Flow-controlled dual-channel area electrochemical deposition additive manufacturing device and method

Abstract

The present invention relates to a flow-controlled dual-channel area electrochemical deposition additive manufacturing device and method, belonging to the field of 3D printing technology and electrochemical deposition. A peristaltic pump is mounted on a frame device and connected to an atomic force microscope cantilever via a hose. A nozzle device is mounted on the frame device via a threaded connection and connected to the atomic force microscope cantilever via a hose. A force-sensitive sensor is fixed on a z-axis moving device and bonded to the atomic force microscope cantilever via glue. A z-axis rotating device is fixed on a y-axis piezoelectric drive workbench. A CCD microscope is mounted on the frame device, and the y-axis piezoelectric drive workbench is mounted on an x-axis piezoelectric drive workbench via a threaded connection. The advantage is that a dense and complex structure with good surface morphology can be prepared. The tip of the atomic force microscope cantilever has a drainage effect on the electrolyte, thereby greatly ensuring the stability of the meniscus, with high sensitivity, stable working state, and fast response speed.

Description

Technical Field

[0001] The present invention belongs to the field of 3D printing technology and electrochemical deposition, and specifically relates to a flow-controlled dual-flow channel area electrochemical deposition additive manufacturing device and method. Background Art

[0002] 3D printing, also known as additive manufacturing, is a manufacturing technology based on the principles of discrete or cumulative material accumulation. It uses a computer to slice a 3D model of a part into a series of "slices" of a defined thickness. The 3D printer then creates each layer from the bottom up, ultimately stacking them to form a solid three-dimensional part. This manufacturing technique eliminates the need for traditional tools or molds, enabling the fabrication of complex structures that are difficult or impossible to manufacture using traditional processes. It also effectively simplifies the production process and shortens the manufacturing cycle. As a comprehensive application technology, 3D printing integrates cutting-edge expertise in digital modeling, electromechanical control, information technology, materials science, and chemistry, resulting in high technological content. However, most existing 3D printers are driven by stepper motors, which suffer from low control accuracy. Furthermore, the common meniscus-constrained electrodeposition technology only has three degrees of freedom (x, y, and z), resulting in a limited number of fabricated structures.

[0003] Meniscus-constrained electrodeposition technology is a type of electrochemical three-dimensional micro-deposition technology. It uses a stable micro-nanoscale meniscus-shaped electrolyte bridge formed in the extremely narrow gap between the ultrafine anode tip and the cathode substrate as an electrochemical reaction cell, and ultra-high-resolution metal deposition occurs on the cathode surface. It usually uses an ultrafine pipette containing an ultrafine anode to transport the electrolyte to the reaction area required for electrodeposition. Compared with other electrochemical three-dimensional micro-deposition technologies, meniscus-constrained electrodeposition technology has the advantages of high forming accuracy and good forming quality. However, traditional meniscus-constrained electrodeposition technology uses single glass tube deposition, which has the disadvantages of low current density, poor forming morphology, and low forming accuracy. In addition, due to the poor stability of the meniscus, the meniscus-constrained electrochemical deposition technology strictly requires that the growth rate of the deposit be consistent with the retreat speed of the glass tube. Although dual-channel area electrochemical deposition can effectively solve the above problems, the common dual-channel area electrochemical deposition technology uses a meniscus formed between two glass tubes. Due to the small nozzle diameter, the feed nozzle and the suction nozzle need to be precisely configured so that the tips are aligned. This high concentricity requirement is difficult to operate.

[0004] Fluid force microscopy (FluidFM) electrodeposition is a hybrid micro-metal additive manufacturing technology that combines atomic force microscopy and fluid force microscopy. In FluidFM electrodeposition, a hollow atomic force microscope cantilever is connected to a three-electrode electrochemical system as a working electrode, the other two electrodes of which are a silver quasi-reference electrode and a platinum counter electrode. The atomic force microscope cantilever is filled with an electrolyte containing the deposited metal ions, and the electrolyte flowing out of the FluidFM probe aperture is precisely controlled by a pressure controller. The hollow microcantilever in this structure can be used as both a microscope probe for the atomic force microscope and a mass transport vehicle for providing electrolyte, which allows metal deposition to occur very locally directly below the needle tip hole. However, this type of electrodeposition usually requires a rather complex optical path to detect the deflection of the atomic force microscope cantilever, which increases the difficulty of manufacturing the equipment. Summary of the Invention

[0005] The present invention provides a flow-controlled dual-channel area electrochemical deposition additive manufacturing device and method to solve the current problems of poor printing morphology, low precision, single forming structure and difficult to control meniscus stability.

[0006] The technical solution adopted by the present invention is to include a frame device, a peristaltic pump, a z-axis moving device, a nozzle device, a force-sensitive sensor, an atomic force microscope cantilever, a z-axis rotating device, a CCD microscope, a y-axis piezoelectric drive workbench and an x-axis piezoelectric drive workbench, wherein the peristaltic pump is installed on the frame device and is connected to the atomic force microscope cantilever through a hose, the z-axis moving device is fixed on the frame device, the nozzle device is installed on the frame device through a threaded connection and is connected to the atomic force microscope cantilever through a hose, the force-sensitive sensor is fixed on the z-axis moving device and is bonded to the atomic force microscope cantilever through glue, the atomic force microscope cantilever is fixed on the z-axis moving device, the z-axis rotating device is fixed on the y-axis piezoelectric drive workbench, the CCD microscope is installed on the frame device, the x-axis piezoelectric drive workbench is installed on the frame device through a threaded connection, and the y-axis piezoelectric drive workbench is installed on the x-axis piezoelectric drive workbench through a threaded connection.

[0007] The rack device includes a rack, a waste liquid storage tank and a CCD microscope fixing ring, wherein the waste liquid storage tank is fixed on the rack, the CCD microscope fixing ring is fixed on the rack, and the waste liquid storage tank is connected to the peristaltic pump through a hose.

[0008] The z-axis moving device includes a z-axis guide rail, a lead screw, a servo motor and a z-axis slider, wherein the z-axis slider includes a moving platform and a nut block, the nut block is fixed to the bottom of the moving platform, the nut block is used to be threadedly connected to the lead screw, the lead screw is installed in the z-axis guide rail, the z-axis slider is installed on the z-axis guide rail, the servo motor output shaft is fixedly connected to one end of the lead screw, the rotation of the servo motor drives the lead screw to rotate, and then drives the z-axis slider along the z-axis guide rail to realize z-axis movement.

[0009] The nozzle device includes a nozzle support 1, a nozzle and a nozzle support 2, wherein the nozzle support 1 and the nozzle support 2 are fixedly connected to the outside of the nozzle, and the nozzle support 1 and the nozzle support 2 are installed on the frame through a threaded connection, so that the nozzle is fixed on the frame.

[0010] The nozzle includes a servo motor, a pressure sensor, a counter electrode, a nozzle end cover, a nozzle housing, a threaded rod and a piston, wherein the counter electrode is integrated on the nozzle end cover, the nozzle end cover is threadedly connected to the nozzle housing, the threaded rod is threadedly connected to the nozzle end cover, the servo motor is fixedly connected to the threaded rod, the piston is fixedly connected to the threaded rod, and the pressure sensor is fixedly connected to the nozzle housing. The pressure sensor is used to detect the spraying pressure of the metal salt solution. When the spraying pressure of the metal salt solution is less than the set value, the servo motor controls the threaded rod to rotate to move the piston downward, thereby increasing the output pressure of the metal salt solution; when the spraying pressure of the metal salt solution is greater than the set value, the stepper motor controls the threaded rod to rotate to move the piston upward, thereby reducing the output pressure of the metal salt solution.

[0011] The force-sensitive sensor comprises a support rod and a quartz crystal tuning fork, wherein the quartz crystal tuning fork is fixed on the support rod.

[0012] The atomic force microscope cantilever includes a drainage tip, a flow channel 1 outlet, a flow channel 1, a flow channel 1 inlet, a flow channel 2 outlet, a flow channel 2 and a flow channel 2 inlet, wherein the flow channel 1 is respectively connected to the flow channel 1 outlet and the flow channel 1 inlet, the flow channel 2 is respectively connected to the flow channel 2 outlet and the flow channel 2 inlet, the flow channel 1 outlet and the flow channel 2 inlet are respectively located on both sides of the drainage tip, the flow channel 1 inlet is connected to the nozzle through a hose, and the flow channel 2 outlet is connected to the peristaltic pump through a hose;

[0013] The position of the piston in the nozzle is adjusted so that the salt solution in the nozzle flows through channel 1 at an appropriate pressure and flows out along the drainage tip, forming a liquid bridge between the outlet of channel 1 and the cathode base. At the same time, by controlling the flow rate of the peristaltic pump, part of the liquid in the liquid bridge flows along the other side of the drainage tip through channel 2 to the waste liquid storage tank. A stable meniscus is formed between the outlet of channel 1, the inlet of channel 2 and the cathode base, and the metal ions are locally reduced on the cathode base below the drainage tip. During the deposition process, the force-sensitive sensor is always in contact with the back of the atomic force microscope cantilever but does not generate pressure. The signal of the force-sensitive sensor remains unchanged. When the sediment grows to contact the drainage tip, the atomic force microscope cantilever will deflect, causing the quartz crystal tuning fork to be subjected to force, causing the signal to change. After the computer program detects the changed electrical signal, the servo motor will drive the threaded rod to rotate to move the piston upward to reduce the output pressure of the salt solution. At the same time, the flow rate of the peristaltic pump is controlled to reduce the salt solution under the drainage tip, causing the deposition process to be interrupted.

[0014] The z-axis rotation device includes a base, a piezoelectric ceramic motor, a printing platform, a ball bearing, a position detection module and a fixed ring, wherein the piezoelectric ceramic motor is connected to the base through a thread, the position detection module is connected to the base through a thread, the outer ring of the rolling bearing is fastened to the inner side of the fixed ring, the fixed ring is fixed to the center of the base, and the printing platform is fastened to the inner ring of the ball bearing;

[0015] The printing platform includes a transparent shell, a reference electrode, a cathode substrate, a friction belt and a rotating shaft, wherein the transparent shell is fixed above the cathode substrate, the reference electrode is fixed on the inner wall of the transparent shell, the friction belt is fixed on the outer wall of the transparent shell, the rotating shaft is fixed at the bottom center of the transparent shell, and the rotating shaft is tightly connected to the inner ring of the ball bearing. The reference electrode, the cathode substrate and the counter electrode form a three-electrode electrochemical cell, the counter electrode is used to connect to the positive electrode of the power supply, and the cathode substrate is used to connect to the negative electrode of the power supply;

[0016] The piezoelectric ceramic motor includes a limit spring, a friction plate, a thin rectangular piezoelectric ceramic plate, a resonant inductor, a housing, and a compression spring, wherein the thin rectangular piezoelectric ceramic plate is bound with electrodes A, B, A1, and B1, wherein electrodes A and A1, and electrodes B and B1 are connected by wires, respectively. The friction plate is fixed to the thin rectangular piezoelectric ceramic plate, the resonant inductor is fixed to the housing and connected to the thin rectangular piezoelectric ceramic plate by wires, the limit spring fixes the thin rectangular piezoelectric ceramic plate to the housing, and the compression spring ensures that the friction plate is in tight contact with the acted component;

[0017] After applying alternating voltage to the piezoelectric ceramic motor, the friction plate will produce a circular or elliptical motion trajectory, driving the friction belt to move through friction. The piezoelectric ceramic motor can achieve multi-stage speed regulation. Applying a large voltage in the coarse adjustment stage results in fast movement speed and a large working stroke, while applying a small voltage in the fine adjustment stage results in high control accuracy.

[0018] The Y-axis piezoelectric drive workbench includes a guide rail 1, a piezoelectric ceramic motor, a friction belt, a slider 1 and a position detection module, wherein the piezoelectric ceramic motor is connected to the guide rail 1 by a thread, the friction belt is fixed on the slider 1, the slider 1 is placed on the guide rail 1, the position detection module is connected to the guide rail 1 by a thread, and the guide rail 1 is installed on the slider 2 by a threaded connection.

[0019] The x-axis piezoelectric drive workbench includes a second guide rail, a piezoelectric ceramic motor, a friction belt, a second slider and a position detection module, wherein the second guide rail is installed on the frame through a threaded connection, the piezoelectric ceramic motor is installed on the second guide rail through a threaded connection, the friction belt is fixed on the second slider, the second slider is placed on the second guide rail, and the position detection module is installed on the second guide rail through a threaded connection.

[0020] A method for manufacturing an electrochemical deposition additive manufacturing device using a flow-controlled dual-channel region includes the following steps:

[0021] (1) Preparation of electrodeposition metal salt solution: The preparation material is a salt solution of a single metal ion, powdered sulfate is dissolved in deionized water, and an appropriate amount of concentrated sulfuric acid is added to stabilize the pH value of the solution to obtain the desired electrodeposition metal salt solution;

[0022] (2) Model data conversion: Use Catia software to build a three-dimensional model of the part, slice the layers and process them into an STL file. By controlling the nozzle device, output voltage and motion platform speed, the part is deposited layer by layer according to the scanning path.

[0023] (3) Injection of metal salt solution: remove the nozzle end cover of the nozzle device, inject the metal salt solution into the nozzle cavity, and install the nozzle end cover;

[0024] (4) Printing of microscopic metal parts: applying a pulse voltage to the servo motor of the z-axis moving device to move the cantilever of the atomic force microscope downward, while observing with a CCD microscope, so that the drainage tip gradually approaches the cathode base, so that the distance between the two is reduced to a level that can generate atomic force; turning on the power supply, applying voltage between the counter electrode and the cathode base, adjusting the pressure sensor of the nozzle device so that the salt solution in the nozzle flows through channel 1 at a suitable pressure, flows out along the drainage tip, and forms a liquid bridge between the outlet of channel 1 and the cathode base. At the same time, by controlling the flow rate of the peristaltic pump, part of the liquid in the liquid bridge flows along the other side of the drainage tip through channel 2 to the waste liquid storage tank. The salt solution between the outlet of channel 1, the inlet of channel 2 and the cathode base forms a stable meniscus. The metal ions are locally reduced on the cathode substrate below the drainage tip. During the deposition process, the force-sensitive sensor always contacts the back of the atomic force microscope cantilever but does not generate pressure. The signal from the force-sensitive sensor remains unchanged. When the sediment grows to contact the drainage tip, the atomic force microscope cantilever deflects, causing the quartz crystal tuning fork to be stressed and the signal to change. After detecting the changed signal, the computer program controls the piston position of the nozzle device and the flow rate of the peristaltic pump to reduce the salt solution under the drainage tip, causing the deposition process to be interrupted. Subsequently, by adjusting the z-axis movement device, z-axis rotation device, x-axis piezoelectric drive workbench, and y-axis piezoelectric drive workbench, the atomic force microscope cantilever is moved to the next position for deposition, achieving voxel-by-voxel deposition. The above process is repeated to complete the deposition of the designed structure.

[0025] (5) Cleaning and drying of parts: After the deposition is completed, turn off the power supply, move the z-axis moving device to separate the AFM cantilever drainage tip from the cathode substrate, remove the cathode substrate from the solution with tweezers, clean the parts and dry them.

[0026] The advantages of the present invention are:

[0027] (1) By combining a microchannel atomic force microscope cantilever with electrochemical technology, the atomic force microscope cantilever was modified to solve the problem of poor alignment of dual flow channels at the micro-nano scale. At the same time, the AFM drainage tip has a drainage effect on the electrolyte, thereby greatly ensuring the stability of the meniscus.

[0028] (2) A dual-channel structure consisting of a liquid inlet channel and a liquid suction channel was developed. The meniscus formed by the dual-channel has a higher current density than that of a single-channel, and a dense and complex structure with good surface morphology can be prepared. In addition, the local dynamic flow of the meniscus can be achieved by controlling the pressure of channel one and the flow rate of channel two.

[0029] (3) The present invention adopts a piezoelectric ceramic motor, which can realize two-stage precision positioning control. In the coarse adjustment stage, a large voltage is applied to achieve a large working stroke and high efficiency; in the fine adjustment stage, a small voltage is applied to achieve high control accuracy. At the same time, a position detection module is provided to detect the position and transmit it back to the computer for comparison with the target position, forming a control closed loop and improving the control accuracy.

[0030] (4) The present invention develops a four-degree-of-freedom printing mode, which allows more flexible printing trajectory design and richer mechanism design, expanding the range of printable complex structures.

[0031] (5) The present invention uses a force-sensitive sensor to detect the deflection of the atomic force microscope cantilever, which has the advantages of high sensitivity, stable working state, and fast response speed, and avoids the complexity of the light path arrangement of the commonly used optical detection system.

[0032] (6) The present invention is used for the manufacture of micro-nano-scale metal parts and has potential in the fields of precision machinery manufacturing such as aerospace, medical treatment, and electronics. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a structural schematic diagram of the present invention;

[0034] Figure 2 It is a structural schematic diagram of the rack device of the present invention;

[0035] Figure 3 It is a structural schematic diagram of the z-axis moving device of the present invention;

[0036] Figure 4 It is a structural schematic diagram of the z-axis slider of the present invention;

[0037] Figure 5 It is a structural schematic diagram of the nozzle device of the present invention;

[0038] Figure 6 It is a structural schematic diagram of the nozzle of the present invention;

[0039] Figure 7 Schematic diagram of the internal structure of the nozzle of the present invention;

[0040] Figure 8 It is a structural schematic diagram of the force sensitive sensor of the present invention;

[0041] Figure 9 It is a schematic structural diagram of the atomic force microscope cantilever of the present invention;

[0042] Figure 10 Schematic diagram of the internal structure of the atomic force microscope cantilever of the present invention;

[0043] Figure 11 It is a schematic structural diagram of the z-axis rotation device of the present invention;

[0044] Figure 12 It is a structural schematic diagram of the printing platform of the present invention;

[0045] Figure 13 Schematic diagram of the structure of the piezoelectric ceramic motor of the present invention;

[0046] Figure 14 It is a structural schematic diagram of the y-axis piezoelectric drive workbench of the present invention;

[0047] Figure 15 It is a structural schematic diagram of the x-axis piezoelectric drive workbench of the present invention. DETAILED DESCRIPTION

[0048] See also Figure 1 , including a frame device 1, a peristaltic pump 2, a z-axis moving device 3, a nozzle device 4, a force-sensitive sensor 5, an atomic force microscope cantilever 6, a z-axis rotation device 7, a CCD microscope 8, a y-axis piezoelectric drive workbench 9 and an x-axis piezoelectric drive workbench 10, wherein the peristaltic pump 2 is installed on the frame device 1 and is connected to the atomic force microscope cantilever 6 through a hose, the z-axis moving device 3 is fixed on the frame device 1, the nozzle device 4 is installed on the frame device 1 through a threaded connection and is connected to the atomic force microscope cantilever 6 through a hose, the force-sensitive sensor 5 is fixed on the z-axis moving device 3 and is bonded to the atomic force microscope cantilever 6 through glue, the atomic force microscope cantilever 6 is fixed on the z-axis moving device 3, the z-axis rotation device 7 is fixed on the y-axis piezoelectric drive workbench 9, the CCD microscope 8 is installed on the frame device 1, the x-axis piezoelectric drive workbench 10 is installed on the frame device 1 through a threaded connection, and the y-axis piezoelectric drive workbench 9 is installed on the x-axis piezoelectric drive workbench 10 through a threaded connection.

[0049] See also Figure 2 The rack device includes a rack 101, a waste liquid storage tank 102 and a CCD microscope fixing ring 103, wherein the waste liquid storage tank 102 is fixed on the rack 101, the CCD microscope fixing ring 103 is fixed on the rack 101, and the waste liquid storage tank 102 is connected to the peristaltic pump 2 through a hose.

[0050] See also Figure 3 、 4The z-axis moving device 3 includes a z-axis guide rail 301, a screw 302, a servo motor 303 and a z-axis slider 304, wherein the z-axis slider 304 includes a moving platform 30401 and a nut block 30402, the nut block 30402 is fixed at the bottom of the moving platform 30401, the nut block 30402 is used to be threadedly connected with the screw 302, the screw 302 is installed in the z-axis guide rail 301, the z-axis slider 304 is installed on the z-axis guide rail 301, and the output shaft of the servo motor 303 is fixedly connected to one end of the screw 302; the rotation of the servo motor 303 drives the screw 302 to rotate, and then drives the z-axis slider 304 to realize z-axis movement along the z-axis guide rail 301.

[0051] See also Figure 5 The nozzle device 4 includes a nozzle support 1 401, a nozzle 402 and a nozzle support 2 403, wherein the nozzle support 1 401 and the nozzle support 2 403 are fixedly connected to the outside of the nozzle 402, and the nozzle support 1 401 and the nozzle support 2 403 are installed on the frame 101 through a threaded connection, so that the nozzle 402 is fixed on the frame 101.

[0052] See also Figure 6 、 7 The nozzle 402 includes a servo motor 40201, a pressure sensor 40202, a counter electrode 40203, a nozzle end cover 40204, a nozzle housing 40205, a threaded rod 40206 and a piston 40207, wherein the counter electrode 40203 is integrated on the nozzle end cover 40204, the nozzle end cover 40204 is threadedly connected to the nozzle housing 40205, the threaded rod 40206 is threadedly connected to the nozzle end cover 40204, the servo motor 40201 is fixedly connected to the threaded rod 40206, and the piston 40207 is fixedly connected to the threaded rod 40207. 6 is fixedly connected, and the pressure sensor 40202 is fixedly connected to the nozzle housing 40205. The pressure sensor 40202 is used to detect the spraying pressure of the metal salt solution. When the spraying pressure of the metal salt solution is less than the set value, the servo motor 40201 controls the threaded rod 40206 to rotate so that the piston 40207 moves downward, thereby increasing the output pressure of the metal salt solution; when the spraying pressure of the metal salt solution is greater than the set value, the stepper motor 40201 controls the threaded rod 40206 to rotate so that the piston 40207 moves upward, thereby reducing the output pressure of the metal salt solution.

[0053] See also Figure 8 The force sensitive sensor includes a support rod 501 and a quartz crystal tuning fork 502 , wherein the quartz crystal tuning fork 502 is fixed on the support rod 501 .

[0054] See also Figure 9 、 10The atomic force microscope cantilever 6 includes a drainage tip 601, a flow channel outlet 602, a flow channel 1 603, a flow channel inlet 604, a flow channel 2 outlet 605, a flow channel 2 606 and a flow channel 2 inlet 607, wherein the flow channel 1 603 is respectively connected to the flow channel 1 outlet 602 and the flow channel 1 inlet 604, the flow channel 2 606 is respectively connected to the flow channel 2 outlet 605 and the flow channel 2 inlet 607, the flow channel 1 outlet 602 and the flow channel 2 inlet 607 are respectively located on both sides of the drainage tip 601, the flow channel 1 inlet 604 is connected to the nozzle 402 through a hose, and the flow channel 2 outlet 605 is connected to the peristaltic pump 2 through a hose;

[0055] The position of the piston 40207 in the nozzle is adjusted so that the salt solution in the nozzle 402 flows through the flow channel 1 603 at a suitable pressure and flows out along the drainage tip 601, forming a liquid bridge between the flow channel 1 outlet 602 and the cathode base 70303. At the same time, by controlling the flow rate of the peristaltic pump 2, part of the liquid in the liquid bridge flows along the other side of the drainage tip 601 through the flow channel 2 606 to the waste liquid storage tank 102. A stable meniscus is formed between the flow channel 1 outlet 602, the flow channel 2 inlet 607 and the cathode base 70303, and the metal ions are also locally on the cathode base 70303 below the drainage tip 601. Original; During the deposition process, the force-sensitive sensor 5 is always in contact with the back of the atomic force microscope cantilever 6 but does not generate pressure. The signal of the force-sensitive sensor 5 remains unchanged. When the sediment grows to contact the drainage tip 601, the atomic force microscope cantilever 6 will deflect, causing the quartz crystal tuning fork 502 to be subjected to force, causing the signal to change. After the computer program detects the changed electrical signal, the servo motor 40201 will drive the threaded rod 40206 to rotate, causing the piston 40207 to move upward to reduce the output pressure of the salt solution. At the same time, the flow rate of the peristaltic pump 2 is controlled to reduce the salt solution under the drainage tip 601, resulting in the interruption of the deposition process.

[0056] See also Figure 11 The z-axis rotation device 7 includes a base 701, a piezoelectric ceramic motor 702, a printing platform 703, a ball bearing 704, a position detection module 705 and a fixing ring 706, wherein the piezoelectric ceramic motor 702 is connected to the base 701 by a thread, the position detection module 705 is connected to the base 701 by a thread, the outer ring of the rolling bearing 704 is fastened to the inner side of the fixing ring 706, the fixing ring 706 is fixed to the center of the base 701, and the printing platform 703 is fastened to the inner ring of the ball bearing 704;

[0057] See also Figure 12The printing platform 703 includes a transparent shell 70301, a reference electrode 70302, a cathode base 70303, a friction belt 70304 and a rotating shaft 70305, wherein the transparent shell 70301 is fixed above the cathode base 70303, the reference electrode 70302 is fixed on the inner wall of the transparent shell 70301, the friction belt 70304 is fixed on the outer wall of the transparent shell 70301, the rotating shaft 70305 is fixed at the bottom center of the transparent shell 70301, and the rotating shaft 70305 is tightly connected to the inner ring of the ball bearing 704. The reference electrode 70302, the cathode base 70303 and the counter electrode 40203 constitute a three-electrode electrochemical cell, the counter electrode 40203 is used to connect to the positive pole of the power supply, and the cathode base 70303 is used to connect to the negative pole of the power supply.

[0058] See also Figure 13 The piezoelectric ceramic motor 702 includes a limit spring 70201, a friction plate 70202, a thin rectangular piezoelectric ceramic plate 70203, a resonant inductor 70204, a housing 70205, and a compression spring 70206. The thin rectangular piezoelectric ceramic plate 70203 is bound with electrodes A, B, A1, and B1, wherein electrodes A and A1, and electrodes B and B1 are connected by wires, respectively. The friction plate 70202 is fixed to the thin rectangular piezoelectric ceramic plate 70203. The resonant inductor 70204 is fixed to the housing 70205 and connected to the thin rectangular piezoelectric ceramic plate 70203 via wires. The limit spring 70201 fixes the thin rectangular piezoelectric ceramic plate 70203 to the housing 70205. The compression spring 70206 ensures that the friction plate 70202 is in tight contact with the component being acted upon.

[0059] After applying an alternating voltage to the piezoelectric ceramic motor 702, the friction plate 70202 will produce a circular or elliptical motion trajectory, driving the friction belt 70304 to move through friction. The piezoelectric ceramic motor 702 can achieve multi-stage speed regulation. In the coarse adjustment stage, applying a large voltage will result in fast movement speed and a large working stroke. In the fine adjustment stage, applying a small voltage will result in high control accuracy.

[0060] See also Figure 14 The y-axis piezoelectric drive workbench 9 includes a guide rail 901, a piezoelectric ceramic motor 902, a friction belt 903, a slider 904 and a position detection module 905, wherein the piezoelectric ceramic motor 902 is connected to the guide rail 901 through a thread, the friction belt 903 is fixed on the slider 904, the slider 904 is placed on the guide rail 901, the position detection module 905 is connected to the guide rail 901 through a thread, and the guide rail 901 is installed on the slider 1004 through a threaded connection.

[0061] Piezoelectric ceramic motor 902 applies friction to friction belt 903, causing slider 1 904 to slide on guide rail 1 901, achieving y-axis movement. Position detection module 905 detects the position of slider 1 904 and transmits it back to the computer for comparison with the target position, forming a closed control loop and improving control accuracy.

[0062] See also Figure 15 The x-axis piezoelectric drive workbench 10 includes a guide rail 1001, a piezoelectric ceramic motor 1002, a friction belt 1003, a slider 1004 and a position detection module 1005, wherein the guide rail 1001 is installed on the frame 101 through a threaded connection, the piezoelectric ceramic motor 1002 is installed on the guide rail 1001 through a threaded connection, the friction belt 1003 is fixed on the slider 1004, the slider 1004 is placed on the guide rail 1001, and the position detection module 1005 is installed on the guide rail 1001 through a threaded connection.

[0063] Piezoelectric ceramic motor 1002 applies friction to friction belt 1003, causing slider 2 1004 to slide on guide rail 2 1001, achieving x-axis movement. Position detection module 1005 detects the position of slider 2 1004 and transmits it back to the computer for comparison with the target position, forming a closed control loop and improving control accuracy.

[0064] A method for manufacturing an electrochemical deposition additive manufacturing device using a flow-controlled dual-channel region includes the following steps:

[0065] (1) Preparation of electrodeposition metal salt solution: The preparation material is a salt solution of a single metal ion, powdered sulfate is dissolved in deionized water, and an appropriate amount of concentrated sulfuric acid is added to stabilize the pH value of the solution to obtain the desired electrodeposition metal salt solution;

[0066] (2) Model data conversion: Use Catia software to build a three-dimensional model of the part, slice the layers to form an STL format file, and deposit the part layer by layer according to the scanning path by controlling the nozzle device 4, the output voltage and the speed of the motion platform;

[0067] (3) Injection of the metal salt solution: Remove the nozzle end cover 40204 of the nozzle device, inject the metal salt solution into the cavity of the nozzle 402, and install the nozzle end cover 40204;

[0068] (4) Printing of microscopic metal parts: a pulse voltage is applied to the servo motor 303 of the z-axis moving device to move the atomic force microscope cantilever 6 downward, and at the same time, observation is performed using the CCD microscope 8, so that the drainage tip 601 gradually approaches the cathode substrate 70303, so that the distance between the two is reduced to a level where atomic force can be generated; the power is turned on, a voltage is applied between the counter electrode 40203 and the cathode substrate 70303, and the pressure sensor 40201 of the nozzle device is adjusted so that the salt solution in the nozzle 402 flows through the flow channel 1 603 at a suitable pressure, flows out along the drainage tip 601, and forms a liquid bridge between the flow channel 1 outlet 602 and the cathode substrate 70303. At the same time, by controlling the flow rate of the peristaltic pump 2, part of the liquid in the liquid bridge flows along the other side of the drainage tip 601 through the flow channel 2 606 to the waste liquid storage tank 102, the flow channel 1 outlet 602, the flow channel 2 inlet 607 and the cathode substrate 7030 3 forms a stable meniscus, and the metal ions are locally reduced at the cathode substrate 70303 below the drainage tip 601; during the deposition process, the force-sensitive sensor 5 is always in contact with the back of the atomic force microscope cantilever 6 but does not generate pressure, and the signal of the force-sensitive sensor 5 remains unchanged. When the sediment grows to contact the drainage tip 601, the atomic force microscope cantilever 6 will deflect, causing the quartz crystal tuning fork 502 to be subjected to force, and the signal changes. After the computer program detects the changed signal, it controls the position of the piston 40207 of the nozzle device and the flow rate of the peristaltic pump 2 to reduce the salt solution under the drainage tip 601, resulting in an interruption in the deposition process; thereafter, by adjusting the z-axis moving device 3, the z-axis rotating device 7, the x-axis piezoelectric drive workbench 10, and the y-axis piezoelectric drive workbench 9, the atomic force microscope cantilever 6 is moved to the next position for deposition, realizing voxel-by-voxel deposition, and the above process is repeated to complete the deposition of the designed structure;

[0069] (5) Cleaning and drying of parts: After the deposition is completed, turn off the power supply, move the z-axis moving device 3 to separate the AFM cantilever drainage tip 601 from the cathode substrate 70303, remove the cathode substrate 70303 from the solution with tweezers, clean the parts and dry them.

Claims

1. A flow-controlled dual-channel electrochemical deposition additive manufacturing device, characterized by: The apparatus comprises a frame device, a peristaltic pump, a z-axis moving device, a nozzle device, a force-sensitive sensor, an atomic force microscope cantilever, a z-axis rotating device, a CCD microscope, a y-axis piezoelectric drive workbench, and an x-axis piezoelectric drive workbench, wherein the peristaltic pump is mounted on the frame device and connected to the atomic force microscope cantilever via a hose, the z-axis moving device is fixed on the frame device, the nozzle device is mounted on the frame device via a threaded connection and connected to the atomic force microscope cantilever via a hose, the force-sensitive sensor is fixed on the z-axis moving device and bonded to the atomic force microscope cantilever via glue, the atomic force microscope cantilever is fixed on the z-axis moving device, the z-axis rotating device is fixed on the y-axis piezoelectric drive workbench, the CCD microscope is mounted on the frame device, the x-axis piezoelectric drive workbench is mounted on the frame device via a threaded connection, and the y-axis piezoelectric drive workbench is mounted on the x-axis piezoelectric drive workbench via a threaded connection; The atomic force microscope cantilever includes a drainage tip, a flow channel 1 outlet, a flow channel 1, a flow channel 1 inlet, a flow channel 2 outlet, a flow channel 2 and a flow channel 2 inlet, wherein the flow channel 1 is respectively connected to the flow channel 1 outlet and the flow channel 1 inlet, the flow channel 2 is respectively connected to the flow channel 2 outlet and the flow channel 2 inlet, the flow channel 1 outlet and the flow channel 2 inlet are respectively located on both sides of the drainage tip, the flow channel 1 inlet is connected to the nozzle through a hose, and the flow channel 2 outlet is connected to the peristaltic pump through a hose; The position of the piston in the nozzle is adjusted so that the salt solution in the nozzle flows through channel 1 at an appropriate pressure and flows out along the drainage tip, forming a liquid bridge between the outlet of channel 1 and the cathode substrate. At the same time, by controlling the flow rate of the peristaltic pump, part of the liquid in the liquid bridge flows along the other side of the drainage tip through channel 2 to the waste liquid storage tank. A stable meniscus is formed between the outlet of channel 1, the inlet of channel 2 and the cathode substrate, and the metal ions are locally reduced on the cathode substrate below the drainage tip. During the deposition process, the force-sensitive sensor is always in contact with the back of the atomic force microscope cantilever but does not generate pressure. The signal of the force-sensitive sensor remains unchanged. When the sediment grows to contact the drainage tip, the atomic force microscope cantilever will deflect, causing the quartz crystal tuning fork to be subjected to force, causing the signal to change. After the computer program detects the changed electrical signal, the servo motor will drive the threaded rod to rotate to move the piston upward to reduce the output pressure of the salt solution. At the same time, the flow rate of the peristaltic pump is controlled to reduce the salt solution under the drainage tip, resulting in an interruption in the deposition process. The z-axis rotation device includes a base, a piezoelectric ceramic motor, a printing platform, a ball bearing, a position detection module and a fixed ring, wherein the piezoelectric ceramic motor is connected to the base through a thread, the position detection module is connected to the base through a thread, the outer ring of the rolling bearing is fastened to the inner side of the fixed ring, the fixed ring is fixed to the center of the base, and the printing platform is fastened to the inner ring of the ball bearing; The printing platform includes a transparent shell, a reference electrode, a cathode substrate, a friction belt and a rotating shaft, wherein the transparent shell is fixed above the cathode substrate, the reference electrode is fixed on the inner wall of the transparent shell, the friction belt is fixed on the outer wall of the transparent shell, the rotating shaft is fixed at the bottom center of the transparent shell, and the rotating shaft is tightly connected to the inner ring of the ball bearing. The reference electrode, the cathode substrate and the counter electrode form a three-electrode electrochemical cell, the counter electrode is used to connect to the positive electrode of the power supply, and the cathode substrate is used to connect to the negative electrode of the power supply; The piezoelectric ceramic motor includes a limit spring, a friction plate, a thin rectangular piezoelectric ceramic plate, a resonant inductor, a housing, and a compression spring, wherein the thin rectangular piezoelectric ceramic plate is bound with electrodes A, B, A1, and B1, wherein electrodes A and A1, and electrodes B and B1 are connected by wires, respectively. The friction plate is fixed to the thin rectangular piezoelectric ceramic plate, the resonant inductor is fixed to the housing and connected to the thin rectangular piezoelectric ceramic plate by wires, the limit spring fixes the thin rectangular piezoelectric ceramic plate to the housing, and the compression spring ensures that the friction plate is in tight contact with the acted component; After applying alternating voltage to the piezoelectric ceramic motor, the friction plate will produce a circular or elliptical motion trajectory, driving the friction belt to move through friction. The piezoelectric ceramic motor can achieve multi-stage speed regulation. Applying a large voltage in the coarse adjustment stage results in fast movement speed and a large working stroke, while applying a small voltage in the fine adjustment stage results in high control accuracy.

2. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The rack device includes a rack, a waste liquid storage tank and a CCD microscope fixing ring, wherein the waste liquid storage tank is fixed on the rack, the CCD microscope fixing ring is fixed on the rack, and the waste liquid storage tank is connected to the peristaltic pump through a hose.

3. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The z-axis moving device includes a z-axis guide rail, a lead screw, a servo motor and a z-axis slider, wherein the z-axis slider includes a moving platform and a nut block, the nut block is fixed to the bottom of the moving platform, the nut block is used to be threadedly connected to the lead screw, the lead screw is installed in the z-axis guide rail, the z-axis slider is installed on the z-axis guide rail, the servo motor output shaft is fixedly connected to one end of the lead screw, the rotation of the servo motor drives the lead screw to rotate, and then drives the z-axis slider along the z-axis guide rail to realize z-axis movement.

4. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The nozzle device includes a nozzle support 1, a nozzle and a nozzle support 2, wherein the nozzle support 1 and the nozzle support 2 are fixedly connected to the outside of the nozzle, and the nozzle support 1 and the nozzle support 2 are installed on the frame through a threaded connection, so that the nozzle is fixed on the frame; The nozzle includes a servo motor, a pressure sensor, a counter electrode, a nozzle end cover, a nozzle housing, a threaded rod and a piston, wherein the counter electrode is integrated on the nozzle end cover, the nozzle end cover is threadedly connected to the nozzle housing, the threaded rod is threadedly connected to the nozzle end cover, the servo motor is fixedly connected to the threaded rod, the piston is fixedly connected to the threaded rod, and the pressure sensor is fixedly connected to the nozzle housing. The pressure sensor is used to detect the spraying pressure of the metal salt solution. When the spraying pressure of the metal salt solution is less than the set value, the servo motor controls the threaded rod to rotate to move the piston downward, thereby increasing the output pressure of the metal salt solution; when the spraying pressure of the metal salt solution is greater than the set value, the stepper motor controls the threaded rod to rotate to move the piston upward, thereby reducing the output pressure of the metal salt solution.

5. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The force-sensitive sensor comprises a support rod and a quartz crystal tuning fork, wherein the quartz crystal tuning fork is fixed on the support rod.

6. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The Y-axis piezoelectric drive workbench includes a guide rail 1, a piezoelectric ceramic motor, a friction belt, a slider 1 and a position detection module, wherein the piezoelectric ceramic motor is connected to the guide rail 1 by a thread, the friction belt is fixed on the slider 1, the slider 1 is placed on the guide rail 1, the position detection module is connected to the guide rail 1 by a thread, and the guide rail 1 is installed on the slider 2 by a threaded connection.

7. The flow-controlled dual-channel electrochemical deposition additive manufacturing device according to claim 1, characterized in that: The x-axis piezoelectric drive workbench includes a second guide rail, a piezoelectric ceramic motor, a friction belt, a second slider and a position detection module, wherein the second guide rail is installed on the frame through a threaded connection, the piezoelectric ceramic motor is installed on the second guide rail through a threaded connection, the friction belt is fixed on the second slider, the second slider is placed on the second guide rail, and the position detection module is installed on the second guide rail through a threaded connection.

8. A method for manufacturing a flow-controlled dual-channel electrochemical deposition additive manufacturing device according to any one of claims 1 to 7, characterized in that: The following steps are involved: (1) Preparation of electrodeposition metal salt solution: The preparation material is a salt solution of a single metal ion, powdered sulfate is dissolved in deionized water, and an appropriate amount of concentrated sulfuric acid is added to stabilize the pH value of the solution to obtain the desired electrodeposition metal salt solution; (2) Model data conversion: Use Catia software to build a three-dimensional model of the part, slice the layers to form an STL format file, and deposit the part layer by layer according to the scanning path by controlling the nozzle device, output voltage and motion platform speed; (3) Injection of metal salt solution: remove the nozzle end cover of the nozzle device, inject the metal salt solution into the nozzle cavity, and install the nozzle end cover; (4) Printing of microscopic metal parts: Apply pulse voltage to the servo motor of the z-axis moving device to move the atomic force microscope cantilever downward, and at the same time observe with a CCD microscope, so that the drainage tip gradually approaches the cathode base, so that the distance between the two is reduced to a level that can generate atomic force; turn on the power, apply voltage between the counter electrode and the cathode base, adjust the pressure sensor of the nozzle device so that the salt solution in the nozzle flows through channel 1 at a suitable pressure, flows out along the drainage tip, and forms a liquid bridge between the outlet of channel 1 and the cathode base. At the same time, by controlling the flow rate of the peristaltic pump, part of the liquid in the liquid bridge flows along the other side of the drainage tip through channel 2 to the waste liquid storage tank, and the salt solution between the outlet of channel 1, the inlet of channel 2 and the cathode base forms a stable meniscus. The metal ions are locally reduced on the cathode substrate below the drainage tip. During the deposition process, the force-sensitive sensor always contacts the back of the atomic force microscope cantilever but does not generate pressure. The signal from the force-sensitive sensor remains unchanged. When the sediment grows to contact the drainage tip, the atomic force microscope cantilever deflects, causing the quartz crystal tuning fork to be stressed and the signal to change. After detecting the changed signal, the computer program controls the piston position of the nozzle device and the flow rate of the peristaltic pump to reduce the salt solution under the drainage tip, causing the deposition process to be interrupted. Subsequently, by adjusting the z-axis movement device, z-axis rotation device, x-axis piezoelectric drive workbench, and y-axis piezoelectric drive workbench, the atomic force microscope cantilever is moved to the next position for deposition, achieving voxel-by-voxel deposition. The above process is repeated to complete the deposition of the designed structure. (5) Cleaning and drying of parts: After the deposition is completed, turn off the power supply, move the z-axis moving device to separate the AFM cantilever drainage tip from the cathode substrate, remove the cathode substrate from the solution with tweezers, clean the parts and dry them.

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