Highly biocompatible electronic devices and methods of making the same

Abstract

A high biocompatible electronic device and a manufacturing method thereof, the structure of which comprises a semiconductor substrate layer, a synapse bottom electrode located on the semiconductor substrate layer, a biological medium thin film layer located above the synapse bottom electrode, and a synapse top electrode located on the biological medium thin film layer. Wherein, since the biological medium thin film layer is made of a biological medium mixed solution which at least comprises a biological mucopolysaccharide material and a polyol material, the biological medium thin film layer, as a biological mucopolysaccharide composite material, combines the common advantages between the biological mucopolysaccharide material and the added material, so that the device has low power consumption, high bionic degree, high biocompatibility and adjustable physical properties.

Description

Technical Field

[0001] This invention relates to the field of semiconductor devices, and more specifically to a highly biocompatible electronic device and its manufacturing method. Background Technology

[0002] Current energy storage devices are mostly based on silicon, metal oxides, or inorganic salts. The heavy metal doping or chemical reactions involved in these components place a burden on the environment and microbial degradation, making them less than ideal for environmental friendliness. In recent years, bioelectronic devices made from natural materials have developed rapidly, but research on animal biomaterials is limited, with more focus on plant polysaccharide materials. The main drawback of plant polysaccharide materials is the low degree of biomimicry in bioelectronic devices and energy storage components derived from plants.

[0003] Research has shown that biopolymer materials originate from connective tissue between animal cells and are widely found in various mammalian cells. Their diverse sources make them more advanced in the research and application of biomimetic synapses. However, biomaterial electronic devices often utilize single plant or animal polysaccharides. While single animal polysaccharides exhibit excellent mechanical properties, their performance in electronic devices is insufficient, and their value is limited to their basic properties without further extensions.

[0004] Therefore, there is an urgent need for an electronic device that is highly biocompatible, environmentally friendly, green and pollution-free, and can achieve the same neural synaptic modulation function with lower energy consumption, or be powered by a biodegradable battery. Summary of the Invention

[0005] The main technical problem that this invention addresses is that current electronic devices have a low degree of biomimicry, lack good biocompatibility, are not environmentally friendly, and consume a lot of resources.

[0006] According to a first aspect, one embodiment provides a method for manufacturing a highly biocompatible electronic device, comprising the steps of: providing a semiconductor substrate layer, the semiconductor substrate layer comprising a substrate substrate for a two-terminal synaptic device or a substrate substrate for a three-terminal synaptic device; forming a synaptic bottom electrode on the semiconductor substrate layer, capable of simulating the biological postsynaptic membrane of a two-terminal synaptic device or a three-terminal synaptic device; preparing a biological mediator mixture and preparing the biological mediator mixture into a biological mediator thin film layer, forming the biological mediator thin film layer above the synaptic bottom electrode, serving as a functional layer for a two-terminal synaptic device or a three-terminal synaptic device; the biological mediator mixture comprising at least a biological mucopolysaccharide material and a polyol material; and forming a synaptic top electrode on the biological mediator thin film layer, capable of simulating the biological presynaptic membrane of a two-terminal synaptic device or a three-terminal synaptic device.

[0007] Optionally, the step of preparing the biological media mixture and fabricating the biological media mixture into a biological media thin film layer includes:

[0008] Weigh a predetermined amount of polyol material and dissolve it in water to prepare a first solution with a mass concentration of 0.5%-5%.

[0009] Weigh a predetermined amount of biological mucopolysaccharide material and dissolve it in the first solution to prepare a biological medium mixture in which the mass ratio of biological mucopolysaccharide material to polyol material ranges from 0.1% to 100%.

[0010] The biological media mixture is spread evenly on the surface of the synaptic bottom electrode and then dried to form a biological media film layer.

[0011] Optionally, the biopolymer material is erythritol, sodium ascorbate, ammonium chloride, or pentanediol.

[0012] Optionally, the polyol material is hyaluronic acid, dermatan sulfate, heparin sulfate, keratin sulfate, chondroitin sulfate, glucosamine, or epidermalin.

[0013] Optionally, the method of spreading the biological media mixture on the surface of the synaptic bottom electrode includes: spreading the biological media mixture evenly on the surface of the bottom electrode by drop coating or spin coating at different speeds using a spin coater.

[0014] Optionally, the thickness of the bio-media film layer is 0.1 μm-10 μm.

[0015] Optionally, after providing the semiconductor substrate layer and before forming the synaptic bottom electrode on the semiconductor substrate layer, the method further includes the step of:

[0016] The semiconductor substrate layer is cleaned and dried.

[0017] Optionally, forming the synaptic bottom electrode on the semiconductor substrate includes the step of:

[0018] A metal of a predetermined thickness is formed on the semiconductor substrate by deposition or sputtering processes;

[0019] Correspondingly,

[0020] The step of forming a synaptic top electrode on the biological medium thin film layer includes:

[0021] A metal of a predetermined thickness is formed on the bio-media thin film layer by deposition or sputtering processes.

[0022] According to a second aspect, one embodiment provides a highly biocompatible electronic device, comprising:

[0023] The semiconductor substrate is a substrate for a two-terminal synaptic device or a substrate for a three-terminal synaptic device.

[0024] The synaptic bottom electrode is located on the semiconductor substrate layer and can be used to simulate the biological postsynaptic membrane of a two-terminal or three-terminal neural synaptic device.

[0025] A bio-media film layer located above the synaptic bottom electrode, wherein the bio-media film layer is prepared from a bio-media mixture, and the bio-media mixture includes at least biological mucopolysaccharide material and polyol material;

[0026] The synaptic top electrode is located on the bio-media thin film layer and can be used to simulate the presynaptic membrane of a two-terminal or three-terminal neural synaptic device.

[0027] Optionally, the thickness of the bio-media film layer is 0.1 μm-10 μm.

[0028] The highly biocompatible electronic device and its manufacturing method according to the above embodiments utilize a bio-mediate thin film layer as a functional layer. This bio-mediate thin film layer is made from a bio-mediate mixture comprising at least a bio-polysaccharide material and a polyol material. As a bio-polysaccharide composite material, the bio-mediate thin film layer combines the advantages of both the bio-polysaccharide material and the additives, including optical, electrical, and mechanical properties. For example, it improves elasticity or tensile strength, increases refractive index, and, particularly, the addition of hydrogen bonds results in a lower current consumption for the same voltage. It features low power consumption, high biomimicry, high biocompatibility, and adjustable physical properties. It combines the advantages of both the bio-polysaccharide material and the additives, including optical, electrical, and mechanical properties. For example, it improves elasticity or tensile strength, increases refractive index, and, particularly, the addition of hydrogen bonds results in a lower current consumption for the same voltage. Furthermore, compared to pure biological mucopolysaccharide materials, the electronic devices prepared by this method can exhibit different physicochemical properties under different external conditions, and have a wider range of applications and directions. Due to their low current performance, they are also more suitable for preparation as low-power electronic devices and energy storage elements. Attached Figure Description

[0029] Figure 1 This is a flowchart illustrating the fabrication process of a highly biocompatible electronic device according to an embodiment of the present invention.

[0030] Figure 2 This is a schematic diagram of the structure of a two-ended neural synapse device according to an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the structure of a three-terminal neural synapse device according to an embodiment of the present invention;

[0032] Figure 4 A schematic diagram of the pulse response of a biocompatible electronic device under different voltages in the prior art;

[0033] Figure 5 This is a schematic diagram of the pulse response of a biocompatible electronic device under different voltages, provided in an embodiment of the present invention.

[0034] Figure 6 This is a schematic diagram showing the refractive index of a biocompatible electronic device under different proportions of added substances, as provided in an embodiment of the present invention.

[0035] Figure 7 This is a schematic diagram showing the extinction coefficient of a biocompatible electronic device under different proportions of added substances, as provided in an embodiment of the present invention. Detailed Implementation

[0036] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of this application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to this application are not shown or described in the specification. This is to avoid obscuring the core parts of this application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0037] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0038] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0039] As can be seen from the background technology, current electronic devices have a low degree of biomimicry, lack good biocompatibility, are not environmentally friendly, and consume a lot of resources.

[0040] Analysis reveals that wearable electronic devices, besides being directly wearable and portable, also need to sense, record, and analyze the health status of organisms, and even intervene in and treat diseases, supported by sensors, wireless communication technologies, and software. Depending on the compatibility requirements between biomaterials and organisms, wearable electronic devices that need to be implanted within organisms must be non-toxic, acceptable by the organism, not cause rejection, and even be metabolized. Therefore, highly compatible biomaterials are the primary choice. Biomaterials such as mucopolysaccharides have a higher degree of compatibility with the human body than other plant polysaccharides, allowing them to be metabolized within the body without triggering a rejection response from the human immune system. This gives them an advantage in wearable and implantable medical electronic devices. However, current energy storage components are mostly based on silicon, metal oxides, or inorganic salts. The heavy metal doping or chemical reactions in these components place a burden on the environment and microbial degradation, making them less than environmentally friendly. Biomaterial electronic devices mostly use single plant or animal polysaccharides such as glucose, cellulose, and lignin. Although they exhibit excellent mechanical properties, their performance in electronic devices is not good enough, and the value they realize is only based on their basic performance without further extension.

[0041] Biological mucopolysaccharide composites combine the advantages of biological mucopolysaccharide materials and additives, including optical, electrical, and mechanical properties. For example, they improve elasticity, increase tensile strength, and raise the refractive index. In particular, the addition of additives leads to the formation of hydrogen bond networks, resulting in lower current in electronic devices at the same voltage.

[0042] In this embodiment of the invention, a highly biocompatible electronic device is provided. Its structure includes, from bottom to top, a semiconductor substrate layer, a bottom synaptic electrode, a bio-mediate film layer, and a top synaptic electrode. The bio-mediate film layer serves as a functional layer and is made from a bio-mediate mixture comprising at least a bio-polysaccharide material and a polyol material. As a bio-polysaccharide composite material, the bio-mediate film layer combines the advantages of both the bio-polysaccharide material and the additives, including optical, electrical, and mechanical properties. For example, it improves elasticity, increases tensile strength, and raises the refractive index. In particular, the addition of additives leads to a lower current consumption at the same voltage due to the formation of a hydrogen bond network. The resulting electronic device can exhibit different physicochemical properties under different external conditions, broadening its application areas and directions. Its low current performance also makes it suitable for fabricating low-power electronic devices and energy storage elements.

[0043] Please refer to Figure 1This embodiment provides a method for manufacturing a highly biocompatible electronic device, including:

[0044] Step 1: Provide a semiconductor substrate layer.

[0045] You can refer to the following: Figure 2 and Figure 3 The semiconductor substrate can be a substrate substrate (not shown) for two-terminal synaptic devices or a substrate substrate that can be used for three-terminal synaptic devices.

[0046] Understandably, when the semiconductor substrate is a substrate for a two-terminal synaptic device, the substrate can be silicon or glass. When the semiconductor substrate includes a substrate for a three-terminal synaptic device, the semiconductor substrate can be a substrate and a multilayer semiconductor structure formed thereon, for example, a silicon substrate and a buffer layer or other base layer capable of forming a three-terminal semiconductor device formed thereon.

[0047] In this embodiment, the semiconductor substrate is cleaned and dried.

[0048] Step 2: A synaptic bottom electrode is formed on the semiconductor substrate layer, which can be used to simulate the biological postsynaptic membrane of a two-terminal or three-terminal neural synaptic device.

[0049] In this embodiment, references can be used. Figure 2 The resulting device is a two-end device, a neural device with a "sandwich" structure of metal-insulator-metal, therefore the material of the synaptic bottom electrode is metal layer 201.

[0050] In this embodiment, a metal of a predetermined thickness is formed on the semiconductor substrate layer by deposition or sputtering process to serve as the lower electrode of the semiconductor device in response to neural-like signals transmitted from the functional layer.

[0051] The thickness of the synaptic bottom electrode can be 0.1 nanometers to 100 nanometers.

[0052] In some embodiments, references may be used. Figure 3 If the structure formed is a three-terminal neural device, the synaptic bottom electrode can be a metal gate 301 formed on a semiconductor substrate.

[0053] The ability to simulate the biological postsynaptic membrane can be understood as the ability of the current or potential measured on the synaptic bottom electrode to simulate the postsynaptic current or potential.

[0054] Step 3: Prepare a biological mediator mixture and prepare the biological mediator mixture into a biological mediator thin film layer. Form the biological mediator thin film layer above the synaptic bottom electrode for use as a functional layer of a two-terminal or three-terminal synaptic device.

[0055] The biological media mixture includes at least biological mucopolysaccharide materials and polyol materials.

[0056] In synaptic-like devices, the functional layer, which can simulate the synaptic gap, is a key material determining the device's performance. For example, when the synaptic-like device has a "sandwich" structure of metal-insulator-metal, the functional layer is the insulating layer 202 between the metals. In a three-terminal synaptic-like device, the functional layer can correspond to the dielectric layer 302 in a three-terminal transistor.

[0057] In this embodiment, the preparation of the biological media mixture and the fabrication of the biological media mixture into a biological media thin film layer include:

[0058] Step 101: Weigh a predetermined mass of polyol material and dissolve it in water to prepare a first solution with a mass concentration of 0.5%-5%. The polyol material is hyaluronic acid, dermatan sulfate, heparin sulfate, keratin sulfate, chondroitin sulfate, glucosamine, or epidermal pigment.

[0059] For example, a certain mass of hyaluronic acid is weighed and dissolved in 10 ml of water, and stirred at 60°C for 1 hour to obtain pure hyaluronic acid solutions of different concentrations, such that the mass concentration of the pure hyaluronic acid solutions is 0.5%-5%. In other embodiments, a certain mass of dermatin sulfate, heparin sulfate, keratin sulfate, chondroitin sulfate, glucosamine, or epidermalin can also be weighed to obtain the corresponding polyol solutions.

[0060] Step 102: Weigh a predetermined amount of biological mucopolysaccharide material and dissolve it in the first solution to prepare a biological medium mixture with a mass ratio of biological mucopolysaccharide material to polyol material ranging from 0.1% to 100%. The biological mucopolysaccharide material may be erythritol, sodium ascorbate, ammonium chloride, or pentanediol. The polyol material may be hyaluronic acid, dermatan sulfate, heparin sulfate, keratin sulfate, chondroitin sulfate, glucosamine, or epidermalin.

[0061] For example, a certain mass of erythritol is weighed and dissolved in a well-stirred hyaluronic acid solution, and stirred at 60°C for 30 minutes to obtain mixed solutions of hyaluronic acid and erythritol with different mass ratios. The mass ratio of erythritol to hyaluronic acid can range from 0.1% to 100%.

[0062] In other embodiments, a certain mass of sodium ascorbate, ammonium chloride, or pentanediol may be weighed and dissolved in the above-mentioned pure hyaluronic acid solution or in other polyol materials (dermatin sulfate, heparin sulfate, keratin sulfate, chondroitin sulfate, glucosamine, or epidermalin) to obtain the corresponding biological media mixture.

[0063] Step 103: Spread the biological medium mixture evenly on the surface of the synaptic bottom electrode, and then perform a drying process to form a biological medium thin film layer.

[0064] The method for spreading the biological media mixture on the surface of the synaptic bottom electrode can be by drip coating or by spin coating at different speeds using a spin coater to make the biological media mixture spread evenly on the surface of the bottom electrode.

[0065] In this embodiment, the thickness of the biological medium film layer is 0.1 μm-10 μm.

[0066] Step 4: A synaptic top electrode is formed on the bio-media thin film layer, which can be used to simulate the presynaptic membrane of a two-terminal or three-terminal synaptic device.

[0067] In this embodiment, you can refer to Figure 2 The resulting structure is a metal-insulator-metal "sandwich" structure, which is a neuromorphic device. The synaptic top electrode can be a metal layer 203. Correspondingly, a metal of a predetermined thickness can be formed on the functional layer by deposition or sputtering processes to serve as the top electrode of the semiconductor device, so as to respond to external electrical stimulation and transmit electrical signals to the functional layer.

[0068] In some embodiments, reference may be made to Figure 3 When the semiconductor substrate is a three-terminal neural synapse device, the synaptic top electrode corresponds to the source and drain structure 303 in the three-terminal transistor device.

[0069] In this embodiment, a metal of a predetermined thickness is formed on a biological medium thin film layer by deposition or sputtering process to serve as the top electrode of the synapse in a semiconductor device, in response to neural-like signals transmitted from the functional layer.

[0070] In this embodiment, the thickness of the synaptic top electrode can be 0.1 nanometers to 100 nanometers.

[0071] In this embodiment, the synapse-like device obtained through the above embodiments utilizes a biological medium film layer as a functional layer. This biological medium film layer is composed of biological mucopolysaccharides and added polyols. The biological mucopolysaccharide material itself has an alternating composition of uronic acid and aminohexose, and contains a large amount of highly electronegative oxygen and nitrogen elements, readily forming hydrogen bonds with other molecules containing strongly polar hydrogen nuclei. The biological mucopolysaccharide and added polyols are cross-linked through hydrogen bond adsorption. Therefore, with different proportions of added substances, the hydrolytic properties of the biological mucopolysaccharide change due to the formation of the hydrogen bond network, and the concentration and velocity of freely moving protons also change, thus affecting the current magnitude of the electronic device, the strength of the molding material, and the elasticity, resulting in low-power hybrid material thin-film devices with different performance characteristics. Therefore, the prepared electronic device has low power consumption, responds with small current under low voltage and small pulse width, and consumes low energy, even lower than the power consumption of biological neural synapses, thus requiring less energy. Furthermore, compared to other biomaterials, the biomolecular polysaccharide material used in the biomediation film layer of this application is closer to the actual neural synapses of living organisms, exhibiting high biocompatibility. Because the biomolecular polysaccharide composite material has relatively high compatibility with the human body, is non-toxic, is unlikely to cause rejection reactions, and can be metabolized by the human body, it can be used as a medical electronic device.

[0072] It is understandable that the physical properties of bio-media thin films prepared by varying the mass ratio of high-hydroxy compounds, pH, and temperature can be changed according to specific needs. Therefore, the physical properties of the aforementioned bio-media thin films are adjustable, making them easier to apply and expanding their application areas and scenarios.

[0073] like Figure 4 This illustrates the response of a device formed by a pure hyaluronic acid film layer as the functional layer, without the addition of erythritol, to pulse voltage. Five pulses are shown: 1mV pulse 405, 2mV pulse 404, 3mV pulse 403, 4mV pulse 402, and 5mV pulse 401. The current values ​​are concentrated between -400pA and -600pA. Please refer to [the relevant documentation / reference]. Figure 5 The following describes the response of the device to pulse voltage in the case of erythritol addition, where the bio-mediate film layer composed of biological polysaccharides and added polyols serves as the functional layer of the device. Voltages of 1mV, 2mV, 3mV, 4mV, and 5mV were applied respectively. As shown in the schematic diagrams of the 1mV pulse (505), 2mV pulse (504), 3mV pulse (503), 4mV pulse (502), and 5mV pulse (501), the current values ​​are concentrated between -250pA and -350pA. It can be seen that the device obtained according to the method in this embodiment has small current variation and low current, making it a lower-power electronic device.

[0074] Further reference Figure 6 and Figure 7 , Figure 6 and Figure 7 These examples illustrate the changes in the optical properties of devices with different proportions of biological mucopolysaccharides and added polyols. In this example, erythritol is added to hyaluronic acid as a functional layer.

[0075] Figure 6 The following charts show the changes in the refractive index of the device: Waveform 601 shows the refractive index without erythritol; waveform 602 shows the refractive index with a hyaluronic acid to erythritol ratio of 1:1; waveform 603 shows the refractive index with a hyaluronic acid to erythritol ratio of 2:1; and waveform 604 shows the refractive index with a hyaluronic acid to erythritol ratio of 4:1. It is evident that the addition of erythritol affects the refractive index of the device, and the higher the concentration of erythritol, the greater the refractive index.

[0076] Figure 7 The following charts show the changes in the extinction coefficient of the device: 701 represents the extinction coefficient waveform without added erythritol; 702 represents the extinction coefficient waveform with a hyaluronic acid to erythritol ratio of 1:1; 703 represents the extinction coefficient waveform with a hyaluronic acid to erythritol ratio of 2:1; and 704 represents the extinction coefficient waveform with a hyaluronic acid to erythritol ratio of 4:1. It is evident that the addition of erythritol affects the extinction coefficient of the device, and the higher the concentration of the added substance (erythritol), the stronger the light absorption performance.

[0077] As can be seen from the above comparison, the bio-mediate thin film layer formed by adding biological mucopolysaccharides to polyols, as proposed in this invention, serves as the functional layer of the device, exhibiting low power consumption, high biomimicry, high biocompatibility, and adjustable physical properties. The resulting highly biocompatible electronic device combines the advantages of both biological mucopolysaccharide materials and additives, including optical, electrical, and mechanical properties. For example, it improves elasticity, increases tensile strength, and raises the refractive index. In particular, the addition of additives leads to a lower current consumption at the same voltage due to the construction of hydrogen bond networks. Furthermore, compared to pure biological mucopolysaccharide materials, the electronic device prepared by this method can exhibit different physicochemical properties under different external conditions, resulting in a wider range of applications. Its low current performance also makes it more suitable for fabricating low-power electronic devices and energy storage elements.

[0078] Based on the above embodiments, this embodiment also provides a highly biocompatible electronic device, including a semiconductor substrate, a synaptic bottom electrode located on the semiconductor substrate, a bio-medial thin film layer located above the synaptic bottom electrode, and a synaptic top electrode located on the bio-medial thin film layer. The semiconductor substrate is a substrate for a two-terminal synaptic device or a substrate for a three-terminal synaptic device. When the semiconductor substrate is a substrate for a two-terminal synaptic device, the substrate can be silicon or glass. When the semiconductor substrate includes a substrate for a three-terminal synaptic device, the semiconductor substrate can be a substrate and a multilayer semiconductor structure formed thereon, for example, a silicon substrate and a buffer layer or other base layer capable of forming a three-terminal semiconductor device.

[0079] The synaptic bottom electrode can be used to simulate the biological postsynaptic membrane of two-terminal or three-terminal synaptic devices. The thickness of the synaptic bottom electrode can be 0.1 nm to 100 nm. The biomediate film layer is prepared by a biomediate mixture, which includes at least biological mucopolysaccharide and polyol materials. The method of spreading the biomediate mixture on the surface of the synaptic bottom electrode can be by drop coating or spin coating at different speeds using a spin coater to uniformly spread the biomediate mixture on the bottom electrode surface. In this embodiment, the thickness of the biomediate film layer is 0.1 μm to 10 μm.

[0080] The synaptic top electrode can be used to simulate the presynaptic membrane of a two-terminal or three-terminal synaptic device. A metal of a predetermined thickness is formed on a thin film of biological medium using deposition or sputtering processes to serve as the synaptic top electrode of the semiconductor device, responding to neural signals transmitted from the functional layer. In this embodiment, the thickness of the synaptic top electrode can be 0.1 nanometers to 100 nanometers.

[0081] The highly biocompatible electronic device provided in this embodiment features low power consumption, high biomimicry, high biocompatibility, and adjustable physical properties. It combines the advantages of both biological mucopolysaccharide materials and additives, including optical, electrical, and mechanical properties. For example, it improves elasticity and tensile strength, increases refractive index, and, particularly, the addition of additives leads to a lower current consumption at the same voltage due to the formation of hydrogen bond networks. Furthermore, compared to pure biological mucopolysaccharide materials, the electronic device prepared by this method can exhibit different physicochemical properties under different external conditions, broadening its application areas and directions. Its low current performance also makes it more suitable for fabricating low-power electronic devices and energy storage components.

[0082] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. A method for manufacturing a highly biocompatible electronic device, characterized in that, Including the following steps: A semiconductor substrate layer is provided, the semiconductor substrate layer comprising a base substrate for a two-terminal synaptic device or a base substrate for a three-terminal synaptic device; A synaptic bottom electrode is formed on the semiconductor substrate layer, which can be used to simulate the biological postsynaptic membrane of a two-terminal or three-terminal synaptic device. A biological mediator mixture is prepared and the biological mediator mixture is used to prepare a biological mediator thin film layer. The biological mediator thin film layer is formed above the synaptic bottom electrode and is used as a functional layer for a two-terminal or three-terminal synaptic device. The biological mediator mixture includes at least biological mucopolysaccharide material and polyol material. A synaptic top electrode is formed on the bio-media thin film layer, which can be used to simulate the presynaptic membrane of a two-terminal or three-terminal neural synaptic device.

2. The manufacturing method as described in claim 1, characterized in that, The step of preparing the biological media mixture and fabricating the biological media mixture into a biological media thin film layer includes: Weigh a predetermined amount of polyol material and dissolve it in water to prepare a first solution with a mass concentration of 0.5%-5%. Weigh a predetermined amount of biological mucopolysaccharide material and dissolve it in the first solution to prepare a biological medium mixture in which the mass ratio of biological mucopolysaccharide material to polyol material ranges from 0.1% to 100%. The biological media mixture is spread evenly on the surface of the synaptic bottom electrode and then dried to form a biological media film layer.

3. The manufacturing method as described in claim 1 or 2, characterized in that, The biopolymer material is hyaluronic acid.

4. The manufacturing method as described in claim 1 or 2, characterized in that, The polyol material is erythritol.

5. The manufacturing method as described in claim 2, characterized in that, The method of spreading the biological media mixture on the surface of the synaptic bottom electrode includes: spreading the biological media mixture evenly on the surface of the bottom electrode by drop coating or spin coating at different speeds using a spin coater.

6. The manufacturing method as described in claim 1 or 2, characterized in that, The thickness of the bio-media film layer is 0.1 μm-10 μm.

7. The manufacturing method as described in claim 1, characterized in that, After providing the semiconductor substrate layer, and before forming the synaptic bottom electrode on the semiconductor substrate layer, the method further includes the following steps: The semiconductor substrate layer is cleaned and dried.

8. The manufacturing method as described in claim 1, characterized in that, The step of forming a synaptic bottom electrode on the semiconductor substrate includes: A metal of a predetermined thickness is formed on the semiconductor substrate by deposition or sputtering processes; Correspondingly, The step of forming a synaptic top electrode on the biological medium thin film layer includes: A metal of a predetermined thickness is formed on the bio-media thin film layer by deposition or sputtering processes.

9. A highly biocompatible electronic device, characterized in that, include: A semiconductor substrate layer, wherein the semiconductor substrate layer is a base substrate for a two-terminal synaptic device or a base substrate for a three-terminal synaptic device; The synaptic bottom electrode is located on the semiconductor substrate layer and can be used to simulate the biological postsynaptic membrane of a two-terminal or three-terminal neural synaptic device. A bio-media film layer located above the synaptic bottom electrode, wherein the bio-media film layer is prepared from a bio-media mixture, and the bio-media mixture includes at least biological mucopolysaccharide material and polyol material; The synaptic top electrode is located on the bio-media thin film layer and can be used to simulate the presynaptic membrane of a two-terminal or three-terminal neural synaptic device.

10. The highly biocompatible electronic device as described in claim 9, characterized in that, The thickness of the bio-media film layer is 0.1 μm - 10 μm.

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