Microelectromechanical System Gyroscope

Abstract

The present invention discloses a microelectromechanical system gyroscope, belonging to the technical field of sensors. The gyroscope includes: a substrate, a mass block group, a driving component, and a detecting component; the mass block group includes four driving mass blocks, an anchor structure, a coupling elastic beam, and a plurality of Z-axis detecting mass blocks. The four driving mass blocks are symmetrically suspended on the substrate through the anchor structure in a centrosymmetric manner, and the four driving mass blocks are connected by the coupling elastic beam; a Z-axis detecting mass block is provided on each driving mass block. Among them, in the driving mode, the driving modes of two adjacent driving mass blocks are out of phase, and out-of-phase vibration can be achieved in the detecting modes of the X-axis, Y-axis, and Z-axis. Therefore, a mechanical differential effect can be achieved, effectively reducing the influence of factors such as external vibration and impact on the gyro performance, improving the anti-vibration characteristics, and thus improving the detection accuracy and stability of the gyroscope.

Description

Technical Field

[0001] The present invention relates to the technical field of sensors, and in particular to a micro electro mechanical systems (MEMS) gyroscope. Background Art

[0002] A gyroscope is an inertial device used to measure the angular velocity of an object's motion along the X-axis, Y-axis, and Z-axis. Currently, MEMS (micro electro mechanical systems) gyroscopes are widely used. An MEMS gyroscope is an inertial device manufactured based on micro electro mechanical processes, and has the characteristics of small size, high reliability, low cost, and suitability for mass production.

[0003] Currently, MEMS gyroscopes are mainly capacitive resonant gyroscopes, that is, by driving a capacitive mechanical structure to vibrate a mass block in a driving mode, and then detecting the capacitance change caused by the movement of the mass block in different directions due to the Coriolis force, and converting the capacitance change into an angular velocity. However, the current gyroscopes have the problem of poor anti-vibration characteristics. Summary of the Invention

[0004] In view of the above problems, the present invention is proposed to provide a MEMS gyroscope that overcomes or at least partially solves the above problems. The gyroscope has a compact structure, good anti-vibration characteristics, and detection sensitivity.

[0005] The present invention provides a MEMS gyroscope, including:

[0006] A substrate;

[0007] A mass block group, the mass block group includes four driving mass blocks, an anchor structure, a coupling elastic beam, and a plurality of Z-axis detection mass blocks. The four driving mass blocks are suspended on the substrate through the anchor structure in a centrosymmetric manner, and the four driving mass blocks are connected by the coupling elastic beam; a Z-axis detection mass block is provided on each driving mass block, and the Z-axis detection mass blocks on two adjacent driving mass blocks are connected by a first connecting beam;

[0008] A driving component, arranged on the driving mass block, for driving the driving mass block to rotate in the X-Y axis plane;

[0009] A detection component, arranged on the driving mass block, for detecting the position changes of each driving mass block and each Z-axis detection mass block, and converting the detected position changes into electrical signals for output;

[0010] The microelectromechanical system gyroscope has a driving mode, an X-axis detection mode, a Y-axis detection mode, and a Z-axis detection mode; in the driving mode, the driving modes of two adjacent driving mass blocks are out of phase, in the X-axis detection mode and the Y-axis detection mode, the vibration directions of two adjacent driving mass blocks are opposite, in the Z-axis detection mode, the four driving mass blocks are stationary, and the multiple Z-axis detection mass blocks translate in the X-Y axis plane in the clockwise or counterclockwise direction under the action of the Coriolis force, or the multiple Z-axis detection mass blocks move centrifugally or centripetally towards the central axis of the microelectromechanical system gyroscope under the action of the Coriolis force;

[0011] Wherein, a three-dimensional space coordinate system including an X-axis, a Y-axis, and a Z-axis is established with the center point of the substrate as the origin, the X-axis and the Y-axis are both parallel to the end face of the substrate, and the Z-axis is perpendicular to the end face of the substrate.

[0012] Optionally, the mass block group includes a first driving mass block, a second driving mass block, a third driving mass block, and a fourth driving mass block;

[0013] The first driving mass block and the third driving mass block are symmetrically arranged about the negative X-axis direction, and the second driving mass block and the fourth driving mass block are symmetrically arranged about the positive X-axis direction; the first driving mass block and the second driving mass block are symmetrically arranged about the positive Y-axis direction, and the third driving mass block and the fourth driving mass block are symmetrically arranged about the positive Y-axis direction; the first driving mass block and the fourth driving mass block are centrosymmetrically arranged; the third driving mass block and the second driving mass block are centrosymmetrically arranged.

[0014] Optionally, the Z-axis detection mass blocks on the first driving mass block and the second driving mass block are connected by the first connecting beam to form a first Z-axis detection mass block;

[0015] The Z-axis detection mass blocks on the first driving mass block and the third driving mass block are connected by the first connecting beam to form a second Z-axis detection mass block;

[0016] The Z-axis detection mass blocks on the third driving mass block and the fourth driving mass block are connected by the first connecting beam to form a third Z-axis detection mass block;

[0017] The Z-axis detection mass blocks on the second driving mass block and the fourth driving mass block are connected by the first connecting beam to form a fourth Z-axis detection mass block;

[0018] The first Z-axis detection mass, the second Z-axis detection mass, the third Z-axis detection mass, and the fourth Z-axis detection mass are all arranged in an H shape.

[0019] Optionally, in the Z-axis detection mode, the first Z-axis detection mass and the third Z-axis detection mass rotate clockwise under the action of the Coriolis force, and the second Z-axis detection mass and the fourth Z-axis detection mass rotate counterclockwise under the action of the Coriolis force.

[0020] Optionally, the detection component includes a first X-axis sensitive axis electrode disposed on the first driving mass and the second driving mass, and a second X-axis sensitive axis electrode disposed on the third driving mass and the fourth driving mass;

[0021] The first X-axis sensitive axis electrode is used to detect the position change of the first driving mass and the second driving mass in the Z-axis direction, and convert the detected position change into an electrical signal for output;

[0022] The second X-axis sensitive axis electrode is used to detect the position change of the third driving mass and the fourth driving mass in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0023] Optionally, the polarities of the first X-axis sensitive axis electrode and the second X-axis sensitive axis electrode are opposite.

[0024] Optionally, the detection component includes a first Y-axis sensitive axis electrode disposed on the first driving mass and the third driving mass, and a second Y-axis sensitive axis electrode disposed on the second driving mass and the fourth driving mass;

[0025] The first Y-axis sensitive axis electrode is used to detect the position change of the first driving mass and the third driving mass in the Z-axis direction, and convert the detected position change into an electrical signal for output;

[0026] The second Y-axis sensitive axis electrode is used to detect the position change of the second driving mass and the fourth driving mass in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0027] Optionally, the polarities of the first Y-axis sensitive axis electrode and the second Y-axis sensitive axis electrode are opposite.

[0028] Optionally, the detection component includes Z-axis sensitive electrodes. Each of the driving mass blocks is provided with a Z-axis sensitive electrode corresponding to the Z-axis detection mass block one by one. The Z-axis sensitive electrode and the Z-axis detection mass block form a variable-gap capacitance structure, which is used to detect the capacitance change caused by the movement of the Z-axis detection mass block and convert the detected capacitance change into an electrical signal for output.

[0029] Optionally, the driving component includes two sets of driving electrodes, and each set of driving electrodes includes two driving electrodes with opposite polarities.

[0030] The technical solution provided in the embodiment of the present invention has at least the following technical effects or advantages:

[0031] A microelectromechanical system gyroscope provided in an embodiment of the present invention has a more compact structure by arranging four fully symmetric driving mass block structures on a substrate. The four driving mass blocks are connected by coupling springs, which can ensure the vibration mode coupling of each driving mass block. And in the driving mode, the driving modes of two adjacent driving mass blocks are out of phase, and in-phase vibration can be realized in the detection modes of the X-axis, Y-axis, and Z-axis. Therefore, a mechanical differential effect can be achieved, effectively reducing the influence of external vibration and impact on the gyro performance, improving the anti-vibration characteristics, and thus improving the detection accuracy and stability of the gyroscope.

[0032] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features, and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention are specifically described below. Description of the Drawings

[0033] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present invention. And throughout the drawings, the same reference numerals are used to represent the same components.

[0034] In the drawings:

[0035] Figure 1 is a schematic diagram of a microelectromechanical system gyroscope provided in an embodiment of the present invention;

[0036] Figure 2 is a schematic diagram of a driving mode provided in an embodiment of the present invention;

[0037] Figure 3 is a schematic diagram of an X-axis detection mode provided in an embodiment of the present invention;

[0038] Figure 4It is a schematic diagram of a Y-axis detection mode provided by an embodiment of the present invention;

[0039] Figure 5 It is a schematic diagram of the Z-axis response under the action of Coriolis force provided by an embodiment of the present invention;

[0040] Figure 6 It is a partial structural schematic diagram of a microelectromechanical system gyroscope provided by an embodiment of the present invention;

[0041] Figure 7 It is a partial structural schematic diagram of another microelectromechanical system gyroscope provided by an embodiment of the present invention. Specific embodiments

[0042] To make the objectives, technical solutions, and advantages of this application clearer, the following will further describe the embodiments of this application in detail with reference to the accompanying drawings.

[0043] Figure 1 It is a schematic diagram of a microelectromechanical system gyroscope provided by an embodiment of the present invention. As Figure 1 shown, the microelectromechanical system gyroscope includes: a substrate 10, a mass block group 20, a driving component 30, and a Z-axis detection component 40.

[0044] The mass block group 20 includes four driving mass blocks 21, an anchor structure 22, a coupling elastic beam 23, and a plurality of Z-axis detection mass blocks 24. The four driving mass blocks 21 are suspended on the substrate 10 through the anchor structure 22 in a centrosymmetric manner, and the four driving mass blocks 21 are connected by the coupling elastic beam 23. A Z-axis detection mass block 24 is provided on each driving mass block 21, and the Z-axis detection mass blocks 24 on two adjacent driving mass blocks 21 are connected by a first connecting beam 241.

[0045] The driving component 30 is arranged on the driving mass block 21 and is used to drive the driving mass block 21 to rotate in the X-Y axis plane.

[0046] The detection component 40 is arranged on the driving mass block 21 and is used to detect the position changes of each driving mass block 21 and each Z-axis detection mass block 24, and convert the detected position changes into electrical signals for output;

[0047] The microelectromechanical system gyroscope has a driving mode, an X-axis detection mode, a Y-axis detection mode, and a Z-axis detection mode. In the driving mode, the driving modes of two adjacent driving mass blocks 21 are out of phase; in the X-axis detection mode and the Y-axis detection mode, the vibration directions of two adjacent driving mass blocks 21 are opposite; in the Z-axis detection mode, the four driving mass blocks 21 are stationary, and multiple Z-axis detection mass blocks 24 translate in the X-Y axis plane in the clockwise or counterclockwise direction under the action of the Coriolis force, or multiple Z-axis detection mass blocks 24 move centrifugally or centripetally towards the central axis of the microelectromechanical system gyroscope under the action of the Coriolis force.

[0048] Wherein, a three-dimensional space coordinate system including an X-axis, a Y-axis, and a Z-axis is established with the center point of the substrate 10 as the origin. The X-axis and the Y-axis are both parallel to the end face of the substrate 10, and the Z-axis is perpendicular to the end face of the substrate 10.

[0049] Optionally, the coupling elastic beam 23 is a C-shaped beam to realize the coupling connection between the four driving mass blocks 21. In this embodiment, each driving mass block 21 is connected to the anchor structure 22 through a cantilever beam 22a. Each Z-axis detection mass block 24 is connected to the driving mass block 21 through a second connecting beam 242.

[0050] In this embodiment, the mass block group 20 includes four mass blocks 21 symmetrically distributed about the center of the gyroscope structure, which are respectively denoted as the first driving mass block 21a, the second driving mass block 21b, the third driving mass block 21c, and the fourth driving mass block 21d. Among them, the first driving mass block 21a and the third driving mass block 21c are axially symmetrically arranged about the negative X-axis direction; the second driving mass block 21b and the fourth driving mass block 21d are axially symmetrically arranged about the positive X-axis direction; the first driving mass block 21a and the second driving mass block 21b are axially symmetrically arranged about the positive Y-axis direction; the third driving mass block 21c and the fourth driving mass block 21d are axially symmetrically arranged about the negative Y-axis direction; the first driving mass block 21a and the fourth driving mass block 21d are centrosymmetrically arranged; the third driving mass block 21c and the second driving mass block 21b are centrosymmetrically arranged.

[0051] The micromechanical gyroscope utilizes the generation principle of the Coriolis force (i.e., the Coriolis force, also known as the Coriolis force) to achieve the detection of angular velocity. The Coriolis force is an inertial force that an object in a rotating reference frame experiences when it is in motion. In the design of a micromechanical gyroscope, it is first necessary to fabricate a moving mass. At this time, the mass is in an inertial frame and only maintains a preset motion state, which is called the driving mode. When an angular velocity is applied to the moving mass, that is, when the mass in the driving mode is suddenly rotated. Due to inertia, the mass will maintain its original motion in the driving mode. However, when observing the mass from the rotating frame, it can be found that the mass has a displacement in the direction perpendicular to the angular velocity. At this time, it can be considered that the mass is subjected to an inertial force in the direction perpendicular to the angular velocity, and this inertial force is called the Coriolis force. The direction of the Coriolis force can be determined by the right-hand rule. When observing the mass from the rotating frame, in addition to maintaining its original motion, the mass also has a displacement in the direction of the Coriolis force, and this motion state is called the detection mode.

[0052] Figure 2 is a schematic diagram of a driving mode provided by an embodiment of the present invention, as Figure 2 shown. At this time, all four driving masses 21 are rotating in the X-Y axis plane, and the driving modes of adjacent two driving masses are out of phase, that is, the driving modes of the first driving mass 21a and the third driving mass 21c are opposite; the driving modes of the first driving mass 21a and the second driving mass 21b are opposite, the driving modes of the third driving mass 21c and the fourth driving mass 21d are opposite, and the driving modes of the second driving mass 21b and the fourth driving mass 21d are opposite.

[0053] Figure 3 is a schematic diagram of an X-axis detection mode provided by an embodiment of the present invention, as Figure 3 shown. In the X-axis detection mode, the four driving masses respond to the angular velocity ω in the X-axis direction in the response plane. According to the Coriolis principle, the angular velocity ω will generate a Coriolis force in the Z-axis direction, and the Coriolis force will force the gyro to vibrate in the vibration mode of the X-axis detection mode, causing the multiple driving masses to turn out of the plane. Among them, the vibration directions of the first driving mass 21a and the third driving mass 21c are opposite; the vibration directions of the first driving mass 21a and the second driving mass 21b are opposite, the vibration directions of the third driving mass 21c and the fourth driving mass 21d are opposite, and the vibration directions of the second driving mass 21b and the fourth driving mass 21d are opposite. The vibration directions of adjacent two driving masses are opposite to form a differential detection. At this time, by detecting the vibration displacement of the multiple driving masses in the Z-axis direction, the magnitude of the angular velocity ω can be obtained.

[0054] Figure 4 is a schematic diagram of a Y-axis detection mode provided by an embodiment of the present invention, asFigure 4 As shown, in the Y-axis detection mode, multiple driving mass blocks respond to the angular velocity ω in the Y-axis direction within the response surface. According to the Coriolis principle, the angular velocity ω will generate a Coriolis force in the Z-axis direction, and the Coriolis force will force the gyroscope to vibrate in the vibration mode of the Y-axis detection mode, causing the multiple driving mass blocks to flip out of the plane. Among them, the vibration directions of the first driving mass block 21a and the third driving mass block 21c are opposite; the vibration directions of the first driving mass block 21a and the second driving mass block 21b are opposite, the vibration directions of the third driving mass block 21c and the fourth driving mass block 21d are opposite, and the vibration directions of the second driving mass block 21b and the fourth driving mass block 21d are opposite. The vibration directions of adjacent two driving mass blocks are opposite to form differential detection. At this time, by detecting the vibration displacement of the multiple driving mass blocks in the Z-axis direction, the magnitude of the angular velocity ω can be obtained.

[0055] From the above Figure 3 and Figure 4 it can be seen that in the X-axis detection mode and the Y-axis detection mode, the vibration directions of adjacent two driving mass blocks 21 are opposite. In this embodiment, the detection modes of each driving mass block 21 in the X-axis direction and the Y-axis direction are both out-of-plane angle vibrations.

[0056] Optionally, as Figure 1 shown, the Z-axis detection mass blocks 24 on the first driving mass block 21a and the second driving mass block 21b are connected by a first connecting beam 241 to form a first Z-axis detection mass block 24a. The Z-axis detection mass blocks 24 on the first driving mass block 21a and the third driving mass block 21c are connected by a first connecting beam 241 to form a second Z-axis detection mass block 24b. The Z-axis detection mass blocks 24 on the third driving mass block 21c and the fourth driving mass block 21d are connected by a first connecting beam 241 to form a third Z-axis detection mass block 24c. The Z-axis detection mass blocks 24 on the second driving mass block 21b and the fourth driving mass block 21d are connected by a first connecting beam 241 to form a fourth Z-axis detection mass block 24d. The first Z-axis detection mass block 24a, the second Z-axis detection mass block 24b, the third Z-axis detection mass block 24c, and the fourth Z-axis detection mass block 24d are all arranged in an H shape.

[0057] In this embodiment, in the Z-axis detection mode, the first Z-axis detection mass block 24a and the third Z-axis detection mass block 24c rotate clockwise under the action of the Coriolis force, and the second Z-axis detection mass block 24b and the fourth Z-axis detection mass block 24d rotate counterclockwise under the action of the Coriolis force.

[0058] Figure 5 is a schematic diagram of the Z-axis response under the action of the Coriolis force provided by an embodiment of the present invention. As Figure 5As shown, in the Z-axis detection mode, the four driving mass blocks 21 are stationary. The first Z-axis mass blocks 24a located on the first driving mass block 21a and the second driving mass block 21b, and the third Z-axis mass blocks 24c located on the third driving mass block 21c and the fourth driving mass block 21d translate in the X-Y axis plane in the clockwise direction under the action of the Coriolis force; conversely, the third Z-axis mass blocks 24b located on the first driving mass block 21a and the third driving mass block 21c, and the fourth Z-axis mass blocks 24d located on the second driving mass block 21b and the fourth driving mass block 21d translate in the X-Y axis plane in the counterclockwise direction under the action of the Coriolis force.

[0059] Optionally, as Figure 1 shown, the detection component 40 includes a first X-axis sensitive axis electrode 41a disposed on the first driving mass 21a block and the second driving mass block 21b, and a second X-axis sensitive axis electrode 41b disposed on the third driving mass block 21c and the fourth driving mass block 21d.

[0060] The first X-axis sensitive axis electrode 41a is used to detect the position change of the first driving mass 21a block and the second driving mass block 21b in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0061] The second X-axis sensitive axis electrode 41b is used to detect the position change of the third driving mass block 21c and the fourth driving mass block 21d in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0062] In this embodiment, the polarities of the first X-axis sensitive axis electrode 41a and the second X-axis sensitive axis electrode 41b are opposite, that is, one is the positive electrode (N) and the other is the negative electrode (P), achieving the differential effect of the detection circuit.

[0063] Optionally, as Figure 1 shown, the microelectromechanical system gyroscope further includes a first Y-axis sensitive axis electrode 42a disposed on the first driving mass block 21a and the third driving mass block 21c, and a second Y-axis sensitive axis electrode 42a disposed on the second driving mass block 21b and the fourth driving mass block 21d.

[0064] The first Y-axis sensitive axis electrode 42a is used to detect the position change of the first driving mass block 21a and the third driving mass block 21c in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0065] The second Y-axis sensitive axis electrode 42b is used to detect the position change of the second driving mass block 21b and the fourth driving mass block 21d in the Z-axis direction, and convert the detected position change into an electrical signal for output.

[0066] In this embodiment, the polarities of the first Y-axis sensitive axis electrode 42a and the second Y-axis sensitive axis electrode 42b are opposite, that is, one is the positive electrode (N) and the other is the negative electrode (P), achieving the differential effect of the detection circuit.

[0067] In this embodiment, the first Z-axis detection mass 24a is disposed above the first X-axis sensitive axis electrode 41a, and the third Z-axis detection mass 24c is disposed above the second X-axis sensitive axis electrode 41b. The second Z-axis detection mass 24b is disposed above the first Y-axis sensitive axis electrode 42a, and the fourth Z-axis detection mass 24d is disposed above the second Y-axis sensitive axis electrode 42b.

[0068] It should be noted that, as Figure 1 shown, in this embodiment, the detection component 40 further includes an X-axis other function electrode 43 and a Y-axis other function electrode 44 disposed on each driving mass 21.

[0069] In one implementation manner of this embodiment, the X-axis other function electrode 43 may be an X-axis sensitive axis electrode. The Y-axis other function electrode 44 may also be a Y-axis sensitive axis electrode. Or, in other implementation manners of this embodiment, the X-axis other function electrode 43 may be, for example, a detection feedback electrode to play a role in closed-loop control of the detection loop. The Y-axis other function electrode 44 may be, for example, a detection feedback electrode to play a role in closed-loop control of the detection loop.

[0070] Optionally, as Figure 1 shown, the detection component 40 further includes a Z-axis sensitive electrode 45. Each driving mass 21 is provided with a Z-axis sensitive electrode 45 corresponding to the Z-axis detection mass 24 one by one. The Z-axis sensitive electrode 45 and the Z-axis detection mass 24 form a variable-gap capacitor structure for detecting the capacitance change caused by the movement of the Z-axis detection mass 24 and converting the detected capacitance change into an electrical signal for output.

[0071] In this embodiment, each Z-axis sensitive electrode 45 and each Z-axis detection mass 24 have comb-shaped electrode plates, and the two form a comb capacitor structure. When the gyroscope receives an angular velocity, under the action of the Coriolis force, each Z-axis detection mass 24 will rotate, so that the gap between the Z-axis detection mass 24 and the electrode plate of the Z-axis sensitive electrode 45 changes, and further the detected capacitance changes. By converting the detected capacitance change into an electrical signal for output, the magnitude of the angular velocity can be calculated based on this electrical signal, realizing the detection of the angular velocity.

[0072] Optionally, as Figure 1 shown, the driving component 30 includes two groups of driving electrodes, and each group of driving electrodes includes two driving electrodes 31 with opposite polarities.

[0073] In this embodiment, both of the two driving electrodes 31 can be used to provide a driving force for the driving mass 21; or one of the two driving electrodes 31 is used to provide a driving force for the driving mass 21, and the other is used to detect the position change of the driving mass 21 under the driving force and convert the detected position change into an electrical signal for output.

[0074] Figure 6 It is a partial structural schematic diagram of a microelectromechanical system gyroscope provided by an embodiment of the present invention. As Figure 6 shown, in one implementation manner of this embodiment, two sets of driving electrodes 30 on the driving mass 21 are respectively arranged on one side of the anchor structure 22 along the +Y axis direction and the -X axis direction. Among them, the polarity of the first driving electrode 31a is positive, and the polarity of the second driving electrode 31b is negative. Two Z-axis detection masses 24 and two Z-axis sensitive axis electrodes are provided on the driving mass 21. The two Z-axis detection masses 24 are respectively arranged on one side of the anchor structure 22 along the +X axis direction and the -Y axis direction. The two Z-axis sensitive axis electrodes include a first Z-axis sensitive electrode 45a arranged on one side of the anchor structure 22 along the -Y axis direction and a second Z-axis sensitive electrode 45b arranged on one side of the anchor structure 22 along the +X axis direction. Among them, the polarity of the first Z-axis sensitive electrode 45a is positive, and the polarity of the second Z-axis sensitive electrode 45b is negative. The first X-axis sensitive axis electrode 41a and the first Y-axis sensitive axis electrode 42a are respectively arranged below the two Z-axis detection masses 24. The other X-axis functional electrodes 43 and the first X-axis sensitive axis electrode 41a are symmetrically arranged on both sides of the anchor structure 22 along the X axis direction, and the other Y-axis functional electrodes 44 and the first Y-axis sensitive axis electrode 42a are symmetrically arranged on both sides of the anchor structure 22 along the Y axis direction. In this embodiment, the other X-axis functional electrodes 43 are X-axis sensitive axis electrodes, and have opposite polarities to the first X-axis sensitive axis electrode 41a. Specifically, the polarity of the other X-axis functional electrodes 43 is positive, and the polarity of the first X-axis sensitive axis electrode 41a is negative. The other Y-axis functional electrodes 44 are Y-axis sensitive axis electrodes, and have opposite polarities to the first Y-axis sensitive axis electrode 42a. Specifically, the polarity of the other Y-axis functional electrodes 44 is negative, and the polarity of the first Y-axis sensitive axis electrode 42a is positive.

[0075] Figure 7 It is a partial structural schematic diagram of another microelectromechanical system gyroscope provided by an embodiment of the present invention. As Figure 7As shown, in another implementation of this embodiment, two groups of drive electrodes 31 on the drive mass 21 are symmetrically arranged on both sides of the anchor structure 22 along the Y-axis direction. Among them, the polarity of the first drive electrode 31a is positive, and the polarity of the second drive electrode 31b is negative. Two Z-axis detection masses 24 are symmetrically arranged on both sides of the anchor structure 22 along the X-axis direction. The first Z-axis sensitive electrode 45a and the second Z-axis sensitive electrode 45b are symmetrically arranged on both sides of the anchor structure 22 along the X-axis direction. Among them, the polarity of the first Z-axis sensitive electrode 42a is positive, and the polarity of the second Z-axis sensitive electrode 42b is negative. The first X-axis sensitive axis electrode 41a and the other X-axis functional electrodes 43 are respectively arranged below the two Z-axis detection masses 24. In this embodiment, the other X-axis functional electrodes 43 are X-axis sensitive axis electrodes, and have the opposite polarity to the first X-axis sensitive axis electrode 41a. Specifically, the polarity of the other X-axis functional electrodes 43 is positive, and the polarity of the first X-axis sensitive axis electrode 41a is negative. The other Y-axis functional electrodes 44 and the first Y-axis sensitive axis electrode 42a are symmetrically arranged on both sides of the anchor structure 22 along the Y-axis direction. The other Y-axis functional electrodes 44 are Y-axis sensitive axis electrodes, and have the opposite polarity to the first Y-axis sensitive axis electrode 42a. Specifically, the polarity of the other Y-axis functional electrodes 44 is negative, and the polarity of the first Y-axis sensitive axis electrode 42a is positive.

[0076] Figure 6 and Figure 7 In the structure shown, the arrangement methods of the electrodes in the detection component 40 are different, and the arrangement methods of the Z-axis detection masses are also different. According to Figure 6 the shown arrangement method, the Z-axis detection masses 24 are arranged on each drive mass 21 in a non-embedded manner. In the Z-axis detection mode, multiple Z-axis detection masses 24 translate in the X-Y axis plane in the clockwise or counterclockwise direction under the action of the Coriolis force. According to Figure 7 the shown arrangement method, the Z-axis detection masses 24 can be arranged on each drive mass 21 in an embedded manner. In the Z-axis detection mode, multiple Z-axis detection masses 24 move centrifugally or centripetally towards the central axis of the microelectromechanical system gyroscope under the action of the Coriolis force.

[0077] The technical solutions in the embodiments of the present application described above have at least the following technical effects or advantages:

[0078] A microelectromechanical system gyroscope provided by an embodiment of the present invention has a more compact structure by arranging four fully symmetric driving mass block structures on a substrate. The four driving mass blocks are connected by coupling springs, which can ensure the vibration mode coupling of each driving mass block. And in the driving mode, the driving modes of adjacent two driving mass blocks are out of phase, and anti-phase vibration can be achieved in the detection modes of the X-axis, Y-axis, and Z-axis, which can achieve a mechanical differential effect, effectively reduce the influence of external vibration and impact and other factors on the gyro performance, improve the anti-vibration characteristics, and thus improve the detection accuracy and stability of the gyroscope.

[0079] In the specification provided herein, a large number of specific details are set forth. However, it is understood that embodiments of the present invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0080] Similarly, it should be understood that in order to streamline this disclosure and assist in understanding one or more of the various inventive aspects, in the foregoing description of exemplary embodiments of the present invention, various features of the present invention are sometimes grouped together in a single embodiment, figure, or description thereof. However, the disclosed method should not be construed as reflecting an intention that: the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of the present invention.

[0081] It should be noted that the above embodiments illustrate the present invention rather than limit the present invention, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention can be implemented by means of hardware including several different elements and by means of a suitably programmed computer. In the unit claims listing several means, several of these means may be embodied by one and the same item of hardware. The use of the words first, second, and third, etc. does not denote any order. These words may be interpreted as names.

Claims

1. A microelectromechanical system gyroscope, characterized in that, Comprising: A substrate; A mass block group, the mass block group includes four driving mass blocks, an anchor structure, a coupling elastic beam and a plurality of Z-axis detection mass blocks. The four driving mass blocks are suspended on the substrate through the anchor structure in a centrosymmetric manner, and the four driving mass blocks are connected by the coupling elastic beam; Each of the driving mass blocks is provided with the Z-axis detection mass block, and the Z-axis detection mass blocks on two adjacent driving mass blocks are connected by a first connecting beam; A driving component, arranged on the driving mass block, for driving the driving mass block to rotate in the X-Y axis plane; A detection component, arranged on the driving mass block, for detecting the position changes of each of the driving mass blocks and each of the Z-axis detection mass blocks, and converting the detected position changes into electrical signals for output; The microelectromechanical system gyroscope has a driving mode, an X-axis detection mode, a Y-axis detection mode and a Z-axis detection mode; In the driving mode, the driving modes of two adjacent driving mass blocks are out of phase. In the X-axis detection mode and the Y-axis detection mode, the vibration directions of two adjacent driving mass blocks are opposite. In the Z-axis detection mode, the plurality of Z-axis detection mass blocks translate in the X-Y axis plane in a clockwise or counterclockwise direction under the action of the Coriolis force, or the plurality of Z-axis detection mass blocks move centrifugally or centripetally towards the central axis of the microelectromechanical system gyroscope under the action of the Coriolis force; Wherein, a three-dimensional space coordinate system including an X-axis, a Y-axis and a Z-axis is established with the center point of the substrate as the origin. The X-axis and the Y-axis are both parallel to the end face of the substrate, and the Z-axis is perpendicular to the end face of the substrate; The mass block group includes a first driving mass block, a second driving mass block, a third driving mass block and a fourth driving mass block; The first driving mass block and the third driving mass block are axially symmetrically arranged with respect to the negative X-axis direction, and the second driving mass block and the fourth driving mass block are axially symmetrically arranged with respect to the positive X-axis direction; The first driving mass block and the second driving mass block are axially symmetrically arranged with respect to the positive Y-axis direction, and the third driving mass block and the fourth driving mass block are axially symmetrically arranged with respect to the positive Y-axis direction; The first driving mass block and the fourth driving mass block are centrosymmetrically arranged; The third driving mass block and the second driving mass block are centrosymmetrically arranged.

2. The microelectromechanical system gyroscope according to claim 1, wherein The Z-axis detection mass blocks on the first driving mass block and the second driving mass block are connected by the first connecting beam to form a first Z-axis detection mass block; The Z-axis detection mass blocks on the first driving mass block and the third driving mass block are connected by the first connecting beam to form a second Z-axis detection mass block; The Z-axis detection mass blocks on the third driving mass block and the fourth driving mass block are connected by the first connecting beam to form a third Z-axis detection mass block; The Z-axis detection mass blocks on the second driving mass block and the fourth driving mass block are connected by the first connecting beam to form a fourth Z-axis detection mass block; The first Z-axis detection mass block, the second Z-axis detection mass block, the third Z-axis detection mass block, and the fourth Z-axis detection mass block are all arranged in an H shape.

3. The microelectromechanical system gyroscope according to claim 2, wherein In the Z-axis detection mode, the first Z-axis detection mass block and the third Z-axis detection mass block translate in the X-Y axis plane in the clockwise direction under the action of the Coriolis force, and the second Z-axis detection mass block and the fourth Z-axis detection mass block translate in the X-Y axis plane in the counterclockwise direction under the action of the Coriolis force.

4. The microelectromechanical system gyroscope according to claim 1, wherein The detection component includes a first X-axis sensitive axis electrode provided on the first driving mass block and the second driving mass block, and a second X-axis sensitive axis electrode provided on the third driving mass block and the fourth driving mass block; The first X-axis sensitive axis electrode is used to detect the position change of the first driving mass block and the second driving mass block in the Z-axis direction, and convert the detected position change into an electrical signal for output; The second X-axis sensitive axis electrode is used to detect the position change of the third driving mass block and the fourth driving mass block in the Z-axis direction, and convert the detected position change into an electrical signal for output.

5. The microelectromechanical system gyroscope according to claim 4, wherein The polarities of the first X-axis sensitive axis electrode and the second X-axis sensitive axis electrode are opposite.

6. The microelectromechanical system gyroscope according to claim 1, wherein The detection component includes a first Y-axis sensitive axis electrode provided on the first driving mass block and the third driving mass block, and a second Y-axis sensitive axis electrode provided on the second driving mass block and the fourth driving mass block; The first Y-axis sensitive axis electrode is used to detect the position change of the first driving mass block and the third driving mass block in the Z-axis direction, and convert the detected position change into an electrical signal for output; The second Y-axis sensitive axis electrode is used to detect the position change of the second driving mass block and the fourth driving mass block in the Z-axis direction, and convert the detected position change into an electrical signal for output.

7. The microelectromechanical system gyroscope according to claim 6, characterized in that, The polarities of the first Y-axis sensitive axis electrode and the second Y-axis sensitive axis electrode are opposite.

8. The microelectromechanical system gyroscope according to claim 1, characterized in that, The detection component includes a Z-axis sensitive electrode. Each driving mass block is provided with the Z-axis sensitive electrode corresponding to the Z-axis detection mass block one by one. The Z-axis sensitive electrode and the Z-axis detection mass block form a variable-gap capacitance structure, which is used to detect the capacitance change caused by the movement of the Z-axis detection mass block, and convert the detected capacitance change into an electrical signal for output.

9. The microelectromechanical system gyroscope according to claim 1, characterized in that, The driving component includes two groups of driving electrodes, and each group of driving electrodes includes two driving electrodes with opposite polarities.

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