Parallel beam debugging and testing tool and parallel beam debugging and testing method

Abstract

Provided are a parallel beam debugging and testing tool and a parallel beam debugging and testing method. The parallel beam debugging and testing tool comprises a first beam splitter, a first light spot analyzer, a first focusing lens and a second light spot analyzer; the first beam splitter is used to locate the light outlet, the laser pump source is not equipped with a coupling lens and an optical fiber, the laser pump source has a plurality of reflectors in the bottom shell, and the first beam splitter reflects and transmits the parallel light beams emitted by each reflector; the first light spot analyzer is used to visually display the centroid position of the light spot of the reflected light received by the first beam splitter and compare the centroid position of the light spot with a predetermined first position reference array; the first focusing lens is used to focus the transmitted light; the second light spot analyzer is used to position the detection surface of the second light spot analyzer on the focal plane of the first focusing lens, to visually display the centroid position of the light spot of the focused light and compare the centroid position of the light spot with a predetermined second reference position point.

Description

Technical Field

[0001] The present disclosure relates to the field of lasers, and more specifically to a parallel light beam debugging and detection tool and a parallel light beam debugging and detection method. Background Art

[0002] The semiconductor pump source is one of the important components of solid-state lasers and fiber lasers. It can make the fiber-shaped or solid-block laser gain medium obtain particle number inversion and thus obtain laser output with high beam quality. High-power pump sources are generally composed of multiple chips that compress the divergence angle through the fast axis and slow axis, compress the beam spacing through the reflector, and then couple into the optical fiber through the coupling lens.

[0003] When debugging the reflector, there are several methods in the prior art as follows.

[0004] Method 1 is to fix the coupling lens and optical fiber, debug the reflector, and observe the optical fiber output power as the criterion. In the case where the pump source contains multiple reflector lenses, relying on the optical fiber output power as the criterion cannot determine and visualize the directivity and position of the light spot of the light beam reflected by the reflector, and cannot determine whether the light spot is in the optimal position. In this way, the determination of the directivity and position of the light spot of the light beam reflected by the reflector will completely rely on the experience of the debugger, resulting in low efficiency.

[0005] The second method is to use a detection tool to detect the spot position (X1, Y1) at the light outlet before the coupling lens and optical fiber are fixed, and then move the detection tool to a certain distance △Z to detect the spot position (X2, Y2). If (X1-X2) / △Z, (Y1-Y2) / △Z is less than the standard value, it is considered that the debugging is in place. This method is not intuitive enough, and because the movement of the detection tool requires a motion mechanism, the introduction of a motion mechanism will easily introduce new errors.

[0006] The third method is to place a spectroscopic system in front of the detection tool before the coupling lens and the optical fiber are fixed, so that one light is directly transmitted to the detection tool, and the other light is overlapped with the first transmitted light after the optical path is increased by the spectroscopic system. When the position deviation of the two light spots on the detection tool is less than the standard value, it is considered that the debugging is in place. This method is not intuitive enough, and the spectroscopic system occupies a large area.

[0007] Therefore, further improvements are needed in beam debugging detection. Summary of the invention

[0008] In view of the problems existing in the background technology, an object of the present invention is to provide a parallel light beam debugging and detection tool and a parallel light beam debugging and detection method, which can detect and debug the parallel light beams reflected by the reflecting surface of each reflector, and thus can arrange multiple parallel light beams emitted by multiple reflectors into an array.

[0009] One purpose of the present disclosure is to provide a parallel beam debugging and detection tool and a parallel beam debugging and detection method, which can make the debugging and detection of each reflector not limited by the coupled lenses and optical fibers, greatly improving the convenience and reliability of debugging and detection.

[0010] Another object of the present disclosure is to provide a parallel light beam debugging and detection tool and a parallel light beam debugging and detection method, wherein the detection and debugging of the position of the parallel light beam reflected by each reflector can be visually detected and debugged.

[0011] Another object of the present disclosure is to provide a parallel light beam debugging and detection tool and a parallel light beam debugging and detection method, which can improve the accuracy of detection and debugging.

[0012] Another object of the present disclosure is to provide a parallel light beam debugging and detection tool and a parallel light beam debugging and detection method, which can shorten the optical path and reduce the space occupied.

[0013] Therefore, a parallel light beam debugging and detection tool is provided, which includes a first beam splitter, a first light spot analyzer, a first focusing lens and a second light spot analyzer; the first beam splitter is used to be positioned at the light outlet of a laser pump source to be detected, the laser pump source is not equipped with a coupling lens and an optical fiber, the laser pump source has a plurality of reflectors in a bottom shell, the reflective surface of each reflector is a plane, each reflector reflects a parallel light beam, the plurality of reflectors are used to arrange the plurality of parallel light beams emitted from the plurality of reflectors through the light outlet into an array, the first beam splitter reflects and transmits the parallel light beams emitted from each reflector through the light outlet, the angle between the reflected light of the first beam splitter and the transmitted light of the first beam splitter is 90 degrees ± 3 degrees; the first light spot The analyzer is used to be positioned on the path of the reflected light of the first beam splitter, to receive the reflected light of the first beam splitter, to visually display the centroid position of the light spot of the received reflected light of the first beam splitter, and to compare the centroid position of the light spot with the predetermined first position reference array; the first focusing lens is used to be positioned on the path of the transmitted light of the first beam splitter, to focus the transmitted light passing through the first beam splitter; the second light spot analyzer is used to position the detection surface of the second light spot analyzer on the focal plane of the first focusing lens, to receive the light that passes through the first focusing lens and is focused on the detection surface of the second light spot analyzer, to visually display the centroid position of the light spot of the focused light, and to compare the centroid position of the light spot with the predetermined second reference position point.

[0014] A parallel light beam debugging and detection method is provided, wherein the parallel light beam debugging and detection method adopts the aforementioned parallel light beam debugging and detection tooling, and the parallel light beam debugging and detection method comprises the steps of:

[0015] S1, providing a laser pump source to be detected, wherein the laser pump source is not equipped with a coupling lens and an optical fiber, and has a plurality of reflectors inside, wherein the reflective surface of each reflector is a plane, and the plurality of reflectors are used to arrange the parallel light beams emitted from the plurality of reflectors through the light outlet into an array;

[0016] S2, positioning parallel beam debugging and testing tooling, including:

[0017] Position the first beam splitter at the light outlet of the laser pump source, the first beam splitter reflects and transmits the parallel light beams emitted from each reflector through the light outlet, and the angle between the reflected light of the first beam splitter and the transmitted light of the first beam splitter is 90 degrees ± 3 degrees;

[0018] Positioning a first light spot analyzer on a travel path of the reflected light of the first beam splitter, so that the first light spot analyzer receives the reflected light of the first beam splitter, visually displays the centroid position of the light spot of the reflected light of the first beam splitter received, and compares the centroid position of the light spot with a predetermined first position reference array;

[0019] Positioning a first focusing lens on a travel path of the transmitted light of the first beam splitter to focus the transmitted light passing through the first beam splitter;

[0020] Positioning the detection surface of the second light spot analyzer on the focal plane of the focusing lens, so that the second light spot analyzer receives the light that passes through the first focusing lens and is focused on the detection surface of the second light spot analyzer, visually displays the centroid position of the light spot of the focused light, and compares the centroid position of the light spot with the predetermined second reference position point;

[0021] S3, turning on the laser pump source to make one of the reflectors work, the light reflected by the reflector is emitted from the light outlet and is split by the first beam splitter, the first light spot analyzer determines and visually displays the centroid position of the light spot of the reflected light received by the first beam splitter and compares the centroid position of the light spot with the predetermined first position reference array, the second light spot analyzer visually displays the centroid position of the light spot of the light focused on the detection surface of the second light spot analyzer through the first focusing lens and compares the centroid position of the light spot with the predetermined second reference position point;

[0022] S4, based on the visual display of the first spot analyzer and the comparison of the centroid position of the spot with the predetermined first position reference array and the visual display of the second spot analyzer and the comparison of the centroid position of the spot with the predetermined second reference position point, the adjustment frame drives the clamp to move so that the clamp vertically clamps the reflector from the bottom shell of the laser pump source, and the adjustment frame drives the clamp together with the reflector to adjust the reflector so that the centroid position of the spot visually displayed by the first spot analyzer is located at the corresponding position in the predetermined first position reference array and the centroid position of the spot of the focused light visually displayed by the second spot analyzer is located at the predetermined first reference position point, and an adhesive is applied to the area of ​​the bottom shell corresponding to the reflector, so that the reflector is vertically dropped to the adhesive-coated area of ​​the bottom shell to be fixed, and then the clamp is released from the reflector;

[0023] S5, stop the reflector from working, repeat steps S3 and S4, and make another reflector among the multiple reflectors work until all the reflectors are inspected and debugged. After debugging, the multiple light beams emitted from the multiple reflectors through the light outlets are parallel light beams arranged in an array.

[0024] The beneficial effects of the present disclosure are as follows.

[0025] In the parallel beam debugging and detection tooling and the parallel beam debugging and detection method according to the present invention, by positioning the parallel beam debugging and detection tooling outside the laser pump source at the light outlet of the laser pump source, it is possible to debug and detect the parallel beam reflected by the reflective surface of each reflector when the laser pump source is not installed with a coupling lens and an optical fiber, so that the debugging and detection of each reflector is not limited by the coupled lenses and optical fibers, which greatly improves the convenience of debugging and detection and the reliability of debugging and detection.

[0026] In the parallel beam debugging and detection tooling and the parallel beam debugging and detection method according to the present invention, since the light outlet of the laser pump source is located outside the laser pump source to position the parallel beam debugging and detection tooling, after the parallel beam debugging and detection tooling is positioned at the laser pump source, it is no longer moved. Therefore, it can not only overcome the additional errors caused by the introduction of the motion mechanism in the second method in the background technology and improve the accuracy of the detection and debugging, but also simplify the number and cost of components for parallel beam debugging and detection.

[0027] In the parallel light beam debugging and detection tooling and the parallel light beam debugging and detection method according to the present disclosure, through the cooperation of the first spot analyzer and the first beam splitter, the detection and debugging of the position of the parallel light beam reflected by each reflector can be realized, and through the visual display of the first spot analyzer, the detection and debugging of the aforementioned position can be made intuitive, convenient, reliable and efficient; through the cooperation of the first beam splitter, the first focusing lens and the second spot analyzer, the detection and debugging of the directionality of the parallel light beam reflected by each reflector can be realized, and through the visual display of the second spot analyzer, the detection and adjustment of the aforementioned directionality can be made intuitive, convenient, reliable and efficient. In other words, the detection and debugging of the position of the parallel light beam reflected by each reflector can be visually detected and debugged.

[0028] In the parallel light beam debugging and detection tooling and the parallel light beam debugging and detection method according to the present invention, through the cooperation of the first beam splitter, the first light spot analyzer, the first focusing lens and the second light spot analyzer, the parallel light beam reflected by the reflecting surface of each reflector comes out through the light outlet, is split into reflected light and transmitted light by the first beam splitter, the reflected light enters the first light spot analyzer and the transmitted light is focused onto the detection surface of the second light spot analysis through the first focusing lens. Compared with the method three in the background technology, the optical path is shorter, the beam splitting device only needs a first beam splitter, and the space area occupied by the beam splitting device is small.

[0029] In the parallel beam debugging and detection tooling and the parallel beam debugging and detection method according to the present invention, by detecting and debugging the parallel beams reflected by the reflective surface of each reflector, it is finally possible to arrange the multiple parallel beams emitted from the multiple reflectors through the light outlets into an array, so that the light spots of the multiple parallel beams arranged in the array meet the requirements of the overall spot size of the laser pump source.

[0030] In the parallel beam debugging and detection tooling and the parallel beam debugging and detection method disclosed in the present invention, a first focusing lens is arranged outside the laser pump source, so that a first focusing lens with a large focal length that matches the size of the detection surface of the second light spot analyzer can be more flexibly selected, thereby facilitating the second light spot analyzer to detect a smaller beam deflection angle, thereby improving the detection and debugging accuracy of the directivity of the parallel beam reflected by the reflection surface of each reflector. In addition, the focusing effect of the first focusing lens is conducive to the second light spot analyzer to use a smaller detection surface, and compared with the method 2 and the method 3 of the background technology, it can effectively shorten the optical path required for the parallel beam reflected by the reflection surface of each reflector, thereby reducing the space occupied area. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the component arrangement and the optical path diagram of the parallel light beam debugging and testing tooling disclosed in the present invention during parallel light beam debugging and testing.

[0032] Figure 2 It is a plurality of parallel light beams reflected by multiple mirrors. Figure 1 Schematic diagram of the light path in some components.

[0033] Figure 3 is a parallel beam reflected by one of the mirrors. Figure 1 Schematic diagram of the light path in some components.

[0034] Figure 4 It is a partial structural stereogram of a laser pump source targeted by a parallel beam debugging and testing tooling disclosed in the root.

[0035] Figure 5 It is a schematic diagram of the operation of the fixture, adjustment frame and reflector.

[0036] The following are the descriptions of the reference numerals:

[0037] 100 parallel beam debugging and testing tooling 11 second converging lens

[0038] 1First beam splitter 12Spectrometer

[0039] 2First spot analyzer 200 laser pump source

[0040] 3 first focusing lens 20 bottom shell

[0041] 4 Second spot analyzer 21 light outlet

[0042] 5 first attenuation plate 22 reflector

[0043] 6 Second attenuation plate 23 Slow axis collimator

[0044] 7 Second beam splitter 24 Fast axis collimator

[0045] 8 Power meter 25COS chip

[0046] 9Third beam splitter 300 fixture

[0047] 10Third attenuation plate 400 adjustment frame DETAILED DESCRIPTION

[0048] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.

[0049] [Parallel beam debugging and testing tooling]

[0050] Reference Figures 1 to 4According to the parallel light beam debugging and detection tool 100 disclosed in the present invention, it includes a first beam splitter 1, a first light spot analyzer 2, a first focusing lens 3 and a second light spot analyzer 4.

[0051] The first beam splitter 1 is used to be positioned at the light outlet 21 of the laser pump source 200 to be detected. The laser pump source 200 is not equipped with a coupling lens (not shown) and an optical fiber (not shown). The laser pump source 200 has a plurality of reflectors 22 in the bottom shell 20. The reflective surface of each reflector 22 is a plane. Each reflector 22 reflects a parallel light beam. The plurality of reflectors 22 are used to arrange the plurality of parallel light beams emitted from the plurality of reflectors 22 through the light outlet 21 into an array. The first beam splitter 1 reflects and transmits the parallel light beams emitted from each reflector 22 through the light outlet 21. The angle between the reflected light of the first beam splitter 1 and the transmitted light of the first beam splitter 1 is 90 degrees ± 3 degrees. The first spot analyzer 2 is used to be positioned on the travel path of the reflected light of the first beam splitter 1, to receive the reflected light of the first beam splitter 1, to visually display the centroid position of the light spot of the received reflected light of the first beam splitter 1, and to compare the centroid position of the light spot with the predetermined first position reference array. The first focusing lens 3 is used to be positioned on the path of the transmitted light of the first beam splitter 1 and to focus the transmitted light passing through the first beam splitter 1. The second spot analyzer 4 is used to position the detection surface of the second spot analyzer 4 on the focal plane of the first focusing lens 3, to receive the light that passes through the first focusing lens 3 and is focused on the detection surface of the second spot analyzer 4, to visualize the centroid position of the spot of the focused light and to compare the centroid position of the spot with the predetermined second reference position point.

[0052] In the parallel light beam debugging and detection tool 100 according to the present disclosure, by positioning the parallel light beam debugging and detection tool 100 outside the laser pump source 200 at the light outlet 21 of the laser pump source 200, it is possible to debug and detect the parallel light beam reflected by the reflection surface of each reflector 22 when the laser pump source 200 is not installed with a coupling lens and an optical fiber, so that the debugging and detection of each reflector 22 is not limited by the coupled lens and the optical fiber, which greatly improves the convenience of debugging and detection and the reliability of debugging and detection.

[0053] In the parallel beam debugging and detection tool 100 according to the present disclosure, since the light outlet 21 of the laser pump source 200 is located outside the laser pump source 200 to position the parallel beam debugging and detection tool 100, after the parallel beam debugging and detection tool 100 is positioned at the laser pump source 200, it is no longer moved. Therefore, it can not only overcome the additional errors caused by the introduction of the motion mechanism in the second method in the background technology and improve the accuracy of the detection and debugging, but also simplify the number and cost of components for parallel beam debugging and detection.

[0054] In the parallel light beam debugging and detection tool 100 according to the present disclosure, through the cooperation of the first spot analyzer 2 and the first beam splitter 1, the position of the parallel light beam reflected by each reflector 22 can be detected and debugged, and through the visual display of the first spot analyzer 2, the aforementioned position detection and debugging can be made intuitive, convenient, reliable and efficient; through the cooperation of the first beam splitter 1, the first focusing lens 3 and the second spot analyzer 4, the directionality of the parallel light beam reflected by each reflector 22 can be detected and debugged, and through the visual display of the second spot analyzer 4, the aforementioned directionality detection and adjustment can be made intuitive, convenient, reliable and efficient. In other words, the detection and debugging of the position of the parallel light beam reflected by each reflector can be visually detected and debugged.

[0055] In the parallel light beam debugging and detection tooling 100 according to the present disclosure, through the cooperation of the first beam splitter 1, the first light spot analyzer 2, the first focusing lens 3 and the second light spot analyzer 4, the parallel light beams reflected by the reflecting surfaces of the reflective mirrors 22 come out through the light outlet 21, are split into reflected light and transmitted light at the first beam splitter 1, the reflected light enters the first light spot analyzer 2, and the transmitted light is focused onto the detection surface of the second light spot analyzer 4 through the first focusing lens 3. Compared with the method three in the background technology, the optical path is shorter, the beam splitting device only needs one first beam splitter 1, and the space area occupied by the first beam splitter 1 is small.

[0056] In the parallel beam debugging and testing tool 100 according to the present disclosure, by testing and debugging the parallel beams reflected by the reflective surface of each reflector 22, it is finally possible to arrange the multiple parallel beams emitted from the multiple reflectors 22 through the light outlet 21 into an array, so that the light spots of the multiple parallel beams arranged in the array meet the requirements of the overall light spot size of the laser pump source 200 (that is, when the coupling lens and the optical fiber are installed, the parallel beams emitted by all the reflectors 22 are focused into the optical fiber after passing through the coupling lens). Note that, although in Figure 1 to Figure 2 The array is shown as one column, but it can be multiple columns according to actual use. Figure 1 In the figure, the Z direction is indicated as the axial direction along the light outlet 21, and the multiple parallel light beams emitted by the multiple reflectors 22 through the light outlet 21 are arranged in a row along the Y axis, and can be distributed along the X axis when there are multiple rows. Of course, according to the actual use, the array can be distributed along any appropriate direction. In addition, although Figure 1 A total of six reflectors 22 are shown in one column, but the number of reflectors 22 can be adjusted based on the specific situation of the array.

[0057] In the parallel light beam debugging and detection tool 100 according to the present disclosure, the first focusing lens 3 is arranged outside the laser pump source 200, so that the first focusing lens 3 with a large focal length that matches the size of the detection surface of the second light spot analyzer 4 can be more flexibly selected, which is conducive to the second light spot analyzer 4 being able to detect a smaller light beam deflection angle, thereby improving the detection and debugging accuracy of the directivity of the parallel light beam reflected by the reflection surface of each reflector 22. In addition, the focusing effect of the first focusing lens 3 is conducive to the second light spot analyzer 4 using a smaller detection surface, and compared with the method 2 and the method 3 of the background technology, it can effectively shorten the optical path required for the parallel light beam reflected by the reflection surface of each reflector 22, thereby reducing the space occupied area.

[0058] The parallel light beam reflected by the reflection surface of each reflector 22 is determined according to the specific use requirements of the laser pump source 200, for example, the directional divergence angle of the parallel light beam is required to be controlled within a specified milliradian range.

[0059] The first light spot analyzer 2 and the second light spot analyzer 4 can both be commercially available products, such as Newport LBP2-VIS2 from Newport Corporation of the United States.

[0060] In order to more conveniently position the first beam splitter 1, in one example, refer to Figure 1 The first beam splitter 1 and the plane where the light outlet 21 is located (for example, the front surface of the bottom shell 20) are 45 degrees, so that the angle between the reflected light of the first beam splitter 1 and the transmitted light of the first beam splitter 1 can be very simply and accurately made to be 90 degrees ± 3 degrees.

[0061] The splitting ratio of the reflected light and the transmitted light of the first beam splitter 1 can be appropriately determined according to the optical power that the first light spot analyzer 2 and the second light spot analyzer 4 can withstand (i.e., without affecting the visual display). In one example, the splitting ratio of the reflected light and the transmitted light of the first beam splitter 1 is 1:99.

[0062] like Figure 1 As shown, in one example, the parallel beam debugging and testing tool 100 further includes a first attenuation plate 5, which is used to be positioned between the first beam splitter 1 and the first light spot analyzer 2. Thus, the optical power of the reflected light from the first beam splitter 1 that is allowed for the first light spot analyzer 2 to work normally can be further ensured.

[0063] Likewise, if Figure 1 As shown, in one example, the parallel beam debugging and testing tool 100 further includes a second attenuation plate 6, which is used to be positioned between the first beam splitter 1 and the first focusing lens 3 and directly adjacent to the first focusing lens 3. Thus, it is possible to further ensure that the optical power of the transmitted light from the first beam splitter 1 that is allowed for the detection surface of the second light spot analyzer 4 to work normally.

[0064] like Figure 1 As shown, in one example, the parallel beam debugging and testing tool 100 also includes a second beam splitter 7 and a power meter 8. The second beam splitter 7 is used to be positioned between the light outlet 21 of the laser pump source 200 and the first beam splitter 1. The second beam splitter 7 is used to reflect and transmit the parallel light beams emitted from each reflector 22 through the light outlet 21. The angle between the reflected light of the second beam splitter 7 and the transmitted light of the second beam splitter 7 is 90 degrees ± 3 degrees. The transmitted light of the second beam splitter 7 propagates toward the first beam splitter 1 (i.e., as the incident light of the first beam splitter 1). The power meter 8 is used to be positioned on the travel path of the reflected light of the second beam splitter 7, to receive the reflected light of the second beam splitter 7, and to determine the optical power of the received reflected light of the second beam splitter 7. Through the cooperation of the second beam splitter 7 and the first beam splitter 1, it can be further ensured that the first spot analyzer 2 and the second spot analyzer 4 work normally at their respective allowed optical powers. In addition, the power meter 8 can be used as an energy recovery device to recover the reflected light of the second beam splitter 7, thereby avoiding the risk of damage caused by the reflected light of the second beam splitter 7 being irradiated to the external environment (including people and other equipment) without recovery. The power meter 8 can also be any suitable commercially available product, such as Newport 919P-150-26 of Newport Corporation of the United States.

[0065] Similarly, in the case of using the first beam splitter 1 and the second beam splitter 7, the beam splitting ratio of the first beam splitter 1 and the beam splitting ratio of the second beam splitter 7 can be appropriately determined according to the optical power that the first light spot analyzer 2 and the second light spot analyzer 4 can bear (i.e., without affecting the visual display). In one example, the beam splitting ratio of the reflected light to the transmitted light of the first beam splitter 1 is 1:99, and the beam splitting ratio of the reflected light to the transmitted light of the second beam splitter 7 is 99:1.

[0066] like Figure 1As shown, in one example, the parallel beam debugging and testing tool 100 also includes a third beam splitter 9, a third attenuation plate 10, a second converging lens 11 and a spectrometer 12. The third beam splitter 9 is used to be positioned between the first beam splitter 1 and the focusing lens 3 and is directly adjacent to the first beam splitter 1. The third beam splitter 9 is used to reflect and transmit the transmitted light of the first beam splitter 1. The angle between the reflected light of the third beam splitter 9 and the transmitted light of the third beam splitter 9 is 90 degrees ± 3 degrees. The transmitted light of the third beam splitter 9 propagates toward the first focusing lens 3; the third attenuation plate 10, the second converging lens 11 and the spectrometer 12 are used to be positioned in sequence on the travel path of the reflected light of the third beam splitter 9. The third attenuation plate 10 is used to attenuate the reflected light received from the third beam splitter 9. The second converging lens 11 is used to converge the light after the attenuation of the third attenuation plate 10. The spectrometer 12 is used to receive the light converged by the second converging lens 11 and to measure the characteristics of the beam. The third attenuation plate 10 reduces the power of the reflected light entering the spectrometer 12 to ensure the normal operation of the spectrometer 12. The second converging lens 11 focuses the reflected light from the third beam splitter 9, thereby allowing multiple light spots to enter the optical fiber of the spectrometer 12 with a smaller diameter to measure the characteristics of the light beam (such as wavelength). The spectrometer 12 can be any suitable commercially available product, such as the spectrum analyzer AQ6370D produced by Yokogawa, Japan.

[0067] Similarly, in the case of using the first beam splitter 1 and the third beam splitter 9, the beam splitting ratio of the first beam splitter 1 and the beam splitting ratio of the third beam splitter 9 can be appropriately determined according to the optical power that the first light spot analyzer 2 and the second light spot analyzer 4 can bear (i.e., without affecting the visual display). In one example, the beam splitting ratio of the reflected light to the transmitted light of the first beam splitter 1 is 1:99, and the beam splitting ratio of the reflected light to the transmitted light of the third beam splitter 9 is 99:1.

[0068] In addition, when using the first beam splitter 1, the second beam splitter 7 and the third beam splitter 9, in one example, the splitting ratio of the reflected light to the transmitted light of the first beam splitter 1 is 1:99, the splitting ratio of the reflected light to the transmitted light of the second beam splitter 7 is 99:1, and the splitting ratio of the reflected light to the transmitted light of the third beam splitter 9 is 99:1.

[0069] [Parallel beam debugging and detection method]

[0070] The parallel beam debugging and detection method disclosed in the present invention adopts the aforementioned parallel beam debugging and detection tool 100, and the parallel beam debugging and detection method comprises the steps of:

[0071] S1, providing a laser pump source 200 to be detected, the laser pump source 200 is not equipped with a coupling lens and an optical fiber, and the laser pump source 200 has a plurality of reflectors 22 inside, the reflective surface of each reflector 22 is a plane, and the plurality of reflectors 22 are used to arrange the parallel light beams emitted from the plurality of reflectors 22 through the light outlet 21 into an array;

[0072] S2, positioning parallel beam debugging and testing tool 100, including:

[0073] Position the first beam splitter 1 at the light outlet 21 of the laser pump source 200. The first beam splitter 1 reflects and transmits the parallel light beams emitted from each reflector 22 through the light outlet 21. The angle between the reflected light of the first beam splitter 1 and the transmitted light of the first beam splitter 1 is 90 degrees ± 3 degrees.

[0074] Positioning the first light spot analyzer 2 on the travel path of the reflected light of the first beam splitter 1, so that the first light spot analyzer 2 receives the reflected light of the first beam splitter 1, visually displays the centroid position of the light spot of the reflected light of the first beam splitter 1 received, and compares the centroid position of the light spot with the predetermined first position reference array;

[0075] Positioning the first focusing lens 3 on the traveling path of the transmitted light of the first beam splitter 1 to focus the transmitted light passing through the first beam splitter 1;

[0076] Positioning the detection surface of the second light spot analyzer 4 on the focal plane of the focusing lens, so that the second light spot analyzer 4 receives the light that passes through the first focusing lens 3 and is focused on the detection surface of the second light spot analyzer 4, visually displays the centroid position of the light spot of the focused light, and compares the centroid position of the light spot with the predetermined second reference position point;

[0077] S3, turn on the laser pump source 200, make one of the reflectors 22 work, the light reflected by the reflector 22 comes out through the light outlet 21 and is split by the first beam splitter 1, the first light spot analyzer 2 determines and visually displays the centroid position of the light spot of the reflected light received by the first beam splitter 1 and compares the centroid position of the light spot with the predetermined first position reference array, the second light spot analyzer 4 visually displays the centroid position of the light spot of the light focused on the detection surface of the second light spot analyzer 4 through the first focusing lens 3 and compares the centroid position of the light spot with the predetermined second reference position point;

[0078] S4, based on the visual display of the first light spot analyzer 2 and the comparison of the centroid position of the light spot with the predetermined first position reference array and the visual display of the second light spot analyzer 4 and the comparison of the centroid position of the light spot with the predetermined second reference position point, the adjustment frame 400 drives the clamp 300 to move so that the clamp 300 vertically clamps the reflector 22 from the bottom shell 20 of the laser pump source 200, and the adjustment frame 400 drives the clamp 300 together with the reflector 22 to adjust the reflector 22 so that the centroid position of the light spot visually displayed by the first light spot analyzer 2 is located at the corresponding position in the predetermined first position reference array and the centroid position of the light spot of the focused light visually displayed by the second light spot analyzer 4 is located at the predetermined first reference position point, and an adhesive is applied to the area of ​​the bottom shell 20 corresponding to the reflector 22, so that the reflector 22 vertically falls on the adhesive-coated area of ​​the bottom shell 20 to be fixed, and then the clamp 300 releases the reflector 22;

[0079] S5, stop the reflector 22 from working, repeat steps S3 and S4, so that another reflector 22 among the multiple reflectors 22 works, until all the reflectors 22 are fully inspected and debugged, after which the multiple light beams emitted from the multiple reflectors 22 through the light outlet 21 are parallel light beams arranged in an array.

[0080] All advantages and effects of the parallel beam debugging and detection method disclosed in the present invention are the same as the advantages and effects of the aforementioned parallel beam debugging and detection tool 100, so the description of all advantages and effects of the parallel beam debugging and detection method disclosed in the present invention is omitted here. In addition, in the following, the detailed description of the features and effects that are the same as those of the aforementioned parallel beam debugging and detection tool 100 is omitted.

[0081] In step S4, applying adhesive to the area of ​​the bottom shell 20 corresponding to the reflector 22 can be performed after "the adjustment frame 400 drives the clamp 300 to move so that the clamp 300 vertically clamps the reflector 22 from the bottom shell 20 of the laser pump source 200", or it can be performed after "the adjustment frame 400 drives the clamp 300 together with the reflector 22 to adjust the reflector 22 so that the center of mass position of the light spot visually displayed by the first light spot analyzer 2 is located at the corresponding position in the predetermined first position reference array and the center of mass position of the light spot of the focused light visually displayed by the second light spot analyzer 4 is located at the predetermined first reference position point".

[0082] In one example, combining Figure 1In step S1, in each column of the array formed by the plurality of reflectors 22, the reflector 22 closest to the light exit 21 is at the lowest, and the reflector 22 farthest from the light exit 21 is at the highest, and the middle reflector 22 between the lowest reflector 22 and the highest reflector 22 gradually rises from the direction close to the light exit 21 to the direction far away from the light exit 21; in steps S3 to S4, execution starts from the reflector 22 at the lowest position in each column of the array, and step S5 is executed in sequence as the height of the reflectors 22 gradually increases.

[0083] In one example, if Figure 5 As shown, the fixture 300 is an adsorption fixture. The adjustment frame 400 is a five-dimensional or six-dimensional adjustment frame, the five-dimensional adjustment frame includes three translations and two rotations, and the six-dimensional adjustment frame includes three translations and three rotations. The five-dimensional or six-dimensional adjustment frame can be any suitable commercially available equipment, for example, the five-dimensional adjustment frame can be commercially available from a combination of Newport's M-GON40-U and Newport's M-460A from Newport, a US company.

[0084] like Figure 1 As shown, the laser pump source 200 is internally provided with a slow axis collimator 23 , a fast axis collimator 24 and a COS chip 25 corresponding to each reflector 22 .

[0085] In an example, in step S2 , positioning the parallel light beam debugging and testing tool 100 further includes: positioning the first attenuation plate 5 between the first beam splitter 1 and the first light spot analyzer 2 .

[0086] In one example, in step S2 , positioning the parallel light beam debugging and testing tool 100 further includes: positioning the second attenuation plate 6 between the first beam splitter 1 and the first focusing lens 3 and directly adjacent to the first focusing lens 3 .

[0087] In one example, in step S2, the positioning parallel light beam debugging and detection tooling 100 also includes: positioning the second beam splitter 7 between the light outlet 21 of the laser pump source 200 and the first beam splitter 1, the second beam splitter 7 is used to reflect and transmit the parallel light beams emitted by each reflector 22 through the light outlet 21, the angle between the reflected light of the second beam splitter 7 and the transmitted light of the second beam splitter 7 is 90 degrees ± 3 degrees, and the transmitted light of the second beam splitter 7 propagates toward the first beam splitter 1; positioning the power meter 8 on the travel path of the reflected light of the second beam splitter 7, the power meter 8 is used to receive the reflected light of the second beam splitter 7 and to determine the optical power of the received reflected light of the second beam splitter 7.

[0088] In one example, in step S2, the positioning parallel light beam debugging and detection tooling 100 also includes: positioning the third beam splitter 9 between the first beam splitter 1 and the first focusing lens 3 and the third beam splitter 9 is directly adjacent to the first beam splitter 1, the third beam splitter 9 is used to reflect and transmit the transmitted light of the first beam splitter 1, the angle between the reflected light of the third beam splitter 9 and the transmitted light of the second beam splitter 7 is 90 degrees ± 3 degrees, and the transmitted light of the third beam splitter 9 propagates toward the first focusing lens 3; positioning the third attenuation plate 10, the second converging lens 11 and the spectrometer 12 in sequence on the travel path of the reflected light of the first beam splitter 9, the third attenuation plate 10 attenuates the received reflected light of the third beam splitter 9, the second converging lens 11 is used to converge the light after attenuation by the third attenuation plate 10, and the spectrometer 12 is used to receive the light converged by the second converging lens 11 and to measure the beam characteristics.

[0089] In one example, the parallel light beam debugging and detection method includes step: S6, after step S5 is completed, a coupling lens and an optical fiber are installed in the bottom shell 20 at the light outlet 21 of the laser pump source 200.

[0090] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.

Claims

1. A parallel light beam debugging and detection method, characterized in that: The parallel light beam debugging and detection method comprises the steps of: S1, providing a laser pump source (200) to be detected, wherein the laser pump source (200) is not equipped with a coupling lens and an optical fiber, and the laser pump source (200) has a plurality of reflectors (22) inside, wherein the reflective surface of each reflector (22) is a plane, and the plurality of reflectors (22) are used to arrange parallel light beams emitted from the plurality of reflectors (22) through the light outlet (21) into an array; S2, positioning parallel beam debugging and testing tool (100), including: Positioning the first beam splitter (1) at the light outlet (21) of the laser pump source (200), the first beam splitter (1) reflects and transmits the parallel light beams emitted from each reflector (22) through the light outlet (21), and the angle between the reflected light of the first beam splitter (1) and the transmitted light of the first beam splitter (1) is 90 degrees ± 3 degrees; Positioning the first light spot analyzer (2) on the path of the reflected light from the first beam splitter (1) so that the first light spot analyzer (2) receives the reflected light from the first beam splitter (1), visually displays the centroid position of the light spot of the reflected light from the first beam splitter (1), and compares the centroid position of the light spot with a predetermined first position reference array; Positioning a first focusing lens (3) on a path of the transmitted light of the first beam splitter (1) to focus the transmitted light passing through the first beam splitter (1); Positioning the detection surface of the second light spot analyzer (4) on the focal plane of the focusing lens so that the second light spot analyzer (4) receives light that passes through the first focusing lens (3) and is focused on the detection surface of the second light spot analyzer (4), visually displays the centroid position of the light spot of the focused light, and compares the centroid position of the light spot with a predetermined second reference position point; S3, turning on the laser pump source (200), making one of the reflectors (22) work, the light reflected by the reflector (22) exits through the light outlet (21) and is split by the first spectroscope (1), the first spot analyzer (2) determines and visually displays the centroid position of the light spot of the reflected light received by the first spectroscope (1) and compares the centroid position of the light spot with a predetermined first position reference array, the second spot analyzer (4) visually displays the centroid position of the light spot of the light focused on the detection surface of the second spot analyzer (4) after passing through the first focusing lens (3) and compares the centroid position of the light spot with a predetermined second reference position point; S4, based on the visual display of the first light spot analyzer (2) and the comparison of the center of mass position of the light spot with the predetermined first position reference array and the visual display of the second light spot analyzer (4) and the comparison of the center of mass position of the light spot with the predetermined second reference position point, the adjustment frame (400) drives the clamp (300) to move so that the clamp (300) vertically clamps the reflector (22) from the bottom shell (20) of the laser pump source (200), and the adjustment frame (400) drives the clamp (300) together with the reflector (22) to adjust Adjust the reflector (22) so that the center of mass of the light spot visually displayed by the first light spot analyzer (2) is located at a corresponding position in the predetermined first position reference array and the center of mass of the light spot visually displayed by the second light spot analyzer (4) is located at a predetermined first reference position point, apply adhesive to the area of ​​the bottom shell (20) corresponding to the reflector (22), make the reflector (22) vertically fall on the area of ​​the bottom shell (20) coated with adhesive to be fixed, and then make the fixture (300) release the reflector (22); S5, stop the reflector (22) from working, repeat steps S3 and S4, and make another reflector (22) in the plurality of reflectors (22) work until all the reflectors (22) are tested and debugged. After the debugging is completed, the plurality of light beams emitted from the plurality of reflectors (22) through the light outlet (21) are parallel light beams arranged in an array.

2. The parallel light beam debugging and detection method according to claim 1, characterized in that: In step S2, the positioning parallel light beam debugging and detection tool (100) further includes: The first attenuation plate (5) is positioned between the first beam splitter (1) and the first light spot analyzer (2).

3. The parallel light beam debugging and detection method according to claim 1, characterized in that: In step S2, the positioning parallel light beam debugging and detection tool (100) further includes: The second attenuation plate (6) is used to be positioned between the first beam splitter (1) and the first focusing lens (3) and is directly adjacent to the first focusing lens (3).

4. The parallel light beam debugging and detection method according to claim 1, characterized in that: In step S2, the positioning parallel light beam debugging and detection tool (100) further includes: The second beam splitter (7) is positioned between the light outlet (21) of the laser pump source (200) and the first beam splitter (1), and the second beam splitter (7) is used to reflect and transmit the parallel light beams emitted from each reflector (22) through the light outlet (21), and the angle between the reflected light of the second beam splitter (7) and the transmitted light of the second beam splitter (7) is 90 degrees ± 3 degrees, and the transmitted light of the second beam splitter (7) propagates toward the first beam splitter (1); A power meter (8) is positioned on a path of the reflected light from the second beam splitter (7). The power meter (8) is used to receive the reflected light from the second beam splitter (7) and to determine the optical power of the received reflected light from the second beam splitter (7).

5. The parallel light beam debugging and detection method according to claim 1, characterized in that: In step S2, the positioning parallel light beam debugging and detection tool (100) further includes: The third beam splitter (9) is positioned between the first beam splitter (1) and the first focusing lens (3) and the third beam splitter (9) is directly adjacent to the first beam splitter (1), the third beam splitter (9) is used to reflect and transmit the transmitted light of the first beam splitter (1), the angle between the reflected light of the third beam splitter (9) and the transmitted light of the second beam splitter (7) is 90 degrees ± 3 degrees, and the transmitted light of the third beam splitter (9) is transmitted toward the first focusing lens (3); The third attenuation plate (10), the second converging lens (11) and the spectrometer (12) are positioned in sequence on the path of the reflected light of the third beam splitter (9); the third attenuation plate (10) is used to attenuate the reflected light received from the third beam splitter (9); the second converging lens (11) is used to converge the light attenuated by the third attenuation plate (10); and the spectrometer (12) is used to receive the light converged by the second converging lens (11) and to measure the characteristics of the light beam.

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