Microfluidic valve and microfluidic chip

Abstract

The application relates to the microfluidic technology field and provides a microfluidic valve, which comprises a mounting body, a containing groove arranged on the mounting body, independent first and second channels arranged on the mounting body and communicated with the containing groove, a piston, a ball and an elastic reset member. The piston is inserted and slidably arranged in the containing groove and is adjustably arranged along the depth direction of the containing groove. One end of the piston towards the bottom of the containing groove and the groove bottom of the containing groove form a transition cavity. The ball is arranged on the side of the piston towards the bottom of the containing groove and is clamped at the slot position of the mounting groove. The elastic reset member is arranged in the mounting groove, the transition cavity is communicated with the mounting groove, one end of the elastic reset member elastically reset abuts against the groove bottom of the mounting groove, and the other end abuts against the outer side of the ball away from the slot of the mounting groove. Based on this, the backflow during one-way flow can be prevented, and the effect of controlling bidirectional flow can be achieved.

Description

Technical Field

[0001] This application relates to the field of microfluidics, and in particular to a microfluidic valve and a microfluidic chip. Background Technology

[0002] Currently, microfluidics refers to the science and technology involved in systems that use microchannels to process or manipulate tiny fluids. Microfluidic technology can integrate basic operational units such as sample preparation, reaction, and separation in biochemical analysis processes onto a single chip, automating the analysis process. Therefore, in order to control the flow of fluids, valves need to be installed on the chip.

[0003] Regarding the aforementioned technologies, most existing valves only have the function of independently controlling unidirectional fluid flow and preventing backflow, or independently controlling bidirectional flow. They cannot simultaneously have the functions of preventing backflow during unidirectional flow and controlling bidirectional flow, thus limiting their applicability and requiring improvement. Summary of the Invention

[0004] To prevent backflow during unidirectional flow and to control bidirectional flow, this application provides a microfluidic valve.

[0005] Firstly, the microfluidic valve provided in this application adopts the following technical solution:

[0006] A microfluidic valve includes: a mounting body with a receiving groove and independent first and second channels, both communicating with the receiving groove; a piston inserted into and slidably disposed within the receiving groove, the piston being adjustable along the depth direction of the receiving groove, a transition cavity formed between the bottom end of the piston and the bottom of the receiving groove, the transition cavity communicating with the first and second channels; a ball bearing with a mounting groove on the side of the piston facing the bottom of the receiving groove, the ball bearing engaging with the groove opening and moving and resetting along the depth direction of the mounting groove, the ball bearing opening or sealing the connection between the first channel and the transition cavity during sliding; and an elastic reset member disposed within the mounting groove, the transition cavity communicating with the mounting groove, one end of the elastic reset member abutting the bottom of the mounting groove, and the other end abutting the outer side of the ball bearing away from the groove opening, the elastic reset member driving the ball bearing against the connection between the first channel and the transition cavity.

[0007] By adopting the above technical solution, when fluid enters from the first channel, the ball bearings are impacted by pressure, causing them to be lifted and the elastic reset member to be squeezed. This opens the connection between the first channel and the transition chamber, allowing the liquid to enter the transition chamber and then flow out from the second channel. When fluid enters from the second channel, the elastic reset member is not subjected to a reaction force from the fluid in the first channel, thus pushing the ball bearings against the opening of the first channel. When fluid enters the transition chamber from the second channel, the fluid fills the transition chamber and the mounting groove. At this time, the elastic reset member remains in a state of blocking the connection between the first channel and the transition chamber, preventing reverse flow and enabling the valve body to have a normal unidirectional flow anti-backflow function. When bidirectional flow control is required, the position of the sliding adjustment piston can be adjusted to move the ball bearings away from the connection between the first channel and the transition chamber, manually opening the connection. This allows for reverse fluid flow, achieving anti-backflow during unidirectional flow and controlling bidirectional flow.

[0008] Preferably, the ball is an elastic ball, and the piston is provided with a constricted portion on the periphery of the mounting groove. The maximum inner diameter of the constricted portion is smaller than the diameter of the ball, and the inner diameter of the constricted portion gradually increases towards the bottom of the mounting groove. The outer side of the ball portion is in contact with the inner wall of the constricted portion, and one side of the ball is located outside the constricted portion. The constricted portion is used to restrict the ball from detaching from the mounting groove.

[0009] By adopting the above technical solution, the ball is an elastic ball with a certain elastic deformation ability, which can be squeezed into the constriction section and then enter the mounting groove; and the constriction section can prevent the ball from detaching from the mounting groove.

[0010] Preferably, the piston has a connecting hole at a position corresponding to the inner wall of the transition cavity, and one end of the connecting hole communicates with the mounting slot.

[0011] By adopting the above technical solution and setting a connection hole, the connection between the transition cavity and the mounting groove can be achieved.

[0012] Preferably, the mounting body is provided with a drive assembly for adjusting the sliding movement of the piston.

[0013] By adopting the above technical solution, the drive assembly can slide and adjust the piston, thereby opening or sealing the connection between the first channel and the transition chamber.

[0014] Preferably, one end of the piston is located outside the receiving groove, and the driving assembly includes a handle connected to the end of the piston located outside the receiving groove and an elastic element with one end disposed on the outside of the mounting body, the other end of the elastic element being connected to the handle.

[0015] By adopting the above technical solution, when it is necessary to open the connection between the first channel and the transition cavity, the handle is pressed away from the piston by external force. The part of the handle that abuts against the mounting body slides closer to the piston. At this time, the elastic element is stretched. Therefore, by lever principle, the end of the handle that is engaged with the piston can pry up the piston, so that the ball leaves the connection and the connection is opened. When the external force on the handle is removed, the restoring force of the elastic element causes the part of the handle that abuts against the mounting body to slide away from the piston. The piston also continues to move to the bottom of the receiving groove, so that the ball continues to seal the connection. Moreover, the piston can be slid away from the receiving groove by lifting the handle directly.

[0016] Preferably, a slider is slidably disposed on one side of the receiving groove opening on the mounting body. The slider slides along a direction close to or away from the piston. The handle is rotatably connected to the slider near the center. The mounting body is provided with an adjustment component for positioning the slider's sliding position.

[0017] By adopting the above technical solution, when the handle is rotated by lever principle, it can drive the slider to slide. Since the elastic element has the tendency to drive the slider to slide away from the piston, by positioning the sliding position of the slider, the position of the piston can be kept fixed. This makes it easier to control the connection between the first channel and the transition chamber to always be in the open position, making it more convenient to use without having to manually press the handle. At the same time, by adjusting and controlling the position of the piston, the size of the connection can be adjusted, thereby controlling the flow rate.

[0018] Preferably, the outer wall of the mounting body is provided with a sliding groove along the radial direction of the receiving groove, the slider is slidably connected in the sliding groove, the adjusting component includes a screw threadedly connected to the mounting body, the screw is arranged along the length direction of the sliding groove and located on the side of the slider away from the piston, the screw slides and adjusts along the length direction of the sliding groove, and one end of the screw abuts against the side of the slider away from the piston.

[0019] By adopting the above technical solution, the slide can limit the sliding of the slider in the radial direction of the receiving groove. When the handle drives the piston to slide away from the receiving groove, the slider moves towards the outside of the piston. Then, the screw is rotated to adjust the position of the screw in the slide groove so that the end of the screw abuts against the side of the slider away from the piston. Since the elastic element has the tendency to drive the slider to slide away from the piston, it is only necessary to restrict the side of the slider away from the piston to adjust and position the slider.

[0020] Preferably, one end of the handle is provided with a through hole, and the end of the piston located outside the receiving groove is detachably provided with a locking member. The locking member passes through the through hole and restricts the handle from disengaging from the piston end. The outer diameter of the part of the locking member passing through the through hole is smaller than the inner diameter of the through hole.

[0021] By adopting the above technical solution, the locking component can pass through the perforation and restrict the handle from disengaging from the end of the piston, thereby achieving a detachable snap-fit ​​between the piston and the handle. Moreover, when the end of the handle away from the piston is subjected to force and drives the piston to slide, the handle will tilt. Since the outer diameter of the part of the locking component that passes through the perforation is smaller than the inner diameter of the perforation, the locking component will not interfere with the tilting of the handle.

[0022] Preferably, the inner wall of the transition cavity is provided with a spherical recess, which is located on the periphery of the communication opening between the first channel and the transition cavity. The spherical recess is adapted to the outer side of the ball, and the outer side of the ball outside the receiving groove is attached to the spherical recess.

[0023] By adopting the above technical solution, the spherical concave part is located on the periphery of the connection between the first channel and the transition cavity. When the ball presses against the connection, the outer side of the ball can fit against the spherical concave part, thereby improving the sealing stability of the connection.

[0024] Secondly, the microfluidic chip provided in this application adopts the following technical solution:

[0025] A microfluidic chip, comprising any of the microfluidic valves described above.

[0026] In summary, this application includes at least one of the following beneficial technical effects:

[0027] (1) By setting the cooperation between the mounting body, piston, ball and elastic reset component, the effect of controlling the reverse flow can be achieved while ensuring normal unidirectional flow;

[0028] (2) By setting the drive assembly including a handle and an elastic element, the piston can be slidably adjusted, thereby opening or sealing the connection between the first channel and the transition chamber;

[0029] (3) By setting adjustment components and sliders, the sliding position of the slider can be positioned, so there is no need to hold the handle all the time, which is convenient to operate; at the same time, the size of the connection between the first channel and the transition cavity can be adjusted to improve applicability. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the microfluidic valve in Embodiment 1;

[0031] Figure 2 yes Figure 1 Sectional view of AA;

[0032] Figure 3 This is a schematic diagram of the microfluidic valve in Embodiment 2;

[0033] Figure 4 yes Figure 3 BB section view.

[0034] Reference numerals: 1. Mounting body; 2. Piston; 3. Ball bearing; 4. Elastic return element; 5. Drive assembly; 51. Handle; 511. First horizontal part; 512. V-shaped part; 513. Second horizontal part; 52. Elastic element; 6. Receiving groove; 7. First channel; 8. Second channel; 9. First interface; 10. Second interface; 11. Transition cavity; 12. Sealing ring; 13. Mounting groove; 14. Spherical recess; 15. Narrowing part; 16. Connecting hole; 17. Through hole; 18. Locking element; 19. Adjusting assembly; 20. Slide groove; 21. Rotating block; 22. Slider. Detailed Implementation

[0035] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0036] Example 1

[0037] This application discloses a microfluidic valve. (Refer to...) Figure 1 and Figure 2 The two-way valve includes a mounting body 1, a piston 2, a ball 3, and an elastic reset element 4.

[0038] Mounting body 1 is a horizontally arranged rectangular block. Mounting body 1 can be a chip or a valve body. A receiving groove 6 is formed on the upper surface of mounting body 1. The receiving groove 6 is a cylindrical cavity. A first channel 7 is formed on the outer side of mounting body 1. The first channel 7 is vertically formed on the lower surface of mounting body 1 and is connected to the bottom of the receiving groove 6. A second channel 8 is formed on the outer periphery of mounting body 1. The second channel 8 is horizontally arranged and is also connected to the receiving groove 6. The first channel 7 and the second channel 8 are independent of each other.

[0039] Piston 2 is inserted into and slidably disposed within receiving groove 6, with one end of piston 2 located outside the opening of receiving groove 6. Piston 2 is adjustable along the depth direction of receiving groove 6. A sealed transition cavity 11 is formed between the end of piston 2 facing the bottom of receiving groove 6 and the bottom and peripheral wall of receiving groove 6. Both the first channel 7 and the second channel 8 are connected to the transition cavity 11. In this embodiment, the connection between the first channel 7 and the transition cavity 11 is the first interface 9, and the connection between the second channel 8 and the transition cavity 11 is the second interface 10. An O-ring seal 12 is fitted on the outer side of piston 2, and an annular groove is formed on the outer peripheral side of piston 2. The seal 12 is fitted into the groove, and the outer side of the seal 12 is pressed against the inner wall of receiving groove 6 and the outer side of piston 2 to achieve a seal between piston 2 and the inner wall of receiving groove 6.

[0040] A mounting groove 13 is vertically formed on the side of piston 2 facing the bottom of receiving groove 6. The mounting groove 13 is a cylindrical cavity, and the axes of mounting groove 13, receiving groove 6, and first channel 7 are on the same straight line. An elastic reset member 4 and a ball bearing 3 are engaged within the mounting groove 13. The ball bearing 3 is an elastic ball made of rubber material, and it is engaged at the opening of the mounting groove 13. The elastic reset member 4 can be a spring or a rubber column; in this embodiment, a spring is used as an example. The spring is positioned along the axis of the mounting groove 13, with one end abutting the bottom of the mounting groove 13 and the other end abutting the outer side of the ball bearing 3 away from the opening of the mounting groove 13. The ball bearing 3 slides along the depth direction of the mounting groove 13, and the side of the ball bearing 3 located outside the opening of the mounting groove 13 movably seals the first interface 9. The elastic reset member 4 is used to drive the ball bearing 3 to abut against the first interface 9. The spring is always under compression. When the spring is under natural compression without the action of other external forces, one side of the ball 3 is located outside the groove of the mounting groove 13, so that the side of the ball 3 located outside the groove of the mounting groove 13 keeps the first interface 9 sealed.

[0041] When fluid enters the first channel 7, the ball 3 is subjected to an external force toward the bottom of the mounting groove 13. Since the first interface 9 is directed toward the ball 3, the ball 3 is subjected to an impact force and moves along the depth direction of the mounting groove 13. When the fluid delivery stops, the spring drives the ball 3 to reset. Therefore, during the sliding process, the ball 3 opens or seals the first interface 9.

[0042] The inner wall of the transition cavity 11 is machined with a concave spherical recess 14, which is vertically opposite to the ball 3. The spherical recess 14 is located on the periphery of the first interface 9 and is adapted to the outer side of the ball 3. The outer side of the ball 3 outside the receiving groove 6 is attached to the spherical recess 14, which increases the sealing area of ​​the ball 3 on the periphery of the first interface 9 and improves the sealing effect of the ball 3 on the first interface 9.

[0043] The piston 2 has an integrally formed constricted portion 15 on the periphery of the mounting groove 13. The maximum inner diameter of the constricted portion 15 is smaller than the diameter of the ball 3. The inner diameter of the constricted portion 15 gradually increases towards the bottom of the mounting groove 13 and mates with the mounting groove 13. The maximum inner diameter of the constricted portion 15 is the inner diameter of the mounting groove 13. Since the ball 3 has good elastic deformation ability, the ball 3 can be squeezed into the mounting groove 13. Part of the outer side of the ball 3 fits against the inner wall of the constricted portion 15, and one side of the ball 3 is outside the constricted portion 15. The constricted portion 15 is used to restrict the ball 3 from leaving the mounting groove 13.

[0044] The piston 2 has a connecting hole 16 machined at a position corresponding to the inner wall of the transition cavity 11. One end of the connecting hole 16 is connected to the mounting groove 13, and the other end is located outside the constriction portion 15, so as to realize the connection between the transition cavity 11 and the mounting groove 13.

[0045] The implementation principle of a microfluidic valve in this application embodiment is as follows: During operation, when fluid enters from the first channel 7, the ball 3 is subjected to pressure, causing the ball 3 to be lifted up, the elastic reset member 4 to be squeezed, the first interface 9 to be opened, and the liquid enters the transition chamber 11 and then flows out from the second channel 8.

[0046] When no fluid enters the first channel 7, the restoring force of the elastic reset member 4 drives the ball 3 to reset, and the first interface 9 continues to be sealed.

[0047] When fluid enters the transition chamber 11 from the second channel 8, the elastic reset member 4 is not subjected to the force of the fluid from the first channel 7, so it pushes the ball 3 to block the opening of the first channel 7; and since the connecting hole 16 connects the transition chamber 11 and the mounting groove 13, the fluid will fill the transition chamber 11 and the mounting groove 13. The pressure inside the entire transition chamber 11 and the mounting groove 13 is the same. At this time, the elastic reset member 4 still remains in the state of blocking the first interface 9, so it cannot be transported in reverse, so that the valve body has the function of normal unidirectional flow and anti-backflow.

[0048] Finally, when fluid needs to enter the first channel 7 from the second channel 8, the piston 2 can be moved away from the interior of the receiving groove 6. The piston 2 and the ball bearing 3 move upward. At this time, the ball bearing 3 leaves the first interface 9, and the first interface 9 opens. Therefore, bidirectional fluid delivery can be controlled, achieving backflow prevention in unidirectional flow and controlling the bidirectional flow effect.

[0049] Example 2:

[0050] Reference Figure 3 and Figure 4The difference between Embodiment 1 and Embodiment 2 is that a driving assembly 5 is provided on the upper surface of the mounting body 1. The driving assembly 5 is used to drive the piston 2 to slide and adjust along the depth direction of the receiving groove 6. The driving assembly 5 includes a handle 51 connected to one end of the piston 2 located outside the receiving groove 6 and an elastic element 52 with one end of the slider 22 located outside the mounting body 1. A sliding groove 20 is provided on the upper surface of the mounting body 1, and the slider 22 is slidably connected to the sliding groove 20. The sliding groove 20 is opened along the radial direction of the receiving groove 6. The elastic element 52 is also selected as a spring. The other end of the elastic element 52 hooks the lower side of the handle 51. When the ball 3 is in the position of sealing the first interface 9, the elastic element 52 is stretched. In this embodiment, the handle 51 includes a first horizontal part 511, a V-shaped part 512 and a second horizontal part 513 that are fixedly connected in sequence. The first horizontal part 511 and the second horizontal part are horizontally arranged and one end is fixed to the two ends of the clamp of the V-shaped part 512. The first horizontal part 511 is engaged with the end of the piston 2. The lower end of the V-shaped part 512 is rotatably connected to the slider 22, and the rotation axis of the handle 51 is set horizontally and perpendicular to the sliding direction of the slider 22.

[0051] In other implementations, the handle 51 may simply be a rod-shaped or block-shaped structure that is easy to grip so as to lift the piston 2 directly.

[0052] When the second horizontal part 513 is pressed, the first horizontal part 511 is pried upward by lever principle, which drives the piston 2 to slide away from the inside of the receiving groove 6. At this time, the elastic element 52 continues to be stretched, the slider 22 slides towards the outside of the piston 2, and the first horizontal part 511 drives the piston 2 and the ball 3 to move upward. At this time, the ball 3 leaves the first interface 9, realizing the manual opening of the first interface 9.

[0053] A through hole 17 is vertically provided on the first horizontal part 511. A locking member 18 is attached to the end of the piston 2 located outside the receiving groove 6. The locking member 18 is a bolt. After the bolt passes through the through hole 17, it is threadedly connected to the piston 2 in the axial direction. The outer diameter of the stud part of the bolt passing through the through hole 17 is smaller than the outer diameter of the through hole 17, ensuring that the horizontal part can tilt to a certain extent on the horizontal plane. When the first horizontal part 511 tilts on the horizontal plane, the piston 2 is pried upward. The nut part of the bolt can prevent the first horizontal part 511 from disengaging from the end of the piston 2, so as to realize the engagement between the handle 51 and the end of the piston 2.

[0054] The mounting body 1 has an adjustment component 19 on its upper surface for positioning the sliding position of the slider 22, so that the position of the handle 51 remains stable and the operator does not need to hold the handle 51 all the time, making the operation more convenient. At the same time, the distance between the ball 3 and the first interface 9 can be controlled according to the position of the slider 22, thereby controlling the opening size of the first interface 9 and controlling the flow efficiency of the first channel 7 into the transition cavity 11.

[0055] Specifically, the adjusting component 19 includes a screw that is horizontally threaded to the mounting body 1. The screw is arranged along the length of the slide groove 20 and is located on the side of the slider 22 away from the piston 2. One end of the screw extends out of the outer wall of the mounting body 1, and a rotating block 21 is fixed to the end of the screw that extends out of the mounting body 1. When the screw is rotated by the rotating block 21, the screw slides and adjusts along the length of the slide groove 20, so that one end of the screw can abut against the side of the slider 22 away from the piston 2.

[0056] When the first interface 9 is opened, the elastic element 52 tends to push the V-shaped portion 512 closer to the piston 2 downwards. Therefore, the elastic element 52 tends to push the slider 22 away from the piston 2. Thus, by simply restricting the side of the slider 22 away from the piston 2, the sliding of the slider 22 can be positioned and adjusted. The other components and connections of the microfluidic valve provided in this embodiment are the same as those in Embodiment 1, and will not be described again.

[0057] This application also discloses a microfluidic chip, including the microfluidic valve described above.

[0058] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A microfluidic valve, characterized in that, include, Mounting body (1), the mounting body (1) is provided with a receiving groove (6), the mounting body (1) is provided with an independent first channel (7) and a second channel (8), the first channel (7) and the second channel (8) are both connected to the receiving groove (6); Piston (2), the piston (2) is inserted and slidably disposed in the receiving groove (6), the piston (2) is adjustable along the depth direction of the receiving groove (6), and the end of the piston (2) facing the bottom of the receiving groove (6) forms a transition cavity (11) between the bottom of the receiving groove (6) and the bottom of the receiving groove (6), the transition cavity (11) is connected to the first channel (7) and the second channel (8) respectively. The piston (2) has a mounting groove (13) on the side facing the bottom of the receiving groove (6). The ball (3) is engaged in the groove opening of the mounting groove (13), and the ball (3) moves and resets along the depth direction of the mounting groove (13). During the sliding process of the ball (3), the ball (3) opens or seals the communication port between the first channel (7) and the transition cavity (11). The elastic reset member (4) is disposed in the mounting groove (13). The transition cavity (11) is connected to the mounting groove (13). One end of the elastic reset member (4) abuts against the bottom of the mounting groove (13), and the other end abuts against the ball (3). The elastic reset member (4) is used to drive the ball (3) to abut against the communication port between the first channel (7) and the transition cavity (11). The ball (3) is an elastic ball. The piston (2) is provided with a constriction section (15) at the periphery of the mounting groove (13). The maximum inner diameter of the constriction section (15) is smaller than the diameter of the ball (3). The inner diameter of the constriction section (15) gradually increases towards the bottom of the mounting groove (13). The outer side of part of the ball (3) is in contact with the inner wall of the constriction section (15). One side of the ball (3) is located outside the constriction section (15). The constriction section (15) is used to restrict the ball (3) from leaving the mounting groove (13). The piston (2) is provided with a connecting hole (16) at a position corresponding to the inner wall of the transition cavity (11), and one end of the connecting hole (16) is connected to the mounting groove (13); The inner wall of the transition cavity (11) is provided with a spherical recess (14). The spherical recess (14) is located on the periphery of the communication opening between the first channel (7) and the transition cavity (11). The spherical recess (14) is adapted to the outer side of the ball (3). The ball (3) is located on the outer side of the receiving groove (6) and fits against the spherical recess (14).

2. A microfluidic valve according to claim 1, characterized in that, The mounting body (1) is provided with a drive assembly (5) for adjusting the sliding of the piston (2).

3. A microfluidic valve according to claim 2, characterized in that, One end of the piston (2) is located outside the receiving groove (6). The drive assembly (5) includes a handle (51) connected to the piston (2) at the end located outside the receiving groove (6), a slider (22), and an elastic element (52) with one end disposed on the outside of the mounting body (1). The other end of the elastic element (52) is connected to the handle (51). The handle (51) near the middle abuts against the outer side of the mounting body (1), the slider (22), the elastic element (52), the slider (22), and the elastic element (52).

4. A microfluidic valve according to claim 3, characterized in that, A slider (22) is slidably disposed on one side of the groove of the receiving groove (6) on the mounting body (1). The slider (22) slides along the direction close to or away from the piston (2). The handle (51) is rotatably connected to the slider (22) near the middle position. An adjustment component (19) for positioning the sliding position of the slider (22) is provided on the mounting body (1).

5. A microfluidic valve according to claim 4, characterized in that, The outer wall of the mounting body (1) is provided with a slide groove (20) along the radial direction of the receiving groove (6). The slider (22) is slidably connected in the slide groove (20). The adjusting component (19) includes a screw threadedly connected to the mounting body (1). The screw is arranged along the length direction of the slide groove (20) and located on the side of the slider (22) away from the piston (2). The screw slides and adjusts along the length direction of the slide groove (20). One end of the screw abuts against the side of the slider (22) away from the piston (2).

6. A microfluidic valve according to claim 3, characterized in that, One end of the handle (51) is provided with a through hole (17), and the end of the piston (2) located outside the receiving groove (6) is detachably provided with a locking member (18). The locking member (18) passes through the through hole (17) and restricts the handle (51) from disengaging from the end of the piston (2). The outer diameter of the part of the locking member (18) that passes through the through hole (17) is smaller than the inner diameter of the through hole (17).

7. A microfluidic chip, characterized in that, Includes the microfluidic valve as described in any one of claims 1-6.

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