A silane safety storage device and storage method for electronics factories

Abstract

The present invention discloses a silane safety storage device and storage method for use in an electronics factory, and belongs to the field of gas storage. A silane safety storage device for use in an electronics factory comprises a gas storage tank, the top side of which is connected to an air inlet pipe with a control valve, and further comprises a lifting mechanism. The lifting mechanism is composed of a fixed cylinder, a lifting block, a lifting rod, a return spring, and a lifting plate. The lifting mechanism is designed to cooperate with a warning unit composed of a connecting pipe, a pressure sensor, a transmission wire, an alarm, a connecting spring, an arc-shaped connector, and a pressing rod. The device can warn of the pre-full amount of silane gas stored in the gas tank, which is used in the preparation of some extra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin-film solar cells, and other electronic products in the electronics factory, to avoid excessive silane gas being stored in the gas tank, which could cause the gas tank to explode and pose a safety hazard.

Description

Technical Field

[0001] The present invention relates to the technical field of gas storage, and in particular to a silane safety storage device and a storage method thereof for use in an electronics factory. Background Art

[0002] Silane has become the most important specialty gas used in semiconductor microelectronics processes, primarily used in the production of very large or ultra-large-scale integrated circuits, chips, flat-panel displays, amorphous silicon thin-film solar cells, high-purity polycrystalline silicon growth, silicon nitride production, and silicon carbide powder. This gas is typically stored in sealed cylinders, which are then placed in designated locations within the electronics factory for subsequent processing and use in the production of very large or ultra-large-scale integrated circuits, chips, flat-panel displays, amorphous silicon thin-film solar cells, high-purity polycrystalline silicon growth, silicon nitride production, and silicon carbide powder.

[0003] The silane gas used in electronics factories is stored in gas cylinders. The cylinders typically consist of a cylindrical tank body and an inlet pipe with an integrated control valve. When the silane gas enters the tank body through the control valve on the surface of the inlet pipe, the pressure inside the tank gradually increases as the amount of silane gas increases. If too much silane gas is added and exceeds the preset pressure within the tank body, it could cause the tank body to explode, leading to a safety accident. While the gas cylinders have excellent sealing performance and no leakage, they are placed in designated locations within the electronics factory and are subject to inevitable environmental changes. In particular, long periods of sunlight can easily increase the ambient temperature around the tanks, causing the pressure inside the tanks to rise. This can also cause the silane gas stored in the tanks to become a safety hazard due to this phenomenon. Therefore, gas cylinders with this structure offer low safety for silane gas both before and after storage.

[0004] To this end, the present invention provides a silane safety storage device and a storage method thereof for use in an electronics factory to solve the above-mentioned problems. Summary of the Invention

[0005] The purpose of the present invention is to solve the problem in the prior art that gas cylinders have low safety for silane gas before and after storage, and to propose a silane safety storage device and storage method for use in electronics factories.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A silane safety storage device for an electronics factory comprises a gas storage tank, wherein the top side of the gas storage tank is connected to an air inlet pipe with a control valve, and further comprises: a lifting mechanism; wherein the lifting mechanism comprises a fixed cylinder connected to the center position of the top of the gas storage tank, a lifting block is affixed between the bottom of the fixed cylinder and the inner top wall of the gas storage tank, a docking port is provided between the bottom of the lifting block and a side corresponding to the lifting block, a return spring is fixedly connected between the top of the lifting block and the inner top wall of the fixed cylinder, a lifting rod located within the return spring is fixedly connected to the top center of the lifting block, the other end of the lifting rod extends to the top of the fixed cylinder and is fixedly connected to a lifting plate, and a gear groove is provided on the surface of the lifting rod; an alarm unit is provided between one side of the fixed cylinder and the top of the lifting plate, and is used to warn when the gas stored in the gas storage tank exceeds a preset threshold; and a pressure relief unit is provided between the other side of the fixed cylinder and the gear groove corresponding to the top of the fixed cylinder, and is used to relieve and collect pressure in the gas storage tank when the pressure is increased by temperature.

[0008] Preferably, the top and bottom of the lifting block are both in corresponding hemispherical shapes, and the middle portion of the lifting block is a cylindrical structure.

[0009] Preferably, the warning unit includes a connecting tube horizontally connected to the surface of the fixed cylinder, and a pressure sensor is installed on the inner wall of the connecting tube. One side of the pressure sensor is electrically connected to a transmission wire extending from the outer end of the connecting tube, and the other end of the transmission wire is electrically connected to an alarm installed on the top of the jacking plate. The outer surface of the pressure sensor is sleeved with a connecting spring fixedly connected to the inner wall of the connecting tube, and the other end of the connecting spring is fixedly connected to an arc-shaped connecting head, and the arc-shaped connecting head is located between the connecting tube port and the interior of the fixed cylinder. The arc-shaped connecting head is fixedly connected to a pressing rod corresponding to the pressure sensor at one end corresponding to the interior of the connecting tube.

[0010] Preferably, the pressure relief unit includes a pressure relief mechanism, which includes a pressure relief pipe connected to the surface of the fixed cylinder, a ball valve that fits the inner wall of the pressure relief pipe is connected between the inner wall and the outer surface of the pressure relief pipe via a connecting shaft, the surface between the ball valve that fits the inner wall of the pressure relief pipe is connected to a pressure relief groove, the ball valve is located on the opposite side of the connecting shaft and is connected to a rotating rod 1, the rotating rod 1 extends horizontally to the corresponding outer surface of the pressure relief pipe and is fixedly connected to a pulley 1, the inner surface of the pulley 1 is connected to a matching transmission toothed belt, the inner surface of the transmission toothed belt is fixedly connected to a pulley 2, the surface of the pulley 2 is fixedly connected to a rotating rod 2, and the other end of the rotating rod 2 is fixedly connected to a circular gear that fits the gear groove.

[0011] Preferably, the top opening and the bottom opening of the pressure relief groove are both corresponding conical structures, the top opening end diameter of the pressure relief groove gradually decreases, the bottom opening end diameter of the pressure relief groove gradually increases, and the middle end diameter of the pressure relief groove is an equivalent cylindrical structure.

[0012] Preferably, the surface of the rotating rod 1 is connected to a fixed plate 1 through a bearing, and the fixed plate 1 is fixedly connected to the corresponding surface of the fixed cylinder. The surface of the rotating rod 2 is connected to a fixed plate 2 through a bearing, and the fixed plate 2 is fixedly connected to the top of the fixed cylinder.

[0013] Preferably, the pressure relief unit also includes a collecting mechanism, which includes a collecting cylinder connected to the outer end of the pressure relief pipe, the bottom of the collecting cylinder is fixedly connected to the top of the gas storage tank, and a connecting gas needle is provided between the bottom of the collecting cylinder and the inner bottom wall of the gas storage tank. A matching piston plate is fitted between the inner bottom wall and the inner surface wall of the collecting cylinder, and an L-shaped push rod is fixedly connected to the top center of the piston plate. The other end of the L-shaped push rod passes through the top of the collecting cylinder and is fixedly connected to the corresponding surface of the lifting plate.

[0014] The present invention also provides a storage method for a silane safety storage device for an electronics factory, comprising the following steps:

[0015] Step A: To ensure that silane gas used in the manufacture of some extra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin-film solar cells and other electronic products in electronics factories is sufficient, a lifting mechanism is designed on the top of the gas tank to detect the pre-full state of the silane gas when the control valve on the surface of the air inlet pipe is opened to fill the gas tank for storage. When the lifting block in the lifting mechanism does not touch the warning unit correspondingly designed on one side of the fixed cylinder, it indicates that the gas in the gas tank is not full. If the lifting block slides along the inner wall of the fixed cylinder under the action of the internal air pressure of the gas tank and touches the corresponding warning unit, it indicates that the gas stored in the gas tank is pre-full, and the control valve on the surface of the air inlet pipe is closed in time.

[0016] Step B. Considering that the gas filled inside the gas tank will increase with temperature changes, the pressure of the gas filled inside the gas tank will increase, and exceed the pre-loaded pressure of the gas tank, causing an explosion. Therefore, a pressure relief unit is designed on the other side of the jacking mechanism. When the jacking block slides along the inner wall of the fixed cylinder to the upper side of the warning unit corresponding to the inside of the fixed cylinder, the docking port connected between the bottom and one side of the jacking block should be connected to the position of the pressure relief unit to ensure that a part of the gas filled inside the gas tank enters the pressure relief unit through the docking port and is discharged into the pressure relief unit for collection, thereby reducing the pressure inside the gas tank. Subsequently, when the pressure inside the gas tank decreases, the jacking block, under the elastic force of the reset spring, drives the synchronous pressure relief unit to press the gas collected inside the pressure relief unit back into the interior of the gas tank.

[0017] Compared with the prior art, the present invention provides a silane safety storage device for use in electronics factories, which has the following beneficial effects:

[0018] 1. The silane safety storage device for electronics factories has a lifting mechanism composed of a fixed cylinder, a lifting block, a lifting rod, a return spring and a lifting plate. It is designed to cooperate with a warning unit composed of a connecting pipe, a pressure sensor, a transmission wire, an alarm, a connecting spring, an arc-shaped connector and a pressing rod. It can warn of the pre-full amount of silane gas stored in the gas tank used for the preparation of some extra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin-film solar cells and other electronic products in the electronics factory, so as to avoid excessive storage of silane gas in the gas tank, which may cause the gas tank to explode and pose a safety hazard.

[0019] 2. The silane safety storage device for electronic factories is a pressure relief unit formed by combining a pressure relief mechanism composed of a pressure relief pipe, a ball valve, a pressure relief groove, a rotating rod, a pulley, a transmission toothed belt, a pulley, a rotating rod and a circular gear, and a collection mechanism composed of a collection tube, a connecting gas supply needle, a piston plate and an L-shaped push rod. When the lifting mechanism increases or decreases the pressure in the gas tank, it can relieve, collect and return pressure to the excessive gas pressure in the gas tank, thereby avoiding the problem of explosion caused by the increase in internal pressure of the gas tank due to the increase in temperature of the gas stored in the gas tank after storage. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall structure of a silane safety storage device for use in electronics factories proposed by the present invention;

[0021] Figure 2 This is a cross-sectional view of the connection between the lifting mechanism and the gas storage tank of a silane safety storage device for an electronics factory proposed by the present invention;

[0022] Figure 3This is a cross-sectional view of the connection between the connecting pipe and the fixing cylinder of a silane safety storage device for an electronics factory proposed by the present invention;

[0023] Figure 4 This is a schematic structural diagram of a lifting mechanism of a silane safety storage device for an electronics factory proposed by the present invention;

[0024] Figure 5 A side view of a lifting mechanism of a silane safety storage device for an electronics factory proposed by the present invention;

[0025] Figure 6 This is a top view of a lifting mechanism of a silane safety storage device for an electronics factory proposed by the present invention;

[0026] Figure 7 This is a cross-sectional view of the connection between the pressure relief unit and the lifting mechanism of a silane safety storage device for an electronics factory proposed by the present invention;

[0027] Figure 8 This is a cross-sectional view of the connection between the pressure relief pipe and the ball valve of a silane safety storage device for an electronics factory proposed by the present invention.

[0028] Figure: 1, gas tank; 2, air inlet pipe; 3, lifting mechanism; 31, fixing cylinder; 32, lifting block; 33, docking port; 34, return spring; 35, lifting rod; 36, lifting plate; 37, gear slot; 4, warning unit; 41, connecting pipe; 42, pressure sensor; 43, transmission wire; 44, alarm; 45, connecting spring; 46, arc connector; 47, pressing rod; 5, pressure relief unit; 51, pressure relief mechanism; 51 01. Pressure relief pipe; 5102. Ball valve; 5103. Pressure relief groove; 5104. Rotating rod 1; 5105. Pulley 1; 5106. Transmission belt; 5107. Pulley 2; 5108. Rotating rod 2; 5109. Circular gear; 5110. Fixed plate 1; 5111. Fixed plate 2; 52. Collecting mechanism; 5201. Collecting cylinder; 5202. Connecting gas supply needle; 5203. Piston plate; 5204. L-shaped push rod. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0031] Example 1:

[0032] Reference Figures 1-8 A silane safety storage device for an electronics factory comprises a gas tank 1, the top side of the gas tank 1 is connected to an air inlet pipe 2 with a control valve, and further comprises: a lifting mechanism 3; wherein the lifting mechanism 3 comprises a fixed cylinder 31 connected to the center position of the top of the gas tank 1, a lifting block 32 is fitted between the bottom of the fixed cylinder 31 and the inner top wall of the gas tank 1, the top and bottom of the lifting block 32 are both corresponding hemispherical shapes, the middle part of the lifting block 32 is a cylindrical structure, a connecting port 33 is provided between the bottom of the lifting block 32 and the corresponding side of the lifting block 32, and the top of the lifting block 32 is fixedly connected to the inner top wall of the fixed cylinder 31 It is connected to a return spring 34, and the top center of the lifting block 32 is fixedly connected to a lifting rod 35 located in the return spring 34. The other end of the lifting rod 35 passes through the top of the fixed cylinder 31 and is fixedly connected to a lifting plate 36. The surface of the lifting rod 35 is provided with a gear groove 37; the warning unit 4 is arranged between one side of the fixed cylinder 31 and the top of the lifting plate 36, and is used to warn the gas stored in the gas storage tank 1 when the preset threshold is reached; the pressure relief unit 5 is arranged between the other side of the fixed cylinder 31 and the corresponding gear groove 37 at the top of the fixed cylinder 31, and is used to relieve and collect the pressure inside the gas storage tank 1 when the pressure is increased by temperature.

[0033] In the present invention, the warning unit 4 is designed on one side of the lifting mechanism 3, mainly for the silane gas used in the smelting process of some magnesium alloys and magnesium-aluminum alloys in the electronics factory, which can be filled into the gas tank 1 through the air inlet pipe 2 for storage, and considering that the silane gas filled in the gas tank 1 is in a pre-full state filled in the gas tank 1, it is inconvenient to know, and it is easy for the silane gas filled in the gas tank 1 to exceed the tolerance threshold when the silane gas filled in the gas tank 1 is too much, which may cause an explosion and a safety hazard. Therefore, a warning unit 4 is designed on one side of the fixed cylinder 31 in the lifting mechanism 3. With the cooperation of the lifting mechanism 3, the warning unit 4 can be touched to give an audible and visual warning, so that people can know the pre-full state of the silane gas storage in the gas tank 1 in time and stop filling the gas tank 1 with too much silane gas, thereby further ensuring the safety of the silane gas before filling in the gas tank 1.

[0034] As for the silane gas stored in the gas tank 1, after storage, it may be affected by some environmental factors of the electronics factory, such as the gas tank 1 may heat up as the temperature inside the electronics factory rises, causing the silane gas stored in the gas tank 1 to expand, causing the gas pressure in the gas tank 1 to exceed its own pressure threshold and cause an explosion. Therefore, a pressure relief unit 5 is designed on the other side of the fixed cylinder 31 in the jacking mechanism 3, and when the jacking block 32 in the jacking mechanism 3 slides along the inner wall of the fixed cylinder 31 and squeezes the jacking rod 35 and the return spring 34 as the pressure in the gas tank 1 rises, the jacking rod 35 will drive the synchronous pressure relief unit 5 to connect with the docking port 33 designed on the surface of the jacking block 32. At this time, a part of the silane gas in the gas tank 1 can be collected into the pressure relief unit 5 to reduce the pressure in the gas tank 1 and avoid explosion accidents, thereby further ensuring the safety of the silane gas stored in the gas tank 1 after being filled.

[0035] Example 2:

[0036] Reference Figure 2-Figure 3 Based on the first embodiment, the warning unit 4 includes a connecting tube 41 horizontally connected to the surface of the fixed cylinder 31, and a pressure sensor 42 is installed on the inner wall of the connecting tube 41. One side of the pressure sensor 42 is electrically connected to a transmission wire 43 extending from the outer end of the connecting tube 41, and the other end of the transmission wire 43 is electrically connected to an alarm 44 installed on the top of the lifting plate 36. The outer surface of the pressure sensor 42 is sleeved with a connecting spring 45 fixedly connected to the inner wall of the connecting tube 41, and the other end of the connecting spring 45 is fixedly connected to an arc-shaped connecting head 46. The arc-shaped connecting head 46 is located between the end of the connecting tube 41 and the interior of the fixed cylinder 31, and one end of the arc-shaped connecting head 46 corresponding to the interior of the connecting tube 41 is fixedly connected to a pressing rod 47 corresponding to the pressure sensor 42.

[0037] In the present invention, when the silane gas filled in the gas tank 1 gradually increases, the pressure inside the gas tank 1 also gradually increases. If the lifting block 32 is subjected to the pressure of the gas inside the gas tank 1, it slides along the inner wall of the fixed cylinder 31 and contacts the arc-shaped connector 46 protruding from the inner wall of the fixed cylinder 31. The arc-shaped connector 46 will squeeze the connecting spring 45 inside the connecting pipe 41 under the push of the lifting block 32, so that the pressing rod 47 on the other side of the arc-shaped connector 46, under the elastic force of the connecting spring 45, touches the pressure sensor 42 installed on the inner wall of the connecting pipe 41. Then, when the pressure sensor 42 receives the pressure signal from the touch, it can transmit the pressure to the sensor. The transmission line 43 sends a signal to the alarm 44. After receiving the signal, the alarm 44 generates an alarm to promptly remind people that the gas inside the gas tank 1 has reached the pre-full threshold, and stops adding silane gas to the gas tank 1, so as to avoid the gas pressure inside the gas tank 1 exceeding the preset pressure range of the gas tank 1, causing the gas tank 1 to explode, and further improve the safety of the silane gas before storage in the gas tank 1. The pressure sensor 42 and the alarm 44 can adopt existing well-known and recognized models, and the alarm mode of the alarm 44 can be one of a sound alarm, a light alarm or an audio-visual alarm mode, which can be selected according to the usage situation.

[0038] Example 3:

[0039] Reference Figure 4-Figure 8, based on the first embodiment, the pressure relief unit 5 includes a pressure relief mechanism 51, the pressure relief mechanism 51 includes a pressure relief pipe 5101 connected to the surface of the fixed cylinder 31, the inner wall and the outer surface of the pressure relief pipe 5101 are connected by a connecting shaft with a ball valve 5102 that fits the inner wall of the pressure relief pipe 5101, the surface between the ball valve 5102 and the inner wall of the pressure relief pipe 5101 is connected with a pressure relief groove 5103, the top opening and the bottom opening of the pressure relief groove 5103 are corresponding conical structures, the top opening end diameter of the pressure relief groove 5103 gradually decreases, the bottom opening end diameter of the pressure relief groove 5103 gradually increases, and the middle end diameter of the pressure relief groove 5103 is an equivalent cylindrical structure, the ball valve 5102 is located on the opposite side of the connecting shaft and is connected to a rotating rod 1 5104, the rotating rod 1 51 The surface of 04 is connected to a fixed plate 1 5110 through a bearing, and the fixed plate 1 5110 is fixedly connected to the corresponding surface of the fixed cylinder 31. The rotating rod 1 5104 extends horizontally to the corresponding outer surface of the pressure relief pipe 5101 and is fixedly connected to a pulley 1 5105. The inner surface of the pulley 1 5105 is connected to a corresponding transmission toothed belt 5106. The inner surface of the transmission toothed belt 5106 is fixedly connected to a pulley 2 5107. The surface of the pulley 2 5107 is fixedly connected to a rotating rod 2 5108. The other end of the rotating rod 2 5108 is fixedly connected to a circular gear 5109 that is connected to the gear groove 37. The surface of the rotating rod 2 5108 is connected to a fixed plate 2 5111 through a bearing, and the fixed plate 2 5111 is fixedly connected to the top of the fixed cylinder 31.

[0040] In the present invention, when the lifting block 32 is subjected to the gradually increased pressure in the gas storage tank 1 and slides upward along the inner wall of the fixed cylinder 31, the gear groove 37 on the surface of the lifting rod 35 is driven to engage the circular gear 5109, which drives the second pulley 5107, the transmission toothed belt 5106 and the first pulley 5105 to transmit the power to each other through the second rotating rod 5108. The ball valve 5102 connected to the first rotating rod 5104 slides along the inner wall of the pressure relief pipe 5101. When the pressure relief groove 5103 on the surface of the ball valve 5102 corresponds to the docking port 33 corresponding to the surface of the lifting block 32, a part of the excessive gas pressure in the gas storage tank 1 can be discharged into the collecting mechanism 52, so as to reduce the gas pressure in the gas storage tank 1 and avoid the problem of explosion caused by excessive gas pressure in the gas storage tank 1.

[0041] The inlet and outlet ports in the pressure relief groove 5103 designed on the surface of the ball valve 5102 are divided into corresponding connected conical structures through the middle end of the pressure relief groove 5103. This is because the pressure relief groove 5103 with such a structural design is more conducive to quickly flowing the excess gas in the gas storage tank 1 into the collection cylinder 5201 in the collection mechanism 52 for collection, compared with some traditional cylindrical structures with uniform end diameters. This avoids the problem that the traditional cylindrical structures with uniform end diameters, due to their smaller flow characteristics, fail to timely relieve the excessive gas pressure in the gas storage tank 1, which may still cause the gas storage tank 1 to explode and pose a safety hazard.

[0042] Example 4:

[0043] Reference Figure 4-Figure 8 Based on the first embodiment, the pressure relief unit 5 also includes a collecting mechanism 52, which includes a collecting cylinder 5201 connected to the outer end of the pressure relief pipe 5101, the bottom of the collecting cylinder 5201 is fixedly connected to the top of the gas storage tank 1, and a connecting gas needle 5202 is provided between the bottom of the collecting cylinder 5201 and the inner bottom wall of the gas storage tank 1. A matching piston plate 5203 is fitted between the inner bottom wall and the inner surface wall of the collecting cylinder 5201, and an L-shaped push rod 5204 is fixedly connected to the top center of the piston plate 5203. The other end of the L-shaped push rod 5204 passes through the top of the collecting cylinder 5201 and is fixedly connected to the corresponding surface of the lifting plate 36.

[0044] In the present invention, when the air pressure in the gas storage tank 1 enters the collecting tube 5201 for collection, the air pressure in the gas storage tank 1 will naturally decrease, so that the lifting block 32 can drive the lifting rod 35 to make a vertical downward linear motion under the elastic force of the reset spring 34. The circular gear 5109 then rotates in mesh with the gear groove 37 on the surface of the lifting rod 35, and drives the pulley 2 5107, the transmission belt 5106 and the pulley 1 5105 to transmit to each other through the rotating rod 2 5108. The ball valve 5102 connected to the rotating rod 1 5104 slides along the inner wall of the pressure relief pipe 5101. When the pressure relief groove 5103 on the surface of the ball valve 5102 fits into the inner wall of the pressure relief pipe 5101, the lifting block 32 should also be in the preset initial position.

[0045] At the same time, when the lifting rod 35 is making a vertical downward linear motion, the L-shaped push rod 5204 connected to the surface of the lifting plate 36 will also push the piston plate 5203 to move downward along the inner wall of the collecting cylinder 5201, and the gas collected inside the collecting cylinder 5201 will be back-pressurized to the interior of the gas storage tank 1 through the connected gas supply needle 5202 for storage, ensuring that the gas storage tank 1 can, through the coordinated cooperation between the lifting mechanism 3 and the pressure relief unit 5, be able to deal with excessive air pressure in the gas storage tank 1, and has the characteristics of pressure relief, collection and back pressure, thereby improving the safety of silane gas storage after filling in the gas storage tank 1.

[0046] The present invention also provides a storage method for a silane safety storage device for an electronics factory, comprising the following steps:

[0047] Step A: In order to ensure that silane gas used in the manufacture of some extra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin-film solar cells and other electronic products in electronic factories is filled, when the control valve on the surface of the air inlet pipe 2 is opened to fill the interior of the gas storage tank 1 for storage, the pre-full state of the silane gas filled in the gas storage tank 1 can be known. Therefore, a lifting mechanism 3 is designed on the top of the gas storage tank 1. When the lifting block 32 in the lifting mechanism 3 does not touch the warning unit 4 designed corresponding to the side of the fixed cylinder 31, it indicates that the gas filled in the gas storage tank 1 is not full. If the lifting block 32 slides along the inner wall of the fixed cylinder 31 under the action of the internal air pressure of the gas storage tank 1 and touches the corresponding warning unit 4, it indicates that the gas stored in the gas storage tank 1 is pre-full, and the control valve on the surface of the air inlet pipe 2 is closed in time.

[0048] Step B. Considering that the gas filled in the gas tank 1 will increase with the temperature change, the pressure of the gas filled in the gas tank 1 will increase, and exceed the pressure that the gas tank 1 has previously borne, causing an explosion. Therefore, a pressure relief unit 5 is designed on the other side of the jacking mechanism 3. When the jacking block 32 slides along the inner wall of the fixed cylinder 31 to the upper part corresponding to the warning unit 4 and the interior of the fixed cylinder 31, the docking port 33 connected between the bottom and one side of the jacking block 32 should be connected to the position of the pressure relief unit 5 to ensure that a part of the gas filled in the gas tank 1 enters the docking port 33 and is discharged into the pressure relief unit 5 for collection, thereby reducing the pressure borne by the gas tank 1. Subsequently, when the pressure in the gas tank 1 is reduced, the jacking block 32, under the elastic force of the return spring 34, drives the synchronous pressure relief unit 5 to press the gas collected in the pressure relief unit 5 back into the interior of the gas tank 1.

[0049] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A silane safety storage device for an electronics factory, comprising An air storage tank (1), wherein the top side of the air storage tank (1) is connected to an air inlet pipe (2) with a control valve, and is characterized in that: Also includes: Lifting mechanism (3); The lifting mechanism (3) includes a fixed cylinder (31) connected to the center position of the top of the gas storage tank (1), a lifting block (32) is attached between the bottom of the fixed cylinder (31) and the inner top wall of the gas storage tank (1), a connecting port (33) is provided between the bottom of the lifting block (32) and the side corresponding to the lifting block (32), a return spring (34) is fixedly connected between the top of the lifting block (32) and the inner top wall of the fixed cylinder (31), a lifting rod (35) located in the return spring (34) is fixedly connected to the top center of the lifting block (32), the other end of the lifting rod (35) passes through the top of the fixed cylinder (31) and is fixedly connected to a lifting plate (36), and a gear groove (37) is provided on the surface of the lifting rod (35); An alarm unit (4) is provided between one side of the fixing cylinder (31) and the top of the lifting plate (36), and is used to alarm when the gas stored in the gas storage tank (1) reaches a preset threshold; A pressure relief unit (5) is provided between the other side of the fixed cylinder (31) and the corresponding gear groove (37) located at the top of the fixed cylinder (31), and is used to relieve and collect the pressure inside the gas storage tank (1) when the pressure is increased by the temperature; The pressure relief unit (5) includes a pressure relief mechanism (51), and the pressure relief mechanism (51) includes a pressure relief pipe (5101) connected to the surface of the fixed cylinder (31). A ball valve (5102) is connected between the inner wall and the outer surface of the pressure relief pipe (5101) via a connecting shaft. The surface between the ball valve (5102) and the inner wall of the pressure relief pipe (5101) is connected to a pressure relief groove (5103). The ball valve (5102) is located on the opposite side of the connecting shaft and is connected to a rotating rod (5104). The rotating rod (5104) is connected to the inner wall of the pressure relief pipe (5101). The movable rod 1 (5104) extends horizontally to the outer surface corresponding to the pressure relief pipe (5101) and is fixedly connected to a pulley 1 (5105); the inner surface of the pulley 1 (5105) is connected to a corresponding transmission toothed belt (5106); the inner surface of the transmission toothed belt (5106) is fixedly connected to a pulley 2 (5107); the surface of the pulley 2 (5107) is fixedly connected to a rotating rod 2 (5108); the other end of the rotating rod 2 (5108) is fixedly connected to a circular gear (5109) that is connected to the gear groove (37); The pressure relief unit (5) further comprises a collecting mechanism (52), wherein the collecting mechanism (52) comprises a collecting cylinder (5201) connected to the outer end of the pressure relief pipe (5101), the bottom of the collecting cylinder (5201) being fixedly connected to the top of the gas storage tank (1), a connecting gas delivery needle (5202) being provided between the bottom of the collecting cylinder (5201) and the inner bottom wall of the gas storage tank (1), a matching piston plate (5203) being fitted between the inner bottom wall and the inner surface wall of the collecting cylinder (5201), an L-shaped push rod (5204) being fixedly connected to the center of the top of the piston plate (5203), the other end of the L-shaped push rod (5204) passing through the top of the collecting cylinder (5201) and being fixedly connected to the corresponding surface of the lifting plate (36).

2. A silane safety storage device for an electronics factory according to claim 1, characterized in that: The top and bottom of the lifting block (32) are both in corresponding hemispherical shapes, and the middle portion of the lifting block (32) is a cylindrical structure.

3. The silane safety storage device for an electronics factory according to claim 1, characterized in that: The warning unit (4) includes a connecting tube (41) horizontally connected to the surface of the fixed cylinder (31), a pressure sensor (42) is installed on the inner wall of the connecting tube (41), one side of the pressure sensor (42) is electrically connected to a transmission wire (43) extending from the outer end of the connecting tube (41), and the other end of the transmission wire (43) is electrically connected to an alarm (44) installed on the top of the lifting plate (36), the outer surface of the pressure sensor (42) is sleeved with a connecting spring (45) fixedly connected to the inner wall of the connecting tube (41), the other end of the connecting spring (45) is fixedly connected to an arc-shaped connecting head (46), the arc-shaped connecting head (46) is located between the end of the connecting tube (41) and the interior of the fixed cylinder (31), and the arc-shaped connecting head (46) is fixedly connected to a pressing rod (47) corresponding to the pressure sensor (42) at one end corresponding to the interior of the connecting tube (41).

4. The silane safety storage device for an electronics factory according to claim 1, characterized in that: The top opening and the bottom opening of the pressure relief groove (5103) are both in corresponding conical structures. The diameter of the top opening of the pressure relief groove (5103) gradually decreases, and the diameter of the bottom opening of the pressure relief groove (5103) gradually increases. The middle end diameter of the pressure relief groove (5103) is an equivalent cylindrical structure.

5. The silane safety storage device for an electronics factory according to claim 1, characterized in that: The surface of the rotating rod 1 (5104) is connected to the fixed plate 1 (5110) through a bearing, and the fixed plate 1 (5110) is fixedly connected to the corresponding surface of the fixed cylinder (31). The surface of the rotating rod 2 (5108) is connected to the fixed plate 2 (5111) through a bearing, and the fixed plate 2 (5111) is fixedly connected to the top of the fixed cylinder (31).

6. The storage method of a silane safety storage device for an electronics factory according to claim 1, characterized in that: The following steps are involved: Step A: In order to ensure that the silane gas used in the preparation of some extra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin film solar cells and other electronic products in the electronic factory is filled into the gas storage tank (1) for storage through the control valve on the surface of the air inlet pipe (2), the pre-full state of the silane gas filled into the gas storage tank (1) can be known, so a lifting mechanism (3) is designed on the top of the gas storage tank (1). When the lifting block (32) in the lifting mechanism (3) does not touch the warning unit (4) designed corresponding to one side of the fixed cylinder (31), it indicates that the gas filled into the gas storage tank (1) is not full. If the lifting block (32) slides along the inner wall of the fixed cylinder (31) under the action of the internal air pressure of the gas storage tank (1) and touches the corresponding warning unit (4), it indicates that the gas filled into the gas storage tank (1) is pre-full, and the control valve on the surface of the air inlet pipe (2) is closed in time. Step B, considering that the gas filled in the gas tank (1) will increase with the temperature change, the pressure of the gas filled in the gas tank (1) will increase, and exceed the pressure that the gas tank (1) has previously endured, causing an explosion problem, so a pressure relief unit (5) is designed on the other side of the lifting mechanism (3). When the lifting block (32) slides along the inner wall of the fixed cylinder (31) to the upper side of the warning unit (4) corresponding to the inside of the fixed cylinder (31), the bottom of the lifting block (32) is connected to the butt joint of the one side. The port (33) should be connected to the position of the pressure relief unit (5) to ensure that the gas filled in the gas storage tank (1) enters a portion through the port (33) and is discharged into the pressure relief unit (5) for collection, thereby reducing the pressure inside the gas storage tank (1). Subsequently, when the pressure inside the gas storage tank (1) is reduced, the lifting block (32) drives the synchronous pressure relief unit (5) under the elastic force of the return spring (34) to press the gas collected inside the pressure relief unit (5) back into the interior of the gas storage tank (1).

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