A full-slotted orifice static pressure gas bearing radial thrust bearing

Abstract

The application discloses a full-slit throttling static pressure gas supporting radial thrust bearing and relates to the field of static pressure gas supporting, which comprises a fixed part and a rotating part coaxially arranged; the rotating part comprises a rotating shaft and two rotating discs fixed at two ends of the rotating shaft respectively, the fixed part is located between the two rotating discs and is sleeved outside the rotating shaft through a mounting through hole of the fixed part; the end faces of the two ends of the fixed part are spaced apart from the two rotating discs to form axial supporting air film gaps, and the hole wall of the mounting through hole is spaced apart from the circumferential surface of the rotating shaft to form a radial supporting air film gap; an air inlet channel is arranged in the fixed part, the air inlet channel is communicated with the axial supporting air film gaps through axial throttling gaps, and the air inlet channel is communicated with the radial supporting air film gap through a radial throttling gap. The application can ensure that the supporting air film has higher bearing capacity and rigidity, the gas flow process in the throttling gaps and the supporting air film gaps is relatively short, the response to external dynamic load is relatively fast, and better damping and dynamic stiffness characteristics can be realized.

Description

Technical Field

[0001] The invention relates to the field of static pressure gas bearings, and in particular to a full-slit throttling static pressure gas bearing radial thrust bearing. Background Art

[0002] A hydrostatic gas bearing is a sliding bearing that uses hydrostatic gas supplied from an external source as its lubricant. Compressed gas at a specific pressure is typically fed into a throttle, divided, and then introduced into the clearance between the bearing's moving parts to form a supporting gas film. The gas pressure difference between the supporting gas films on the opposing surfaces of the bearing's moving parts achieves suspended support and lubrication without direct solid contact. Hydrostatic gas bearings offer high precision in part machining and assembly, and the supporting gas film evens out surface machining errors in the bearing's moving parts, further reducing the impact of machining errors on bearing motion accuracy. Therefore, hydrostatic gas bearings can achieve high-precision nanometer-scale motion and are often used as core supporting components in equipment such as ultra-precision machining machines, ultra-precision measuring machines, precision assembly turntables, and micro-perturbation motion simulation platforms. When the clearance between the moving parts of a hydrostatic gas bearing changes, the throttle adaptively adjusts the pressure of the supporting gas film. This is a key step in achieving the bearing's load-bearing capacity and stiffness. Existing hydrostatic gas bearings often use small-hole and porous throttles for pressure regulation.

[0003] Small-hole throttles throttle high-pressure gas through thin-walled orifices, generating pressure losses due to expansion work. Small-hole throttle hydrostatic gas bearings feature simple throttle structures, well-established design theories, and relatively mature manufacturing processes. However, they suffer from low load-bearing capacity and stiffness, and exhibit poor dynamic characteristics. The small-hole throttle operates as a point-source outlet, and the pressurized gas within the supporting air film must diffuse to fill the bearing kinematic clearance. To improve the load-bearing capacity and stiffness of small-hole throttle hydrostatic gas bearings, a pressure-equalizing chamber is often installed between the small-hole throttle and the supporting air film. However, the pressurized gas flowing within the pressure-equalizing chamber is prone to generating cyclones, microvibrations, or self-excited vibrations, which in turn reduce the stability of the hydrostatic gas bearing and even cause air hammer failure, threatening the safety of precision equipment. Furthermore, small-hole throttle hydrostatic gas bearings often utilize interference fit or adhesive mounting for the small-hole throttle, which requires high assembly requirements and is difficult to disassemble and maintain. If the small-hole throttle becomes clogged, the entire hydrostatic gas bearing is likely to be scrapped.

[0004] The throttle of the porous throttling hydrostatic gas bearing is made of porous material, and throttling is achieved through the flow resistance generated by the tortuous flow channel formed by a large number of tiny pores inside it. The entire bearing of the porous throttling hydrostatic gas bearing can be made of porous material, so that gas flows out of the throttle in the gap between the bearing moving parts. Its supporting air film flow field is more uniform than that of the small-pore throttling hydrostatic gas bearing, and better static and dynamic characteristics can be obtained under the same size conditions. However, porous throttling hydrostatic gas lubricated bearings also have many disadvantages. First, porous materials are generally made by powder sintering and pressing, and the consistency of their porosity and air permeability is poor. Even for the same batch of materials, the uniformity of the material is difficult to guarantee, resulting in differences in flow resistance at different positions of the throttle, which in turn affects the uniformity of the supporting air film pressure distribution. It also makes it difficult to design the porous throttle and it is difficult to obtain the optimal load-bearing performance. Secondly, porous restrictors are prone to clogging during processing and use, reducing the material's permeability and increasing the restrictor's flow resistance, resulting in a reduction in the load-bearing capacity and stiffness of the hydrostatic gas bearing. Thirdly, porous restrictors throttle flow through the flow resistance generated by the capillary flow channels formed by the material's internal pores. The random distribution of the material's internal pores makes the capillary flow channels crisscross and disorderly, resulting in a long gas flow path and complex state inside the porous restrictor. This results in the porous restrictor hydrostatic gas bearing's slow response to external dynamic loads and poor damping and dynamic stiffness characteristics. In addition, porous throttle hydrostatic gas radial bearings are generally assembled to the inner hole of the support seat by gluing or interference fit, while thrust bearings can currently only be assembled to the end face of the support seat by gluing. The gluing assembly method has low maintenance, and once the porous throttle is blocked, it is very likely to cause the hydrostatic gas bearing to be scrapped; and the thickness of the porous throttle is generally only a few millimeters. The bonding strength and the strength of the porous material itself limit the maximum gas supply pressure of the porous throttle hydrostatic gas bearing, resulting in its low bearing capacity and stiffness. In addition, the glue used for bonding will gradually age over time, resulting in low reliability of the porous throttle hydrostatic gas bearing.

[0005] The rapid development of fields such as aviation, aerospace, microelectronics, national defense, biomedicine, and astronomical observation has placed higher demands on the load-bearing capacity, stiffness, damping, dynamic stiffness, motion accuracy, and stability of hydrostatic gas bearings. Traditional small-pore and porous throttling hydrostatic gas bearings can no longer meet the current demands of scientific and technological progress and national economic development. Slit-throttling hydrostatic gas bearings achieve throttling by exploiting the viscous frictional pressure loss caused by gas flowing through micron-scale slits. They operate as a linear gas outlet and lack a pressure-equalizing chamber. The bearing gas volume ratio is zero, eliminating air hammer vibration. Furthermore, the bearing's load-bearing capacity and stiffness can be improved by increasing the gas supply pressure. However, existing slit-throttle hydrostatic gas bearings mostly use the method of machining intermittent slits on the bearing shell to construct the throttle, which also has the following problems: First, the manufacture and measurement of the intermittent slit throttle are difficult, and the dimensional accuracy and consistency are difficult to ensure; second, the pressurized gas in the supporting air film has a diffusion flow, resulting in low movement accuracy of the hydrostatic gas bearing; third, the slit of the slit throttle is very narrow, and once blocked, it cannot be disassembled for maintenance, which will also cause the entire hydrostatic gas bearing to be scrapped. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a bearing structure that can solve the problem of low load-bearing capacity and low rigidity of existing static pressure gas bearings.

[0007] The present invention is achieved through the following technical solutions:

[0008] A full-slit throttling static pressure gas support radial thrust bearing comprises a coaxially arranged fixed part and a rotating part;

[0009] The rotating part includes a rotating shaft and two rotating disks, and the two rotating disks are respectively fixed at two ends of the rotating shaft;

[0010] The fixing portion is located between the two rotating disks, and the fixing portion has a mounting through hole, and the mounting through hole is sleeved outside the rotating shaft;

[0011] Wherein, the end surfaces of both ends of the fixing portion are spaced apart from the two rotating disks to form an axial supporting air film gap, and the hole wall of the mounting through hole and the circumferential surface of the rotating shaft are spaced apart to form a radial supporting air film gap, and the axial supporting air film gap and the radial supporting air film gap both surround the rotating portion;

[0012] An air intake channel, an axial throttling gap and a radial throttling gap are provided in the fixing portion. The air intake channel is communicated with the axial supporting air film gap through the axial throttling gap, and the air intake channel is communicated with the radial supporting air film gap through the radial throttling gap.

[0013] Among them, the axial support air film gap refers to the gap that can form an air film for axially supporting the rotating part, and the radial support air film gap refers to the gap that can form an air film for radially supporting the rotating part. In any axial section of the entire bearing, the length direction of the axial support air film gap is perpendicular to the axis, and the length direction of the radial support air film gap is parallel to the axis.

[0014] Optionally, the fixing portion includes a support seat and two support plates arranged in an annular shape, an annular groove is provided at each end of the support seat, the support plates are accommodated and fixed in the annular groove, the support seat and the two support plates respectively cooperate to form end faces at both ends of the fixing portion; the support seat and the two support plates jointly surround and form the mounting through hole;

[0015] The axial throttling gap is formed between the outer annular surface of the support plate and the inner annular surface of the annular groove, and the radial throttling gap is formed between the end surface of one end of the support seat and the bottom of the annular groove.

[0016] Further optionally, the support seat includes a first annular portion, a second annular portion, and a third annular portion coaxially arranged from the inside to the outside, in any axial cross-section of the entire support seat, the first annular portion, the second annular portion, and the third annular portion are all square, and the axial lengths of the first annular portion, the second annular portion, and the third annular portion increase in sequence, the first annular portion includes a first inner annular surface and a first end surface at both ends, the two ends of the second annular portion include a second inner annular surface and a second end surface respectively, the two ends of the third annular portion include a third inner annular surface and a third end surface respectively, the first inner annular surface, the first end surface, the second inner annular surface, the second end surface, the third inner annular surface, and the third end surface at the same end together constitute the annular groove, and the annular groove has a stepped structure;

[0017] The support plate includes a fourth annular portion and a fifth annular portion coaxially arranged from the inside to the outside. In any axial cross-section of the entire support plate, the fourth annular portion and the fifth annular portion are both square, and the axial lengths of the fourth annular portion and the fifth annular portion decrease in sequence. The end of the fifth annular portion away from the support seat has a mating surface. The fourth annular portion includes a fourth inner annular surface, a fourth outer annular surface, and a fourth end surface facing the support seat. The fifth annular portion includes a fifth outer annular surface and a fifth end surface facing the support seat. The fourth end surface, the fourth outer annular surface, the fifth end surface, and the fifth outer annular surface together constitute a stepped annular surface.

[0018] The matching surface cooperates with the third end surface to form the end surface of the fixing portion; the first inner ring surface and the fourth inner ring surfaces of the two support plates together surround to form the mounting through hole;

[0019] At either end, the fifth end face abuts against the second end face, the fourth outer annular surface abuts against the second inner annular surface, the first end face and the fourth end face are spaced apart to form the radial throttling gap, and the third inner annular surface and the fifth outer annular surface are spaced apart to form the axial throttling gap.

[0020] Further optionally, the transition angle between the mating surface and the fifth outer ring surface is a right angle; the transition angle between the fourth end face and the fourth inner ring surface is a right angle; the transition angle between the third end face and the third inner ring surface is a right angle; and the transition angle between the first end face and the first inner ring surface is a right angle.

[0021] Optionally, the air inlet passage includes an air inlet through hole and two axial air supply annular air chambers and two radial air supply annular air chambers respectively connected to the air inlet through hole, the two axial air supply annular air chambers are respectively located in the two ends of the fixed portion, the two radial air supply annular air chambers are respectively located in the two ends of the fixed portion, and the axial air supply annular air chambers and the radial air supply annular air chambers are both formed by cooperation between the support seat and the support plate;

[0022] At any end of any axial cross section of the entire fixed portion, the axial throttling gap is connected to the axial air supply annular chamber at one side opening away from the axial supporting air film gap, and the radial throttling gap is connected to the radial air supply annular chamber at one side opening away from the radial supporting air film gap.

[0023] Further optionally, a first groove is provided at a transition portion between the first end surface and the second inner annular surface, and a second groove is provided at a transition portion between the fourth end surface and the fourth outer annular surface, and the first groove and the second groove cooperate to form the radial air supply annular air chamber;

[0024] A third groove is provided at a transition portion between the second end surface and the third inner annular surface. The third groove cooperates with the fifth end surface to form the axial air supply annular air chamber.

[0025] Optionally, a first sealing groove for accommodating a sealing ring is provided on the second end surface; and a second sealing groove for accommodating a sealing ring is provided on the fourth outer ring surface.

[0026] Optionally, the air intake hole is arranged in the support seat, the air inlet of the air intake hole is located on the outer side of the support seat, and is provided with a thread for installing a pipe joint.

[0027] Optionally, a transition annular groove is provided at a transition portion between the mating surface and the fourth inner annular surface, and the transition annular groove cooperates with the rotating portion to form a transition annular air chamber;

[0028] The rotating part is provided with an exhaust through-hole which passes through the rotating shaft and the two rotating disks. A plurality of exhaust channels are formed between the rotating shaft and the two rotating disks, and both ends of the exhaust channels are respectively connected to the transition annular air chamber and the exhaust through-hole.

[0029] Further optionally, the support seat is connected to the support plate by screws, the bottom of the transition annular groove on the support plate is provided with a stepped countersunk hole that cooperates with the screw, and the second end face of the support seat is provided with a threaded hole that cooperates with the screw.

[0030] The present invention has the following advantages and beneficial effects:

[0031] The present invention provides a full-slit throttling static pressure gas support radial thrust bearing. After static pressure gas is introduced into the air inlet channel, the static pressure gas in the air inlet channel flows through the axial throttling gap and the radial throttling gap and enters the radial support air film gap and the axial support air film gap respectively. At this time, the static pressure gas forms a radial support air film in the radial support air film gap, thereby forming a static pressure gas radial bearing located between the rotating part and the fixed part. At the same time, the static pressure gas forms an axial support air film in the axial support air film gap, thereby forming a static pressure gas thrust bearing located between the rotating part and the fixed part. This prevents direct contact between the fixed part and the rotating part, thereby reducing friction. The axial throttling gap and the radial throttling gap serve as throttles, and the pressure of the static pressure gas can be adaptively adjusted according to the external load to ensure that the axial support air film and the radial support air film have a certain bearing capacity and rigidity. In addition, the gas flows out of the throttling gap and directly enters the supporting air film gap. The gas flow in the throttling gap and the supporting air film gap is viscous flow, the process is short, and the response to the external dynamic load is fast, which can achieve better damping and dynamic stiffness characteristics. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings:

[0033] Figure 1 This is a schematic structural diagram of a support seat according to embodiment 1 of the present invention;

[0034] Figure 2 This is a structural diagram of a support plate according to embodiment 1 of the present invention;

[0035] Figure 3 is a cross-sectional view of embodiment 1 of the present invention;

[0036] Figure 4 for Figure 3 Schematic diagram at point A in the middle.

[0037] Markings and corresponding parts names in the accompanying drawings:

[0038] 100-support seat, 110-first annular portion, 111-first inner annular surface, 112-first end face, 120-second annular portion, 121-second inner annular surface, 122-second end face, 123-first sealing groove, 130-third annular portion, 131-third inner annular surface, 132-third end face, 140-first groove, 150-third groove, 160-air intake hole, 200-support plate, 210-fourth annular portion, 211-fourth inner annular surface, 212-fourth end face, 213-fourth outer annular surface, 214-second sealing groove, 220-fifth annular portion, 221-fifth end face, 222-fifth outer annular surface, 230-matching surface, 240-second groove, 250-transition annular groove, 300-rotating shaft, 310-rotating shaft exhaust groove, 400-turntable. DETAILED DESCRIPTION

[0039] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with examples and drawings. The exemplary embodiments of the present invention and their descriptions are only used to explain the present invention and are not intended to limit the present invention.

[0040] In the following description, numerous specific details are set forth to provide a thorough understanding of the present invention. However, it will be apparent to one skilled in the art that these specific details are not necessarily required to practice the present invention. In other embodiments, well-known structures, circuits, materials, or methods are not described in detail to avoid obscuring the present invention.

[0041] Throughout this specification, references to "one embodiment," "an embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with the embodiment or example is included in at least one embodiment of the present invention. Therefore, appearances of the phrases "one embodiment," "an embodiment," "an example," or "an example" in various places throughout this specification are not necessarily all referring to the same embodiment or example. Furthermore, the particular features, structures, or characteristics may be combined in one or more embodiments or examples in any suitable combinations and / or subcombinations. Furthermore, it will be understood by those of ordinary skill in the art that the figures provided herein are for illustrative purposes only and are not necessarily drawn to scale. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0042] In the description of the present invention, the terms "front", "back", "left", "right", "up", "down", "vertical", "horizontal", "high", "low", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the scope of protection of the present invention.

[0043] Example 1:

[0044] A full-slit throttling static pressure gas support radial thrust bearing, such as Figures 1 to 4 As shown, it includes a fixed part and a rotating part arranged coaxially;

[0045] The rotating part includes a rotating shaft 300 and two rotating disks 400, and the two rotating disks 400 are respectively fixed at both ends of the rotating shaft 300;

[0046] The fixing portion is located between the two rotating disks 400 and has a mounting through hole, which is sleeved on the outside of the rotating shaft 300;

[0047] The end surfaces of the fixed portion and the two rotating disks 400 are spaced apart to form an axial supporting air film gap, and the hole wall of the mounting through hole and the circumferential surface of the rotating shaft 300 are spaced apart to form a radial supporting air film gap. Both the axial supporting air film gap and the radial supporting air film gap surround the rotating portion.

[0048] An air intake channel, an axial throttling gap and a radial throttling gap are provided in the fixing portion. The air intake channel is communicated with the axial supporting air film gap through the axial throttling gap, and the air intake channel is communicated with the radial supporting air film gap through the radial throttling gap.

[0049] Among them, the axial support air film gap refers to the gap that can form an air film for axially supporting the rotating part, and the radial support air film gap refers to the gap that can form an air film for radially supporting the rotating part. In any axial section of the entire bearing, the length direction of the axial support air film gap is perpendicular to the axis, and the length direction of the radial support air film gap is parallel to the axis.

[0050] After static pressure gas is introduced into the air inlet passage of this bearing, the gas in the air inlet passage is pressurized to pass through the axial throttling gap and the radial throttling gap and enter the axial support air film gap and the radial support air film gap respectively. At this time, the static pressure gas forms a radial support air film in the radial support air film gap, thereby forming a static pressure gas radial bearing located between the rotating part and the fixed part. At the same time, the static pressure gas forms an axial support air film in the axial support air film gap, thereby forming a static pressure gas thrust bearing located between the rotating part and the fixed part. This prevents direct contact between the fixed part and the rotating part, thereby reducing friction. The axial throttling gap and the radial throttling gap serve as throttles, and can adaptively adjust the pressure of the static pressure gas according to the external load, ensuring that the axial support air film and the radial support air film have a certain load-bearing capacity and rigidity.

[0051] In addition, the gas flows out of the throttling gap and directly enters the supporting air film gap. The gas flow in the throttling gap and the supporting air film gap is viscous flow, the process is short, and the response to the external dynamic load is fast, which can achieve better damping and dynamic stiffness characteristics.

[0052] Wherein, the gap widths of the axial supporting air film gap, the radial supporting air film gap, the axial throttling gap and the radial throttling gap are all in the micrometer order.

[0053] It should be noted that the micrometer level mentioned here refers to 1 μm to 99 μm, preferably 20 μm to 40 μm.

[0054] At this time, the widths of the axial support air film gap, the radial support air film gap, the axial throttling gap and the radial throttling gap are at the same order of magnitude, and the flow state of the pressurized gas in the axial throttling gap and the radial throttling gap is roughly the same as the flow state in the axial support air film gap and the radial support air film gap, and can both be regarded as isothermal flow. Its load-bearing performance is independent of the gas type and temperature, so it has better thermal stability than the small-pore or porous throttling static pressure gas bearings in the existing technology.

[0055] In one or more embodiments, the fixing portion includes a support seat 100 and two support plates 200 arranged in an annular shape, an annular groove is provided at each end of the support seat 100, and the support plate 200 is accommodated and fixed in the annular groove, and the support seat 100 and the two support plates 200 respectively cooperate to form the end faces of the fixing portion at both ends, which are used to form an axial support air film gap with the two turntables 400 respectively; the support seat 100 and the two support plates 200 jointly surround the mounting through hole, and a radial support air film gap is formed between the hole wall of the mounting through hole and the circumferential surface of the rotating shaft 300;

[0056] The outer annular surface of the support plate 200 and the inner annular surface of the annular groove form the axial throttling gap, and the support plate 200 penetrates into the end surface of the support seat 100 and the bottom of the annular groove to form the radial throttling gap.

[0057] In this case, by precisely machining the surface dimensions of the support plate 200 and the support seat 100, the entire bearing can naturally form axial and radial throttling gaps through the assembly of the support plate 200 and the support seat 100. Compared with the existing method of directly machining micron-level gaps on the bearing shell to form a slit throttle, this method is easier to manufacture and has higher machining accuracy, simpler assembly, less prone to clogging, and easier to maintain.

[0058] Specifically, the support seat 100 includes a first annular portion 110, a second annular portion 120, and a third annular portion 130 that are coaxially arranged from the inside to the outside, wherein the first annular portion 110, the second annular portion 120, and the third annular portion 130 are an integrated structure. In any axial cross-section of the entire support seat 100, the first annular portion 110, the second annular portion 120, and the third annular portion 130 are all square, and the axial lengths of the first annular portion 110, the second annular portion 120, and the third annular portion 130 increase in sequence. The annular portion 110 includes a first inner annular surface 111 and first end surfaces 112 at both ends. The second annular portion 120 includes a second inner annular surface 121 and a second end surface 122 at both ends. The third annular portion 130 includes a third inner annular surface 131 and a third end surface 132 at both ends. The first inner annular surface 111, the first end surface 112, the second inner annular surface 121, the second end surface 122, the third inner annular surface 131, and the third end surface 132 at the same end together constitute the annular groove, which has a stepped structure.

[0059] The support plate 200 includes a fourth annular portion 210 and a fifth annular portion 220 coaxially arranged from the inside to the outside, wherein the fourth annular portion 210 and the fifth annular portion 220 are an integrated structure. In any axial cross-section of the entire support plate 200, the fourth annular portion 210 and the fifth annular portion 220 are both square, and the axial lengths of the fourth annular portion 210 and the fifth annular portion 220 decrease in sequence. The end of the fifth annular portion 220 away from the support seat 100 has a mating surface 230. The fourth annular portion 210 includes a fourth inner annular surface 211, a fourth outer annular surface 213, and a fourth end surface 212 facing the support seat 100. The fifth annular portion 220 includes a fifth outer annular surface 222 and a fifth end surface 221 facing the support seat 100. The fourth end surface 212, the fourth outer annular surface 213, the fifth end surface 221, and the fifth outer annular surface 222 together constitute a stepped annular surface.

[0060] The mating surface 230 and the third end surface 132 are in the same plane, and the two cooperate to form the end surface of the fixing portion, which is used to form an axial supporting air film gap between the corresponding ends of the turntable 400; the first inner annular surface 111 and the fourth inner annular surfaces 211 of the two support plates 200 are surrounded together to form the mounting through hole;

[0061] At either end, the fifth end face 221 abuts against the second end face 122 to limit the axial position of the support plate 200, and the fourth outer annular surface 213 abuts against the second inner annular surface 121 to limit the radial position of the support plate 200. At this time, the support plate 200 is subject to axial and radial restrictions, combined with fixings such as bolts, to ensure that the position of the support plate 200 on the support seat 100 is relatively fixed, and the two are always coaxial, thereby ensuring the formation of the axial support air film gap, the radial support air film gap, the axial throttling gap and the radial throttling gap and the consistency of the width.

[0062] The axial distance between the first end face 112 and the third end face 132 is smaller by microns than the axial distance between the fourth end face 212 and the mating surface 230. Thus, a radial throttling gap of the order of microns is formed between the first end face 112 and the fourth end face 212. The diameter of the third inner annular surface 131 is larger by microns than the diameter of the fifth outer annular surface 222. Thus, an axial throttling gap of the order of microns is formed between the third inner annular surface 131 and the fifth outer annular surface 222.

[0063] Among them, the transition angle between the mating surface 230 and the fifth outer ring surface 222 is a right angle; the transition angle between the fourth end face 212 and the fourth inner ring surface 211 is a right angle; the transition angle between the third end face 132 and the third inner ring surface 131 is a right angle; the transition angle between the first end face 112 and the first inner ring surface 111 is a right angle.

[0064] This ensures that no air cavity is formed at the connection between the axial throttling gap and the axial supporting air film gap, and at the connection between the radial throttling gap and the radial supporting air film gap.

[0065] In one or more embodiments, the air inlet passage includes an air inlet through hole 160 and two axial air supply annular air chambers and two radial air supply annular air chambers respectively connected to the air inlet through hole 160, the two axial air supply annular air chambers are respectively located in the two ends of the fixing portion, the two radial air supply annular air chambers are respectively located in the two ends of the fixing portion, and the axial air supply annular air chambers and the radial air supply annular air chambers are both formed by cooperation between the support seat 100 and the support plate 200;

[0066] At any end of any axial cross section of the entire fixed portion, the axial throttling gap is connected to the axial air supply annular chamber at one side opening away from the axial supporting air film gap, and the radial throttling gap is connected to the radial air supply annular chamber at one side opening away from the radial supporting air film gap.

[0067] Therefore, when static pressure gas is introduced into the air inlet hole 160, the gas in the air inlet hole 160 first enters the axial air supply annular air chamber and the radial air supply annular air chamber, and the air pressure in the axial air supply annular air chamber and the radial air supply annular air chamber increases with the continuous entry of gas. When the pressure rises to a certain level, the pressurized gas can pass through the axial throttling gap and the radial throttling gap and enter the axial support air film gap and the radial support air film gap respectively, forming the required air film.

[0068] At this time, through the setting of the axial air supply annular air chamber and the radial air supply annular air chamber, the gas can evenly enter the axial throttling gap, radial throttling gap, axial support air film gap and radial support air film gap after filling the air chamber and reaching a certain pressure. At this time, the flow path of the gas in the axial throttling gap, radial throttling gap, axial support air film gap and radial support air film gap is unified, and there is no diffusion flow, so that the pressure gradient distribution of the air film formed in the gap is smoother and the gas flow disturbance is smaller, thereby ensuring that the entire bearing can achieve higher motion accuracy.

[0069] Specifically, a first groove 140 is formed at a transition portion between the first end surface 112 and the second inner annular surface 121, and a second groove 240 is formed at a transition portion between the fourth end surface 212 and the fourth outer annular surface 213. The first groove 140 and the second groove 240 cooperate to form the radial air supply annular air chamber.

[0070] A third groove 150 is formed at a transition portion between the second end surface 122 and the third inner annular surface 131 . The third groove 150 cooperates with the fifth end surface 221 to form the axial air supply annular air chamber.

[0071] The second end surface 122 is provided with a first sealing groove 123 for receiving a sealing ring, and the fourth outer ring surface 213 is provided with a second sealing groove 214 for receiving a sealing ring. The provision of the sealing ring further enhances the sealing performance at the connection between the support plate 200 and the support seat 100, preventing turbulence in the flow of gas in the fixed portion, which could affect the bearing capacity, rigidity, and motion accuracy of the entire bearing.

[0072] The air inlet hole 160 is provided in the support base 100 , and the air inlet of the air inlet hole 160 is located on the outer surface of the support base 100 and is provided with a thread for installing a pipe joint.

[0073] Based on the above embodiment, a transition annular groove 250 is provided at the transition portion between the mating surface 230 and the fourth inner annular surface 211. The transition annular groove 250 cooperates with the rotating portion to form a transition annular air chamber. In this case, the transition annular air chamber is located at the transition portion between the radial support air film gap and the axial support air film gap.

[0074] The rotating part is provided with an exhaust hole passing through the rotating shaft 300 and the two turntables 400. The end face of the rotating shaft 300 has a plurality of rotating shaft exhaust grooves 310. A plurality of exhaust channels are formed between the rotating shaft exhaust grooves 310 and the turntables 400 on the corresponding side. The plurality of exhaust channels are symmetrically arranged at equal intervals around the axis, and the two ends of the exhaust channel are respectively connected to the transition annular air chamber and the exhaust hole, so as to transport the gas in the transition annular air chamber to the exhaust hole for discharge.

[0075] At this time, through the setting of the transition annular air chamber, the gas output from the radial support air film gap and the axial support air film gap can be received and discharged from the exhaust through the exhaust channel from the exhaust through hole, thereby avoiding interference between the flow of gases in the radial support air film gap and the axial support air film, affecting the bearing capacity, stiffness and movement accuracy of the bearing.

[0076] The distance between the bottom of the transition annular groove 250 and the corresponding side turntable 400 is in the order of millimeters, and the distance between the bottom of the shaft exhaust groove 310 and the corresponding side turntable 400 is also in the order of millimeters.

[0077] It should be noted that the millimeter level mentioned here refers to 1 to 9 mm, preferably 1 to 3 mm.

[0078] The support base 100 is connected to the support plate 200 by screws. The bottom of the transition annular groove 250 on the support plate 200 is provided with a stepped countersunk hole that cooperates with the screw. By providing the stepped countersunk hole in the transition annular groove 250, it is possible to prevent the installation of the screw or the setting of the screw hole from affecting the flow of gas.

[0079] In addition, the second end face 122 on the support seat 100 is provided with a screw hole that cooperates with the screw. The screw hole is located on the inner side of the first sealing groove 123 and is blocked by the sealing ring in the first sealing groove 123 and the second sealing groove 214, further avoiding the setting of the stepped countersunk hole and the screw hole or the installation of the screw from affecting the flow of gas.

[0080] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A full-slit throttling static pressure gas support radial thrust bearing, characterized in that: It includes a fixed part and a rotating part which are coaxially arranged; The rotating part comprises a rotating shaft (300) and two rotating disks (400), wherein the two rotating disks (400) are respectively fixed at two ends of the rotating shaft (300); The fixing portion is located between the two rotating disks (400), and the fixing portion has a mounting through hole, and the mounting through hole is sleeved outside the rotating shaft (300); Wherein, the end surfaces of both ends of the fixing portion are spaced apart from the two rotating disks (400) to form an axial supporting air film gap, and the hole wall of the mounting through hole and the circumferential surface of the rotating shaft (300) are spaced apart to form a radial supporting air film gap, and both the axial supporting air film gap and the radial supporting air film gap surround the rotating portion; An air intake passage, an axial throttling gap and a radial throttling gap are provided in the fixing portion. The air intake passage is communicated with the axial supporting air film gap through the axial throttling gap, and the air intake passage is communicated with the radial supporting air film gap through the radial throttling gap. The fixing portion comprises a support seat (100) and two support plates (200) arranged in an annular shape, annular grooves are respectively provided at both ends of the support seat (100), the support plates (200) are accommodated and fixed in the annular grooves, the support seat (100) and the two support plates (200) respectively cooperate to form end faces at both ends of the fixing portion; the support seat (100) and the two support plates (200) together surround and form the mounting through hole; The outer annular surface of the support plate (200) and the inner annular surface of the annular groove form the axial throttling gap, and the support plate (200) penetrates into the end surface of one end of the support seat (100) and the bottom of the annular groove to form the radial throttling gap.

2. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 1, characterized in that: The support seat (100) comprises a first annular portion (110), a second annular portion (120), and a third annular portion (130) which are coaxially arranged from the inside to the outside. In any axial cross section of the entire support seat (100), the first annular portion (110), the second annular portion (120), and the third annular portion (130) are all square, and the axial lengths of the first annular portion (110), the second annular portion (120), and the third annular portion (130) increase in sequence. The first annular portion (110) comprises a first inner annular surface (111) and a The first end surfaces (112) at both ends, the second annular portion (120) comprises a second inner annular surface (121) and a second end surface (122) at both ends, the third annular portion (130) comprises a third inner annular surface (131) and a third end surface (132) at both ends, the first inner annular surface (111), the first end surface (112), the second inner annular surface (121), the second end surface (122), the third inner annular surface (131) and the third end surface (132) at the same end together constitute the annular groove, and the annular groove has a stepped structure; The support plate (200) comprises a fourth annular portion (210) and a fifth annular portion (220) which are coaxially arranged from the inside to the outside. In any axial cross section of the entire support plate (200), the fourth annular portion (210) and the fifth annular portion (220) are both square, and the axial lengths of the fourth annular portion (210) and the fifth annular portion (220) decrease in sequence. The end of the fifth annular portion (220) away from the support seat (100) has a mating surface (230). The fourth annular portion (210) includes a fourth inner annular surface (211), a fourth outer annular surface (213), and a fourth end surface (212) facing the support seat (100); the fifth annular portion (220) includes a fifth outer annular surface (222) and a fifth end surface (221) facing the support seat (100); the fourth end surface (212), the fourth outer annular surface (213), the fifth end surface (221), and the fifth outer annular surface (222) together constitute a stepped annular surface; The matching surface (230) and the third end surface (132) cooperate to form the end surface of the fixing portion; the first inner ring surface (111) and the fourth inner ring surfaces (211) of the two support plates (200) together surround to form the mounting through hole; At either end, the fifth end face (221) abuts against the second end face (122), the fourth outer annular face (213) abuts against the second inner annular face (121), the first end face (112) and the fourth end face (212) are spaced apart to form the radial throttling gap, and the third inner annular face (131) and the fifth outer annular face (222) are spaced apart to form the axial throttling gap.

3. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 2, characterized in that: The transition angle between the mating surface (230) and the fifth outer annular surface (222) is a right angle; the transition angle between the fourth end surface (212) and the fourth inner annular surface (211) is a right angle; the transition angle between the third end surface (132) and the third inner annular surface (131) is a right angle; and the transition angle between the first end surface (112) and the first inner annular surface (111) is a right angle.

4. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 2, characterized in that: The air inlet passage comprises an air inlet through hole (160) and two axial air supply annular air chambers and two radial air supply annular air chambers respectively connected to the air inlet through hole (160), the two axial air supply annular air chambers being respectively located in two ends of the fixing portion, the two radial air supply annular air chambers being respectively located in two ends of the fixing portion, and the axial air supply annular air chambers and the radial air supply annular air chambers being both formed by cooperation between the support seat (100) and the support plate (200); At any end of any axial cross section of the entire fixed portion, the axial throttling gap is connected to the axial air supply annular chamber at one side opening away from the axial supporting air film gap, and the radial throttling gap is connected to the radial air supply annular chamber at one side opening away from the radial supporting air film gap.

5. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 4, characterized in that: A first groove (140) is provided at a transition portion between the first end surface (112) and the second inner annular surface (121), and a second groove (240) is provided at a transition portion between the fourth end surface (212) and the fourth outer annular surface (213), wherein the first groove (140) and the second groove (240) cooperate to form the radial air supply annular air chamber; A third groove (150) is provided at a transition portion between the second end surface (122) and the third inner annular surface (131), and the third groove (150) cooperates with the fifth end surface (221) to form the axial air supply annular air chamber.

6. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 2, characterized in that: A first sealing groove (123) for accommodating a sealing ring is provided on the second end surface (122); and a second sealing groove (214) for accommodating a sealing ring is provided on the fourth outer ring surface (213).

7. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 4, characterized in that: The air intake hole (160) is arranged in the support seat (100), an air inlet of the air intake hole (160) is located on the outer surface of the support seat (100), and is provided with a thread for installing a pipe joint.

8. A full-slit throttling static pressure gas-supported radial thrust bearing according to any one of claims 2 to 7, characterized in that: A transition annular groove (250) is provided at a transition portion between the mating surface (230) and the fourth inner annular surface (211), and the transition annular groove (250) cooperates with the rotating portion to form a transition annular air chamber; The rotating portion is provided with an exhaust through-hole penetrating the rotating shaft (300) and the two rotating disks (400), a plurality of exhaust channels are formed between the rotating shaft (300) and the two rotating disks (400), and both ends of the exhaust channels are respectively connected to the transition annular air chamber and the exhaust through-hole.

9. The full-slit throttling static pressure gas-supported radial thrust bearing according to claim 8, characterized in that: The support seat (100) is connected to the support plate (200) by screws, the bottom of the transition annular groove (250) on the support plate (200) is provided with a stepped countersunk hole that cooperates with the screw, and the second end surface (122) of the support seat (100) is provided with a threaded hole that cooperates with the screw.

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