A kind of coating plate height calibration tool for chemical vapor deposition and method of use

Abstract

A kind of coating plate height calibration tool for chemical vapor deposition and method, including fixed plate, fixedly connected with fixed tooth ring in the bottom of fixed plate, the inner ring of fixed tooth ring is engaged with rotating gear, the top of fixed plate is fixedly connected with worm wheel, worm wheel is fixedly connected with rotating shaft, rotating shaft is fixedly connected with horizontal plate, one end of horizontal plate is hinged with movable rod, rotating gear is provided with adjusting strip hole, movable rod is slidably connected with adjusting strip hole, movable rod is movably connected with height gauge below it.The present application can realize the measurement of data without manual operation, and is convenient to adjust, more accurate, can effectively reduce the time of equipment downtime detection, improve production efficiency, reduce the waste of manpower and material resources.

Description

Technical Field

[0001] This invention relates to the field of chemical vapor deposition equipment technology, specifically to a coating plate height calibration tool and its usage method for chemical vapor deposition. Background Technology

[0002] Chemical vapor deposition (CVD) is an important method for thin film preparation. In order to prevent deviations in the coating, the levelness of the coating plate is required to be high during thin film preparation. A search revealed that Chinese Patent CN217877626U discloses a height calibration tool for a coating plate used in chemical vapor deposition (CVD). This tool, specifically for calibrating the height of a pin in a CVD apparatus, includes a fixed ring with an annular groove on its inner wall. A rotating ring is movably connected within the groove. A fixed slide rail is fixedly connected to the inner wall of the rotating ring, and an adjusting slider slides along the fixed slide rail. An adjusting bolt is threaded onto the adjusting slider. Two latching mechanisms at the bottom of the adjusting slider allow for the detachable installation of a height gauge. This pin height calibration tool for CVD apparatus differs from existing technologies in that it facilitates the installation and removal of the height gauge. The rotating ring drives the fixed slide rail to rotate, simultaneously moving the adjusting slider to its position on the fixed slide rail. This allows for the measurement of data at any point in the middle of the heater pin and the height of the heater pin within the cavity, reducing fragmentation and downtime. The tool also calibrates the heater pin height and calculates the horizontal difference between the center point and the four sides of the heater pin.

[0003] However, the above-mentioned device still has the following problems: the position and height of the height gauge are changed by manually loosening the adjusting bolt and manually moving the adjusting slide hole on the fixed slide rail. The operation is inconvenient and the measurement accuracy may have a small error, so it cannot accurately measure the height of the coated plate. Summary of the Invention

[0004] To address the problems existing in the prior art, a height calibration tool for chemical vapor deposition (CVD) plates and its usage method are provided.

[0005] The technical solution adopted by this invention to solve its technical problem is:

[0006] This invention proposes a height calibration tool for a coating plate used in chemical vapor deposition, comprising a fixed plate, a fixed toothed ring fixedly connected to the bottom of the fixed plate, a driving mechanism fixedly connected to the fixed plate, a rotating shaft fixedly connected to the driving mechanism, the fixed plate and the rotating shaft being rotatably connected, a horizontal plate fixedly connected to the rotating shaft, a movable rod connected to one end of the horizontal plate, a rotating gear rotatably connected to the horizontal plate, the rotating gear meshing with the fixed toothed ring, an adjustment slot on the rotating gear, a movable rod movably disposed within the adjustment slot, and a height gauge connected below the movable rod.

[0007] Preferably, the rotating shaft is fixedly connected to an end face cam, and an adjusting rod is provided below the end face cam. Two connecting rods are hinged below the adjusting rod, one of which is hinged to the cross plate and the other is hinged to the movable rod.

[0008] Preferably, the horizontal plate is fixedly connected to a vertical guide rod, the vertical guide rod is slidably connected to a movable sleeve, and the vertical guide rod is connected to the movable sleeve through a third spring.

[0009] Preferably, the movable sleeve is fixedly connected to a transverse guide sleeve, the transverse guide sleeve is slidably connected to a telescopic rod, a second spring is provided between the transverse guide sleeve and the telescopic rod, and the telescopic rod is fixedly connected to the adjusting top rod.

[0010] Preferably, the bottom of the rotating shaft is arranged in a ratchet shape, a pawl is slidably connected inside the cross plate, and a fourth spring is provided between the cross plate and the pawl.

[0011] Preferably, the fixed toothed ring is rotatably connected to a plurality of stop teeth, the stop teeth are fixedly connected to limit blocks, and the fixed toothed ring is fixedly connected to limit pins.

[0012] Preferably, the stop tooth is fixedly connected to a paddle, the fixed tooth ring is fixedly connected to an arc-shaped guide rod, and the arc-shaped guide rod is slidably connected to the paddle.

[0013] Preferably, a spring holder is fixedly connected to the lower part of the movable rod, and an adjusting baffle is slidably connected to the spring holder, which cooperates with the height gauge.

[0014] Preferably, the adjusting strip hole is arranged in a stepped shape, the movable rod is arranged in a stepped shape, and the movable rod is in contact with the adjusting strip hole.

[0015] This invention also proposes a method for using a coating plate height calibration tool for chemical vapor deposition, which includes the following steps:

[0016] S1: When using this device, adjust the position of the height gauge relative to the coating plate, fix the device on the equipment using the fixing plate, install the height gauge on the spring bracket, and drive the rotating shaft to rotate clockwise using the drive mechanism;

[0017] S2: The rotation of the shaft will cause the horizontal plate and the end face cam to rotate, which in turn will drive the rotating gear to rotate clockwise around the fixed gear ring. At the same time, the movable rod connected to the rotating gear will rotate. Due to the rotation of the horizontal plate, the adjusting rod connected to the horizontal plate will move synchronously with the end face cam, thereby causing the movable rod to drive the height gauge to measure data.

[0018] S3: When it is necessary to adjust the movement trajectory of the altimeter, the drive mechanism rotates in the opposite direction. The rotating shaft drives the rotating gear to rotate in the opposite direction through the horizontal plate. As a result, the rotating gear rotates counterclockwise on the fixed gear ring. When the rotating gear contacts the stop tooth, the rotating gear drives the stop tooth to rotate. At this time, the limit block and the limiting pin contact each other, causing the stop tooth to stop rotating. At this time, the rotating gear is restricted and stops rotating.

[0019] S4: When the rotating gear stops rotating, the moving rod stops the horizontal plate from rotating. Under the action of the ratchet inclined surface, the pawl is forced to compress the fourth spring to avoid it, thereby realizing the free rotation of the shaft. At the same time, the end face cam continues to follow the shaft to rotate.

[0020] S5: As the movable rod and the cross plate stop moving, the contact position of the adjusting rod will change when the end face cam rotates. At this time, the movable sleeve moves upward under the action of the third spring, thereby realizing the upward movement of the transverse guide sleeve, thus realizing the upward movement of the adjusting rod, which is always in contact with the end face cam.

[0021] S6: When the adjusting rod moves upward, it will cause the connecting rod to change. Because the right side of the connecting rod is hinged to the horizontal plate and the left hinge point is hinged to the movable rod, when the movable rod moves along the adjusting bar hole toward the center of the rotating gear, the contact position between the adjusting rod and the end face cam will move laterally.

[0022] S7: At this point, the telescopic rod compresses the second spring, thereby changing the linkage and thus changing the position of the adjusting rod.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] 1. This device uses a clockwise rotating shaft to drive the horizontal plate and end face cam, which in turn drives the movable rod to rotate, thus allowing the height gauge to measure data. When the rotating shaft rotates counterclockwise, a ratchet designed at the bottom of the shaft stops the horizontal plate from rotating, causing the adjusting rod to move upward and remain in contact with the end face cam, thereby changing the position of the connecting rod and ultimately adjusting the position of the coating plate. It can achieve full height measurement, and the change in the height of the end face cam can change the measurement trajectory. Data measurement can be achieved without manual operation, making adjustment convenient and measurement more accurate. It can also effectively reduce equipment downtime for inspection, improve production efficiency, and reduce waste of manpower and resources. Attached Figure Description

[0025] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0026] Figure 1 This is the overall front view of the invention;

[0027] Figure 2 yes Figure 1 Schematic diagram of the meshing and fixed gear ring structure of the rotating gear;

[0028] Figure 3 yes Figure 1 Enlarged view of the structure of section A in the middle;

[0029] Figure 4 yes Figure 1 Schematic diagram of the AA structure;

[0030] Figure 5 yes Figure 2 Enlarged view of the structure of section B;

[0031] Figure 6 This invention provides a schematic diagram of the inspection trajectory.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1-Altitude gauge; 2-Spring holder; 3-Adjusting baffle; 4-First spring; 5-Rotating gear; 51-Adjusting bar hole; 6-Fixed gear ring; 7-Moving rod; 8-Fixed plate; 9-Connecting rod; 10-Adjusting top rod; 11-End face cam; 12-Telescopic rod; 13-Second spring; 14-Horizontal guide sleeve; 15-Worm gear; 16-Rotating shaft; 17-Vertical guide rod; 18-Moving sleeve; 19-Third spring; 20-Horizontal plate; 21-Pawl; 22-Fourth spring; 23-Fifth spring; 24-Pulley; 25-Sixth spring; 26-Arc-shaped guide rod; 27-Limiting pin; 28-Limit block; 29-Stop tooth. Detailed Implementation

[0034] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0035] Reference Appendix Figure 1-6This embodiment proposes a height calibration tool for a coating plate used in chemical vapor deposition (CVD). The tool includes a fixed plate 8, an auxiliary plate fixedly connected to the fixed plate 8, a fixed toothed ring 6 fixedly connected to the bottom of the fixed plate 8, and a driving mechanism fixedly connected to the fixed plate 8. The driving mechanism is preferably a worm gear 15, with a worm rotatably connected to the worm gear 15. A rotating shaft 16 is fixedly connected to the worm gear 15. The rotating shaft 16, worm gear 15, and worm are all fixed to the auxiliary plate. The worm can be extended. The fixed plate 8 is rotatably connected to the rotating shaft 16, and a horizontal plate 20 is fixedly connected to the rotating shaft 16. The horizontal plate 20 is rotatable. It is placed at the lower end of the rotating shaft 16 through a nut. One end of the horizontal plate 20 is connected to a movable rod 7. The horizontal plate 20 is rotatably connected to a rotating gear 5 and can rotate around an auxiliary shaft. The rotating gear 5 meshes with a fixed gear ring 6. The rotating gear 5 has an adjustment slot 51. The movable rod 7 is movably set in the adjustment slot 51. A height gauge 1 is connected to the lower part of the movable rod 7. The rotating shaft 16 can rotate the horizontal plate 20. The horizontal plate 20 can rotate the rotating gear 5 on the fixed gear ring 6. The rotating gear 5 rotates the movable rod 7. The movable rod 7, along with the height gauge 1, detects whether the equipment is level.

[0036] The rotating shaft 16 is fixedly connected to the end face cam 11. An adjusting rod 10 is provided below the end face cam 11. Two connecting rods 9 are hinged to the lower part of the adjusting rod 10. One connecting rod 9 is hinged to the horizontal plate 20, and the other connecting rod 9 is hinged to the movable rod 7. The movable rod 7 is connected to the connecting rod 9 through a bearing, which can realize free rotation.

[0037] A vertical guide rod 17 is fixedly connected to the horizontal plate 20. A movable sleeve 18 is slidably connected to the vertical guide rod 17. The vertical guide rod 17 is connected to the movable sleeve 18 through a third spring 19. In the initial state, the third spring 19 will be in a compressed state. When the adjusting rod 10 moves to the upper inclined end face of the end face cam 11, the third spring 19 will spring open, so that the adjusting rod 10 will always be in contact with the end face cam 11.

[0038] The sliding sleeve 18 is fixedly connected to the transverse guide sleeve 14, and the transverse guide sleeve 14 is slidably connected to the telescopic rod 12. A second spring 13 is provided between the transverse guide sleeve 14 and the telescopic rod 12. The telescopic rod 12 is fixedly connected to the adjusting rod 10. When the adjusting rod 10 moves upward, the movable rod 7 will move along the adjusting strip hole 51 toward the center of the rotating gear 5. At this time, the adjusting rod 10 causes the telescopic rod 12 to compress the second spring 13, thereby realizing the position change of the adjusting rod 10 driven by the connecting rod 9.

[0039] The bottom of the rotating shaft 16 is ratchet-shaped. A pawl 21 is slidably connected inside the horizontal plate 20. A fourth spring 22 is provided between the horizontal plate 20 and the pawl 21. When the rotating shaft 16 rotates forward, the ratchet inclined surface will be stuck by the pawl 21, causing the horizontal plate 20 to rotate. When the rotating shaft 16 rotates in reverse, the ratchet inclined surface will force the pawl 21 to compress the fourth spring 22 to avoid the rotating shaft 16, thus realizing the free rotation of the rotating shaft 16.

[0040] The fixed gear ring 6 is rotatably connected with several stop teeth 29. The stop teeth 29 are fixedly connected to limit blocks 28. The fixed gear ring 6 is fixedly connected to a limiting pin 27. When the stop teeth 29 rotate counterclockwise, the limiting pin 27 will be blocked by the limiting block 28, and the stop teeth 29 will no longer rotate.

[0041] The stop tooth 29 is fixedly connected to the paddle 24, and the fixed tooth ring 6 is fixedly connected to the arc-shaped guide rod 26. The arc-shaped guide rod 26 is slidably connected to the paddle 24. A fifth spring 23 is fixedly installed at one end of the arc-shaped guide rod 26. The other end of the fifth spring 23 is connected to one end of the paddle 24. The other end of the paddle 24 is connected to the sixth spring 25. The sixth spring 25 is connected to the other end of the arc-shaped guide rod 26. After the rotating gear 5 leaves the stop tooth 29, the fifth spring 23 and the sixth spring 25 will reset with the assistance of the arc-shaped guide rod 26.

[0042] A spring holder 2 is fixedly connected to the lower part of the movable rod 7. An adjusting baffle 3 is slidably connected to the spring holder 2. The spring holder 2 cooperates with the height gauge 1. The adjusting baffle 3 can adapt to different height gauges 1 within a certain range to achieve differentiated measurement. A trapezoidal block is provided on the spring holder 2 so that the height gauge 1 can be fixed on the spring holder 2.

[0043] The adjusting bar hole 51 is stepped, and the movable rod 7 is stepped. The movable rod 7 contacts the adjusting bar hole 51, and can be fixed in the adjusting bar hole 51.

[0044] This invention also proposes a method for using a coating plate height calibration tool for chemical vapor deposition. The method, employing the coating plate height calibration tool described in this embodiment, includes the following steps:

[0045] S1: When using this device, adjust the position of the height gauge 1, fix the device on the equipment through the fixing plate 8, install the height gauge 1 on the spring bracket 2, and drive the rotating shaft 16 to rotate clockwise.

[0046] S2: The rotation of the shaft 16 will cause the horizontal plate 20 and the end face cam 11 to rotate, which in turn will drive the rotating gear 5 to rotate clockwise around the fixed gear ring 6. At the same time, the movable rod 7 connected to the rotating gear 5 will rotate. As the horizontal plate 20 rotates, the adjusting rod 10 connected to the horizontal plate 20 and the end face cam 11 move synchronously, thereby causing the movable rod 7 to drive the height gauge 1 to measure data.

[0047] S3: When it is necessary to adjust the movement trajectory of the height gauge 1, the drive mechanism rotates in the opposite direction. The rotating shaft 16 drives the rotating gear 5 to rotate in the opposite direction through the horizontal plate 20. Thus, the rotating gear 5 rotates counterclockwise on the fixed gear ring 6. When the rotating gear 5 contacts the stop tooth 29, the rotating gear 5 drives the stop tooth 29 to rotate. At this time, the limit block 28 and the limiting pin 27 come into contact, causing the stop tooth 29 to stop rotating. At this time, the rotating gear 5 is restricted and stops rotating.

[0048] S4: When the rotating gear 5 stops rotating, the moving rod 7 causes the horizontal plate 20 to stop rotating. Under the action of the ratchet inclined surface, the pawl 21 is forced to compress the fourth spring 22 to avoid it, thereby realizing the free rotation of the rotating shaft 16. At the same time, the end face cam 11 continues to follow the rotating shaft 16 to rotate.

[0049] S5: Since the movable rod 7 and the horizontal plate 20 stop moving, the contact position of the adjusting rod 10 will change when the end face cam 11 rotates. At this time, the movable sleeve 18 moves upward under the action of the third spring 19, thereby realizing the upward movement of the transverse guide sleeve 14, thus realizing the upward movement of the adjusting rod 10, which is always in contact with the end face cam 11.

[0050] S6: When the adjusting rod 10 moves upward, it will cause the connecting rod 9 to change. Because the right side of the connecting rod 9 is hinged to the horizontal plate 20 and the left hinge point is hinged to the movable rod 7, when the movable rod 7 moves along the adjusting bar hole 51 toward the center of the rotating gear 5, the contact position between the adjusting rod 10 and the end face cam 11 will move laterally.

[0051] S7: At this time, the telescopic rod 12 compresses the second spring 13, thereby changing the connecting rod 9, which in turn changes the position of the adjusting rod 10.

[0052] It should be noted that, since the bottom of the rotating shaft 16 is designed as a ratchet, when the rotating shaft 16 rotates, the ratchet end will be caught by the pawl 21. The rotation of the rotating shaft 16 will cause the horizontal plate 20 and the end face cam 11 to rotate clockwise, which in turn will drive the rotating gear 5 to rotate clockwise around the fixed gear ring 6. The horizontal plate 20 drives the connecting rod 9 to rotate, and the connecting rod 9 drives the movable rod 7 to rotate. As the horizontal plate 20 rotates, the adjusting rod 10 connected to the horizontal plate 20 moves synchronously with the end face cam 11, thereby causing the movable rod 7 to drive the height gauge 1 to achieve elliptical trajectory data measurement. By continuing to rotate the worm gear 15, the height of the entire device can be measured.

[0053] Additionally, when it is necessary to adjust the motion trajectory of the height gauge 1, the worm gear 15 is rotated in the opposite direction. The worm drives the rotating shaft 16 to rotate in the opposite direction through the horizontal plate 20. The rotating gear 5 rotates counterclockwise on the fixed gear ring 6. When the rotating gear 5 contacts the stop tooth 29, the rotating gear 5 drives the stop tooth 29 to rotate. At this time, the limit block 28 and the limiting pin 27 come into contact, causing the stop tooth 29 to stop rotating. At this time, the rotating gear 5 is restricted and stops rotating.

[0054] In addition, since the movable rod 7 and the horizontal plate 20 stop moving, the contact position of the adjusting rod 10 will change when the end face cam 11 rotates. At this time, the movable sleeve 18 moves upward under the action of the third spring 19, thereby realizing the upward movement of the transverse guide sleeve 14, thus realizing the upward movement of the adjusting rod 10, which is always in contact with the end face cam 11, thereby changing the height of the adjusting rod 10.

[0055] Additionally, the first telescopic rod 12 compresses the second spring 13, thereby changing the connecting rod 9, which in turn changes the position of the adjusting rod 10, thus adjusting the position of the height gauge 1. After adjustment, the worm gear 15 is rotated forward. After the rotating gear 5 disengages from the stop tooth 29, the fifth spring 23 and the sixth spring 25 compress the paddle 24, which, with the assistance of the arc-shaped guide rod 26, resets the stop tooth 29. At this point, the following can be achieved: Figure 5 The trajectory diagram shown is an ellipse for elliptical measurement trajectory adjustment.

[0056] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A height calibration tool for a coating plate used in chemical vapor deposition, comprising a fixing plate (8), characterized in that, The fixed plate (8) is fixedly connected to a fixed toothed ring (6) at its bottom. The fixed plate (8) is fixedly connected to a drive mechanism. The drive mechanism is fixedly connected to a rotating shaft (16). The fixed plate (8) is rotatably connected to the rotating shaft (16). The rotating shaft (16) is fixedly connected to a horizontal plate (20). One end of the horizontal plate (20) is connected to a movable rod (7). The horizontal plate (20) is rotatably connected to a rotating gear (5). The rotating gear (5) meshes with the fixed toothed ring (6). The rotating gear (5) has an adjustment slot (51). The movable rod (7) is movably disposed in the adjustment slot (51). A height gauge (1) is connected below the movable rod (7). The rotating shaft (16) is fixedly connected to an end face cam (11), and an adjusting rod (10) is provided below the end face cam (11). Two connecting rods (9) are hinged below the adjusting rod (10), one of which is hinged to the cross plate (20), and the other connecting rod (9) is hinged to the movable rod (7). The horizontal plate (20) is fixedly connected to a vertical guide rod (17), and the vertical guide rod (17) is slidably connected to a movable sleeve (18). The vertical guide rod (17) is connected to the movable sleeve (18) through a third spring (19). The movable sleeve (18) is fixedly connected to a transverse guide sleeve (14), the transverse guide sleeve (14) is slidably connected to a telescopic rod (12), a second spring (13) is provided between the transverse guide sleeve (14) and the telescopic rod (12), and the telescopic rod (12) is fixedly connected to the adjusting top rod (10). The bottom of the rotating shaft (16) is arranged in the shape of a ratchet, and a pawl (21) is slidably connected inside the horizontal plate (20). A fourth spring (22) is provided between the horizontal plate (20) and the pawl (21). The fixed toothed ring (6) is rotatably connected to a number of stop teeth (29), the stop teeth (29) are fixedly connected to limit blocks (28), and the fixed toothed ring (6) is fixedly connected to limit pins (27).

2. The height calibration tool for a coating plate used in chemical vapor deposition according to claim 1, characterized in that, The stop tooth (29) is fixedly connected to the paddle (24), and the fixed tooth ring (6) is fixedly connected to the arc-shaped guide rod (26). The arc-shaped guide rod (26) is slidably connected to the paddle (24).

3. The height calibration tool for a coating plate used in chemical vapor deposition according to claim 2, characterized in that, A spring seat (2) is fixedly connected to the lower part of the movable rod (7), and an adjusting baffle (3) is slidably connected to the spring seat (2). The spring seat (2) cooperates with the height gauge (1).

4. The height calibration tool for a coating plate used in chemical vapor deposition according to claim 3, characterized in that, The adjusting slot (51) is stepped, the movable rod (7) is stepped, and the movable rod (7) is in contact with the adjusting slot (51).

5. A method for using a coating plate height calibration tool for chemical vapor deposition, characterized in that, The chemical vapor deposition plate height calibration tool according to any one of claims 4 is used. Includes the following steps: S1: When using this device, adjust the position of the height gauge (1) on the coating plate, fix the device on the equipment through the fixing plate (8), install the height gauge (1) on the spring bracket (2), and drive the rotating shaft (16) to rotate clockwise. S2: The rotation of the shaft (16) will cause the horizontal plate (20) and the end face cam (11) to rotate, which in turn drives the rotating gear (5) to rotate clockwise around the fixed gear ring (6), and at the same time causes the movable rod (7) connected to the rotating gear (5) to rotate. As the horizontal plate (20) rotates, the adjusting rod (10) connected to the horizontal plate (20) and the end face cam (11) move synchronously, so that the movable rod (7) drives the height gauge (1) to measure data. S3: When it is necessary to adjust the movement trajectory of the height gauge (1), the drive mechanism rotates in the opposite direction. The shaft (16) drives the rotating gear (5) to rotate in the opposite direction through the horizontal plate (20). Thus, the rotating gear (5) rotates counterclockwise on the fixed gear ring (6). When the rotating gear (5) contacts the stop tooth (29), the rotating gear (5) drives the stop tooth (29) to rotate. At this time, the limit block (28) and the limit pin (27) come into contact, causing the stop tooth (29) to stop rotating. At this time, the rotating gear (5) is restricted and stops rotating. S4: When the rotating gear (5) stops rotating, the horizontal plate (20) stops rotating through the movable rod (7). Under the action of the ratchet inclined surface, the pawl (21) is forced to compress the fourth spring (22) to avoid it, thereby realizing the rotation of the shaft (16) in the open. At the same time, the end face cam (11) continues to follow the rotation of the shaft (16). S5: As the movable rod (7) and the horizontal plate (20) stop moving, the end face cam (11) will rotate and the contact position of the adjusting rod (10) will change. At this time, the movable sleeve (18) moves upward under the action of the third spring (19), thereby realizing the upward movement of the transverse guide sleeve (14), thus realizing the upward movement of the adjusting rod (10) and always in contact with the end face cam (11); S6: When the adjusting rod (10) moves upward, it will cause the connecting rod (9) to change. Since the right side of the connecting rod (9) is hinged to the horizontal plate (20) and the left hinge point is hinged to the movable rod (7), when the movable rod (7) moves along the adjusting bar hole (51) towards the center of the rotating gear (5), the contact position between the adjusting rod (10) and the end face cam (11) will move laterally. S7: At this time, the telescopic rod (12) compresses the second spring (13), thereby changing the connecting rod (9), which in turn changes the position of the adjusting rod (10).

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