A sealing device

Abstract

The application provides a sealing device arranged between a first panel and a second panel and used for sealingly abutting the first panel and the second panel, and the sealing device comprises: an adjusting plate matched to a side of the first panel close to the second panel; a sealing strip clamped in a first clamping groove of the adjusting plate close to the second panel, and the sealing strip is inflatable; a height adjusting assembly used for pushing the adjusting plate to move in a direction close to or away from the second panel; when the height adjusting assembly pushes the adjusting plate to form a first spacing between the adjusting plate and the second panel, the sealing strip is inflated to fill the first spacing; when the adjusting plate and the second panel form a second spacing greater than the first spacing, the sealing strip and the second panel form a third spacing. The application solves the technical problem that the sealing device structure is complex and the sealing operation is too complex.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing equipment, in particular to a sealing device. BACKGROUND

[0002] The glue coating and developing equipment is generally divided into four parts of CSB, MPB, PRB and IFB during installation, each part has a separate frame, and the whole equipment is assembled together during installation to form a complete glue coating and developing equipment, and wafers are transferred in each module frame by a handling robot for process treatment. The wafer process treatment needs to balance the air pressure of the environment and keep the interior clean and dust-free. Therefore, the connection part of each frame of the equipment during installation must be sealed.

[0003] However, during actual construction, there is a problem that the sealing device of the glue coating and developing equipment in the prior art has a complex structure, so that the sealing operation is too complex, and the sealing operation efficiency of the glue coating and developing equipment is low. SUMMARY

[0004] The present application solves the technical problem that the sealing device has a complex structure and the sealing operation is too complex.

[0005] To solve the above problems, the present application provides a sealing device clamped between a first panel and a second panel and used for sealing and docking the first panel and the second panel, comprising: an adjusting plate matched to one side of the first panel close to the second panel; a sealing strip clamped in a first clamping groove of the adjusting plate close to the second panel, and the sealing strip can be inflated and expanded; a height adjusting assembly used for pushing the adjusting plate to move in the direction close to or away from the second panel; wherein when the height adjusting assembly pushes the adjusting plate to form a first spacing between the adjusting plate and the second panel, the sealing strip expands to fill the first spacing; when the second panel and the adjusting plate form a second spacing greater than the first spacing, the sealing strip forms a third spacing with the second panel.

[0006] Compared with the prior art, the technical effects achieved by the technical scheme are as follows: the adjusting plate is matched to one side of the first panel close to the second panel, and the adjusting plate can move between the first panel and the second panel, so as to change the distance between the adjusting plate and the second panel. The side of the adjusting plate close to the second panel is also provided with a first clamping groove, the first clamping groove limits the position of the sealing strip to avoid dislocation of the sealing strip when the sealing strip expands, at least part of the sealing strip is clamped in the first clamping groove, and when the sealing strip expands or shrinks, the distance between the adjusting plate and the second panel can be changed; the height adjusting assembly drives the adjusting plate to move in the first recess in the direction close to or away from the second panel under the action of an external force. When the height adjusting assembly drives the adjusting plate, a first distance is formed between the adjusting plate and the second panel, the sealing strip is inflated to fill the first distance, the adjusting plate and the second panel are sealed, the sealing butt joint of the first panel and the second panel is realized, the operation is simple and convenient, and the operation efficiency of the sealing process is improved. At this time, the height adjusting assembly moves to make the adjusting plate move in the direction away from the second panel, a second distance greater than the first distance is formed between the adjusting plate and the second panel, and a gap exists between the sealing strip and the second panel, so that the sealing of the first panel and the second panel is released, and the disassembly is facilitated.

[0007] In an example of the present application, the first panel is provided with a first recess for mounting the adjusting plate, and the first recess has a recess depth for the adjusting plate to move in the direction close to or away from the second panel; the height adjusting assembly comprises a plurality of height adjusting members arranged oppositely, the height adjusting members are arranged in the first recess, and the height adjusting members drive the adjusting plate to move in the direction close to or away from the second panel; wherein the plurality of height adjusting members comprise a first height adjusting member and a second height adjusting member.

[0008] Compared with the prior art, the technical effects achieved by the technical scheme are as follows: the first panel is provided with a first recess on the side close to the second panel, the first recess is used for mounting the adjusting plate, the first recess defines the movement space of the adjusting plate, the first recess has a recess depth, and the recess depth is greater than the thickness of the adjusting plate, so that the adjusting plate can move in the direction close to or away from the second panel; the height adjusting member is arranged in the first recess, and the height adjusting member drives the adjusting plate to move in the direction close to or away from the second panel through the movement of the height adjusting member; the height adjusting member comprises a first height adjusting member and a second height adjusting member, and the first height adjusting member and the second height adjusting member are arranged oppositely, so as to improve the stability and accuracy of driving the adjusting plate.

[0009] In an example of the present application, the plurality of height adjusting members are provided with an adjusting surface in contact with the adjusting plate; wherein when the adjusting surface is in contact with the adjusting plate, the adjusting plate moves in the direction away from the first panel when the first height adjusting member and the second height adjusting member are relatively close; and the adjusting plate moves in the direction close to the first panel when the first height adjusting member and the second height adjusting member are relatively far away.

[0010] Compared with the prior art, the technical effects achieved by adopting the technical scheme are as follows: the adjusting surface is an inclined surface, the adjusting surface is arranged at a position where the height adjusting members are close to each other and close to the adjusting plate, and the surface of the height adjusting member close to the adjusting plate is a horizontal surface; when the adjusting plate and the horizontal surface are in contact, the moving distance of the adjusting plate reaches the maximum; in the case where the adjusting plate and the horizontal surface are in contact, the moving distance of the adjusting plate cannot be changed by the movement of the height adjusting member. In the case where the adjusting surface and the adjusting plate are in contact, the moving distance of the adjusting plate can be changed by the movement of the height adjusting member: when the plurality of height adjusting members are relatively close, the first height adjusting member and the second height adjusting member are relatively close, and the adjusting plate moves in a direction away from the first panel; when the plurality of height adjusting members are relatively far away, the first height adjusting member and the second height adjusting member are relatively far away, and the adjusting plate moves in a direction close to the first panel. The ratio of the moving distance of the height adjusting member to the moving distance of the adjusting plate is determined by the angle of the adjusting surface.

[0011] In an example of the present application, the adjusting plate is provided with a matching surface matched with the adjusting surface.

[0012] Compared with the prior art, the technical effects achieved by adopting the technical scheme are as follows: the matching surface is an inclined surface, the matching surface and the adjusting surface are matched, when the adjusting surface and the adjusting plate are in contact, the matching surface arranged on the adjusting plate can increase the contact area of the adjusting plate and the height adjusting member, reduce the pressure at the contact position, and the mutual cooperation can make the movement of the adjusting plate more stable. At the same time, the sealing between the height adjusting member and the adjusting plate can be improved to further improve the sealing between the first panel and the second panel.

[0013] In an example of the present application, the side of the first panel away from the second panel is provided with a second groove for accommodating the height adjusting member; the side of the first panel away from the second panel is provided with a fixed plate, and the fixed plate is provided with the height adjusting member; wherein the second groove and the first groove are in communication, and the connection position of the second groove and the first groove forms a limiting step for limiting the relative movement of the plurality of height adjusting members.

[0014] Compared with the prior art, the technical effects reached by adopting the technical scheme are as follows: the second recess is arranged on the first panel to accommodate the height adjusting piece, the second recess provides a certain moving range and moving distance for the movement of the height adjusting piece, the second recess is arranged on the side of the first panel away from the second panel to limit the height adjusting piece, so that the movement of the height adjusting piece is more stable, the fixed plate is arranged on the side of the first panel away from the second panel to connect the height adjusting piece, so as to avoid the height adjusting piece from falling out of the second recess, the second recess and the first recess are communicated, so that at least part of the height adjusting piece in the second recess is moved to the communicated position of the first recess and the second recess under the driving of the driving assembly, and the height adjusting piece has a certain thickness, when at least part of the height adjusting piece is arranged in the first recess, the distance between the adjusting plate and the first panel is increased, so that the adjusting plate is moved in the first recess in the direction close to the second panel, and the connecting position of the second recess and the first recess forms a limiting step for limiting the relative movement of the height adjusting piece.

[0015] In an example of the present application, the second panel is provided with a second clamping groove on the side close to the first panel, and the second clamping groove is arranged opposite to the first clamping groove.

[0016] Compared with the prior art, the technical effects reached by adopting the technical scheme are as follows: the second clamping groove opposite to the first clamping groove is arranged on the second panel, when the sealing strip in the first clamping groove expands, the first clamping groove and the second clamping groove are respectively filled to realize the sealed butt joint of the adjusting plate and the second panel, and the second clamping groove limits the expansion space of the sealing strip and the second panel, so that the sealing effect is better.

[0017] In an example of the present application, the second panel is provided with a first protruding ring and a second protruding ring on the side close to the first panel, the first protruding ring and the second protruding ring are arranged opposite to each other and form an accommodation space therebetween, and the first protruding ring and the second protruding ring combine to form the second clamping groove on the second panel.

[0018] Compared with the prior art, the technical effects reached by adopting the technical scheme are as follows: the second panel is provided with a first protruding ring and a second protruding ring on the side close to the first panel, the first protruding ring and the second protruding ring are arranged opposite to each other and form an accommodation space therebetween, and the first protruding ring and the second protruding ring combine to form the second clamping groove on the second panel.

[0019] In an example of the present application, the first panel is connected with a limiting plate on the side close to the second panel, and the limiting plate is provided with a communicating space for the expansion of the sealing strip, and the limiting plate is used to limit the moving distance of the adjusting plate.

[0020] Compared with the prior art, the technical effects reached by adopting the technical scheme are that the limiting plate is connected to the first panel near one side of the first panel, and the limiting plate is provided with a communication space capable of allowing the sealing strip to expand, but capable of limiting the moving distance of the adjusting plate, so that the adjusting plate is prevented from being excessively pushed out.

[0021] In an example of the present application, the sealing strip is provided with an air pipe, and the sealing strip is inflated or deflated through the air pipe.

[0022] Compared with the prior art, the technical effects reached by adopting the technical scheme are that the sealing strip is provided with an air pipe and a gas supply assembly, so as to provide a channel for the flow of gas, and the gas supply assembly is convenient for inflating or deflating the sealing strip through the air pipe.

[0023] In an example of the present application, the sealing device further comprises: a gas pressure detection assembly, which is used for monitoring the internal gas pressure and the sealing performance of the sealing strip in real time.

[0024] Compared with the prior art, the technical effects reached by adopting the technical scheme are that the gas pressure detection device is used for monitoring the internal gas pressure of the sealing strip in real time, and can also detect the sealing performance of the connection between the adjusting plate and the second panel, so as to provide detection and monitoring for whether the first panel and the second panel are sealed and docked.

[0025] After adopting the technical scheme of the present application, the following technical effects can be achieved:

[0026] (1) When the height adjusting assembly pushes the adjusting plate, and a first interval is formed between the adjusting plate and the second panel, the sealing strip is inflated and expanded to fill the first interval, so that the adjusting plate and the second panel are sealed, thereby realizing the sealed docking of the first panel and the second panel, which is simple and convenient, and improves the operation efficiency of the sealing process;

[0027] (2) When the height adjusting assembly moves to move the adjusting plate away from the second panel, a second interval larger than the first interval is formed between the adjusting plate and the second panel, and at this time, there is a gap between the sealing strip and the second panel, so that the sealing of the first panel and the second panel is released, which is convenient for disassembly;

[0028] (3) A plurality of height adjusting members are arranged in the first groove, and the adjusting plate is pushed to move in the direction of approaching or moving away from the second panel through the movement of the plurality of height adjusting members, and the plurality of height adjusting members are arranged oppositely, which can improve the stability and accuracy of pushing the adjusting plate;

[0029] (4) The adjustment surface is located where the height adjustment components are close to each other and close to the adjustment plate, and the side of the height adjustment component close to the adjustment plate is a horizontal surface. When the adjustment plate is in contact with the horizontal surface, the movement distance of the adjustment plate reaches its maximum. When the adjustment plate is in contact with the horizontal surface, the movement distance of the adjustment plate cannot be changed by moving the height adjustment component. When the adjustment surface is in contact with the adjustment plate, the movement distance of the adjustment plate can be changed by moving the height adjustment component: when the height adjustment components are relatively close, the adjustment plate moves in a direction away from the first panel; when the height adjustment components are relatively far apart, the adjustment plate moves in a direction close to the first panel, and the ratio of the movement distance of the height adjustment component to the movement distance of the adjustment plate is determined by the angle of the adjustment surface.

[0030] (5) A second groove is provided on the first panel to accommodate the height adjustment component. The second groove provides a certain range and distance for the movement of the height adjustment component. The second groove is located on the side of the first panel away from the second panel, which can restrict the height adjustment component and make the movement of the height adjustment component more stable. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of a sealing device provided in Embodiment 1 of the present invention.

[0032] Figure 2 for Figure 1 Exploded view of the central sealing device.

[0033] Figure 3 for Figure 2 Enlarged view of section A.

[0034] Figure 4 for Figure 2 Enlarged view of section B.

[0035] Figure 5 for Figure 2 A schematic diagram of the moving block.

[0036] Figure 6 for Figure 1 An exploded view of the central sealing device from another perspective.

[0037] Figure 7 for Figure 6 Enlarged view of section C.

[0038] Figure 8 for Figure 6 Enlarged view of section D.

[0039] Figure 9 for Figure 1 An exploded view of the central sealing device from another perspective.

[0040] Figure 10 for Figure 8Enlarged view of the middle E portion.

[0041] Figure 11 For Figure 1 Exploded view of the sealing device from another perspective.

[0042] Figure 12 For Figure 2 Structural schematic view of the sealing strip.

[0043] Legend:

[0044] 100 - first panel; 101 - first exchange window; 103 - limiting step; 104 - first groove; 105 - second groove; 110 - trachea fixing piece; 200 - second panel; 201 - second clamping groove; 202 - second exchange window; 210 - first convex ring; 220 - second convex ring; 420 - limiting plate; 421 - communication space; 300 - sealing strip; 310 - trachea; 400 - adjusting plate; 401 - first clamping groove; 402 - matching surface; 403 - opening; 510 - height adjusting piece; 512 - adjusting surface; 515 - horizontal surface; 513 - matching step; 520 - fixing plate. DETAILED DESCRIPTION

[0045] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0046]

Embodiment One

[0047] Referring to Figures 1-12 The present application provides a sealing device arranged between a first panel 100 and a second panel 200 and used for sealingly abutting the first panel 100 and the second panel 200, comprising: an adjusting plate 400, which is matched to a side of the first panel 100 close to the second panel 200; a sealing strip 300, which is clamped in a first clamping groove 401 of the adjusting plate 400 close to the second panel 200 and can be inflated; a height adjusting assembly, which is used for pushing the adjusting plate 400 to move in a direction close to or away from the second panel 200; wherein when the height adjusting assembly pushes the adjusting plate 400 to form a first spacing with the second panel 200, the sealing strip 300 is inflated to fill the first spacing; and when the adjusting plate 400 and the second panel 200 form a second spacing greater than the first spacing, a third spacing is formed between the sealing strip 300 and the second panel 200.

[0048] Specifically, the sealing device is arranged between the first panel 100 and the second panel 200, and is used for realizing the sealed butt joint of the first panel 100 and the second panel 200. The sealing device comprises an adjusting plate 400, a sealing strip 300 and a height adjusting assembly. The adjusting plate 400 is arranged on the side of the first panel 100 close to the second panel 200. The side of the adjusting plate 400 close to the second panel 200 is provided with a first clamping groove 401 for clamping the sealing strip 300. The sealing strip 300 can be inflated or deflated under the action of the air supply assembly, so that the sealing strip 300 expands or shrinks. The height adjusting assembly can push the adjusting plate 400 to move along the direction close to or away from the second panel 200, so as to adjust the distance between the adjusting plate 400 and the second panel 200. During the process that the height adjusting assembly pushes the adjusting plate 400 to be close to the second panel 200, when the first distance is formed between the adjusting plate 400 and the second panel 200, the sealing strip 300 can be inflated to fill the first distance, so as to realize the sealed butt joint of the first panel 100 and the second panel 200. During the process that the height adjusting assembly pushes the adjusting plate 400 to be away from the second panel 200, when the second distance larger than the first distance is formed between the adjusting plate 400 and the second panel 200, the third distance is formed between the sealing strip 300 and the second panel 200, and the sealed butt joint of the first panel 100 and the second panel 200 is released.

[0049] The working principle of the present application is that the height adjusting member 510 located in the second groove 105 moves linearly relatively close under the driving of the driving assembly, the adjusting plate 400 moves along the direction away from the first panel 100 under the pushing of the height adjusting member 510, so as to shorten the distance between the adjusting plate 400 and the second panel 200. When the height of the adjusting plate 400 is adjusted to the side of the adjusting plate 400 close to the second panel 200 and the side of the first convex ring 210 and the second convex ring 220 close to the second panel 200 are in contact, the first clamping groove 401 and the second clamping groove 201 abut each other. Since the sealing property of the first clamping groove 401 and the second clamping groove 201 is not enough at this time, the sealing strip 300 located in the first clamping groove 401 is inflated, so that the sealing strip 300 expands, and the sealing property between the first clamping groove 401 and the second clamping groove 201 is further improved. Through the sealed butt joint of the connection between the adjusting plate 400 and the second panel 200, the sealed butt joint of the first panel 100 and the second panel 200 is realized. The sealing device of the present application has simple structure, convenient operation, simple and efficient process of realizing the sealed butt joint, and convenient disassembly.

[0050] Preferably, the first panel 100 and the second panel 200 are hollow structures. The first panel 100 is provided with a first exchange window 101, and the second panel 200 is provided with a second exchange window 202. The first exchange window 101 and the second exchange window 202 are oppositely arranged and communicate with each other.

[0051] Preferably, the driving assembly can be a cylinder, and the height adjusting member 510 is further connected with a push rod on the side away from each other, and the cylinder drives the push rod to move, thereby driving the relative movement of the height adjusting member 510; the sealing strip 300 is inflated or deflated by the gas supply assembly; the gas filled in the sealing strip 300 is inert gas, which has higher stability and safety.

[0052] Further, referring to Figure 2 , the first panel 100 is provided with a first groove 104 for mounting the adjusting plate 400, and the first groove 104 has a groove depth for the adjusting plate 400 to move in the direction of approaching or moving away from the second panel 200; the height adjusting assembly includes oppositely arranged height adjusting members 510, and the height adjusting members 510 are arranged at both ends of the first groove 104, and the height adjusting members 510 push the adjusting plate 400 to move in the direction of approaching or moving away from the second panel 200; wherein the plurality of height adjusting members 510 include a first height adjusting member and a second height adjusting member.

[0053] For example, the first panel 100 is provided with a first groove 104 on the side close to the second panel 200, for mounting the adjusting plate 400, and the first groove 104 defines the movement space of the adjusting plate 400, and the first groove 104 has a groove depth, and the groove depth is greater than the thickness of the adjusting plate 400, so that the adjusting plate 400 can move in the direction of approaching or moving away from the second panel 200; the height adjusting member 510 is arranged in the first groove 104, and the height adjusting member 510 is pushed to move in the direction of approaching or moving away from the second panel 200 by the movement of the height adjusting member 510; the height adjusting member 510 includes a first height adjusting member and a second height adjusting member, and the first height adjusting member and the second height adjusting member are oppositely arranged and respectively arranged at both ends of the first groove 104, which can improve the stability and accuracy of pushing the adjusting plate 400.

[0054] Preferably, the height adjusting assembly can be a plurality of oppositely arranged height adjusting members 510, which further improves the stability of the height adjusting member 510 in pushing the adjusting plate 400.

[0055] Further, referring to Figure 5 , the plurality of height adjusting members 510 are provided with an adjusting surface 512 in contact with the adjusting plate 400; wherein, in the case that the adjusting surface 512 and the adjusting plate 400 are in contact, when the first height adjusting member and the second height adjusting member are relatively close, the adjusting plate 400 moves in the direction away from the first panel 100; when the first height adjusting member and the second height adjusting member are relatively far away, the adjusting plate 400 moves in the direction close to the first panel 100.

[0056] For example, the adjusting surface 512 is an inclined surface, the adjusting surface 512 is arranged at a position where the height adjusting members 510 are close to each other and close to the adjusting plate 400, and a surface of the height adjusting members 510 close to the adjusting plate 400 is a horizontal surface 515, when the adjusting plate 400 and the horizontal surface 515 are in contact, the moving distance of the adjusting plate 400 reaches the maximum, and in the case where the adjusting plate 400 and the horizontal surface 515 are in contact, the moving distance of the adjusting plate 400 cannot be changed by the movement of the height adjusting members 510. In the case where the adjusting surface 512 and the adjusting plate 400 are in contact, the moving distance of the adjusting plate 400 can be changed by the movement of the height adjusting members 510: when the height adjusting members 510 are relatively close, the first height adjusting member and the second height adjusting member are relatively close, and the adjusting plate 400 moves in a direction away from the first panel 100; when the height adjusting members 510 are relatively far away, the first height adjusting member and the second height adjusting member are relatively far away, and the adjusting plate 400 moves in a direction close to the first panel 100. And the ratio of the moving distance of the height adjusting members 510 and the moving distance of the adjusting plate 400 is determined by the angle of the adjusting surface 512.

[0057] Further, referring to Figure 2 and Figure 4 , the adjusting plate 400 is provided with a matching surface 402 matched with the adjusting surface 512.

[0058] For example, the matching surface 402 is an inclined surface, the matching surface 402 and the adjusting surface 512 are matched, when the adjusting surface 512 and the adjusting plate 400 are in contact, the matching surface 402 arranged on the adjusting plate 400 can increase the contact area of the adjusting plate 400 and the height adjusting members 510, reduce the pressure at the contact, and the mutual cooperation can make the movement of the adjusting plate 400 more stable. At the same time, the sealing between the height adjusting members 510 and the adjusting plate 400 can be improved to further improve the sealing between the first panel 100 and the second panel 200.

[0059] Preferably, the adjusting plate 400 is provided with a groove matched with the height adjusting members 510, which can further limit the movement of the adjusting plate 400 and improve the stability and accuracy of the movement.

[0060] Further, referring to Figure 6 and Figure 8 , the side of the first panel 100 away from the second panel 200 is provided with a second groove 105 for accommodating the height adjusting members 510; the side of the first panel 100 away from the second panel 200 is provided with a fixed plate 520, and the fixed plate 520 is provided with the height adjusting members 510; wherein the second groove 105 and the first groove 104 are communicated, and the connection of the second groove 105 and the first groove 104 forms a limiting step 103 for limiting the relative movement of the height adjusting members 510.

[0061] For example, the first panel 100 is provided with the second groove 105 for accommodating the height adjusting member 510, and the second groove 105 provides a certain moving range and distance for the height adjusting member 510; the second groove 105 is arranged on the side of the first panel 100 away from the second panel 200, and can limit the height adjusting member 510, so that the movement of the height adjusting member 510 is more stable; the side of the first panel 100 away from the second panel 200 is provided with the fixed plate 520 for connecting the height adjusting member 510, so as to avoid the height adjusting member 510 from falling out of the second groove 105; the second groove 105 and the first groove 104 are communicated, so that the height adjusting member 510 located in the second groove 105 can be driven by the driving assembly to move at least partially to the communication position of the first groove 104 and the second groove 105, and the height adjusting member 510 has a certain thickness; when the height adjusting member 510 is arranged at least partially in the first groove 104, the distance between the adjusting plate 400 and the first panel 100 can be increased, so that the adjusting plate 400 can move in the first groove 104 in the direction close to the second panel 200; the connecting position of the second groove 105 and the first groove 104 forms the limiting step 103 for limiting the relative movement of the height adjusting member 510.

[0062] The second groove 105 and the height adjusting member 510 are arranged one by one, so that the height adjusting member 510 can move in the corresponding second groove 105.

[0063] Preferably, the height adjusting member 510 is provided with the matching step 513 matched with the limiting step 103, and the matching step 513 and the limiting step 103 are matched together to limit the moving range of the height adjusting member 510; when the matching step 513 and the limiting step 103 are matched together, it indicates that the height adjusting member 510 moves to the maximum moving range and cannot move relatively close.

[0064] Preferably, the contact area of the fixed plate 520 and the first panel 100 is greater than the opening area of the second groove 105, so as to further improve the function of the fixed plate 520 for preventing the height adjusting member 510 from falling out. The matching mode of the fixed plate 520 and the first panel 100 can be clamping, so as to improve the connectivity of the fixed plate 520 and the first panel 100.

[0065] Further, the side of the second panel 200 close to the first panel 100 is provided with the second clamping groove 201, and the second clamping groove 201 and the first clamping groove 401 are arranged oppositely.

[0066] For example, the second clamping groove 201 is arranged on the second panel 200 opposite to the first clamping groove 401, when the sealing strip 300 in the first clamping groove 401 expands, the first clamping groove 401 and the second clamping groove 201 are filled respectively, so that the sealing butt joint of the adjusting plate 400 and the second panel 200 is realized; the second clamping groove 201 limits the expansion space of the sealing strip 300 and the second panel 200, and the sealing effect can be better realized.

[0067] Further, referring to Figure 6 and Figure 7 , the first convex ring 210 and the second convex ring 220 are arranged on the side of the second panel 200 close to the first panel 100, the first convex ring 210 and the second convex ring 220 are arranged oppositely, and the accommodating space is formed between the two; wherein the first convex ring 210 and the second convex ring 220 combine to form the second clamping groove 201 on the second panel 200.

[0068] For example, the first convex ring 210 and the second convex ring 220 are arranged on the side of the second panel 200 close to the first panel 100, the first convex ring 210 and the second convex ring 220 are arranged on the side of the second panel 200 close to the first panel 100, the first convex ring 210 and the second convex ring 220 are arranged oppositely, and the accommodating space is formed between the two; wherein the first convex ring 210 and the second convex ring 220 combine to form the second clamping groove 201 on the second panel 200.

[0069] Further, referring to Figure 9 and Figure 10 , the limiting plate 420 is connected to the side of the first panel 100 close to the second panel 200, and the limiting plate 420 is provided with a communication space 421 for the expansion of the sealing strip 300; wherein the limiting plate 420 is used to limit the movement distance of the adjusting plate 400.

[0070] For example, the limiting plate 420 is connected to the side of the first panel 100 close to the first panel 100, and the limiting plate 420 is provided with a communication space 421 capable of expanding the sealing strip 300, and the movement distance of the adjusting plate 400 is limited, so that the adjusting plate 400 is not pushed out too much.

[0071] Further, referring to Figure 3 , Figure 11 and 12 , the sealing strip 300 is provided with an air pipe 310, and the sealing strip 300 is inflated or deflated through the air pipe 310.

[0072] For example, the sealing strip 300 is provided with an air pipe 310 and a gas supply assembly, which provides a channel for the flow of gas, so that the gas supply assembly can inflate or deflate the sealing strip 300 through the air pipe 310.

[0073] Preferably, the first groove 104 is further provided with a trachea fixing member 110, which is used to fix the trachea 310 so that the trachea 310 can pass out of the trachea fixing member 110 and be connected to other parts to inhale air; the adjusting plate 400 is provided with an opening 403 for the trachea 310 to pass out of.

[0074] Preferably, the sealing device can comprise the air supply assembly; of course, the sealing device can also not comprise the air supply assembly, and the air supply assembly can be provided by the outside.

[0075] Further, the sealing device further comprises an air pressure detection assembly, which is used to monitor the internal air pressure of the sealing strip 300 and the sealing performance in real time.

[0076] For example, the air pressure detection assembly is used to monitor the internal air pressure of the sealing strip 300 in real time, and can also detect the sealing performance of the connection between the adjusting plate 400 and the second panel 200, thereby providing detection and monitoring for whether the first panel 100 and the second panel 200 are sealed and docked.

[0077] Preferably, the sealing device can comprise the air pressure detection assembly; of course, the sealing device can also not comprise the air pressure detection assembly, and the air pressure detection assembly can be provided by the outside.

[0078] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A sealing device sandwiched between a first panel (100) and a second panel (200) and configured to seal the first panel (100) and the second panel (200) against each other, characterized in that, The sealing device comprises: an adjusting plate (400) matched to the first panel (100) near one side of the second panel (200); a sealing strip (300) clamped in a first clamping groove (401) of the adjusting plate (400) near the second panel (200), and the sealing strip (300) can be inflated; a height adjusting assembly for pushing the adjusting plate (400) to move in the direction of approaching or moving away from the second panel (200); wherein when the height adjusting assembly pushes the adjusting plate (400) to form a first interval with the second panel (200), the sealing strip (300) is inflated to fill the first interval; when the adjusting plate (400) and the second panel (200) form a second interval larger than the first interval, the sealing strip (300) forms a third interval with the second panel (200).

2. The sealing device according to claim 1, wherein the first panel (100) is provided with a first recess (104) for mounting the adjusting plate (400), and the first recess (104) has a recess depth for the adjusting plate (400) to move in the direction of approaching or moving away from the second panel (200); the height adjusting assembly comprises a plurality of height adjusting members (510) arranged oppositely, the height adjusting members (510) are arranged in the first recess (104), and the height adjusting members (510) push the adjusting plate (400) to move in the direction of approaching or moving away from the second panel (200); wherein the plurality of height adjusting members (510) comprise a first height adjusting member and a second height adjusting member.

3. The sealing device according to claim 2, wherein the plurality of height adjusting members (510) are provided with an adjusting surface (512) in contact with the adjusting plate (400); wherein when the adjusting surface (512) and the adjusting plate (400) are in contact, the adjusting plate (400) moves in the direction away from the first panel (100) when the first height adjusting member and the second height adjusting member are relatively close, and the adjusting plate (400) moves in the direction approaching the first panel (100) when the first height adjusting member and the second height adjusting member are relatively far away.

4. The sealing device according to claim 3, wherein the adjusting plate (400) is provided with a matching surface (402) matched with the adjusting surface (512).

5. The sealing device according to claim 2, wherein the side of the first panel (100) away from the second panel (200) is provided with a second recess (105) for accommodating the height adjusting member (510); the side of the first panel (100) away from the second panel (200) is provided with a fixing plate (520), and the fixing plate (520) is provided with the height adjusting member (510). The second groove (105) and the first groove (104) are communicated, and a limiting step (103) is formed at the connection of the second groove (105) and the first groove (104) to limit the relative movement of the plurality of height adjusting members (510).

6. The sealing device according to claim 1, wherein, The second panel (200) is provided with a second clamping groove (201) on the side close to the first panel (100), and the second clamping groove (201) and the first clamping groove (401) are oppositely arranged.

7. The sealing device according to claim 6, wherein, The second panel (200) is provided with a first protruding ring (210) and a second protruding ring (220) on the side close to the first panel, the first protruding ring and the second protruding ring are oppositely arranged, and a containing space is formed between the first protruding ring and the second protruding ring. The first protruding ring (210) and the second protruding ring (220) combine to form the second clamping groove (201) on the second panel.

8. The sealing device according to claim 1, wherein, The first panel (100) is connected with a limiting plate (420) on the side close to the second panel (200), and the limiting plate (420) is provided with a communication space (421) for expansion of the sealing strip (300). The limiting plate (420) is used to limit the movement distance of the adjusting plate (400).

9. The sealing device according to claim 1, wherein, The sealing strip (300) is provided with an air pipe (310) for inflating or deflating the sealing strip (300).

10. The sealed device of claim 1, wherein, The sealing device further comprises: An air pressure detection assembly for monitoring the internal air pressure and sealing performance of the sealing strip (300) in real time.

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