A method of vanadium target grain refinement
By employing plastic deformation and vacuum annealing, the problem of refining vanadium target grains was solved, achieving a uniform and compact microstructure of vanadium target material and avoiding cracking and oxidation.
CN116555713BActive Publication Date: 2026-07-10PIONEER FILM MATERIALS (ANHUI) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PIONEER FILM MATERIALS (ANHUI) CO LTD
- Filing Date
- 2023-05-08
- Publication Date
- 2026-07-10
AI Technical Summary
Technical Problem
Vanadium is a refractory metal with high purity, making it difficult to refine its grain size.
Method used
A method combining plastic deformation and vacuum annealing, including forging, rolling and vacuum annealing, is adopted to prevent oxidation by controlling temperature and atmosphere, thereby achieving grain refinement.
Benefits of technology
It effectively refines the grains of vanadium targets, avoids cracking and oxidation, and obtains a uniform and compact microstructure.
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Smart Images
Figure CN116555713B_ABST
Abstract
The application discloses a vanadium target grain refining method and belongs to the metal target material metallographic technical field, and comprises the following steps: target blank plastic deformation, plastic deformation comprises forging and rolling, and vacuum annealing treatment is carried out after each time of forging and rolling; target blank heat treatment, and the target blank heat treatment condition is under the protection of a protective gas, the temperature is 550-600 DEG C, and the heat preservation time is 20 min. In order to reduce the harm caused by work hardening in the plastic deformation process of the vanadium target, the selected intermediate heat treatment scheme is not easy to be oxidized, and can meet the temperature requirement in the plastic deformation process of the vanadium target. When the target material is heat treated, vacuum heat treatment is needed, so as to avoid that the target material is oxidized, and argon is filled as the protective gas to 10 ‑2 MPa; then the temperature is increased to 1000 DEG C and heat preservation is carried out, then power is cut off after heat preservation and the target material is cooled in the furnace, the target material is heated more uniformly; the target material is heated uniformly during heat treatment and vacuum annealing process, and the target material obtained finally does not have serious color difference on the surface.
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