Multi-axis inertial force sensor

Abstract

The multi-axis inertial force sensor includes mounting components (101, 159, 172), multiple modules (102, 103, 129, 130), and multiple sensors (104, 105, 131, 132). Each module has a positioning part (127) that relatively determines its position relative to a contact object. The modules are assembled into a base (128) to form a state in which their relative positions are determined based on the positioning parts and each inclined surface (107, 112, 133, 138) faces a different direction. Each sensor is disposed on a different inclined surface of the base so that its main axis faces a different direction and detects the vector component of the inertial force corresponding to the main axis.

Description

[0001] Related applications

[0002] This application is made based on Japanese Patent Application No. 2020-185625, filed on November 6, 2020, the contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to multi-axis inertial force sensors. Background Technology

[0004] Currently, for example, Patent Document 1 discloses a device in which multiple sensors are mounted on a base. Specifically, the base is fixed to the mounting surface of a substrate. The base is formed in the shape of a frustum pyramid including multiple mounting surfaces. Each mounting surface is inclined relative to the mounting surface of the substrate. Each sensor is disposed on its respective mounting surface. Thus, the movement of multiple detection axes can be detected.

[0005] Prior art literature

[0006] Patent documents

[0007] Patent Document 1: U.S. Patent Application Publication No. 2014 / 0013843 Summary of the Invention

[0008] However, in the aforementioned existing technologies, the sensors must be mounted separately on each mounting surface of the base. Since each mounting surface faces a different direction, mounting multiple sensors on a single base is difficult and complex.

[0009] Furthermore, because the base has multiple mounting surfaces, its shape is complex, and its processing is time-consuming and labor-intensive. Therefore, the cost of the device increases.

[0010] The purpose of this disclosure is to provide a multi-axis inertial force sensor with a structure that allows for easy placement of multiple sensors relative to a base and reduces costs.

[0011] According to one aspect of this disclosure, a multi-axis inertial force sensor includes a mounting component, multiple modules, and multiple sensors.

[0012] The mounting component has a mounting surface. Multiple modules are configured on the mounting surface and have inclined surfaces that are tilted relative to the mounting surface. Multiple sensors are respectively configured on the inclined surfaces of the multiple modules and detect inertial forces corresponding to the spindle.

[0013] Multiple modules have positioning parts that, when in contact with at least one or more of the modules, relatively determine their position relative to the contacting object. The multiple modules are assembled into a base in a state where their relative positions are determined by the positioning parts and where their inclined surfaces face different directions.

[0014] Multiple sensors are respectively configured on the inclined surface of the base so that the main shaft faces different directions and respectively detect the vector components of the inertial force corresponding to the main shaft.

[0015] Therefore, since only one sensor is installed on each module, the sensor can be easily positioned relative to the module. Multi-axis operation can be achieved by constructing a base that combines multiple modules. Furthermore, since it is not necessary to form multiple inclined surfaces on a single module, the module's formation and fabrication become easier. Consequently, the cost of multi-axis inertial force sensors can be reduced. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the following detailed description with reference to the accompanying drawings, which are shown below.

[0017] Figure 1 This is a perspective view of the multi-axis inertial force sensor according to the first embodiment.

[0018] Figure 2 yes Figure 1 The top view of the multi-axis inertial force sensor shown.

[0019] Figure 3 This is a perspective view showing the state in which the first sensor is installed in the first module.

[0020] Figure 4 This is a partial cross-sectional view showing the first module being mounted on the embedded plate.

[0021] Figure 5 This is a graph showing the vector components when the yaw rate is applied to each sensor.

[0022] Figure 6 This is a graph showing the vector components when the roll angular velocity is applied to each sensor.

[0023] Figure 7 This is a diagram showing a variation of each module of the first embodiment.

[0024] Figure 8 This is a diagram showing a variation of each module of the first embodiment.

[0025] Figure 9 This is a diagram showing a variation of each module of the first embodiment.

[0026] Figure 10 This is a diagram showing a variation of each module of the first embodiment.

[0027] Figure 11 This is a perspective view of the multi-axis inertial force sensor according to the second embodiment.

[0028] Figure 12yes Figure 11 The top view of the multi-axis inertial force sensor shown.

[0029] Figure 13 This is a perspective view of the multi-axis inertial force sensor according to the third embodiment.

[0030] Figure 14 yes Figure 13 The top view of the multi-axis inertial force sensor shown.

[0031] Figure 15 This is a graph showing the vector components when the yaw rate is applied to the third and fourth sensors.

[0032] Figure 16 This is a graph showing the vector components when the roll angular velocity is applied to the third and fourth sensors.

[0033] Figure 17 This is a graph showing the vector components when the pitch angular velocity is applied to the first and second sensors.

[0034] Figure 18 This is a graph showing the vector components when the pitch angular velocity is applied to the third and fourth sensors.

[0035] Figure 19 This is a perspective view of the multi-axis inertial force sensor according to the fourth embodiment.

[0036] Figure 20 yes Figure 19 The top view of the multi-axis inertial force sensor shown.

[0037] Figure 21 This is a perspective view of the multi-axis inertial force sensor according to the fifth embodiment.

[0038] Figure 22 yes Figure 21 The top view of the multi-axis inertial force sensor shown.

[0039] Figure 23 This is a perspective view of the multi-axis inertial force sensor according to the sixth embodiment.

[0040] Figure 24 yes Figure 23 The top view of the multi-axis inertial force sensor shown.

[0041] Figure 25 This is a perspective view of the multi-axis inertial force sensor according to the seventh embodiment.

[0042] Figure 26 yes Figure 25 The top view of the multi-axis inertial force sensor shown.

[0043] Figure 27This is a perspective view of the multi-axis inertial force sensor according to the eighth embodiment.

[0044] Figure 28 This is a perspective view of the first module of the ninth embodiment.

[0045] Figure 29 This is a perspective view of the first module of the ninth embodiment.

[0046] Figure 30 This is a perspective view of the first module of the ninth embodiment.

[0047] Figure 31 This is a diagram showing a variation of the first module of the ninth embodiment.

[0048] Figure 32 This is a diagram showing a variation of the first module of the ninth embodiment.

[0049] Figure 33 This is an exploded perspective view of the IMU according to the tenth embodiment.

[0050] Figure 34 This is an exploded perspective view of the IMU in the eleventh embodiment.

[0051] Figure 35 This is a top view of the multi-axis inertial force sensor according to the twelfth embodiment.

[0052] Figure 36 This is a top view of the multi-axis inertial force sensor according to the thirteenth embodiment.

[0053] Figure 37 This is a top view of the multi-axis inertial force sensor according to the fourteenth embodiment.

[0054] Figure 38 This is a top view of the multi-axis inertial force sensor according to the fifteenth embodiment. Detailed Implementation

[0055] The following is a reference to the appendix. Figure 1 The following describes several embodiments for implementing this disclosure. In each embodiment, the same reference numerals are used to mark parts corresponding to those described in previous embodiments, and repeated descriptions are sometimes omitted. In each embodiment, where only a part of the structure is described, other parts of the structure can be adapted to other previously described embodiments. Not only can the parts that are specifically shown to be combinable in each embodiment be combined with each other, but embodiments can also be partially combined with each other even without explicit description, provided that there is no particular obstacle to the combination.

[0056] (First Implementation)

[0057] The first embodiment will now be described with reference to the accompanying drawings. Figure 1 and Figure 2 As shown, the multi-axis inertial force sensor 100 includes a mounting component 101, a first module 102, a second module 103, a first sensor 104, and a second sensor 105.

[0058] Mounting member 101 has a mounting surface 106. The mounting surface 106 is a plane. Mounting member 101 is, for example, a single-layer or multi-layer printed circuit board. Electronic components such as microcomputers and LSI (Large Scale Integration) are mounted on mounting member 101. Mounting member 101 is housed in a frame not shown.

[0059] Modules 102 and 103 serve as bases for mounting sensors 104 and 105. Modules 102 and 103 are mounted on the mounting surface 106 of the mounting member 101. Modules 102 and 103 are formed to the same size and shape. Modules 102 and 103 do not need to be solid components. Modules 102 and 103 can also be structures with a portion removed to create an internal cavity. Modules 102 and 103 are formed from materials such as metal, resin, and ceramic.

[0060] like Figure 1 As shown, the first module 102 is a triangular prism having an inclined surface 107, a pair of end faces 108 and 109, and a pair of side faces 110 and 111. The inclined surface 107 is an inclined surface relative to the mounting surface 106 of the mounting member 101. The pair of end faces 108 and 109 are triangular surfaces connected to the inclined surface 107. The pair of side faces 110 and 111 are quadrilateral surfaces connected to the inclined surface 107 and the pair of end faces 108 and 109. One of the side faces 110 and 111 is disposed on the mounting surface 106 of the mounting member 101.

[0061] A pair of end faces 108 and 109 are formed into the shape of a right-angled isosceles triangle. The inclined surface 107 is the surface corresponding to the hypotenuse of each end face 108 and 109 of the right-angled isosceles triangle. Therefore, the inclined surface 107 is inclined at an angle of 45° relative to the mounting surface 106 of the mounting member 101.

[0062] The second module 103, like the first module 102, is a triangular prism with an inclined surface 112, a pair of end faces 113 and 114, and a pair of side faces 115 and 116. Thus, since each module 102 and 103 has a simple triangular prism shape, mass production can be achieved through injection molding. This helps to reduce the manufacturing cost of each module 102 and 103.

[0063] In addition, such as Figure 3As shown, the first module 102 has a plurality of electronic components 117 disposed on the inclined surface 107. The electronic components 117 have a mounting substrate 118, external components 119, external wiring 120 and lead-out portions 121.

[0064] The mounting substrate 118 is, for example, a printed circuit board. The first sensor 104 is mounted on the mounting substrate 118 using solder. The mounting substrate 118 is fixed to the inclined surface 107 by adhesive or the like.

[0065] External component 119 is a component such as a chip resistor. External wiring 120 is formed on the surface of mounting substrate 118 and connected to the first sensor 104 and external component 119.

[0066] Lead-out portion 121 is connected to external wiring 120. Lead-out portion 121 is an electrical connection portion for extracting the signal from the first sensor 104 to the outside and supplying power to the first sensor 104 from the outside. Lead-out portion 121 is electrically connected to the mounting member 101. A socket for a flexible substrate may also be used as lead-out portion 121.

[0067] Similarly, electronic components 117 and a second sensor 105 are mounted on the second module 103. That is, each sensor 104 and 105 is disposed on the inclined surfaces 107 and 112 of each module 102 and 103, respectively. In other words, a first sensor 104 is disposed on the first module 102, and a second sensor 105 is disposed on the second module 103.

[0068] In addition, Figure 1 and Figure 2 In the figures below, the electronic components 117 configured in each module 102 and 103 are omitted. In the following figures, the electronic components 117 configured in each module 102 and 103 will also be omitted as appropriate.

[0069] Each sensor 104 and 105 is a single-axis gyroscope sensor that detects angular velocity as the inertial force corresponding to the main axis. If the direction perpendicular to the inclined surfaces 107 and 112 of each module 102 and 103 is defined as the Z-axis, then the main axes of each sensor 104 and 105 are arranged parallel to the Z-axis. Therefore, each sensor 104 and 105 detects the angular velocity around the Z-axis as the inertial force.

[0070] Each sensor 104, 105 is configured, for example, as a resin-molded package. The package contains a sensor element and an ASIC (Application Specific Integrated Circuit). The sensor element is preferably configured as a WLP (Wafer Level Packaging). That is, the sensor element and the IC (Integrated Circuit) that actuates the sensor element to read out signals are combined and called a gyroscope sensor. Alternatively, each sensor 104, 105 may also be configured as a ceramic package. Furthermore, the package may also be open-type.

[0071] like Figure 4 As shown, the mounting base 118 on which the first sensor 104 is mounted is fixed to the first module 102 using an insert plate 122. The insert plate 122 has a plane 123 and a groove 124. The groove 124 is a portion recessed into a part of the plane 123 in the insert plate 122. The groove 124 is formed to have a shape substantially the same as the outer shape of the first module 102. The groove 124 has at least wall surfaces 125 and 126 that contact the sides 110 and 111 of the first module 102.

[0072] The first module 102 is inserted into the groove 124 such that its sides 110, 111 contact the walls 125, 126 of the groove 124. Thus, the inclined surface 107 of the first module 102 is parallel to the plane 123 of the insert plate 122. By pre-fixing the plane 123 of the insert plate 122 horizontally, the inclined surface 107 of the first module 102 is horizontally positioned. In this state, the mounting substrate 118 and the first sensor 104 are mounted onto the first module 102 using substrate mounting technology, reflow soldering mounting technology, or the like.

[0073] The first sensor 104 is a Z-axis gyroscope sensor. Therefore, during the installation of the first sensor 104 relative to the first module 102, even without precisely controlling the deviations in the directions of the first other axis perpendicular to the main axis and the second other axis perpendicular to both the main axis and the first other axis, the axial deviation of the main axis, i.e., the Z-axis, relative to the inclined surface 107 will not increase. The first other axis is the X-axis. The second other axis is the Y-axis. For the second module 103, the electronic component 117 and the second sensor 105 are mounted using the same embedded plate 122 as described above.

[0074] In addition, since each sensor 104 and 105 uses the X-axis and Y-axis as the main axis, it needs to be installed relative to each module 102 and 103 while controlling the position of each sensor 104 and 105.

[0075] In the above structure, such as Figure 1 and Figure 2 As shown, modules 102 and 103 are assembled onto the mounting surface 106 of the mounting member 101. Here, the axis perpendicular to the mounting surface 106 of the mounting member 101 is defined as the z-axis. The direction orthogonal to the z-axis and parallel to the mounting surface 106 is defined as the x-axis. The direction orthogonal to both the z-axis and x-axis and parallel to the mounting surface 106 is defined as the y-axis. The x-axis and y-axis are axes parallel to the mounting surface 106. Modules 102 and 103 are arranged along the x-axis.

[0076] Each module 102, 103 has a positioning part 127 for determining its position relative to the contacting object when they are in contact with each other. The positioning part 127 is the contacting part of each module 102, 103 that comes into contact with the contacting object. The positioning part 127 is the part that contacts the contacting object.

[0077] Each module 102 and 103 is assembled in a state where their relative positions are determined by the positioning part 127. Furthermore, each module 102 and 103 is assembled such that each inclined surface 107 and 112 faces a different direction. Thus, each module 102 and 103 constitutes the base 128. Each module 102 and 103 is connected by an adhesive.

[0078] Multi-axis operation is achieved through the assembly of modules 102 and 103. That is, the multi-axis inertial force sensor 100 is a two-axis gyroscope sensor. The positioning unit 127 determines the accuracy of the relative positions of each sensor 104 and 105. By managing the machining shape of each module 102 and 103 and ensuring the shape accuracy of each module 102 and 103, the orthogonality of the axes of the two sensors 104 and 105 can be fully guaranteed.

[0079] Each sensor 104 and 105 is disposed on an inclined surface 107 and 112 of the base 128, such that the spindle faces different directions. That is, the spindle of each sensor 104 and 105 is inclined relative to the mounting surface 106 of the mounting member 101. Therefore, each sensor 104 and 105 detects the vector component of the angular velocity corresponding to the spindle.

[0080] In this embodiment, the base 128 is configured such that each module 102, 103 is point-symmetrical about a reference point in the mounting surface 106 of the mounting member 101. The base 128 is assembled such that the other side 111 of the first module 102 faces the other side 116 of the second module 103. Thus, the base 128 forms a mountain-shaped form. Furthermore, each module 102, 103 is assembled without gaps by contacting each other with its sides 111, 116. The above is the overall structure of the multi-axis inertial force sensor 100.

[0081] Next, the principle of detecting the angular velocities of the two axes will be explained. First, the angular velocity around the z-axis is set as the yaw rate, and the angular velocity around the x-axis is set as the roll rate. Each sensor 104 and 105 determines the direction of rotation of the angular velocity based on the direction of its action.

[0082] Specifically, such as Figure 5 As shown, when a yaw rate is applied to the multi-axis inertial force sensor 100, an angular rate ω is applied to each sensor 104, 105. z Since the inclined surfaces 107 and 112 of each module 102 and 103 are inclined at an angle of 45° relative to the z-axis, the angular velocity ω z During vector decomposition, a √2ω ​​is applied to the Z-axis of each sensor 104 and 105. z / 2 vector components. Although √2ω z The angular velocity of 2 / 2 will act on the other axes, but will not affect the spindle sensitivity of the sensors 104 and 105.

[0083] like Figure 6 As shown, when the roll angular velocity is applied to the multi-axis inertial force sensor 100, an angular velocity ω is applied to each sensor 104, 105. x Similarly, regarding the angular velocity ω... x During vector decomposition, a √2ω ​​is applied to the Z-axis of each sensor 104 and 105. x / 2 vector components. Although √2ω x The angular velocity of 2 / 2 will act on the other axes, but will not affect the spindle sensitivity of the sensors 104 and 105.

[0084] In this embodiment, modules 102 and 103 are arranged along the x-axis. Therefore, if the angular velocities acting around the x-axis and z-axis are vector-decomposed as described above, they can be detected as angular velocities around the z-axis, and the direction of the angular velocity can also be detected. That is, since sensors 104 and 105 are z-axis gyroscope sensors, they function as x-axis and z-axis gyroscope sensors. Therefore, angular velocities around both the x-axis and z-axis can be detected.

[0085] In addition, with each module 102 and 103 configured along the y-axis, it is possible to detect the angular velocities around both the y-axis and the z-axis.

[0086] As explained above, in this embodiment, the structure is configured such that each sensor 104, 105 is mounted on each module 102, 103. That is, only one sensor 104, 105 needs to be mounted on each module 102, 103. Therefore, mounting multiple sensors 104, 105 relative to the base 128 becomes very easy. Furthermore, it is not necessary to form multiple inclined surfaces on each module 102, 103. Therefore, the formation and fabrication of each module 102, 103 are simplified, thereby reducing the cost of the multi-axis inertial force sensor 100.

[0087] Furthermore, since modules 102 and 103 equipped with single-axis sensors 104 and 105 are assembled, the angular velocities around the x-axis and z-axis can be detected by the two sensors 104 and 105 respectively.

[0088] Furthermore, the base 128 is constructed by assembling the modules 102 and 103. Therefore, the orthogonality of the main axes of each sensor 104 and 105 can be maintained with high accuracy. That is, the sensing accuracy of each detection axis can be maintained. Since the tilt angle of each tilting surface 107 and 112 of each module 102 and 103 is 45°, the main reason for the decrease in accuracy is the equal division of matrix operations, which is also an advantage.

[0089] Furthermore, due to the high strength of each module 102 and 103, the strain generated on the mounting component 101 is not easily transmitted to each sensor 104 and 105 via each module 102 and 103. Therefore, the robustness of each sensor 104 and 105 can be improved in the face of external strain, i.e., stress.

[0090] As a variation, sensors 104 and 105 can also be configured as single-axis acceleration sensors with their main axis parallel to the Z-axis, detecting acceleration in the Z-axis direction as inertial force. Acceleration sensors can also be configured with the X and Y axes as main axes. The mounting of sensors 104 and 105 relative to modules 102 and 103... Figure 4 The method shown is the same. With two sensors 104 and 105, a two-axis accelerometer is formed. Similarly, as described above, it can detect acceleration along both the x-axis and z-axis.

[0091] As a variation, such as Figure 7As shown, the first sensor 104, external component 119, external wiring 120, and lead-out portion 121 can also be directly mounted on the inclined surface 107 of the first module 102. In this case, the mounting substrate 118 is not included in the electronic component 117. The same applies to the second module 103. Each module 102 and 103 is manufactured by injection molding of thermoplastic resin. The external wiring 120 and electrodes are formed by MID (Molded Interconnect Device) process. That is, each module 102 and 103 also serves as the mounting substrate 118.

[0092] As a variation, such as Figure 8 As shown, the first module 102 can also be formed with the front end of the corner formed by the inclined surface 107 and the side surface 110 being chamfered. The same applies to the second module 103.

[0093] As a variation, such as Figure 9 As shown, the first module 102 can also be formed with the front ends of the two corners formed by the inclined surface 107 and the side surfaces 110, 111 being chamfered. The same applies to the second module 103.

[0094] As a variation, such as Figure 10 As shown, in Figure 9 The first module 102 shown can also be formed with its corners chamfered, consisting of an inclined surface 107, an end face 108, and a side face 110. Alternatively, the first module 102 can also be formed with its corners chamfered, consisting of an inclined surface 107, another end face 109, and a side face 110. The same applies to the second module 103.

[0095] (Second Implementation)

[0096] In this embodiment, the differences from the first embodiment will be mainly described. For example... Figure 11 and Figure 12 As shown, modules 102 and 103 have the same shape but different dimensions.

[0097] Specifically, the first module 102 is larger than the second module 103. In the y-axis direction, the center positions of the first module 102 and the second module 103 are located at the same position. Therefore, the positioning part 127 is formed by the portion of the other side 111 of the first module 102 that contacts the second module 103 and the entirety of the other side 116 of the second module 103.

[0098] As described above, even though the dimensions of each module 102 and 103 are different, the angular velocities around the x-axis and z-axis can be detected in the same way as in the first embodiment.

[0099] As a variation, the first module 102 may be smaller than the second module 103. Furthermore, the center positions of the first module 102 and the second module 103 may be positioned at different locations along the y-axis. For example, the modules 102 and 103 may be arranged such that one end face 108 of the first module 102 and the other end face 114 of the second module 103 are on the same plane. Additionally, the sensors 104 and 105 are preferably arranged on a straight line along the x-axis.

[0100] (Third Implementation)

[0101] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 13 and Figure 14 As shown, in addition to modules 102, 103 and sensors 104, 105, the multi-axis inertial force sensor 100 also includes a third module 129, a fourth module 130, a third sensor 131 and a fourth sensor 132.

[0102] The third module 129 is a triangular prism with an inclined surface 133, a pair of end faces 134 and 135, and a pair of side faces 136 and 137. The fourth module 130 is a triangular prism with an inclined surface 138, a pair of end faces 139 and 140, and a pair of side faces 141 and 142.

[0103] All modules 102, 103, 129, and 130 are formed to have the same size and shape. Similarly to the above embodiments, the third sensor 131 is disposed together with the electronic component 117 on the inclined surface 133 of the third module 129, and the fourth sensor 132 is disposed together with the electronic component 117 on the inclined surface 138 of the fourth module 130.

[0104] The base 128 is assembled into a mountain shape by clamping the first module 102 and the second module 103 with the third module 129 and the fourth module 130. Specifically, the first module 102 and the second module 103 are arranged along the x-axis. In addition, another side 111 of the first module 102 and another side 116 of the second module 103 are arranged facing each other without gaps.

[0105] The third module 129 and the fourth module 130 are arranged along the y-axis. The other side 137 of the third module 129 is arranged facing the other end face 109 of the first module 102 and one end face 113 of the second module 103 without any gap. The other side 142 of the fourth module 130 is arranged facing the one end face 108 of the first module 102 and the other end face 114 of the second module 103 without any gap.

[0106] Each sensor 104, 105, 131, and 132 has its spindle facing different directions via inclined surfaces 107, 112, 133, and 138 respectively disposed on the base 128. A portion of each end face 108 and 109 in the first module 102 and a portion of each end face 113 and 114 in the second module 103, along with a portion of another side face 116, constitute positioning parts 127. Additionally, a portion of another side face 137 in the third module 129 and a portion of another side face 142 in the fourth module 130 also constitute positioning parts 127. Thus, the orthogonality of the spindles of each sensor 104, 105, 131, and 132 is ensured by the shape accuracy of each module 102, 103, 129, and 130.

[0107] Next, the principle of detecting the angular velocity of the three axes will be explained. First, the angular velocity around the y-axis is set as the pitch angular velocity. Sensors 104, 105, 131, and 132 are single-axis gyroscope sensors that detect the angular velocity around the Z-axis.

[0108] First, with the yaw rate applied to the multi-axis inertial force sensor 100, angular velocities ω are applied to each of the sensors 104, 105, 131, and 132. z .and Figure 5 Similarly, as shown, with respect to angular velocity ω z During vector decomposition, a √2ω ​​is applied to the Z-axis of the first sensor 104 and the second sensor 105. z / 2 vector components.

[0109] In addition, such as Figure 15 As shown, a √2ω ​​is applied on the Z-axis of the third sensor 131 and the fourth sensor 132. z / 2 of the vector components. That is, √2ω z An angular velocity of 2 / 2 is applied to the Z-axis of the four sensors 104, 105, 131, and 132. Since the inclined surfaces 133 and 138 of the third sensor 131 and the fourth sensor 132 are inclined at an angle of 45° relative to the mounting surface 106 of the mounting member 101, although the same amount of angular velocity of each sensor 131 and 132 is applied to the other axes, it has no effect on the spindle sensitivity of each sensor 131 and 132.

[0110] When the roll angular velocity is applied to the multi-axis inertial force sensor 100, an angular velocity ω is applied to each sensor 104, 105, 131, and 132. x .and Figure 6 Similarly, as shown, with respect to angular velocity ω x During vector decomposition, a √2ω ​​is applied to the Z-axis of the first sensor 104 and the second sensor 105. xThe vector component is 2 / 2. Therefore, it is possible to determine the angular velocity ω. x The direction of action is used to determine the angular velocity ω. x The direction of rotation.

[0111] On the other hand, such as Figure 16 As shown, angular velocities ω are applied to the second other axes of the third sensor 131 and the fourth sensor 132. x Therefore, the spindle sensitivity of the third sensor 131 and the fourth sensor 132 remained unchanged.

[0112] When the pitch angular velocity is applied to the multi-axis inertial force sensor 100, an angular velocity ω is applied to each sensor 104, 105, 131, and 132. y .like Figure 17 As shown, at the angular velocity ω y During vector decomposition, angular velocities ω are applied to the second other axes of the first sensor 104 and the second sensor 105. y Therefore, the spindle sensitivity of the first sensor 104 and the second sensor 105 remains unchanged.

[0113] On the other hand, such as Figure 18 As shown, at the angular velocity ω y During vector decomposition, a √2ω ​​is applied to the Z-axis of the third sensor 131 and the fourth sensor 132. y / 2 vector components. Although √2ω y A 2 / 2 angular velocity is applied to the other axes, but has no effect on the spindle sensitivity of the third sensor 131 and the fourth sensor 132. Therefore, it is possible to determine the angular velocity ω based on the angular velocity ω. y The direction of action is used to determine the angular velocity ω. y The direction of rotation.

[0114] Based on the above principles, the angular velocity of all three axes can be detected. Furthermore, even if one of the sensors 104, 105, 131, or 132 fails, the remaining three can still be used to detect the angular velocity of all three axes. That is, redundancy can be ensured.

[0115] As a variation, an accelerometer with the Z-axis as the principal axis can also be used as sensors 104, 105, 131, and 132. In this case, acceleration in the three axes can also be detected based on the same principle as described above.

[0116] (Fourth Implementation)

[0117] In this embodiment, the differences from the third embodiment will be mainly described. For example... Figure 19 and Figure 20As shown, the base 128 is assembled with the other end face 109 of the first module 102 and one end face 113 of the second module 103 facing the inclined surface 133 of the third module 129. The front end of the corner of the third module 129 formed by the inclined surface 133 and a side surface 136, a part of the other end face 109 of the first module 102, and a part of one end face 113 of the second module 103 form the positioning part 127.

[0118] Furthermore, the base 128 is assembled with one end face 108 of the first module 102 and the other end face 114 of the second module 103 facing the inclined surface 138 of the fourth module 130. The front end of the corner of the fourth module 130 formed by the inclined surface 138 and a side surface 141, a part of one end face 108 of the first module 102, and a part of the other end face 114 of the second module 103 form a positioning part 127.

[0119] As described above, modules 102, 103, 129, and 130 are assembled without gaps. Furthermore, the base 128 is configured such that the third module 129 and the fourth module 130 make line contact with the first module 102 and the second module 103.

[0120] (Fifth Implementation)

[0121] In this embodiment, the differences from the third and fourth embodiments will be mainly described. For example... Figure 21 and Figure 22 As shown, the base 128 is assembled with the inclined surface 133 of the third module 129 facing the inclined surface 138 of the fourth module 130. The front end of the corner portion of the third module 129, which is formed by the inclined surface 133 and a side surface 136, and the front end of the corner portion of the fourth module 130, which is formed by the inclined surface 138 and a side surface 141, form a positioning part 127, which abuts against each other.

[0122] Furthermore, the base 128 is assembled such that the third module 129 and the fourth module 130 are clamped between the first module 102 and the second module 103. The other side 111 of the first module 102 faces and is configured without gaps with the other end face 135 of the third module 129 and one end face 139 of the fourth module 130. A portion of the other side 111 of the first module 102, a portion of the other end face 135 of the third module 129, and a portion of one end face 139 of the fourth module 130 form a positioning part 127.

[0123] The other side 116 of the second module 103 is positioned opposite and without gap to one end face 134 of the third module 129 and the other end face 140 of the fourth module 130. A portion of the other side 116 of the second module 103, a portion of one end face 134 of the third module 129, and a portion of the other end face 140 of the fourth module 130 form a positioning part 127.

[0124] (Sixth Implementation Method)

[0125] In this embodiment, the differences from the third to fifth embodiments will be mainly described. For example... Figure 23 and Figure 24 As shown, the first module 102 and the second module 103 are arranged such that the inclined surface 107 of the first module 102 and the inclined surface 112 of the second module 103 face each other and are separated by space. The third module 129 and the fourth module 130 are arranged such that the inclined surface 133 of the third module 129 and the inclined surface 138 of the fourth module 130 face each other and are separated by space.

[0126] At the front end of the corner formed by the inclined surface 133 and the side surface 136 in the third module 129, one end 143 on the side of the end face 134 abuts against the other end face 114 of the second module 103. At the front end of the corner formed by the inclined surface 133 and the side surface 136 in the third module 129, another end 144 on the side of the other end face 135 abuts against the end face 108 of the first module 102. The ends 143 and 144 of the third module 129, a portion of the end face 108 of the first module 102, and a portion of the other end face 114 of the second module 103 form a positioning part 127.

[0127] At the front end of the corner formed by the inclined surface 138 and the side surface 141 in the fourth module 130, one end 145 on the side of the end face 139 abuts against the other end face 109 of the first module 102. At the front end of the corner formed by the inclined surface 138 and the side surface 141 in the fourth module 130, another end 146 on the side of the other end face 140 abuts against the end face 113 of the second module 103. The ends 145 and 146 of the fourth module 130, a portion of the end face 113 of the second module 103, and a portion of the other end face 109 of the first module 102 form a positioning part 127.

[0128] As described above, the base 128 can also be assembled in a manner that creates a space in the central part. Even with such a base 128, the orthogonality of the axes of each sensor 104, 105, 131, and 132 can be ensured by the positioning part 127.

[0129] (Seventh Implementation)

[0130] In this embodiment, the differences from the sixth embodiment will be mainly described. For example... Figure 25 and Figure 26 As shown, the first module 102 has a cut surface 147, which is formed by cutting off an end of the first module 102 along the z-axis, which is composed of an inclined surface 107, a side surface 110 and an end surface 108.

[0131] Additionally, the first module 102 has another cut surface 148, which is formed by cutting off another end of the first module 102, consisting of an inclined surface 107, a side surface 110, and another end surface 109, along the z-axis.

[0132] Similarly, the second module 103 has a cut surface 149 and another cut surface 150. The third module 129 has a cut surface 151 and another cut surface 152. The fourth module 130 has a cut surface 153 and another cut surface 154.

[0133] One cut surface 147 of the first module 102 contacts another cut surface 152 of the third module 129. Another cut surface 148 of the first module 102 contacts one cut surface 153 of the fourth module 130. Therefore, each cut surface 147, 148 of the first module 102, the other cut surface 152 of the third module 129, and the cut surface 153 of the fourth module 130 constitute the positioning part 127.

[0134] One cut surface 149 of the second module 103 contacts another cut surface 154 of the fourth module 130. Another cut surface 150 of the second module 103 contacts one cut surface 151 of the third module 129. Therefore, each cut surface 149, 150 of the second module 103, the other cut surface 154 of the fourth module 130, and the cut surface 151 of the third module 129 constitute the positioning part 127.

[0135] As described above, the base 128 can also be assembled with a smaller central space than in the sixth embodiment. This allows for miniaturization of the base 128.

[0136] (Eighth Implementation Method)

[0137] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 27 As shown, one side 110 of the first module 102 contacts the other side 137 of the third module 129. The other side 111 of the first module 102 contacts one side 141 of the fourth module 130.

[0138] Additionally, one side 115 of the second module 103 contacts another side 142 of the fourth module 130. Another side 116 of the second module 103 contacts one side 136 of the third module 129.

[0139] Therefore, the sides 110 and 111 of the first module 102, the sides 115 and 116 of the second module 103, the sides 136 and 137 of the third module 129, and the sides 141 and 142 of the fourth module 130 constitute the positioning part 127. The orthogonality accuracy of each axis of each sensor 104, 105, 131, and 132 is ensured by the shape accuracy of each module 102, 103, 129, and 130.

[0140] Furthermore, sensors 104, 105, 131, and 132 are mounted on modules 102, 103, 129, and 130 in a manner that does not cause axial deviation relative to the first and second other axes. The orthogonality accuracy of the inclined surfaces 107, 112, 133, and 138 of modules 102, 103, 129, and 130 is specified by the machining accuracy, thus ensuring sufficient orthogonality accuracy. This achieves high axial orthogonality.

[0141] As described above, the base 128 is constructed by assembling the modules 102, 103, 129, and 130 in a cuboid shape. The base 128 is mounted on the mounting surface 106 of the mounting member 101 with one end face 108, 113, 134, or 139 of each module 102, 103, 129, or 130 located on the upper surface.

[0142] The inclined surfaces 107, 112, 133, and 138 of each module 102, 103, 129, and 130 are configured perpendicularly to the mounting surface 106 of the mounting member 101. The inclination of each inclined surface 107, 112, 133, and 138 also includes the case where each inclined surface 107, 112, 133, and 138 is perpendicular to the mounting surface 106.

[0143] In this embodiment, sensors 104, 105, 131, and 132 are biaxial acceleration sensors. The first sensor 104 and the second sensor 105 are arranged along the x-axis. The third sensor 131 and the fourth sensor 132 are arranged along the y-axis.

[0144] Acceleration along the x-axis is detected by the third sensor 131 and the fourth sensor 132. Acceleration along the y-axis is detected by the first sensor 104 and the second sensor 105. Acceleration along the z-axis is detected by all four sensors 104, 105, 131, and 132. Even if one of the sensors 104, 105, 131, or 132 fails, the remaining three can still be used to detect acceleration along all three axes.

[0145] (Ninth Implementation)

[0146] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figures 28-30 As shown, the first module 102 has a connecting portion 155. The connecting portion 155 is the part used to connect with the contact object when in contact with the contact object.

[0147] The connecting part 155 is, for example, a fitting part. Figure 29 As shown, the connecting portion 155 is a protrusion formed on one side 110 of the first module 102. Additionally, as... Figure 30 As shown, the connecting portion 155 is a recess formed on the other side 111 of the first module 102. The other modules 103, 129, and 130 also have the connecting portion 155 in the same way.

[0148] The modules 102, 103, 129, and 130 are connected by inserting the protrusion of one module into the recess of another module. Additionally, if a groove is provided on the mounting member 101 for fixing the base 128, the base 128 is mounted to the mounting member 101 without tilting.

[0149] As a variation, such as Figure 31 As shown, a magnet can also be used as the connecting part 155. The magnet is embedded in a pre-formed groove with its S pole located on one side 110 of the first module 102. Alternatively, the magnet is embedded in a pre-formed groove with its N pole located on the other side 111 of the first module 102. Or, as... Figure 32 As shown, magnets can also be embedded in the first module 102. Magnets are similarly disposed on the other modules 103, 129, and 130. The base 128 is assembled by the attraction of the individual magnets. The first module 102 can also be formed with reduced weight through embedding.

[0150] (Tenth Implementation)

[0151] In this embodiment, the differences from the embodiments described above will be mainly explained. In this embodiment, the multi-axis inertial force sensor 100 is applicable to an IMU (Inertial Measurement Unit).

[0152] Specifically, such as Figure 33 As shown, in addition to the base 128 and the sensors 104, 105, 131 and 132, the IMU156 also has a sealed base 157, a sealed cover 158 and a printed circuit board 159.

[0153] Base 128, for example, adopts Figure 25The structure shown is as follows. Wiring and electrodes are formed on the inclined surfaces 107, 112, 133, and 138 of each module 102, 103, 129, and 130 using the MID process, and external components 119, sensors 104, 105, 131, and 132, and sockets 160 to 163 are installed thereon.

[0154] Each sensor 104, 105, 131, and 132 is configured as a vacuum-sealed Z-axis gyroscope sensor. Therefore, as described above, the angular velocities of the x, y, and z axes are detected using the four sensors 104, 105, 131, and 132. Each socket 160-163 is a connection port for extracting signals from each sensor 104, 105, 131, and 132 and for supplying power.

[0155] The sealing base 157 and the sealing cover 158 are metal frames. The sealing base 157 and the sealing cover 158 are highly rigid. The sealing cover 158 is threadedly fixed through a threaded hole 164 provided on the sealing base 157. Therefore, the sealing base 157 and the sealing cover 158 are structures that are not easily affected by external interference.

[0156] A base 128, an accelerometer 166, multiple LSIs 167, multiple electronic components 168, multiple sockets 169, and an external socket 170 are mounted on one side 165 of the printed circuit board 159.

[0157] Accelerometer 166 is, for example, a triaxial accelerometer. Two accelerometers 166 are mounted on the printed circuit board 159. Therefore, IMU 156 can perform high-precision detection of six-axis inertial forces.

[0158] Regarding the multiple LSI167s, the LSI167s used for computation and the LSI167s with signal correction algorithms written on them are mounted on the printed circuit board 159. The multiple electronic components 168 are ICs, circuit components, etc.

[0159] Multiple sockets 169 are installed correspondingly to sockets 160-163 of modules 102, 103, 129, and 130. Each socket 169 is connected to each socket 160-163 via an FPC (Flexible Printed Circuit). This enables electrical connection between the printed circuit board 159 and the sensors 104, 105, 131, 132, etc. of modules 102, 103, 129, and 130.

[0160] The external socket 170 is an output port for extracting digital signals from the IMU 156 to external devices. The printed circuit board 159 is secured to the sealing base 157 by passing screws through threaded holes 171 provided on the sealing base 157.

[0161] As described above, the multi-axis inertial force sensor 100 can be configured as part of the IMU 156. Alternatively, the accelerometer 166 can be mounted on each of the modules 102, 103, 129, and 130 without being mounted on the printed circuit board 159. Furthermore, in this embodiment, the printed circuit board 159 corresponds to the mounting component, with one side 165 corresponding to the mounting surface.

[0162] (Eleventh Implementation Method)

[0163] In this embodiment, the differences from the tenth embodiment will be mainly described. For example... Figure 34 As shown, the IMU156 has a ceramic package 172 and a cover 173.

[0164] The ceramic package 172 is hermetically sealed by a retaining cap 173. The hermetically sealed seal is achieved by melting the frame-shaped solder 175 provided on the open end 174 of the ceramic package 172. The interior of the ceramic package 172 is hermetically sealed into a vacuum. Alternatively, to maintain the vacuum inside the ceramic package 172, a getter film may be provided on the back of the cap 173. Alternatively, a solid getter may be provided on the ceramic package 172.

[0165] The ceramic package 172 has multiple internal terminals 176 and multiple external terminals 177. The internal terminals 176 are disposed inside the ceramic package 172. The external terminals 177 are disposed on the wall surface of the ceramic package 172. Each external terminal 177 is used to output sensor signals from each of the sensors 104, 105, 131, and 132, and to supply power to each of the sensors 104, 105, 131, and 132. The internal terminals 176 and external terminals 177 are electrically connected internally within the ceramic package 172 via internal wiring.

[0166] The base 128 is directly mounted on the bottom surface 178 of the ceramic package 172. In the first module 102, the corner formed by the inclined surface 107 and another side surface 111 is chamfered and equipped with electrode pads 179 for wire bonding. The other modules 103, 129, and 130 are similarly configured. For example, the electrode pads 180 of the second module 103 are electrically connected to the internal terminals 176 of the ceramic package 172 via wire bonding. Thus, the second sensor 105 can be powered and can output sensor signals.

[0167] The second sensor 105 consists of sensor element 181 and ASIC 182. The third sensor 131 consists of sensor element 183 and ASIC 184. Sensor elements 181 and 183 are Z-axis gyroscope sensor elements. Sensor elements 181 and 183 are configured as open-package components. Sensor elements 181 and 183 can also adopt a WLP (Wasteless Liquid Packaging) structure, becoming a chip-level hermetically sealed vacuum. In this case, the interior of the ceramic package 172 only needs to be hermetically sealed; it does not need to be a vacuum. A getter film is also not required.

[0168] Each ASIC 182 and 184 activates each sensor element 181 and 183 to generate signals. Each sensor element 181 and 183, and each ASIC 182 and 184, are electrically connected to the electrodes of the inclined surfaces 112 and 133 via lead wires. The structures of the first sensor 104 and the fourth sensor 132 are the same as described above.

[0169] Additionally, x-axis, y-axis, and z-axis accelerometers are disposed inside the ceramic package 172. As a method for implementing a triaxial accelerometer, the Z-axis accelerometer can also be mounted on the inclined surfaces 107, 112, 133, and 138 of each of the modules 102, 103, 129, and 130. Alternatively, two triaxial accelerometers can be mounted on the bottom surface 178 of the ceramic package 172. For other configurations, any sensor capable of detecting triaxial acceleration is sufficient. In any embodiment, the accelerometer element is hermetically sealed to near atmospheric pressure using a WLP (Wastewater Plug-in). Electrical wiring is performed via lead bonding, similar to that used for gyroscope sensor elements.

[0170] Based on the above structure, an IMU 156 capable of detecting six-axis inertial forces is constructed. The IMU 156 is mounted, for example, on a printed circuit board of a self-positioning system via solder. The IMU 156 further isolates itself from external stress influences not only through the complementary effects of modules 102, 103, 129, and 130, but also through the high-rigidity ceramic package 172. Therefore, the zero point is less prone to change due to stress, enabling high-precision detection of six-axis inertial forces.

[0171] In addition, the ceramic package 172 in this embodiment corresponds to the mounting component, and the bottom surface 178 corresponds to the mounting surface.

[0172] (Twelfth Implementation)

[0173] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 35 As shown, the base 128 is assembled into a mountain shape based on the other side 137 and an end face 134 of the third module 129.

[0174] Specifically, one end face 113 of the second module 103 contacts the other side face 137 of the third module 129. One end face 134 of the third module 129 and the other side face 116 of the second module 103 are configured to be on the same side.

[0175] Therefore, a portion of one end face 113 of the second module 103 and a portion of the other side face 137 of the third module 129 become the positioning part 127.

[0176] The other side 111 of the first module 102 is in contact with both one end face 134 of the third module 129 and the other side 116 of the second module 103. A portion of the other side 142 of the fourth module 130 is in contact with one end face 108 of the first module 102. A portion of one end face 139 of the fourth module 130 is in contact with a portion of the other side 116 of the second module 103.

[0177] Therefore, a portion of the other side 111 and a portion of the end face 108 of the first module 102, and a portion of the other side 116 of the second module 103, become the positioning part 127. In addition, a portion of the end face 134 of the third module 129, and a portion of the other side 142 and a portion of the end face 139 of the fourth module 130, become the positioning part 127.

[0178] As described above, the first module 102 and the second module 103 may not be configured in a straight line. Similarly, the third module 129 and the fourth module 130 may not be configured in a straight line.

[0179] As a variation, in Figure 35 In the configuration of modules 102, 103, 129, and 130 shown, the inclined surface 107 of the first module 102 can also be configured to face the inclined surface 112 of the second module 103. In this case, the inclined surface 133 of the third module 129 is configured to face the second module 103, and the inclined surface 138 of the fourth module 130 is configured to face the first module 102.

[0180] (Thirteenth Implementation Method)

[0181] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 36 As shown, the dimensions of each module 102, 103, 129, and 130 are different. For example, the dimensions increase in the order of first module 102, second module 103, third module 129, and fourth module 130. The base 128 is assembled, for example, based on the first module 102. Furthermore, the dimensions of each module 102, 103, 129, and 130 can be appropriately determined.

[0182] (Fourteenth Implementation)

[0183] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 37 As shown, when the dimensions of modules 102, 103, 129, and 130 are the same, the base 128 is assembled with the second module 103 as a reference. In this case, the first module 102, the third module 129, and the fourth module 130 do not contact each other. Alternatively, the dimensions of modules 102, 103, 129, and 130 can also be different.

[0184] (Fifteenth Implementation)

[0185] In this embodiment, the differences from the embodiments described above will be mainly explained. For example... Figure 38 As shown, when the dimensions of modules 102, 103, 129, and 130 are different, the base 128 is assembled with the first module 102 as a reference. In this case, the second module 103, the third module 129, and the fourth module 130 do not contact each other.

[0186] This disclosure is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of this disclosure as follows.

[0187] For example, sensors 104, 105, 131, and 132 can also be configured as multi-axis sensors instead of single-axis sensors.

[0188] The sensors configured on the inclined surfaces 107, 112, 133, and 138 of modules 102, 103, 129, and 130 are not limited to one. Alternatively, not only Z-axis gyroscope sensors but also Z-axis accelerometer sensors can be configured on modules 102, 103, 129, and 130. This allows for the construction of a six-axis inertial force sensor.

[0189] The end faces 108 and 109 of the first module 102 may not be in the shape of right-angled isosceles triangles. That is, the inclined surface 107 of the first module 102 may not be inclined at an angle of 45° relative to the mounting surface 106 of the mounting member 101.

[0190] Each of the inclined surfaces 107, 112, 133, and 138 of modules 102, 103, 129, and 130 only needs to be inclined relative to the mounting surface 106. Therefore, each of modules 102, 103, 129, and 130 can be formed not only with each inclined surface 107, 112, 133, and 138 inclined at an acute angle or vertically relative to the mounting surface 106, but also with an obtuse angle.

[0191] That is, modules 102, 103, 129, and 130 can also be formed into trapezoidal shapes or arbitrary shapes instead of triangular prisms.

[0192] The base 128 can also be assembled such that the end face of one of the modules 102, 103, 129, and 130 faces the end face of another module. Alternatively, the base 128 can also be assembled such that the inclined surface of one of the modules 102, 103, 129, and 130 faces the side surface of another module.

[0193] The number of modules constituting the base 128 is not limited to two or four, as long as there are two or more. The base 128 can be assembled not only by an even number of modules, but also by an odd number of modules.

[0194] The base 128 may also include modules whose inclined surfaces face the same direction.

[0195] This disclosure is based on embodiments, but it should be understood that this disclosure is not limited to these embodiments or structures. This disclosure also includes various modifications and equivalent variations. Furthermore, various combinations and forms, and consequently other combinations and forms including only one element, or more or fewer elements, also fall within the scope and spirit of this disclosure.

Claims

1. A multi-axis inertial force sensor, characterized in that, include: Mounting components have mounting surfaces; Multiple modules are configured on the mounting surface of the mounting component and have an inclined surface that is tilted relative to the mounting surface; as well as Multiple sensors are respectively disposed on the inclined surfaces of the multiple modules, and detect the inertial force corresponding to the main shaft. The plurality of modules have positioning parts that, when in contact with at least one or more of the modules, relatively determine their position relative to the contacting object. The plurality of modules are assembled into a base by means of the positioning parts determining their relative positions to each other and the inclined surfaces facing different directions. The plurality of sensors are respectively disposed on the inclined surface of the base so that the main shaft faces different directions, and respectively detect the vector component of the inertial force corresponding to the main shaft. The plurality of modules are triangular prism-shaped first, second, third, and fourth modules, each having a pair of end faces in the shape of a right-angled triangle connected to the inclined surface and a pair of side faces connected to the inclined surface and the end faces. The inclined surface is the surface corresponding to the hypotenuse of the right triangle. One side of the first module, one side of the second module, one side of the third module, and one side of the fourth module are disposed on the mounting surface. The base is assembled by configuring it as follows: The other side of the first module faces and contacts the other side of the second module, thus being configured without gaps between them; The first module, the second module, and the third module are configured to contact each other without gaps, with one end face of the second module and the other end face of the first module facing the inclined surface of the third module; and The first module, the second module, and the fourth module are configured to contact each other without gaps, with one end face of the first module and the other end face of the second module facing the inclined surface of the fourth module.

2. A multi-axis inertial force sensor, characterized in that, include: Mounting components have mounting surfaces; Multiple modules are configured on the mounting surface of the mounting component and have an inclined surface that is tilted relative to the mounting surface; as well as Multiple sensors are respectively disposed on the inclined surfaces of the multiple modules, and detect the inertial force corresponding to the main shaft. The plurality of modules have positioning parts that, when in contact with at least one or more of the modules, relatively determine their position relative to the contacting object. The plurality of modules are assembled into a base by means of the positioning parts determining their relative positions to each other and the inclined surfaces facing different directions. The plurality of sensors are respectively disposed on the inclined surface of the base so that the main shaft faces different directions, and respectively detect the vector component of the inertial force corresponding to the main shaft. In the base The plurality of modules are triangular prism-shaped first, second, third, and fourth modules, each having a pair of end faces in the shape of a right-angled triangle connected to the inclined surface and a pair of side faces connected to the inclined surface and the end faces. The inclined surface is the surface corresponding to the hypotenuse of the right triangle. One side of the first module, one side of the second module, one side of the third module, and one side of the fourth module are disposed on the mounting surface. The base is assembled by configuring it as follows: The inclined surface of the third module faces the inclined surface of the fourth module, and the front end of the corner formed by the inclined surface of the third module and one side of the third module contacts the front end of the corner formed by the inclined surface of the fourth module and one side of the fourth module, so that the third module and the fourth module are configured without gaps between them. One end face of the fourth module and the other end face of the third module are positioned opposite and without gaps to the other side of the first module; and The other side of the second module faces one end face of the third module and the other end face of the fourth module and are arranged without gaps between them.

3. A multi-axis inertial force sensor, characterized in that, include: Mounting components have mounting surfaces; Multiple modules are configured on the mounting surface of the mounting component and have an inclined surface that is tilted relative to the mounting surface; as well as Multiple sensors are respectively disposed on the inclined surfaces of the multiple modules, and detect the inertial force corresponding to the main shaft. The plurality of modules have positioning parts that, when in contact with at least one or more of the modules, relatively determine their position relative to the contacting object. The plurality of modules are assembled into a base by means of the positioning parts determining their relative positions to each other and the inclined surfaces facing different directions. The plurality of sensors are respectively disposed on the inclined surface of the base so that the main shaft faces different directions, and respectively detect the vector component of the inertial force corresponding to the main shaft. The plurality of modules are triangular prism-shaped first, second, third, and fourth modules, each having a pair of end faces in the shape of a right-angled triangle connected to the inclined surface and a pair of side faces connected to the inclined surface and the end faces. The inclined surface is the surface corresponding to the hypotenuse of the right triangle. One side of the first module, one side of the second module, one side of the third module, and one side of the fourth module are disposed on the mounting surface. The inclined surface of the first module faces the inclined surface of the second module, and the first module and the second module are arranged with a gap between them. The inclined surface of the third module faces the inclined surface of the fourth module, and the third module and the fourth module are arranged with a gap between them. The base is assembled by configuring it as follows: One end of the corner portion formed by the inclined surface of the third module and one side surface of the third module, located on one end face side of the third module, abuts against the other end face of the second module; The other end of the corner portion formed by the inclined surface of the third module and one side surface of the third module, located on the other end face side of the third module, abuts against one end face of the first module; One end of the corner portion formed by the inclined surface of the fourth module and one side surface of the fourth module, located on one end face side of the fourth module, abuts against the other end face of the first module; and The other end of the corner formed by the inclined surface of the fourth module and one side of the fourth module, located on the other end face of the fourth module, abuts against one end face of the second module.

4. A multi-axis inertial force sensor, characterized in that, include: Mounting components have mounting surfaces; Multiple modules are configured on the mounting surface of the mounting component and have an inclined surface that is tilted relative to the mounting surface; as well as Multiple sensors are respectively disposed on the inclined surfaces of the multiple modules, and detect the inertial force corresponding to the main shaft. The plurality of modules have positioning parts that, when in contact with at least one or more of the modules, relatively determine their position relative to the contacting object. The plurality of modules are assembled into a base by means of the positioning parts determining their relative positions to each other and the inclined surfaces facing different directions. The plurality of sensors are respectively disposed on the inclined surface of the base so that the main shaft faces different directions, and respectively detect the vector component of the inertial force corresponding to the main shaft. The plurality of modules are triangular prism-shaped first, second, third, and fourth modules, each having a pair of end faces in the shape of a right-angled triangle connected to the inclined surface and a pair of side faces connected to the inclined surface and the end faces. The inclined surface is the surface corresponding to the hypotenuse of the right triangle. One side of the first module, one side of the second module, one side of the third module, and one side of the fourth module are disposed on the mounting surface. When the axis perpendicular to the setting plane is set as the z-axis, The first module has: a cut surface formed by cutting off one end portion, which is composed of an inclined surface of the first module, a side surface of the first module, and an end surface of the first module, along the z-axis; and another cut surface formed by cutting off another end portion, which is composed of an inclined surface of the first module, a side surface of the first module, and another end surface of the first module, along the z-axis. The second module has: a cut surface formed by cutting off one end portion, which is composed of an inclined surface of the second module, a side surface of the second module, and an end surface of the second module, along the z-axis; and another cut surface formed by cutting off another end portion, which is composed of an inclined surface of the second module, a side surface of the second module, and another end surface of the second module, along the z-axis. The third module has: a cut surface formed by cutting off one end portion, which is composed of the inclined surface of the third module, one side surface of the third module, and one end surface of the third module, along the z-axis; and another cut surface formed by cutting off another end portion, which is composed of the inclined surface of the third module, one side surface of the third module, and another end surface of the third module, along the z-axis. The fourth module has: a cut surface formed by cutting off one end portion, which is composed of the inclined surface of the fourth module, one side surface of the fourth module, and one end surface of the fourth module, along the z-axis; and another cut surface formed by cutting off another end portion, which is composed of the inclined surface of the fourth module, one side surface of the fourth module, and another end surface of the fourth module, along the z-axis. The base is assembled by configuring it as follows: The inclined surface of the first module faces the inclined surface of the second module, and the first module and the second module are arranged with a gap between them; The inclined surface of the third module faces the inclined surface of the fourth module, and the third module and the fourth module are arranged with a gap between them; One cut surface of the first module contacts another cut surface of the third module, and the other cut surface of the first module contacts one cut surface of the fourth module; and One cut surface of the second module is in contact with another cut surface of the fourth module, and the other cut surface of the second module is in contact with one cut surface of the third module.

5. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, The base is constructed by configuring the plurality of modules in a point-symmetric manner with reference to a reference point in the mounting surface of the mounting component.

6. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, When the direction perpendicular to the inclined plane is defined as the Z-axis... The plurality of sensors are single-axis gyroscope sensors configured with the main shaft parallel to the Z-axis and detecting the angular velocity around the Z-axis as the inertial force.

7. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, When the direction perpendicular to the inclined plane is defined as the Z-axis... The plurality of sensors are single-axis acceleration sensors configured with the main shaft parallel to the Z-axis and detecting acceleration in the Z-axis direction as the inertial force.

8. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, The end faces of the plurality of modules are in the shape of right-angled isosceles triangles.

9. The multi-axis inertial force sensor according to claim 8, characterized in that, The inclined surface is the surface corresponding to the hypotenuse of the right-angled isosceles triangle.

10. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, All of the modules are formed into the same shape.

11. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, The plurality of modules have a connecting portion for connecting to the contact object when in contact with at least one or more of the plurality of modules.

12. The multi-axis inertial force sensor according to any one of claims 1 to 4, characterized in that, The plurality of modules have electronic components disposed on the inclined surface.

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