Water conditioning method and system

Abstract

The present application relates to the technical field of computer, and provide a kind of water regulating method and system, the method comprises: obtaining turbidity sensor value and acid-base sensor value;Based on turbidity sensor value and acid-base sensor value respectively fuzzy operation, obtain turbidity fuzzy set and acidity fuzzy set;Based on turbidity fuzzy set and acidity fuzzy set, determine the incoming water credibility set, and based on incoming water credibility set and preset fuzzy control table, determine first credibility output;Based on first credibility output, determine target new incoming water flow, and with target new incoming water flow control new incoming water flow into water regulating system.The water regulating method provided in the embodiment of the present application is in the process of water regulating, according to turbidity sensor value and acid-base sensor value, fuzzy control operation is carried out, target new incoming water flow is determined, so as to control the amount of water flowing into water regulating system according to target new incoming water flow scientifically and accurately, so as to reduce water consumption, realize energy saving and emission reduction.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of computer, in particular to a water regulating method and system. BACKGROUND

[0002] The water tank of semiconductor waste gas treatment equipment generally has four liquid level sensors, which are low-low (LL) liquid level sensor, low (L) liquid level sensor, high (H) liquid level sensor and high-high (HH) liquid level sensor. The existing logic is generally as follows: when the liquid level detected by the high liquid level sensor reaches H level, start draining water, and when it reaches L level, start filling water, and the cycle is repeated. Under the above logic, a waste gas treatment machine needs about 7200L of water per day. A semiconductor factory often needs hundreds or even thousands of waste gas treatment equipment, so the amount of water needed is staggering, resulting in water waste. SUMMARY

[0003] The present application provides a water regulating method and system, aiming to reduce water consumption and achieve energy saving and emission reduction.

[0004] In a first aspect, the present application provides a water regulating method, comprising:

[0005] obtaining turbidity sensor values and pH sensor values;

[0006] performing fuzzy operations based on the turbidity sensor values and the pH sensor values respectively to obtain a turbidity fuzzy set and an acidity fuzzy set;

[0007] determining a water inflow credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determining a first credibility output based on the water inflow credibility set and a preset fuzzy control table;

[0008] determining a target new water inflow based on the first credibility output, and controlling new water inflow into the water regulating system at the target new water inflow.

[0009] In one embodiment, the performing fuzzy operations based on the turbidity sensor values and the pH sensor values respectively to obtain a turbidity fuzzy set and an acidity fuzzy set comprises:

[0010] matching a target turbidity membership function based on the turbidity sensor values, and matching a target acidity membership function based on the pH sensor values;

[0011] performing fuzzy operations based on the turbidity sensor values and the target turbidity membership function to obtain a plurality of turbidity fuzzy values, and collecting the plurality of turbidity fuzzy values to obtain the turbidity fuzzy set;

[0012] performing fuzzy operation based on the acid-base sensor values and the target acidity membership function to obtain a plurality of acidity fuzzy values, and collecting the plurality of acidity fuzzy values to obtain the acidity fuzzy set.

[0013] determining an incoming water credibility set based on the turbidity fuzzy set and the acidity fuzzy set, including:

[0014] combining any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set to obtain a plurality of turbidity-acidity arrays;

[0015] determining the minimum value in each turbidity-acidity array as the incoming water credibility fuzzy value of the turbidity-acidity array, and collecting the incoming water credibility fuzzy values of the turbidity-acidity arrays to obtain the incoming water credibility set.

[0016] determining a first credibility output based on the incoming water credibility set and a preset fuzzy control table, including:

[0017] determining the target incoming water amount fuzzy degree of each turbidity-acidity array in the preset fuzzy control table based on the target turbidity membership function and the target acidity membership function of each turbidity-acidity array;

[0018] performing intersection between the incoming water credibility fuzzy value and the target incoming water amount fuzzy degree of each turbidity-acidity array to obtain a plurality of membership degree outputs, and collecting the plurality of membership degree outputs to obtain the first credibility output.

[0019] determining a target new incoming water flow rate based on the first credibility output, including:

[0020] determining a target membership degree value and a target incoming water amount membership function based on the first credibility output;

[0021] performing fuzzy operation based on the target membership degree value and the target incoming water amount membership function to obtain the target new incoming water flow rate.

[0022] determining a target membership degree value and a target incoming water amount membership function based on the first credibility output, including:

[0023] in the first credibility output, determining a first membership degree output of the minimum incoming water credibility fuzzy value for the same target incoming water amount fuzzy degree, and deleting the remaining second membership degree outputs;

[0024] collecting the first membership degree output and a third membership degree output to obtain an updated second credibility output; the third membership degree output is the remaining membership degree output in the first credibility output except the first membership degree output and the second membership degree output.

[0025] determining the water inflow credibility fuzzy value with the maximum value in the second credibility output as the target membership value;

[0026] matching the target water inflow amount membership function according to the target water inflow amount fuzzy value corresponding to the water inflow credibility fuzzy value with the maximum value.

[0027] The fuzzy operation based on the target membership value and the target water inflow amount membership function to obtain the target new water inflow amount includes:

[0028] performing fuzzy operation on the target membership value and the target water inflow amount membership function to obtain a plurality of first new water inflow amounts;

[0029] performing mean value calculation based on the plurality of first new water inflow amounts to obtain a second new water inflow amount;

[0030] performing reverse calculation on the target new water inflow amount based on the second new water inflow amount and a preset conversion formula.

[0031] In a second aspect, the application provides a water regulating system for the water regulating method according to the first aspect, which includes: a water tank acid-base neutralization system and a water tank filtration system.

[0032] The water tank acid-base neutralization system is used for performing alkaline neutralization treatment on the water to be treated in the water tank to obtain recycled water.

[0033] The water tank filtration system is used for performing dust filtration treatment on the water to be treated in the water tank to obtain recycled water.

[0034] In an embodiment, the water tank acid-base neutralization system includes a water tank, a two-position three-way valve and a solid alkali catalyst filter tank.

[0035] The water outlet of the water tank is connected with the water inlet of the two-position three-way valve.

[0036] The first water outlet of the two-position three-way valve is connected with the water inlet of the solid alkali catalyst filter tank, and the second water outlet of the two-position three-way valve is connected with the water inlet of the water storage device of the machine table; the water outlet of the solid alkali catalyst filter tank is connected with the water inlet of the water storage device.

[0037] The water tank filtration system includes a water tank, a diaphragm pump, a filter and a centrifugal water pump.

[0038] The first water outlet of the water tank is connected with the water inlet of the diaphragm pump, the water outlet of the diaphragm pump is connected with the water inlet of the filter, and the water outlet of the filter is connected with the water inlet of the water tank.

[0039] The second water outlet of the water tank is connected with the water inlet of the centrifugal water pump, and the water outlet of the centrifugal water pump is connected with the water inlet of the water storage device of the machine table.

[0040] The filter comprises a plurality of filter screens.

[0041] The first position of the first water outlet is lower than the second position of the second water outlet.

[0042] In a third aspect, the present application further provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement the water adjusting method of the first aspect.

[0043] In a fourth aspect, the present application further provides a non-transitory computer readable storage medium, comprising a computer program, wherein the computer program is executed by the processor to implement the water adjusting method of the first aspect.

[0044] In a fifth aspect, the present application further provides a computer program product, comprising a computer program, wherein the computer program is executed by the processor to implement the water adjusting method of the first aspect.

[0045] The water adjusting method and system provided by the present application obtain turbidity sensor values and acid-base sensor values; perform fuzzy operation based on the turbidity sensor values and the acid-base sensor values respectively to obtain turbidity fuzzy sets and acidity fuzzy sets; determine an inlet water credibility set based on the turbidity fuzzy sets and the acidity fuzzy sets, and determine a first credibility output based on the inlet water credibility set and a preset fuzzy control table; determine a target new inlet water flow based on the first credibility output, and control new inlet water to flow into the water adjusting system at the target new inlet water flow. In the process of water adjusting, the target new inlet water flow is determined by performing fuzzy control operation according to the turbidity sensor values and the acid-base sensor values, so that the amount of inlet water flowing into the water adjusting system is scientifically and accurately controlled according to the target new inlet water flow, thereby reducing the amount of water and achieving energy saving and emission reduction. BRIEF DESCRIPTION OF DRAWINGS

[0046] In order to more clearly illustrate the technical solutions of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0047] Figure 1 is a flowchart of the water adjusting method provided by the present application;

[0048] Figure 2It is the schematic diagram of water tank fuzzy control water inlet and outlet system provided by the application.

[0049] Figure 3 It is the schematic diagram of water tank acid-base neutralization provided by the application.

[0050] Figure 4 It is the schematic diagram of water tank filtering system provided by the application.

[0051] Figure 5 It is the overall scheme flow chart of water regulating method and system provided by the application. DETAILED DESCRIPTION

[0052] To make the purpose, technical scheme and advantages of the present application clearer, the technical scheme in the present application will be described clearly and completely below in combination with the drawings in the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0053] The embodiments of the present application provide the embodiments of the water regulating method. It should be noted that although the logical sequence is shown in the flow chart, under certain data, the steps shown or described can be completed in an order different from that here.

[0054] Reference Figure 1 , Figure 1 It is the flow chart of the water regulating method provided by the present application. The water regulating method provided by the embodiments of the present application comprises:

[0055] Step 101, acquiring turbidity sensor value and acid-base sensor value.

[0056] The embodiments of the present application take a machine table as an execution subject. The machine table can be understood as a water regulating management system.

[0057] Specifically, the water circulation system of the semiconductor waste gas treatment equipment is adopted in the embodiments of the present application. On the basis of maintaining the water washing waste removal function of the waste gas treatment equipment, the acid neutralization equipment and the filtering system are added in the water circulation system of the semiconductor waste gas treatment equipment, and the water saving algorithm processing is performed. It should be noted that the semiconductor waste gas treatment refers to the treatment of the waste gas generated in the semiconductor production process. The generated waste gas is washed and removed by the water circulation system. The used water will generate acid in the process of treating hydrogen chloride gas and hydrogen fluoride gas and will become turbid in the process of treating the waste gas which is insoluble in water.

[0058] Further, in the embodiment of the present application, the main factors affecting the new water inflow in the water circulation system are the pH value and the turbidity, and therefore, the pH value and the turbidity need to be collected during the water circulation. The pH value is collected by the pH sensor, i.e. determined by acquiring the pH sensor value, and the turbidity is collected by the turbidity sensor, i.e. determined by acquiring the turbidity sensor value.

[0059] Therefore, referring to Figure 2 , Figure 2 is a schematic diagram of the water tank fuzzy control water inlet and outlet system provided by the present application, 1 represents a water tank, 2 represents a turbidity sensor, 3 represents a pH sensor, 4 represents a new water inlet pipe, 5 represents an angle valve, 6 represents a new water flow meter, 7 represents a water outlet valve, 8 represents a waste water outlet pipe, and 9 represents a circulating water outlet pipe. It should be noted that the bottom of the water tank is a relatively static area in the water tank, and the water quality changes relatively little, and therefore, the turbidity sensor 2 and the pH sensor 3 are placed at the bottom of the water tank, which can ensure the stability of the measured values.

[0060] In the water tank fuzzy control water inlet and outlet system, the water inlet of the angle valve 5 is connected with the new water inlet pipe 4, which is used to control the water flow of the new water. The water inlet of the new water flow meter 6 is connected with the water outlet of the angle valve 5, the water outlet of the new water flow meter 6 is connected with the water inlet of the water tank 1, which is used to measure the water flow of the new water. The water inlet of the circulating water outlet pipe 9 is connected with the first water outlet of the water tank 1, the water outlet of the circulating water outlet pipe 9 is connected with the water inlet of the water storage device of the machine table, which is used to discharge the circulating water to the water storage device, and the circulating water is the recyclable water obtained by the alkaline neutralization treatment and the dust filtration treatment of the water to be treated in the water tank 1. The water inlet of the water outlet valve 7 is connected with the second water outlet of the water tank 1, and the water outlet of the water outlet valve 7 is connected with the water inlet of the waste water outlet pipe 8, which is used to control the discharge of waste water at a certain water flow.

[0061] Further, it should be noted that the pH value represents the strength of the acidic environment, and the stronger the acidity, the more acid is generated during the waste gas treatment process, and the strength of the acidity affects the service life of the waste gas treatment equipment, and therefore, an acidic neutralization device is added to the water circulation system of the semiconductor waste gas treatment equipment. At the same time, the turbidity represents the amount of dust generated, and the more dust, the more turbid the water, which can cause the water circulation system to be blocked, and therefore, a filtration system is added to the water circulation system of the semiconductor waste gas treatment equipment.

[0062] Step 102, based on the turbidity sensor value and the pH sensor value, fuzzy operation is performed respectively to obtain a turbidity fuzzy set and a pH fuzzy set.

[0063] For the turbidity value a, the turbidity value a is divided into three fuzzy sets in advance, the three fuzzy sets of the turbidity value a are turbidity low, turbidity medium and turbidity high, and the turbidity low is represented as SD, the turbidity medium is represented as MD, and the turbidity high is represented as LD. It should be noted that the turbidity low SD, the turbidity medium MD and the turbidity high LD are all provided with corresponding turbidity membership functions in advance.

[0064] For the acidity value b, the acidity value b is divided into three fuzzy sets in advance, the three fuzzy sets of the acidity value b are acidity low, acidity medium and acidity strong, and the acidity low is represented as SA, the acidity medium is represented as MA, and the acidity strong is represented as LA. It should be noted that the acidity low SA, the acidity medium MA and the acidity strong LA are all provided with corresponding acidity membership functions in advance.

[0065] For the new water inflow c, the new water inflow c of the water tank new water is divided into five fuzzy sets in advance, the five fuzzy sets of the new water inflow c are very little inflow, little inflow, medium inflow, large inflow and very large inflow, the very little inflow is represented as VS, the little inflow is represented as S, the medium inflow is represented as M, the large inflow is represented as L, and the very large inflow is represented as VL. It should be noted that the very little inflow VS, the little inflow S, the medium inflow M, the large inflow L and the very large inflow VL are all provided with corresponding inflow membership functions in advance. The new water inflow of the water tank is the new water inflow when the water circulation system performs water tank water replacement in the waste gas treatment process.

[0066] Further, the turbidity membership function is determined according to the turbidity sensor value, and the turbidity sensor value is subjected to fuzzy operation with the turbidity membership function, a plurality of turbidity fuzzy values obtained are collected to obtain a turbidity fuzzy set. At the same time, the acidity membership function is determined according to the acid-base sensor value, and the acid-base sensor value is subjected to fuzzy operation with the acidity membership function, a plurality of acidity fuzzy values obtained are collected to obtain an acidity fuzzy set.

[0067] In step 103, based on the turbidity fuzzy set and the acidity fuzzy set, an inflow credibility set is determined, and based on the inflow credibility set and a preset fuzzy control table, a first credibility output is determined.

[0068] In step 104, based on the first credibility output, a target new inflow flow rate is determined, and the target new inflow flow rate is used to control the new inflow into the water regulating system.

[0069] Specifically, refer to Table 1, which is a preset fuzzy control table. As can be seen from Table 1, the greater the turbidity value a and the greater the acidity value b, the greater the new water inflow c, and the greater the water tank water replacement amount, and vice versa. It should be noted that the turbidity value a is determined according to the turbidity sensor value, the value of which is 0-100, the acidity value b is determined according to the acid-base sensor value, the value of which is 7-1, so it needs to be converted to 0-100 through a preset conversion formula, and the new water inflow c is determined according to the turbidity value a and the acidity value b.

[0070] Table 1 Preset fuzzy control table

[0071]

[0072] Further, any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are taken, any two values obtained are combined to obtain a plurality of turbidity-acidity arrays. The two values in each turbidity-acidity array are taken to be the minimum value, the minimum value obtained is determined to be the water inflow credibility fuzzy value of each turbidity-acidity array, and all water inflow credibility fuzzy values are collected to obtain a water inflow credibility set. Based on the target turbidity membership function and the target acidity membership function of each turbidity-acidity array, the target water inflow fuzzy degree of each turbidity-acidity array in the preset fuzzy control table is determined, and the water inflow credibility fuzzy value of each turbidity-acidity array and its target water inflow fuzzy degree are intersected and collected to obtain a first credibility output.

[0073] Further, based on the first credibility output, a target new water inflow is determined, and the target new water inflow is used to control the new water flow into the water regulation system.

[0074] The water regulation method provided by the embodiment of the application acquires a turbidity sensor value and an acid-base sensor value, performs fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set, determines a water inflow credibility set based on the turbidity fuzzy set and the acidity fuzzy set, and determines a first credibility output based on the water inflow credibility set and a preset fuzzy control table. Based on the first credibility output, a target new water inflow is determined, and the target new water inflow is used to control the new water flow into the water regulation system. In the process of water regulation, the target new water inflow is determined according to the turbidity sensor value and the acid-base sensor value through fuzzy control operation, so that the water inflow into the water regulation system is scientifically and accurately controlled according to the target new water inflow, thereby reducing the water consumption and achieving energy saving and emission reduction.

[0075] Further, step 102 performs fuzzy operation based on the turbidity sensor value and the acid-base sensor value to obtain a turbidity fuzzy set and an acidity fuzzy set, including:

[0076] The target turbidity membership function is matched based on the turbidity sensor value, and the target acidity membership function is matched based on the acid-base sensor value;

[0077] The turbidity fuzzy values are obtained by performing fuzzy operation based on the turbidity sensor value and the target turbidity membership function, and the turbidity fuzzy set is obtained by collecting the turbidity fuzzy values;

[0078] The acidity fuzzy values are obtained by performing fuzzy operation based on the acid-base sensor value and the target acidity membership function, and the acidity fuzzy set is obtained by collecting the acidity fuzzy values.

[0079] Specifically, the turbidity value a is the turbidity sensor value 0-100, the acid-base sensor value is 7-1, the smaller the value, the stronger the acidity, and the acid-base sensor value needs to be converted to the acidity value b of 0-100 by a preset conversion formula. Generally, the water tank new water inflow value c is a value of 0-100, therefore, the water tank new water inflow value c needs to be converted to the new water inflow of 3-9 L / min by a preset conversion formula.

[0080] In this embodiment, the preset conversion formula for converting the acidity value b is:

[0081]

[0082] Wherein, x is the acid-base sensor value 7-1, and y is the acidity value b.

[0083] The preset conversion formula for converting the water tank new water inflow value is:

[0084]

[0085] Wherein, x is the new water inflow, and y is the water tank new water inflow c.

[0086] Further, it needs to be explained that the preset turbidity membership function is:

[0087] The turbidity membership function of low turbidity SD is

[0088] The turbidity membership function of medium turbidity MD is

[0089] The turbidity membership function of medium turbidity MD is

[0090] The turbidity membership function of high turbidity LD is

[0091] The preset acidity membership function is:

[0092] The acidity membership function of low acidity SA is

[0093] The acidity membership function of medium acidity MA is

[0094] The acidity membership function of medium acidity MA is

[0095] The acidity membership function of strong acidity LA is

[0096] The preset new water inflow membership function is:

[0097] The new water inflow membership function of very small inflow VS is

[0098] The new water inflow membership function of small inflow S is

[0099] The new water inflow membership function of small inflow S is

[0100] The new water inflow membership function of medium inflow M is

[0101] The new water inflow membership function of medium inflow M is

[0102] The new water inflow membership function of large inflow L is

[0103] The new water inflow membership function of large inflow L is

[0104] The new water inflow membership function of very large inflow VL is

[0105] It should be noted that the membership function is a function commonly used in fuzzy logic and fuzzy sets to describe the degree of belonging of an element to a certain fuzzy set, usually represented by a real number between 0 and 1. The membership function is a mathematical function whose input is an element and whose output is the membership degree of the element to the fuzzy set of interest.

[0106] Further, according to the turbidity value, the turbidity membership function is matched in the preset turbidity membership function to obtain a target turbidity membership function, and according to the acidity value, the acidity membership function is matched in the preset acidity membership function to obtain a target acidity membership function.

[0107] Further, in the embodiment, the turbidity value is substituted into the target turbidity membership function, a plurality of turbidity fuzzy values are calculated by fuzzy operation of the target turbidity membership function, and the plurality of calculated turbidity fuzzy values are collected to obtain a turbidity fuzzy set. The acidity value is substituted into the target acidity membership function, a plurality of acidity fuzzy values are calculated by fuzzy operation of the target acidity membership function, and the plurality of calculated acidity fuzzy values are collected to obtain an acidity fuzzy set.

[0108] In an embodiment, the turbidity value a is 30, and the target turbidity membership function matched according to the turbidity value a = 30 is The turbidity value a = 30 is substituted into the target turbidity membership function , to obtain a turbidity fuzzy value The turbidity value a = 30 is substituted into the target turbidity membership function , to obtain a turbidity fuzzy value The turbidity fuzzy values and are collected to obtain a turbidity fuzzy set The acidity value b is 60, and the target acidity membership function matched according to the acidity value b = 60 is The acidity value b = 60 is substituted into the target acidity membership function , to obtain an acidity fuzzy value The acidity value b = 60 is substituted into the target acidity membership function , to obtain an acidity fuzzy value The acidity fuzzy values and are collected to obtain an acidity fuzzy set

[0109] Further, step 103 determines an inlet water credibility set based on the turbidity fuzzy set and the acidity fuzzy set, including:

[0110] Any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are combined to obtain a plurality of turbidity-acidity arrays.

[0111] The minimum value in each turbidity-acidity array is determined as the inlet water credibility fuzzy value of each turbidity-acidity array, and the inlet water credibility fuzzy values of each turbidity-acidity array are collected to obtain the inlet water credibility set.

[0112] Specifically, any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are taken, and any two values taken are combined to obtain a plurality of turbidity-acidity arrays, and each turbidity-acidity array can be represented as (turbidity fuzzy value, acidity fuzzy value).

[0113] Further, the two values in each turbidity-acidity array are compared in size to obtain the minimum value in the turbidity-acidity array, that is, if the turbidity fuzzy value in the turbidity-acidity array is greater than the acidity fuzzy value, the acidity fuzzy value is determined as the minimum value of the turbidity-acidity array.

[0114] Further, the minimum value of each turbidity-acidity array is determined as the water inlet credibility fuzzy value of each turbidity-acidity array. Further, the water inlet credibility fuzzy values of all turbidity-acidity arrays are collected to obtain a water inlet credibility set.

[0115] In an embodiment, the turbidity fuzzy set comprises turbidity fuzzy values and The acidity fuzzy set comprises acidity fuzzy values and Any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are combined to obtain a plurality of turbidity-acidity arrays, that is, the turbidity fuzzy value is combined with the acidity fuzzy value and The turbidity fuzzy value is combined with the acidity fuzzy value and to obtain a plurality of turbidity-acidity arrays, respectively The two values in each turbidity-acidity array are compared in size to obtain the minimum value in the turbidity-acidity array, and the minimum value of each turbidity-acidity array is determined as the water inlet credibility fuzzy value of each turbidity-acidity array. Therefore, the water inlet credibility fuzzy value of the turbidity-acidity array is The water inlet credibility fuzzy value of the turbidity-acidity array is The water inlet credibility fuzzy value of the turbidity-acidity array is The water inlet credibility fuzzy value of the turbidity-acidity array is The water inlet credibility fuzzy values of each turbidity-acidity array are collected to obtain a water inlet credibility set

[0116] Further, step 103 determines a first credibility output based on the water inlet credibility set and a preset fuzzy control table, comprising:

[0117] Based on the target turbidity membership function and the target acidity membership function of each turbidity-acidity array, the target water inlet amount fuzzy degree of each turbidity-acidity array in the preset fuzzy control table is determined;

[0118] The water inflow credibility fuzzy value of each turbidity-acidity array and the target water inflow fuzzy degree are intersected to obtain a plurality of membership outputs, and the plurality of membership outputs are combined to obtain the first credibility output.

[0119] Specifically, each turbidity-acidity array is obtained by combining any turbidity fuzzy value and any acidity fuzzy value. Therefore, the target turbidity membership function and the target acidity membership function are determined according to the turbidity fuzzy value and the acidity fuzzy value, and the target water inflow fuzzy degree of each turbidity-acidity array is determined by matching the target turbidity membership function and the target acidity membership function in the preset fuzzy control table as shown in Table 1 above. In an embodiment, the target turbidity membership function of the turbidity-acidity array A is U SD (a), the target acidity membership function is U SA (b), and the target water inflow fuzzy degree of the turbidity-acidity array A is matched in the preset fuzzy control table as U VS .

[0120] Further, the water inflow credibility fuzzy value of each turbidity-acidity array and the determined target water inflow fuzzy degree are intersected to obtain a plurality of membership outputs, which can be represented as (water inflow credibility fuzzy value, target water inflow fuzzy degree), and the plurality of membership outputs are combined to obtain the first credibility output.

[0121] In an embodiment, the turbidity fuzzy set includes turbidity fuzzy values and The acidity fuzzy set includes acidity fuzzy values and Four turbidity-acidity arrays are obtained by any combination Turbidity fuzzy value The determined target turbidity membership function is U SD , turbidity fuzzy value The determined target turbidity membership function is U MD , acidity fuzzy value The determined target acidity membership function is U MA , acidity fuzzy value The determined target acidity membership function is U LA , according to the target turbidity membership function U SD and the target acidity membership function U MA , the target water inflow fuzzy degree of the turbidity-acidity array is determined by matching in the preset fuzzy control table as shown in Table 1 above. S , according to the target turbidity membership function U MD and the target acidity membership function U MAMatching is performed in the preset fuzzy control table as shown in Table 1 above to determine the turbidity and acidity array. The ambiguity of the target inflow is U M According to the target turbidity membership function U SD and the target acidity membership function U LA Matching is performed in the preset fuzzy control table as shown in Table 1 above to determine the turbidity and acidity array. The ambiguity of the target inflow is U M According to the target turbidity membership function U MD and the target acidity membership function U LA Matching is performed in the preset fuzzy control table as shown in Table 1 above to determine the turbidity and acidity array. The ambiguity of the target inflow is U L The minimum value is taken from the two values ​​in each turbidity and acidity array. This minimum value is determined as the fuzzy confidence value of the influent for each turbidity and acidity array. Therefore, the fuzzy confidence value of the water is... The intersection of the fuzzy values ​​of the influent confidence level and the fuzzy values ​​of the determined target influent flow rate for each turbidity and acidity array yields multiple membership outputs. The first confidence level output is obtained by aggregating multiple membership level outputs.

[0122] Further, step 104, based on the first confidence output, determines the target new inflow rate and controls the new inflow into the water use regulation system using the target new inflow rate, including:

[0123] In the first confidence output, for the same target water inflow ambiguity, the first membership output with the smallest water inflow confidence ambiguity value is determined, and the remaining second membership outputs are deleted;

[0124] The first membership output and the third membership output are combined to obtain the updated second confidence output; the third membership output is the remaining membership output in the first confidence output excluding the first membership output and the second membership output.

[0125] The fuzzy value of the water inflow confidence that has the largest value in the second confidence output is determined as the target membership value;

[0126] Based on the target inflow fuzziness corresponding to the largest inflow confidence fuzziness value, the membership function of the target inflow is matched.

[0127] Specifically, in the first credibility output, the same target water inflow ambiguity needs to be processed by taking the minimum, specifically: for the same target water inflow ambiguity, the water inflow credibility fuzzy value corresponding to the same target water inflow ambiguity is compared in value size, and the water inflow credibility fuzzy value with the minimum value is taken. Further, the first membership output of the water inflow credibility fuzzy value with the minimum value is saved, and the remaining second membership output is deleted, and the second membership output is also the membership output of the water inflow credibility fuzzy value that is not the minimum value. In an embodiment, in the first credibility output, for the water inflow ambiguity U L , the corresponding water inflow credibility fuzzy value is The first credibility output contains and Since is greater than , the first membership output is saved , and the second membership output is deleted

[0128] Further, the first membership output and the third membership output are collected to obtain an updated second credibility output, and it needs to be noted that the third membership output is the remaining membership output in the first credibility output except the first membership output and the second membership output.

[0129] Further, the same target water inflow ambiguity is processed by taking the maximum, specifically: the water inflow credibility fuzzy values in the second credibility output are compared in value size, the water inflow credibility fuzzy value with the maximum value in the second credibility output is determined, and the water inflow credibility fuzzy value with the maximum value is determined as the target membership value. Further, according to the target water inflow ambiguity corresponding to the target membership value, the target water inflow membership function is determined.

[0130] In an embodiment, the plurality of membership outputs in the first credibility output are (c1, U S ), (c2, U M ), (c3, U M ), and (c4, U L ), wherein c1, c2, c3, and c4 are water inflow credibility fuzzy values, U S , U M , and U L are target water inflow ambiguities. For the same target water inflow ambiguity, that is, the membership outputs (c2, U M ) and (c3, U M ), and is less than the water inflow credibility fuzzy value with the minimum value is taken That is, c2, the first membership output of the water inflow credibility fuzzy value with the minimum value is determined as (c2, U M ), and the remaining second membership outputs (c3, U M ) are deleted. The remaining membership outputs of the first credibility output, except the first membership output and the second membership output, are third memberships, which are (c1, U S ), (c4, U L ). The first membership output and the third membership output are collected to obtain an updated second credibility output, which is (c1, U S ), (c2, U M ), (c4, U L ), that is According to the water inflow credibility fuzzy value with the maximum value in the second credibility output, a target membership value is determined, and the target membership value is obtained from The target membership value is According to the water inflow credibility fuzzy value with the maximum value, a target water inflow fuzzy degree is U M , and a target water inflow membership function is matched as It needs to be further explained that generally, the water inflow credibility fuzzy values have nine values of c1, c2, c3, c4, c5, c6, c7, c8 and c9, and many zero values in c1-c9 appear, which indicates that the corresponding arrays are invalid, and only valid data can be taken.

[0131] Further, step 104 determines a target new water inflow based on the first credibility output, and controls the new water inflow into the water regulating system by using the target new water inflow, and further includes:

[0132] The target membership value and the target water inflow membership function are subjected to fuzzy operation to obtain a plurality of first new water inflows.

[0133] The plurality of first new water inflows are subjected to mean value calculation to obtain a second new water inflow.

[0134] The target new water inflow is calculated reversely based on the second new water inflow and a preset conversion formula.

[0135] Specifically, the target membership value is substituted into the target water inflow membership function to perform fuzzy operation, and the plurality of first new water inflows are subjected to mean value calculation to obtain the second new water inflow. Further, the second new water inflow is substituted into the preset conversion formula to perform reverse calculation to calculate the target new water inflow.

[0136] In an embodiment, the target membership value is The corresponding target inflow ambiguity is then determined to be U. M U M The target inflow membership function for matching is Target membership value Substitute the target influent volume membership function In the process, the first new inflow volume was obtained as 35, and the target membership value was determined. Substitute the target influent volume membership function In the process, the first new inflow rate is 65. The average of the first new inflow rates of 35 and 65 yields a second new inflow rate of 50. The preset conversion formula for obtaining the new inflow rate is as follows: Substitute the second new inflow rate y = 50 into the preset conversion formula. If x = 6, then the target new inflow rate can be calculated in reverse as 6 L / min.

[0137] Furthermore, the water conditioning system of the water conditioning method includes: a water tank acid-base neutralization system and a water tank filtration system;

[0138] The water tank acid-base neutralization system is used to neutralize the water to be treated in the water tank with alkalinity to obtain recycled water;

[0139] The water tank filtration system is used to filter dust from the water to be treated in the water tank to obtain recycled water.

[0140] Specifically, in the water regulation system based on the water regulation method, the main factors affecting the amount of fresh water entering the water circulation system are pH and turbidity. Therefore, based on the water regulation method, a water tank acid-base neutralization system and a water tank filtration system are adopted.

[0141] It should be noted that the water tank acid-base neutralization system is used to neutralize the water to be treated in the water tank with alkalinity to obtain recycled water, and the water tank filtration system is used to filter the water to be treated in the water tank with dust to obtain recycled water.

[0142] Furthermore, the water tank acid-base neutralization system includes a water tank, a two-position three-way valve, and a solid alkali catalyst filter tank;

[0143] The outlet of the water tank is connected to the inlet of the two-position three-way valve;

[0144] The first outlet of the two-position three-way valve is connected to the inlet of the solid alkali catalyst filter tank, and the second outlet of the two-position three-way valve is connected to the inlet of the water storage device of the machine; the outlet of the solid alkali catalyst filter tank is connected to the inlet of the water storage device.

[0145] Specifically, refer toFigure 3 , Figure 3 is a schematic diagram of the water tank acid-base neutralization provided by the present application, 10 represents a low-low liquid level float ball, 11 represents a low liquid level float ball, 12 represents a high liquid level float ball, 13 represents a high-high liquid level float ball, 14 represents a two-position three-way valve, and 15 represents a solid alkali catalyst filter tank. There are four liquid level float balls in the water tank, which are a low-low liquid level float ball 10, a low liquid level float ball 11, a high liquid level float ball 12, and a high-high liquid level float ball 13, respectively. The low-low liquid level float ball 10 is used to detect a low-low liquid level, the low liquid level float ball 11 is used to detect a low liquid level, the high liquid level float ball 12 is used to detect a high liquid level, and the high-high liquid level float ball 13 is used to detect a high-high liquid level. During the water replacement process, when the high liquid level float ball 12 detects that the water in the water tank reaches a high liquid level, the machine performs a drainage operation, and the drainage flow is much larger than the water inflow, so the new water needs to be kept in the water inflow state of the new water inlet. During the water replacement process, when the liquid level float ball detects that the water in the water tank reaches a high-high liquid level or a low-low liquid level, the machine is shut down, which is to ensure the safety of the machine. On the basis of the water adjustment method, the water tank still maintains the basic structure of the four liquid level float balls, which is to ensure the logic of water inflow and outflow.

[0146] Further, the water outlet of the water tank in the water tank acid-base neutralization system is connected with the water inlet of the two-position three-way valve 14, the first water outlet of the two-position three-way valve 14 is connected with the water inlet of the solid alkali catalyst filter tank 15, the second water outlet of the two-position three-way valve 14 is connected with the water inlet of the water storage device, and the water outlet of the solid alkali catalyst filter tank 15 is connected with the water inlet of the water storage device. When the water in the water tank is subjected to alkaline neutralization treatment, if the acidity is too strong, the circulating water flows through the solid alkali catalyst filter tank 15 through the first water outlet of the two-position three-way valve 14, quickly neutralizes the acidity, ensures the long-term use of the water tank circulating water, and the circulating water subjected to acid-base neutralization treatment flows into the water inlet of the water storage device through the water outlet of the solid alkali catalyst filter tank 15. When the water in the water tank is subjected to alkaline neutralization treatment, if the acidity is weak, the circulating water does not pass through the solid alkali catalyst filter tank 15, but directly flows into the water inlet of the water storage device from the second water outlet of the two-position three-way valve 14. It should be noted that the two-position three-way valve 14 is a common electromagnetic valve, which has two control positions and three channels, one of which is an input channel, and the other two are output channels.

[0147] Further, if the acidity of the water treated by the acid-base neutralization process is not reduced after the solid alkali catalyst filter tank 15 is used for a period of time, the solid alkali catalyst filter tank 15 needs to be replaced, and the replacement is realized without stopping the machine through the forced function of the two-position three-way valve 14. It should be noted that the forced function of the two-position three-way valve 14 is to close the channel of the second water outlet of the two-position three-way valve 14, and the channel of the first water outlet of the two-position three-way valve 14 is normally open, which is to prevent the circulating water from flowing through the solid alkali catalyst filter tank 15, thereby affecting the replacement of the solid alkali catalyst filter tank 15. The use time of the circulating water is prolonged by the neutralization of the acidic water by the solid alkali catalyst filter tank in the acid-base neutralization system, thereby reducing the water consumption and achieving energy saving and emission reduction.

[0148] Further, the water tank filtration system comprises a water tank, a diaphragm pump, a filter and a centrifugal water pump;

[0149] The first water outlet of the water tank is connected with the water inlet of the diaphragm pump, the water outlet of the diaphragm pump is connected with the water inlet of the filter, and the water outlet of the filter is connected with the water inlet of the water tank;

[0150] The second water outlet of the water tank is connected with the water inlet of the centrifugal water pump, and the water outlet of the centrifugal water pump is connected with the water inlet of the water storage device of the machine;

[0151] The filter comprises a plurality of filter screens;

[0152] The first position of the first water outlet is lower than the second position of the second water outlet.

[0153] Specifically, referring to Figure 4 , Figure 4 is a schematic diagram of the water tank filtration system provided by the present application, 16 represents a centrifugal water pump, 17 represents a diaphragm pump, 18 represents a filter, and 19 represents a filter screen. The first water outlet of the water tank is connected with the water inlet of the diaphragm pump 17, the water outlet of the diaphragm pump 17 is connected with the water inlet of the filter 18, and the water outlet of the filter 18 is connected with the water inlet of the water tank. The first water outlet connected with the water inlet of the diaphragm pump 17 is arranged at a position close to the bottom of the water tank, which is to enable the dust-containing water in the lower part to be pumped into the filter 18, and the dust and water are separated through the plurality of filter screens 19 in the filter 18, and finally the separated water flows into the water inlet of the water tank. Further, the water inlet of the centrifugal water pump 16 is connected with the second water outlet of the water tank, and the second position of the second water outlet of the water tank is arranged to be higher than the first position of the first water outlet, which is to leave the dust with a larger specific gravity in the water tank and to pump the circulating water out to flow into the water inlet of the water storage device.

[0154] It should be noted that the diaphragm pump 17 is a kind of pump with diaphragm as moving component, liquid is sucked into diaphragm cavity and transported outward by pressure action, and the centrifugal water pump 16 is a kind of pump with centrifugal force acting on liquid, so that liquid flows to the periphery under the action of centrifugal force and is transported. The dust and water are separated by the filter in the filter system to prolong the use time of circulating water, thereby reducing the water consumption and realizing energy saving and emission reduction.

[0155] Further, after the filter 18 is enabled for a period of time, if the amount of dust in the water after passing through the filter 18 does not decrease, the filter 18 is notified by the alarm device that the filter screen 19 in the filter 18 needs to be replaced, and the stop of the diaphragm pump 17 is forced to realize the replacement of the filter screen 19 without stopping.

[0156] Further, referring to Figure 5 , Figure 5 is the overall scheme flowchart of the water regulating method and system provided by the application, and the overall process of the water regulating method and system provided by the embodiment of the application can be understood as:

[0157] The water circulation system of the semiconductor waste gas treatment equipment is adopted in the embodiment of the application, on the basis of maintaining the water washing waste removal function of the waste gas treatment equipment, the acid neutralization device and the filter system are added in the water circulation system of the semiconductor waste gas treatment equipment, and the water saving algorithm processing is carried out. After the machine equipment is completed and it is determined that the machine runs normally, the machine starts to run. The new water inlet amount of the water tank is controlled by fuzzy control to realize the demand control of the new water inlet amount.

[0158] Further, the main factors affecting the new water inlet amount of the water circulation system are the pH value and the turbidity, therefore, the pH sensor value is obtained by using the pH sensor to determine the pH value, and the turbidity sensor value is obtained by using the turbidity sensor to determine the turbidity. For the turbidity value a, the turbidity value a is divided into three fuzzy sets in advance, the three fuzzy sets of the turbidity value a are turbidity low, turbidity medium and turbidity high. For the acidity value b, the acidity value b is divided into three fuzzy sets in advance, the three fuzzy sets of the acidity value b are acidity low, acidity medium and acidity strong. For the new water inlet amount c, the new water inlet amount c of the new water of the water tank is divided into five fuzzy sets in advance, the five fuzzy sets of the new water inlet amount c are little water inlet amount, small water inlet amount, medium water inlet amount, large water inlet amount and much water inlet amount. The turbidity membership function, the acidity membership function and the new water inlet membership function are all preset for the turbidity value a, the acidity value b and the new water inlet amount c.

[0159] Further, the turbidity value a is a turbidity sensor value of 0-100, the acidity value b is an acidity sensor value of 7-1 converted to a value of 0-100 by a preset conversion formula, and the new water inflow 3-9 L / min is a water tank new water inflow value c converted to a value of 0-100 by a preset conversion formula.

[0160] Further, the turbidity value is substituted into the target turbidity membership function, a plurality of turbidity fuzzy values are calculated by a fuzzy operation mode of the target turbidity membership function, and the calculated plurality of turbidity fuzzy values are collected to obtain a turbidity fuzzy set. The acidity value is substituted into the target acidity membership function, a plurality of acidity fuzzy values are calculated by a fuzzy operation mode of the target acidity membership function, and the calculated plurality of acidity fuzzy values are collected to obtain an acidity fuzzy set.

[0161] Further, any turbidity fuzzy value in the turbidity fuzzy set and any acidity fuzzy value in the acidity fuzzy set are taken, and the taken any two values are combined to obtain a plurality of turbidity acidity arrays. The two values in each turbidity acidity array are taken to be the minimum value, the minimum value taken is determined as the water inflow credibility fuzzy value of each turbidity acidity array, and all water inflow credibility fuzzy values are collected to obtain a water inflow credibility set.

[0162] Further, the target turbidity membership function and the target acidity membership function are determined by the turbidity fuzzy value and the acidity fuzzy value corresponding to each turbidity acidity array, and each turbidity acidity array belongs to the target water inflow fuzzy degree based on a preset fuzzy control table. The water inflow credibility fuzzy value of each turbidity acidity array and the determined target water inflow fuzzy degree are intersected to obtain a plurality of membership degree outputs, and the plurality of membership degree outputs are collected to obtain a first credibility output.

[0163] Further, in the first credibility output, for the same target water inflow fuzzy degree, in the water inflow credibility fuzzy value corresponding to the same target water inflow fuzzy degree, the water inflow credibility fuzzy value with the minimum value is taken, and the first membership degree output of the water inflow credibility fuzzy value with the minimum value is determined, and the remaining second membership degree output is deleted. The first membership degree output and the third membership degree output are collected to obtain an updated second credibility output.

[0164] Further, according to the maximum value of the second credibility output, the water inflow credibility fuzzy value is determined. According to the target water inflow fuzzy degree corresponding to the maximum value of the water inflow credibility fuzzy value, the corresponding target water inflow membership function is matched. The target membership value and the target water inflow membership function are subjected to fuzzy operation to obtain a plurality of first new water inflow amounts. The plurality of first water inflow amounts are subjected to mean value calculation to obtain a second new water inflow amount. The second new water inflow amount is reversely calculated by a preset conversion formula to obtain a target water inflow flow rate.

[0165] Further, the water in the water tank is in a strong acid environment or a multi-dust environment. The water tank acid-base neutralization system and the water tank filter system in the water regulating system are used to perform acid-base neutralization treatment and dust filtration treatment on the water to be treated in the water tank. It is determined whether the water tank has been in a strong acid environment for a period of time, and whether it has been in a multi-dust environment.

[0166] Further, if the water tank has been in a strong acid environment for a period of time, the circulating water in the water tank flows through the solid alkali catalyst filter tank in the two-position three-way valve to quickly neutralize the acidity. If the water tank has been in a multi-dust environment for a period of time, the water containing dust in the water tank is pumped out by the diaphragm pump and flows through the filter screen in the filter to separate the dust and water. If the water tank is not in a strong acid environment, nor in a multi-dust environment, the water inflow amount of the water tank continues to be controlled according to the fuzzy control.

[0167] Further, after the solid alkali catalyst filter tank is used for a period of time, the service life of the solid alkali catalyst filter tank is determined. If the acidity of the water after acid-base neutralization treatment is not reduced, it is confirmed that the solid alkali catalyst filter tank cannot work normally, and the alarm device is used to inform that the solid alkali catalyst filter tank needs to be replaced. The two-position three-way valve is used to force the solid alkali catalyst filter tank to be replaced without stopping. After the filter is used for a period of time, the filter screen dust accumulation is determined. If the dust amount in the water after passing through the filter is not reduced, it is confirmed that the filter screen in the filter needs to be replaced, and the forced diaphragm pump is stopped to extract water to replace the filter screen without stopping.

[0168] Through the logical control of the water conditioning method and system, self-conditioning of the water tank water supply system can be realized, and self-conditioning of the water route system can be realized under different results of different waste gas treatment processes. For processes without acid and dust or during the trial operation of the machine, the action of not adding new water or adding less new water can be realized according to fuzzy control, so as to achieve the purpose of maximum water saving of the machine. For strong acid processes, in order to ensure the long-term use of the machine, the supply of new water needs to be increased or a solid alkali catalyst filter tank is used for neutralization to prolong the use cycle of the circulating water. For processes with much dust, the water change rate can be increased, and a filter can be used to separate dust and water, which also prolongs the use cycle of the circulating water, thereby reducing the load of the on-site personnel. In the process of water conditioning, the target new water flow is determined according to the fuzzy control operation of the turbidity sensor value and the acid-base sensor value, so as to scientifically and accurately control the water inflow into the water conditioning system according to the target new water flow, thereby reducing the water consumption and achieving energy saving and emission reduction.

[0169] In an embodiment, the turbidity sensor value collected by the turbidity sensor is 30, and the acid-base sensor value collected by the acid-base sensor is 3.4. The turbidity value a is determined according to the turbidity sensor value, which is 30. The acid-base sensor value 3.4 is substituted into the preset conversion formula to inversely convert the acid-base sensor value into the acidity value b. The acidity value b obtained is 60.

[0170] Further, the target turbidity membership function is matched in the preset turbidity membership function according to the turbidity value a=30, which is The turbidity value a=30 is substituted into the target turbidity membership function , and the turbidity fuzzy value is obtained as The turbidity value a=30 is substituted into the target turbidity membership function , and the turbidity fuzzy value is obtained as The turbidity fuzzy value is and are collected, and the turbidity fuzzy set is obtained as The target acidity membership function is matched in the preset acidity membership function according to the acidity value b=60, which is The acidity value b=60 is substituted into the target acidity membership function , and the acidity fuzzy value is obtained as The acidity value b=60 is substituted into the target acidity membership function , and the acidity fuzzy value is obtained as The acidity fuzzy value is and are collected, and the acidity fuzzy set is obtained as

[0171] Further, the turbidity fuzzy value respectively combined with the acidity fuzzy value and respectively combined with the acidity fuzzy value and and obtained a plurality of turbidity acidity arrays respectively as turbidity acidity array the influent credibility fuzzy value of the turbidity acidity array turbidity acidity array the influent credibility fuzzy value of the turbidity acidity array turbidity acidity array the influent credibility fuzzy value of the turbidity acidity array turbidity acidity array the influent credibility fuzzy value of the turbidity acidity array The influent credibility fuzzy value of each turbidity acidity array is collected to obtain the influent credibility set as

[0172] Further, based on the preset fuzzy control table in Table 1, it can be determined that the target influent quantity fuzzy degree to which the turbidity acidity array belongs is U S , the target influent quantity fuzzy degree to which the turbidity acidity array belongs is U M , the target influent quantity fuzzy degree to which the turbidity acidity array belongs is U M , and the target influent quantity fuzzy degree to which the turbidity acidity array belongs is U L . The influent credibility fuzzy value of each turbidity acidity array and the determined target influent quantity fuzzy degree are intersected to obtain a plurality of membership degrees output as Referring to Table 2, which is a fuzzy control table, the plurality of membership degrees output is collected to obtain the first credibility output as

[0173] Table 2 fuzzy control table

[0174]

[0175] Further, for the same target influent quantity fuzzy degree, there are two membership degrees as and The influent credibility fuzzy value with the smallest value is , and the first membership degree output of the influent credibility fuzzy value with the smallest value is determined as The second membership degree output is deleted The third membership degree output is and The first membership output and the third membership output are combined to obtain an updated second credibility output That is, the process of obtaining the second credibility output U(c) is:

[0176]

[0177]

[0178] Further, according to the water inflow credibility fuzzy value with the largest value in the second credibility output, a target membership value is determined as According to the water inflow credibility fuzzy value with the largest value, a target water inflow fuzzy degree U is obtained S And the target water inflow membership function is matched as The target membership value is substituted into the target water inflow membership function The first new water inflow is obtained as 10 by substituting the target membership value into the target water inflow membership function The first new water inflow is obtained as 40 by substituting the target membership value into the target water inflow membership function The second new water inflow is obtained as 25 by averaging the two first new water inflows. The second new water inflow 25 is substituted into the preset conversion formula to obtain x=4.5, and finally the target new water inflow is calculated as 4.5 L / min.

[0179] Finally, it should be noted that: the above examples are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing examples, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing examples, or make equivalent replacement for part of the technical features; and these modifications or replacements; do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A water-regulating method, characterized in that, include: Obtain the values ​​from the turbidity sensor and the acid / base sensor; Fuzzy calculations are performed on the turbidity sensor values ​​and the acid-base sensor values ​​respectively to obtain turbidity fuzzy sets and acidity fuzzy sets. Based on the turbidity fuzzy set and the acidity fuzzy set, an influent confidence set is determined, and based on the influent confidence set and the preset fuzzy control table, a first confidence output is determined; Based on the first confidence level output, the target new water inflow rate is determined, and the new water inflow into the water use regulation system is controlled by the target new water inflow rate. The determination of the influent confidence set based on the turbidity fuzzy set and the acidity fuzzy set includes: By combining any turbidity fuzzy value in the turbidity fuzzy set with any acidity fuzzy value in the acidity fuzzy set, multiple turbidity and acidity arrays are obtained. The minimum value in each turbidity and acidity array is determined as the fuzzy value of the influent confidence for each turbidity and acidity array, and the fuzzy values ​​of the influent confidence for each turbidity and acidity array are collected to obtain the influent confidence set.

2. The water use regulation method according to claim 1, characterized in that, The step of performing fuzzy calculations based on the turbidity sensor values ​​and the acid-base sensor values ​​to obtain turbidity fuzzy sets and acidity fuzzy sets includes: The target turbidity membership function is matched based on the turbidity sensor values, and the target acidity membership function is matched based on the acid-base sensor values. Based on the turbidity sensor values ​​and the target turbidity membership function, fuzzy operations are performed to obtain multiple turbidity fuzzy values, and the multiple turbidity fuzzy values ​​are set together to obtain the turbidity fuzzy set; Based on the acid-base sensor values ​​and the target acidity membership function, fuzzy operations are performed to obtain multiple acidity fuzzy values, and these multiple acidity fuzzy values ​​are then set together to obtain the acidity fuzzy set.

3. The water use regulation method according to claim 1, characterized in that, The step of determining the first confidence output based on the water inflow confidence set and the preset fuzzy control table includes: Based on the target turbidity membership function and target acidity membership function of each turbidity and acidity array, the target influent fuzziness of each turbidity and acidity array in the preset fuzzy control table is determined; The fuzzy values ​​of the influent confidence level and the fuzzy values ​​of the target influent volume of each turbidity and acidity array are intersected to obtain multiple membership outputs. The multiple membership outputs are then combined to obtain the first confidence level output.

4. The water use regulation method according to claim 1, characterized in that, The step of determining the target new inflow rate based on the first confidence level output includes: Based on the first confidence level output, the target membership value and the target water inflow membership function are determined; Based on the target membership value and the target inflow membership function, fuzzy calculations are performed to obtain the target new inflow rate.

5. The water use regulation method according to claim 4, characterized in that, The step of determining the target membership value and the target inflow membership function based on the first confidence output includes: In the first confidence output, for the same target water inflow ambiguity, the first membership output with the smallest water inflow confidence ambiguity value is determined, and the remaining second membership outputs are deleted; The first membership output and the third membership output are combined to obtain the updated second confidence output; the third membership output is the remaining membership output in the first confidence output excluding the first membership output and the second membership output. The fuzzy value of the water inflow confidence that has the largest value in the second confidence output is determined as the target membership value; Based on the target inflow fuzziness corresponding to the largest inflow confidence fuzziness value, the membership function of the target inflow is matched.

6. The water use regulation method according to claim 4, characterized in that, The step of performing fuzzy calculations based on the target membership value and the target influent membership function to obtain the target new influent flow rate includes: By performing fuzzy calculations on the target membership value and the target inflow membership function, multiple first new inflow volumes are obtained; The second new water inflow is obtained by averaging the multiple first new water inflow volumes. Based on the second new inflow volume and the preset conversion formula, the target new inflow flow rate is calculated in reverse.

7. A water regulation system for the water regulation method as described in any one of claims 1-6, characterized in that, include: Water tank acid-base neutralization system and water tank filtration system; The water tank acid-base neutralization system is used to neutralize the water to be treated in the water tank with alkalinity to obtain recycled water; The water tank filtration system is used to filter dust from the water to be treated in the water tank to obtain recycled water.

8. The water regulation system according to claim 7, characterized in that, The water tank acid-base neutralization system includes a water tank, a two-position three-way valve, and a solid alkaline catalyst filter tank. The outlet of the water tank is connected to the inlet of the two-position three-way valve; The first outlet of the two-position three-way valve is connected to the inlet of the solid alkali catalyst filter tank, and the second outlet of the two-position three-way valve is connected to the inlet of the water storage device of the machine; the outlet of the solid alkali catalyst filter tank is connected to the inlet of the water storage device.

9. The water regulation system according to claim 7, characterized in that, The water tank filtration system includes a water tank, a diaphragm pump, a filter, and a centrifugal water pump; The first outlet of the water tank is connected to the inlet of the diaphragm pump, the outlet of the diaphragm pump is connected to the inlet of the filter, and the outlet of the filter is connected to the inlet of the water tank. The second outlet of the water tank is connected to the inlet of the centrifugal water pump, and the outlet of the centrifugal water pump is connected to the inlet of the water storage device of the machine. The filter includes multiple layers of filter screens; The first position of the first water outlet is lower than the second position of the second water outlet.

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