A probe manufacturing apparatus

Abstract

The application provides a probe manufacturing device, wherein the probe manufacturing device comprises a gas pressure assembly, a support rod and a punch rod, the gas pressure assembly is connected with the support rod, the punch rod is arranged at one end of the support rod close to the gas pressure assembly, and the probe is arranged at the other end of the support rod; when the gas pressure in the gas pressure assembly increases, a thrust force is generated at one end of the support rod, the punch rod is pushed to move along the support rod to the other end of the support rod, the probe on the other side of the other end of the support rod is deformed by the punch rod, and the probe changes from a first state to a second state, wherein the probe tail is larger than the probe body in the second state. The probe tail deformation is realized by arranging the gas pressure assembly, the efficiency of the cutting process of the probe production process is improved, the production time is reduced, the probe tail deformation is realized by the gas pressure, the consumption of raw materials is reduced, and the cost is saved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and more specifically to a probe manufacturing apparatus. Background Technology

[0002] Probe cards are widely used in the semiconductor testing field for testing the electrical performance of semiconductors. With industry development, vertical probe cards have emerged. Specifically, a probe card is a fixture used during wafer testing to perform electrical tests on LSI (Limited-Input System) chips on a wafer. With the decreasing distance between the probe and the device under test, the increasing complexity of manufacturing processes, and the influence of various factors such as chip design, the production of vertical probe cards has placed higher demands on the industry.

[0003] Currently, vertical probe cards require pin implantation during assembly, ensuring the probe tail portion is larger than the probe body to prevent the probe from falling out during assembly. However, pin implantation is typically performed during the cutting process, which not only wastes raw materials but also results in high energy consumption and complex operation.

[0004] Therefore, a new probe manufacturing scheme is needed. Summary of the Invention

[0005] In view of this, embodiments of this specification provide a probe manufacturing apparatus for use in the process of implanting needles into probe cards.

[0006] The embodiments in this specification provide the following technical solutions:

[0007] This specification provides a probe manufacturing apparatus, which includes: a pneumatic assembly, a support member, and a punch.

[0008] The pneumatic assembly is connected to the support component;

[0009] The punch is positioned near the pneumatic assembly at one end of the support member;

[0010] The probe is positioned on the opposite side of the other end of the support.

[0011] When the air pressure in the pneumatic assembly increases, it generates a thrust at one end of the support, which pushes the punch rod to move along the support to the other end of the support. The punch rod then pushes the probe on the opposite side of the other end of the support to deform, causing the probe to change from the first state to the second state. In the second state, the probe tail is larger than the probe body.

[0012] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:

[0013] By setting up a pneumatic component to deform the probe tail, the probe is prevented from falling off during the probe insertion process. This not only improves the efficiency of the probe manufacturing process and reduces production time, but also reduces raw material consumption and saves costs by deforming the probe tail through the pneumatic component. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of a probe manufacturing apparatus provided in the embodiments of this specification. Figure 1 ;

[0016] Figure 2 This is a schematic diagram of the structure of a probe manufacturing apparatus provided in the embodiments of this specification. Figure 2 ;

[0017] Figure 3 This is a schematic diagram of the structure of a probe manufacturing apparatus provided in the embodiments of this specification. Figure 3 ;

[0018] Figure 4 This is a structural schematic diagram of the support member provided in the embodiments of this specification. Detailed Implementation

[0019] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0020] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0022] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0023] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0024] The assembly process of vertical probe cards requires needle implantation, so the size of the probe needle tail needs to be larger than the size of the probe needle body. This needle implantation process is achieved through a cutting process and controlled by solenoid valves, which not only wastes raw materials during the needle implantation process, but also has problems such as high energy consumption and complicated operation.

[0025] Based on this, the embodiments in this specification propose the following... Figure 1 The probe manufacturing apparatus shown uses a pneumatic assembly to increase air pressure, which generates thrust. This thrust pushes a punch located at the end of the pneumatic assembly toward the probe placement direction, causing it to contact the probe and deform. This reduces the outer diameter of the probe, making the probe tail larger than the probe body to prevent the probe from falling off during implantation. It also saves raw materials in the cutting process, reduces production time, and improves the efficiency of the probe manufacturing process.

[0026] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0027] like Figure 1As shown in the embodiments of this specification, a probe manufacturing apparatus is provided. This apparatus may include a pneumatic assembly 100, a support member 200, and a punch 5. The pneumatic assembly 100 is mounted on the support member 200, and the two are fixedly connected. The punch 5 is located at one end of the support rod near the pneumatic assembly (e.g., the upper end). The probe is located on the opposite side of the other end of the support member (e.g., the lower end) in the direction away from the pneumatic assembly (e.g., placed below the support member). Therefore, when the air pressure in the pneumatic assembly increases, a thrust is generated at one end of the support member, pushing the punch 5 to move along the support member towards the other end. This causes the punch 5 to deform the probe on the opposite side of the other end of the support member, changing the probe from a first state to a second state, in which the probe tail is larger than the probe body.

[0028] The embodiments in this specification achieve probe tail deformation by setting up a pneumatic component to prevent the probe from falling off during the probe insertion process. This not only improves the efficiency of the probe manufacturing process and reduces production time, but also reduces raw material consumption and saves costs by deforming the probe tail through the pneumatic component.

[0029] In some embodiments, the pneumatic assembly includes a valve body, a cylinder, and a handle; the handle is disposed on a first side of the valve body; the top of the handle is movably connected to the top of the valve body; a pressure assembly is disposed inside the top of the valve body; the pressure assembly is used to allow compressed gas to enter the valve body; the valve core inside the valve body and the top of the cylinder form a cavity; the bottom of the valve body is fixedly connected to the top of the cylinder, and the top of the cylinder and the bottom of the valve body are provided with an air outlet at the cavity.

[0030] Specifically, in conjunction with the above embodiments, such as Figures 1 to 3 As shown, the pneumatic assembly 100 includes a valve body 1, a cylinder 4, and a handle 3; see also Figure 1 and Figure 3 The handle 3 is located on the left side of the valve body 1, and the top of the handle 1 is movably connected to the top of the valve body; see also Figure 3 A compressed air assembly (including an air pipe 11) is located at the top of the valve body. The valve core 15 inside the valve body forms a cavity with the top of the cylinder. The bottom of the valve body is fixedly connected to the top of the cylinder, and an air outlet 12 is provided at this cavity between the top of the cylinder and the bottom of the valve body. The compressed air assembly cooperates with the handle to allow compressed air to enter the valve body 1. In some embodiments, the compressed gas is nitrogen, etc.

[0031] In some embodiments, the valve body includes a valve core, a valve sleeve, and a valve plug; the valve plug is disposed within the valve body along a first side; the valve core and the valve plug are disposed within a second valve sleeve. When the handle pushes the valve plug and moves the valve core, the valve core is positioned on the right side of the valve sleeve; a gas passage is formed between the air compression assembly, the valve core, and the air outlet.

[0032] like Figure 3 As shown, the valve body 1 includes a valve core 15, a valve sleeve 16, and a valve plug 13. The valve plug 13 is located near the first side of the valve body, see [reference needed]. Figure 3 The valve plug is located near the left side of the valve body, and the valve core 15 and valve plug 13 are housed within the valve sleeve 16. When the handle 3 is pressed down and held still, pushing the valve plug 13 and the valve core 15 to the right, compressed air forms a gas passage through the air compressor assembly, the valve core, and the air outlet, allowing the airflow to flow smoothly from the top to the bottom of the valve body 1. If the air outlet at the bottom of the valve body is sealed, gas will accumulate at the bottom of the valve body; if the air outlet at the bottom of the valve body is open, gas can flow from the valve body into the cylinder.

[0033] In some embodiments, the cylinder includes an adjustment mechanism disposed at the lower part of the cylinder along one end of the support member. The adjustment mechanism is provided with a limit component, which includes an adjustment knob, an upper limit block, and a lower limit block; the adjustment knob is used to adjust the distance between the upper limit block and the lower limit block.

[0034] like Figure 3 As shown, cylinder 4 includes an adjustment mechanism located at the lower part of the cylinder near the support member (e.g., the upper end). This adjustment mechanism includes an adjustment knob 21, an upper limit block 22, and a lower limit block 23. The adjustment knob adjusts the distance between the upper and lower limit blocks, thereby adjusting the downward force of the punch without adjusting the gas flow rate. For example, when the distance between the upper and lower limit blocks increases, the downward force of the punch increases; conversely, when the distance decreases, the downward force of the punch decreases. Furthermore, this adjustment mechanism also limits the downward pressure of the punch to prevent excessive contact with the probe and unnecessary excessive deformation of the probe.

[0035] In some embodiments, the valve body includes an exhaust port; the exhaust port is disposed on a second side of the valve body in a direction away from the handle.

[0036] like Figure 1 and Figure 3 As shown, the valve body 1 includes an exhaust port 2, which is located on the right side of the valve body 1 and opposite to the left side of the handle. When the handle 3 is released, the valve core 15 returns to its original position, closing the gas passage formed by the air compressor assembly, the valve core, and the exhaust port. The airflow accumulated at the bottom of the valve body 1 is discharged into the atmosphere through the exhaust port at the bottom of the valve body 1 and the exhaust connector 2, thus completing one power output cycle.

[0037] This embodiment of the specification uses a pneumatic component to deform the probe tail, preventing the probe from falling off during the probe insertion process. This not only improves the efficiency of the probe manufacturing process and reduces production time, but also reduces raw material consumption and saves costs by deforming the probe tail through the pneumatic component.

[0038] In some embodiments, the support member includes: a main board, a vertical plate support member, and an end support member; the main board is disposed below the cylinder, and the end support member and the vertical plate support member are respectively connected to the main board.

[0039] like Figure 1 As shown, the support component 200 includes a main board 6, a vertical plate support component 7, and an end support component 8. The main board 6 is located directly below the cylinder, and the end support component 8 (e.g., a front end support component) and the vertical plate support component 7 are respectively connected to the main board 6, as shown. Figure 1 The upright support 7 is not parallel to the right side of the main board, and the end support 8 is located on the left side of the main board 6, specifically at the lower left corner of the main board.

[0040] In some embodiments, a guide groove is provided on the motherboard. For example... Figure 4 The motherboard shown has a guide groove 17 running from top to bottom, and the punch can move downward along the guide groove.

[0041] In some embodiments, the probe manufacturing apparatus includes a base plate and an adsorption platform, wherein the adsorption platform is disposed on the base plate and connected to the main plate.

[0042] like Figure 1 As shown, the pneumatic components and support components of the probe manufacturing device are all mounted on the base plate 10. The main board 6, the front support component 8, and the vertical plate support component 7 are fixed on the base plate 10, and the adsorption platform 9 is fixed on the base plate 10.

[0043] During probe manufacturing process, such as Figure 1 Open the adsorption platform 9 to achieve negative pressure airflow, and connect the valve body 1 to an air compressor to achieve positive pressure airflow. Place the probe material on the adsorption platform 9, press and hold the handle 3, and... Figure 3 Handle 3 pushes the internal structure of valve body 1, causing airflow from the air compressor to continuously flow into cylinder 4 through valve body 1. In some embodiments, the top of the cylinder is sealed, allowing gas to accumulate and generate a pushing force to push the punch 5. Figure 4 As shown, after the punch 5 moves downward, it comes into contact with the probe on the adsorption platform 9. The resulting impact force causes the probe to deform, and the outer diameter of the probe at the contact point decreases. After maintaining pressure for a period of time, once the probe shape is fixed, the handle 3 is released. At this time, the gas collected at the top of the cylinder passes through the valve body 1, enters the exhaust port 2, and is then discharged into the atmosphere. The punch 5 returns to its initial position because it is no longer supported by gas. The probe manufacturing process is now complete.

[0044] The embodiments in this specification achieve probe tail deformation by setting up a pneumatic component to prevent the probe from falling off during the probe insertion process. This not only improves the efficiency of the probe manufacturing process and reduces production time, but also reduces raw material consumption and saves costs by deforming the probe tail through the pneumatic component.

[0045] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the product embodiments described later are relatively simple in description because they correspond to the methods; relevant parts can be referred to the descriptions in the system embodiments.

[0046] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A probe manufacturing apparatus characterized by comprising: The probe manufacturing device comprises an air pressure assembly, a support and a punch rod. The air pressure assembly is connected with the support. The punch rod is arranged at one end of the support close to the air pressure assembly. The probe is arranged at the other end of the support. When the air pressure in the air pressure assembly increases, a pushing force is generated at one end of the support, pushing the punch rod to move along the support to the other end of the support, and the probe at the other end of the support is deformed by the punch rod, so that the probe changes from a first state to a second state, in which the probe needle tail is larger than the probe needle body, to prevent the probe from falling during the needle implantation process. The air pressure assembly comprises a valve body, a cylinder and a handle. The handle is arranged at a first side of the valve body. The top end of the handle is movably connected with the top end of the valve body. The top end of the valve body is internally provided with a gas compression assembly. The valve core in the valve body and the top of the cylinder form a cavity. The bottom of the valve body is fixedly connected with the top of the cylinder.

2. The probe manufacturing apparatus according to claim 1, wherein The top of the cylinder and the bottom of the valve body are provided with an air outlet hole at the cavity. The valve body comprises a valve core, a valve sleeve and a valve plug. The valve plug is arranged in the valve body along the direction of the first side. The valve core and the valve plug are arranged in the valve sleeve.

3. The probe manufacturing apparatus according to claim 1, wherein When the handle pushes the valve plug and moves the valve core, the valve core is in a direction away from the first side.

4. The probe manufacturing apparatus according to claim 3, wherein The gas compression assembly, the valve core and the air outlet hole form a gas passage.

5. The probe manufacturing apparatus according to claim 1, wherein The cylinder comprises an adjusting mechanism arranged at the lower part of the cylinder in the direction of one end of the support.

6. The probe manufacturing apparatus according to claim 1, wherein The adjusting mechanism is provided with a limiting assembly and an adjusting knob.

7. The probe manufacturing apparatus according to claim 6, wherein The limiting assembly comprises an upper limiting block and a lower limiting block. The adjusting knob is used to adjust the distance between the upper limiting block and the lower limiting block. The valve body comprises an exhaust interface arranged at the second side of the valve body in a direction away from the handle. The support comprises a main plate, a vertical plate support and an end support. The main plate is arranged below the cylinder. The end support and the vertical plate support are respectively connected with the main plate. A guide groove is arranged on the main plate. The probe manufacturing device comprises a bottom plate and an adsorption platform arranged on the bottom plate and connected with the main plate.

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