Micromechanical gyroscope and electronic product

Abstract

The application provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a first sensing component, a second sensing component, a driving component, a first coupling beam and a second coupling beam. The driving component is located on two sides of the first sensing component and the second sensing component which are oppositely arranged along a first direction. The first sensing component is connected with the driving component through the first coupling beam. The second sensing component is connected with the driving component through the second coupling beam. The stiffness of the first coupling beam along a second direction is greater than the stiffness of the first coupling beam along a third direction, and the third direction is perpendicular to the first plane. The stiffness of the second coupling beam along the second direction is greater than the stiffness of the second coupling beam along the first direction. The micromechanical gyroscope and the electronic product have high working precision.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gyroscopes, and in particular to a micromechanical gyroscope and an electronic product. BACKGROUND

[0002] A micromechanical gyroscope in the prior art is a typical angular velocity sensor, which generally comprises a driving member and a moving member. The working principle is that the driving member can drive the moving member to vibrate in a determined plane along a determined direction. When an external environment generates an angular velocity along a direction perpendicular to the above-mentioned plane, due to the Coriolis effect, the moving member will be subjected to a Coriolis force (Coriolis force) perpendicular to the above-mentioned determined direction and generate a displacement. The displacement value can be detected by a detection member, so as to obtain the angular velocity of the external environment, and realize the measurement of the angular velocity. In the existing three-axis micromechanical gyroscope, the moving member for detecting the Z-axis angular velocity and the moving member for detecting the X / Y-axis angular velocity are not completely decoupled, and the orthogonal error is large, so that the working precision of the micromechanical gyroscope is low. SUMMARY

[0003] The present application provides a micromechanical gyroscope and an electronic product, which has high working precision.

[0004] The first aspect of the present application provides a micromechanical gyroscope, which comprises a first sensing assembly, a second sensing assembly, a driving member, a first coupling beam and a second coupling beam. The first sensing assembly comprises a first moving member, which can swing around a first direction and / or a second direction. The first direction is orthogonal to the second direction. The second sensing assembly comprises a second moving member, which can move in a first plane in which the first direction and the second direction are located. The driving member is located on two sides of the first sensing assembly and the second sensing assembly which are oppositely arranged along the first direction. One of the driving members can move along the second direction, and the other driving member can move in the opposite direction of the second direction. The two ends of the first sensing assembly which are oppositely arranged along the first direction are connected with the corresponding driving members through the corresponding first coupling beams. The two ends of the second sensing assembly which are oppositely arranged along the first direction are connected with the corresponding driving members through the corresponding second coupling beams. The stiffness of the first coupling beam along the second direction is much greater than the stiffness of the first coupling beam along a third direction, and the third direction is perpendicular to the first plane. The stiffness of the second coupling beam along the second direction is much greater than the stiffness of the second coupling beam along the first direction.

[0005] The micromechanical gyroscope of the application comprises three operating modes, specifically a driving mode, a first detection mode, a second detection mode and a third detection mode. In the driving mode, when one of the two driving members moves in the second direction and the other moves in the direction of the second direction, the two driving members moving in opposite directions drive the first sensing assembly to deflect in the first plane where the first direction and the second direction are located through the corresponding first coupling beam, so that the deflection movement of the first sensing assembly can be equivalent to decompose into a part moving in the first direction and another part moving in the opposite direction of the first direction. The first sensing assembly can be divided into two parts according to the middle line of the first sensing assembly in the first direction. When the external environment has an angular velocity in the second direction, the first moving member of the first sensing assembly will be subjected to a Coriolis force (Coriolis force) in the direction perpendicular to the first plane where the first direction and the second direction are located. In detail, a part of the first moving member is subjected to a Coriolis force in the third direction, and another part of the first moving member is subjected to a Coriolis force in the opposite direction of the third direction. The two Coriolis forces in opposite directions can make the first moving member swing around the first direction. At this time, the micromechanical gyroscope is in the first detection state, and the angle of the first moving member swinging around the first direction or the displacement of the first moving member in the third direction can be detected, so that the second angular velocity of the external environment in the second direction can be obtained. Similarly, in the driving mode, when one of the two driving members moves in the second direction and the other moves in the direction of the second direction, the two driving members moving in opposite directions drive the first sensing assembly to deflect in the first plane where the first direction and the second direction are located through the corresponding first coupling beam, so that the deflection movement of the first sensing assembly can be equivalent to decompose into a part moving in the second direction and another part moving in the opposite direction of the second direction. The first sensing assembly can be divided into two parts according to the middle line of the first sensing assembly in the second direction. When the external environment has an angular velocity in the first direction, the first moving member of the first sensing assembly will be subjected to a Coriolis force (Coriolis force) in the direction perpendicular to the first plane where the first direction and the second direction are located. In detail, a part of the first moving member is subjected to a Coriolis force in the third direction, and another part of the first moving member is subjected to a Coriolis force in the opposite direction of the third direction. The two Coriolis forces in opposite directions can make the first moving member swing around the second direction. At this time, the micromechanical gyroscope is in the second detection state, and the angle of the first moving member swinging around the second direction or the displacement of the first moving member in the third direction can be detected, so that the first angular velocity of the external environment in the first direction can be obtained. In the driving mode, when one of the two driving members moves in the second direction and the other moves in the direction of the second direction, the two driving members moving in opposite directions drive the two parts of the second sensing assembly to move in opposite directions through the corresponding second coupling beam. The second sensing assembly can be divided into two parts according to the middle line of the second sensing assembly in the second direction, and at least one of the two parts can include a second moving member.When the external environment has an angular velocity along the third direction, one of the second moving members in the second sensing assembly will be subjected to a Coriolis force (Coriolis force) along the first direction, and / or one of the second moving members in the second sensing assembly will be subjected to a Coriolis force (Coriolis force) along the first direction in the opposite direction. At this time, the micromechanical gyroscope is in a third detection state, and the movement distance of the second moving member along the first direction and / or along the first direction in the opposite direction can be detected, so that the third angular velocity of the external environment along the third direction can be obtained. Since the first detection mode, the second detection mode and the third detection mode can exist at the same time and do not interfere with each other, the micromechanical gyroscope can be used to detect the first angular velocity, the second angular velocity and the third angular velocity of the external environment at the same time, that is, the micromechanical gyroscope can be used to detect the angular velocity in a complex rotating environment. Since the first sensing assembly is connected with the driving member through the first coupling beam, and the stiffness of the first coupling beam along the second direction is much greater than the stiffness of the first coupling beam along the third direction, when the first moving member swings around the first direction and / or the second direction, the interference of the movement of the first moving member to the driving member is weak. Since the second sensing assembly is connected with the driving member through the second coupling beam, and the stiffness of the second coupling beam along the second direction is much greater than the stiffness of the second coupling beam along the first direction, when the second moving member moves along the first direction and / or in the opposite direction of the first direction, the interference of the movement of the second moving member to the driving member is weak. Compared with the micromechanical gyroscope of the prior art, the first moving member and the second moving member of the micromechanical gyroscope of the embodiment of the application are motion decoupled, the interference between them is low, the influence of the orthogonal error is reduced, and the working precision of the micromechanical gyroscope is higher. The first moving member and the second moving member can be used for differential detection, can resist the interference of external electrical and mechanical noise, and can improve the signal-to-noise ratio of the device.

[0006] In a possible design, the first sensing assembly further includes a first decoupling assembly, a first torsion assembly, a first fixed anchor point and a second fixed anchor point, the first decoupling assembly has a frame-shaped structure, the outer edge of the first decoupling assembly is connected with the driving member through the first coupling beam, the first moving member, the first torsion assembly, the first fixed anchor point and the second fixed anchor point are located in the space enclosed by the first decoupling assembly, the first moving member and the first fixed anchor point are connected with the first decoupling assembly, the first moving member is provided with a first hollow part, the first torsion assembly and the second fixed anchor point are arranged in the first hollow part, and the first moving member is connected with the second fixed anchor point through the first torsion assembly.

[0007] In a possible design, the first decoupling component includes a first decoupling piece, a first decoupling beam, and a first decoupling anchor beam, the first decoupling piece has a rectangular frame structure, two opposite outer edges of the first decoupling piece are connected to corresponding driving pieces through corresponding first coupling beams, four inner edges of the first decoupling piece are connected to the first moving piece through corresponding first decoupling beams, and the four inner edges of the first decoupling piece are connected to corresponding first fixed anchor points through corresponding first decoupling anchor beams. The stiffness of the first decoupling beam along the second direction is much greater than the stiffness of the first decoupling beam along the third direction.

[0008] In a possible design, the first torsion component includes a torsion frame, a first torsion beam, and a second torsion beam, two opposite outer edges of the torsion frame are connected to corresponding inner edges of the first moving piece through corresponding first torsion beams, two opposite inner edges of the torsion frame are connected to the second fixed anchor points through corresponding second torsion beams, and the first torsion beam is perpendicular to the second torsion beam.

[0009] In a possible design, the second sensing component further includes a second decoupling component and a third fixed anchor point, the second moving piece is connected to the driving piece through a second coupling beam, and the second moving piece is connected to the third fixed anchor point through the second decoupling component.

[0010] In a possible design, the second decoupling component includes a second decoupling piece, a second decoupling beam, and a second decoupling anchor beam, the second decoupling piece is connected to the second moving piece through the second decoupling beam, the second decoupling piece is connected to the third fixed anchor point through the second decoupling anchor beam, the second decoupling beam is arranged along the first direction, the second decoupling anchor beam is arranged along the second direction, the stiffness of the second decoupling beam along the second direction is much less than the stiffness of the second decoupling beam along the first direction, and the stiffness of the second decoupling anchor beam along the second direction is much greater than the stiffness of the second decoupling anchor beam along the first direction.

[0011] In a possible design, the second sensing component includes two opposite second decoupling components and two opposite second moving pieces, each second decoupling component is connected to a corresponding second moving piece, and the second sensing component further includes a third coupling beam, two ends of the third coupling beam are connected to corresponding driving pieces, and the third coupling beam is further connected to the two opposite second moving pieces, respectively.

[0012] In a possible design, the third coupling beam includes a first segment and a pair of second segments, two ends of the first segment are connected to corresponding driving pieces, one side of the first segment facing the second moving piece is further connected to the second segment, each second segment is connected to a corresponding second moving piece, the second segment is inclined relative to the first segment, one end of the second segment away from the first segment is closer to the corresponding driving piece than the other end of the second segment close to the first segment, and the two second segments are symmetrically arranged.

[0013] In one possible design, the drive component includes a drive beam, a drive anchor beam, and a fourth fixed anchor point. The drive beam is connected to the fourth fixed anchor point via the drive anchor beam. The drive beam includes a third segment and a fourth segment connected to each other. A first sensing component is connected to the third segment via a first coupling beam, and a second sensing component is connected to the fourth segment via a second coupling beam.

[0014] A second aspect of this application provides an electronic product comprising a body and a micromechanical gyroscope as described above, the micromechanical gyroscope being mounted on the body. The electronic product of this application has the effects described above.

[0015] It should be understood that the above general description and the following detailed description are merely exemplary and do not limit this application.

[0016] DD230044I Attached Figure Description

[0017] Figure 1a A schematic diagram of the micromechanical gyroscope provided in this application in a first specific embodiment;

[0018] Figure 1b for Figure 1a A schematic diagram of the structure in which the first moving component oscillates about the second direction;

[0019] Figure 1c for Figure 1a A schematic diagram of the structure in which the first moving component oscillates about a first direction;

[0020] Figure 2 for Figure 1a A magnified view of part A in the middle;

[0021] Figure 3 for Figure 1a A magnified view of part B in the middle section;

[0022] Figure 4 for Figure 1a A schematic diagram of the structure of the first sensing component;

[0023] Figure 5 for Figure 4 A magnified view of part C in the middle;

[0024] Figure 6 for Figure 4 A magnified view of part D in the middle;

[0025] Figure 7 for Figure 1a A schematic diagram of the structure of the second sensing component;

[0026] Figure 8 for Figure 7 Schematic diagram of the structure of the second moving part;

[0027] Figure 9 for Figure 7 A schematic diagram of the structure of the second decoupling component;

[0028] Figure 10 for Figure 7 Schematic diagram of the third coupling beam in the middle;

[0029] Figure 11 for Figure 1a Schematic diagram of the drive component;

[0030] Figure 12 for Figure 11 Schematic diagram of the structure of the central drive anchor beam;

[0031] Figure 13a A schematic diagram of the micromechanical gyroscope provided in this application in a second specific embodiment;

[0032] Figure 13b for Figure 13a A schematic diagram of the structure in which the first moving component oscillates about the second direction;

[0033] Figure 13c for Figure 13a A schematic diagram of the structure in which the first moving component oscillates about a first direction;

[0034] Figure 14 for Figure 13a A magnified view of part E in the middle;

[0035] Figure 15 for Figure 13a A magnified view of part F in the middle;

[0036] Figure 16 for Figure 13a A magnified view of part G in the middle;

[0037] Figure 17 for Figure 13a Schematic diagram of the structure of the second moving part;

[0038] Figure 18 for Figure 13a A schematic diagram of the third coupling beam in the middle.

[0039] Figure label:

[0040] 10-Micromechanical gyroscope;

[0041] 1-First sensing component;

[0042] 11-First moving part;

[0043] 111 - First hollowed-out section;

[0044] DD230044I

[0045] 12 - first decoupling assembly;

[0046] 121 - first decoupling member;

[0047] 121a - frame body;

[0048] 121b - second T-shaped member;

[0049] 121c - second hollowed portion;

[0050] 122 - first decoupling beam;

[0051] 123 - first decoupling anchoring beam;

[0052] 13 - first torsion assembly;

[0053] 131 - torsion frame;

[0054] 132 - first torsion beam;

[0055] 133 - second torsion beam;

[0056] 14 - first fixed anchoring point;

[0057] 15 - second fixed anchoring point;

[0058] 2 - second sensing assembly;

[0059] 21 - second moving member;

[0060] 211 - third hollowed portion;

[0061] 212 - fourth hollowed portion;

[0062] 22 - second decoupling assembly;

[0063] 221 - second decoupling member;

[0064] 222 - second decoupling beam;

[0065] 223 - second decoupling anchoring beam;

[0066] 23 - third fixed anchoring point;

[0067] 24 - third coupling beam;

[0068] 241 - first segment;

[0069] 242 - second segment;

[0070] 3 - driving member;

[0071] 31 - driving beam;

[0072] 311 - third section;

[0073] 312 - fourth section;

[0074] DD230044I

[0075] 32 - drive anchor beam;

[0076] 33 - fourth fixed anchor point;

[0077] 4 - first coupling beam;

[0078] 41 - first rod;

[0079] 42 - first T-piece

[0080] 43 - second rod;

[0081] 5 - second coupling beam.

[0082] The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate embodiments consistent with the application and serve to explain the principles of the application. DETAILED DESCRIPTION

[0083] For a better understanding of the technical solutions of the present application, the embodiments of the present application are described in detail below with reference to the drawings.

[0084] It should be clear that the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0085] The terms used in the embodiments of the present application are only for the purpose of describing the specific embodiments, and are not intended to limit the present application. The singular forms "a", "an" and "the" used in the embodiments of the present application and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0086] It should be understood that the term "and / or" used herein only describes the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the three cases of A alone, A and B together, and B alone. In addition, the character " / " in this paper generally represents that the front and rear associated objects are a "or" relationship.

[0087] It should be noted that the "upper", "lower", "left", "right" and other directional words described in the embodiments of the present application are described in the angle shown in the drawings, and should not be understood as a limitation on the embodiments of the present application. In addition, in the context, it should also be understood that when referring to an element connected to another element "on" or "under", it can not only be directly connected to another element "on" or "under", but also indirectly connected to another element "on" or "under" through an intermediate element.

[0088] The first aspect of the embodiments of the present application provides a micromechanical gyroscope which can be used as a horizontal, vertical, pitch, heading and angular velocity sensor. The micromechanical gyroscope of the embodiments of the present application mainly includes two embodiments, which will be introduced first, and then the second embodiment will be introduced.

[0089] Embodiment I:

[0090] Please refer to Figure 1a , the micromechanical gyroscope 10 includes a first sensing assembly 1, a second sensing assembly 2, a driving member 3, a first coupling beam 4 and a second coupling beam 5. Please refer to Figures 1b-1c , the first sensing assembly 1 includes a first moving member 11, which can swing around the first direction X and / or the second direction Y. Please refer to Figure 1a , the second sensing assembly 2 includes a second moving member 21, which can move in the first plane (X-Y) formed by the first direction X and the second direction Y. The driving member 3 is located on the two sides of the first sensing assembly 1 and the second sensing assembly 2 along the first direction X, one of which can move along the second direction Y, and the other of which can move in the opposite direction of the second direction Y. The two ends of the first sensing assembly 1 arranged oppositely along the first direction X are connected to the corresponding driving member 3 through the corresponding first coupling beam 4, and the two ends of the second sensing assembly 2 arranged oppositely along the first direction X are connected to the corresponding driving member 3 through the corresponding second coupling beam 5. The stiffness of the first coupling beam 4 along the second direction Y is much greater than the stiffness of the first coupling beam 4 along the third direction Z, and the third direction Z is perpendicular to the first plane (X-Y). The stiffness of the second coupling beam 5 along the second direction Y is much greater than the stiffness of the second coupling beam 5 along the first direction X.

[0091] In this embodiment, please refer to Figures 1a-1cAs shown, the micromechanical gyroscope 10 includes three working modes, specifically a driving mode, a first detection mode, a second detection mode and a third detection mode. In the driving mode, when one of the two driving members 3 moves along the second direction Y and the other moves along the direction opposite to the second direction Y, the two driving members 3 moving in opposite directions drive the first sensing assembly 1 to deflect in the first plane (X-Y) where the first direction X and the second direction Y are located through the corresponding first coupling beam 4, so that the deflection movement of the first sensing assembly 1 can be equivalently decomposed into a part moving along the first direction X and another part moving in the opposite direction of the first direction X. Wherein, the first sensing assembly 1 can be divided into two parts according to the middle line of the first sensing assembly 1 along the first direction X. When there is an angular velocity along the second direction Y in the external environment, the first moving member 11 of the first sensing assembly 1 will be subjected to a Coriolis force (Coriolis force) perpendicular to the first plane (X-Y) where the first direction X and the second direction Y are located. In detail, a part of the first moving member 11 is subjected to a Coriolis force along the third direction Z, and another part of the first moving member 11 is subjected to a Coriolis force along the third direction Z in the opposite direction. The two Coriolis forces in opposite directions can make the first moving member 11 swing around the first direction X. At this time, the micromechanical gyroscope 10 is in the first detection state, and the angle of the first moving member 11 swinging around the first direction X or the displacement of the first moving member 11 along the third direction Z can be detected, so that the angular velocity of the external environment along the second direction Y can be obtained.

[0092]

[0093] Similarly, please refer to Figures 1a-1c ​As shown, in the driving mode, when one of the two driving members 3 moves along the second direction Y and the other moves along the direction opposite to the second direction Y, the two driving members 3 moving in opposite directions drive the first sensing assembly 1 to deflect in the first plane (X-Y) in which the first direction X and the second direction Y lie through the corresponding first coupling beam 4, so that the deflection movement of the first sensing assembly 1 can be equivalently decomposed into a part moving along the second direction Y and another part moving along the direction opposite to the second direction Y. The first sensing assembly 1 can be divided into two parts along the middle line of the first sensing assembly 1 along the second direction Y. When the external environment has an angular velocity along the first direction X, the first moving member 11 of the first sensing assembly 1 will be subjected to a Coriolis force (Coriolis force) along the third direction Z perpendicular to the first plane (X-Y) in which the first direction X and the second direction Y lie. In detail, a part of the first moving member 11 is subjected to a Coriolis force along the third direction Z, and another part of the first moving member 11 is subjected to a Coriolis force along the third direction Z in the opposite direction, and the two Coriolis forces in opposite directions can make the first moving member 11 swing around the second direction Y. At this time, the micro-mechanical gyroscope 10 is in a second detection state, and the angle of the first moving member 11 swinging around the second direction Y or the displacement of the first moving member 11 along the third direction Z can be detected, so that the first angular velocity of the external environment along the first direction X can be obtained.

[0094] Please refer to Figure 1a As shown, in the driving mode, when one of the two driving members 3 moves along the second direction Y and the other moves along the direction opposite to the second direction Y, the two driving members 3 moving in opposite directions drive the first sensing assembly 1 to deflect in the first plane (X-Y) in which the first direction X and the second direction Y lie through the corresponding first coupling beam 4, so that the deflection movement of the first sensing assembly 1 can be equivalently decomposed into a part moving along the second direction Y and another part moving along the direction opposite to the second direction Y. The first sensing assembly 1 can be divided into two parts along the middle line of the first sensing assembly 1 along the second direction Y. When the external environment has an angular velocity along the first direction X, the first moving member 11 of the first sensing assembly 1 will be subjected to a Coriolis force (Coriolis force) along the third direction Z perpendicular to the first plane (X-Y) in which the first direction X and the second direction Y lie. In detail, a part of the first moving member 11 is subjected to a Coriolis force along the third direction Z, and another part of the first moving member 11 is subjected to a Coriolis force along the third direction Z in the opposite direction, and the two Coriolis forces in opposite directions can make the first moving member 11 swing around the second direction Y. At this time, the micro-mechanical gyroscope 10 is in a second detection state, and the angle of the first moving member 11 swinging around the second direction Y or the displacement of the first moving member 11 along the third direction Z can be detected, so that the first angular velocity of the external environment along the first direction X can be obtained.

[0095] Since the first detection mode, the second detection mode and the third detection mode can exist at the same time and do not interfere with each other, the micro-mechanical gyroscope 10 can be used to detect the first angular velocity, the second angular velocity and the third angular velocity of the external environment at the same time, that is, the micro-mechanical gyroscope 10 can be used to detect the angular velocity in a complex rotating environment.

[0096] Please refer to Figures 1a-1cAs shown, since the first sensing assembly 1 is connected with the driving member 3 through the first coupling beam 4, and the rigidity of the first coupling beam 4 along the second direction Y is much greater than the rigidity of the first coupling beam 4 along the third direction Z, when the first moving member 11 swings around the first direction X and / or the second direction Y, the motion of the first moving member 11 has a weak interference on the driving member 3.

[0097] The ratio of the rigidity of the first coupling beam 4 along the second direction Y to the rigidity of the first coupling beam 4 along the third direction Z is greater than 1000:1, and specifically can be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

[0098] Please refer to Figure 1a As shown, since the second sensing assembly 2 is connected with the driving member 3 through the second coupling beam 5, and the rigidity of the second coupling beam 5 along the second direction Y is much greater than the rigidity of the second coupling beam 5 along the first direction X, when the second moving member 21 moves along the first direction X and / or the first direction X reversely, the motion of the second moving member 21 has a weak interference on the driving member 3.

[0099] The ratio of the rigidity of the second coupling beam 5 along the second direction Y to the rigidity of the second coupling beam 5 along the first direction X is greater than 1000:1, and specifically can be 1100:1, 1200:1, 1300:1, 1400:1, 1500:1.

[0100] Compared with the micro-mechanical gyroscope in the prior art, the first moving member 11 and the second moving member 21 of the micro-mechanical gyroscope 10 in the embodiment of the application are motion decoupled, and the interference between them is low, the influence of the quadrature error is reduced, and the working precision of the micro-mechanical gyroscope 10 is higher. The first moving member 11 and the second moving member 21 can be used for differential detection, can resist the interference of external electrical and mechanical noise, and improve the signal-to-noise ratio of the device.

[0101] Please refer to Figure 2As shown, the first coupling beam 4 comprises a first rod 41, a first T-shaped piece 42 and a second rod 43. The two ends of the first rod 41 are connected with the driving member 3, and the middle part of the first rod 41 is connected with the first T-shaped piece 42. The two ends of the first T-shaped piece 42 are respectively connected with the second rod 43, and the second rod 43 is connected with the first sensing assembly 1. The first rod 41 is arranged along the second direction Y, the first T-shaped piece 42 is arranged along the first direction X, and the second rod 43 is arranged along the first direction X. The first rod 41 and the first T-shaped piece 42 can form an I-shaped structure, and the first T-shaped piece 42 and the second rod 43 can form a mountain-shaped structure. The arrangement makes the rigidity of the first coupling beam 4 along the second direction Y much greater than the rigidity of the first coupling beam 4 along the third direction Z. At least part of the first T-shaped piece 42 and the second rod 43 are located in the second hollow part 121c of the first sensing assembly 1. The arrangement makes the structure more compact, and facilitates miniaturization.

[0102] In addition, the second coupling beam 5 is arranged along the second direction Y, and the same side of the second sensing assembly 2 is connected with two second coupling beams 5. The two second coupling beams 5 located on the same side of the second sensing assembly 2 are connected to the same driving member 3.

[0103] Specifically, please refer to Figure 4 As shown, the first sensing assembly 1 can further comprise a first decoupling assembly 12, a first torsion assembly 13, a first fixed anchor point 14 and a second fixed anchor point 15. The structure of the first decoupling assembly 12 is a frame-shaped structure, and the outer edge of the first decoupling assembly 12 is connected with the driving member 3 through the first coupling beam 4. The first moving member 11, the first torsion assembly 13, the first fixed anchor point 14 and the second fixed anchor point 15 are located in the space enclosed by the first decoupling assembly 12. The first moving member 11 and the first fixed anchor point 14 are connected with the first decoupling assembly 12. The first moving member 11 is provided with a first hollow part 111, and the first torsion assembly 13 and the second fixed anchor point 15 are arranged in the first hollow part 111. The first moving member 11 is connected with the second fixed anchor point 15 through the first torsion assembly 13.

[0104] In this embodiment, please refer to Figure 4As shown, the structure of the first decoupling assembly 12 is a frame structure, the first fixed anchor point 14 is located in the space enclosed by the first decoupling assembly 12, and the first decoupling assembly 12 is connected with the first fixed anchor point 14. The first moving part 11 is located in the space enclosed by the first decoupling assembly 12, and the first moving part 11 is connected with the first decoupling assembly 12. The first moving part 11 is movement decoupled with the first decoupling assembly 12, so that the first moving part 11 has the freedom of swinging around the first direction X and / or the second direction Y relative to the first decoupling assembly 12. Since the first moving part 11 is connected with the first coupling beam 4 through the first decoupling assembly 12, and the first coupling beam 4 is connected with the driving part 3, the movement decoupling between the first moving part 11 and the driving part 3 can be realized. The first moving part 11 is provided with a first hollow part 111, and the first torsion assembly 13 and the second fixed anchor point 15 are located in the first hollow part 111. The first moving part 11 is connected with the second fixed anchor point 15 through the first torsion assembly 13, and the first moving part 11 is movement decoupled with the first torsion assembly 13, so that the first moving part 11 has the freedom of swinging around the first direction X and / or the second direction Y relative to the first torsion assembly 13.

[0105] The first fixed anchor point 14 and the second fixed anchor point 15 are fixedly connected to a component in a use environment, which can be a shell of an electronic device.

[0106] In addition, the first hollow part 111, the first torsion assembly 13 and the second fixed anchor point 15 can be located in the central region of the first moving part 11.

[0107] More specifically, please refer to Figures 4-5 As shown, the first decoupling assembly 12 can include a first decoupling part 121, a first decoupling beam 122 and a first decoupling anchor beam 123. The structure of the first decoupling part 121 is a rectangular frame structure. Both of the two oppositely arranged outer edges of the first decoupling part 121 are connected with the corresponding driving part 3 through the corresponding first coupling beam 4. The four inner edges of the first decoupling part 121 are connected with the first moving part 11 through the corresponding first decoupling beam 122. The four inner edges of the first decoupling part 121 are connected with the corresponding first fixed anchor point 14 through the corresponding first decoupling anchor beam 123. The stiffness of the first decoupling beam 122 along the second direction Y is much greater than the stiffness of the first decoupling beam 122 along the third direction Z.

[0108] In this embodiment, please refer to Figures 4-5As shown, the micromechanical gyroscope 10 can include two oppositely arranged driving members 3 and two oppositely arranged first coupling beams 4, the two driving members 3 are connected with corresponding outer edges of the first decoupling member 121 through the corresponding first coupling beams 4 to realize the motion decoupling between the first decoupling member 121 and the driving member 3. The structure of the first decoupling member 121 is a rectangular frame structure, and the four inner edges of the first decoupling member 121 are connected with the first moving member 11 through the corresponding first decoupling beams 122, the stiffness of the first decoupling beam 122 along the second direction Y is much greater than the stiffness of the first decoupling beam 122 along the third direction Z, so that when the first moving member 11 moves around the first direction X and / or the second direction Y, the motion decoupling between the first decoupling member 121 and the first moving member 11 is realized, and the motion decoupling degree of the first moving member 11 and the second moving member 21 can be further improved.

[0109] The ratio of the stiffness of the first decoupling beam 122 along the second direction Y to the stiffness of the first decoupling beam 122 along the third direction Z is greater than 1000:1, and the ratio can be 1100:1, 1200:1, 1300:1, 1400:1 or 1500:1.

[0110] In addition, please refer to Figures 4-5 As shown, the two first decoupling beams 122 are arranged along the first direction X, and the other two first decoupling beams 122 are arranged along the second direction Y, the two first decoupling anchor beams 123 are arranged along the first direction X, and the other two first decoupling beams 122 are arranged along the second direction Y. The arrangement direction of the first decoupling beam 122 located at the same edge of the first moving member 11 is orthogonal to the arrangement direction of the first decoupling anchor beam 123. The first decoupling member 121 includes a frame body 121a and a second T-shaped member 121b, and at least part of the frame body 121a and the second T-shaped member 121b can constitute an I-shaped structure. The two ends of the second T-shaped member 121b are respectively connected with the first decoupling beam 122, and the structure of the first decoupling beam 122 is C-shaped, U-shaped or H-shaped, so that the stiffness of the first decoupling beam 122 along the second direction Y is much greater than the stiffness of the first decoupling beam 122 along the third direction Z.

[0111] In addition, please refer to Figure 4 As shown, the first sensing assembly 1 includes four first fixed anchor points 14, two of which are oppositely arranged along the first direction X and located on the center line of the first moving member 11 along the first direction X, and the other two are oppositely arranged along the second direction Y and located on the center line of the first moving member 11 along the second direction Y.

[0112] Please refer to Figure 4 and Figure 6As shown, the first torsion assembly 13 may include a torsion frame 131, a first torsion beam 132, and a second torsion beam 133. The two oppositely arranged outer edges of the torsion frame 131 are connected to the corresponding inner edges of the first moving member 11 through the corresponding first torsion beam 132. The two oppositely arranged inner edges of the torsion frame 131 are connected to the second fixed anchor point 15 through the corresponding second torsion beam 133. The first torsion beam 132 and the second torsion beam 133 are orthogonal. Under this configuration, the first moving member 11 can be decoupled from the second fixed anchor point 15, that is, the first moving member 11 can torsion relative to the second fixed anchor point 15 around the first direction X and / or the second direction Y.

[0113] Please refer to Figure 4 and Figure 6 As shown, the second fixed anchor point 15 is located in the central region of the first moving member 11, the first torsion beam 132 can be set along the second direction Y and is located on the center line of the first moving member 11 along the second direction Y, and the second torsion beam 133 can be set along the first direction X and is located on the center line of the first moving member 11 along the first direction X.

[0114] In other embodiments (not shown in the figures), the first torsion beam 132 may be arranged along the first direction X and located at the centerline of the first moving member 11 along the first direction X, and the second torsion beam 133 may be arranged along the second direction Y and located at the centerline of the first moving member 11 along the second direction Y.

[0115] Based on the above, please refer to Figures 4-6 As shown, the first decoupling anchor beam 123 and the second torsion beam 133, which are arranged along the first direction X, can serve as axes for the first moving member 11 to swing about the first direction X. The first decoupling anchor beam 123 and the first torsion beam 132, which are arranged along the second direction Y, can serve as axes for the first moving member 11 to swing about the second direction Y.

[0116] Please refer to Figures 7-9 As shown, the second sensing component 2 may also include a second decoupling component 22 and a third fixed anchor point 23. The second moving component 21 is connected to the driving component 3 through the second coupling beam 5, and the second moving component 21 is connected to the third fixed anchor point 23 through the second decoupling component 22.

[0117] In this embodiment, please refer to Figures 7-9 As shown, the second moving component 21 is connected to the driving component 3 through the second coupling beam 5, thereby achieving motion decoupling between the second moving component 21 and the driving component 3, and the interference effect of the second moving component 21 on the driving component 3 is weak. The second moving component 21 is connected to the third fixed anchor point 23 through the second decoupling component 22, thereby achieving motion decoupling between the second moving component 21 and the third fixed anchor point 23, and the second moving component 21 can move relative to the third fixed anchor point 23 in the first plane (XY).

[0118] The third fixed anchor point 23 is fixedly connected to a component in the use environment, which can be a shell of an electronic device.

[0119] Please refer to Figure 9 The second decoupling component 22 can include a second decoupling piece 221, a second decoupling beam 222, and a second decoupling anchoring beam 223. The second decoupling piece 221 is connected to the second moving piece 21 through the second decoupling beam 222, and the second decoupling piece 221 is connected to the third fixed anchor point 23 through the second decoupling anchoring beam 223. The second decoupling beam 222 is arranged along the first direction X, and the second decoupling anchoring beam 223 is arranged along the second direction Y. The stiffness of the second decoupling beam 222 along the second direction Y is much smaller than the stiffness of the second decoupling beam 222 along the first direction X, and the stiffness of the second decoupling anchoring beam 223 along the second direction Y is much greater than the stiffness of the second decoupling anchoring beam 223 along the first direction X.

[0120] In this embodiment, please refer to Figure 9 As the second decoupling piece 221 is connected to the second moving piece 21 through the second decoupling beam 222, and the stiffness of the second decoupling beam 222 along the second direction Y is much smaller than the stiffness of the second decoupling beam 222 along the first direction X, the second decoupling piece 221 can be decoupled from the second moving piece 21 along the second direction Y, and the second decoupling piece 221 is less affected by the second moving piece 21 moving along the second direction Y. According to the above content, the second moving piece 21 will also be subjected to the Coriolis force along the first direction X, and the stiffness of the second decoupling beam 222 along the first direction X is large, so the second decoupling piece 221 can move along the first direction X with the second moving piece 21. Since the second decoupling piece 221 is fixed to the third fixed anchor point 23 through the second decoupling anchoring beam 223, and the stiffness of the second decoupling anchoring beam 223 along the second direction Y is much greater than the stiffness of the second decoupling anchoring beam 223 along the first direction X, the second decoupling piece 221 can be fixed relative to the third fixed anchor point 23 along the second direction Y. The second decoupling piece 221 driven by the second moving piece 21 can move relative to the third fixed anchor point 23 along the first direction X.

[0121] The ratio of the stiffness of the second decoupling beam 222 along the first direction X to the stiffness of the second decoupling beam 222 along the second direction Y is greater than 1000:1, and the ratio can be 1100:1, 1200:1, 1300:1, 1400:1, or 1500:1. The ratio of the stiffness of the second decoupling anchoring beam 223 along the second direction Y to the stiffness of the second decoupling anchoring beam 223 along the first direction X is greater than 1000:1, and the ratio can be 1100:1, 1200:1, 1300:1, 1400:1, or 1500:1.

[0122] In this embodiment, please refer to Figure 8As shown, the second decoupling member 221 is provided with a third hollow part 211 for accommodating the second decoupling beam 222. The structure of the second decoupling member 221 is a Chinese character "fang" structure, and the second decoupling member 221 semi-surrounds the second decoupling assembly 22. This arrangement makes the structure more compact and facilitates miniaturization. The second decoupling member 221 is a grid member, and the grid space of the second decoupling member 221 is used to place a flat electrode (not shown in the figure). The flat electrode can be used to detect the displacement of the second moving member 21.

[0123] Please refer to Figure 7 As shown, the second sensing assembly 2 can include two oppositely arranged second decoupling assemblies 22 and two oppositely arranged second moving members 21. Each second decoupling assembly 22 is connected to a corresponding second moving member 21. The second sensing assembly 2 further includes a third coupling beam 24, both ends of which are connected to corresponding driving members 3. The third coupling beam 24 is also connected to the two oppositely arranged second moving members 21, respectively.

[0124] In this embodiment, please refer to Figure 7 As shown, one of the two oppositely arranged second moving members 21 moves in the first direction X, and the other moves in the opposite direction of the first direction X. One of the two oppositely arranged second decoupling assemblies 22 moves in the first direction X, and the other moves in the opposite direction of the first direction X. When the two driving members 3 move in opposite directions, one of the driving members 3 drives the second moving member 21 to move in the second direction Y through a part of the third coupling beam 24, and the other driving member 3 drives the second moving member 21 to move in the opposite direction of the second direction Y through another part of the third coupling beam 24. Please refer to Figure 10As shown, the third coupling beam 24 can include a first segment 241 and a pair of second segments 242, two ends of the first segment 241 are connected with the corresponding driving members 3, and the side of the first segment 241 facing the second moving members 21 is connected with the second segments 242, and each second segment 242 is connected with the corresponding second moving member 21. The second segments 242 are inclined relative to the first segment 241, and the end of the second segment 242 away from the first segment 241 is closer to the corresponding driving member 3 than the end of the second segment 242 close to the first segment 241, and the two second segments 242 are symmetrically arranged. Through this arrangement, when in the third detection mode, the two second moving members 21 move in opposite directions along the direction X, the vibration state of the first segment 241 belongs to a first-order mode; when in the interference mode, the two second moving members 21 move in the same direction along the direction X, the vibration state of the first segment 241 belongs to a second-order mode, thus, through the different vibration states of the first segment 241, the frequency of the two second moving members 21 moving in opposite directions along the direction X is less than the frequency of the two second moving members 21 moving in the same direction along the direction X, thereby improving the reliability of the differential driving / detection of the micro-mechanical gyroscope of the present application, resisting the interference of external electrical and mechanical noise, and improving the signal-to-noise ratio of the device. Wherein, the second moving member 21 is provided with a fourth hollow portion 212 for accommodating the second segment 242, which makes the structure more compact and facilitates miniaturization.

[0125] Please refer to Figure 11 As shown, the driving member 3 can include a driving beam 31, a driving anchor beam 32, and a fourth fixed anchor point 33, the driving beam 31 is connected with the fourth fixed anchor point 33 through the driving anchor beam 32, and the driving beam 31 includes a third segment 311 and a fourth segment 312 connected with each other, the first sensing assembly 1 is connected with the third segment 311 through the first coupling beam 4, and the second sensing assembly 2 is connected with the fourth segment 312 through the second coupling beam 5.

[0126] In this embodiment, please refer to Figure 11 As shown, the driving anchor beam 32 can be deformed to enable the driving beam 31 to move along the second direction Y relative to the fourth fixed anchor point 33, and in turn, the third segment 311 of the driving beam 31 can drive the first sensing assembly 1 to move along the second direction Y through the first coupling beam 4, and similarly, the fourth segment 312 of the driving beam 31 can drive the second sensing assembly 2 to move along the second direction Y through the second coupling beam 5.

[0127] Wherein, the fourth fixed anchor point 33 is fixedly connected to a component in the use environment, which can be a shell of an electronic device. Please refer to Figure 12 As shown, the structure of the driving anchor beam 32 is a mountain-shaped structure arranged along the first direction X.

[0128] Embodiment Two:

[0129] This paper mainly introduces the differences between Embodiment Two and Embodiment One in structure, and the same points between Embodiment Two and Embodiment One will not be introduced later.

[0130] Please refer to Figure 13a and Figure 14 As shown in Figure 13b and Figure 13c When the first moving part 11 swings around the first direction X and / or the second direction Y, the motion of the first moving part 11 has a weak interference effect on the driving part 3.

[0131] Please refer to Figure 15 As shown in

[0132] Please refer to Figure 16 As shown in Figures 17-18 As shown in

[0133] The micromechanical gyroscope 10 in the second embodiment also has the following effects:

[0134] The first moving part 11 and the second moving part 21 are motion decoupled, and the degree of mutual interference is low, the influence of the orthogonal error is reduced, and the working precision of the micromechanical gyroscope 10 is higher. The first moving part 11 and the second moving part 21 can be used for differential detection, can resist the interference of external electrical and mechanical noise, and improve the signal-to-noise ratio of the device.

[0135] The same part structure of the micromechanical gyroscope 10 in the embodiment two as that of the micromechanical gyroscope 10 in the embodiment one also has the effects described above in the content of the embodiment one, which will not be repeated here.

[0136] The second aspect of the embodiment of the present application provides an electronic product (not shown in the figure), which comprises a body (not shown in the figure) and the micromechanical gyroscope 10 in the above content, and the micromechanical gyroscope 10 is installed on the body. The electronic product of the present application has the effects of the micromechanical gyroscope 10 described above, which will not be repeated here.

[0137] The above is only the embodiment of the present application, and it should be pointed out that for those skilled in the art, improvements can be made without departing from the inventive concept, but these all belong to the protection scope of the present application.

Claims

1. A micromechanical gyroscope, characterized by The application relates to a sensor device, comprising: a first sensing assembly comprising a first moving element capable of swinging around a first direction and / or a second direction, the first direction being orthogonal to the second direction; a second sensing assembly comprising a second moving element capable of moving in a first plane in which the first direction and the second direction lie; a driving element located on two sides of the first sensing assembly and the second sensing assembly in the first direction, one of the driving elements being capable of moving in the second direction, and the other driving element being capable of moving in the opposite direction of the second direction; a first coupling beam connecting two ends of the first sensing assembly in the first direction with the corresponding driving elements through the corresponding first coupling beams; a second coupling beam connecting two ends of the second sensing assembly in the first direction with the corresponding driving elements through the corresponding second coupling beams; the stiffness of the first coupling beam in the second direction is greater than the stiffness of the first coupling beam in a third direction, the third direction being perpendicular to the first plane; the stiffness of the second coupling beam in the second direction is greater than the stiffness of the second coupling beam in the first direction.

2. The micromechanical gyroscope according to claim 1, characterized in that The first sensing assembly further comprises a first decoupling assembly, a first torsion assembly, a first fixed anchor point and a second fixed anchor point, the first decoupling assembly is in a frame structure, the outer edges of the first decoupling assembly are connected with the driving elements through the first coupling beams, the first moving element, the first torsion assembly, the first fixed anchor point and the second fixed anchor point are located in the space enclosed by the first decoupling assembly, the first moving element and the first fixed anchor point are connected with the first decoupling assembly, the first moving element is provided with a first hollow part, the first torsion assembly and the second fixed anchor point are arranged in the first hollow part, and the first moving element is connected with the second fixed anchor point through the first torsion assembly.

3. The micromechanical gyroscope according to claim 2, characterized in that The first decoupling assembly comprises a first decoupling element, a first decoupling beam and a first decoupling anchor beam, the first decoupling element is in a rectangular frame structure, two oppositely arranged outer edges of the first decoupling element are connected with the corresponding driving elements through the corresponding first coupling beams, four inner edges of the first decoupling element are connected with the first moving element through the corresponding first decoupling beams, and the four inner edges of the first decoupling element are connected with the corresponding first fixed anchor points through the corresponding first decoupling anchor beams; the stiffness of the first decoupling beam in the second direction is greater than the stiffness of the first decoupling beam in the third direction.

4. The micromechanical gyroscope according to claim 2, characterized in that The first torsion assembly comprises a torsion frame, a first torsion beam and a second torsion beam, two oppositely arranged outer edges of the torsion frame are connected with the corresponding inner edges of the first moving element through the corresponding first torsion beams, two oppositely arranged inner edges of the torsion frame are connected with the second fixed anchor points through the corresponding second torsion beams, and the first torsion beam and the second torsion beam are orthogonal.

5. The micromechanical gyroscope according to any of claims 1-4, characterized in that, The second sensing assembly further comprises a second decoupling assembly, a third fixed anchor point, the second moving part is connected with the driving part through the second coupling beam, and the second moving part is connected with the third fixed anchor point through the second decoupling assembly.

6. The micromechanical gyroscope according to claim 5, characterized in that The second decoupling assembly comprises a second decoupling part, a second decoupling beam and a second decoupling anchor beam, the second decoupling part is connected with the second moving part through the second decoupling beam, and the second decoupling part is connected with the third fixed anchor point through the second decoupling anchor beam, the second decoupling beam is arranged along the first direction, and the second decoupling anchor beam is arranged along the second direction. The rigidity of the second decoupling beam along the second direction is smaller than the rigidity of the second decoupling beam along the first direction. The rigidity of the second decoupling anchor beam along the second direction is greater than the rigidity of the second decoupling anchor beam along the first direction.

7. The micromechanical gyroscope according to claim 5, characterized in that The second sensing assembly comprises two oppositely arranged second decoupling assemblies and two oppositely arranged second moving parts, each second decoupling assembly is connected with a corresponding second moving part, and the second sensing assembly further comprises a third coupling beam, both ends of the third coupling beam are connected with corresponding driving parts, and the third coupling beam is further connected with two oppositely arranged second moving parts respectively.

8. The micromechanical gyroscope according to claim 7, characterized in that The third coupling beam comprises a first segment and a pair of second segments, both ends of the first segment are connected with corresponding driving parts, and one side of the first segment facing the second moving part is further connected with the second segment, and each second segment is connected with a corresponding second moving part. The second segment is inclined relative to the first segment, one end of the second segment away from the first segment is closer to the corresponding driving part than one end of the second segment close to the first segment, and the two second segments are symmetrically arranged.

9. The micromechanical gyroscope according to any of claims 1-4, characterized in that, The driving part comprises a driving beam, a driving anchor beam and a fourth fixed anchor point, the driving beam is connected with the fourth fixed anchor point through the driving anchor beam, the driving beam comprises a third segment and a fourth segment connected with each other, the first sensing assembly is connected with the third segment through the first coupling beam, and the second sensing assembly is connected with the fourth segment through the second coupling beam.

10. An electronic product, characterized by comprising: Comprise: A body; A micromechanical gyroscope according to any one of claims 1-9, the micromechanical gyroscope being mounted to the body.

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