A coating workpiece table with adjustable coating angle

Abstract

The application discloses a coating workpiece table with adjustable coating angle, which comprises a mounting plate, a turnover shaft, a rotating shaft, a substrate holder, a substrate holder mounting assembly, a first rotating drive mechanism for driving the turnover shaft to rotate and a second rotating drive mechanism for driving the rotating shaft to rotate, the rotating shaft is rotatably mounted on the mounting plate, the turnover shaft passes through the rotating shaft and extends outward at both ends, the turnover shaft is rotatable relative to the rotating shaft, the substrate holder mounting assembly is arranged below the mounting plate, the bottom of the rotating shaft is connected with the substrate holder mounting assembly through a connecting assembly, the bottom of the turnover shaft is provided with a driving gear ring, the substrate holder is provided with a plurality of substrate holders, the plurality of substrate holders are arranged on the substrate holder mounting assembly in a circumferential direction and are spaced from each other with the turnover shaft as the center, the rotating shafts at both ends of the substrate holder are rotatably connected with the substrate holder mounting assembly, and the rotating shaft at one end is provided with a driven gear which is engaged with the driving gear ring. The application has the advantages of adjustable coating angle, no need of manual cavity opening and improved coating efficiency.

Description

Technical Field

[0001] This invention relates to the field of semiconductor fabrication technology, and more specifically to a coating workpiece stage with an adjustable coating angle. Background Technology

[0002] With the rapid development of industries such as microelectronics and semiconductors, the requirements for equipment automation and process quality are becoming increasingly stringent. Traditional coating stages only support single-sided coating and the substrate angle is not adjustable. In some electronic devices, the process requires double-sided coating. After the equipment completes the single-sided coating, it is necessary to manually open the cavity, flip the substrate, and then perform the coating process on the other side. This reduces the proportion of process time in the overall equipment running time, slows down the coating efficiency, and the repeated cavity opening can easily cause contamination of the reaction chamber, affecting the process quality. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a coating workpiece stage with adjustable coating angle, no need for manual cavity opening, and improved coating efficiency.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] An adjustable coating angle coating workpiece stage includes a mounting plate, a flipping shaft, a rotating shaft, a substrate holder, a substrate holder mounting assembly, a first rotary drive mechanism for driving the flipping shaft to rotate, and a second rotary drive mechanism for driving the rotating shaft to rotate. The rotating shaft is rotatably mounted on the mounting plate. The flipping shaft passes through the rotating shaft and extends outward at both ends. The flipping shaft can rotate relative to the rotating shaft. The substrate holder mounting assembly is located below the mounting plate. The bottom of the rotating shaft is connected to the substrate holder mounting assembly via a connecting assembly. The bottom of the flipping shaft is provided with a driving gear ring. Multiple substrate holders are provided, and the multiple substrate holders are arranged circumferentially on the substrate holder mounting assembly with the flipping shaft as the center. Both ends of the substrate holder are rotatably connected to the substrate holder mounting assembly via rotating shafts. One end of the rotating shaft is provided with a driven gear, and the driven gear meshes with the driving gear ring.

[0006] As a further improvement to the above technical solution:

[0007] The first rotary drive mechanism includes a first rotary motor, a first synchronous belt assembly, and a first rotary motor mounting base. The first rotary motor is connected to the first driving pulley of the first synchronous belt assembly, and the first driven pulley of the first synchronous belt assembly is connected to the tilting shaft. The first rotary motor is mounted on the first rotary motor mounting base, and the first rotary motor mounting base is located at the top of the rotary shaft.

[0008] The coating workpiece stage also includes a conductive slip ring and a conductive slip ring terminal block. The inner ring terminal of the conductive slip ring is connected to the top of the flip shaft, and the outer ring terminal is connected to the conductive slip ring terminal block. The conductive slip ring terminal block is mounted on a mounting plate, and the cable of the first rotary motor is connected to the inner ring terminal of the conductive slip ring.

[0009] The substrate holder mounting assembly includes an inner mounting ring, an outer mounting ring, and multiple first connecting rods. The inner mounting ring and the outer mounting ring are connected by the multiple first connecting rods. The connecting assembly is connected to the inner mounting ring. The two ends of the substrate holder are rotatably connected to the inner mounting ring and the outer mounting ring respectively through rotating shafts. The driven gear is located at one end of the rotating shaft near the inner mounting ring.

[0010] The connecting assembly includes a connecting plate located below the mounting plate and a second connecting rod. The upper end of the connecting plate is connected to the bottom of the rotating shaft, and the lower end is connected to the inner mounting ring via the second connecting rod.

[0011] Both the inner and outer mounting rings are equipped with bearings, and the rotating shafts at both ends of the substrate frame are respectively connected to the corresponding bearings.

[0012] The bearing is provided with a bearing pressure block.

[0013] The second rotary drive mechanism includes a second rotary motor, a reducer, a second synchronous belt assembly, and a second rotary motor mounting base. The second rotary motor is connected to the reducer, the second drive pulley of the second synchronous belt assembly is connected to the reducer, the second driven pulley of the second synchronous belt assembly is connected to the rotary shaft, and the second rotary motor is mounted on the second rotary motor mounting base, which is located on a mounting plate.

[0014] The substrate holder mounting assembly is equipped with a dirt-proof baffle.

[0015] The first rotary motor mounting base is equipped with a home position photoelectric sensor.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] The coating angle adjustable coating workpiece stage disclosed in this invention uses a second rotary drive mechanism to drive a rotary shaft to rotate. This rotary shaft, via a connecting assembly, drives a substrate holder mounting assembly to rotate, thus rotating the substrate holder on the mounting assembly. This ensures uniform reaction of the indoor gas and improves coating uniformity. Simultaneously, due to the substrate holder's rotation, the driven gear on the rotary shaft also rotates synchronously. At this time, the first rotary drive mechanism drives a tilting shaft to rotate, which in turn drives a driving gear ring at the bottom of the tilting shaft to rotate. If the driving gear ring and the driven gear rotate at the same speed, they remain relatively stationary, and the substrate holder maintains its original rotation. If there is a speed difference between the rotational speeds of the driving gear ring and the driven gear, the driven gear will move relative to the driving gear ring, causing the rotating shaft and substrate holder to flip on the substrate holder mounting assembly. By controlling the speed difference between the rotational speeds of the driving gear ring and the driven gear, the flip angle of the substrate holder on the substrate holder mounting assembly can be changed, thus adjusting the coating angle while rotating. After single-sided coating is completed, there is no need to manually open the cavity; simply flipping the substrate holder 180° will achieve double-sided coating, reducing contamination caused by the reaction chamber and cavity opening time, and improving process quality, process flexibility, and coating efficiency. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the coating workpiece stage with adjustable coating angle according to the present invention.

[0019] Figure 2 for Figure 1 Enlarged view of point A in the middle.

[0020] Figure 3 This is a cross-sectional structural diagram of the present invention.

[0021] Figure 4 for Figure 3 Enlarged view of point B in the middle.

[0022] Figure 5 This is a top view of the substrate holder mounting assembly in this invention.

[0023] The labels in the diagram represent: 1. Mounting plate; 2. Tilting shaft; 21. Drive gear ring; 22. Drive gear ring mounting rod; 3. Rotating shaft; 4. Substrate holder; 5. Substrate holder mounting assembly; 51. Inner mounting ring; 52. Outer mounting ring; 53. First connecting rod; 6. First rotary drive mechanism; 61. First rotary motor; 62. First synchronous belt assembly; 621. First drive pulley; 622. First driven pulley; 623. First synchronous belt; 624. Tensioner; 63. First rotary motor mounting base; 7. 71. Second rotary drive mechanism; 72. Second rotary motor; 73. Reducer; 74. Second synchronous belt assembly; 75. Second driving pulley; 76. Second driven pulley; 77. Second synchronous belt; 78. Second rotary motor mounting base; 9. Connecting assembly; 81. Connecting plate; 82. Second connecting rod; 10. Rotary shaft; 91. Driven gear; 10. Conductive slip ring; 11. Conductive slip ring terminal block; 12. Bearing; 13. Bearing pressure block; 14. Anti-fouling baffle; 15. Origin position photoelectric sensor. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] As shown in this disclosure and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not specifically singular and may include plural forms. The terms "first," "second," and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "comprising" or "including" mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, without excluding other elements or objects. The terms "connected" or "linked" are not limited to physical or mechanical connections but may include electrical connections, whether direct or indirect.

[0026] Figures 1 to 5An embodiment of the present invention is shown. The coating angle adjustable coating workpiece stage of this embodiment includes a mounting plate 1, a flip shaft 2, a rotating shaft 3, a substrate holder 4, a substrate holder mounting assembly 5, a first rotary drive mechanism 6 for driving the flip shaft 2 to rotate, and a second rotary drive mechanism 7 for driving the rotating shaft 3 to rotate. The rotating shaft 3 is rotatably mounted on the mounting plate 1. The flip shaft 2 passes through the rotating shaft 3 and extends outward at both ends. The flip shaft 2 can rotate relative to the rotating shaft 3. The substrate holder mounting assembly 5 is located below the mounting plate 1. The bottom of the rotating shaft 3 is connected to the substrate holder mounting assembly 5 through a connecting assembly 8. The bottom of the flip shaft 2 is provided with a drive gear ring 21. Multiple substrate holders 4 are provided. Multiple substrate holders 4 are arranged circumferentially on the substrate holder mounting assembly 5 with the flip shaft 2 as the center. Both ends of the substrate holder 4 are rotatably connected to the substrate holder mounting assembly 5 through a rotating shaft 9. One end of the rotating shaft 9 is provided with a driven gear 91, which meshes with the drive gear ring 21.

[0027] The coating angle adjustable coating workpiece stage is driven by a second rotary drive mechanism 7, which drives a rotary shaft 3 to rotate. The rotary shaft 3, through a connecting assembly 8, drives a substrate holder mounting assembly 5 to rotate, which in turn drives the substrate holder 4 on the substrate holder mounting assembly 5 to rotate. This ensures uniform reaction of the gas in the coating chamber and improves coating uniformity. Simultaneously, as the substrate holder 4 rotates, the driven gear 91 on the rotating shaft 9 also rotates synchronously. At this time, the first rotary drive mechanism 6 drives a flip shaft 2 to rotate, which in turn drives a drive gear ring 21 at the bottom of the flip shaft 2 to rotate. If the drive gear ring 21 and the driven gear 91 rotate at the same speed, they remain relatively stationary, and the substrate holder 4 maintains its original rotation. If there is a speed difference between the rotational speeds of the driving gear ring 21 and the driven gear 91, the driven gear 91 will move relative to the driving gear ring 21, causing the rotating shaft 9 and the substrate holder 4 to rotate on the substrate holder mounting assembly 5. By controlling the speed difference between the rotational speeds of the driving gear ring 21 and the driven gear 91, the rotation angle of the substrate holder 4 on the substrate holder mounting assembly 5 can be changed, realizing the adjustment of the coating angle while rotating. After single-sided coating is completed, there is no need to manually open the cavity; simply rotating the substrate holder 4 180° will achieve double-sided coating, reducing contamination caused by the reaction chamber and cavity opening time, and improving process quality, process flexibility, and coating efficiency. Specifically, the bottom of the rotating shaft 2 is provided with a driving gear ring mounting rod 22, and the driving gear ring 21 is mounted on the driving gear ring mounting rod 22 to avoid damage to the rotating shaft 2.

[0028] In this embodiment, the first rotary drive mechanism 6 includes a first rotary motor 61, a first synchronous belt assembly 62, and a first rotary motor mounting base 63. The first rotary motor 61 is connected to the first driving pulley 621 of the first synchronous belt assembly 62, and the first driven pulley 622 of the first synchronous belt assembly 62 is connected to the tilting shaft 2. The first rotary motor 61 is mounted on the first rotary motor mounting base 63, which is located at the top of the rotating shaft 3. With the first rotary motor mounting base 63 positioned at the top of the rotating shaft 3, when the second rotary drive mechanism 7 drives the rotating shaft 3 to rotate, the first rotary motor mounting base 63, the first rotary motor 61 mounted on the first rotary motor mounting base 63, and the first synchronous belt assembly 62 also rotate synchronously with the rotating shaft 3. This drives the tilting shaft 2 and the driving gear ring 21 at the bottom of the tilting shaft 2 to rotate synchronously with the rotating shaft 3. That is, when the first rotary drive mechanism 6 is not activated, and only the second rotary drive mechanism 7 is activated, the tilting shaft 2 rotates synchronously with the rotating shaft 3, and the driving gear ring 21 rotates synchronously with the driven gear 91. To ensure the driving gear ring 21 and the driven gear 91 are relatively stationary, the first rotary drive mechanism 6 is activated. The first rotary motor 61 drives the first driving pulley 621 of the first synchronous belt assembly 62 to rotate. This, in turn, drives the first driven pulley 622 to rotate via the first synchronous belt 623, thereby causing the flipping shaft 2 to generate a second rotational motion. This prevents the driving gear ring 21 from being relatively stationary with the driven gear 91, causing the driven gear 91 to mesh on the driving gear ring 21, thus achieving the flipping of the substrate holder 4. This clever design facilitates adjustment of the flipping angle of the substrate holder 4. Specifically, a 624 is also provided between the first driving pulley 621 and the first driven pulley 622 to keep the first synchronous belt 623 taut, ensuring the synchronous movement of the first synchronous belt assembly 62 and facilitating precise adjustment of the flipping angle of the substrate holder 4.

[0029] In this embodiment, the coating workpiece stage also includes a conductive slip ring 10 and a conductive slip ring terminal block 11. The inner ring terminal of the conductive slip ring 10 is connected to the top of the flip shaft 2, and the outer ring terminal is connected to the conductive slip ring terminal block 11. The conductive slip ring terminal block 11 is mounted on the mounting plate 1. The cable of the first rotary motor 61 is connected to the inner ring terminal of the conductive slip ring 10. The inner ring terminal of the conductive slip ring 10 rotates synchronously with the top of the flip shaft 2 and remains relatively stationary with respect to the cable of the first rotary motor 61. The outer ring terminal is connected to the conductive slip ring terminal block 11 and remains stationary, thus connecting the cable to the outside and preventing tangling during rotation.

[0030] In this embodiment, the substrate holder mounting assembly 5 includes an inner mounting ring 51, an outer mounting ring 52, and multiple first connecting rods 53. The inner mounting ring 51 and the outer mounting ring 52 are connected by the multiple first connecting rods 53. The connecting assembly 8 is connected to the inner mounting ring 51. Both ends of the substrate holder 4 are rotatably connected to the inner mounting ring 51 and the outer mounting ring 52 respectively via rotating shafts 9. The driven gear 91 is located at one end of the rotating shaft 9 near the inner mounting ring 51. Preferably, the multiple first connecting rods 53 are arranged at intervals along the circumference of the inner mounting ring 51 and the outer mounting ring 52.

[0031] In this embodiment, the connecting assembly 8 includes a connecting plate 81 and a second connecting rod 82 disposed below the mounting plate 1. The upper end of the connecting plate 81 is connected to the bottom of the rotating shaft 3, and the lower end is connected to the inner mounting ring 51 via the second connecting rod 82. The connecting plate 81 is sleeved on the outside of the flip shaft 2 and can rotate relative to the flip shaft 2. Preferably, multiple second connecting rods 82 are provided, and the multiple second connecting rods 82 are arranged at intervals along the circumference of the connecting plate 81 to improve the connection strength between the flip shaft 2 and the inner mounting ring 51.

[0032] In this embodiment, bearings 12 are provided on both the inner mounting ring 51 and the outer mounting ring 52. The rotating shafts 9 at both ends of the substrate frame 4 are respectively connected to the corresponding bearings 12 to ensure the smooth rotation of the substrate frame 4.

[0033] In this embodiment, a bearing pressure block 13 is provided outside the bearing 12 to facilitate fixing the bearing 12 and ensure the stability of the substrate frame 4 rotation.

[0034] In this embodiment, the second rotary drive mechanism 7 includes a second rotary motor 71, a reducer 72, a second synchronous belt assembly 73, and a second rotary motor mounting base 74. The second rotary motor 71 is connected to the reducer 72, the second drive pulley 731 of the second synchronous belt assembly 73 is connected to the reducer 72, and the second driven pulley 732 of the second synchronous belt assembly 73 is connected to the rotary shaft 3. The second rotary motor 71 is mounted on the second rotary motor mounting base 74, which is located on the mounting plate 1. The second rotary motor 71 adjusts its drive speed through the reducer 72, drives the second drive pulley 731 of the second synchronous belt assembly to rotate, drives the second driven pulley 732 to rotate through the second synchronous belt 733, and ultimately drives the rotary shaft 3 to rotate.

[0035] In this embodiment, the substrate holder mounting assembly 5 is provided with a dirt-proof baffle 14. The dirt-proof baffle 14 prevents the evaporated film material from falling onto the ground and serves to prevent dirt from falling onto the ground.

[0036] In this embodiment, a home position photoelectric sensor 15 is provided on the first rotary motor mounting base 63. Preferably, the first rotary motor 61 is a servo motor. The home position photoelectric sensor 15 receives the motor pulse signal from the servo motor, determines the rotation position of the servo motor, and then sends it to the control center. The control center controls the rotation of the servo motor, thereby controlling the flip angle of the substrate holder 4. The power cable of the home position photoelectric sensor 15 is also led out through the conductive slip ring 10 and the conductive slip ring terminal block 11 to avoid wire tangling.

[0037] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the scope of the present invention, should fall within the protection scope of the present invention.

Claims

1. A coating workpiece stage with adjustable coating angle, characterized in that: The system includes a mounting plate (1), a flip shaft (2), a rotating shaft (3), a substrate holder (4), a substrate holder mounting assembly (5), a first rotary drive mechanism (6) for driving the flip shaft (2) to rotate, and a second rotary drive mechanism (7) for driving the rotating shaft (3) to rotate. The rotating shaft (3) is rotatably mounted on the mounting plate (1). The flip shaft (2) passes through the rotating shaft (3) and extends outward at both ends. The flip shaft (2) can rotate relative to the rotating shaft (3). The substrate holder mounting assembly (5) is located below the mounting plate (1). The bottom of the rotating shaft (3) is connected to the substrate holder mounting assembly (5) via a connecting assembly (8). The bottom of the flipping shaft (2) is provided with a driving gear ring (21). There are multiple substrate holders (4). The multiple substrate holders (4) are arranged circumferentially on the substrate holder mounting assembly (5) with the flipping shaft (2) as the center. Both ends of the substrate holder (4) are rotatably connected to the substrate holder mounting assembly (5) via rotating shafts (9). One end of the rotating shaft (9) is provided with a driven gear (91). The driven gear (91) meshes with the driving gear ring (21).

2. The coating angle adjustable coating workpiece stage according to claim 1, characterized in that: The first rotary drive mechanism (6) includes a first rotary motor (61), a first synchronous belt assembly (62), and a first rotary motor mounting base (63). The first rotary motor (61) is connected to the first driving pulley (621) of the first synchronous belt assembly (62), and the first driven pulley (622) of the first synchronous belt assembly (62) is connected to the rotating shaft (2). The first rotary motor (61) is mounted on the first rotary motor mounting base (63), and the first rotary motor mounting base (63) is located on the top of the rotating shaft (3).

3. The coating angle adjustable coating workpiece stage according to claim 2, characterized in that: The coating workpiece stage also includes a conductive slip ring (10) and a conductive slip ring terminal block (11). The inner ring terminal of the conductive slip ring (10) is connected to the top of the flip shaft (2), and the outer ring terminal is connected to the conductive slip ring terminal block (11). The conductive slip ring terminal block (11) is mounted on the mounting plate (1). The cable of the first rotary motor (61) is connected to the inner ring terminal of the conductive slip ring (10).

4. The coating angle adjustable coating workpiece stage according to any one of claims 1 to 3, characterized in that: The substrate holder mounting assembly (5) includes an inner mounting ring (51), an outer mounting ring (52), and multiple first connecting rods (53). The inner mounting ring (51) and the outer mounting ring (52) are connected by multiple first connecting rods (53). The connecting assembly (8) is connected to the inner mounting ring (51). The two ends of the substrate holder (4) are rotatably connected to the inner mounting ring (51) and the outer mounting ring (52) respectively through a rotating shaft (9). The driven gear (91) is located at one end of the rotating shaft (9) near the inner mounting ring (51).

5. The coating angle adjustable coating workpiece stage according to claim 4, characterized in that: The connecting assembly (8) includes a connecting plate (81) located below the mounting plate (1) and a second connecting rod (82). The upper end of the connecting plate (81) is connected to the bottom of the rotating shaft (3), and the lower end is connected to the inner mounting ring (51) through the second connecting rod (82).

6. The coating angle adjustable coating workpiece stage according to claim 4, characterized in that: Both the inner mounting ring (51) and the outer mounting ring (52) are provided with bearings (12), and the rotating shafts (9) at both ends of the substrate frame (4) are respectively connected to the corresponding bearings (12).

7. The coating angle adjustable coating workpiece stage according to claim 6, characterized in that: The bearing (12) is provided with a bearing pressure block (13).

8. The coating angle adjustable coating workpiece stage according to any one of claims 1 to 3, characterized in that: The second rotary drive mechanism (7) includes a second rotary motor (71), a reducer (72), a second synchronous belt assembly (73), and a second rotary motor mounting base (74). The second rotary motor (71) is connected to the reducer (72). The second driving pulley (731) of the second synchronous belt assembly (73) is connected to the reducer (72). The second driven pulley (732) of the second synchronous belt assembly (73) is connected to the rotating shaft (3). The second rotary motor (71) is mounted on the second rotary motor mounting base (74), which is located on the mounting plate (1).

9. The coating angle adjustable coating workpiece stage according to any one of claims 1 to 3, characterized in that: The substrate holder mounting assembly (5) is provided with a dirt-proof baffle (14).

10. The coating angle adjustable coating workpiece stage according to claim 2 or 3, characterized in that: The first rotary motor mounting base (63) is equipped with a home position photoelectric sensor (15).

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