elevated conveyor vehicles and conveyor vehicle systems

Abstract

The present invention relates to an elevated transport vehicle and a transport vehicle system. The elevated transport vehicle (1) includes: a take-up roller (63) for lifting a lifting unit (7) by taking up and releasing a plurality of lifting components (B); at least one guide roller (65B) for winding the lifting components (B) released from the take-up roller (63); a main body (61) for supporting the take-up roller (63) and the guide roller (65B); at least one position adjustment unit (67) for moving the lifting components (B) toward the connection portion of the lifting unit (7) in the lifting direction by moving the guide roller (65) relative to the main body (61); and a control unit (8) for controlling the movement of the position adjustment unit (67) toward the guide roller (65B) based on information related to the tilt of the lifting unit (7).

Description

Technical Field

[0001] One aspect of the present invention relates to an elevated transport vehicle and a transport vehicle system. Background Technology

[0002] A type of elevated conveyor vehicle is known, comprising a traveling section that travels along tracks laid on a ceiling or similar surface, and a lifting section having a handle for transferring items to a transfer section such as a shelf or loading port. The lifting section is suspended and held by multiple lifting components, and is raised and lowered by winding or unwinding these lifting components.

[0003] For example, Patent Document 1 discloses an overhead conveyor in which the positions of the two lifting components relative to the fixed end of the roller and the unwinding angle of the two lifting components extending from the winding surface of the roller are set such that the cumulative winding difference per revolution of the roller caused by the timing deviation of the winding transfer of the two double-wound lifting components (lifting belt) to the next layer is lower than a predetermined value that can maintain the lifting section (platform) at the required level. According to this overhead conveyor, the winding difference of the two lifting components can be suppressed within an allowable range, and items can be held horizontally regardless of the lifting height.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 10-194410 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] However, the tilting of the lifting unit is caused not only by the timing of the double-wound lifting component winding up to the next layer, but also sometimes by thickness errors in the lifting component or diameter errors in the winding roller. Therefore, there is a desire to adjust the tilt of the lifting unit more easily. Furthermore, the tilting of the lifting unit is not only desired to hold the item horizontally, but also to hold the item at a desired angle. To meet these desires, it is necessary to have a configuration that allows for proper tilt adjustment of the lifting unit without manual intervention.

[0009] Therefore, one objective of the present invention is to provide an elevated transport vehicle and a transport vehicle system that can adjust the tilt of the lifting unit appropriately without human intervention.

[0010] Methods for solving problems

[0011] One embodiment of the overhead conveyor of the present invention is a lifting unit having a gripping part for holding an item, which is raised and lowered by a plurality of lifting components. The overhead conveyor includes: a take-up roller for raising and lowering the lifting unit by taking up and releasing the plurality of lifting components; at least one guide roller for winding the lifting components released from the take-up roller; a main body for supporting the take-up roller and the guide roller; at least one position adjustment unit for moving the lifting components toward the connecting part of the lifting unit in the lifting direction by moving the relative position of the guide roller with respect to the main body; and a control unit for controlling the movement of the guide roller by the position adjustment unit based on information related to the tilt of the lifting unit.

[0012] In this elevated transport vehicle, the tilt of the lifting unit can be adjusted by activating the position adjustment unit. Then, the position adjustment unit automatically adjusts based on information related to the tilt of the lifting unit, thus enabling the lifting unit to be adjusted to the desired tilt. In other words, the elevated transport vehicle of the present invention can appropriately adjust the tilt of the lifting unit without manual intervention.

[0013] In one embodiment of the invention, the elevated conveyor vehicle may further include a storage unit that stores the amount of movement of the guide rollers determined based on tilt-related information, or tilt-related information. The control unit controls the movement of the guide rollers by the position adjustment unit based on the aforementioned amount of movement or tilt-related information. In this configuration, even if tilt-related information of the lifting unit is not always obtained, the lifting unit can be adjusted to the desired tilt based on information stored in the storage unit that is considered to represent the current state of the lifting unit.

[0014] In one embodiment of the overhead conveyor of the present invention, the storage unit stores movement amount or tilt-related information for each transfer unit that transfers items between the overhead conveyor and the vehicle. The control unit controls the movement of the guide rollers by the position adjustment unit based on the movement amount or tilt-related information of each transfer unit. In this configuration, the tilt of the lifting unit can be adjusted to be optimal for each transfer unit.

[0015] In one embodiment of the invention, the elevated transport vehicle may further include an acquisition unit disposed on the lifting unit to acquire information related to tilting. In this configuration, the tilting of the lifting unit can be acquired with a simple structure.

[0016] In one embodiment of the invention, the elevated transport vehicle may further include an acquisition unit disposed on the lifting unit, which acquires tilt-related information. The acquisition unit periodically acquires tilt-related information, and a storage unit stores the amount of movement of the guide rollers determined based on the periodically acquired tilt-related information, or the periodically acquired tilt-related information itself. In this configuration, tilt-related information of the lifting unit that closely approximates the current state is acquired, thus enabling the lifting unit to be appropriately adjusted to the desired tilt.

[0017] One embodiment of the present invention provides a transport vehicle system comprising: the aforementioned elevated transport vehicle; an acquisition unit, separately disposed from the elevated transport vehicle, for acquiring tilt-related information; and a communication unit for transmitting the tilt-related information acquired by the acquisition unit to the elevated transport vehicle. In this configuration, without significant modifications to the elevated transport vehicle, the tilt of the lifting units of each elevated transport vehicle can be appropriately adjusted without manual intervention.

[0018] One embodiment of the conveyor system of the present invention may further include a control device that enables the elevated conveyor to periodically move to a position where the acquisition unit can acquire tilt-related information, and a communication unit periodically transmits the tilt-related information acquired by the acquisition unit to the elevated conveyor. In this configuration, by acquiring tilt-related information of the lifting unit that is close to the current state, the lifting unit can be appropriately adjusted to the desired tilt.

[0019] Invention Effects

[0020] According to one aspect of the present invention, the tilt of the lifting unit can be adjusted appropriately without manual intervention. Attached Figure Description

[0021] Figure 1 This is a side view of an elevated transport vehicle in one implementation.

[0022] Figure 2 It maintains the main view of the cell.

[0023] Figure 3 This is a three-dimensional view of the first and second buffer mechanisms.

[0024] Figure 4 This is the front view of the lifting drive unit.

[0025] Figure 5 This is a side view of the lifting drive unit.

[0026] Figure 6 (A) and Figure 6 (B) is the main view showing the operation of the lifting drive unit.

[0027] Figure 7 (A) and Figure 7 (B) is a side view showing the operation of the lifting drive unit.

[0028] Figure 8 It is a three-dimensional view of the measuring unit and the unit being measured.

[0029] Figure 9 This is a schematic diagram showing the measurement objects of each distance sensor when the measuring unit measures the measured unit.

[0030] Figure 10 (A) to (C) are schematic diagrams representing the method by which the unit controller calculates the state of the elevated transport vehicle.

[0031] Figure 11 This is a block diagram representing the functional structure of the transport vehicle system.

[0032] Figure 12 (A) is a side view of the maintenance platform. Figure 12 (B) indicates from Figure 12 A top view of the maintenance platform viewed from direction B in (A).

[0033] Figure 13 (A) and Figure 13 (B) is a diagram illustrating the sequence of using a maintenance platform to obtain the status of the overhead conveyor.

[0034] Figure 14 (A) and Figure 14 (B) is a diagram illustrating the sequence of using a maintenance platform to obtain the status of the overhead conveyor.

[0035] Figure 15 This diagram illustrates the sequence of steps for obtaining the status of the overhead conveyor using a maintenance platform.

[0036] Figure 16 This diagram illustrates a variation of the means of obtaining the state of an elevated transport vehicle. Detailed Implementation

[0037] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, in the description of the drawings, the same reference numerals are used for the same elements and repeated descriptions are omitted.

[0038] One embodiment of the conveyor system 100 includes multiple overhead conveyor vehicles 1 (see reference). Figure 1 ), forming the track 20 of the elevated transport vehicle 1 (refer to Figure 1 ), area controller (control device) 110 (refer to) Figure 11 ), Measurement unit (acquisition section) 80 (reference) Figure 11 ), and the measured unit (acquisition unit) 90 (refer to) Figure 8 At least one of the multiple overhead conveyor vehicles 1 is equipped with a direct-acting mechanism (position adjustment unit) 67 for adjusting the tilt of the holding unit (lifting unit) 7 relative to the horizontal plane (see reference). Figure 4 ).

[0039] like Figure 1As shown, in one embodiment, the overhead conveyor 1 travels along a track 20 laid near the ceiling of a cleanroom for manufacturing semiconductor devices. In one embodiment, the overhead conveyor 1 transports FOUP (Front Opening Unified Pod) (items) 200 containing multiple semiconductor wafers, and transfers FOUP 200 to loading ports (transfer sections) 300 provided in processing apparatuses that perform various processing on semiconductor wafers.

[0040] like Figure 1 as well as Figure 11 As shown, the elevated transport vehicle 1 includes a frame unit 2, a travel unit 3, a lateral unit 4, a θ unit 5, a lifting drive unit 6, a holding unit 7, a transport vehicle controller (control unit) 8, a storage unit 8A, and a communication unit 9. The frame unit 2 has a central frame 15, a front frame 16, and a rear frame 17. The front frame 16 extends downward from the front end of the central frame 15 (the front side in the travel direction of the elevated transport vehicle 1). The rear frame 17 extends downward from the rear end of the central frame 15 (the rear side in the travel direction of the elevated transport vehicle 1).

[0041] The traveling unit 3 is positioned above the central frame 15. The traveling unit 3 receives power non-contactly from a high-frequency current line laid along the track 20, for example, and thus travels along the track 20. The lateral unit 4 is positioned below the central frame 15. The lateral unit 4 causes the θ unit 5, the lifting drive unit 6, and the holding unit 7 to move laterally (to the side of the traveling direction of the overhead conveyor 1). The θ unit 5 is positioned below the lateral unit 4. The θ unit 5 causes the lifting drive unit 6 and the holding unit 7 to rotate in the horizontal plane.

[0042] The lifting drive unit 6 is positioned below the θ unit 5. The lifting drive unit 6 causes the holding unit 7 to move up and down. The holding unit 7 is positioned below the lifting drive unit 6. The holding unit 7 holds the flange 201 of the FOUP 200.

[0043] The conveyor controller 8 is located on the central frame 15. The conveyor controller 8 is an electronic control unit consisting of a CPU (Central Processing Unit), ROM (Read Only Memory), and RAM (Random Access Memory). The conveyor controller 8 controls various parts of the elevated conveyor 1.

[0044] The overhead conveyor 1, configured as described above, operates as follows, as an example. When transferring FOUP 200 from loading port 300 to overhead conveyor 1, the overhead conveyor 1, which does not hold FOUP 200, stops at a predetermined position above loading port 300. If the position of the holding unit 7, which descends from the stopping position, deviates from the predetermined position for loading port 300 (FOUP 200 placed in loading port 300), the horizontal position and horizontal angle of the holding unit 7 are adjusted by driving the lateral unit 4 and the θ unit 5. In addition, if the holding unit 7, which descends by releasing the belt (lifting component) B, tilts relative to the horizontal plane, the linear mechanism 67 (see reference) is activated. Figure 4 The work is to adjust and maintain the tilt of unit 7.

[0045] The transport vehicle controller 8 adjusts the horizontal position and angle of the holding unit 7, as well as the tilt of the holding unit 7, based on the settings stored in the storage unit 8A. Next, the lifting drive unit 6 lowers the holding unit 7, which holds the flange 201 of the FOUP 200 placed in the loading port 300. Then, the lifting drive unit 6 raises the holding unit 7 to its rising position, positioning the FOUP 200 between the front frame 16 and the rear frame 17. Finally, the overhead transport vehicle 1, holding the FOUP 200, begins to move.

[0046] On the other hand, when transferring FOUP 200 from the overhead conveyor 1 to the loading port 300, the overhead conveyor 1, holding FOUP 200, stops at a predetermined position above the loading port 300. If the position of the holding unit 7 (FOUP 200) descending from the stopping position deviates from a predetermined position relative to the loading port 300, the horizontal position and horizontal angle of the holding unit are adjusted by driving the lateral unit 4 and the θ unit 5. Furthermore, if the holding unit 7, descending by releasing belt B, tilts relative to the horizontal plane, the linear mechanism 67 (see reference...) is activated... Figure 4 The work is to adjust and maintain the tilt of unit 7.

[0047] The transport vehicle controller 8 adjusts the horizontal position and angle of the holding unit 7, as well as the tilt of the holding unit 7, based on the settings stored in the storage unit 8A. Next, the lifting drive unit 6 lowers the holding unit 7, placing the FOUP 200 into the loading port 300, and the holding unit 7 releases its grip on the flange 201 of the FOUP 200. Then, the lifting drive unit 6 raises the holding unit 7 to its rising position. Finally, the overhead transport vehicle 1, without the FOUP 200 held, begins to move.

[0048] Next, the structure of holding unit 7 will be described in detail. For example... Figure 1 as well as Figure 2As shown, the holding unit 7 includes a base 11, a pair of grippers (holding parts) 12, 12, and a frame 13. The pair of grippers 12, 12 are supported by the base 11 in a manner that allows them to open and close in the horizontal direction. The pair of grippers 12, 12 are opened and closed by a drive motor (not shown) and a linkage mechanism (not shown). In this embodiment, when the pair of grippers 12, 12 are in the open state, the height position of the holding unit 7 is adjusted so that the holding surface of the gripper 12 is lower than the height of the lower surface of the flange 201. Then, by closing the pair of grippers 12, 12 in this state, the holding surface of the gripper 12 moves downward below the lower surface of the flange 201, and by raising the lifting drive unit 6 in this state, the flange 201 is held (held) by the pair of grippers 12, 12, thereby supporting the FOUP 200. In the holding unit 7, the base 11 forms the bottom wall of the frame 13 and its position relative to the frame 13 is fixed.

[0049] like Figure 3 As shown, in this embodiment, the holding unit 7 is connected to one end of the strap B via a first buffer mechanism 50 and a second buffer mechanism 40. Here, the first buffer mechanism 50 and the second buffer mechanism 40 will be described in detail. The first buffer mechanism 50 and the second buffer mechanism 40 are connected to the strap B and the holding unit 7 (see reference 40). Figure 1 The mechanism that connects the driving unit 3 is a mechanism that suppresses the transmission of vibrations from the driving unit 3 to the FOUP200 when it is driving or when the unit 7 is raised or lowered.

[0050] The first buffer mechanism 50 has an elastic member 58 that supports the base 11 from below in the vertical direction, enabling it to move along the vertical direction. When viewed from above in the vertical direction, it is positioned on one side in the width direction orthogonal to the travel direction of the overhead conveyor 1. In this embodiment, the first buffer mechanism 50 is located on the right side of the holding unit 7 in the left-right direction. The first buffer mechanism 50 includes a connecting member 51, a swing member 53, a first main body member 54, a second main body member 56, and a pair of elastic members 58, 58. Furthermore, in this embodiment, the left-right direction refers to the left-right direction when viewing the overhead conveyor 1 from the front in the travel direction.

[0051] Connecting member 51 is mounted on the member marked B. Swinging member 53 is connected to connecting member 51. Swinging member 53 is connected to connecting member 51 via pin member 52 in a manner capable of rotation in both directions. First main body member 54 is a generally L-shaped member with a flat bottom. The upper end of first main body member 54 is connected to swing member 53. The bottom of first main body member 54 is connected to second main body member 56 via bolts or the like. Second main body member 56 supports elastic member 58 from below and supports the bottom of first main body member 54.

[0052] A pair of elastic members 58, 58 are helical springs with a specified spring constant. The pair of elastic members 58, 58 are supported on the second main body member 56 and support the base 11 from below. The lower end of the elastic member 58 is fixed to the second main body member 56. The upper end of the elastic member 58 is not fixed to the base 11 but supports the base 11 through contact. That is, when the pair of elastic members 58, 58 are in a contracted state, respectively in contact with both the second main body member 56 and the base 11, a force is applied to the second main body member 56 and the base 11 in a direction away from each other. The elastic member 58 has the function of reducing vibrations transmitted between the contacting parts. Alternatively, it can be fixed to the base 11 and configured to be able to contact and separate relative to the second main body member 56.

[0053] The second buffer mechanism 40 has an elastic member 48 that supports the base 11 from below in the vertical direction, enabling it to move along the vertical direction. When viewed from above in the vertical direction, it is positioned on the opposite side of the width direction (opposite to the first buffer mechanism 50 in the width direction) in the direction of travel of the overhead conveyor 1. In this embodiment, the second buffer mechanism 40 is located on the left side of the holding unit 7 in the left-right direction. The second buffer mechanism 40 includes connecting members 41, 41, a swing member 43, a third main body member 45, a fourth main body member 46, a limiting member 47, and a pair of elastic members 48, 48.

[0054] Connecting parts 41, 41 are parts with "B, B" attached. The swinging part 43 connects the pair of connecting parts 41, 41 to the third main body part 45. The pair of connecting parts 41, 41 and the swinging part 43 are connected in a bidirectional rotatable manner and are connected via a pair of pins 42, 42. The swinging part 43 and the third main body part 45 are connected in a bidirectional rotatable manner and are connected via a pin 44. The fourth main body part 46 supports the elastic parts 48, 48 from below.

[0055] A pair of elastic members 48, 48 are helical springs with a specified spring constant. The pair of elastic members 48, 48 are supported on a fourth main body member 46 and support a base 11 from below. The lower end of the elastic member 48 is fixed to the fourth main body member 46. A limiting member 47 limits the base 11 from separation from the fourth main body member 46 by a specified distance. More specifically, the limiting member 47 locks the upper surface of the base 11 that is to be separated from the fourth main body member 46 by a specified distance. The upper end of the elastic member 48 is not fixed to the base 11 but supports the base 11 through contact. That is, when the pair of elastic members 48, 48 are in contact with both the fourth main body member 46 and the base 11, a force is applied to the fourth main body member 46 and the base 11 in a direction away from each other. The elastic member 48 has the function of reducing vibrations transmitted between the contacting components. Alternatively, the elastic member 48 may be fixed to the base 11 and configured to be able to contact and separate from the fourth main body member 46.

[0056] Additionally, although not shown, the holding unit 7 may also have a linkage mechanism that connects the first buffer mechanism 50 and the second buffer mechanism 40, and operates in such a way that the distance between the first buffer mechanism 50 and the base 11 in the vertical direction and the distance between the second buffer mechanism 40 and the base 11 in the vertical direction are close to each other.

[0057] Next, the structure of the lifting drive unit 6 will be described in detail. For example... Figure 4 as well as Figure 5 As shown, the lifting drive unit 6 has a base (main body) 61, a support 62, four (or more) take-up rollers 63, a drive motor (take-up drive unit) 63A, a first idler roller (guide roller) 65A, a second idler roller (guide roller) 65B, a third idler roller (guide roller) 64, a linear motion mechanism (position adjustment unit) 67, a swinging component 68, and four (or more) belts B.

[0058] The base 61 supports the take-up rollers 63, the first idler roller 65A, and the third idler roller 64 via the support portion 62. The support portion 62 supports the four take-up rollers 63 so that they can rotate. The four take-up rollers 63 are arranged in a front-to-back direction and are driven by the drive motor 63A to take up or unwind the four belts B respectively. The support portion 62 supports the first idler roller 65A and one end 68A of the swing member 68 so that it can swing.

[0059] Each take-up roller 63 is rotatably mounted on the base 61 via a support 62. A drive motor 63A is the drive source for rotating each take-up roller 63 and is fixed to the base 61. The four take-up rollers 63 are connected by a common rotating shaft (not shown) or by a linkage mechanism (not shown), and are thus driven by a single drive motor 63A.

[0060] One end of each belt B is connected to the holding unit 7, and the other end of each belt B is connected to each take-up roller 63. In this embodiment, the four belts B are configured to suspend the holding unit 7 at three points. More specifically, the holding unit 7 is suspended by the four belts B, two of which are connected via a connecting member 41 to a swinging member 43 (see reference 43) that is swingably disposed relative to the holding unit 7. Figure 3 The remaining two strips of the four strips are connected via the connecting member 51 to two swinging members 53 that are swingable relative to the holding unit 7.

[0061] The first idler roller 65A and the second idler roller 65B guide the movement of the belt B connected to the first buffer mechanism 50. There are two belts B connected to the first buffer mechanism 50, and the first idler roller 65A and the second idler roller 65B are respectively provided for each belt B. The first idler roller 65A is provided on the support portion 62 and does not move relative to the base 61. The second idler roller 65B is provided on the swing member 68 (described later) and moves relative to the base 61. The configuration of the second idler roller 65B moving relative to the base 61 will be explained later. The third idler roller 64 guides the movement of the belt B connected to the second buffer mechanism 40. There are two belts B connected to the second buffer mechanism 40, and the third idler roller 64 is also provided for each belt B.

[0062] The linear motion mechanism 67 mainly comprises a drive motor 67A, a threaded shaft 67B, and a lead screw nut 67C, and is a known mechanism that converts the rotational motion of the drive motor 67A into linear motion. The linear motion mechanism 67 is fixed to the base 61 via a bracket 66. The lead screw nut 67C, which moves along the threaded shaft 67B driven by the drive motor 67A, is connected to the other end 68B of the oscillating member 68. In this embodiment, the oscillating member 68 oscillates as the lead screw nut 67C moves along the threaded shaft 67B, and the second idler roller 65B moves relative to the base 61 as the oscillating member 68 oscillates. Thus, the linear motion mechanism 67 moves the position of the second idler roller 65B, causing the connecting portion (one end of the belt B) of the belt B to the holding unit 7 (first buffer mechanism 50) to move in the lifting direction. Alternatively, the oscillating member 68 can be replaced with a vertically movable member cantilevered by the linear motion mechanism 67, and this member can be moved vertically, thereby causing the position of the second idler roller 65B to move linearly.

[0063] For example, such as Figure 6 As shown in (A), if the direct-acting mechanisms 67 of both sides are activated to move the second idler roller 65B upward (towards the base 61), the right side of the holding unit 7 can be tilted upward. Additionally, for example, as... Figure 6As shown in (B), if the direct drive mechanism 67 of both sides is activated to move the second idler roller 65B downward (away from the base 61), the right side of the holding unit 7 can be tilted downward.

[0064] Additionally, for example, such as Figure 7 As shown in (A), if one of the two direct-acting mechanisms 67 (the front one) is activated to move the second idler roller 65B upward (towards the base 61), the front side of the holding unit 7 can be tilted upward. If it is desired to tilt the front side of the holding unit 7 upward, the other of the two direct-acting mechanisms 67 (the rear one) can also be activated to move the second idler roller 65B downward (away from the base 61).

[0065] Additionally, for example, such as Figure 7 As shown in (B), if the other (rear) direct drive mechanism 67 of the two direct drive mechanisms 67 is activated to move the second idler roller 65B upward (towards the base 61), the rear side of the holding unit 7 can be tilted upward. If it is desired to tilt the rear side of the holding unit 7 upward, the other (front) direct drive mechanism 67 of the two direct drive mechanisms 67 can also be activated to move the second idler roller 65B downward (away from the base 61).

[0066] As described above, the elevated transport vehicle 1 of this embodiment can adjust the tilt of the holding unit 7 relative to the horizontal plane by activating either or both of the two direct-drive mechanisms 67. Furthermore, in the elevated transport vehicle 1 of this embodiment, the operation of the direct-drive mechanisms 67 is controlled based on the state of the elevated transport vehicle 1 (information related to the tilt of the lifting section). The state of the elevated transport vehicle 1 is stored, for example, in the storage unit 8A provided on the central frame 15. Additionally, the state of the elevated transport vehicle 1 includes the state obtained during teaching, and the state obtained by the measuring unit 80 and the measured unit 90.

[0067] Here, before operating the transport vehicle system 100, the overhead transport vehicle 1 is taught. Teaching refers to: in order for the overhead transport vehicle 1 to transfer FOUP 200 at the loading port 300, with the overhead transport vehicle 1 stopped at a predetermined position on the track 20 and the holding unit 7 having descended a predetermined distance, in order to determine the degree of deviation of the position of the holding unit 7 (more specifically, the position of the gripper 12) relative to the target position, the state of the overhead transport vehicle 1 is obtained. Based on this state of the overhead transport vehicle 1, the actions that the overhead transport vehicle 1 should perform are stored so that the deviation from the target position during the operation of the transport vehicle system 100 converges within an allowable range. An example of the state of the overhead transport vehicle 1 is the actual position (X-coordinate, Y-coordinate, Z-coordinate), angle θ, angle αx, and angle αy of the gripper 12 with the reference position of the loading port 300 as the origin.

[0068] The measuring unit 80 and the measured unit 90 are described in detail. For example... Figure 8 as well as Figure 9 As shown, the measuring unit 80 and the measuring unit 90 are units used to obtain the state of the overhead conveyor 1 without human intervention. Figure 8 This is a three-dimensional view of the measuring unit 80 and the measured unit 90. Figure 9 This is a schematic diagram showing the measurement objects of each distance sensor 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3 when the measuring unit 80 measures the measured unit 90. Figure 8 as well as Figure 9 The solid and dashed arrows shown indicate the output direction of the lasers from each distance sensor 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3.

[0069] In the conveyor system 100 of this embodiment, when the state of the overhead conveyor 1 is obtained, the measurement unit 90 is mounted on the overhead conveyor 1, and the measurement unit 80 is mounted on the loading port 300. That is, the measurement unit 90 is held by a pair of grippers 12, 12 and used, and the measurement unit 80 is placed on the loading port 300 and used. The overhead conveyor 1 stops at a predetermined position on the track 20, and the holding unit 7 is lowered a predetermined distance. The state of the overhead conveyor 1 is obtained when the measurement unit 90 is separated from the measurement unit 80 above the loading port 300.

[0070] The measuring unit 80 includes a main body 81 and a unit controller 82 (see reference). Figure 11The unit 80 includes multiple distance sensors 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3, a mounting section 84, a support section 85, and a guide section 86. The main body 81 is a flat plate that supports the unit controller 82, the mounting section 84, and the guide section 86. The unit controller 82 is set up supported on the main body 81 and performs various electrical processes in the measurement unit 80.

[0071] Each distance sensor 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3 is, for example, a laser-type distance sensor, and is mounted on the mounting section 84. Distance sensor 83X1 measures the distance to an object by emitting a laser beam along the X-axis toward the inside of the main body 81. Distance sensors 83Y1 and 83Y2 measure the distance to an object by emitting a laser beam along the Y-axis toward the inside of the main body 81. Distance sensors 83Z1, 83Z2, and 83Z3 measure the distance to an object by emitting a laser beam upwards along the Z-axis.

[0072] Mounting section 84 is the part for mounting distance sensors 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3, and is erected on the main body section 81. Support section 85 is the part for supporting the measured unit 90 and is erected on the main body section 81. Guide section 86 is the part that guides the measured unit 90 to be positioned in a predetermined position when it is supported on the support section 85. Guide section 86 is erected on the main body section 81.

[0073] The measurement unit 90 includes a flange 91, a base plate 92, multiple target plates 93, 94, and 95, and feet 97. The flange 91 is configured to be gripped by the gripper 12. The base plate 92 is connected to the flange 91 and has multiple target plates 93, 94, and 95 erected on it. The base plate 92 and the multiple target plates 93, 94, and 95 form the measurement surfaces of each distance sensor 83X1, 83Y1, 83Y2, 83Z1, 83Z2, and 83Z3.

[0074] Each target plate 93, 94, and 95 is fixed at a predetermined position on the base plate 92. The surface 93a of target plate 93 opposite the distance sensor 83X1 is perpendicular to the X-axis and has a predetermined positional relationship with the reference position of the loading port 300 (the center position of the loading surface of the loading port 300). The surfaces 94a of target plate 94 opposite the distance sensor 83Y1 and 95a of target plate 95 opposite the distance sensor 83Y2 are perpendicular to the Y-axis and have a predetermined positional relationship with the reference position of the loading port 300. Feet 97 are respectively provided on the lower part of target plates 93, 94, and 95, and contact the main body 81 of the measuring unit 80 when the measuring unit 80 supports the measured unit 90.

[0075] Through the above, the unit controller 82 of the measuring unit 80 can obtain the measuring distance X1 based on the distance sensor 83X1, the measuring distance Y1 based on the distance sensor 83Y1, the measuring distance Y2 based on the distance sensor 83Y2, the measuring distance Z1 based on the distance sensor 83Z1, the measuring distance Z2 based on the distance sensor 83Z2, and the measuring distance Z3 based on the distance sensor 83Z3. Then, based on the obtained multiple measuring distances X1, Y1, Y2, Z1, Z2, and Z3, the unit controller 82 can calculate the actual position (X coordinate, Y coordinate, Z coordinate), angle θ, angle αx, and angle αy of the gripper 12 with the reference position of the loading port 300 as the origin.

[0076] Here, as Figure 10 As shown in (A), angle θ is the rotation angle of the measuring unit 80 relative to the measured unit 90 about the Z-axis (i.e., the rotation angle of the gripper 12 relative to the loading port 300 about the Z-axis). When the distance between distance sensor 83Y1 and distance sensor 83Y2 is set to L1, angle θ is expressed as θ = tan -1 [(Y1-Y2) / L1]. Additionally, in Figure 10 In (A), the illustrations of distance sensors 83X1, 83Z1, 83Z2, 83Z3, etc. are omitted.

[0077] In addition, such as Figure 10 As shown in (B), angle αx is the tilt angle of the measuring unit 80 relative to the surface 92a of the base plate 92 of the measured unit 90 about the Y-axis (i.e., the tilt angle of the gripper 12 relative to the reference plane of the loading port 300 about the Y-axis). When the distance between distance sensor 83Z1 and distance sensor 83Z3 is set to L2, angle αx is expressed as αx = tan -1 [(Z3-Z1) / L2]. Additionally, in Figure 10 In (B), the illustrations of distance sensors 83X1, 83Y1, 83Y2 and target boards 93, 94, 95 are omitted.

[0078] In addition, such as Figure 10 As shown in (C), angle αy is the tilt angle of the measuring unit 80 relative to the surface 92a of the base plate 92 of the measured unit 90 about the X-axis (i.e., the tilt angle of the gripper 12 relative to the reference plane of the loading port 300 about the X-axis). When the average value of the measuring distance Z1 based on the distance sensor 83Z1 and the measuring distance Z3 based on the distance sensor 83Z3 (i.e., (Z1+Z3) / 2) is set as Z13, and the distance between the straight line connecting the distance sensor 83Z1 and the distance sensor 83Z3 and the distance sensor 83Z2 is set as L3, the angle αy is expressed as αy=tan-1 [(Z2-Z13) / L3]. Additionally, in Figure 10 In (C), the diagrams of distance sensors 83X1, 83Y1, 83Y2 and target boards 93, 94, 95 are omitted.

[0079] In the conveyor system 100 of this embodiment, instead of the actual position (X coordinate, Y coordinate, Z coordinate), angle θ, angle αx, and angle αy (hereinafter also simply referred to as "the state of the overhead conveyor 1") of the gripper 12 when the reference position of the loading port 300 is taken as the origin at the designated loading port 300, a method is used... Figure 12 (A) and Figure 12 (B) shows the measurement unit 80 and at least one measurement unit 90 placed on the first loading platform 151, the second loading platform 152 and a pair of third loading platforms 153 on the maintenance platform 150 to obtain the status of the overhead conveyor 1.

[0080] Next, the maintenance platform 150 will be described in detail. For example... Figure 12 As shown in (A), the maintenance platform 150 is positioned at a predetermined location along the track 20. A first loading platform 151, a second loading platform 152, and a pair of third loading platforms 153 are supported by a frame 154. The first loading platform 151 is positioned below the track 20 and is at a relatively lower position relative to the second loading platform 152 (in other words, at a position where the release amount of the FOUP 200 with band B is relatively large).

[0081] The second loading platform 152 is positioned below the track 20 and at a relatively high position relative to the first loading platform 151 (in other words, at a position where the release amount of the FOUP 200 with band B is relatively small). The second loading platform 152 is configured to slide in the forward and backward direction and to move between a forward position located above the region of the first loading platform 151 and a retracted position not located above the region of the first loading platform 151. The retracted position is set at a position deviating from the first loading platform 151 when viewed from above in the vertical direction (in this embodiment, a position deviating backward). When using the second loading platform 152 to obtain the state of the overhead conveyor 1, the second loading platform 152 is moved to the forward position.

[0082] In a top-down view, the pair of third loading platforms 153, 153 are configured to sandwich the rail 20. The pair of third loading platforms 153, 153 are positioned so that the FOUP 200 cannot be moved without the operation of the transverse unit 4. Unlike the second loading platform 152, the pair of third loading platforms 153, 153 are fixed and cannot be moved.

[0083] As described above, in the maintenance frame 150 having a first loading platform 151, a second loading platform 152, and a pair of third loading platforms 153, 153, the state of the overhead conveyor 1 can be obtained for each of the first loading platform 151, the second loading platform 152, and the pair of third loading platforms 153, 153. That is, in the maintenance frame 150, the state of the overhead conveyor 1 when the release amount of belt B is relatively large can be obtained using the first loading platform 151, the state of the overhead conveyor 1 when the release amount of belt B is relatively small can be obtained using the second loading platform 152, and the state of the overhead conveyor 1 when the transverse unit 4 is operated and belt B is released can be obtained using the pair of third loading platforms 153, 153.

[0084] Next, the procedure for obtaining the status of the overhead conveyor 1 using the maintenance platform 150 will be explained. For example... Figure 13 As shown in (A), the area controller 110 moves the overhead conveyor 1 to the maintenance platform 150 at predetermined time intervals. Area controller 110 (see reference...) Figure 11 The overhead conveyor 1 is moved to the maintenance platform 150 according to a predetermined schedule (periodically). The unit to be measured 90 (see reference 80) is placed on the first loading platform 151 of the maintenance platform 150, supported by the measuring unit 80. Figure 8 ).

[0085] like Figure 13 As shown in (B), the overhead conveyor 1 releases the belt B while stopped above the first loading platform 151, causing the holding unit 7 to descend. After releasing a predetermined amount of belt B, the overhead conveyor 1 activates the gripper 12 to hold the flange 91 of the unit to be measured 90. Then, a predetermined amount of belt B is wound up, causing the unit to be measured 90, supported by the measuring unit 80, to move away from the measuring unit 80. In this state, the measuring unit 80, placed on the first loading platform 151, measures the distances X1, Y1, Y2, Z1, Z2, and Z3 between the base plate 92 and the target plates 93, 94, and 95 of the unit to be measured 90.

[0086] After the measuring unit 80, placed on the first loading platform 151, is measured, the overhead conveyor 1, while holding the measured unit 90, winds up the tape B, moving the holding unit 7 to a height position higher than the second loading platform 152. Then, as... Figure 14As shown in (A), the second loading platform 152 is slid and moved to a forward position above the first loading platform 151. The overhead conveyor 1 releases belt B, causing the holding unit 7 holding the measured unit 90 to descend. The overhead conveyor 1 releases a predetermined amount of belt B, positioning the measured unit 90 at a position that is a predetermined amount away from the measuring unit 80 mounted on the second loading platform 152. In this state, the measuring unit 80 mounted on the second loading platform 152 measures the distances X1, Y1, Y2, Z1, Z2, Z3 between the base plate 92 and the target plates 93, 94, 95 of the measured unit 90.

[0087] After the measuring unit 80, placed on the second loading platform 152, performs the measurement, the overhead conveyor 1, while holding the measured unit 90, winds up the tape B, and then operates the lateral unit 4 to move the holding unit 7 above one of the pair of third loading platforms 153. The overhead conveyor 1 releases the tape B, causing the holding unit 7 holding the measured unit 90 to descend. The overhead conveyor 1 releases a predetermined amount of tape B, positioning the measured unit 90 at a position that is a predetermined amount away from the measuring unit 80 placed on one of the pair of third loading platforms 153. In this state, the measuring unit 80 placed on one of the pair of third loading platforms 153 measures the distances X1, Y1, Y2, Z1, Z2, Z3 between the base plate 92 and the target plates 93, 94, 95 of the measured unit 90.

[0088] After the measuring unit 80, placed on one of the pair of third mounting platforms 153, performs a measurement, the overhead conveyor 1, while holding the measured unit 90, winds up the tape B, causing the transverse unit 4 to operate. This time, the holding unit 7 moves above the other of the pair of third mounting platforms 153. The overhead conveyor 1 releases the tape B, causing the holding unit 7 holding the measured unit 90 to descend. The overhead conveyor 1 releases a predetermined amount of tape B, positioning the measured unit 90 at a position that is a predetermined amount away from the measuring unit 80 placed on the other of the pair of third mounting platforms 153. In this state, the measuring unit 80 placed on the other of the pair of third mounting platforms 153 measures the distances X1, Y1, Y2, Z1, Z2, Z3 between the base plate 92 and the target plates 93, 94, 95 of the measured unit 90.

[0089] After the measuring unit 80, which is placed on one of the pair of third loading platforms 153, performs the measurement, the overhead conveyor 1, while holding the measured unit 90, winds up the tape B, causing the transverse unit 4 to operate, this time moving the holding unit 7 above the first loading platform 151. Then, as... Figure 14As shown in (B), the second stage 152 moves to a retracted position that is above the first stage 151. Alternatively, the movement of the second stage 152 to the retracted position can be performed at an appropriate timing after measurement is conducted by the measurement unit 80 placed on the second stage 152.

[0090] The elevated conveyor 1 releases belt B while stationary above the first loading platform 151, causing the holding unit 7, which holds the measured unit 90, to descend. For example... Figure 15 As shown, after the overhead conveyor 1 releases belt B to the state where the measured unit 90 is supported by the measured unit 80 placed on the first placement table 151, the gripper 12 operates to release the hold of the flange 91 of the measured unit 90. The measured unit 90 is then supported by the measured unit 80 placed on the first placement table 151. Then, the overhead conveyor 1 winds belt B until the holding unit 7 is in a driving state. The area controller 110 causes the overhead conveyor 1 to retract from the maintenance rack 150.

[0091] Through the above process, the distances X1, Y1, Y2, Z1, Z2, and Z3 to the base plate 92 and the target plates 93, 94, and 95 are measured. The measured units 90, respectively placed on the first loading platform 151, the second loading platform 152, and a pair of third loading platforms 153, calculate the actual position (X-coordinate, Y-coordinate, Z-coordinate), angle θ, angle αx, and angle αy of the gripper 12, with the reference position of each loading platform as the origin, based on the measured distances X1, Y1, Y2, Z1, Z2, and Z3. This information is transmitted to the communication unit 9 of the overhead conveyor 1 via the communication unit 88 located on the maintenance platform 150. The communication unit 88 of the maintenance platform 150 and the communication unit 9 of the overhead conveyor 1 can communicate via appropriate means such as optical communication or wireless communication.

[0092] The transport vehicle controller 8 stores the actual position (X coordinate, Y coordinate, Z coordinate), angle θ, angle αx, and angle αy of the gripper 12, received via the communication unit 9, in the storage unit 8A (see reference). Figure 11 That is, the transport vehicle controller 8 stores (updates) the latest state of the overhead transport vehicle 1 obtained by the measuring unit 80 and the measured unit 90 in the storage unit 8A. Based on the state of the overhead transport vehicle 1 stored in the storage unit 8A, the transport vehicle controller 8 controls the operation of the direct drive mechanism 67.

[0093] The effects of the overhead conveyor 1 described in the above embodiment will be explained. In the overhead conveyor 1 of the above embodiment, the tilt of the holding unit 7 relative to the horizontal plane can be adjusted by activating the linear motion mechanism 67. Then, based on the state of the overhead conveyor 1, i.e., information related to the tilt of the holding unit 7 (such as angle αx and angle αy), the workload (movement of the guide roller) of the linear motion mechanism 67 is automatically adjusted, thus the holding unit 7 can be adjusted to the desired tilt. That is, the overhead conveyor 1 of this embodiment can appropriately adjust the tilt of the holding unit 7 without manual intervention.

[0094] In the transport vehicle system 100 of the above embodiment, the measuring unit 80 and the measuring unit 90, which are used to obtain the state of the elevated transport vehicle 1, are separately provided from the elevated transport vehicle 1. In this configuration, without making major modifications to the elevated transport vehicle 1, the tilt of the holding unit 7 of each elevated transport vehicle 1 can be appropriately adjusted without manual intervention.

[0095] In the transport vehicle system 100 of the above embodiment, each elevated transport vehicle 1 is periodically moved to the maintenance frame 150 to periodically obtain the status of the elevated transport vehicle 1. As a result, even if the status of the elevated transport vehicle 1 becomes worn, the status of the elevated transport vehicle 1 close to its current state can be obtained, and thus the holding unit 7 can be appropriately adjusted to the desired tilt.

[0096] The above description describes one embodiment, but the present invention is not limited to the above embodiment. Various modifications can be made without departing from the spirit of the invention.

[0097] (Variation Example 1)

[0098] In the above-described embodiment of the elevated transport vehicle 1, an example of obtaining the state of the elevated transport vehicle 1 by moving it into the maintenance platform 150 has been given. However, the state of the elevated transport vehicle 1 can also be obtained according to each loading port 300 of the transport vehicle system 100. In this configuration, the holding unit 7 can be adjusted to the optimal tilt according to each loading port 300 where the FOUP 200 is actually loaded.

[0099] (Variation Example 2)

[0100] In the above-described embodiments and variations of the elevated transport vehicle 1, an example was described in which the state of the elevated transport vehicle 1 is obtained by the measuring unit 80 and the measuring unit 90 by holding the measuring unit 7. However, the state of the elevated transport vehicle 1 can also be obtained by moving the holding unit 7 holding the measuring unit 80 away from or close to the measuring unit 90 placed on each loading platform. In this configuration, the measuring unit 90, which is less expensive than the measuring unit 80, is arranged on each loading platform of the maintenance frame 150, thus enabling the maintenance frame 150 to be constructed at a low cost.

[0101] (Variation Example 3)

[0102] In the elevated transport vehicle 1 described in the above embodiments and modifications, the measuring unit 80 and the measured unit 90 were described as examples of methods for obtaining the state of the elevated transport vehicle 1, but the method is not limited thereto. For example, it is also possible to... Figure 16 As shown, the status of the overhead conveyor 1 is obtained using a maintenance platform 150A equipped with a first camera 160A and a second camera 160B. The maintenance platform 150A includes, for example, a first camera 160A positioned relatively low relative to the second camera 160B, a second camera 160B positioned higher than the first camera 160A, and a controller 155. The first camera 160A can obtain the status of the overhead conveyor 1 when the release volume of band B is relatively large, similar to the measurement unit 80 located on the first loading platform 151 described above. The second camera 160B can obtain the status of the overhead conveyor 1 when the release volume of band B is relatively small, similar to the measurement unit 80 located on the second loading platform 152 described above.

[0103] The controller 155 analyzes the state of the overhead conveyor 1 (e.g., the tilt of the holding unit 7) based on images captured by the first camera 160A and the second camera 160B. The state analysis of the overhead conveyor 1 can be performed using known analysis methods such as pattern matching.

[0104] (Variation Example 4)

[0105] In the elevated conveyor 1 of the above-described embodiment and its variations, the state of the elevated conveyor 1 stored in the storage unit 8A is described using the actual position (X coordinate, Y coordinate, Z coordinate), angle θ, angle αx, and angle αy of the gripper 12 with the specified reference position as the origin as an example. However, the workload (movement of the guide roller) of the linear motion mechanism 67 may also be set based on such actual position (X coordinate, Y coordinate, Z coordinate), angle θ, angle αx, and angle αy information.

[0106] (Variation Example 5)

[0107] In the above embodiments and some of the above variations, examples have been described where a measured unit 90, which is the object of measurement of the measurement unit 80, is arranged on each of the mounting platforms of the maintenance frame 150. However, for example, if it is the loading port 300, the measured unit 90 can be placed instead, and the positioning pins formed in the part for the FOUP 200 to be placed can be used as the object of measurement of the measurement unit 80. The object of measurement can also be directly formed on each of the mounting platforms of the maintenance frame 150.

[0108] (Variation Example 6)

[0109] In the above embodiments and modifications, examples of obtaining the state of the overhead conveyor 1 through the measuring unit 80 and the measured unit 90 have been described, but the embodiments are not limited thereto. For example, instead of the measuring unit 80 and the measured unit 90, a tilt detection unit for obtaining the tilt of the holding unit 7 relative to the horizontal direction may be provided on the holding unit 7. Examples of tilt detection units include triaxial sensors and acceleration sensors.

[0110] (Other variations)

[0111] In the elevated conveyor 1 described above, a cam mechanism (position adjustment unit) with the same function can be provided instead of the direct-acting mechanism 67, which has the function of moving the position of at least one second idler roller 65B in order to move one end of belt B in the lifting direction.

[0112] In the elevated conveyor 1 of the above embodiment, an example of moving one end of belt B in the lifting direction by moving the position of at least one second idler roller 65B has been described. However, it is also possible to move one end of belt B in the lifting direction by moving the position of the first idler roller 65A instead of the second idler roller 65B.

[0113] In the above embodiments and variations, examples of ball screws being used as the direct-acting mechanism 67 have been described, but cylinders, linear guides, etc., may also be used.

[0114] Regarding the holding unit 7 in the above-described embodiments and variations, an example has been given where it is connected to one end of the band B via the first buffer mechanism 50 and the second buffer mechanism 40. However, it can also be directly connected to the holding unit 7. Alternatively, all four bands B can be directly connected to the holding unit 7. Alternatively, three bands B can be connected to the holding unit 7.

[0115] In the above embodiments and variations, examples of direct interaction between the elevated transport vehicle 1 and the measurement unit 80 via the communication unit have been described, but various information can also be exchanged via the area controller 110.

[0116] Based on the configuration of the measurement unit 80 in the above-described embodiments and variations, a measurement unit that integrates a battery and a communication unit can also be used.

[0117] Explanation of symbols

[0118] 1: Overhead conveyor, 7: Holding unit, 8: Conveyor controller (control unit), 61: Base (main body), 64: Third idler roller (guide roller), 65A: First idler roller (guide roller), 65B: Second idler roller (guide roller), 67: Direct drive mechanism (position adjustment unit), 80: Measurement unit (acquisition unit), 82: Unit controller, 83X1, 83Y1, 83Y2, 83Z1, 83Z2, 83Z3: Distance sensors, 88: Communication unit, 90: Measured unit (acquisition unit), 93, 94, 95: Target plate, 100: Conveyor system, 110: Area controller (control device).

Claims

1. An elevated conveyor vehicle, comprising a lifting unit having a gripping part for holding items, which is raised and lowered by multiple lifting components, and having the following features: The winding drum raises and lowers the lifting unit by winding and unwinding the aforementioned multiple lifting components. At least one guide roller is provided for the hanging component to be wound up from the take-up roller; The main body supports the aforementioned take-up roller and the aforementioned guide roller; At least one position adjustment part moves the lifting member toward the connection portion of the lifting part in the lifting direction by moving the guide roller relative to the main body; and The control unit controls the movement of the guide roller by the position adjustment unit based on information related to the tilt of the lifting unit. Furthermore, it includes a storage unit that stores the amount of movement of the guide roller determined based on the aforementioned tilt-related information, or other information related to the aforementioned tilt. The control unit controls the movement of the guide roller by the position adjustment unit based on the amount of movement or information related to the tilt. The aforementioned storage unit stores information related to the amount of movement or tilt for each transfer unit where the items are handed over to the aforementioned overhead conveyor. The control unit controls the movement of the guide roller by the position adjustment unit based on the movement amount of each of the transfer units or information related to the tilt.

2. The elevated transport vehicle as described in claim 1, wherein, It further includes an acquisition unit, which is provided in the aforementioned lifting unit, to acquire information related to the aforementioned tilt.

3. The elevated transport vehicle as described in claim 1, wherein, The unit further includes an acquisition section, which is located in the aforementioned lifting section, to acquire information related to the aforementioned tilting. The aforementioned department regularly obtains information related to the aforementioned tilt. The aforementioned storage unit stores the amount of movement of the guide roller determined based on periodically acquired information related to the aforementioned tilt, or periodically acquired information related to the aforementioned tilt.

4. A conveyor system, comprising: The elevated transport vehicle as described in claim 1; The acquisition unit, separately installed from the aforementioned elevated transport vehicle, acquires information related to the aforementioned tilting; and The communications department will send the information related to the aforementioned tilt, obtained by the aforementioned acquisition department, to the aforementioned elevated transport vehicle.

5. The conveyor system as described in claim 4, wherein, Furthermore, it includes a control device that enables the elevated transport vehicle to periodically move to a position where the acquisition unit can obtain information related to the tilt. The aforementioned communication unit periodically transmits information related to the aforementioned tilt, obtained by the aforementioned acquisition unit, to the aforementioned elevated transport vehicle.

Images