting states more quickly and reliably, making it easier to suppress backflow during discharge and more effective in promoting inflow during suction.

[0041] In addition, it is preferable that the third vent of the pump of the present invention is formed on a flat plate component.

[0042] In this structure, a conduction path for the drive signal to conduct to the piezoelectric element can be easily formed.

[0043] Furthermore, the pump of the present invention preferably has the following structure: In plan view, the third vent is formed in the flat plate member at a position further outward than the position where the fifth diaphragm valve is positioned. In plan view, the fourth vent is formed in the flow path forming member at a position further central than the position overlapping with the fifth diaphragm valve.

[0044] In this structure, the support component is more flexible than the vibrating plate, thus enabling the vibrating plate to vibrate at a large amplitude. Therefore, this structure can increase the displacement of the fifth diaphragm valve in its configuration position, and can quickly and reliably switch the fifth diaphragm valve between its contact and non-contact states.

[0045] Furthermore, it is preferable that in the pump of the present invention, the fourth vent hole overlaps with the vibration node of the aforementioned vibrating plate.

[0046] In this structure, backflow can be reliably suppressed without the use of a check valve.

[0047] Alternatively, in the pump of the present invention, the fourth vent hole may also have a check valve that overlaps with the central antinode of the vibrating plate and prevents backflow from the outside into the pump chamber.

[0048] In this structure, backflow is suppressed even when discharge begins from the vibrating antinodes. Furthermore, by using vibrating antinodes, the check valve can be opened / closed more quickly and reliably.

[0049] Furthermore, in the pump of the present invention, the support member is preferably formed of a material or shape that is more flexible than the vibrating plate.

[0050] In this structure, even if the outer edge of the vibrating plate is supported, it still promotes the vibration of the vibrating plate.

[0051] Furthermore, in the pump of the present invention, the support member preferably has the shape of a beam along the outer edge of the vibrating plate.

[0052] In this structure, the flexibility of the support component can be made higher than that of the vibrating plate with easy construction.

[0053] Furthermore, preferably in the pump of the present invention, the third vent is formed by a gap between the support components.

[0054] In this structure, the displacement of the fifth diaphragm valve's position can be significantly increased. Therefore, the switching between the fifth diaphragm valve's contact and non-contact states can be achieved more quickly and reliably.

[0055] Alternatively, the pump of the present invention may have the following structure: In plan view, the third vent is formed in the vibrating plate at a position closer to the center than the position overlapping with the fifth diaphragm valve. In plan view, the fourth vent is formed in the flow path forming member at a position overlapping with the support member.

[0056] This structure enables the intake of fluid from the flow path forming component side and the discharge to the vibrating plate side.

[0057] According to the present invention, excellent pump characteristics can be achieved in a pump with rectification function. Attached Figure Description

[0058] Figure 1 This is an exploded perspective view of the pump 10 according to the first embodiment of the present invention.

[0059] Figure 2 This is a cross-sectional view showing the structure of the composite module of pump 10 and valve 20 according to the first embodiment of the present invention.

[0060] Figure 3 (A) and Figure 3 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13.

[0061] Figure 4 This is a diagram schematically illustrating the operation of pump 10.

[0062] Figure 5 This is a chart showing the comparison results of PQ characteristics.

[0063] Figure 6 This is a cross-sectional view showing the structure of the pump 10A according to the second embodiment of the present invention.

[0064] Figure 7 (A) and Figure 7 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13A.

[0065] Figure 8 This is a cross-sectional view showing the structure of the pump 10B according to the third embodiment of the present invention.

[0066] Figure 9 This is a cross-sectional view showing the structure of the pump 10C according to the fourth embodiment of the present invention.

[0067] Figure 10 (A) and Figure 10 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13C.

[0068] Figure 11 This is an exploded perspective view of the pump 10D according to the fifth embodiment of the present invention.

[0069] Figure 12 This is a cross-sectional view showing the structure of the pump 10E according to the sixth embodiment of the present invention.

[0070] Figure 13 (A) and Figure 13 (B) is an enlarged cross-sectional view showing the operation of diaphragm valves 13 and 131.

[0071] Figure 14 This is a cross-sectional view showing the structure of the pump 10F according to the seventh embodiment of the present invention.

[0072] Figure 15 (A) and Figure 15 (B) is an enlarged cross-sectional view showing the operation of diaphragm valves 13C and 131C.

[0073] Figure 16 This is a cross-sectional view showing the structure of the pump 10G according to the eighth embodiment of the present invention.

[0074] Figure 17 This is a cross-sectional view showing the structure of the pump 10H according to the ninth embodiment of the present invention.

[0075] Figure 18 This is a top view of the vibrating plate 11H of the pump 10H according to the ninth embodiment.

[0076] Figure 19 (A) is a side sectional view showing the state of pump 10H when the fluid is being discharged. Figure 19 (B) is a side sectional view showing the state of pump 10H when fluid is being drawn in.

[0077] Figure 20 This is a cross-sectional view showing the structure of the pump 10I according to the tenth embodiment of the present invention.

[0078] Figure 21 This is a cross-sectional view showing the structure of the pump 10J according to the eleventh embodiment of the present invention.

[0079] Figure 22This is a cross-sectional view showing the structure of the pump 10J1 according to the first modified example of the eleventh embodiment of the present invention.

[0080] Figure 23 This is a cross-sectional view showing the structure of the pump 10J2 according to the second variation of the eleventh embodiment of the present invention.

[0081] Figure 24 This is an enlarged cross-sectional view of the joint between the support member, piezoelectric element, and vibrating plate according to the second variation of the eleventh embodiment of the present invention.

[0082] Figure 25 This is a perspective view showing an example of a derivative of the diaphragm valve 13.

[0083] Figure 26 This is a cross-sectional view showing the structure of the pump 10K according to a modified example of the present invention. Detailed Implementation

[0084] The pump according to the first embodiment of the present invention will be described with reference to the figures.

[0085] Figure 1 This is an exploded perspective view of the pump 10 according to the first embodiment of the present invention. Figure 2 This is a cross-sectional view showing the structure of the composite module of pump 10 and valve 20 according to the first embodiment of the present invention. Furthermore, in the figures shown in the following embodiments, the shapes of the various constituent elements are exaggerated, either partially or entirely, to facilitate understanding of the explanation.

[0086] like Figure 1 , Figure 2 As shown, the pump 10 includes: a vibrating plate 11, a piezoelectric element 12, a diaphragm valve 13, a connecting part 14, a flow path forming part 15, a flow path forming part 16, a housing part 17, and a side wall part 18.

[0087] The vibrating plate 11 is a circular plate. The vibrating plate 11 is formed of a material and dimensions capable of bending vibration due to the deformation (deformation) of the piezoelectric element 12. Bending vibration refers to vibration with the direction orthogonal to the surface of the plate-shaped component as the vibration direction. Furthermore, the vibrating plate 11 is formed of a material and dimensions that vibrate at a predetermined resonant frequency.

[0088] The vibrating plate 11 is composed of a thin portion 111 and a thick portion 112. The thick portion 112 is a shape that protrudes from one main surface of the thin portion 111, but does not protrude from the other main surface. Both the thin portion 111 and the thick portion 112 are circular in plan view. The diameter of the thick portion 112 is smaller than the diameter of the thin portion 111. In plan view, the thick portion 112 is located in the central region of the thin portion 111. In plan view, the center of the thick portion 112 is approximately aligned with the center of the thin portion 111. The thick portion 112 is integrally formed with the thin portion 111.

[0089] A support plate 113 is disposed on the outer periphery of the vibrating plate 11 and separated from the vibrating plate 11. A gap 114 exists between the vibrating plate 11 and the support plate 113. The vibrating plate 11 is connected to the support plate 113 via a support member 115 formed in the gap 114. The support member 115 is elastic. Thus, the vibrating plate 11 is held by the support plate 113 to vibrate via the support member 115. The component consisting of the vibrating plate 11, the support plate 113, and the support member 115 corresponds to the "plate-shaped component" of the present invention. In addition, the gap 114 corresponds to the "first vent" of the present invention.

[0090] The piezoelectric element 12 includes a piezoelectric body and driving electrodes. The piezoelectric body is a circular plate. The driving electrodes are formed on the two main surfaces of the piezoelectric body. The shape of the piezoelectric body is deformed by the driving voltage applied to the driving electrodes. That is, the piezoelectric element 12 is deformed by the applied driving voltage.

[0091] The piezoelectric element 12 abuts against the side opposite to the protruding surface of the same thickness portion 112 in the vibrating plate 11. Thus, if a driving voltage is applied to the piezoelectric element 12 and the piezoelectric element 12 deforms, the stress acts on the vibrating plate 11, and the vibrating plate 11 produces the aforementioned bending vibration.

[0092] The diaphragm valve 13 is made of a flexible material. The diaphragm valve 13 is implemented using a lightweight and low-rigidity material. For example, the diaphragm valve 13 is implemented using a metal foil, a resin film, etc. Furthermore, a polyimide film is more preferable for the diaphragm valve 13. The diaphragm valve 13 corresponds to the "first diaphragm valve" of the present invention. For example, the thickness of the diaphragm valve 13 is 5 μm, and the outer diameter is 5.9 mm.

[0093] Viewed from above, the diaphragm valve 13 is positioned to allow the orifice 151 to enter the area enclosed by the outer end of the diaphragm valve 13.

[0094] A diaphragm valve 13 is disposed on the surface of the thicker portion 112 of the vibrating plate 11, protruding from this side. The diaphragm valve 13 is annular in shape. The diaphragm valve 13 is engaged with the vibrating plate 11 using an annular engaging member 14. More specifically, a portion of a predetermined width on the inner end side of the annular portion of the diaphragm valve 13 is engaged with the vibrating plate 11 via the engaging member 14, while the outer end side is not engaged with the vibrating plate 11. Thus, the diaphragm valve 13 is engaged with the vibrating plate 11 in a state where a predetermined area on the outer end side can vibrate. For example, the thickness of the engaging member 14 is 17 μm, and its outer diameter is 5.5 mm.

[0095] The inner end of the diaphragm valve 13 is located further outward than the outer periphery of the thick portion 112 and approximately abuts against the outer periphery of the thick portion 112. According to this structure, when configuring the diaphragm valve 13, it can be configured with the thick portion 112 as a reference, and the configuration of the diaphragm valve 13 can be easily and with high precision.

[0096] The radial length of the diaphragm valve 13, excluding the area that engages with the engaging member 14, is longer than the distance between the vibrating plate 11 and the flow path forming member 15. This arrangement facilitates the contact of the diaphragm valve 13 with the flow path forming member 15. More preferably, when the vibrating plate 11 is vibrating and at its furthest point from the flow path forming member 15, the diaphragm valve 13 is shaped such that a portion extending a predetermined length from its outer end towards the center contacts the flow path forming member 15, thereby ensuring easy and reliable contact between the diaphragm valve 13 and the flow path forming member 15.

[0097] The flow path forming component 15 is a plate-shaped component. The flow path forming component 15 is made of a material with high rigidity. The flow path forming component 15 has a hole 151 approximately at its center when viewed from above. The hole 151 is a through hole that extends through the flow path forming component 15 in the thickness direction. For example, the diameter of the hole 151 is approximately 0.8 mm. The hole 151 corresponds to the "second vent" of the present invention.

[0098] The flow path forming component 15 is configured to protrude a predetermined distance from the surface of the thicker portion 112 of the vibrating plate 11. At this time, the flow path forming component 15 is also configured away from the diaphragm valve 13.

[0099] The flow path forming component 16 is a plate-shaped component. The flow path forming component 16 is made of a material with high rigidity. The flow path forming component 16 has an opening 161 for the flow path.

[0100] The opening 161 for the flow path extends through the flow path forming member 16 in the thickness direction. The opening 161 for the flow path is composed of a central region that is circular in plan view and a plurality of linear regions. One end of the extension direction of the plurality of linear regions is connected to the central region, and the other end reaches the vicinity of each different outer end in the flow path forming member 16.

[0101] The housing component 17 is a plate-shaped component. The housing component 17 has a plurality of holes 171. The plurality of holes 171 extend through the housing component 17 in the thickness direction. The plurality of holes 171 are formed near various different outer ends in the housing component 17.

[0102] The flow path forming component 15, the flow path forming component 16, and the outer shell component 17 are stacked in sequence and joined together. Thus, the hole 151, the opening 161 for the flow path, and the plurality of holes 171 are connected in sequence, and the flow path protruding from the thick part 112 of the vibrating plate 11 is formed by this shape.

[0103] The sidewall component 18 is cylindrical and has high rigidity. The sidewall component 18 is connected to the support plate 113 and the flow path forming component 15.

[0104] According to this structure, the pump 10 has a pump chamber 101 consisting of a hollow region enclosed by a vibrating plate 11, a support plate 113, a flow path forming member 15, and a sidewall member 18. Furthermore, a diaphragm valve 13 is disposed within this pump chamber 101. Additionally, the pump chamber 101 communicates with the orifice 151 and the gap 114. For example, the default height of the pump chamber 101 (when the vibrating plate 11 is not vibrating) is approximately 10 μm to approximately 20 μm.

[0105] Furthermore, the pump 10 utilizes the vibration of the vibrating plate 11 to change the pressure in the pump chamber 101, thereby transporting fluid. The specific operation of the pump 10 will be described later.

[0106] In short, the pump 10 expands the volume of the pump chamber 101 by displacing the vibrating plate 11, thereby making the pressure in the pump chamber 101 lower than that outside. As a result, the pump 10 draws fluid into the pump chamber 101 through the orifice 171, the flow path opening 161, and the orifice 151.

[0107] On the other hand, the pump 10 reduces the volume of the pump chamber 101 by displacing the vibrating plate 11, thereby making the pressure in the pump chamber 101 higher than that outside. As a result, the pump 10 discharges the fluid inside the pump chamber 101 through the gap 114.

[0108] The discharged fluid enters valve 20. For example... Figure 2 As shown, valve 20 includes: a first housing component 21, a second housing component 22, a diaphragm plate 23, a bonding membrane 24, a reinforcing membrane 25, and an adhesive component 26. Briefly, the first housing component 21 and the second housing component 22 form a valve chamber. The first housing component 21 has an intake port 201 that communicates with the valve chamber. The second housing component 22 has an outlet port 202 and an outlet port 203 that communicate with the valve chamber.

[0109] The diaphragm plate 23 is joined to the reinforcing membrane 25 using a bonding membrane 24. Furthermore, this thin film is disposed within the valve chamber, dividing the valve chamber into a first valve chamber communicating with the inlet 201 and a second valve chamber communicating with the outlet 202 and outlet 203. The thin film is provided with multiple holes for achieving a rectification function.

[0110] The adhesive component 26 adhesively bonds the first housing component 21, the second housing component 22, and the film-like body.

[0111] Such valve 20 is connected to pump 10 via connecting member 27. Connecting member 27 is cylindrical and connects first housing member 21 to support plate 113.

[0112] In this structure, fluid discharged from the gap 114 of pump 10 flows into the valve chamber through the suction port 201 of valve 20. The thin film formed by the diaphragm plate 23, the connecting membrane 24, and the reinforcing membrane 25 deforms and shifts towards the discharge port 202 due to the inflow of fluid, thus connecting the suction port 201 and the discharge port 202. Therefore, the fluid flowing in from the suction port 201 is discharged to the outside through the discharge port 202. Conversely, when fluid flows in from the discharge port 202, the thin film formed by the diaphragm plate 23, the connecting membrane 24, and the reinforcing membrane 25 deforms and shifts towards the suction port 201, thus disconnecting the suction port 201 from the discharge port 202. Furthermore, the discharge port 202 and the discharge port 203 become connected. Therefore, the fluid flowing in from the discharge port 202 is discharged to the outside through the discharge port 203.

[0113] In this configuration, the diaphragm valve 13 performs the actions (movements) shown below. Figure 3 (A) and Figure 3 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13. Furthermore, in Figure 3 (A) Figure 3 In (B), the displacement diagram of the vibrating plate 11 is omitted.

[0114] (Central region: relatively high pressure; outer region: relatively low pressure)

[0115] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 is close to the flow path forming component 15, then as Figure 3 As shown in (A), the central region of the pump chamber 101, which is closer to the center of the diaphragm valve 13, has a higher pressure (relatively higher pressure) than the outer edge region of the pump chamber 101.

[0116] In this case, such as Figure 3 As shown in (A), the region on the outer edge side (the region on the free end side) of the diaphragm valve 13 bends toward the vibrating plate 11 and abuts against the surface of the vibrating plate 11.

[0117] Thus, the central region of pump chamber 101 is connected to the outer region, and the fluid accumulated in the central region is transported to the outer region and discharged from the gap 114. At this time, the diaphragm valve 13 abuts against the surface of the vibrating plate 11, so it does not obstruct the transport of fluid and does not cause a decrease in flow rate.

[0118] (Central region: relatively low pressure; outer region: relatively high pressure)

[0119] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 moves away from the flow path forming component 15, then as Figure 3 As shown in (B), the central region of the pump chamber 101, which is closer to the center of the diaphragm valve 13, has a lower pressure (relatively lower pressure) than the outer edge region of the pump chamber 101.

[0120] In this case, such as Figure 3 As shown in (B), the region on the outer edge side (the region on the free end side) of the diaphragm valve 13 bends toward the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region of the pump chamber 101 is separated from the outer edge region. Therefore, backflow of fluid from the outer edge side toward the central region is suppressed.

[0121] (Continuous actions)

[0122] The vibrating plate 11 vibrates repeatedly, thereby causing the diaphragm valve 13 to repeatedly operate. Figure 4 The action shown. Figure 4 It is a diagram that schematically illustrates the operation of a pump.

[0123] Condition ST1 indicates that during the process of pump 10 drawing fluid in and discharging it, the vibrating plate 11 is in its default position. In this case, the diaphragm valve 13 is approximately in its default state, that is, without deformation.

[0124] In condition ST2, compared to condition ST1, the central region of the vibrating plate 11 is closer to the flow path forming member 15. In this case, the pressure in the central region is higher than in condition ST1, and is relatively higher than the outer edge region. As a result, fluid is squeezed out from the central region toward the outer edge. Correspondingly, the region on the outer edge side of the diaphragm valve 13 also bends toward the vibrating plate 11.

[0125] In condition ST3, compared to condition ST2, the central region of the vibrating plate 11 is further closer to the flow path forming member 15. In this case, the pressure in the center becomes higher than in condition ST2, forming a relatively high pressure compared to the outer edge region. As a result, the fluid is further compressed from the central region toward the outer edge. Correspondingly, the region on the outer edge side of the diaphragm valve 13 also bends further toward the vibrating plate 11, abutting against the surface of the vibrating plate 11.

[0126] In condition ST4, compared to condition ST3, the central region of the vibrating plate 11 moves away from the flow path forming member 15. In this case, the pressure in the central region is lower than in condition ST3, but a higher pressure is formed relative to the outer edge region. As a result, the region on the outer edge side of the diaphragm valve 13 moves away from the surface of the vibrating plate 11, approaching the default state.

[0127] Condition ST5 indicates that after pump 10 discharges fluid, vibrating plate 11 is in its default position. In this case, diaphragm valve 13 is in a roughly default state, that is, without deformation.

[0128] In condition ST6, compared to condition ST5, the central region of the vibrating plate 11 is separated from the flow path forming member 15. In this case, compared to condition ST5, the pressure in the central region is lower, creating a lower pressure relative to the flow path containing the orifice 151 and the outer edge region. Consequently, fluid is introduced into the central region through the orifice 151. Correspondingly, the region on the outer edge side of the diaphragm valve 13 bends towards the flow path forming member 15. This diaphragm valve 13 suppresses the backflow of fluid from the outer edge region towards the central region.

[0129] In condition ST7, compared to condition ST6, the central region of the vibrating plate 11 is further away from the flow path forming member 15. In this case, the pressure in the center becomes lower than in condition ST6, and is relatively lower than the pressure in the flow path containing the orifice 151 and the outer edge region. As a result, fluid is further introduced into the central region through the orifice 151. Correspondingly, the region on the outer edge side of the diaphragm valve 13 bends further toward the flow path forming member 15, abutting against the surface of the flow path forming member 15. As a result, the outer edge region is separated from the central region by the diaphragm valve 13, and the backflow of fluid from the outer edge region to the central region is more effectively suppressed.

[0130] In condition ST8, compared to condition ST7, the central region of the vibrating plate 11 is closer to the flow path forming member 15. In this case, the pressure in the central region is higher than in condition ST7, but relatively lower than the pressure in the outer region. As a result, the region on the outer edge side of the diaphragm valve 13 moves away from the surface of the flow path forming member 15, approaching the default state.

[0131] Furthermore, pump 10 returns to state ST1 and repeats the above operation.

[0132] In this way, by using the structure of pump 10, it is possible to suppress the backflow of fluid through the outer edge region, i.e., the gap 114, when fluid is drawn in. Furthermore, when fluid is transported from the central region to the outer edge region, i.e. when fluid is discharged from the gap 114, the diaphragm valve 13 does not obstruct the transport of fluid.

[0133] As a result, the pump performance of pump 10 is improved. Figure 5 This is a chart showing the comparison results of PQ characteristics. In Figure 5 In the diagram, the horizontal axis represents pressure, and the vertical axis represents flow rate. Figure 5 In the diagram, solid lines represent the structure of this application, and dashed lines represent the comparative structure. The comparative structure does not have the aforementioned diaphragm valve 13.

[0134] like Figure 5 As shown, the structure of this application (pump 10) is used, thereby improving the PQ characteristics. That is, improving the pump characteristics.

[0135] Furthermore, in the above description, it is preferable that the engagement position of the diaphragm valve 13 of the engagement member 14 overlaps with the wave node position of the vibration of the vibrating plate 11. This can suppress the stress caused by the vibration of the vibrating plate 11 being applied to the engagement member 14. Therefore, peeling of the diaphragm valve 13 can be suppressed.

[0136] Next, the pump according to the second embodiment of the present invention will be described with reference to the figures. Figure 6 This is a cross-sectional view showing the structure of the pump 10A according to the second embodiment of the present invention.

[0137] like Figure 6 As shown, the pump 10A according to the second embodiment differs from the pump 10 according to the first embodiment in that the diaphragm valve 13A is provided in the flow path forming member 15. Additionally, the pump 10A differs in that it includes a vibrating plate 11A. The other structures of the pump 10A are the same as those of the pump 10, and descriptions of identical parts are omitted.

[0138] The shape of the diaphragm valve 13A is the same as that of the diaphragm valve 13 shown in the pump 10, and the shape of the engagement member 14A is the same as that of the engagement member 14 shown in the pump 10.

[0139] The diaphragm valve 13A engages with the surface of the pump chamber 101 side in the flow path forming member 15 using the engaging member 14A. At this time, in top view, the diaphragm valve 13A is positioned to allow the orifice 151 to enter the area enclosed by the outer end.

[0140] For the diaphragm valve 13A, a portion of a predetermined width on the inner annular end side of the diaphragm valve 13A engages with the flow path forming member 15 via the engaging member 14A, while the outer end area is not engaged. Thus, the diaphragm valve 13A engages with the flow path forming member 15 in a vibrating state within a predetermined area on the outer end side.

[0141] The vibrating plate 11A is a flat plate with a constant thickness. Alternatively, the vibrating plate 11A may also have the same shape as the vibrating plate 11 shown in the pump 10.

[0142] In this configuration, the diaphragm valve 13A performs the actions (movements) shown below. Figure 7 (A) and Figure 7(B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13A. Furthermore, in Figure 7 (A) Figure 7 In (B), the displacement diagram of the vibrating plate 11A is omitted.

[0143] (Central region: relatively high pressure; outer region: relatively low pressure)

[0144] If the vibrating plate 11A is displaced, and the center of the vibrating plate 11A is close to the flow path forming component 15, then as Figure 7 As shown in (A), when viewed from above, the pressure in the central region of pump chamber 101, that is, the region closer to the center of the diaphragm valve 13A, is higher than that in the outer region of pump chamber 101 (relatively high pressure).

[0145] In this case, such as Figure 7 As shown in (A), the region on the outer edge (the region on the free end side) of the diaphragm valve 13A bends towards the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region of the pump chamber 101 communicates with the outer edge region, and the fluid accumulated in the central region is transported to the outer edge region and discharged from the gap 114. At this time, the diaphragm valve 13A abuts against the surface of the flow path forming member 15, therefore it does not obstruct the flow of fluid and does not cause a decrease in flow rate.

[0146] (Central region: relatively low pressure; outer region: relatively high pressure)

[0147] If the vibrating plate 11A is displaced, and the center of the vibrating plate 11A moves away from the flow path forming component 15, then as Figure 7 As shown in (B), from a top view, the central region of the pump chamber 101, that is, the region closer to the center of the diaphragm valve 13A, has a lower pressure (relatively lower pressure) than the outer edge region of the pump chamber 101.

[0148] In this case, such as Figure 7 As shown in (B), the region on the outer edge side (the region on the free end side) of the diaphragm valve 13A bends towards the vibrating plate 11A and abuts against the surface of the vibrating plate 11A. This separates the central region of the pump chamber 101 from the outer edge region. Therefore, backflow of fluid from the outer edge side towards the central region is suppressed.

[0149] Based on this structure, pump 10A can perform the same function as pump 10.

[0150] Furthermore, the flow path forming component 15 does not vibrate, or is essentially vibration-free. Therefore, it is possible to suppress the stress caused by vibration applied to the joining component 14A and to suppress the peeling of the diaphragm valve 13A.

[0151] Next, the pump according to the third embodiment of the present invention will be described with reference to the figures. Figure 8This is a cross-sectional view showing the structure of the pump 10B according to the third embodiment of the present invention.

[0152] Compared to the pump 10 involved in the first embodiment, such as Figure 8 As shown, the pump 10B according to the third embodiment differs in that it includes a diaphragm valve 13B. The other structures of the pump 10B are the same as those of the pump 10, and the description of the same parts is omitted.

[0153] The diaphragm valve 13B is circular. The diaphragm valve 13B engages with the surface of the thick portion 112 of the vibrating plate 11. At this time, a predetermined area in the center of the diaphragm valve 13B engages with the thick portion 112, while the area at its outer end does not engage with the thick portion 112. Thus, the diaphragm valve 13B engages with the vibrating plate 11 while the predetermined area at its outer end is capable of vibration.

[0154] Based on this structure, pump 10B can achieve the same effect as pump 10.

[0155] Next, the pump according to the fourth embodiment of the present invention will be described. Figure 9 This is a cross-sectional view showing the structure of the pump 10C according to the fourth embodiment of the present invention.

[0156] Compared to the pump 10 involved in the first embodiment, such as Figure 9 As shown, the pump 10C according to the fourth embodiment differs in the fixing structure of the diaphragm valve 13C. The other structures of the pump 10C are the same as those of the pump 10, and the description of the same parts is omitted.

[0157] The diaphragm valve 13C has the same structure as the diaphragm valve 13. A portion of a predetermined width at the outer end of the annular portion of the diaphragm valve 13C engages with the vibrating plate 11 via a connecting member 14C, while the inner end portion is not engaged with the vibrating plate 11. Thus, the diaphragm valve 13C engages with the vibrating plate 11 while the predetermined area at its inner end is capable of vibration. The diaphragm valve 13C corresponds to the "third diaphragm valve" of the present invention.

[0158] In this configuration, the diaphragm valve 13C performs the actions (movements) shown below. Figure 10 (A) and Figure 10 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve 13C. Furthermore, in Figure 10 (A) Figure 10 In (B), the displacement diagram of the vibrating plate 11 is omitted.

[0159] (Central region: relatively high pressure; outer region: relatively low pressure)

[0160] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 is close to the flow path forming component 15, then as Figure 10As shown in (A), the central region of the pump chamber 101, which is located closer to the center than the position of the diaphragm valve 13C, has a higher pressure (relatively higher pressure) than the outer edge region of the pump chamber 101.

[0161] In this case, such as Figure 10 As shown in (A), the region on the inner end side (the region on the free end side) of the diaphragm valve 13C bends towards the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region and the outer edge region of the pump chamber 101 are separated, and the fluid accumulated in the central region is discharged through the orifice 151. That is, in the pump 10C, the orifice 151 becomes the discharge port. At this time, the diaphragm valve 13C abuts against the surface of the flow path forming member 15, thereby suppressing fluid leakage from the central region towards the outer end side.

[0162] (Central region: relatively low pressure; outer region: relatively high pressure)

[0163] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 moves away from the flow path forming component 15, then as Figure 10 As shown in (B), the central region of the pump chamber 101, which is located closer to the center than the position of the diaphragm valve 13C, has a lower pressure (relatively lower pressure) than the outer edge region of the pump chamber 101.

[0164] In this case, such as Figure 10 As shown in (B), the region on the inner end side (the region on the free end side) of the diaphragm valve 13C bends towards the vibrating plate 11 and abuts against the surface of the vibrating plate 11. Thus, the central region of the pump chamber 101 communicates with the outer edge region. Therefore, fluid is drawn from the gap 114 through the outer edge region towards the central region. At this time, the diaphragm valve 13C abuts against the surface of the vibrating plate 11, therefore, it does not obstruct fluid transport and does not cause a decrease in flow rate.

[0165] Thus, compared to pump 10, pump 10C has a structure in which the suction port and discharge port are configured oppositely.

[0166] Furthermore, by using the structure of pump 10C, leakage of fluid through the outer edge region, i.e., gap 114, during fluid discharge can be suppressed. Also, when fluid is being transported from the outer edge region to the central region, i.e., when fluid is drawn in through gap 114, diaphragm valve 13C does not obstruct fluid transport. Thus, the pump performance of pump 10C is improved.

[0167] Next, the pump according to the fifth embodiment of the present invention will be described with reference to the figures. Figure 11 This is an exploded perspective view of the pump 10D according to the fifth embodiment of the present invention.

[0168] Compared to the pump 10 involved in the first embodiment, such as Figure 11As shown, the pump 10D according to the fifth embodiment differs in the shape of the vibrating plate 11D and the shape of the piezoelectric element 12D. The other structures of the pump 10D are the same as those of the pump 10, and the description of the same parts is omitted.

[0169] like Figure 11 As shown, the thin portion 111D of the vibrating plate 11D is rectangular. Additionally, the piezoelectric element 12D is rectangular.

[0170] Even with this structure, Pump 10D can achieve the same effect as Pump 10.

[0171] Next, the pump according to the sixth embodiment of the present invention will be described with reference to the figures. Figure 12 This is a cross-sectional view showing the structure of the pump 10E according to the sixth embodiment of the present invention.

[0172] Compared to the pump 10 involved in the first embodiment, such as Figure 12 As shown, the pump 10E according to the sixth embodiment differs in that it has an additional diaphragm valve 131 and a connecting member 141. The other structures of the pump 10E are the same as those of the pump 10, and the description of the same parts is omitted.

[0173] Pump 10E includes a diaphragm valve 131 and a coupling component 141.

[0174] The diaphragm valve 131 is positioned closer to the center than the diaphragm valve 13 when viewed from above. The diaphragm valve 131 is circular and has a through hole in the center.

[0175] With the through hole and the hole 151 overlapping, the diaphragm valve 131 engages with the flow path forming member 15 via the engaging member 141. At this time, a portion of the diaphragm valve 131 of a predetermined width abutting the through hole engages with the flow path forming member 15 via the engaging member 141, while the outer end region does not engage with the flow path forming member 15. Thus, the diaphragm valve 131 engages with the flow path forming member 15 in a state where a predetermined area on the outer end side can vibrate. The diaphragm valve 131 corresponds to the "second diaphragm valve" of the present invention.

[0176] Thus, in pump 10E, in diaphragm valve 13 and diaphragm valve 131, the fixed end (the end fixed by the engaging member) and the free end (the end not fixed by the engaging member) have the same positional relationship in the direction connecting the center and the outer edge.

[0177] In this configuration, the diaphragm valve 13 performs the actions (movements) shown below. Figure 13 (A) and Figure 13 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve. Furthermore, in Figure 13 (A) Figure 13In (B), the displacement diagram of the vibrating plate 11 is omitted.

[0178] (Central region: relatively high pressure; outer region: relatively low pressure)

[0179] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 is close to the flow path forming component 15, then as Figure 13 As shown in (A), the central region of the pump chamber 101, which is closer to the center of the diaphragm valve 13, has a higher pressure (relatively high pressure) than the outer edge region of the pump chamber 101.

[0180] In this case, such as Figure 13 As shown in (A), the region on the outer edge of the diaphragm valve 13 (the region on the free end side) bends towards the vibrating plate 11 and abuts against the surface of the vibrating plate 11. Thus, the central region of the pump chamber 101 communicates with the outer edge region, and the fluid accumulated in the central region is transported to the outer edge region and discharged through the gap 114. At this time, the diaphragm valve 13 abuts against the surface of the vibrating plate 11, therefore it does not obstruct the flow of fluid and does not cause a decrease in flow rate.

[0181] And, as Figure 13 As shown in (A), the region on the outer edge side (the region on the free end side) of the diaphragm valve 131 bends towards the vibrating plate 11 and abuts against the surface of the vibrating plate 11. This separates the central region of the pump chamber 101 from the orifice 151, thus preventing fluid accumulated in the central region from leaking through the orifice 151. Consequently, fluid can be discharged more efficiently.

[0182] (Central region: relatively low pressure; outer region: relatively high pressure)

[0183] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 moves away from the flow path forming component 15, then as Figure 13 As shown in (B), the central region of the pump chamber 101, which is closer to the center of the diaphragm valve 13, has a lower pressure (relatively low pressure) than the outer edge region of the pump chamber 101.

[0184] In this case, such as Figure 13 As shown in (B), the region on the outer edge side (the region on the free end side) of the diaphragm valve 13 bends toward the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region of the pump chamber 101 is separated from the outer edge region. Therefore, reverse flow of fluid from the outer edge side toward the central region is suppressed.

[0185] In addition, such as Figure 13As shown in (B), the region on the outer edge side (the region on the free end side) of the diaphragm valve 131 bends towards the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region of the pump chamber 101 communicates with the orifice 151, and fluid is drawn into the central region from the orifice 151. In this way, the diaphragm valve 131 does not obstruct the drawing of fluid from the orifice 151.

[0186] Next, the pump according to the seventh embodiment of the present invention will be described with reference to the figures. Figure 14 This is a cross-sectional view showing the structure of the pump 10F according to the seventh embodiment of the present invention.

[0187] Compared to the pump 10C involved in the fourth embodiment, such as Figure 14 As shown, the pump 10F according to the seventh embodiment differs in that it has an additional diaphragm valve 131C and a connecting member 141C. The other structures of the pump 10F are the same as those of the pump 10C, and descriptions of the same parts are omitted.

[0188] Pump 10F includes: diaphragm valve 131C and engagement component 141C.

[0189] The diaphragm valve 131C is positioned closer to the center than the diaphragm valve 13C when viewed from above. The diaphragm valve 131C is circular and has a through hole in the center.

[0190] With the through hole and the hole 151 overlapping, the diaphragm valve 131C engages with the flow path forming member 15 via the engaging member 141C. At this time, a portion of a predetermined width on the outer end side of the diaphragm valve 131C engages with the flow path forming member 15 via the engaging member 141C, while the region on the inner end side does not engage with the flow path forming member 15. Thus, the diaphragm valve 131C engages with the flow path forming member 15 in a state where a predetermined area on the inner end side can vibrate. The diaphragm valve 131C corresponds to the "fourth diaphragm valve" of the present invention.

[0191] Thus, in pump 10F, in diaphragm valve 13C and diaphragm valve 131C, the fixed end (the end fixed by the engaging member) and the free end (the end not fixed by the engaging member) have the same positional relationship in the direction connecting the center and the outer edge.

[0192] In this configuration, the diaphragm valve 13C performs the actions (movements) shown below. Figure 15 (A) and Figure 15 (B) is an enlarged cross-sectional view showing the operation of the diaphragm valve. Furthermore, in Figure 15 (A) Figure 15 In (B), the displacement diagram of the vibrating plate 11 is omitted.

[0193] (Central region: relatively high pressure; outer region: relatively low pressure)

[0194] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 is close to the flow path forming component 15, then as Figure 15 As shown in (A), the central region of the pump chamber 101, which is located closer to the center than the position of the diaphragm valve 13C, has a higher pressure (relatively high pressure) than the outer edge region of the pump chamber 101.

[0195] In this case, such as Figure 15 As shown in (A), the region on the inner end side (the region on the free end side) of the diaphragm valve 13C bends towards the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region and the outer edge region of the pump chamber 101 are separated, and the fluid accumulated in the central region is discharged through the orifice 151. That is, in the pump 10C, the orifice 151 becomes the discharge port. At this time, the diaphragm valve 13C abuts against the surface of the flow path forming member 15, thereby suppressing fluid leakage from the central region towards the outer end side.

[0196] And, as Figure 15 As shown in (A), the region on the inner end side (the region on the free end side) of the diaphragm valve 131C bends towards the flow path forming member 15 and abuts against the surface of the flow path forming member 15. Thus, the central region of the pump chamber 101 communicates with the orifice 151, and the fluid accumulated in the central region is discharged from the orifice 151. At this time, the diaphragm valve 131C abuts against the surface of the flow path forming member 15, therefore it does not obstruct the discharge of fluid and does not cause a decrease in flow rate.

[0197] (Central region: relatively low pressure; outer region: relatively high pressure)

[0198] If the vibrating plate 11 is displaced, and the center of the vibrating plate 11 moves away from the flow path forming component 15, then as Figure 15 As shown in (B), the central region of the pump chamber 101, which is located closer to the center than the position of the diaphragm valve 13C, has a lower pressure (relatively lower pressure) than the outer edge region of the pump chamber 101.

[0199] In this case, such as Figure 15 As shown in (B), the region on the inner end side (the region on the free end side) of the diaphragm valve 13C bends towards the vibrating plate 11 and abuts against the surface of the vibrating plate 11. Thus, the central region of the pump chamber 101 communicates with the outer edge region. Therefore, fluid is drawn from the gap 114 through the outer edge region towards the central region. At this time, the diaphragm valve 13C abuts against the surface of the vibrating plate 11, thus not obstructing fluid delivery and not causing a decrease in flow rate.

[0200] And, as Figure 15As shown in (B), the region on the inner end side (the region on the free end side) of the diaphragm valve 131C bends toward the vibrating plate 11 and abuts against the surface of the vibrating plate 11. As a result, the central region of the pump chamber 101 is separated from the orifice 151, inhibiting the reverse flow of fluid from the orifice 151 toward the central region.

[0201] Next, the pump according to the eighth embodiment of the present invention will be described with reference to the figures. Figure 16 This is a cross-sectional view showing the structure of the pump 10G according to the eighth embodiment of the present invention. Furthermore, in Figure 16 In this document, only the minimum required structure for a pump is described, omitting descriptions of other parts.

[0202] Compared to the pump 10 involved in the first embodiment, such as Figure 16 As shown, the pump 10G according to the eighth embodiment differs in the vibrating plate 11G, the diaphragm valve 13G, and the connecting member 14G. The other structures of the pump 10G are the same as those of the pump 10, and the description of the same parts is omitted.

[0203] like Figure 16 As shown, the pump 10G has a wall 116 on one main surface of the vibrating plate 11G. The wall 116 is a shape that protrudes from one main surface of the vibrating plate 11G to the side of the flow path forming member 15 (pump chamber 101 side), and is annular in plan view.

[0204] In the view of the pump 10G from above, the area enclosed by the wall 116 overlaps with the hole 151 of the flow path forming component 15.

[0205] The diaphragm valve 13G is circular when viewed from above. The central portion of the diaphragm valve 13G is disposed in a central opening formed by the wall 116. Moreover, the central portion of the diaphragm valve 13G is engaged with a main surface of the vibrating plate 11G via a coupling member 14G.

[0206] According to this structure, the diaphragm valve 13G is fixed to the vibrating plate 11G, and the area on the outer end side is deformable. Therefore, the pump 10G can perform the same function as the pump 10 according to the first embodiment.

[0207] Next, the pump according to the ninth embodiment of the present invention will be described with reference to the figures. Figure 17 This is a cross-sectional view showing the structure of the pump 10H according to the ninth embodiment of the present invention. Furthermore, in Figure 17 In this context, only the minimum required structure for a pump is described, while other parts are omitted.

[0208] Compared to the pump 10C involved in the fourth embodiment, such as Figure 17As shown, the pump 10H according to the ninth embodiment differs in the configuration of the diaphragm valve 13H toward the vibrating plate 11H and the shape of the flow path forming member 15H. The other structures of the pump 10H are the same as those of the pump 10, and the description of the same parts is omitted.

[0209] Pump 10H includes: a vibrating plate 11H, a piezoelectric element 12, a diaphragm valve 13H, a connecting part 14H, a flow path forming part 15H, and a side wall part 18.

[0210] Figure 18 This is a top view of the vibrating plate 11H of the pump 10H according to the ninth embodiment. Figure 18 As shown, the vibrating plate 11H is a circular plate in plan view. The vibrating plate 11H has a constant thickness. A support plate 113 is disposed on the outer periphery of the vibrating plate 11H and away from it. The support plate 113 is, for example, square in plan view. The vibrating plate 11H and the support plate 113 are connected by a plurality of support members 115. The support members 115 have a first beam portion 1151, a second beam portion 1152, and a third beam portion 1153. The first beam portion 1151 is connected to the outer edge of the vibrating plate 11H but not to the support plate 113. The second beam portion 1152 is connected to the support plate 113 but not to the outer edge of the vibrating plate 11H. Two second beam portions 1152 are disposed with a gap between the first beam portion 1151 in the direction along the outer edge of the vibrating plate 11H. The third beam portion 1153 is a shape that extends in the direction along the outer edge of the vibrating plate 11H and connects the first beam portion 1151 to the two second beam portions 1152. Thus, the support member 115 is a beam that supports the vibrating plate 11H relative to the support plate 113. Three support members 115 are formed, and they are arranged separately along the outer edge of the vibrating plate 11H. For example, in... Figure 18 In the example, the three support components 115 are configured to form an angle of 120° with the center of the vibrating plate 11H as the reference point.

[0211] Furthermore, the portion between the vibrating plate 11H and the support plate 113 that does not form a support member 115 is a gap 114.

[0212] As an example, the dimensions of each component are as follows. For the circular vibrating plate 11H, the thickness is 0.6 mm, and the diameter is... For the circular piezoelectric element 12, the thickness is 0.15 mm and the diameter is 10.6 mm. The boundary between the area where the vibrating plate 11H and the diaphragm valve 13H meet and the deformable area is located 7.0 mm from the center of the pump chamber 101. The vibrating plate 11H vibrates at a frequency of 26.8 kHz. Alternatively, the thickness of the vibrating plate 11H is 0.7 mm, and it vibrates at a frequency of 30.6 kHz without changing other dimensions.

[0213] According to this structure, the support member 115 has higher flexibility compared to the vibrating plate 11H. Therefore, the force constraining the vibrating plate 11H by the support member 115 is weaker. Therefore, the vibrating plate 11H can vibrate with a larger displacement. Moreover, according to this structure, the vibrating plate 11H has antinodes in the center and nodes at the midpoint from the center to the outer edge, enabling resonance vibration represented by a first-type Bessel function with antinodes at or near the outer edge. Here, the portion consisting of the vibrating plate 11H, the support plate 113, and the support member 115 corresponds to the "flat plate component" of the present invention, and the gap 114 corresponds to the "third vent" of the present invention.

[0214] The piezoelectric element 12 is disposed on one of the main surfaces of the vibrating plate 11H.

[0215] The diaphragm valve 13H is made of a flexible material. The diaphragm valve 13H is annular. The diaphragm valve 13H is disposed near the outer edge of the vibrating plate 11H. Furthermore, the diaphragm valve 13H only needs to be disposed at a position closer to the outer edge of the vibration node of the vibrating plate 11H, preferably near the antinode of the outer edge. This diaphragm valve 13H corresponds to the "fifth diaphragm valve" of the present invention.

[0216] The diaphragm valve 13H engages with the vibrating plate 11H via the annular engagement member 14H. At this time, the engagement of the diaphragm valve 13H enables the central region to deform.

[0217] The flow path forming component 15H is a plate-shaped component. The flow path forming component 15H has an annular protrusion 152. In top view, at least a portion of the annular protrusion 152 overlaps with the diaphragm valve 13H. The center of the protrusion 152 is substantially aligned with the center of the diaphragm valve 13H.

[0218] The flow path forming component 15H is configured such that the forming surface of the protrusion 152 is opposite to the vibrating plate 11H.

[0219] The flow path forming component 15H has a plurality of holes 151H. The plurality of holes 151H extend through the flow path forming component 15H in the thickness direction. The plurality of holes 151H are arranged circumferentially and are separated from each other. Preferably, the plurality of holes 151H overlap with the nodes of the vibration of the vibrating plate 11H. These plurality of holes 151H correspond to the "fourth vent" of the present invention.

[0220] The sidewall component 18 is cylindrical and has high rigidity. The sidewall component 18 is connected to the support plate 113 and the flow path forming component 15H.

[0221] According to this structure, the pump 10H has a pump chamber 101 consisting of a hollow region surrounded by a vibrating plate 11H, a support plate 113, a flow path forming member 15H, and a sidewall member 18. Furthermore, a diaphragm valve 13H is disposed within this pump chamber 101. Additionally, the pump chamber 101 communicates with the orifice 151H and with the gap 114.

[0222] Pump 10H, constructed with such a structure Figure 19 (A) Figure 19 As shown in (B), the fluid is repeatedly drawn in and expelled. Figure 19 (A) is a side sectional view showing the state of pump 10H when the fluid is being discharged. Figure 19 (B) is a side sectional view showing the state of pump 10H when fluid is being drawn in.

[0223] As described above, the vibrating plate 11H generates vibrations represented by a Bessel function of the first kind. Therefore, in terms of the volume change of the pump chamber 101 caused by the vibration of the vibrating plate 11H, the outer region is larger than the central region. That is, the volume change on the outer side is larger than the volume change in the region inside the vibration node.

[0224] Therefore, as Figure 19 As shown in (A), when the antinodes at the center of the vibrating plate 11H are far from the flow path forming member 15H, and the antinodes on the outer edge are close to the flow path forming member 15H, the volume of the pump chamber 101 decreases and becomes positive pressure. Therefore, the fluid in the pump chamber 101 is discharged from the orifice 151H. At this time, the diaphragm valve 13H, which is arranged near the antinodes on the outer edge, abuts against the surface of the protrusion 152 of the flow path forming member 15H. Therefore, it is possible to suppress the backflow of fluid in the pump chamber 101 to the gap 114 on the outer edge.

[0225] On the other hand, such as Figure 19 As shown in (B), when the antinodes at the center of the vibrating plate 11H are close to the flow path forming member 15H, and the antinodes on the outer edge are far away from the flow path forming member 15H, the volume of the pump chamber 101 expands and becomes negative pressure. Therefore, fluid flows into the pump chamber 101 from the gap 114. At this time, the distance between the flow path forming member 15H and the vibrating plate 11H also increases, thereby increasing the flow path and causing the diaphragm valve 13H to move significantly away from the flow path forming member 15H. This suppresses the decrease in the flow rate of the fluid flowing in from the gap 114.

[0226] Furthermore, in pump 10H, the nodes of the vibration (pressure variation) of the multiple orifices 151H overlap with those of the vibrating plate 11H. Therefore, the pressure difference between the inside and outside of pump chamber 101 is small. Consequently, the flow rate of fluid flowing into pump chamber 101 from gap 114 is approximately equal to the flow rate of fluid discharging from orifice 151H, thus suppressing backflow caused by orifice 151H without the need for a check valve.

[0227] In addition, in pump 10H, when viewed from above, the protrusion 152 overlaps with the diaphragm valve 13H, thus shortening the distance between the diaphragm valve 13H and the protrusion 152 when stationary, and enabling rapid sealing of the flow path obtained by the diaphragm valve 13H.

[0228] Next, the pump according to the tenth embodiment of the present invention will be described with reference to the figures. Figure 20 This is a cross-sectional view showing the structure of the pump 10I according to the tenth embodiment of the present invention. Furthermore, in Figure 20 In this document, only the minimum required structure for a pump is described, omitting descriptions of other parts.

[0229] Compared to the pump 10H according to the ninth embodiment, such as Figure 20 As shown, the pump 10I according to the tenth embodiment differs in the structure of the orifice 151I and the check valve 30. Furthermore, the vibrating plate 11I is the same as the vibrating plate 11H, the diaphragm valve 13I is the same as the diaphragm valve 13H, and the connecting member 14I is the same as the connecting member 14H. Additionally, the flow path forming member 15I is the same as the flow path forming member 15H, except that it has the orifice 151I and does not have the orifice 151H.

[0230] Pump 10I includes a flow path forming member 15I. The flow path forming member 15I has a hole 151I. The hole 151I passes through the flow path forming member 15I in the thickness direction and is disposed at the center of the flow path forming member 15I.

[0231] The check valve 30 is disposed in the orifice 151I, allowing fluid to flow from the pump chamber 101 to the outside and preventing fluid from flowing from the outside to the pump chamber 101.

[0232] Even with this structure, pump 10I can achieve the same effect as pump 10H.

[0233] Next, the pump according to the eleventh embodiment of the present invention will be described with reference to the figures. Figure 21 This is a cross-sectional view showing the structure of the pump 10J according to the eleventh embodiment of the present invention. Furthermore, in Figure 21 In this document, only the minimum required structure for a pump is described, omitting descriptions of other parts.

[0234] Compared to the pump 10H according to the ninth embodiment, such as Figure 21As shown, the pump 10J according to the eleventh embodiment differs in the formation position of the hole 151J in the flow path forming member 15J, the support member 115J, and the hole 117J. Furthermore, the diaphragm valve 13J is the same as the diaphragm valve 13H, and the connecting member 14J is the same as the connecting member 14H. In addition, except that it has the hole 151J but not the hole 151H, the flow path forming member 15J is the same as the flow path forming member 15H.

[0235] The vibrating plate 11J has a plurality of holes 117J. The plurality of holes 117J penetrate the vibrating plate 11J in the thickness direction. The plurality of holes 117J are arranged circumferentially and are separated from each other. Preferably, the plurality of holes 117J overlap with the nodes of the vibration of the vibrating plate 11J. The plurality of holes 117J correspond to the "third vent" of the present invention.

[0236] The support component 115J is formed mainly from resin films such as polyimide, liquid crystal polymer, and PET, and is elastic and has no voids.

[0237] Using such a material, the support member 115J has a lower modulus of elasticity, and therefore is more flexible than the vibrating plate 11J. Consequently, the force constrained by the support member 115J to the vibrating plate 11J is weaker, allowing the vibrating plate 11J to vibrate with a larger displacement.

[0238] The flow path forming component 15J has a plurality of holes 151J. The plurality of holes 151J are arranged circumferentially and are separated from each other. The plurality of holes 151J are located on the outer edge side of the protrusion 152. These plurality of holes 151J correspond to the "fourth vent" of the present invention.

[0239] Even with this structure, pump 10J can achieve the same effect as pump 10H.

[0240] Furthermore, in the eleventh embodiment, even if the support member 115J is made of the same material as the vibrating plate 11J, as long as its thickness is thinner than that of the vibrating plate 11J, the flexibility of the support member 115J is higher than that of the vibrating plate 11J, and thus it can achieve the same effect.

[0241] Furthermore, in embodiments nine through eleven, the fifth diaphragm valves 13H, 13I, and 13J are configured to suppress the discharge of fluid from the central region of the pump chamber towards the outer edge region, while drawing fluid from the outer edge region towards the central region. However, conversely, they may also be configured to suppress the drawing of fluid from the outer edge region of the pump chamber towards the central region, while discharging fluid from the central region towards the outer edge region. In this case, the diaphragm valves open / close the flow path by contacting or separating from the fluid passing through the inside and outside of the diaphragm valves.

[0242] Next, the pump 10J1 according to the first modified example of the eleventh embodiment of the present invention will be described with reference to the figures. Figure 22This is a cross-sectional view showing the structure of the pump 10J1 according to the first modified example of the eleventh embodiment of the present invention. Furthermore, in Figure 22 In this document, only the minimum required structure for a pump is described, omitting descriptions of other parts.

[0243] like Figure 22 As shown, holes 117J are formed in the flow path forming member 15J. Preferably, the plurality of holes 117J overlap with the nodes of the vibration of the vibrating plate 11J. However, holes 117J may also be formed near the center of the flow path forming member 15J.

[0244] Additionally, a structure in which multiple holes 117J are formed in the flow path forming component 15J is shown, but it is also possible to form only one hole.

[0245] exist Figure 22 In the structure, holes 117J and 151J are formed on the same surface. That is, a complex mechanism is needed to shield pump J1. However, by possessing... Figure 22 The structure shown serves to interact with Figure 21 The pump 10J shown has the same effect.

[0246] Next, the pump 10J2 according to the second modification of the eleventh embodiment of the present invention will be described with reference to the figures. Figure 23 This is a cross-sectional view showing the structure of the pump 10J2 according to the second variation of the eleventh embodiment of the present invention. Figure 24 This is an enlarged cross-sectional view showing the joint of the support member, piezoelectric element, and vibrating plate according to the second modification of the eleventh embodiment of the present invention. Furthermore, in Figure 23 In this document, only the minimum required structure for a pump is described, omitting descriptions of other parts.

[0247] like Figure 23 As shown, the hole 117J can also be formed in the flow path forming member 15J, and the support member 115J can have a structure that allows it to conduct towards the piezoelectric element 12. Even with this structure, it functions similarly to... Figure 21 The same effect.

[0248] Figure 24 It is for public use Figure 23 Enlarged cross-sectional view of the joint between the support components and piezoelectric elements and the vibrating plate in the structure.

[0249] The support member 115JA is composed of an insulating substrate 1501, a conductor pattern 1502, and a conductor pattern 1503. The conductor pattern 1502 is formed on one main surface of the substrate 1501, and the conductor pattern 1503 is formed on the other main surface of the substrate 1501. Furthermore, the conductor patterns 1502 and 1503 can be of any shape as long as they are mutually insulated. For example, they can cover the entire surface of the substrate 1501, or they can be a structure that partially exposes the substrate 1501.

[0250] The piezoelectric element 12 comprises a piezoelectric body 12P, a driving electrode 12D1, and a driving electrode 12D2. The driving electrode 12D1 is mainly formed on one main surface of the piezoelectric body 12P, and partially extends to another main surface via the side surface of the piezoelectric body 12P. The driving electrode 12D2 is formed on the other main surface of the piezoelectric body 12P and is separate from the driving electrode 12D1.

[0251] Conductor pattern 1502 abuts and connects to drive electrode 12D1 formed on another main surface of piezoelectric body 12P. Conductor pattern 1503 abuts to conductive vibrating plate 11J and is connected to drive electrode 12D2 of piezoelectric element 12 via vibrating plate 11J.

[0252] Furthermore, in the above embodiments, a diaphragm valve using a single flat diaphragm is shown, but the diaphragm valve can also be... Figure 25 The structure shown.

[0253] Figure 25 This is a perspective view illustrating one example of a derivative of a diaphragm valve. For example... Figure 25 As shown, the diaphragm valve 13 is annular and has multiple slits SL. The multiple slits SL are shaped to extend radially along the diaphragm valve 13. The multiple slits SL reach the outer end of the diaphragm valve 13, but do not reach the inner end of the diaphragm valve 13. Even with this structure, it is possible to use it in a pump with the aforementioned inner end side fixed.

[0254] Furthermore, for pumps with the outer end fixed, the diagram is omitted, but it is preferable that the multiple slits SL reach the inner end of the diaphragm valve 13 but not the outer end of the diaphragm valve 13.

[0255] Alternatively, the diaphragm valve 13 may be configured such that multiple fan-shaped diaphragms are partially overlapped and arranged around the entire circumference.

[0256] (Modified Example)

[0257] Figure 26This is a cross-sectional view showing the structure of the pump 10K according to a modified example of the first embodiment of the present invention. It differs from the pump 10 according to the first embodiment in that it is coated with the coating agent 300. The other structures of the pump 10K are the same as those of the pump 10, and descriptions of identical parts are omitted.

[0258] like Figure 26 As shown, the coating agent 300 is applied to the area opposite the movable area of ​​the diaphragm valve 13. More specifically, the coating agent 300 is applied to a main surface of the flow path forming member 15 and a main surface of the thin portion 111 in the vibrating plate 11, and opposite the movable area of ​​the diaphragm valve 13.

[0259] This configuration suppresses damage caused by contact between the diaphragm valve 13 and the thin portion 111 of the flow path forming component 15 and the vibrating plate 11.

[0260] Furthermore, the main component of the coating agent 300 can be a resin with a Young's modulus lower than that of the flow path forming component 15 or the thin portion 111 in the vibrating plate 11, such as silicone rubber or PTFE. The lower Young's modulus of these coating agents mitigates the impact when the diaphragm valve contacts the flow path forming component 15 or the thin portion 111 in the vibrating plate 11, thus suppressing damage to the diaphragm valve 13.

[0261] Furthermore, the coating agent 300 is preferably composed mainly of fluorine or molybdenum disulfide. The surface of these coating agents is lubricating, thus also suppressing damage caused by friction between the diaphragm valve 13 and the flow path forming component 15 and the thin portion 111 in the vibrating plate 11.

[0262] Furthermore, the same effect can be achieved when the coating agent 300 is applied to either the flow path forming component 15 or the thin portion 111 in the vibrating plate 11.

[0263] Furthermore, the configurations of the above-described embodiments can be appropriately combined, and can achieve the effects corresponding to their respective combinations.

[0264] Explanation of reference numerals in the attached figures

[0265] 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10I, 10J, 10K… Pumps; 11, 11A, 11D, 11G, 11H, 11I, 11J… Plate-shaped components; 12, 12D… Piezoelectric elements; 12P… Piezoelectric bodies; 13, 13A, 13B, 13C, 13G, 13H, 13I, 13J… Diaphragm valves; 14, 14A, 14C, 14G, 14H, 14I, 14J… Connecting components; 15, 15H, 15I, 15J, 16… Flow path forming components; 17… Housing components; 18… Sidewall components; 20… Valves; 21… First housing components; 22… Second housing components; 23… Diaphragm plates; 24… …Jointing membrane; 25…Reinforcing membrane; 26…Adhesive component; 27…Connecting component; 101…Pump chamber; 111, 111D…Thin section; 112…Thick section; 113…Support plate; 114…Gap; 115, 115J…Support component; 117J…Hole; 131, 131C…Membrane valve; 141, 141C…Jointing component; 151, 151H, 151I, 151J…Hole; 161…Opening; 171…Hole; 201…Inlet; 202…Outlet; 203…Outlet; 300…Coating agent; 1151…First beam; 1152…Second beam; 1153…Third beam; 1501…Substrate; 1502, 1503…Conductor pattern; SL…Slit.

Claims

1. A pump characterized by comprising: a plate-shaped member provided with a vibrating plate having a piezoelectric element arranged on one main surface, a support plate, and a plurality of support members linking the vibrating plate and the support plate and supporting the vibrating plate so as to be able to vibrate in the direction of the main surface, and provided with a first vent hole between the plurality of support members; a flow path forming member arranged opposite to the plate-shaped member and having a second vent hole in a region opposite to the plate-shaped member; a pump chamber formed by the plate-shaped member, the flow path forming member, and a side wall member connected to the plate-shaped member and the flow path forming member, and having a central region communicating with the second vent hole and an outer edge region communicating with the first vent hole; and a first diaphragm valve arranged in the pump chamber, the vibrating plate is able to vibrate, in plan view, the central region of the vibrating plate has a thick portion thicker than the radial outer end of the vibrating plate from the one main surface to the other main surface, when the pressure in the central region is lower than the pressure in the outer edge region, the first diaphragm valve abuts against the flow path forming member, the first diaphragm valve is a flexible diaphragm valve, the first diaphragm valve is circular and is fixed to the vibrating plate by engaging a region of a prescribed area on the central region side with the surface of the thick portion.

2. The pump according to claim 1, characterized by in plan view, the first diaphragm valve is arranged at a position such that the second vent hole is in a region surrounded by the outer end of the first diaphragm valve.

3. The pump according to claim 1 or 2, characterized by in plan view, a second diaphragm valve is arranged on the periphery of the second vent hole at a position closer to the second vent hole than the arrangement position of the first diaphragm valve, when the pressure in the central region in the pump chamber is higher than the pressure in the outer edge region, the second diaphragm valve abuts against the vibrating plate and the flow path forming member.

4. The pump according to claim 3, characterized by the second diaphragm valve is fixed to the flow path forming member and a region on the outer end side is able to deform.

5. The pump according to claim 1, characterized by a coating agent is applied to a region of the flow path forming member or the vibrating plate opposite to the movable region of the first diaphragm valve.

6. The pump according to claim 5, characterized by the Young's modulus of the coating agent is lower than the Young's modulus of the flow path forming member and the vibrating plate.

7. The pump according to claim 1 or 2, characterized by the first diaphragm valve is formed so as to be able to maintain abutment between the outer end portion of the first diaphragm valve and the flow path forming member when the plate-shaped member vibrates.

8. A pump characterized by comprising: a plate-shaped member provided with a vibrating plate having a piezoelectric element arranged on one main surface, a support plate, and a plurality of support members linking the vibrating plate and the support plate and supporting the vibrating plate so as to be able to vibrate in the direction of the main surface, and provided with a first vent hole between the plurality of support members; a flow path forming member arranged opposite to the plate-shaped member and having a second vent hole in a region opposite to the plate-shaped member; ​ ​ a pump chamber formed by the plate-shaped member, the flow path forming member, and a side wall member connected to the plate-shaped member and the flow path forming member, and having a central region communicating with the second vent hole and an outer edge region communicating with the first vent hole; and a third diaphragm valve disposed in the pump chamber, the vibration plate is capable of vibrating, when the pressure in the central region is higher than the pressure in the outer edge region, the third diaphragm valve abuts against the vibration plate and the flow path forming member, the third diaphragm valve is a flexible diaphragm valve, the third diaphragm valve is fixed to the vibration plate in a manner that enables deformation of a central region thereof, in plan view, the central region of the vibration plate has a thick portion having a thickness from one main surface to the other main surface that is greater than the thickness of an outer end of the vibration plate, the third diaphragm valve is ring-shaped, an inner end of the ring-shaped third diaphragm valve is disposed along an outer edge of the thick portion.

9. The pump according to claim 8, wherein in plan view, the third diaphragm valve is disposed at a position at which the second vent hole is within a region surrounded by an outer end of the third diaphragm valve.

10. The pump according to claim 8 or 9, wherein in plan view, a fourth diaphragm valve is disposed at a position closer to the second vent hole than the position at which the third diaphragm valve is disposed, on a peripheral edge of the second vent hole, when the pressure in the central region in the pump chamber is lower than the pressure in the outer edge region, the fourth diaphragm valve abuts against the vibration plate and the flow path forming member.

11. The pump according to claim 10, wherein the fourth diaphragm valve is fixed to the flow path forming member in a manner that enables deformation of a central region thereof.

12. The pump according to claim 8 or 9, wherein the third diaphragm valve is formed in a manner that enables maintenance of abutment between a radially inner end of the third diaphragm valve and the flow path forming member when the plate-shaped member vibrates.

13. A pump comprising: a flat plate-shaped member including a vibration plate having a piezoelectric element disposed on one main surface, a support plate, and a support member linking an outer edge of the vibration plate and the support plate and supporting the vibration plate so as to be capable of vibrating in a direction of the main surface; a flow path forming member disposed opposite the flat plate-shaped member; a pump chamber formed by the flat plate-shaped member, the flow path forming member, and a side wall member connected to the flat plate-shaped member and the flow path forming member; a fifth diaphragm valve fixed to the vibration plate of the flat plate-shaped member in a manner that enables deformation of a central region thereof and disposed at a position overlapping the vibration plate in the pump chamber in plan view; a third vent hole formed in the flat plate-shaped member; and a fourth vent hole formed in the flow path forming member, the vibration plate is capable of vibrating, in plan view, the third vent hole and the fourth vent hole are disposed at positions across the fifth diaphragm valve, in correspondence with vibration of the vibration plate, the fifth diaphragm valve changes a flow path resistance between the third vent hole and the fourth vent hole, the fifth diaphragm valve is a flexible diaphragm valve, ​ ​ The diaphragm has a protruding portion protruding toward the flow path forming member at a position overlapping the fifth thin film valve in plan view.

14. The pump according to claim 13, wherein The flow path forming member has a protruding portion protruding toward the diaphragm at a position overlapping the fifth thin film valve in plan view.

15. The pump according to claim 13 or 14, wherein The third vent hole is formed in the flat plate-shaped member at a position further outward than the position where the fifth thin film valve is arranged in plan view, The fourth vent hole is formed in the flow path forming member at a position further inward than the position overlapping the fifth thin film valve in plan view.

16. The pump according to claim 15, wherein The fourth vent hole overlaps a node of the vibration of the diaphragm.

17. The pump according to claim 13 or 14, wherein The fourth vent hole has a check valve overlapping the central antinode of the diaphragm and preventing backflow from the outside toward the pump chamber.

18. The pump according to claim 13 or 14, wherein The support member is formed of a material or shape having higher flexibility than the diaphragm.

19. The pump according to claim 13 or 14, wherein The support member has a shape of a beam along the outer edge of the diaphragm.

20. The pump according to claim 13, wherein The third vent hole is formed by a gap between the support members.

21. The pump according to claim 13 or 14, wherein The third vent hole is formed in the diaphragm at a position further inward than the position overlapping the fifth thin film valve in plan view, The fourth vent hole is formed in the flow path forming member at a position overlapping the support member in plan view.

22. The pump according to claim 13 or 14, wherein The fifth thin film valve is formed so as to maintain contact between the radially inner end portion of the fifth thin film valve and the flow path forming member when the flat plate-shaped member vibrates.

Images