Double piezoelectric linear motor with three friction self-matching and scanning probe microscope

Abstract

The present invention discloses a bimorph linear motor with triple friction self-matching, which includes a first piezoelectric body, a second piezoelectric body, and a moving rod. The first piezoelectric body and the second piezoelectric body are fixedly connected, and support frames are connected to both the first piezoelectric body and the second piezoelectric body. Friction support portions for supporting the moving rod are provided on the support frames, the first piezoelectric body, and the second piezoelectric body; the friction support portion includes a friction portion connected to the first piezoelectric body and / or the second piezoelectric body, and a first protrusion and a second protrusion located on the support frame. In the operation of the linear motor of the present application, the frictions acting on three positions of the moving rod are self-equal and matched. The double piezoelectric rods formed by the bimorph drive the moving rod to perform linear stepping. The structure is easy to assemble, can maintain operation under ideal conditions, and has a low starting voltage; due to the triple friction self-matching during operation, in an application environment where mechanical structure deformation is caused by factors such as temperature change, the motor still maintains a matching state during the temperature change process, thus being applicable to this extreme environment.

Description

Technical Field

[0001] The present invention relates to the technical fields of nano piezoelectric positioners and scanning probe microscopes, and specifically relates to a dual piezoelectric linear motor and a scanning probe microscope with self-matching of three frictions. Background Art

[0002] Piezoelectric materials have the inverse piezoelectric effect. By applying a voltage signal to a piezoelectric material with a specific shape (such as a piezoelectric sheet, a piezoelectric tube, a piezoelectric stack, etc.), microscopic deformations at the nanometer or even sub-nanometer level can be generated. A piezoelectric motor utilizes a piezoelectric material to construct a framework to accumulate its microscopic deformations, thereby outputting a macroscopic movement displacement and having the characteristics of high resolution at the nanometer level. It has important applications in the fields of scanning probe microscopes, nanoscale manipulation and processing, lithography, and other technical fields.

[0003] Currently, the more popular linear piezoelectric motors are mainly of two types: inertial and non-inertial. Among them, the advantage of the inertial motor is its simple structure, such as the "inertial piezoelectric motor device with multi-zone drive, scanning probe microscope, and control method" (patent authorization number: ZL2014102097478). However, since it uses a pulse signal to drive the piezoelectric body to drive the inertial stepping of the sliding body, its step size is often large, and the accuracy of controlling the absolute displacement is not high, which is not conducive to applications with extremely high positioning accuracy, such as the sub-nanometer level approach operation of the probe to the sample in a scanning tunneling microscope. For non-inertial piezoelectric motors, such as the structures described in the "dual piezoelectric linear nano-positioning piezoelectric driver, its control method, and controller" (patent authorization number: ZL200610161477.3) and KoalaDrive (Rev. Sci. Instrum. 83, 023703 (2012)), which use the sequential deformation of the dual piezoelectric body structure to act on the central body and drive the central body to achieve linear movement positioning. Compared with the common inertial piezoelectric motors, the advantages of the non-inertial motor are as follows: 1. Since the linear movement of the central body comes from the linear (rather than pulsed) drive of the piezoelectric body through static friction, the stepping and positioning accuracy depend on the deformation characteristics of the piezoelectric material, so it has sub-nanometer level accuracy and is particularly suitable for the application of scanning probe microscopes. 2. Due to the non-inertial principle, the structure of the central moving body does not need to use materials such as high-density metals to enhance the inertial effect. Such non-inertial motor designs can use ceramic materials with high hardness and low thermal expansion coefficients. On the one hand, it broadens the selection range of materials for designing friction and friction pairs. On the other hand, since non-metallic materials can be used, it is particularly suitable for application scenarios under extremely harsh conditions such as rapidly changing magnetic fields.

[0004] However, the above design of the non-inertial motor also has defects: 1. The central moving body is supported and guided by three points at both ends and in the middle of the double-voltage body. Its working requirement is that the friction forces at the three points must strictly satisfy that the resultant force of any two points is greater than the third. This requires high adjustment requirements for the friction forces at the three points. Especially under conditions such as temperature changes that cause mechanical structure deformation, it is very difficult for the friction forces at these three points to continuously maintain matching; 2. Three points support a rigid central body, which requires high machining and assembly accuracy of the mechanical structure to achieve approximate collinearity of the three points. Summary of the Invention

[0005] The purpose of the present invention is to provide one to solve the problems raised in the above-mentioned background technology.

[0006] Aiming at the drawback of difficult matching adjustment of friction forces at different positions in the existing non-inertial motor design, the present invention proposes a dual piezoelectric linear motor and a scanning probe microscope with self-matching of three friction forces, which can achieve: 1. The friction force self-matching can be realized when the central moving rod is assembled, and the output thrust of the motor can be adjusted while maintaining the self-matching of all working friction forces through single-point elastic force adjustment; 2. Work under the best self-matching condition of the working friction force to achieve low-voltage startup; 3. In the application environment where mechanical structure deformation is caused by temperature changes and the like, the self-matching characteristic of the working friction force ensures the realization of the motor walking condition; 3. This design can make the contact forces at the three ends of the central moving body basically equal. Based on this, a large thrust of the linear motor can be achieved by further increasing the central elastic force; 4. The central body is made of non-metallic material, and a scanning probe microscope built based on the dual piezoelectric linear motor with self-matching of three friction forces has a compact structure and high control accuracy, and is especially suitable for atomic resolution imaging under conditions of rapid magnetic field change.

[0007] To achieve the above purpose, the present invention provides the following technical solutions:

[0008] A dual piezoelectric linear motor with self-matching of three friction forces, including a first piezoelectric body, a second piezoelectric body, and a moving rod, characterized in that the first piezoelectric body and the second piezoelectric body are fixedly connected, the telescopic directions of the first piezoelectric body and the second piezoelectric body are parallel, support frames are connected to both the first piezoelectric body and the second piezoelectric body, the moving rod is slidably connected to the support frames, and friction support parts for supporting the moving rod are provided on the support frames, the first piezoelectric body, and the second piezoelectric body;

[0009] The friction support part includes a friction part connected to the first piezoelectric body and / or the second piezoelectric body, and a first protrusion and a second protrusion located on the support frame, and the first protrusion and the second protrusion are symmetrically arranged on both sides of the symmetry axis of the friction part and the moving rod.

[0010] As a further solution of the present invention: the first piezoelectric body and the second piezoelectric body are connected in series and fixedly connected, and the friction part is located at the connection of the first piezoelectric body and the second piezoelectric body.

[0011] As a further solution of the present invention: the first piezoelectric body and the second piezoelectric body are of a tubular structure, and the first piezoelectric body and the second piezoelectric body of the tubular structure are coaxially arranged with the moving rod.

[0012] As a further solution of the present invention: the first piezoelectric body and the second piezoelectric body are of a cuboid structure.

[0013] As a further solution of the present invention: the first piezoelectric body and the second piezoelectric body are of an integrated structure, and the middle part of the outer electrode is divided into the first piezoelectric body and the second piezoelectric body that are independently controlled at both ends.

[0014] As a further solution of the present invention: the first piezoelectric body and the second piezoelectric body are of a tubular structure, the second piezoelectric body is sleeved inside the first piezoelectric body, one ends of the first piezoelectric body and the second piezoelectric body are fixedly connected through a support frame, the moving rod is sleeved inside the second piezoelectric body, the first piezoelectric body, the second piezoelectric body and the moving rod are coaxially arranged, a support frame is provided at one end of the first piezoelectric body away from the second piezoelectric body, the moving rod passes through the support frames at both ends, and the free end of the second piezoelectric body is supported and connected to the moving rod through the friction part.

[0015] As a further solution of the present invention: the friction part is a support protrusion made of an elastic body or a quasi-rigid material.

[0016] As a further solution of the present invention: the axis angle between the first protrusion and the second protrusion is 120°.

[0017] As a further solution of the present invention: both ends of the first piezoelectric body and the second piezoelectric body and the support frame are of an integrated structure, and first protrusions and second protrusions integrated with the first piezoelectric body and the second piezoelectric body are provided inside the first piezoelectric body and the second piezoelectric body.

[0018] A scanning probe microscope, characterized in that it includes a bracket, one end of the bracket is fixedly connected to the first piezoelectric body and / or the second piezoelectric body, a probe is provided at one end of the moving rod close to the bracket, a platform for placing a sample is provided at one end of the bracket away from the first piezoelectric body, and the platform is coaxially arranged with the probe.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] 1. During the operation of the linear motor of the present application, the frictions acting on the three positions of the moving rod are self-equal and matched. The two-piece piezoelectric rod composed of bimorphs drives the linear stepping of the moving rod. The structure is easy to assemble, can maintain operation under ideal conditions, and has a low starting voltage. Since the three frictions are self-matched during operation, in an application environment where mechanical structure deformation is caused by factors such as temperature change, the motor still maintains the matching state during the temperature change process, thus being applicable to this extreme environment.

[0021] 2. The present application can adjust the thrust of the linear motor and maintain its operating conditions only by adjusting the elastic force of the elastic body, and can achieve large thrust output.

[0022] 3. The scanning probe microscope built based on the three-friction self-matching bimorph linear motor of the present application. One of the bimorphs uses an XYZ piezoelectric scanning tube, which takes into account both stepping and scanning, has axial and radial compactness, strong rigidity, anti-vibration, and is applicable to ultra-narrow sample spaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic structural diagram of the three-friction self-matching bimorph linear motor of the present invention.

[0024] Figure 2 It is a schematic structural diagram of the three-friction self-matching bimorph linear motor of the present invention.

[0025] Figure 3 It is a schematic structural diagram of the three-friction self-matching bimorph integrated linear motor of the present invention.

[0026] Figure 4 It is a schematic structural diagram of the three-friction self-matching bimorph nested linear motor of the present invention.

[0027] Figure 5 It is a schematic structural diagram of the scanning probe microscope built based on the three-friction self-matching bimorph linear motor of the present invention.

[0028] Figure 6 It is a schematic structural diagram of the three-friction self-matching bimorph linear motor with a convex frame type in the present invention.

[0029] Figure 7 It is a schematic structural diagram of the three-friction self-matching bimorph linear motor with a convex frame type in the present invention.

[0030] Figure 8 It is a schematic structural diagram of the three-friction self-matching bimorph integrated linear motor with a convex frame type in the present invention.

[0031] Figure 9 It is a schematic structural diagram of the three-friction self-matching bimorph, 120-degree double convex frame integrated linear motor with a convex frame type in the present invention.

[0032] Figure 10 It is a schematic structural diagram of a scanning probe microscope built with a convex-rack type three-friction-force self-matching bimorph linear motor in the present invention.

[0033] In the figure: 1 - first piezoelectric body, 2 - second piezoelectric body, 3 - moving rod, 4 - elastic body, 5 - support frame, 51 - first protrusion, 52 - second protrusion, 6 - deformation direction, 7 - double-convex-rack included angle, 8 - bracket, 9 - probe, 10 - sample, 11 - support protrusion. Detailed implementation manners

[0034] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0035] Embodiment 1

[0036] Please refer to Figure 1, in the embodiment of the present invention, a bimorph linear motor with triple friction self-matching includes a first piezoelectric body 1, a second piezoelectric body 2, a moving rod 3 and a friction part 4. In this embodiment, the friction part 4 is an elastic body. The first piezoelectric body 1 and the second piezoelectric body 2 are mechanically connected in series along the deformation direction 6 to form a double piezoelectric rod with the piezoelectric deformation direction as the axis. The double piezoelectric rod is coaxially arranged with the moving rod 3. Both ends of the double piezoelectric rod are connected with a support frame 5. The moving rod 3 is slidably connected with the support frame 5. In both ends of the support frame 5, there are a first protrusion 51 and a second protrusion 52 for supporting the moving rod 3. The first protrusion 51 and the second protrusion 52 are symmetrically arranged with respect to the axis of the elastic body and the moving rod 3, and the included angle between the first protrusion 51 and the second protrusion 52 is 120°. The elastic body is fixed in the middle of the double piezoelectric rod, and elastically presses the moving rod 3 onto the first protrusion 51 and the second protrusion 52 in the support frames 5 at both ends through its elastic force. The first protrusion 51 and the second protrusion 52 in the support frames 5 at both ends support both ends of the moving rod 3 against the direction of the elastic force. The normal pressure directions of the first protrusion 51 and the second protrusion 52 on the moving rod 3 at each end form a 120-degree included angle, and the elastic force is along the bisector direction of this 120-degree included angle. In this way, the normal pressure Fn exerted on the moving rod 3 by the elastic body is divided into half of the force Fn / 2 for each of the first protrusion 51 and the second protrusion 52. This Fn / 2 is equal in value and opposite in direction to the resultant force exerted on the moving rod 3 by the first protrusion 51 and the second protrusion 52. Since the directions of the forces exerted on the moving rod 3 by the first protrusion 51 and the second protrusion 52 form a 120-degree included angle, the normal pressures exerted on the moving rod 3 by the first protrusion 51 and the second protrusion 52 are both Fn / 2, and the resultant force of the normal pressures brought by the two-point support is equal to Fn. When the materials of the elastic body and the first protrusion 51 and the second protrusion 52 are the same (i.e., the friction coefficients are the same), the friction self-matching of three positions is realized, and the friction can be self-adjusted only by adjusting the elastic body.

[0037] Embodiment 2

[0038] Please refer to Figure 2 , for the bimorph linear motor with triple friction self-matching, in this embodiment, the first piezoelectric body 1 and the second piezoelectric body 2 are piezoelectric tubes, and the moving rod 3 is cylindrical. This structure has high symmetry and a high structural natural vibration frequency, and is suitable for high-precision positioning in environments such as variable temperature, strong magnetic field, and strong vibration.

[0039] Embodiment 3

[0040] Please refer to Figure 3 , for the bimorph linear motor with triple friction self-matching, it is characterized in that the first piezoelectric body 1 and the second piezoelectric body 2 are integrally arranged, that is, a complete piezoelectric tube is used, and by dividing the middle section of the outer electrode, two independently controllable piezoelectric tube driving parts are obtained. The advantage of this operation is to ensure the coaxiality of the support frames 5 at both ends.

[0041] Example 4

[0042] Please refer to Figure 4 , a triple-friction self-matching bimorph linear motor. The first piezoelectric body 1 and the second piezoelectric body 2 are nested, that is, the second piezoelectric body 2 is inserted into the first piezoelectric body 1. The first piezoelectric body 1, the second piezoelectric body 2, and the moving rod 3 are coaxially arranged. Among them, the second piezoelectric body 2 is coaxial with the first piezoelectric body 1 and is fixedly arranged at one end. The length L2 of the second piezoelectric body 2 is less than the length L1 of the first piezoelectric body 1. The free ends of the first piezoelectric body 1 and the second piezoelectric body 2 point in the same direction. Support frames 5 are provided at the free end of the first piezoelectric body 1 and the fixed ends of the first piezoelectric body 1 and the second piezoelectric body 2. First protrusions 51 and second protrusions 52 are provided in the support frames 5 at both ends. Their guiding directions are parallel to the deformation direction 6 of the first piezoelectric body 1 and the second piezoelectric body 2. An elastic body is arranged at the free end of the second piezoelectric body 2 to elastically clamp the moving rod 3 between the first protrusions 51 and the second protrusions 52 in the support frames 5 at both ends. The two groups of first protrusions 51 and second protrusions 52 both support the moving rod 3 at two points. The normal pressure directions of the first protrusions 51 and the second protrusions 52 in the support frames 5 at both ends supporting the moving rod 3 at two points and the elastic force direction applied to the moving rod 3 by the elastic body are respectively arccos(L2 / L1) and arccos[(L1 - L2) / L1], and the directions are perpendicular to the piezoelectric body deformation 6 direction. For the case where L1 is equal to 2 times L2, the included angle 7 is 120 degrees.

[0043] Example 5

[0044] Please refer to Figure 5 , a scanning probe microscope using a bimorph linear motor. The first piezoelectric body 1 is an XYZ piezoelectric scanning tube. A bracket 8 is added and arranged coaxially with the first piezoelectric body 1. One end of the bracket 8 is fixed in the middle of the outer wall of the bimorph piezoelectric rod, and a probe 9 or a sample 10 is arranged at the other end, pointing to the moving rod 3. A sample 10 / probe 9 is arranged at the position of the moving rod 3 pointing to the probe 9 / sample 10 end of the bracket 8. The bimorph piezoelectric rod drives the moving rod 3 to move and positions the probe 9 or the sample 10 on the moving rod 3 to the action area of the sample 10 or the probe 9 on the bracket 8. The first piezoelectric body 1, that is, the XYZ piezoelectric scanning tube, is used for XY scanning imaging. In this structure, the first piezoelectric body 1 has both driving and scanning functions, and the structure is compact.

[0045] Example 6

[0046] Please refer to Figure 6 , a triple-friction self-matching bimorph linear motor, including a first piezoelectric body 1, a second piezoelectric body 2, and a moving rod 3. Compared with Example 1, the friction part of the elastic body in Example 1 is replaced with a support protrusion made of a quasi-rigid material, and the rest of the structure is the same as that in Example 1.

[0047] In this embodiment, the elastomer is replaced with a support protrusion 11 made of a quasi-rigid material. By grinding the outer diameter of the moving rod 3, the moving rod 3 can be squeezed by the support protrusion 11 onto the first protrusion 51 and the second protrusion 52 in the support frames 5 at both ends. The elasticity comes from the inherent Young's modulus of the bimorph piezoelectric rod and the moving rod 3. Thanks to the self-matching characteristic of the three frictions of the present invention, even if an elastomer (with a large elastic force adjustment range with the thread) is not used as the elastic force application component, the motor can still work using the self-owned elastic force of the structure (the working frictions self-match). Using this structure can make the assembly of the bimorph piezoelectric rod and the moving rod 3 more compact. On the premise of the same external completed size, the amount of piezoelectric drive material is increased, thereby improving the performance of the motor such as the starting voltage and thrust, and having a higher natural oscillation frequency to enhance the anti-interference ability.

[0048] Embodiment 7

[0049] Please refer to Figure 7 , a bimorph piezoelectric linear motor with three-friction self-matching. Compared with Embodiment 2, in this embodiment, the friction part of the elastomer in Embodiment 2 is replaced with a support protrusion made of a quasi-rigid material, and the rest of the structure is the same as that in Embodiment 2.

[0050] Embodiment 8

[0051] Please refer to Figure 8 , a bimorph piezoelectric linear motor with three-friction self-matching. Compared with Embodiment 2, in this embodiment, the friction part of the elastomer in Embodiment 3 is replaced with a support protrusion made of a quasi-rigid material, and the rest of the structure is the same as that in Embodiment 3.

[0052] Embodiment 9:

[0053] Please refer to Figure 9 , a bimorph piezoelectric linear motor with three-friction self-matching. The support frames 5 at both ends are integrally provided with the first piezoelectric body 1 and the second piezoelectric body 2. The first piezoelectric body 1 and the second piezoelectric body 2 are provided with a first protrusion 51 and a second protrusion 52 that are integrated with the first piezoelectric body 1 and the second piezoelectric body 2. The linear motor structure of this embodiment is more compact. A piezoelectric scanning tube with an outer diameter of 5.4 mm, a wall thickness of 0.5 mm, and a length of 28 mm is used as the bimorph piezoelectric rod, and the moving rod uses a sapphire rod with a diameter of 3.5 mm. The measured starting voltage is 35 volts.

[0054] Embodiment 10

[0055] Please refer to Figure 10 , a scanning probe microscope using a bimorph piezoelectric linear motor. Compared with Embodiment 5, in this embodiment, the friction part 4 of the elastomer in Embodiment 5 is replaced with a support protrusion 11 made of a quasi-rigid material, and the rest of the structure is the same as that in Embodiment 5.

[0056] The principle of the three-friction self-matching bimorph linear motor of the present invention and the middle part of the double piezoelectric rod in the scanning probe microscope adopting an elastomer structure is as follows: The elastic force of the elastomer fixed in the middle of the double piezoelectric rod presses the moving rod on two 120-degree double convex frames. Assuming the elastic force acting on the moving rod by the elastomer is Fn, this elastic force is balanced with the force acting on the moving rod by the 120-degree double convex frame. Since the 120-degree double convex frame adopts a double-point 120-degree angle support, to satisfy the force balance principle, the normal pressure generated by each point of the 120-degree double convex frame on the moving rod is Fn / 2. Therefore, the axial frictional force generated by each 120-degree double convex frame on the moving rod is 2×μFn / 2, which is μFn (where μ is the dynamic friction factor). Under the condition that the relative friction materials of the two ends and the middle part of the double piezoelectric rod corresponding to the moving rod are the same, the frictional force of the elastomer acting on the moving rod is also μFn. Thus, the ideal condition of three-friction self-matching is achieved; Select the first or the second piezoelectric body as the XYZ piezoelectric scanning tube, set the bracket, the probe and the sample. The bracket is coaxially arranged with the double piezoelectric rod, and one end of it is fixed in the middle of the outer wall of the double piezoelectric rod. Part of the bracket is along the axis of the double piezoelectric rod and points to the first / second piezoelectric body. A probe is set on the moving rod, and a sample is set at the position of the bracket relative to the probe. The first or the second piezoelectric body takes into account both the motor stepping and the scanning functions, so as to make the structure of the scanning probe microscope compact and have strong anti-interference ability.

[0057] The principle of the three-friction self-matching bimorph linear motor of the present invention and the middle part of the double piezoelectric rod in the scanning probe microscope adopting a middle convex frame structure is as follows: By grinding the outer diameter of the moving rod, the moving rod can be squeezed by the middle convex frame onto two 120-degree double convex frames. The elasticity comes from the inherent Young's modulus of the double piezoelectric rod and the moving rod. Thanks to the three-friction self-matching characteristic of the present invention, even without using an elastomer (the elastic force has a large adjustment range with the thread) as the elastic force application component, the motor can work by using the self-owned elastic force of the structure (the working frictional force is self-matched). Adopting this structure can make the assembly of the double piezoelectric rod and the moving rod more compact. Under the premise of the same external complete size, the amount of piezoelectric driving material is increased, so as to improve the performance such as the starting voltage and thrust of the motor, and have a higher natural oscillation frequency to enhance the anti-interference ability. Based on this structure, it is suitable to build a scanning probe microscope, especially a scanning tunneling microscope (the axial sensitivity reaches 0.01 nanometers).

[0058] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above-described exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, in any regard, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Accordingly, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention. Any reference signs in the claims should not be construed as limiting the claims involved.

[0059] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment only contains an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A dual piezoelectric linear motor with self-matching of three frictions, comprising a first piezoelectric body (1), a second piezoelectric body (2), and a moving rod (3), characterized in that, The first piezoelectric body (1) and the second piezoelectric body (2) are fixedly connected, the telescopic directions of the first piezoelectric body (1) and the second piezoelectric body (2) are parallel, support frames (5) are connected to both the first piezoelectric body (1) and the second piezoelectric body (2), the moving rod (3) is slidably connected to the support frame (5), and a friction support portion for supporting the moving rod (3) is provided on the support frame, the first piezoelectric body (1), and the second piezoelectric body (2). The friction support portion includes a friction portion (4) connected to the first piezoelectric body (1) and / or the second piezoelectric body (2), and a first protrusion (51) and a second protrusion (52) located on the support frame (5), and the first protrusion (51) and the second protrusion (52) are symmetrically arranged on both sides of the symmetry axis of the friction portion (4) and the moving rod (3).

2. The dual piezoelectric linear motor with triple friction self-matching according to claim 1, characterized in that, The first piezoelectric body (1) and the second piezoelectric body (2) are connected in series and fixedly, and the friction portion (4) is located at the connection of the first piezoelectric body (1) and the second piezoelectric body (2).

3. The dual piezoelectric linear motor with triple friction self-matching according to claim 2, wherein The first piezoelectric body (1) and the second piezoelectric body (2) are of a tubular structure, and the tubular first piezoelectric body (1) and second piezoelectric body (2) are coaxially arranged with the moving rod (3).

4. A bimorph linear motor with triple friction self-matching according to claim 2, characterized in that, The first piezoelectric body (1) and the second piezoelectric body (2) are of a cuboid structure.

5. A bimorph linear motor with triple friction self-matching according to claim 1, characterized in that, The first piezoelectric body (1) and the second piezoelectric body (2) are of an integrated structure, and the middle part of the outer electrode is divided into the first piezoelectric body (1) and the second piezoelectric body (2) that are independently controlled at both ends.

6. The dual piezoelectric linear motor with three friction force self-matching according to claim 1, characterized in that, The first piezoelectric body (1) and the second piezoelectric body (2) are of a tubular structure, the second piezoelectric body (2) is sleeved inside the first piezoelectric body (1), one ends of the first piezoelectric body (1) and the second piezoelectric body (2) are fixedly connected through a support frame (5), the moving rod (3) is sleeved inside the second piezoelectric body (2), the first piezoelectric body (1), the second piezoelectric body (2), and the moving rod (3) are coaxially arranged, a support frame (5) is provided at one end of the first piezoelectric body (1) away from the second piezoelectric body (2), the moving rod (3) passes through the support frames (5) at both ends, and the free end of the second piezoelectric body (2) is supported and connected to the moving rod (3) through the friction portion (4).

7. A dual piezoelectric linear motor with triple friction self - matching according to claim 1 or 2 or 3 or 4 or 5 or 6, characterized in that, The friction portion (4) is a support protrusion (11) made of an elastic body or a quasi-rigid material.

8. A bimorph linear motor with triple friction self-matching according to claim 1, characterized in that The axis included angle between the first protrusion (51) and the second protrusion (52) is 120°.

9. A bimorph linear motor with triple friction self-matching according to claim 1, characterized in that, Both ends of the first piezoelectric body (1) and the second piezoelectric body (2) and the support frame (5) are of an integrated structure, and first protrusions (51) and second protrusions (52) integrated with the first piezoelectric body (1) and the second piezoelectric body (2) are provided inside the first piezoelectric body (1) and the second piezoelectric body (2).

10. A scanning probe microscope using the triple-friction self-matching piezoelectric linear motor of claim 1, characterized in that, characterized in that, It includes a bracket (8), one end of the bracket (8) is fixedly connected to the first piezoelectric body (1) and / or the second piezoelectric body (2), a probe (9) is provided at one end of the moving rod (3) close to the bracket (8), a platform for placing a sample is provided at one end of the bracket (8) away from the first piezoelectric body (1), and the platform is coaxially arranged with the probe (9).

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