Scanning probe microscope

The scanning probe microscope employs a control circuit with controllers to maintain and actively attenuate detachment-induced oscillations, enhancing sampling rate and imaging accuracy by controlling tip-sample interactions and reducing distortions.

WO2026087743A1PCT designated stage Publication Date: 2026-04-30ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Filing Date
2025-10-24
Publication Date
2026-04-30

AI Technical Summary

Technical Problem

Scanning probe microscopes, particularly in off-resonance tapping mode, suffer from detachment-induced oscillations of the cantilever upon tip detachment, leading to distorted interaction curves and limited performance due to the inability to control tip-sample interactions throughout the entire cycle, which can cause undesired distortions and potential damage to the tip and sample.

Method used

A scanning probe microscope with a control circuit that includes a first controller to maintain tip-sample interaction within a predetermined range and a second controller to actively attenuate detachment-induced oscillations of the cantilever by generating a third actuating motion opposing these oscillations, using a control signal proportional to the cantilever's velocity or position.

Benefits of technology

This approach enhances the sampling rate and improves imaging accuracy by actively attenuating detachment-induced oscillations, preventing distortions in the interaction curve and reducing potential damage, thereby optimizing the performance of the scanning probe microscope.

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Abstract

A scanning probe microscope (10) is described, comprising a probe (1) with a cantilever (11) carrying a tip (12), the scanning probe microscope configured to generate a first actuating motion changing a distance of the tip (12) with respect to a sample surface, a detector (4) configured to detect a tip position and to output a tip position signal, a control circuit (5) configured to generate a first control signal using the tip position signal, the scanning probe microscope being configured to generate a second actuating motion adapting a distance between the probe (1) and the sample surface using the first control signal, wherein the control circuit (5) is configured to generate a second control signal, the scanning probe microscope being configured to generate, using the second control signal, a third actuating motion at least partially opposing detachment-induced oscillations of the cantilever (11) induced by detaching of the tip (12) from the sample surface while retracting the probe (1).
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Citation Information

Patent Citations

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  • Scanning probe microscope and method for increasing a scan speed of a scanning probe microscope in the step-in scan mode

    US20190250185A1

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    WO2023121467A1