Intelligent micro robot for sensing signals in human body and processing method

Abstract

The embodiment of the application discloses a kind of intelligent micro robot and processing method for sensing signal in human body, the intelligent micro robot for sensing signal in human body includes: the head sensor with sensing circuit in the inside, the sensing circuit includes transceiving coil, tuning capacitor and sensitive resistance;The transceiving coil is used to receive electromagnetic field energy in the MRI imaging process, and generates induced magnetic field based on the electromagnetic field energy to enhance local signal;The tuning capacitor is used to tune the sensing circuit to the operating frequency of MRI equipment;The sensitive resistance is used to convert environmental stimulus into resistance to modulate the sensing circuit;Micro robot carrier platform includes driving component and sensor platform, the head sensor is processed on sensor platform, and driving component is used to drive the head sensor under the action of external field.The intelligent micro robot method for sensing signal in human body solves the problem that the process for sensing signal in human body in the prior art can cause harm to the human body or the detection type is single and the sensitivity is insufficient.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro robots, in particular to an intelligent micro robot for sensing signals in a human body and a processing method. BACKGROUND

[0002] It is of great significance to obtain signals in a human body for daily health detection and disease diagnosis in biomedicine. However, there are few methods for measuring various signals in tissues at present, which can be roughly divided into three types: directly obtaining components in the body for detection and analysis in vitro; implantable sensors wirelessly transmitting signals in the body; and contrast agents combined with various medical imaging. The method of obtaining components in the body is the mainstream method currently used in hospitals, which is checked by blood sampling, biopsy or even surgical exploration. Implantable sensors are currently a hot research topic, which requires external equipment to wirelessly supply energy and convert the signals in the body into signals that can be read by external equipment, such as radio frequency, ultrasonic waves and several other mainstream signal methods. The contrast agent of medical imaging converts the corresponding signal change into a signal that can affect imaging, and then reflects the signal in the body in the final image.

[0003] However, the blood sampling method is difficult to find very early diseases because the markers of the lesions become scarce after metabolism and dilution. The biopsy method is difficult to obtain samples of some complex lesions, and it is also difficult for early small lesions. The surgical exploration method will cause damage to the human body. Implantable sensors face the difficulties of energy supply and signal transmission in the body. Energy will be greatly lost in the process of penetrating the human body, and too much power supply will also harm the human body. Limited by the difficulty of energy supply, the size of the implantable sensor is still relatively large, and it can only be implanted by surgery, which will also cause harm to the human body. The contrast agent method will not cause great harm to the human body, but it is also difficult to find early diseases because the size of the lesion is small at this time and the generated signal is small, and the resolution of imaging is also low. At the same time, different contrast agents need to be designed for different signals, and only one contrast agent can be used for single detection.

[0004] Therefore, there is an urgent need for an intelligent micro robot that can sense multiple signals in the human body without causing harm to the human body and can detect signals as close to the lesion as possible to obtain the highest detection signal strength and improve detection sensitivity. SUMMARY

[0005] The purpose of the embodiment of the present application is to provide an intelligent micro robot for sensing signals in a human body and a processing method, which solves the problem that the process of sensing signals in the human body in the prior art causes harm to the human body or the detection type is single and the sensitivity is insufficient.

[0006] To achieve the above object, the embodiment of the present application provides an intelligent micro robot for sensing signals in human body, which cooperates with an MRI device, and comprises:

[0007] The head sensor is internally provided with a sensing circuit, which comprises a transceiving coil, a tuning capacitor and a sensitive resistor;

[0008] The transceiving coil is used for receiving electromagnetic field energy in an MRI imaging process and generating an induced magnetic field based on the electromagnetic field energy to enhance a local signal;

[0009] The tuning capacitor is used for tuning the sensing circuit to a working frequency of the MRI device;

[0010] The sensitive resistor is used for converting environmental stimulation into resistance to modulate the sensing circuit;

[0011] The micro robot carrier platform comprises a driving component and a sensor platform, and the head sensor is processed on the sensor platform, and the driving component is used for driving the head sensor under the action of an external field.

[0012] On the basis of the above technical solution, the present application further comprises:

[0013] Further, the intelligent micro robot comprises an upper electrode, a first dielectric layer, a second dielectric layer, a lower electrode and a micro robot carrier from top to bottom.

[0014] Further, the first dielectric layer and the second dielectric layer are provided with a first via hole; and the first dielectric layer is further provided with a second via hole;

[0015] The first via hole penetrates through the first dielectric layer and the second dielectric layer to realize the closure of the sensing circuit;

[0016] The size of the second via hole is adjusted to tune the sensing circuit to the working frequency of the MRI device.

[0017] Further, the second dielectric layer is used for wrapping the upper electrode and the lower electrode.

[0018] Further, the size of the head sensor is less than 500 microns.

[0019] Further, the signals in the human body comprise optical signals, electrical signals and biomolecular signals.

[0020] An intelligent micro robot processing method for sensing signals in human body comprises:

[0021] Sensing material is grown on a micro robot carrier platform and patterned to obtain a sensitive resistor, and then a lower electrode is processed;

[0022] After the lower electrode is processed, the second dielectric layer material and the first dielectric layer material are grown, and the first via and the second via are obtained by etching;

[0023] Finally, the upper electrode is processed.

[0024] Further, the first dielectric layer adopts high dielectric constant material.

[0025] Further, the second dielectric layer adopts conventional dielectric material.

[0026] The embodiment of the present application has the following advantages:

[0027] In the present application, the intelligent micro robot sensing the signal in the human body cooperates with the MRI device, and the head sensor with a sensing circuit is internally provided, the sensing circuit includes a transceiver coil, a tuning capacitor and a sensitive resistor; the transceiver coil is used for receiving the electromagnetic field energy in the MRI imaging process, and generating an induced magnetic field based on the electromagnetic field energy to enhance the local signal; the tuning capacitor is used for tuning the sensing circuit to the working frequency of the MRI device; the sensitive resistor is used for converting the environmental stimulus into resistance to modulate the sensing circuit; the micro robot carrier platform includes a driving component and a sensor platform, and the head sensor is processed on the sensor platform, and the driving component is used for driving the head sensor under the action of an external field.

[0028] The non-invasive access to the body for patrol and detection of different signals in the human body for disease diagnosis can be realized, wherein the signals in the human body include various physiological markers, light signals and electrical signals. The intelligent micro robot can wirelessly transmit the signals in the body without a board-mounted power supply. The micro robot can approach the lesion as much as possible to obtain the highest detection signal strength to improve the detection sensitivity, and the problem that the process of sensing the signal in the human body in the prior art causes harm to the human body or the detection type is single and the sensitivity is insufficient is solved. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only exemplary, and those skilled in the art can also obtain other implementation drawings according to the provided drawings without creative labor.

[0030] The structures, proportions, sizes, etc. shown in the specification are only used to cooperate with the content disclosed in the specification, to be understood and read by those skilled in the art, and are not used to limit the conditions that can be implemented by the application, so they do not have technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effect and purpose that can be achieved by the application, should still fall within the scope of the technology disclosed by the application.

[0031] Figure 1 The first structure diagram of the intelligent micro robot for sensing signals in the human body of the application;

[0032] Figure 2 The second structure diagram of the intelligent micro robot for sensing signals in the human body of the application;

[0033] Figure 3 The third structure diagram of the intelligent micro robot for sensing signals in the human body of the application.

[0034] Figure 4 The fourth structure diagram of the intelligent micro robot for sensing signals in the human body of the application;

[0035] Figure 5 The layered structure diagram of the intelligent micro robot for sensing signals in the human body of the application.

[0036] The reference signs are:

[0037] Head sensor 10, transceiver coil 101, tuning capacitor 102, sensitive resistor 103, magnetic tail 20, upper electrode 30, first dielectric layer 40, first via 401, second via 402, second dielectric layer 50, lower electrode 60, head sensor platform 70, gate 80, MRI device 90. DETAILED DESCRIPTION

[0038] The embodiments of the application are described below by specific examples, and those skilled in the art can easily understand other advantages and effects of the application from the content disclosed in the specification. Obviously, the described examples are part of the examples of the application, not all examples. Based on the examples in the application, all other examples obtained by those skilled in the art without creative labor fall within the scope of the application.

[0039] EMBODIMENT

[0040] Figures 1-5 The embodiment diagram of the intelligent micro robot for sensing signals in the human body of the application is shown as Figures 1-5 The intelligent micro robot for sensing signals in the human body provided by the embodiment of the application includes:

[0041] The head sensor 10 with internal sensing circuit, which includes a transceiver coil 101, a tuning capacitor 102 and a sensitive resistor 103, cooperates with an MRI (Magnetic Resonance Imaging) device.

[0042] The transceiver coil 101 is used to receive electromagnetic field energy in the MRI imaging process and generate an induced magnetic field based on the electromagnetic field energy to enhance the local signal.

[0043] The tuning capacitor 102 is used to tune the sensing circuit to the operating frequency of the MRI device 90 to achieve maximum signal strength.

[0044] The sensitive resistor 103 is used to convert environmental stimuli into resistance to modulate the sensing circuit and further affect the enhancement effect on the local signal.

[0045] A magnetic tail 20 is connected to the head sensor 10 through the head sensor platform 70 to drive the intelligent micro robot.

[0046] The sensing principle of the micro robot is based on the local signal enhancement in MRI imaging. The detected MRI signal amplitude is related to the flip angle of the excitation pulse, and the flip angle is proportional to the local radio frequency field during the excitation pulse. Therefore, wireless signal transmission can be achieved by enhancing the local radio frequency field in MRI imaging, and no power supply is needed. The micro robot drive relies on external drive control.

[0047] The intelligent micro robot includes an upper electrode 30, a first dielectric layer 40, a second dielectric layer 50, a lower electrode 60 and a head sensor platform 70 from top to bottom.

[0048] The first dielectric layer 40 and the second dielectric layer 50 are provided with a first via hole 401; the first dielectric layer 40 is also provided with a second via hole 402.

[0049] The first dielectric layer 40 is made of high dielectric constant material and has a thin thickness to obtain a large capacitance for tuning the sensing circuit. The adjustment of the tuning capacitor 102 is obtained by adjusting the size of the second via hole 402 in the first dielectric layer 40. The second dielectric layer 50 is made of conventional dielectric material and has a large thickness to completely wrap the lower electrode 60 to prevent the upper electrode 30 from short circuiting. The first via hole 401 completely penetrates the two dielectric layers to realize the closure of the sensing circuit. The sensitive resistor 103 is located at the lower electrode 60 and can convert the changes of various light, electricity and physiological markers into resistance. The human body signals include light signals, electrical signals and biological molecule signals.

[0050] The application designs an intelligent micro robot for sensing signals in the human body, which can realize non-invasive entry into the human body for patrol and detection of different signals in the human body for disease diagnosis, wherein the signals in the human body include various physiological markers, light signals and electrical signals. The intelligent micro robot can wirelessly transmit the signals in the human body without a board-mounted power supply. The micro robot can approach the lesion as much as possible to obtain the highest detection signal strength to improve the detection sensitivity. The problems in the prior art that sensing signals in the human body can cause harm to the human body or the detection type is single and the sensitivity is insufficient are solved.

[0051] Based on the electromagnetic enhancement principle in MRI, no power supply is needed, and the size is reduced. The size of the whole intelligent micro robot is small, the sensor size is less than 500 microns (even 100 microns), and the intelligent micro robot can non-invasively enter the human body for sensing. Under the external driving, the micro robot can controllably access different areas for sensing. Compared with the existing method, the micro robot can approach the lesion as much as possible, and for early diseases, the diagnostic sensitivity can be improved because the marker concentration in the blood is still low. The sensitive resistor 103 can adopt various sensors developed very maturely for various signal detection, including light, electricity, different markers, which is of great significance for researchers and medical staff to obtain information in the human body for scientific research and diagnosis. In addition, MRI can also be used for navigation of the micro robot to realize the purpose of navigation and sensing at the same time, reduce the external equipment, and can enhance the signal of navigation and positioning.

[0052] The application provides a processing method of an intelligent micro robot for sensing signals in the human body, which comprises the following steps:

[0053] S101, growing and patterning a sensitive material on a micro robot carrier platform to obtain a sensitive resistor 103, and then processing a lower electrode 60;

[0054] S102, after the processing of the lower electrode 60 is completed, growing a second dielectric layer 50 material and a first dielectric layer 40 material, and obtaining a first via hole 401 and a second via hole 402 through an etching method;

[0055] S103, finally processing an upper electrode 30.

[0056] The first dielectric layer 40 is made of a high dielectric constant material.

[0057] The second dielectric layer 50 is made of a conventional dielectric material.

[0058] The intelligent micro robot for sensing signals in the human body can be driven through a magnetic tail 20 or a magnetic layer. The head sensor can sense various signals in the human body by replacing the sensitive resistor, and the signals in the human body include light signals, electrical signals and biomolecule signals.

[0059] Preferably, the intelligent micro-robot capable of sensing the signal in the human body includes: an intelligent micro-robot capable of sensing a light signal driven by the magnetic tail 20, an intelligent micro-robot capable of sensing an electrical signal driven by the magnetic tail 20, and an intelligent micro-robot capable of sensing a biomolecule driven by the magnetic layer.

[0060] Embodiment 1:

[0061] The intelligent micro-robot capable of sensing a light signal driven by the magnetic tail 20 uses a semiconductor material silicon as a sensitive resistor 103, hafnium oxide as the material of the second dielectric layer 50, silicon oxide as the material of the first dielectric layer 40, a silicon nitride / iron double-layer spiral as the magnetic tail of the micro-robot as a driving component for driving, and a layer of silicon oxide connected with the magnetic tail as the head sensor platform 70.

[0062] The processing process is as follows:

[0063] First, the upper device silicon layer (200 nm) of the silicon-on-insulator wafer is patterned by photolithography, development, reactive ion etching, and glue removal to obtain a silicon channel;

[0064] The lower electrode 60 (200 nm Au) is obtained by photolithography, development, thermal evaporation, and solvent removal;

[0065] The 10 nm hafnium oxide as the second dielectric layer 50 is deposited by atomic layer deposition, and the via hole is obtained by photolithography, reactive ion etching, and glue removal;

[0066] The 100 nm silicon oxide as the first dielectric layer 40 is deposited by electron beam evaporation, and the via hole is obtained by photolithography, development, reactive ion etching, and glue removal;

[0067] The 100 nm gold is thermally evaporated as a plating seed layer, then the patterned 2 μm thick upper electrode 30 is obtained by photolithography, development, and gold plating, and the excess seed layer metal is removed by wet etching;

[0068] The silicon oxide layer (100 nm) of the silicon-on-insulator wafer is patterned by photolithography, development, etching, and glue removal to form the head platform of the micro-robot;

[0069] The 100 nm silicon nitride is grown by physical vapor deposition and patterned by photolithography, development, etching, and glue removal to obtain a belt-shaped stripe;

[0070] The 100 nm iron as the magnetic layer is deposited on the belt-shaped silicon nitride by photolithography, development, electron beam evaporation, and solvent removal;

[0071] The entire device is immersed in KOH solution to etch the lower silicon of the silicon-on-insulator, which releases the micro-robot into the solution, wherein the ribbon-shaped silicon nitride and iron layer of the tail self-rolls to form a spiral tail.

[0072] Example 2

[0073] The processing of the intelligent micro-robot driven by the magnetic tail 20 and capable of sensing an electrical signal is basically the same as the processing of the intelligent micro-robot driven by the magnetic tail 20 and capable of sensing a light signal, with the difference that there is an additional gate electrode 80 (as shown in Figure 4

[0074] Example 3

[0075] The intelligent micro-robot driven by the magnetic layer and capable of sensing a biomolecule uses graphene as the sensitive resistor 103 and replaces the magnetic tail with the magnetic layer below the head sensor platform 70 as the driving component by modifying the graphene channel with a corresponding biological probe.

[0076] The processing method is as follows:

[0077] First, a 20-nm-thick layer of aluminum oxide is deposited on a silicon wafer as a sacrificial layer; 100-nm-thick Fe is obtained as a magnetic material by using photolithography, development, electron beam evaporation, and dissolution;

[0078] Patterned silicon oxide is obtained as a micro-robot platform by using electron beam deposition, photolithography, development, etching, and glue removal;

[0079] Graphene is transferred to the platform and patterned;

[0080] The lower electrode 60 (200-nm-thick Au) is obtained by using photolithography, development, thermal evaporation, and dissolution;

[0081] 10-nm-thick hafnium oxide is obtained as a second dielectric layer 50 by atomic layer deposition, and a via is obtained by photolithography, reactive ion etching, and glue removal;

[0082] 100-nm-thick silicon oxide is obtained as a first dielectric layer 40 by electron beam evaporation, and a via is obtained by photolithography, development, reactive ion etching, and glue removal;

[0083] 100-nm-thick gold is thermally evaporated as an electroplating seed layer, and then patterned 2-μm-thick upper electrode 30 is obtained by photolithography, development, and gold electroplating, and the excess seed layer metal is removed by wet etching;

[0084] The graphene channel is modified with a biological probe;

[0085] The entire device is immersed in KOH solution to etch the aluminum oxide sacrificial layer, which releases the micro-robot into the solution.

[0086] ​The device embodiments described above are merely illustrative, and although specific embodiments of the application have been described herein, the scope of the application should not be limited to the specific embodiments. Various modifications and changes can be made to the embodiments without departing from the spirit and scope of the application. Accordingly, modifications and improvements should be included within the scope of the application as defined in the following claims.

Claims

1. An intelligent micro robot that senses signals in the human body, in cooperation with an MRI device, characterized by, The application relates to a micro-robot carrier platform and a method for manufacturing the same. The head sensor is internally provided with a sensing circuit, which comprises a transceiving coil, a tuning capacitor and a sensitive resistor. The size of the head sensor is less than 500 microns. The transceiving coil is used for receiving electromagnetic field energy in an MRI equipment imaging process and generating an induced magnetic field based on the electromagnetic field energy to enhance a local signal. The tuning capacitor is used for tuning the sensing circuit to the working frequency of the MRI equipment. The sensitive resistor is used for converting environmental stimulation into resistance to modulate the sensing circuit. The micro-robot carrier platform comprises a driving component and a sensor platform, the head sensor is processed on the sensor platform, and the driving component is used for driving the head sensor under external field control. The intelligent micro-robot comprises an upper electrode, a first dielectric layer, a second dielectric layer, a lower electrode and the micro-robot carrier platform from top to bottom, and the first dielectric layer is provided with a second via hole. The size of the second via hole is adjusted to tune the sensing circuit to the working frequency of the MRI equipment.

2. The intelligent micro robot for sensing signals in a human body according to claim 1, wherein The first dielectric layer and the second dielectric layer are provided with a first via hole. The first via hole is used for penetrating through the first dielectric layer and the second dielectric layer to realize the closure of the sensing circuit.

3. The smart micro robot for sensing signals in a human body according to claim 2, wherein The second dielectric layer is used for completely covering the lower electrode to realize insulation.

4. The smart micro robot for sensing signals in a human body according to claim 1, wherein The human body signals comprise light signals, electric signals and biomolecule signals.

5. The method of processing the intelligent microrobot for sensing the signal in the human body according to claim 2, characterized in that, The application relates to a micro-robot carrier platform and a method for manufacturing the same. The sensitive resistor is obtained by growing and patterning a sensitive material on the micro-robot carrier platform, and then processing the lower electrode. After the lower electrode is processed, the second dielectric layer and the first dielectric layer are grown, and the first via hole and the second via hole are obtained by etching. Finally, the upper electrode is processed.

6. The method of claim 5, wherein the intelligent micro robot for sensing a signal in a human body is manufactured by the steps of: The first dielectric layer adopts a high dielectric constant material. ​ 7. The method of claim 5, wherein the intelligent micro robot for sensing a signal in a human body is manufactured by the steps of: The second dielectric layer adopts a conventional dielectric material. ​

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