A method for detecting broken edges of a crystal rod in a process of equalizing diameters, a storage medium and a crystal pulling device

Abstract

The present application discloses a method for detecting broken edges of a crystal rod in a process of equalizing diameters, a storage medium and a crystal pulling device, wherein the method for detecting broken edges of a crystal rod in a process of equalizing diameters comprises: obtaining detection parameters of the crystal rod in the process of equalizing diameters; when the detection parameters of the crystal rod reach M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i ; Determine the average convexity value A of the first ridge 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i , the average convexity value A of the fourth ridgeline 4i Is there a value less than or equal to the preset alarm bump value B? i The present application determines the ridgeline convexity value of the crystal rod in the equal diameter stage within a preset verification length or a preset verification time, which can reduce the measurement error caused by the shrinkage or expansion of the crystal rod, reduce the occurrence of false alarms, and help to accurately control the crystal growth process.

Description

Technical Field

[0001] The present application belongs to the field of Czochralski crystal pulling, and specifically, relates to a method for detecting broken edges of a crystal rod in an equal diameter process, a storage medium, and a crystal pulling device. Background Art

[0002] During the production process of single crystal silicon rods by the Czochralski method, the crystal rod slowly rotates at the liquid surface and grows into a cylindrical solid crystal rod. During the process of equal diameter growth of the crystal rod, a vertical ridge is formed on its side surface every 90 degrees (i.e., four ridges for each silicon rod). Some factors in the production process (such as substandard environmental hygiene, mismatched pulling speed of the crystal rod, etc.) will cause the ridges to disappear. This disappearance of ridges is called broken ridges or broken lines in the industry, and the part that continues to grow after the broken ridges is unqualified. Therefore, if the broken ridges are not discovered in time and production is stopped, the crystal rod will continue to grow into polycrystalline waste without ridges, resulting in cost waste.

[0003] At present, the detection method of edge breakage is to determine whether the edge exists by detecting the size of the convex points of the four edge lines in the welding aperture. For example, Chinese invention patent ZL 201210290380.8 discloses "a non-contact silicon rod crystal line measurement method for a single crystal furnace, when a crystal line characteristic pixel is scanned in a certain row, the position of the rightmost pixel point D of the crystal line characteristic pixel and the position of the pixel point C in the same row as the pixel point D and on the aperture adjacent to the pixel point D are recorded; the position of the pixel point D described in S5 is taken as the highest point, and the position of the pixel point C is taken as the lowest point, and the crystal line plane height x from the pixel point C to the pixel point D is calculated; by presetting the warning value of x, it is determined whether the crystal rod has broken edges.

[0004] This judgment method only judges the edge line of the equal diameter process through an early warning value, and cannot eliminate the measurement error caused by the shrinkage or expansion of the crystal rod, which may cause false alarms and affect the normal production of the crystal rod. Summary of the invention

[0005] The purpose of the embodiments of the present application is to provide a method for detecting broken edges of a crystal rod during a diameter-equalizing process, a storage medium, and a crystal pulling device, so as to take into account the measurement error problem caused by the shrinkage or expansion of the crystal rod itself when judging the broken edges.

[0006] In a first aspect, an embodiment of the present application provides a method for detecting broken edges of a crystal rod in a diameter equalization process, the method comprising:

[0007] Obtaining detection parameters of the crystal rod during the equal diameter process, where the detection parameters are the equal diameter length or equal diameter time of the crystal rod;

[0008] When the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i, the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i , the first ridge line, the second ridge line, the third ridge line and the fourth ridge line are uniformly grown on the outer surface of the crystal rod in a circumferential direction;

[0009] Determine the average convexity value A of the first ridge 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i , the average convexity value A of the fourth ridgeline 4i Is there a value less than or equal to the preset alarm bump value B? i The convex value of

[0010] If it exists, an alarm is made;

[0011] If it does not exist, then i+1 is added and the execution continues until the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i steps; where M i =M0+i*m, when the detection parameter is the equal diameter length of the crystal rod, M0 is the preset initial value of the equal diameter length, i is a natural number greater than or equal to 0, and m is the verification length of the protrusion value; when the detection parameter is the equal diameter moment of the crystal rod, M0 is the preset initial value of the equal diameter moment, i is a natural number greater than or equal to 0, and m is the verification time of the protrusion value.

[0012] In a second aspect, an embodiment of the present application further provides a computer-readable storage medium having computer instructions stored thereon, and when the computer instructions are executed, the steps of the method for detecting broken edges of a crystal rod in a diameter equalization process described in any one of the first aspects are executed.

[0013] In the third aspect, the embodiments of the present application further provide a crystal pulling device, comprising a furnace body, a crucible, a crystal pulling unit, a monitoring unit and a control unit, the crucible, the crystal pulling unit and the monitoring unit are all electrically connected to the control unit, the monitoring unit is configured to acquire an image inside the furnace body, the control unit is configured to control the pulling speed of the crystal pulling unit and the rotation speed of the crucible, and determine whether the crystal rod is broken according to the crystal rod broken edge detection method in the equal diameter process described in any one of the first aspects.

[0014] The embodiments of the present application provide a method for detecting broken edges of a crystal rod during a diameter-equalizing process, a storage medium, and a crystal pulling device. The diameter-equalizing length or diameter-equalizing moment of the crystal rod is used as a detection parameter, and the edge protrusion value of the crystal rod in the diameter-equalizing stage is judged within a preset verification length or a preset verification time. This can reduce measurement errors caused by the shrinkage or expansion of the crystal rod, reduce the occurrence of false alarms, and help to accurately control the crystal growth process.

[0015] Furthermore, the embodiments of the present application provide a method for detecting broken edges of a crystal rod during the equal-diameter process, a storage medium, and a crystal pulling device, which use the equal-diameter length or the equal-diameter moment of the crystal rod as a detection parameter, and judge the edge protrusion value of the crystal rod in the equal-diameter stage within a preset verification length or a preset verification time. It can adapt to different crystal growth environments and has a high fault tolerance rate.

[0016] Furthermore, the embodiments of the present application provide a method for detecting broken edges of a crystal rod during the equal-diameter process, a storage medium, and a crystal pulling device. The equal-diameter length or the equal-diameter moment of the crystal rod is used as a detection parameter, and the edge protrusion value of the crystal rod in the equal-diameter stage is judged within a preset verification length or a preset verification time. This can eliminate the influence of brightness changes caused by factors such as dust accumulation on the gold-plated glass and aging and damage of consumables.

[0017] Furthermore, the embodiments of the present application provide a method for detecting broken edges of a crystal rod in the equal-diameter process, a storage medium, and a crystal pulling device. The equal-diameter length or the equal-diameter moment of the crystal rod is used as a detection parameter, and the edge protrusion value of the crystal rod in the equal-diameter stage is judged within a preset verification length or a preset verification time. This can achieve standardization and unification of the detection parameters, reduce heavy manual debugging work, and improve crystal pulling efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of a method for detecting broken edges of a crystal rod during the equal diameter process of the present application. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Among them, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application.

[0020] The present application will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict.

[0021] In order to solve the problem that false alarms may occur when judging whether an edge line is broken during the equal-diameter process by only one early warning value, an embodiment of the present application proposes a method for detecting broken edges of a crystal rod during the equal-diameter process.

[0022] like Figure 1 As shown, the method for detecting broken edges of a crystal rod during the equal diameter process of an embodiment of the present application includes:

[0023] Acquire detection parameters of the crystal rod during the equal diameter process, wherein the detection parameters are the equal diameter length or equal diameter time of the crystal rod;

[0024] When the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i , wherein the first ridge line, the second ridge line, the third ridge line and the fourth ridge line are uniformly grown on the outer surface of the crystal rod in a circumferential direction;

[0025] Determine the average convexity value A of the first ridge 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i , the average convexity value A of the fourth ridgeline 4i Is there a value less than or equal to the preset alarm bump value B? i The convex value of

[0026] If it exists, an alarm is made;

[0027] If it does not exist, then i+1 is added and the execution continues until the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i steps; where M i =M0+i*m, when the detection parameter is the equal diameter length of the crystal rod, M0 is the preset initial value of the equal diameter length, i is a natural number greater than or equal to 0, and m is the verification length of the protrusion value; when the detection parameter is the equal diameter moment of the crystal rod, M0 is the preset initial value of the equal diameter moment, i is a natural number greater than or equal to 0, and m is the verification time of the protrusion value.

[0028] The embodiment of the present application provides a method for detecting broken edges of a crystal rod in the equal-diameter process. The method determines the edge protrusion value of the crystal rod in the equal-diameter stage within a preset verification length or a preset verification time. The method can adapt to different crystal growth environments and has a high fault tolerance rate. The method can eliminate the influence of brightness changes caused by factors such as dust accumulation on gold-plated glass and aging and damage of consumables. The method can realize standardization and unification of detection parameters, reduce heavy manual debugging work, and improve crystal pulling efficiency.

[0029] Optionally, obtain the average convexity value A of the first ridgeline 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i ,include:

[0030] The detection parameter M of the crystal rod i To M i +Δ i In the interval of , obtain the convexity value of the first edge line when at least 3 different detection parameters are obtained, and the average value of the convexity value when at least 3 different detection parameters is taken as the average convexity value A of the first edge line 1i ;

[0031] The detection parameter M of the crystal rod i To M i +Δ i In the interval of , obtain the convexity value of the second edge line when at least 3 different detection parameters are obtained, and the average value of the convexity value when at least 3 different detection parameters is taken as the average convexity value A of the second edge line 2i ;

[0032] The detection parameter M of the crystal rod i To M i +Δ i In the interval of , obtain the convexity value of the third edge line when at least 3 different detection parameters are obtained, and the average value of the convexity value when at least 3 different detection parameters is taken as the average convexity value A of the third edge line 3i ;

[0033] The detection parameter M of the crystal rod i To M i +Δ i In the interval of , obtain the convexity value of the fourth edge line when at least 3 different detection parameters are obtained, and the average value of the convexity value when at least 3 different detection parameters is taken as the average convexity value A of the fourth edge line 4i .

[0034] It should be noted that in the above optional embodiments of the present application, Δ i It can be a fixed value, that is, when the equal diameter length is used as the detection parameter, Δ i+is a fixed length value. When used as a detection parameter at the equal diameter moment, Δ i is a fixed duration value; Δ i It can also be a value that varies with i, Δ i The changing relationship between Δ i It can increase with the increase of i; or decrease with the increase of i; or when i is within a certain value range Δ i The value of is the same. Outside the above range, Δ i Take other values.

[0035] When obtaining the average convexity value of the ridge, the detection parameter M is calculated i To M i +Δ i In the interval, the average value of the protrusion values ​​at at least three different detection parameters is used as the average protrusion value of the edge line, which can effectively neutralize the error of a detection parameter at a certain point in the interval, reduce the situation of false alarms, and further improve the fault tolerance rate of the crystal rod broken edge detection method of the embodiment of the present application, so that the method can be applied to different environments.

[0036] Optionally, the method for detecting broken edges of a crystal ingot during the equal diameter process further includes:

[0037] Calculate the average convexity value A of the first ridge 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i , the average convexity value A of the fourth ridgeline 4i The average convexity

[0038] The average convexity Subtract the preset subtraction value a to get the alarm convex value verification value B i ';

[0039] Verify value B with the continuous n alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , the preset verification cycle is n times m.

[0040] By setting n times m as the preset verification cycle, the average value of the average convexity value of each edge line is calculated in each verification cycle, and the preset subtraction value is subtracted from the average value to obtain the preset alarm convexity value B in each verification cycle. i The preset alarm convex value B obtained by the above method i It is more reliable, thus making the broken edge detection method of the embodiment of the present application more accurate.

[0041] Optionally, the preset subtraction value a ranges from 0.5 to 5.

[0042] The value range of the preset subtraction value a can be adaptively selected according to different crystal pulling scenarios. Generally speaking, in a new crystal pulling scenario without too many records, the preset subtraction value can be set higher, for example, the preset subtraction value can be set to 3, 3.5, 4, 4.5, 5 and other values, so as to lower the warning conditions and prevent false alarms of broken edges; in crystal pulling scenarios where multiple crystal pullings have been performed and have certain reference parameters, the preset subtraction value can be set lower, for example, the preset subtraction value can be set to 0.5, 1, 1.5, 2, 2.5 and other values, so as to minimize the reaction time of the alarm judgment, reduce the waiting time of the broken edge detection method in the embodiment of the present application, and improve the detection efficiency.

[0043] Optionally, n times m is taken as a preset verification period, and when the detection parameter is the equal diameter length of the crystal rod, the value range of the preset verification period is 450 mm to 550 mm.

[0044] When the equal diameter length is used as the detection parameter, n times m is taken as a preset verification cycle, which is convenient for periodic analysis of the edge line situation in each verification cycle. For the value of n, a reasonable value can be selected according to parameters such as actual working conditions and calculation amount; the value range of the preset verification cycle is set at 450mm~550mm, which can more accurately record the alarm bulge value verification value B within each n verification lengths. i ', verify value B according to the alarm convex value i 'Calculate the preset alarm bump value B i , the alarm convex value B is preset during the verification cycle of different equal diameter lengths of the crystal rod i Verification of the preset alarm convex value B i It can make timely adjustments according to the changes in liquid surface brightness caused by factors such as the shrinkage and expansion of the crystal rod during the crystal pulling process, the changes in liquid surface brightness caused by the change in crystal rod length, and the aging of consumables, to ensure the preset alarm convex value B i The accuracy of the broken edge detection method of the embodiment of the present application is improved. In addition, the equal diameter length is used as the detection parameter, which is convenient for engineers to better judge the equal diameter effect in combination with the crystal rod length, and has better intuitiveness and convenience.

[0045] Optionally, when the detection parameter is the equal diameter moment of the crystal rod, the preset verification period has a value range of 4.5h to 5.5h.

[0046] When the equal diameter moment is used as the detection parameter, n times m is taken as a preset verification cycle, which is convenient for periodic analysis of the edge line situation in each verification cycle. For the value of n, a reasonable value can be selected according to parameters such as actual working conditions and calculation amount; the value range of the preset verification cycle is set at 4.5h~5.5h, which can more accurately record the alarm bulge value verification value B within each n verification length i ', verify value B according to the alarm convex value i 'Calculate the preset alarm bump value B i , the alarm convex value B is preset during the verification cycle of different equal diameter lengths of the crystal rod i Verification of the preset alarm convex value B i It can make timely adjustments according to the changes in liquid surface brightness caused by factors such as the shrinkage and expansion of the crystal rod during the crystal pulling process, the changes in liquid surface brightness caused by the change in crystal rod length, and the aging of consumables, to ensure the preset alarm convex value B i The accuracy of the broken edge detection method in the embodiment of the present application is improved.

[0047] Optionally, when the detection parameter is the equal diameter length of the crystal rod, the verification length m of the protrusion value ranges from 50 mm to 150 mm.

[0048] When the equal diameter length is used as the detection parameter, the verification length m of the protrusion value is in the range of 50mm to 150mm, which can ensure that the embodiment of the present application can track and judge the growth status of each edge line in real time under different liquid level sensitivities, thereby improving the accuracy of the broken edge detection method of the embodiment of the present application; at the same time, it can reduce the amount of calculation and lower the hardware requirements.

[0049] Optionally, when the detection parameter is the equal diameter moment of the crystal rod, the verification time length m of the protrusion value ranges from 0.5h to 1.5h.

[0050] When the equal diameter moment is used as the detection parameter, the verification length m of the protrusion value is in the range of 0.5h to 1.5h, which can ensure that the embodiment of the present application can track and judge the growth status of each edge line in real time under different liquid level sensitivities, thereby improving the accuracy of the broken edge detection method of the embodiment of the present application; at the same time, it can reduce the amount of calculation and lower the hardware requirements.

[0051] Optionally, the alarm determination in the embodiment of the present application includes:

[0052] Get the current crystal rod diameter D i ;

[0053] If the current diameter of the crystal rod is D iIf the absolute value of the difference between the target diameter D of the crystal rod is less than or equal to the preset value, an alarm is given and i+1 is added to continue the execution. When the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i Steps;

[0054] If the current diameter of the crystal rod is D i If the absolute value of the difference between the target diameter D of the crystal rod is greater than the preset value, i+1 is added and the execution continues until the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i steps.

[0055] For the values ​​of the above preset values, adaptive adjustments are made according to different parameters such as equal diameter, crystal pulling thermal field, crystal rising speed, crystal rotation speed, equal diameter length, equal diameter time, liquid surface brightness, etc. Generally, values ​​such as 0.5mm, 1mm, 1.5mm, and 2mm are preferred.

[0056] The crystal ingot broken edge detection method in the embodiment of the present application is combined with the current crystal ingot diameter D i The target diameter D of the crystal rod is used for alarm judgment to effectively reduce the occurrence of false alarms, thereby improving the accuracy of the broken edge detection method of the embodiment of the present application. Optionally, when the detection parameter is the equal diameter length of the crystal rod, the value range of M0 is 250mm to 350mm.

[0057] By setting the value range of M0 to 250 mm to 350 mm, the broken edge judgment of the crystal rod can be started in time, and the edge judgment time is not started in advance, which can also further improve the detection efficiency.

[0058] Optionally, when the detection parameter is the equal diameter moment of the crystal rod, the value range of M0 is 2.5h to 4.5h.

[0059] By setting the value range of M0 to 2.5h to 4.5h, it is possible to start the broken edge judgment of the crystal rod edge in time, and the edge judgment time is not started in advance, which can also further improve the detection efficiency.

[0060] Based on the method for detecting broken edges of a crystal rod in the process of equalizing diameters of the present application, an embodiment of the present application further provides a computer-readable storage medium on which computer instructions are stored, and when the computer instructions are executed, the steps of the method for detecting broken edges of a crystal rod in the process of equalizing diameters of the present application are executed. Based on the method for detecting broken edges of a crystal rod in the process of equalizing diameters of the present application, an embodiment of the present application further provides a crystal pulling device, the crystal pulling device comprising a furnace body, a crucible, a crystal pulling unit, a monitoring unit and a control unit, the crucible, the crystal pulling unit and the monitoring unit are all electronically connected to the control unit, the monitoring unit is configured to acquire an image inside the furnace body, the control unit is configured to control the pulling speed of the crystal pulling unit and the rotation speed of the crucible, and judge whether the crystal rod has broken edges according to the method for detecting broken edges of a crystal rod in the process of equalizing diameters of the present application as described in any one of the first aspects.

[0061] Example 1

[0062] The equal diameter length is used as the detection parameter to detect the broken edges of the crystal rod with a target diameter of 253 mm in the furnace 1 during the equal diameter process.

[0063] When the equal diameter length of the crystal rod reaches 300 mm, the average convexity value A of the first edge line is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 ;

[0064] Determine the average convexity value A of the first ridge 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 Whether there is a convex value less than or equal to the preset alarm convex value B0, the relevant values ​​are shown in Table 1:

[0065] Table 1 Detailed calculation and alarm table within the preset period of broken edge detection

[0066]

[0067] In this embodiment, m is 100 mm, and the value B is verified by five consecutive alarm convex values. i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , taking 5 100mm as a preset verification cycle, for the average convexity value of each ridgeline and the average convexity value of the four ridgelines in Table 1 The calculation method of the preset alarm convex value is described in detail below:

[0068] The average convexity of each ridgeline:

[0069] In the range of the equal diameter length of the crystal rod from 300 mm to 302 mm, when the equal diameter length of the first edge line is 300 mm, the convexity value of the first edge line is 3.0;

[0070] When the first edge line has an equal diameter length of 301 mm, the convexity value of the first edge line is 2.9;

[0071] When the first edge line has an equal diameter length of 302 mm, the convexity value of the first edge line is 3.1;

[0072] The average convexity value of the first ridgeline at the equal diameter lengths of 300 mm, 301 mm, and 302 mm is taken as the average convexity value A of the first ridgeline. 10 , in calculating A 10 When , the rounding down method can be adopted to improve the reliability of the preset alarm convex value. After calculation, A 10 Take it as 3.0.

[0073] Similarly, in the range of the equal diameter length of the crystal rod from 300 mm to 302 mm, when the equal diameter length of the second edge line is 300 mm, the convexity value of the second edge line is 3.1;

[0074] When the second edge line has an equal diameter length of 301 mm, the convexity value of the second edge line is 3.0;

[0075] When the second edge line has an equal diameter length of 302 mm, the convexity value of the second edge line is 3.3;

[0076] The average convexity value of the second ridgeline at the equal diameter lengths of 300 mm, 301 mm, and 302 mm is taken as the average convexity value A of the second ridgeline. 20 , after calculation, A 20 Take it as 3.1.

[0077] Similarly, in the range of the equal diameter length of the crystal rod from 300 mm to 302 mm, when the equal diameter length of the third edge line is 300 mm, the convexity value of the third edge line is 3.2;

[0078] When the third edge line has an equal diameter length of 301 mm, the convexity value of the third edge line is 3.1;

[0079] When the third edge line has an equal diameter length of 302 mm, the convexity value of the third edge line is 3.4;

[0080] The average convexity value of the third ridgeline at the equal diameter lengths of 300mm, 301mm, and 302mm is taken as the average convexity value A of the third ridgeline. 30 , after calculation, A 30 Take it as 3.2.

[0081] Similarly, in the range of the equal diameter length of the crystal rod from 300 mm to 302 mm, the convexity value of the fourth edge line is 3.3 when the equal diameter length of the fourth edge line is 300 mm;

[0082] When the fourth edge line has an equal diameter length of 301 mm, the convexity value of the fourth edge line is 3.2;

[0083] When the fourth edge line has an equal diameter length of 302 mm, the convexity value of the fourth edge line is 3.5;

[0084] The average convexity value of the fourth ridgeline at the equal diameter lengths of 300 mm, 301 mm, and 302 mm is taken as the average convexity value A of the fourth ridgeline. 40 , after calculation, A 40 Take it as 3.3.

[0085] The average convexity of the four ridges

[0086] Calculate the average convexity value A of the first ridge 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 , the average convexity value A of the fourth ridgeline 40 The average convexity Calculated is 3.2.

[0087] Preset alarm bump value B0:

[0088] Will Subtracting the preset subtraction value 0.5, the alarm convex value verification value B0' is obtained to be 2.7, and B0' is used as the preset alarm convex value B0.

[0089] It can be seen from Table 1 that the average convexity value A of the first ridgeline 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 There is no convex value less than or equal to the preset alarm convex value B0, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 400mm, the average convex value A of the first edge line is obtained. 11 , the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline 31 and the average convexity value A of the fourth ridgeline 41 ;

[0090] Determine the average convexity value A of the first ridge 11 , the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline31 and the average convexity value A of the fourth ridgeline 41 Whether there is a convex value less than or equal to the preset alarm convex value B1, the relevant values ​​are shown in Table 2:

[0091] Table 2 Detailed calculation and alarm table within the preset period of broken edge detection

[0092]

[0093] For the average convexity of each ridgeline and the average convexity of the four ridgelines in Table 2, The calculation method of the preset alarm protrusion value is the same as that when the equal diameter length is 300mm. The calculation results are shown in Table 2 and will not be repeated here.

[0094] It can be seen from Table 2 that the average convexity value A of the first ridgeline 11 , the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline 31 and the average convexity value A of the fourth ridgeline 41 There is no convex value less than or equal to the preset alarm convex value B1, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 500mm, the average convex value A of the first ridgeline is obtained. 12 , the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 ;

[0095] Determine the average convexity value A of the first ridge 12 , the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 Whether there is a convex value less than or equal to the preset alarm convex value B2, the relevant values ​​are shown in Table 3:

[0096] Table 3 Detailed calculation and alarm table within the preset period of broken edge detection

[0097]

[0098]

[0099] For the average convexity of each ridgeline and the average convexity of the four ridgelines in Table 3, The calculation method of the preset alarm protrusion value is the same as that when the equal diameter length is 300mm. The calculation results are shown in Table 3 and will not be repeated here.

[0100] It can be seen from Table 3 that the average convexity value A of the first ridgeline 12, the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 There is no convex value less than or equal to the preset alarm convex value B2, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 600mm, the average convex value A of the first ridgeline is obtained. 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 ;

[0101] Determine the average convexity value A of the first ridge 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 Whether there is a convex value less than or equal to the preset alarm convex value B3, the relevant values ​​are shown in Table 4:

[0102] Table 4 Detailed calculation and alarm table within the preset period of broken edge detection

[0103]

[0104] For the average convexity of each ridgeline and the average convexity of the four ridgelines in Table 4, The calculation method of the preset alarm protrusion value is the same as that when the equal diameter length is 300 mm. The calculation results are shown in Table 4 and will not be repeated here.

[0105] It can be seen from Table 4 that the average convexity value A of the first ridgeline 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 The average convexity value A of the fourth ridgeline 43 It is equal to the preset alarm convex value B3. There is a convex value equal to the preset alarm convex value B3, so an alarm judgment is required.

[0106] Specifically, obtain the diameter D of the current crystal rod i It is 255mm, and the default value is 1mm;

[0107] The current diameter of the crystal rod D i The absolute value of the difference from the target diameter of the crystal rod of 253 mm is greater than 1 mm, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 700 mm, the average convexity value A of the first edge line is obtained. 14 , the average convexity value A of the second ridgeline 24, the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline 44 ;

[0108] Determine the average convexity value A of the first ridge 14 , the average convexity value A of the second ridgeline 24 , the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline 44 Whether there is a convex value less than or equal to the preset alarm convex value B4, the relevant values ​​are shown in Table 5:

[0109] Table 5 Detailed calculation and alarm table within the preset period of broken edge detection

[0110]

[0111] It can be seen from Table 5 that the average convexity value A of the first ridgeline 14 , the average convexity value A of the second ridgeline 24 , the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline 44 The average convexity value A of the fourth ridgeline 44 It is equal to the preset alarm convex value B4. There is a convex value equal to the preset alarm convex value B4, so an alarm judgment is required.

[0112] Specifically, obtain the diameter D of the current crystal rod i 254.5mm;

[0113] The current diameter of the crystal rod D i The absolute value of the difference from the target diameter of the crystal rod of 253 mm is greater than 1 mm, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 800 mm, the average convexity value A of the first edge line is obtained. 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 ;

[0114] Determine the average convexity value A of the first ridge 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 Whether there is a convex value less than or equal to the preset alarm convex value B5, the relevant values ​​are shown in Table 6:

[0115] Table 6 Detailed calculation and alarm table within the preset period of broken edge detection

[0116]

[0117] As of Table 6, the first preset verification cycle (ie, 5 100 mm) has ended, because in the first preset verification cycle in this embodiment, the initial alarm convex value verification value B i 'All are taken as the same initial value when the equal diameter length is 300mm, which is not a good reference. Therefore, in this embodiment, the alarm convex value verification value B of each equal diameter length stage is not taken in the first preset verification cycle. i 'The average value, of course, can also be taken in the first preset verification cycle each equal diameter length stage alarm convex value verification value B i The average value of ' is used as the preset alarm bulge value.

[0118] The equal diameter length of 800mm is the starting point of a new preset verification cycle. For the calculation of the preset alarm bulge value B5 when the equal diameter length is 800mm, the average value of the alarm bulge value verification values ​​2.9, 2.6, 2.5, 2.3, and 2.8 at equal diameter lengths of 400mm, 500mm, 600mm, 700mm, and 800mm can be used as the preset alarm bulge value B5.

[0119] It can be seen from Table 6 that the average convexity value A of the first ridgeline 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 There is no convex value less than or equal to the preset alarm convex value B5, so i+1 is added, and the average convex value A of the first ridgeline is obtained when the equal diameter length of the crystal rod reaches 900mm. 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 ;

[0120] Determine the average convexity value A of the first ridge 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 Whether there is a convex value less than or equal to the preset alarm convex value B6, the relevant values ​​are shown in Table 7:

[0121] Table 7 Detailed calculation and alarm table within the preset period of broken edge detection

[0122]

[0123] To calculate the preset alarm bulge value B6 at 900mm, the average value of the alarm bulge value verification values ​​2.6, 2.5, 2.3, 2.8, and 2.8 at equal diameter lengths of 500mm, 600mm, 700mm, 800mm, and 900mm can be used as the preset alarm bulge value B6.

[0124] It can be seen from Table 7 that the average convexity value A of the first ridgeline 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 There is no convex value less than or equal to the preset alarm convex value B6, so i+1 is added, and the execution continues. When the equal diameter length of the crystal rod reaches 1000mm, the average convex value A of the first edge line is obtained. 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47 ;

[0125] Determine the average convexity value A of the first ridge 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47 Whether there is a convex value less than or equal to the preset alarm convex value B7, the relevant values ​​are shown in Table 8:

[0126] Table 8 Detailed calculation and alarm table within the preset period of broken edge detection

[0127]

[0128]

[0129] To calculate the preset alarm bulge value B7 at 1000mm, the average value of the alarm bulge value verification values ​​2.5, 2.3, 2.8, 2.8, and 2.5 at equal diameter lengths of 600mm, 700mm, 800mm, 900mm, and 1000mm can be used as the preset alarm bulge value B7.

[0130] It can be seen from Table 8 that the average convexity value A of the first ridgeline 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47There is no convex value less than or equal to the preset alarm convex value B7, so i+1 is added, and the average convex value A of the first ridgeline is obtained when the equal diameter length of the crystal rod reaches 1100mm. 18 , the average convexity value A of the second ridgeline 28 , the average convexity value A of the third ridgeline 38 and the average convexity value A of the fourth ridgeline 48 ;

[0131] Determine the average convexity value A of the first ridge 18 , the average convexity value A of the second ridgeline 28 , the average convexity value A of the third ridgeline 38 and the average convexity value A of the fourth ridgeline 48 Whether there is a convex value less than or equal to the preset alarm convex value B8, the relevant values ​​are shown in Table 9:

[0132] Table 9 Detailed calculation and alarm table within the preset period of broken edge detection

[0133]

[0134]

[0135] To calculate the preset alarm bulge value B8 at 1100mm, the average value of the alarm bulge value verification values ​​2.3, 2.8, 2.8, 2.5, and 2.4 at equal diameter lengths of 700mm, 800mm, 900mm, 1000mm, and 1100mm can be used as the preset alarm bulge value B8.

[0136] It can be seen from Table 9 that the average convexity value A of the first ridgeline 18 , the average convexity value A of the second ridgeline 28 , the average convexity value A of the third ridgeline 38 and the average convexity value A of the fourth ridgeline 48 There is no convex value less than or equal to the preset alarm convex value B8, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 1200mm, the average convex value A of the first edge line is obtained. 19 , the average convexity value A of the second ridgeline 29 , the average convexity value A of the third ridgeline 39 and the average convexity value A of the fourth ridgeline 49 ;

[0137] Determine the average convexity value A of the first ridge 19 , the average convexity value A of the second ridgeline 29 , the average convexity value A of the third ridgeline 39 and the average convexity value A of the fourth ridgeline 49Whether there is a convex value less than or equal to the preset alarm convex value B9, the relevant values ​​are shown in Table 10:

[0138] Table 10 Detailed calculation and alarm table of broken edge detection preset period

[0139]

[0140] To calculate the preset alarm bulge value B9 at 1200mm, the average value of the alarm bulge value verification values ​​2.8, 2.8, 2.5, 2.4, and 2.2 at equal diameter lengths of 800mm, 900mm, 1000mm, 1100mm, and 1200mm can be used as the preset alarm bulge value B9.

[0141] It can be seen from Table 10 that the average convexity value A of the first ridgeline 19 , the average convexity value A of the second ridgeline 29 , the average convexity value A of the third ridgeline 39 and the average convexity value A of the fourth ridgeline 49 There is no convex value less than or equal to the preset alarm convex value B9, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 1300mm, the average convex value A of the first edge line is obtained. 110 , the average convexity value A of the second ridgeline 210 , the average convexity value A of the third ridgeline 310 and the average convexity value A of the fourth ridgeline 410 ;

[0142] Determine the average convexity value A of the first ridge 110 , the average convexity value A of the second ridgeline 210 , the average convexity value A of the third ridgeline 310 and the average convexity value A of the fourth ridgeline 410 Is there a value less than or equal to the preset alarm bump value B? 10 The convex value, the relevant values ​​are shown in Table 11:

[0143] Table 11 Detailed calculation and alarm table within the preset period of broken edge detection

[0144]

[0145] The preset alarm bulge value B at 1300mm 10 For calculation, the average value of each alarm convex value verification value 2.8, 2.5, 2.4, 2.2, 2.1 at equal diameter lengths of 900mm, 1000mm, 1100mm, 1200mm, and 1300mm can be used as the preset alarm convex value B 10 .

[0146] It can be seen from Table 11 that the average convexity value A of the first ridgeline 110 , the average convexity value A of the second ridgeline 210 , the average convexity value A of the third ridgeline 310 and the average convexity value A of the fourth ridgeline 410 There is no value less than or equal to the preset alarm bump value B 10 Therefore, i+1 is added, and the execution continues until the equal diameter length of the crystal rod reaches 1400 mm. The average convexity value A of the first ridgeline is obtained. 111 , the average convexity value A of the second ridgeline 211 , the average convexity value A of the third ridgeline 311 and the average convexity value A of the fourth ridgeline 411 ;

[0147] Determine the average convexity value A of the first ridge 111 , the average convexity value A of the second ridgeline 211 , the average convexity value A of the third ridgeline 311 and the average convexity value A of the fourth ridgeline 411 Is there a value less than or equal to the preset alarm bump value B? 11 The convex value is set, and corresponding steps are performed. The specific steps have been introduced in the above-mentioned equal diameter length, and will not be repeated in this embodiment.

[0148] Example 2

[0149] The difference from Example 1 is that when the equal diameter length of the crystal rod reaches 250 mm, the average protrusion value A of the first ridgeline is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 .

[0150] m is 50mm, and the value B is verified by three consecutive alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , take 11 50mm as a preset verification cycle, and take 1.5mm as the preset value in the alarm judgment. For the average convexity of each edge line and the average convexity of the four edges The calculation principle of the preset alarm convex value is the same as that of Example 1.

[0151] Example 3

[0152] The difference from Example 1 is that when the equal diameter length of the crystal rod reaches 350 mm, the average protrusion value A of the first ridgeline is obtained. 10 , the average convexity value A of the second ridgeline 20, the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 .

[0153] m is 150mm, and the value B is verified by 6 consecutive alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , take 3 150mm as a preset verification cycle, and take 2mm as the preset value in the alarm judgment. For the average convexity value of each edge line and the average convexity value of the four edges The calculation principle of the preset alarm convex value is the same as that of Example 1.

[0154] Example 4

[0155] The equal diameter moment was used as the detection parameter to detect the broken edges of the crystal rod with a target diameter of 253 mm in the process of equal diameter of the furnace 1.

[0156] When the equal diameter time of the crystal rod reaches 3h, the average convexity value A of the first edge line is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 ;

[0157] Determine the average convexity value A of the first ridge 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 Whether there is a convex value less than or equal to the preset alarm convex value B0, the relevant values ​​are shown in Table 12:

[0158] Table 12 Detailed calculation and alarm table within the preset period of broken edge detection

[0159]

[0160]

[0161] In this embodiment, m is 0.5h, and the value B is verified by 7 consecutive alarm convex values. i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , taking 7 0.5h as a preset verification cycle, for the average convexity value of each ridgeline and the average convexity value of the four ridgelines in Table 12 The calculation method of the preset alarm convex value is described in detail below:

[0162] The average convexity of each ridgeline:

[0163] In the interval between 3h and 3h+1min when the diameter of the crystal rod is equal, the convexity value of the first edge line is 3.1 when the diameter of the first edge line is equal to 3h;

[0164] When the first edge line is at the equal diameter time 3h+30s, the convexity value of the first edge line is 2.9;

[0165] When the first edge line is at the equal diameter time 3h+1min, the convexity value of the first edge line is 3.1;

[0166] The average convexity value of the first ridgeline at the equal diameter time 3h, 3h+30s, and 3h+1min is taken as the average convexity value A of the first ridgeline. 10 , in calculating A 10 When , the rounding down method can be adopted to improve the reliability of the preset alarm convex value. After calculation, A 10 Take it as 3.0.

[0167] As above, in the interval from 3h to 3h+1min when the diameter of the crystal rod is equal, the convexity value of the second edge line is 3.0 when the diameter of the second edge line is equal to 3h;

[0168] When the second edge is at the equal diameter time 3h+30s, the convexity value of the second edge is 3.0;

[0169] When the second edge is at the equal diameter time 3h+1min, the convexity value of the second edge is 3.1;

[0170] The average convexity value of the second ridgeline at the equal diameter time 3h, 3h+30s, and 3h+1min is taken as the average convexity value A of the second ridgeline. 20 , after calculation, A 20 Take it as 3.0.

[0171] Similarly, in the intervals of 3h, 3h+30s, and 3h+1min of the equal diameter time of the crystal rod, the convexity value of the third edge line at the equal diameter time of 3h is 3.1;

[0172] When the third edge is at the equal diameter time 3h+30s, the convexity value of the third edge is 3.0;

[0173] When the third edge is at the equal diameter time 3h+1min, the convexity value of the third edge is 3.2;

[0174] The average convexity value of the third ridgeline at the equal diameter time 3h, 3h+30s, and 3h+1min is taken as the average convexity value A of the third ridgeline. 30 , after calculation, A 30 Take it as 3.1.

[0175] Similarly, in the intervals of 3h, 3h+30s, and 3h+1min of the equal diameter time of the crystal rod, the convexity value of the fourth edge line at the equal diameter time of 3h is 3.1;

[0176] When the fourth edge line is at the equal diameter time 3h+30s, the convexity value of the fourth edge line is 3.2;

[0177] When the fourth edge is at the equal diameter time 3h+1min, the convexity value of the fourth edge is 3.1;

[0178] The average convexity value of the fourth ridgeline at the equal diameter time 3h, 3h+30s, and 3h+1min is taken as the average convexity value A of the fourth ridgeline. 40 , after calculation, A 40 Take it as 3.1.

[0179] The average convexity of the four ridges

[0180] Calculate the average convexity value A of the first ridge 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 , the average convexity value A of the fourth ridgeline 40 The average convexity And using the method of rounding down, after calculation is 3.0.

[0181] Preset alarm bump value B0:

[0182] Will Subtracting the preset subtraction value 0.7, the alarm convex value verification value B0' is obtained to be 2.3, and B0' is used as the preset alarm convex value B0.

[0183] It can be seen from Table 12 that the average convexity value A of the first ridgeline 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 There is no convex value less than or equal to the preset alarm convex value B0, so i+1 is added, and the average convex value A of the first ridgeline is obtained when the equal diameter time of the crystal rod reaches 3.5h. 11 , the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline 31 and the average convexity value A of the fourth ridgeline 41 ;

[0184] Determine the average convexity value A of the first ridge 11, the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline 31 and the average convexity value A of the fourth ridgeline 41 Whether there is a convex value less than or equal to the preset alarm convex value B1, the relevant values ​​are shown in Table 13:

[0185] Table 13 Detailed calculation and alarm table within the preset period of broken edge detection

[0186]

[0187]

[0188] For the average convexity value of each ridgeline and the average convexity value of the four ridgelines in Table 13, The calculation method is the same as that at the equal diameter time of 3.5h. The calculation results are shown in Table 13 and will not be repeated here. For the preset alarm convex value B1, the average value of B0' and B1' is taken.

[0189] It can be seen from Table 13 that the average convexity value A of the first ridgeline 11 , the average convexity value A of the second ridgeline 21 , the average convexity value A of the third ridgeline 31 and the average convexity value A of the fourth ridgeline 41 There is no convex value less than or equal to the preset alarm convex value B1, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 4h, the average convex value A of the first ridgeline is obtained. 12 , the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 ;

[0190] Determine the average convexity value A of the first ridge 12 , the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 Whether there is a convex value less than or equal to the preset alarm convex value B2, the relevant values ​​are shown in Table 14:

[0191] Table 14 Detailed calculation and alarm table within the preset period of broken edge detection

[0192]

[0193] For the average convexity value of each ridgeline and the average convexity value of the four ridgelines in Table 14, The calculation method is the same as that at the equal diameter time of 3.5h. The calculation results are shown in Table 14 and will not be repeated here. For the preset alarm convex value B2, the average value of B0', B1', and B2' is taken.

[0194] It can be seen from Table 14 that the average convexity value A of the first ridgeline 12 , the average convexity value A of the second ridgeline 22 , the average convexity value A of the third ridgeline 32 and the average convexity value A of the fourth ridgeline 42 There is no convex value less than or equal to the preset alarm convex value B2, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 4.5h, the average convex value A of the first ridgeline is obtained. 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 ;

[0195] Determine the average convexity value A of the first ridge 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 Whether there is a convex value less than or equal to the preset alarm convex value B3, the relevant values ​​are shown in Table 15:

[0196] Table 15 Detailed calculation and alarm table of edge breaking detection preset period

[0197]

[0198] For the average convexity value of each ridgeline and the average convexity value i of the four ridgelines in Table 15, the calculation method is the same as the calculation method at the equal diameter time of 3.5h. The calculation results are shown in Table 15 and will not be repeated here. For the preset alarm convexity value B3, the average value of B0', B1', B2', and B3' is taken.

[0199] It can be seen from Table 15 that the average convexity value A of the first ridgeline 13 , the average convexity value A of the second ridgeline 23 , the average convexity value A of the third ridgeline 33 and the average convexity value A of the fourth ridgeline 43 There is no convex value less than or equal to the preset alarm convex value B3, so i+1 is added, and the execution continues. When the equal diameter length of the crystal rod reaches 5h, the average convex value A of the first edge line is obtained. 14 , the average convexity value A of the second ridgeline 24 , the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline44 ;

[0200] Determine the average convexity value A of the first ridge 14 , the average convexity value A of the second ridgeline 24 , the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline 44 Whether there is a convex value less than or equal to the preset alarm convex value B4, the relevant values ​​are shown in Table 16:

[0201] Table 16 Detailed calculation and alarm table within the preset period of broken edge detection

[0202]

[0203] For the average convexity value of each ridgeline and the average convexity value i of the four ridgelines in Table 16, the calculation method is the same as the calculation method at the equal diameter time of 3.5h. The calculation results are shown in Table 16 and will not be repeated here. For the preset alarm convexity value B4, the average value of B0', B1', B2', B3', and B4' is taken.

[0204] It can be seen from Table 16 that the average convexity value A of the first ridgeline 14 , the average convexity value A of the second ridgeline 24 , the average convexity value A of the third ridgeline 34 and the average convexity value A of the fourth ridgeline 44 There is no convex value less than or equal to the preset alarm convex value B4, so i+1 is added, and the execution continues. When the equal diameter length of the crystal rod reaches 5.5h, the average convex value A of the first edge line is obtained. 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 ;

[0205] Determine the average convexity value A of the first ridge 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 Whether there is a convex value less than or equal to the preset alarm convex value B5, the relevant values ​​are shown in Table 17:

[0206] Table 17 Detailed calculation and alarm table within the preset period of broken edge detection

[0207]

[0208] For the average convexity value of each ridgeline and the average convexity value i of the four ridgelines in Table 17, the calculation method is the same as the calculation method at the equal diameter time of 3.5h. The calculation results are shown in Table 17 and will not be repeated here. For the preset alarm convexity value B5, the average value of B0', B1', B2', B3', B4', and B5' is taken.

[0209] It can be seen from Table 17 that the average convexity value A of the first ridgeline 15 , the average convexity value A of the second ridgeline 25 , the average convexity value A of the third ridgeline 35 and the average convexity value A of the fourth ridgeline 45 The average convexity value A of the fourth ridgeline in 45 The convex value is smaller than the preset alarm convex value B5, so an alarm judgment is required.

[0210] Specifically, obtain the diameter D of the current crystal rod i It is 252.6mm, and the default value is 0.5mm;

[0211] The current diameter of the crystal rod D i If the absolute value of the difference from the target diameter of the crystal rod of 253mm is less than 0.5mm, an alarm will be given (when an alarm occurs, the operator can adjust the value of the preset subtraction value a according to the actual situation), and i+1 will be added to continue to execute. When the equal diameter length of the crystal rod reaches 6h, the average convexity value A of the first ridgeline is obtained. 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 ;

[0212] Determine the average convexity value A of the first ridge 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 Whether there is a convex value less than or equal to the preset alarm convex value B6, the relevant values ​​are shown in Table 18:

[0213] Table 18 Detailed calculation and alarm table within the preset period of broken edge detection

[0214]

[0215]

[0216] For the average convexity value of each ridgeline and the average convexity value i of the four ridgelines in Table 18, the calculation method is the same as the calculation method at the equal diameter time of 3.5h. The calculation results are shown in Table 18 and will not be repeated here. For the preset alarm convexity value B5, the average value of B0', B1', B2', B3', B4', and B5' is taken.

[0217] It can be seen from Table 18 that the average convexity value A of the first ridgeline 16 , the average convexity value A of the second ridgeline 26 , the average convexity value A of the third ridgeline 36 and the average convexity value A of the fourth ridgeline 46 There is no convex value less than or equal to the preset alarm convex value B6, so i+1 is added and the execution continues. When the equal diameter length of the crystal rod reaches 6.5h, the average convex value A of the first edge line is obtained. 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47 ;

[0218] Determine the average convexity value A of the first ridge 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47 Whether there is a convex value less than or equal to the preset alarm convex value B7, the relevant values ​​are shown in Table 19:

[0219] Table 19 Detailed calculation and alarm table within the preset period of broken edge detection

[0220]

[0221]

[0222] It can be seen from Table 19 that the average convexity value A of the first ridgeline 17 , the average convexity value A of the second ridgeline 27 , the average convexity value A of the third ridgeline 37 and the average convexity value A of the fourth ridgeline 47 There is no convex value less than or equal to the preset alarm convex value B7, so i+1 is added, and the average convex value A of the first ridgeline is obtained when the equal diameter moment of the crystal rod reaches 7h. 18 , the average convexity value A of the second ridgeline 28 , the average convexity value A of the third ridgeline 38 and the average convexity value A of the fourth ridgeline 48 ;

[0223] Determine the average convexity value A of the first ridge18 , the average convexity value A of the second ridgeline 28 , the average convexity value A of the third ridgeline 38 and the average convexity value A of the fourth ridgeline 48 Whether there is a convex value less than or equal to the preset alarm convex value B8, and execute corresponding steps. The specific steps have been introduced in the above-mentioned equal diameter moment and will not be repeated in this embodiment.

[0224] Example 5

[0225] The difference from Example 4 is that when the equal diameter moment of the crystal rod reaches 2.5, the average protrusion value A of the first ridgeline is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 .

[0226] m is 1h, and the value B is verified by 5 consecutive alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , take 5 1h as a preset verification cycle, and the preset value in the alarm judgment is 1mm. For the average convexity value of each edge line and the average convexity value of the four edges The calculation principle of the preset alarm convex value is the same as that of Example 4.

[0227] Example 6

[0228] The difference from Example 4 is that when the equal diameter moment of the crystal rod reaches 4.5h, the average protrusion value A of the first ridgeline is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 .

[0229] m is 1.5h, and the value B is verified by 6 consecutive alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , take 3 1.5h as a preset verification cycle, and take 1.5mm as the preset value in the alarm judgment. For the average convexity value of each edge line and the average convexity value of the four edges The calculation principle of the preset alarm convex value is the same as that of Example 4.

[0230] Example 7

[0231] The difference from Example 4 is that when the equal diameter moment of the crystal rod reaches 4h, the average protrusion value A of the first ridgeline is obtained. 10 , the average convexity value A of the second ridgeline 20 , the average convexity value A of the third ridgeline 30 and the average convexity value A of the fourth ridgeline 40 .

[0232] m is 0.5h, and the value B is verified by 11 consecutive alarm convex values i The average value of ' is used as the detection parameter to reach M i The preset alarm convex value B i , 11 0.5h as a preset verification cycle, the preset value in the alarm judgment is 2mm. For the average convexity value of each edge line, the average convexity value of the four edges The calculation principle of the preset alarm convex value is the same as that of Example 4.

[0233] The applicant used the prior art to judge the edge line in the equal diameter process by an early warning value in the same furnace 1, and performed 10 crystal pulling operations. The applicant used the technical solutions in the above embodiments 1-7 to perform 10 crystal pulling operations respectively, and recorded the average alarm conditions of crystal pulling in each solution, as shown in Table 20 below:

[0234] Table 20 Crystal pulling alarm records

[0235]

[0236] Note: In Table 20, false alarm rate = (false alarm times ÷ total detection times) * 100%; correct rate = (total correct alarm times ÷ total detection times) * 100%. Among them: total detection times = false alarm times + no alarm times + delayed alarm times + correct alarm times, total correct alarm times = delayed alarm times + correct alarm times. In consideration of extremely strict detection requirements, normal alarms are divided into correct alarms and delayed alarms. Delayed alarms indicate that the number of correct alarms exceeds the requirements of Party A. In Table 20, an alarm within 15mm of the broken wire length is a normal alarm, an alarm within 30mm of the broken wire length is a delayed alarm, and a no alarm is determined when the broken wire length exceeds 30mm; a false alarm is determined when the system alarm indicates a broken wire, but the wire is not actually broken.

[0237] From Table 20, we can see that:

[0238] 1) The overall number of false alarms in this application is relatively small: Without excluding extreme detection environment factors, the false alarm rate of this application is much lower than the false alarm rate of the prior art.

[0239] 3) The overall number of non-reports in this application is very small. No non-reports occurred in Examples 2-4, 6, and 7. However, the occurrence of non-reports indicates that the setting of the preset alarm bump value is not accurate enough and needs to be adjusted by adjusting the preset decrement value. The more non-reports occur, the more times manual intervention and debugging are required.

[0240] 4) The overall number of delayed alarms in this application is relatively large, and accordingly, the number of false alarms and non-alarms in this application is much lower than that in the prior art.

[0241] In summary, the solution of the present application is used to detect broken edges of crystal rods, with a higher alarm accuracy rate, a short debugging cycle, saved working hours, saved manpower, and a higher fault tolerance rate for the detection environment.

[0242] The invention of the present application and its implementation methods are described schematically above, and the description is not restrictive. The drawings show only one implementation method of the invention of the present application, and the actual structure is not limited thereto. Therefore, if ordinary technicians in the field are inspired by it and design structural methods and embodiments similar to the technical solution without creativity without departing from the purpose of the invention, they should all fall within the scope of protection of this patent.

Claims

1. A method for detecting broken edges of a crystal rod during a diameter equalization process, characterized in that: The method for detecting broken edges of a crystal rod during the equal diameter process comprises: Acquire detection parameters of the crystal rod during the equal diameter process, wherein the detection parameters are the equal diameter length or equal diameter time of the crystal rod; When the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i , the first ridge line, the second ridge line, the third ridge line and the fourth ridge line are uniformly grown on the outer surface of the crystal rod in a circumferential direction; Determine the average convexity value A of the first ridgeline 1i , the average protrusion value A of the second ridgeline 2i , the average protrusion value A of the third ridgeline 3i , the average protrusion value A of the fourth ridgeline 4i Is there a value less than or equal to the preset alarm bump value B? i The convex value of If it exists, an alarm is made; If it does not exist, then i+1 is added, and the execution continues until the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i steps; where M i =M0+i*m, when the detection parameter is the equal diameter length of the crystal rod, M0 is the preset initial value of the equal diameter length, i is a natural number greater than or equal to 0, and m is the verification length of the protrusion value; when the detection parameter is the equal diameter moment of the crystal rod, M0 is the preset initial value of the equal diameter moment, i is a natural number greater than or equal to 0, and m is the verification time of the protrusion value; The method for detecting broken edges of a crystal rod during the equal diameter process further comprises: Calculate the average convexity value A of the first ridgeline 1i , the average protrusion value A of the second ridgeline 2i , the average protrusion value A of the third ridgeline 3i , the average protrusion value A of the fourth ridgeline 4i The average convexity The average convexity value Subtract the preset subtraction value a to get the alarm convex value verification value B i ’ ; Verify value B with the continuous n alarm convex values i ’ The average value of M is used as the detection parameter i The preset alarm convex value B i .

2. The method for detecting broken edges of a crystal rod in a diameter equalization process according to claim 1, characterized in that: The method of obtaining the average convexity value A of the first ridgeline 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i ,include: In the crystal rod detection parameter M i To M i +Δ i In the interval of , obtain the convexity value of the first edge line when at least 3 different detection parameters are detected, and take the average value of the convexity value when at least 3 different detection parameters as the average convexity value A of the first edge line 1i ; In the crystal rod detection parameter M i To M i +Δ i In the interval of , obtain the convexity value of the second edge line when at least 3 different detection parameters are detected, and take the average value of the convexity value when at least 3 different detection parameters as the average convexity value A of the second edge line 2i ; In the crystal rod detection parameter M i To M i +Δ i In the interval of , obtain the convexity value of the third edge line when at least 3 different detection parameters are detected, and take the average value of the convexity value when at least 3 different detection parameters as the average convexity value A of the third edge line 3i ; In the crystal rod detection parameter M i To M i +Δ i In the interval of , obtain the convexity value of the fourth edge line when at least 3 different detection parameters are detected, and take the average value of the convexity value when at least 3 different detection parameters as the average convexity value A of the fourth edge line 4i .

3. The method for detecting broken edges of a crystal ingot during the equal diameter process according to claim 1, characterized in that: Take n m as a preset verification cycle. When the detection parameter is the equal diameter length of the crystal rod, the value range of the preset verification cycle is 450mm~550mm; when the detection parameter is the equal diameter moment of the crystal rod, the value range of the preset verification cycle is 3.5h~5.5h.

4. The method for detecting broken edges of a crystal ingot during the equal diameter process according to claim 1, characterized in that: The preset subtraction value a ranges from 0.5 to 5.

5. The method for detecting broken edges of a crystal ingot during the equal diameter process according to claim 1, characterized in that: When the detection parameter is the equal diameter length of the crystal rod, the verification length m of the protrusion value ranges from 50mm to 150mm; when the detection parameter is the equal diameter moment of the crystal rod, the verification time m of the protrusion value ranges from 0.5h to 1.5h.

6. The method for detecting broken edges of a crystal ingot during a diameter equalization process according to any one of claims 1 to 5, characterized in that: The alarm judgment includes: Get the current crystal rod diameter D i ; If the current diameter of the crystal rod is D i If the absolute value of the difference between the target diameter D of the crystal rod is less than or equal to the preset value, an alarm is given and i+1 is added to continue the execution. When the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i Steps; If the current diameter of the crystal rod is D i If the absolute value of the difference between the target diameter D of the crystal rod is greater than the preset value, i+1 is set and the execution continues until the detection parameter of the crystal rod reaches M i When , the average convexity value A of the first ridgeline is obtained 1i , the average convexity value A of the second ridgeline 2i , the average convexity value A of the third ridgeline 3i and the average convexity value A of the fourth ridgeline 4i steps.

7. The method for detecting broken edges of a crystal ingot during the equal diameter process according to claim 1, characterized in that: When the detection parameter is the equal diameter length of the crystal rod, the value range of M0 is 250mm~350mm; when the detection parameter is the equal diameter moment of the crystal rod, the value range of M0 is 2.5h~4.5h.

8. A computer-readable storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method for detecting broken edges of a crystal rod in a diameter equalization process according to any one of claims 1 to 7 are executed.

9. A crystal pulling device, characterized in that: The crystal pulling equipment includes a furnace body, a crucible, a crystal pulling unit, a monitoring unit and a control unit. The crucible, the crystal pulling unit and the monitoring unit are all electrically connected to the control unit. The monitoring unit is configured to obtain an image inside the furnace body. The control unit is configured to control the pulling speed of the crystal pulling unit and the rotation speed of the crucible, and determine whether the crystal rod is broken according to the crystal rod broken edge detection method in the equal diameter process according to any one of claims 1 to 7.

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