Nanoscale thermometry

Abstract

A nanoscale temperature detector comprising a diamond sensing probe (1) having a lateral dimension of at least 200 nanometers and having a sensing tip (2) with a radius of curvature (R) of less than 100 nanometers, less than 10 nanometers or less than 1 nanometer and a plurality of color centers (5) showing temperature sensitive features in the emission count rate. The diamond sensing probe (1) has a lateral dimension of at least 200 nanometers and is connected to a detector system (13) by a mounting structure (6). A thermal isolation barrier (3) thermally separates the sensing probe (1) from the detector system (13).

Description

Technical Field

[0001] This invention relates to high spatial resolution temperature measurement. Background Technology

[0002] High spatial resolution thermometry, and especially nanoscale thermometry, has applications in many technological fields, including microelectronics, thermally assisted magnetic recording, materials science (particularly relevant to thermoelectric materials, thermal interfaces, and diodes), nanophotonics (including thermo-optoelectronics, photonic devices, and thermal plasmas), and biology for determining heat generation, hyperthermia, or detecting high metabolic activity.

[0003] Currently, the most common techniques for measuring temperature at nanometer-scale resolution are: (i) scanning thermal microscopy (SThM), with a typical spatial resolution of 10–500 nanometers (nm) and a temporal resolution of 0.1–50 milliseconds (ms), capable of determining thermal uncertainties of a few millikelvin (mK); (ii) thermal reflectance, with a typical spatial resolution of approximately 500 nm and a temporal resolution of approximately 100 nanoseconds (ns), suitable for measuring temperature changes of approximately 100 mK; or (iii) Raman scattering, with a typical spatial resolution of approximately 500 nm and a temporal resolution of approximately 200 nanoseconds (ns), capable of determining thermal uncertainties of approximately 100 mK. These different methods are accompanied by various drawbacks, such as the need for a vacuum during measurement, non-quantitative measurements, crosstalk between the measuring equipment and the morphology of the sample affecting the measurement results, limited dynamic temperature range, and experimental complexity, to name a few.

[0004] The sensitivity range of SThM depends primarily on the probe type and the thermal conductivity of the sample material being measured, especially if the material has, for example, high thermal conductivity encountered in metals.

[0005] Thermal reflection is a very accurate method for determining relative temperature (i.e., temperature difference), but it is not well-suited for determining the actual absolute temperature of the measured sample point.

[0006] In Raman spectroscopy, spatial resolution is limited by diffraction, which in turn depends on the wavelength of the illuminating light. Therefore, the resolution is typically limited to the 500 nm range.

[0007] In recent years, nanoscale thermometry based on color centers in wide-bandgap semiconductors, especially nitrogen vacancies (NVs) in diamond, has become increasingly important. -The central electron spin has been studied as a potential alternative to overcome these limitations. Diamond-based color center thermometry offers significant advantages over conventional thermometric methods because it allows for sensitive and quantitative temperature measurements at nanometer resolution over a wide temperature range, particularly from about 100 K to about 600 K. As another advantage, diamond is chemically inert and non-toxic, thus allowing its application in biological systems and chemical reactions.

[0008] Single-crystal synthetic diamond, and especially isotopically enriched diamond, is known to have the highest thermal conductivity of any known solid at room temperature. Due to its extremely high thermal conductivity (ranging from 1 to over 3 kW / (m*K)) and low heat capacity, diamond is suitable for measuring the temperature of virtually any sample material, including metals with high thermal conductivity. This is a significant advantage compared to silicon-based sensing probes commonly used in SThM, which are unsuitable for measuring both metallic and single-crystal semiconductor materials because the probe's thermal conductivity is comparable to or even lower than that of the target sample material.

[0009] Several methods have been published to date that benefit from the advantages of diamond-based color center thermometry.

[0010] Document WO2014051886 discloses a diamond sensing probe having an external coupling structure as a diamond nanopillar and a color center located within 40 nm of the sensing surface of the sensing probe.

[0011] Document US20160018269 discloses a method for utilizing NV in diamond - A method for nanoscale temperature measurement down to mK temperature uncertainty using color centers, suitable for measuring intracellular heating processes.

[0012] The cited literature uses single diamond nanocrystals or columnar diamond nanostructures as sensors.

[0013] Document EP3376245 discloses a sensor device based on a microscale probe with a spin defect. The sensor device also includes a microwave antenna positioned at a distance of less than 500 micrometers from the spin defect. The embodiments shown in EP3376245 primarily relate to applications in magnetic measurements.

[0014] Due to its extremely high thermal conductivity, large diamond thermal probes are considered unsuitable for nanoscale temperature measurement because their large volume would significantly increase thermal conductivity. To date, the use of cubic micrometers (μm) has not been explored. 3A method for using a single diamond sensing probe at the microscale is proposed. At the microscale volume, the thermal conduction of diamond rapidly equalizes the temperature within the scanning probe, resulting in poor spatial resolution, considering that typical tip shapes consist of cylinders with flat end faces approximately 200 nm in diameter. Furthermore, a larger single diamond probe would act as a powerful heat sink, thus prohibiting quantitative temperature assessment.

[0015] Microscale single-crystal diamond sensor probes offer considerable advantages, such as their ability to measure highly conductive sample materials like metals with high sensitivity, their robustness, and their ease of scalable production. However, to fully benefit from these advantages, the significant heat dissipation problem caused by the large volume of a single diamond must be overcome. Currently known methods and techniques do not provide a satisfactory solution to this problem. Summary of the Invention

[0016] One object of the present invention is to provide a robust single diamond sensor probe at the microscale volume, which can achieve high thermal sensitivity over a wide temperature range at nanoscale spatial resolution.

[0017] Another object of the present invention is to provide a single diamond thermal sensor probe with a microscale volume, which provides a solution to the problem of excessive heat dissipation and overcomes the shortcomings and limitations of the prior art.

[0018] As used in this paper, microscale volume can indicate volumes included in 10 -3 μm 3 and 20μm 3 Between, for example, in 10 -3 μm 3 and 1μm 3 The volume between. Having a larger volume (e.g., 1 μm) 3 Up to 10μm 3 or up to 20μm 3 The realization of (between) is also possible, and may be advantageous in some cases.

[0019] Specifically, the present invention aims to provide a method for reliably measuring the temperature of a high thermal conductivity material (e.g., a metal) with spatial resolution in the nanometer range.

[0020] According to the invention, these objectives are achieved by the objectives of the appended claims, particularly by claim 1, which, among other essential features, discloses a pointed sensing tip and a thermal isolation barrier, the pointed sensing tip being part of a microscale single diamond sensing probe.

[0021] A thermal isolation barrier is positioned to thermally separate the diamond sensor probe from the detector system. It can be part of a scanning probe, a diamond holding structure, or a mounting structure. It can also be a connection area between said parts.

[0022] A thermal isolation barrier is configured to reduce or prevent heat diffusion into the detection system, thereby minimizing temperature exchange between the sample heat source and the detection system. The single diamond probe is thermally isolated from its environment, thus limiting its function as a heat sink. Therefore, an imbalance in temperature between the thermal measurement system and the sample heat source is avoided. Due to this thermal isolation, temperature measurement is minimally invasive because only a minimal amount of heat is extracted from the sample. This thermal isolation also results in maximum quantitative measurement.

[0023] A single diamond probe is characterized by a sharp sensing tip with a radius of curvature R that can be between 400 nm and 100 nm, or preferably less than 100 nm, ideally between 10 nm and 1 nm, for high spatial resolution applications. Therefore, the sensing probe is configured to perform measurements at a spatial resolution of less than 100 nm, preferably less than 10 nm, and ideally about 1 nm.

[0024] As disclosed in claim 1 and further described in claim 8, diamond sensing probes exhibit superior robustness compared to prior art due to their microscale volume and advantageous shape. Their larger size and geometry overcome the need for fragile nanoneedle or nanopillar sensing tip structures used in the prior art.

[0025] Advantageously, the microscale sensing probe (including its sensing tip) is made of a single diamond crystal, thereby providing a direct and unobstructed thermal connection between the sensing tip and the luminescent color center located within the microscale probe. The probe benefits from the high thermal conductivity and low heat capacity of the diamond material, thus providing an efficient thermal link between the sensing tip and the temperature sensor (i.e., the color center). This arrangement results in measurements with excellent thermal sensitivity.

[0026] Furthermore, the larger volume of a single diamond sensor probe allows for increased light collection efficiency from the sensing color centers and a larger number of color centers, both of which allow for the detection of even smaller temperature differences, thereby improving temperature sensitivity.

[0027] Advantageously, the microscale sensing probe includes multiple color centers, whose temperature-dependent fluorescence intensity is increased proportionally to their number. The probe's sensitivity is related to 1 / (N). 1 / 2 Proportional, where N is the number of NV centers contributing to the signal. In short, a larger number of color centers enhances the temperature-specific optical signal of the sample temperature transmitted by the sensing probe.

[0028] As another advantage, multiple color centers can be located in a defined band at a certain distance from the sensing tip, thereby further improving the sensitivity information, particularly the thermal uncertainty, due to the density of color centers in the band. The narrow width of the band also reduces the uncertainty caused by the thermal gradient across the scanning probe.

[0029] The sensing probe has an advantageous overall geometry, preferably conical or pyramidal, and is capable of optically guiding light toward the output window. This optical guidance enhances collection efficiency and increases the number of photons emitted toward the collecting optics. This improves thermal sensitivity.

[0030] Diamond is known to have extremely high heat resistance, enabling it to operate at temperatures ranging from about 100K to about 600K, thus providing a very wide operating temperature range for sensor probes.

[0031] Due to the inherent chemical inertness of diamond, the sensor probe is also robust to changes in the local chemical environment, which is of particular interest in the study of nanochemical reactions. Because diamond is non-toxic, the thermal detection system is also suitable for the thermal analysis of biological systems.

[0032] Advantageously, the diamond sensing probe is positioned very close to the sample heat source using a mounting system connected to the sensor probe via a thermal isolation barrier. For efficient quantitative thermal sensing, the sensor tip is positioned in contact with or very close to the surface of the sample heat source (i.e., less than 10 nm).

[0033] Furthermore, to determine the proximity and / or contact between the sensing tip and the surface of the sample heat source, the diamond holding structure can be employed in contact mode, non-contact mode, or tapping mode, depending on the nature of the sample heat source, according to commonly known methods. In this way, the position of the sensor tip can be adjusted for the morphology and type of the surface to be measured. Therefore, undesirable variations in the distance between the sensor tip and the sample surface during measurement can be avoided. This controlled positioning also prevents damage to the sample heat source or sensing probe due to inaccurate manipulation of the sensor probe.

[0034] Regarding what is known in the art, this invention offers the advantage of combining outstanding robustness with unmet thermal sensitivity at ambient temperatures and excellent spatial resolution. Furthermore, the disclosed diamond sensor probe is capable of quantitatively measuring sample materials with high thermal conductivity, such as metals. These advantages are achieved through the combination of NV... - The excellent temperature sensitivity of the spin center is achieved by the extremely high thermal conductivity of the microscale single-crystal diamond, which is thermally separated from the detector system. Attached Figure Description

[0035] Exemplary embodiments of the invention are disclosed in the description and illustrated with reference to the accompanying drawings, wherein:

[0036] Figure 1 schematically shows a view of the scanning sensor probe 1, wherein,

[0037] (A) shows the scanning sensor probe 1 connected to the mounting structure 6.

[0038] (B) is a detailed view of the scanning sensor tip 2.

[0039] Figure 2 The possible location of the sensor color center 5 in the scanning sensor probe 1 is schematically shown, wherein...

[0040] (A) A set of color centers 5 are located at a certain distance from the sensor tip 2.

[0041] (B) Color centers 5 are distributed across the entire volume of sensor probe 1.

[0042] (C) One or more color centers 5 are located in the sensor tip 1.

[0043] Figure 3 This is a schematic representation of the entire temperature measurement system.

[0044] Figure 4 This is an overview of the performance of available nanoscale thermal imaging devices at room temperature. The figure is adapted from Halbertal et al., “Nanoscale thermal imaging of dissipation in quantum systems”, Nature 539, 407. Detailed Implementation

[0045] Referring to Figure 1, a schematic diagram of this preferred embodiment depicts the basic elements of a nanoscale temperature detector, including a scanning sensing probe 1, a plurality of sensor color centers 5 located within the scanning probe 1, a mounting system 6, and a thermal isolation barrier 3 separating the sensing probe 1 from the detector system. The scanning sensing probe 1 is preferably a single-crystal diamond probe with microscale volume, characterized by a sharp apex serving as the scanning sensor tip 2. In a preferred embodiment, the temperature detector further includes a diamond holding structure 4, which is preferably part of the same diamond single crystal forming the scanning sensor probe 1. The diamond holding structure 4 essentially serves as a connection to the mounting structure 6.

[0046] Regarding the sample heat source, the scanning sensor can be positioned in contact, non-contact, or perforated mounting modes. The sample heat source is located on the sample stage 12. The positioning of the scanning sensor is preferably achieved using a quartz tuning fork method according to known methods, wherein the distance from the diamond to the sample is based on the piezoelectric effect and is achieved with sub-nanometer precision.

[0047] Alternatively, similar to known positioning methods that rely on cantilever, diamond retaining structures can be used for controlled positioning.

[0048] To achieve the desired spatial resolution of less than 100 nm, less than 10 nm, or less than 1 nm, the radius of curvature R of the scanning sensor tip 2 is less than 100 nm, less than 10 nm, or less than 1 nm.

[0049] The surface temperature of the sample heat source 8 is sensed by optically excited color centers 5 located within the sensing probe 1. The set of color centers 5 can be distributed across the entire volume of the sensing probe, positioned very close to the apex of the sensing probe, as shown below. Figure 2 As shown in B and 2C, or in a preferred embodiment, at a separation distance from the sensor tip 2 of the scanning probe 1, such as Figure 2 As shown in Figure A, this separation distance ranges from 0 nm to 1 μm.

[0050] In a preferred embodiment, the sensor color center 5 is a nitrogen-vacancy (NV) point defect in a diamond lattice. One characteristic of the NV center is photoluminescence. The NV center can be optically excited by visible light, particularly yellow-green laser light or LED light with a wavelength of 575 nm (typically 515 nm or 532 nm). This light is emitted by an optical excitation source 9a that forms part of the detector system. During relaxation, the excited NV center 5 emits red fluorescence, which can be detected by an optical detector 9b included in the detector system 13. Furthermore, the spin sublevel of the NV center can be manipulated using a microwave field emitted from a nearby antenna, which influences the number of photons emitted by the NV center when resonating with the spin sublevel, thus constituting an optically detected magnetic resonance (ODMR) spectrum. Importantly, the ODMR spectra of these NV centers exhibit temperature-sensitive characteristics, particularly temperature-dependent zero-field splitting, thereby enabling fluorescence-based thermometry.

[0051] The temperature-sensitive NV center 5 is directly linked to the sensor tip 2 via a single-crystal diamond material of the sensor probe 1. This diamond link ensures rapid heat conduction from the tip 2 to the sensor NV center 5. The sensor probe includes color centers up to 100 ppm, where ppm, or parts per million, refers to the ratio between the number of NV centers and the number of carbon atoms in the diamond lattice. Typically, it is around 10. -3 μm 3 up to 1μm 3 The sensor probe 1 of the volume includes up to 3000 sensor NV centers 5.

[0052] The sensor probe is capable of self-calibrating temperature measurements. This is due to the fact that the zero-field splitting D0 of the electron spin resonance line at the NV center has a well-known temperature dependence, which is the same for all NV centers and requires no calibration. Specifically, D0 is 2.87 GHz at room temperature, where dD0 / dT ~ -78 kHz / K. Further perturbations (e.g., electric and / or magnetic fields, strain, etc.) may affect D0. However, since these effects are well-known, their influence can be isolated from the measured temperature changes.

[0053] The microscale diamond sensor probe 1 has a geometry adapted to guide light emitted from the color center 5, preferably oriented toward the optical window 7. The geometry includes at least a lateral dimension of at least 200 nm and a sharp vertex forming the sensor tip 2.

[0054] In one embodiment, the geometry is a cone, pyramid, or suitable divergent shape. The conical, pyramidal, or similar shape may have a minimum lateral dimension between 200 nm and 500 nm, and a sidewall tilt angle between 1° and 45°, preferably between 5° and 30°. Optionally, the shape may be truncated. The preferred shape widens from the sensor tip 2 to the optical window 7, and this widening is adapted to enhance thermal conductivity.

[0055] In an alternative embodiment, the sensor tip 2 has a parabolic shape. This shape can also be a partial parabolic shape, for example, near the tip.

[0056] In terms of thermal sensitivity, the microscale volumetric sensor probe 1 outperforms known diamond-based thermal sensors in the prior art. At room temperature, the sensor described in this invention can achieve low K / (Hz) readings. 1 / 2 Up to mK / (Hz) 1 / 2 Thermal sensitivity values ​​within the range. Currently, under the same temperature conditions, the most sensitive single NV-centered diamond thermal probe can reach approximately 65 mK / Hz. 1 / 2 Sensitivity.

[0057] For example, from the perspective of depicting spatial resolution relative to thermal sensitivity Figure 4 As can be seen from the graphic presentation, the microscale sensor probe 1 is significantly superior to currently available thermal and spatial high-resolution techniques because it combines low K / (Hz) performance at room temperature. 1 / 2 Range (where less than 70 mK / Hz) 1 / 2 The value is ideally less than 10 mK / Hz. 1 / 2 DC thermal sensitivity within 100 nm and spatial resolution below 100 nm.

[0058] The thermal isolation barrier 3 is used to thermally separate the scanning probe 2 from the detector system. The thermal isolation barrier 3 can be formed as part of the single crystal of the scanning probe 1, thereby constituting a structural feature that hinders the thermal conductivity of diamond.

[0059] Alternatively, the thermal barrier 3 can form part of the diamond coupling structure 4.

[0060] In an alternative embodiment, the thermal barrier 3 may form part of the mounting structure 6.

[0061] The thermal barrier 3 may be provided by structural features, which may be a porous structure (e.g., created by etched holes), a grid structure, a phonon structure, an isotope-modulated diamond structure, or other structural modifications that reduce heat conduction through portions of the thermal barrier 3.

[0062] Alternatively, the thermal isolation barrier 3 can be made of different materials that connect the scanning probe to the mounting structure but prevent heat conduction. This material can be a low-density material, such as a porous polymer, ceramic, or other porous material. It can also be any other material that blocks conduction and is strong enough to be used as the connector portion between the scanning sensor probe 1 and the mounting structure 6.

[0063] The thermal barrier 3 can also be made of diamond materials, quartz, polymers, curable resins, or adhesives with different isotope concentrations.

[0064] Due to its large micrometer size and preferred simple shape, the production of diamond sensor probe 1 is easily scalable. The sensor probe can be produced by a series of photolithography and dry etching (commonly referred to as "plasma etching") steps to shape the diamond crystal into the desired shape, produce a sensor probe containing the NV center, and release the shape from the diamond body.

[0065] In a preferred embodiment, the thermal sensing probe 1 is connected to the detector system 13, such as... Figure 3 As shown. The detector system includes an optical excitation source 9a, a microwave source 10, an optional mounting structure 6 including the microwave source 10, and an optical detector 9b. Both the optical excitation source 9a and the detector 9b are part of a confocal microscope 9 with an objective lens 9c. The microwave source includes a microwave transmission system 10a and a microwave antenna 10b. Preferably, the system also includes a sample stage 12 and a sample process positioning structure 11.

[0066] An optical excitation source 9a is configured to excite the color center 5. In a preferred embodiment, the optical excitation source 9a is a blue or green laser or LED light below 575 nm, typically a green laser at 532 nm, suitable for exciting the electron spins of the color centers 5 of the sensor NV from their ground state to their excited state.

[0067] Microwave 10 is configured to direct continuous or pulsed microwave radiation to the color center, which alters the spin population of sublevels in the ground and excited states. The microwave frequency is scanned to detect the spin resonance frequency, thereby generating an ODMR spectrum.

[0068] The process positioning structure 11, which changes the relative position between the tip and the sample, can be used to locate the region of interest of the sample heat source 8. The sample or tip stage 12 is then used to scan the scanning sensor probe 1 relative to the sample heat source 8. The movement of the sample process positioning 11 and the sample stage 12 can be manual, but is preferably automatic when the system is in measurement mode. During measurement, the sensor tip remains stationary relative to the optical detection path to ensure alignment between the optical excitation source 9a, the optical detection source 9b, the objective lens 9c, and the scanning sensor probe 1.

[0069] In one embodiment, the mounting structure 6 is fixed, and the objective lens 9c is movable.

[0070] In an alternative embodiment, the mounting structure 6 is movable, and the objective lens 9c is fixed.

[0071] In one embodiment, microwave source 10 applies multiple microwave pulses to the color center.

[0072] In an alternative embodiment, microwave source 10 applies continuous microwaves to the color center.

[0073] The optical detector 9b is capable of detecting and quantifying the light emitted by the sensor color center 5. For the NV-center-based probe 1, the optical detector 9b must ideally be able to measure emission wavelengths in the range of 600 nm to 800 nm. In a preferred embodiment, the optical excitation source 9a, the optical detector 9b, and the objective lens 9c constitute a confocal microscope 9 integrated into a scanning atomic force microscope (AFM).

[0074] The nanoscale temperature detector and detector system claimed in this invention can be used in a method for determining and / or mapping the surface temperature of a sample heat source 8. The method includes several steps, including:

[0075] - The sensor tip 2 is movably positioned close to or in contact with the surface of the heat source 8a.

[0076] - Apply one or more optical pulses generated by optical excitation source 9 to color center 5 to polarize the ground state electron spin state.

[0077] - Apply multiple microwave pulses or continuous microwaves to the color center 5 of the sensing probe 1 to change the spin group.

[0078] -Measure the spin-state-related fluorescence rate of color center 5.

[0079] - The temperature of the heat source is determined based on the measured spin state-related emission count rate.

Claims

1. A nanoscale temperature detector, comprising: - A diamond sensing probe (1) having a sensing tip (2) with a radius of curvature (R) of less than 100 nm, or less than 10 nm, or less than 1 nm, and multiple color centers (5) indicating temperature sensitivity characteristics by emission count rate. The diamond sensing probe is configured to optically guide light emitted by the color center. The diamond sensing probe wherein the diamond sensor has a lateral dimension of at least 200 nanometers, and the nanoscale temperature detector further includes: - Mounting structure (6), which can be connected to detector system (13), and - A thermal isolation barrier (3) thermally separates the sensing probe (1) from the detector system (13).

2. The nanoscale temperature detector according to claim 1, wherein the plurality of color centers (5) are nitrogen vacancy (NV) defects, and their electron spin resonance spectra show the temperature-sensitive characteristics of their ground state electron spin states.

3. The nanoscale temperature detector according to claim 2, wherein the temperature sensitivity feature includes temperature-dependent zero-field splitting.

4. The nanoscale temperature detector according to claim 1, wherein the color center (5) is distributed across the sensing probe (1).

5. The nanoscale temperature detector according to claim 1, wherein the color center (5) is located in a region at a separation distance of no more than 1 micrometer from the sensing tip (2).

6. The nanoscale temperature detector of claim 1, wherein the sensing probe comprises a color center of up to 100 ppm.

7. The nanoscale temperature detector according to claim 1, wherein the sensing probe is connected to the diamond holding structure (4).

8. The nanoscale temperature detector according to claim 1, wherein the sensing probe (1) is formed of single-crystal diamond material.

9. The nanoscale temperature detector according to claim 7, wherein the sensing probe (1) and the diamond holding structure (4) are formed of single-crystal diamond material.

10. The nanoscale temperature detector according to claim 1, wherein the shape of the sensing probe (1) is characterized by a conical or pyramidal shape having a sharp apex.

11. The nanoscale temperature detector according to claim 10, wherein the sensing probe (1) has a maximum lateral dimension between 200 nm and 500 nm and a sidewall tilt angle between 0° and 45°.

12. The nanoscale temperature detector according to claim 11, wherein the sidewall tilt angle is between 5° and 30°.

13. The nanoscale temperature detector according to claim 7, wherein the thermal isolation barrier (3) is made of the same single-crystal diamond material as the diamond retaining structure (4), characterized in that it provides structural obstruction to heat conduction.

14. The nanoscale temperature detector of claim 13, wherein the structural barrier to heat conduction comprises one or more of the following: reduced thickness or reduced width, or phonon structure, or isotope-modulated diamond structure, or porous structure, or lattice structure.

15. The nanoscale temperature detector according to claim 1, wherein the thermal isolation barrier (3) is made of a material with low thermal conductivity.

16. The nanoscale temperature detector of claim 15, wherein the material having low thermal conductivity is quartz or a low-density material.

17. A method for manufacturing a nanoscale temperature detector according to claim 1, comprising a series of photolithography and dry etching steps to shape a diamond crystal into a desired shape, producing a sensor probe containing an NV center, and releasing the shape from the diamond body.

18. A detector system comprising the nanoscale temperature detector according to claim 1, further comprising: - An optical excitation source (9a) is configured to excite the color center (5), - A microwave source (10) configured to direct microwaves toward the color center (5), - The mounting structure (6) is used to position the sensing probe relative to the heat source sample (8). - An optical detector (9b) is capable of measuring the light emitted by the color center (5).

19. The detector system of claim 18, wherein the optical excitation source (9a) is a laser or an LED tunable to a wavelength of less than 575 nm.

20. The detector system of claim 19, wherein the optical excitation source (9a) is a laser or an LED tunable to a wavelength of 515 nm or 532 nm.

21. The detector system of claim 18, wherein the optical detector (9b) is a confocal microscope 9 integrated into a scanning atomic force microscope (AFM).

22. A method employing a nanoscale temperature detector, the nanoscale temperature detector comprising: - A diamond sensing probe (1) having a sensing tip (2) with a radius of curvature (R) of less than 100 nm, or less than 10 nm, or less than 1 nm, and multiple color centers (5) indicating temperature sensitivity characteristics by emission count rate. The diamond sensing probe is configured to optically guide light emitted by the color center. The diamond sensing probe wherein the diamond sensor has a lateral dimension of at least 200 nanometers, and the nanoscale temperature detector further includes: - Mounting structure (6), which can be connected to detector system (13), and - A thermal isolation barrier (3) thermally separates the sensing probe (1) from the detector system (13). The method includes the following steps: -The sensing tip (2) is movably positioned close to or in contact with the surface of the heat source (8a). - Apply one or more optical pulses generated by the optical excitation source (9a) to the color center (5) to polarize the ground state electron spin state. - Continuously apply or apply multiple microwave pulses to the color center (5) of the sensing probe (1) to change the spin group. -Measure the spin-state-related fluorescence rate of the color center (5), The temperature of the heat source is determined based on the measured spin-state-related emission count rate.

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