Laser-excited electromagnetic receiving ultrasonic integrated testing system

Abstract

This application provides an integrated laser-excited-electromagnetic-received ultrasonic testing system, including a laser shaping unit and an electromagnetic receiving unit. Both the laser shaping unit and the electromagnetic receiving unit are located along the emission path of the laser beam. The laser shaping unit is configured to shape the laser beam to form an annular spot on the surface of the workpiece to be inspected. This annular spot is configured to generate an ultrasonic signal on the workpiece. The electromagnetic receiving unit is configured to process and receive the ultrasonic signal and is located inside the outer contour of the annular spot. This embodiment improves the accuracy of defect detection on the workpiece.

Description

Technical Field

[0001] This application relates to the field of laser-electromagnetic ultrasonic nondestructive testing technology, and in particular to an integrated laser-excited-electromagnetic-received ultrasonic testing system. Background Technology

[0002] The laser excitation system is configured to apply a high-energy pulsed laser to the workpiece surface to excite ultrasonic signals for non-contact inspection. The pulsed laser can be transmitted via spatial optical path or fiber optic cable, and the shape, size, and position of the laser spot generated by the pulsed laser can be flexibly adjusted. The electromagnetic receiving system is configured to receive the ultrasonic signals from the workpiece non-contactly based on the Lorentz force mechanism or magnetostriction mechanism. Combining the laser excitation system and the electromagnetic receiving system forms a laser-excited-electromagnetic-received ultrasonic inspection system, which can meet the needs of rapid non-contact inspection in complex environments such as additive manufacturing and welding.

[0003] The laser-excited-electromagnetic-receiver ultrasonic testing system comprises a laser excitation system and an electromagnetic receiving system, wherein the electromagnetic receiving system includes a receiving unit. When the system inspects a workpiece, the laser excitation system emits a laser beam towards the workpiece surface, and the receiving unit is configured to face the workpiece surface and receive the ultrasonic signals generated by the laser beam on the workpiece. Because the laser excitation system and the electromagnetic receiving system are separate entities, they cannot be linked for control, resulting in a discontinuous testing process.

[0004] In related technologies, to facilitate the coordinated control of the laser excitation system and the electromagnetic receiving system, the laser excitation system and the electromagnetic receiving system are integrated into a single unit, forming a laser excitation-electromagnetic receiving ultrasonic integrated testing system. In this system, a through-hole is typically provided in the central area of ​​the receiving unit, allowing the pulsed laser to be emitted from the through-hole onto the workpiece surface.

[0005] When a laser-excited-electromagnetic-received ultrasonic integrated testing system is used to test a workpiece, the receiving unit faces the workpiece surface, and a pulsed laser is emitted from the through hole to the workpiece surface. The pulsed laser generates an ultrasonic signal on the workpiece, and the receiving unit is configured to receive the ultrasonic signal generated on the workpiece.

[0006] However, during the inspection process, because the middle area of ​​the receiving unit has a through hole, the location where the through hole is located cannot receive ultrasonic signals from below the through hole. When there is a defect in the workpiece located below the through hole, the receiving unit cannot accurately detect the location and shape of the defect. Summary of the Invention

[0007] This application provides a laser-excited-electromagnetic-received ultrasonic integrated testing system to solve the technical problem that the receiving unit cannot accurately detect the location and shape of defects in a workpiece.

[0008] This application provides a laser-excited-electromagnetic-received ultrasonic integrated detection system, including a laser shaping unit and an electromagnetic receiving unit;

[0009] Both the laser shaping unit and the electromagnetic receiving unit are located on the emission path of the laser beam. The laser shaping unit is configured to shape the laser beam so that the laser beam forms an annular spot on the surface of the workpiece to be inspected. The annular spot is configured to generate an ultrasonic signal on the workpiece.

[0010] The electromagnetic receiving unit is configured to process and receive ultrasonic signals, and the electromagnetic receiving unit is located inside the outer contour of the annular light spot.

[0011] In one feasible implementation, the electromagnetic receiving unit is located in the hollow region of the annular light spot.

[0012] In one feasible implementation, the annular light spot is set as a circular annular light spot;

[0013] The electromagnetic receiving unit includes a receiving coil, and the receiving coil and the annular light spot are located on the same central axis.

[0014] In one feasible implementation, the laser shaping unit includes a lens having at least a scattering surface configured to diverge the laser beam in a direction away from the central axis of the laser beam.

[0015] In one feasible implementation, the lens includes a first lens and a second lens, which are arranged sequentially along the emission direction of the laser beam;

[0016] At least one surface of the first lens located in the emission path of the laser beam is a scattering surface;

[0017] The second lens is configured to vertically converge the light rays emitted from the scattering surface onto the workpiece surface, forming a ring-shaped light spot on the workpiece surface.

[0018] In one feasible implementation, the incident surface of the first lens is set to a horizontal plane, and the distance between the exit surface of the first lens and the incident surface of the first lens gradually decreases from both ends to the middle.

[0019] The exit surface of the second lens is set to a horizontal plane, and the distance between the incident surface and the exit surface of the second lens gradually increases from both ends to the middle.

[0020] In one feasible implementation, the electromagnetic receiving unit includes a receiving coil and a magnetic component, with the magnetic component disposed between the receiving coil and the laser shaping unit.

[0021] The magnetic component is configured to form a magnetic field and convert ultrasonic signals on the workpiece into echo signals within the magnetic field;

[0022] The receiving coil includes two coils that are side by side and adjacent to each other, with the portion of the coil located at the adjacent position being designated as the main lobe portion;

[0023] The magnetic component and the main lobe are arranged correspondingly to each other, and the main lobe is configured to receive the echo signal.

[0024] In one feasible implementation, the magnetic component includes a first magnetic part and a second magnetic part that are connected to each other. The shape of the first magnetic part and the main lobe portion are arranged correspondingly to each other. The second magnetic part is fixed to the side of the first magnetic part facing away from the receiving coil, and the cross-sectional area of ​​the second magnetic part is larger than that of the first magnetic part.

[0025] In one feasible implementation, the electromagnetic receiving unit further includes a second housing, which forms a second receiving cavity, and the magnetic components and receiving coil are arranged along the length direction of the electromagnetic receiving unit.

[0026] One end of the second housing is fixed to the laser shaping unit, and the other end of the second housing is provided with a receiving hole, with the main lobe part corresponding to the receiving hole.

[0027] In one feasible implementation, the laser shaping unit further includes a first housing, the first housing having a first receiving cavity, and a lens disposed within the first receiving cavity;

[0028] The first housing is provided with a light entrance hole, which is coaxial with the lens.

[0029] This application provides a laser-excited-electromagnetic-received ultrasonic integrated testing system. This system utilizes a laser shaping unit configured to shape the laser beam. When the laser beam enters the laser shaping unit, the shaping process creates a ring-shaped spot on the surface of the workpiece. An electromagnetic receiving unit is positioned inside the outer contour of this ring-shaped spot, enabling it to process and receive all ultrasonic signals from the workpiece, thus accurately detecting the location and shape of defects on the workpiece. Attached Figure Description

[0030] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and, together with their description, serve to explain this application and do not constitute an undue limitation of the invention. In the drawings:

[0031] Figure 1 This is a schematic diagram of the integrated laser-excitation-electromagnetic receiving ultrasonic detection system provided in the embodiments of this application;

[0032] Figure 2 yes Figure 1 A schematic diagram of a laser-excited electromagnetic receiving ultrasonic integrated testing system for inspecting a workpiece;

[0033] Figure 3 This is a schematic diagram of the annular light spot provided in the embodiments of this application. Figure 1 ;

[0034] Figure 4 This is a schematic diagram of the annular light spot provided in the embodiments of this application. Figure 2 ;

[0035] Figure 5 This is a schematic diagram showing the positional relationship between the annular light spot and the electromagnetic receiving unit provided in the embodiments of this application. Figure 3 ;

[0036] Figure 6 This is a schematic diagram showing the positional relationship between the annular light spot and the electromagnetic receiving unit provided in the embodiments of this application. Figure 4 ;

[0037] Figure 7 This is a schematic diagram of the lens structure provided in the embodiments of this application. Figure 5 ;

[0038] Figure 8 This is a schematic diagram of the lens structure provided in the embodiments of this application. Figure 6 ;

[0039] Figure 9 yes Figure 2 Measurement signal diagram of the workpiece being inspected;

[0040] Figure 10 yes Figure 2 The image shows the scanning imaging results of the workpiece being inspected.

[0041] Explanation of reference numerals in the attached figures:

[0042] 100 - Laser shaping unit; 200 - Electromagnetic receiving unit; 300 - Workpiece; 400 - Ring-shaped spot;

[0043] 101-First lens; 102-Second lens; 103-First housing; 1031-Light entrance aperture; 1032-First receiving cavity;

[0044] 201-Receiving coil; 2011-Main lobe portion; 2012-Side lobe portion; 202-Magnetic component; 2021-First magnetic part; 2022-Second magnetic part; 203-Second housing; 2031-First connector; 2032-Second connector; 2033-Second receiving cavity; 2034-Receiving hole;

[0045] 301 - Defect. Detailed Implementation

[0046] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of this application.

[0047] It should be noted that many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0048] In the description of this invention, it should be understood that the terms "upper," "lower," "inner," "outer," "axial," etc., indicating orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In this invention, unless otherwise expressly specified and limited, the first feature being "upper" or "lower" than the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium.

[0049] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral unit; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. However, specifying a direct connection indicates that the two entities connected are not linked by an intermediate structure, but rather form a whole through a connecting structure. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0050] In this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature.

[0051] The laser excitation system is configured to apply a high-energy pulsed laser to the workpiece surface to excite ultrasonic signals for non-contact inspection. The pulsed laser can be transmitted via a spatial optical path or fiber optic cable, and the shape, size, and position of the laser spot generated by the pulsed laser can be flexibly adjusted. The electromagnetic receiving system is configured to receive the ultrasonic signals from the workpiece non-contactly based on the Lorentz force mechanism or magnetostriction mechanism. Combining the laser excitation system and the electromagnetic receiving system forms a laser-excited-electromagnetic-received ultrasonic inspection system, which can meet the needs of rapid non-contact inspection in complex environments such as additive manufacturing and welding.

[0052] The laser-excited-electromagnetic-receiver ultrasonic testing system comprises a laser excitation system and an electromagnetic receiving system, wherein the electromagnetic receiving system includes a receiving unit. When the system inspects a workpiece, the laser excitation system emits a laser beam towards the workpiece surface, and the receiving unit is configured to face the workpiece surface and receive the ultrasonic signals generated by the laser beam on the workpiece. Because the laser excitation system and the electromagnetic receiving system are separate entities, they cannot be linked for control, resulting in a discontinuous testing process.

[0053] In related technologies, to facilitate the coordinated control of the laser excitation system and the electromagnetic receiving system, the laser excitation system and the electromagnetic receiving system are integrated into a single unit, forming a laser excitation-electromagnetic receiving ultrasonic integrated testing system. In this system, a through-hole is typically provided in the central area of ​​the receiving unit, allowing the pulsed laser to be emitted from the through-hole onto the workpiece surface.

[0054] When using a laser-excited-electromagnetic-received ultrasonic integrated testing system to inspect the surface of a workpiece, the receiving unit faces the workpiece surface, and a pulsed laser is emitted from a through-hole to the workpiece surface. The pulsed laser generates an ultrasonic signal on the workpiece, and the receiving unit is configured to receive the ultrasonic signal generated on the workpiece.

[0055] However, during the inspection process, because the middle area of ​​the receiving unit has a through hole, the location where the through hole is located cannot receive ultrasonic signals from below the through hole. When there is a defect in the workpiece located below the through hole, the receiving unit cannot accurately detect the location and shape of the defect.

[0056] Therefore, this application provides a laser-excited-electromagnetic-received ultrasonic integrated detection system. In this application embodiment, the electromagnetic receiving unit is set inside the outer contour of the annular light spot, thereby solving the technical problem in the prior art that the receiving unit cannot receive ultrasonic signals from below the through hole when the through hole is set, so that the receiving unit cannot accurately detect the location and shape of defects located below the through hole.

[0057] Figure 1 This is a schematic diagram of the integrated laser-excitation-electromagnetic receiving ultrasonic detection system provided in the embodiments of this application; Figure 2 yes Figure 1 A schematic diagram of a laser-excited, electromagnetic-received, ultrasonic integrated testing system for inspecting workpiece 300; wherein, Figure 2 The dashed arrow 'a' in the diagram represents the direction of laser beam propagation.

[0058] This application provides an integrated laser-excited-electromagnetic-received ultrasonic detection system, referring to... Figure 1 and Figure 2 It includes a laser excitation system and an electromagnetic receiving system. The laser excitation system includes a laser emitting device and a laser shaping unit 100, and the electromagnetic receiving system includes an electromagnetic receiving unit 200. The laser emitting device is configured to emit a laser beam to the laser shaping unit 100. It should be noted that the laser emitting device can be a pulsed laser.

[0059] Both the laser shaping unit 100 and the electromagnetic receiving unit 200 are located on the emission path of the laser beam. The laser shaping unit 100 is configured to shape the laser beam so that the laser beam forms an annular spot 400 on the surface of the workpiece 300 to be inspected. The annular spot 400 is configured to generate an ultrasonic signal on the workpiece 300. The electromagnetic receiving unit 200 is configured to process and receive the ultrasonic signal, and the electromagnetic receiving unit 200 is located inside the outer contour of the annular spot 400.

[0060] Figure 3 This is a schematic diagram of the annular light spot 400 provided in the embodiments of this application. Figure 1 ; Figure 4 This is a schematic diagram of the annular light spot 400 provided in the embodiments of this application. Figure 2 ; Figure 5 This is a schematic diagram showing the positional relationship between the annular light spot 400 and the electromagnetic receiving unit 200 provided in the embodiments of this application. Figure 3 ; Figure 6 This is a schematic diagram showing the positional relationship between the annular light spot 400 and the electromagnetic receiving unit 200 provided in the embodiments of this application. Figure 4 .

[0061] It should be noted that, referring to Figure 3 and Figure 4The outer contour of the annular light spot 400 can be of any shape, wherein the interior of the annular light spot 400 has vacancies. For example, refer to... Figure 3 The outer contour of the annular light spot 400 is set to a regular pentagon, and the inner hollow shape is set to a circle. In specific implementations, the outer contour shape and the inner hollow shape of the annular light spot 400 can be set to any shape.

[0062] For example, the electromagnetic receiving unit 200 is located inside the outer contour of the annular light spot 400, which can be divided into the following two cases: The first case is that the electromagnetic receiving unit 200 is located inside the hollow region of the annular light spot 400 (refer to...). Figure 5 The second scenario involves the electromagnetic receiving unit 200 and the annular light spot 400 overlapping (see reference). Figure 6 ).

[0063] For example, the laser shaping unit 100 can also be configured in other forms, such as a double-convex taper converter. In a specific implementation, after the laser beam is shaped by the double-convex taper converter, it can form an annular spot 400 on the surface of the workpiece 300 to be inspected. That is to say, the laser shaping unit 100 can be configured with any structure, as long as the laser shaping unit 100 can shape the laser beam to form an annular spot 400 on the surface of the workpiece 300.

[0064] In actual use, the operator positions the electromagnetic receiving unit 200 toward the surface of the workpiece 300 to be inspected, and directs a laser beam through the laser shaping unit 100. The laser beam forms an annular spot 400 on the surface of the workpiece 300 via the laser shaping unit 100. The annular spot 400 generates a thermoelastic effect or ablation effect on the surface of the workpiece 300, thereby generating an ultrasonic signal on the workpiece 300. The electromagnetic receiving unit 200 processes and receives the ultrasonic signal on the workpiece 300. The ultrasonic signal includes surface wave signal, transverse wave signal, and longitudinal wave signal. The surface wave signal is configured to propagate on the surface of the workpiece 300; the transverse wave signal is configured to propagate inside the workpiece 300; and the longitudinal wave signal is configured to propagate inside the workpiece 300.

[0065] It should be noted that the thermoelastic effect refers to the phenomenon where, when the energy of the laser beam irradiating the surface of the workpiece 300 is insufficient to melt the surface of the workpiece 300, the material on the surface of the workpiece 300 absorbs the light energy and undergoes rapid thermal expansion, generating stress waves with polarization parallel to the surface, namely ultrasonic shear waves. These mainly excite ultrasonic transverse waves and longitudinal waves with relatively small amplitudes, as well as surface waves, among which the surface waves can be Rayleigh waves.

[0066] The ablation effect refers to the phenomenon where, when the power density of the laser beam is high, the energy of the laser beam is sufficient to cause the temperature of the material on the surface of the workpiece 300 to rise sharply to the melting point of the material, causing a small part of the material on the surface of the workpiece 300 to vaporize and form plasma. Then, a reaction force perpendicular to the surface of the workpiece 300 acts on the workpiece 300, exciting a large-amplitude ultrasonic longitudinal wave.

[0067] From the above description, it can be seen that this solution achieves the following technical effects:

[0068] This application provides a laser-excited-electromagnetic-received ultrasonic integrated detection system. This system utilizes a laser shaping unit 100 configured to shape a laser beam. When the laser beam enters the laser shaping unit 100, the beam is shaped to form an annular spot 400 on the surface of the workpiece 300. An electromagnetic receiving unit 200 is positioned inside the outer contour of the annular spot 400, enabling the electromagnetic receiving unit 200 to process and receive all ultrasonic signals from the workpiece 300, thereby accurately detecting the location and shape of defects 301 on the workpiece 300.

[0069] In some examples, refer to Figure 2 and Figure 5 The electromagnetic receiving unit 200 can be located in the hollow area of ​​the annular light spot 400.

[0070] In this embodiment, by setting the electromagnetic receiving unit 200 in the hollow area of ​​the annular spot 400, when the laser beam enters the laser shaping unit 100 and then enters the surface of the workpiece 300 to be inspected via the laser shaping unit 100, the propagation path of the laser beam will not pass through the electromagnetic receiving unit 200, thereby avoiding interference to the electromagnetic receiving unit 200 and improving the accuracy of the inspection.

[0071] In some examples, refer to Figure 4 The annular light spot 400 can be configured as a circular annular light spot; the electromagnetic receiving unit 200 includes a receiving coil 201, and the receiving coil 201 and the circular annular light spot are located on the same central axis.

[0072] When inspecting the surface of the workpiece 300, a laser beam is incident on the laser shaping unit 100 and then incident on the surface of the workpiece 300, generating a circular spot on the surface. For example, the workpiece 300 generates an ultrasonic signal under the irradiation of the circular spot. The expression for the longitudinal wave acoustic field directivity based on the ablation mechanism is as follows:

[0073]

[0074] Where D(θ) is the sound pressure; k is the wave number; θ is the angle between the tangent point on the surface of workpiece 300 and the central axis formed by the receiving coil 201 and the annular light spot 400; r2 is the outer radius of the annular light spot; r1 is the inner radius of the annular light spot; and J1 is the first-order Bessel function of the first kind.

[0075] As can be seen from formula (1), the value of D(θ) is the largest when θ is 0°. That is, when the tangent point on the surface of workpiece 300, the receiving coil 201, and the annular light spot are located on the same central axis, the sound pressure of the annular light spot can reach its maximum on workpiece 300.

[0076] When the sound pressure of the annular light spot reaches its strongest on the workpiece 300, the receiving coil 201 can obtain a higher echo signal, which is more conducive to the detection of defects 301 in the workpiece 300.

[0077] In practical implementation, when inspecting the workpiece 300, the laser excitation-electromagnetic receiving ultrasonic integrated inspection system is usually held by a clamping device such as a robotic arm. By adjusting the clamping device, the position of the inspection system can be adjusted so that the tangent point on the surface of the workpiece 300 and the receiving coil 201 are on the same axis. This allows the sound pressure of the annular light spot to reach its maximum on the workpiece 300, thereby enabling the receiving coil 201 to obtain a higher echo signal, which is more conducive to the detection of defects 301 on the workpiece 300.

[0078] In some examples, refer to Figure 1 and Figure 2 The laser shaping unit 100 may include a lens having at least a scattering surface configured to scatter the laser beam away from the central axis of the laser beam.

[0079] For example, the lens can be configured as an inner conical lens, wherein the incident surface of the inner conical lens is configured as a plane, and the exit surface of the inner conical lens is configured as a scattering surface that is concave towards the incident surface of the inner conical lens. For example, when a laser beam enters through the incident surface of the inner conical lens, the laser beam will diverge in a direction away from the central axis of the laser beam when passing through the exit surface, and the laser beam passing through the scattering surface will form an annular spot 400 on the surface of the workpiece 300.

[0080] In this embodiment, by setting a lens, and the lens having at least a scattering surface, the laser beam can be dispersed in a direction away from the central axis of the laser beam, thereby forming an annular light spot 400 on the surface of the workpiece 300 to be tested. An electromagnetic receiving unit 200 is set inside the outer contour of the annular light spot 400 to process and receive the ultrasonic signal generated by the annular light spot 400 on the workpiece 300.

[0081] Figure 7 This is a schematic diagram of the lens structure provided in the embodiments of this application. Figure 5 ; Figure 8 This is a schematic diagram of the lens structure provided in the embodiments of this application. Figure 6 .in, Figure 7 and Figure 8 The dashed lines d in the diagram represent the propagation paths of the laser beam.

[0082] For example, refer to Figure 7 and Figure 8 The lens includes a first lens 101 and a second lens 102, which are arranged sequentially along the emission direction of the laser beam. At least one surface of the first lens 101 located on the emission path of the laser beam is a scattering surface; the second lens 102 is configured to vertically converge the light rays emitted from the scattering surface onto the surface of the workpiece 300, and form an annular light spot 400 on the surface of the workpiece 300.

[0083] In this embodiment, the first lens 101 is used to disperse the laser beam away from the laser beam, thereby forming a hollow region in the laser beam. In this embodiment, the second lens 102 is used to vertically converge the light emitted from the scattering surface of the first lens 101 onto the surface of the workpiece 300, so as to avoid the receiving coil 201 receiving a strong echo signal without increasing the intensity of the laser beam when the outer contour of the annular spot 400 is large.

[0084] For example, the incident surface of the first lens 101 can be set to a horizontal plane, and the distance between the exit surface of the first lens 101 and the incident surface of the first lens 101 gradually decreases in the direction from both ends to the middle; the exit surface of the second lens 102 can be set to a horizontal plane, and the distance between the incident surface of the second lens 102 and the exit surface of the second lens 102 gradually increases in the direction from both ends to the middle.

[0085] In a specific implementation, the first lens 101 and the second lens 102 are sequentially arranged in the first receiving cavity 1032 along the emission direction of the laser beam, and the first lens 101, the second lens 102, and the light entrance aperture 1031 are arranged coaxially.

[0086] It should be noted that the distance between the exit surface and the incident surface of the first lens 101 gradually decreases from the two ends to the middle. The cross-section of the laser shaping unit 100 along the central axis is quadrilateral, so the two ends of the cross-section of the first lens 101 are the two ends, and the middle is the position of the central axis.

[0087] Similarly, the distance between the incident surface and the exit surface of the second lens 102 gradually increases from the two ends to the middle. The cross-section of the laser shaping unit 100 along the central axis is quadrilateral, so the two ends of the cross-section of the first lens 101 are the two ends, and the middle is the position of the central axis.

[0088] For example, refer to Figure 8 The incident surface of the first lens 101 is set to a horizontal plane, the exit surface of the first lens 101 is set to an arc-shaped structure, and the concave part of the exit surface of the first lens 101 is set towards the second lens 102; the exit surface of the second lens 102 is set to an arc-shaped structure, the incident surface of the second lens 102 is set to an arc-shaped structure, and the convex part of the incident surface of the second lens 102 is set towards the first lens 101.

[0089] In specific implementation, refer to Figure 7 The first lens 101 can be configured as an inner conical lens, and the second lens 102 can be configured as an outer conical lens.

[0090] For example, refer to Figure 7 The supplementary angles of the inner and outer conical lenses are both set to β, and the distance between the inner and outer conical lenses is l. The inner radius of the annular spot formed by the inner and outer conical lenses on the workpiece surface 300 is b. Then:

[0091] b=ltanβ (2)

[0092] According to formula (2), the relationship between the lens parameters and the inner radius of the annular light spot can be obtained, and the inner radius of the annular light spot is finally set to be consistent with the radius of the electromagnetic receiving unit 200, so as to ensure that the electromagnetic receiving unit 200 is located in the hollow area of ​​the annular light spot.

[0093] In specific implementation, refer to Figure 7 and Figure 8 The laser beam enters through the entrance aperture 1031 and sequentially enters the incident surface and exit surface of the first lens 101. On the exit surface of the first lens 101, the laser beam is dispersed in a direction away from the central axis of the laser beam and dispersed to the incident surface of the second lens 102. On the incident surface of the second lens 102, the laser beam converges and passes through the exit surface of the second lens 102, perpendicularly converging onto the surface of the workpiece 300 to form a circular spot. The circular spot generates an ultrasonic signal on the workpiece 300, and the electromagnetic receiving unit 200 receives and processes the ultrasonic signal.

[0094] In this embodiment, by making the distance between the exit surface and the incident surface of the first lens 101 gradually decrease from both ends to the middle, and the distance between the incident surface and the exit surface of the second lens 102 gradually increase from both ends to the middle, a circular annular light spot can be formed on the surface of the workpiece 300.

[0095] In some examples, the electromagnetic receiving unit 200 includes a receiving coil 201 and a magnetic element 202, the magnetic element 202 being disposed between the receiving coil 201 and the laser shaping unit 100; the magnetic element 202 is configured to form a magnetic field and convert the ultrasonic signal on the workpiece 300 into an echo signal within the magnetic field; the receiving coil 201 includes two parallel adjacent coils, the portion of the coil located at the adjacent position of the two coils being configured as the main lobe portion 2011; the magnetic element 202 and the main lobe portion 2011 are arranged correspondingly to each other, and the main lobe portion 2011 is configured to receive the echo signal.

[0096] For example, the receiving coil 201 can be configured as a butterfly coil, which includes a main lobe portion 2011 and a side lobe portion 2012 disposed opposite to the main lobe portion 2011.

[0097] In practice, a laser beam enters the laser shaping unit 100 through the entrance aperture 1031 and forms a ring-shaped spot on the surface of the workpiece 300. When the peak power density of the laser beam is less than the material damage threshold of the workpiece 300 surface, an ultrasonic signal is generated on the workpiece 300 based on the thermoelastic mechanism. When the peak power density of the laser beam is greater than the material damage threshold, an ultrasonic signal is generated on the workpiece 300 based on the ablation mechanism. The ultrasonic signal propagating on the workpiece 300 is reflected after encountering the defect 301. The echo signal from the defect 301 contains the reflected transverse wave and the transverse wave after waveform conversion. When the transverse wave reaches the surface of the workpiece 300 below the receiving coil 201, the transverse wave signal is received by the receiving coil 201 based on the Lorentz force mechanism or the magnetostriction mechanism, generating an induced electromotive force. The induced electromotive force is then processed by amplification and filtering circuits to obtain the echo signal from the defect 301.

[0098] In this embodiment, the magnetic component 202 and the main lobe portion 2011 are arranged correspondingly to each other, and the main lobe portion 2011 is configured to receive echo signals, thereby reducing the signal-to-noise ratio when the main lobe portion 2011 and the side lobe portion 2012 simultaneously receive echo signals and improving the accuracy of detection.

[0099] For example, the magnetic component 202 includes a first magnetic part 2021 and a second magnetic part 2022 that are connected to each other. The shape of the first magnetic part 2021 and the main lobe portion 2011 are respectively arranged to correspond to each other. The second magnetic part 2022 is fixed to the side of the first magnetic part 2021 that is away from the receiving coil 201, and the cross-sectional area of ​​the second magnetic part 2022 is larger than the cross-sectional area of ​​the first magnetic part 2021.

[0100] For example, the shape of the first magnetic part 2021 can be adapted to the main lobe part 2011.

[0101] The embodiments of this application enhance the magnetic field strength of the main lobe portion 2011 by setting the second magnetic part 2022, and improve the intensity of the echo signal received by the main lobe portion 2011, thereby improving the accuracy of detection.

[0102] For example, the electromagnetic receiving unit 200 further includes a second housing 203, which forms a second receiving cavity 2033. The magnetic component 202 and the receiving coil 201 are arranged along the length direction of the electromagnetic receiving unit 200. One end of the second housing 203 is fixed to the laser shaping unit 100, and the other end of the second housing 203 is provided with a receiving hole 2034. The main lobe portion 2011 is provided corresponding to the receiving hole 2034.

[0103] For example, one end of the second housing 203 is fixed to the exit surface of the second lens 102.

[0104] In this embodiment, the main lobe portion 2011 is positioned to correspond to the receiving hole 2034, so that the main lobe portion 2011 directly faces the surface of the workpiece 300, thereby enabling better reception of the echo signal from the surface of the workpiece 300.

[0105] For example, the second housing 203 includes a first connector 2031 and a second connector 2032; one end of the first connector 2031 is fixed to the exit surface of the second lens 102, and the other end of the first connector 2031 is provided with a mating part; one end of the second connector 2032 is provided with a connecting part that is adapted to the mating part, and the other end of the second connector 2032 is provided with a receiving hole 2034; the first connector 2031 and the second connector 2032 are detachably connected through the mating part and the connecting part.

[0106] This application embodiment facilitates the disassembly of the second housing 203 by including a first connector 2031 and a second connector 2032 that can be detachably connected to the first housing 103, thereby facilitating the assembly and disassembly of the magnetic component 202 and the coil.

[0107] For example, one of the mating part and the connecting part includes an annular groove, the annular groove including a first mating surface and a second mating surface that are connected to each other; the other of the mating part and the connecting part includes an annular boss, the annular boss including a first connecting surface and a second connecting surface that are connected to each other, wherein the first connecting surface and the first mating surface abut against each other, and the second connecting surface and the second mating surface abut against each other.

[0108] In some examples, the laser shaping unit 100 further includes a first housing 103, which has a first receiving cavity 1032 and a lens disposed within the first receiving cavity 1032; the first housing 103 is provided with an entrance aperture 1031, which is coaxially arranged with the lens.

[0109] The embodiments of this application, through the provision of the first housing 103, can be used to accommodate a lens. By aligning the entrance aperture 1031 and the lens coaxially, the embodiments of this application enable the laser beam to directly enter the lens through the entrance aperture 1031 for shaping, thereby improving the utilization rate of the laser beam.

[0110] In some examples, refer to Figure 2 The clamping device integrates a clamping and detection system, so that the receiving hole 2034 is positioned facing the surface of the workpiece 300. The pulsed laser beam is injected into the laser shaping unit 100 through the light entrance hole 1031. The laser beam is dispersed to the second lens 102 in a direction away from the central axis of the laser beam through the exit surface of the first lens 101. The laser beam is then projected onto the surface of the workpiece 300 through the second lens 102 to form a circular spot. The circular spot generates an ultrasonic signal on the workpiece 300 based on a thermoelastic mechanism or an ablation mechanism. The ultrasonic signal cuts the magnetic field lines at a position below the magnetic component 202 and is received by the receiving coil 201 to generate an induced electromotive force.

[0111] It should be noted that, in specific implementation, the receiving coil 201 is connected to the amplification circuit so that the induced electromotive force is processed by the amplification circuit to obtain the ultrasonic signal of the defect 301.

[0112] Figure 8 yes Figure 2 Measurement signal diagram of workpiece 300 being inspected; Figure 9 yes Figure 2 The scanning imaging result of the workpiece 300 being inspected.

[0113] Reference Figure 8 Curve A is a graph showing the change in amplitude as the detection time changes. In curve A, B represents the amplitude of defect 301 in workpiece 300. As can be seen from curve A, the integrated detection device provided in this embodiment can accurately detect defect 301 in workpiece 300, and the amplitude A of defect 301 fluctuates more significantly compared to the amplitude at the plane.

[0114] Reference Figure 9 The integrated detection device provided in this application embodiment can accurately simulate the result of defect 301 on the surface of workpiece 300 through the detection device, wherein, Figure 9 C in the diagram represents a simulation of defect 301.

[0115] It is readily understood that, based on the several embodiments provided in this application, those skilled in the art can combine, split, or reorganize the embodiments of this application to obtain other embodiments, none of which exceed the protection scope of this application.

[0116] The above detailed embodiments further illustrate the purpose, technical solution, and beneficial effects of the embodiments of this application. It should be understood that the above are merely specific embodiments of the embodiments of this application and are not intended to limit the protection scope of the embodiments of this application. Any modifications, equivalent substitutions, improvements, etc., made on the basis of the technical solutions of the embodiments of this application should be included within the protection scope of the embodiments of this application.

Claims

1. A laser-excited-electromagnetic-received ultrasonic integrated detection system, characterized in that, It includes a laser shaping unit (100) and an electromagnetic receiving unit (200); Both the laser shaping unit (100) and the electromagnetic receiving unit (200) are located on the emission path of the laser beam. The laser shaping unit (100) is configured to shape the laser beam so that the laser beam forms an annular spot (400) on the surface of the workpiece (300) to be inspected. The annular spot (400) is configured to generate an ultrasonic signal on the workpiece (300). The electromagnetic receiving unit (200) is configured to process and receive the ultrasonic signal, and the electromagnetic receiving unit (200) is located inside the outer contour of the annular light spot (400). The electromagnetic receiving unit (200) is located in the hollow region of the annular light spot (400); The laser shaping unit (100) includes a lens having at least a scattering surface configured to diverge the laser beam in a direction away from the central axis of the laser beam. The lens includes a first lens (101) and a second lens (102), and the first lens (101) and the second lens (102) are arranged sequentially along the emission direction of the laser beam; At least one surface of the first lens (101) located on the emission path of the laser beam is the scattering surface; The second lens (102) is configured to vertically converge the light rays emitted from the scattering surface onto the surface of the workpiece (300) and form the annular light spot (400) on the surface of the workpiece (300); The incident surface of the first lens (101) is set to a horizontal plane, and the distance between the exit surface of the first lens (101) and the incident surface of the first lens (101) gradually decreases from both ends to the middle. The exit surface of the second lens (102) is set to a horizontal plane, and the distance between the incident surface of the second lens (102) and the exit surface of the second lens (102) gradually increases from both ends to the middle.

2. The laser-excited-electromagnetic-received ultrasonic integrated detection system according to claim 1, characterized in that, The annular light spot (400) is configured as a circular annular light spot; The electromagnetic receiving unit (200) includes a receiving coil (201), and the receiving coil (201) and the annular light spot are located on the same central axis.

3. The laser-excited-electromagnetic-received ultrasonic integrated detection system according to claim 1 or 2, characterized in that, The electromagnetic receiving unit (200) includes a receiving coil (201) and a magnetic component (202), wherein the magnetic component (202) is disposed between the receiving coil (201) and the laser shaping unit (100); The magnetic component (202) is configured to form a magnetic field and convert the ultrasonic signal on the workpiece (300) into an echo signal within the magnetic field; The receiving coil (201) includes two coils that are side by side and adjacent to each other, and the portion of the coil located at the adjacent position of the two coils is set as the main lobe portion (2011); The magnetic component (202) and the main lobe portion (2011) are arranged correspondingly to each other, and the main lobe portion (2011) is configured to receive the echo signal.

4. The laser-excited-electromagnetic-received ultrasonic integrated detection system according to claim 3, characterized in that, The magnetic component (202) includes a first magnetic part (2021) and a second magnetic part (2022) connected to each other. The shape of the first magnetic part (2021) corresponds to that of the main lobe portion (2011). The second magnetic part (2022) is fixed to the side of the first magnetic part (2021) facing away from the receiving coil (201), and the cross-sectional area of ​​the second magnetic part (2022) is larger than that of the first magnetic part (2021).

5. The laser-excited-electromagnetic-received ultrasonic integrated detection system according to claim 4, characterized in that, The electromagnetic receiving unit (200) further includes a second housing (203), the second housing (203) forming a second receiving cavity (2033), and the magnetic element (202) and the receiving coil (201) are arranged along the length direction of the electromagnetic receiving unit (200); One end of the second housing (203) is fixed to the laser shaping unit (100), and the other end of the second housing (203) is provided with a receiving hole (2034). The main lobe portion (2011) is provided corresponding to the receiving hole (2034).

6. The laser-excited-electromagnetic-received ultrasonic integrated detection system according to claim 1, characterized in that, The laser shaping unit (100) further includes a first housing (103), the first housing (103) having a first receiving cavity (1032), and the lens being disposed within the first receiving cavity (1032); The first housing (103) is provided with a light entrance hole (1031), and the light entrance hole (1031) and the lens are arranged on the same axis.

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