Flexible three-dimensional pressure sensing device and method of fabrication, artificial skin and robot

Abstract

This invention discloses a flexible three-dimensional pressure sensing device and its fabrication method, as well as simulated skin and a robot. One embodiment of the flexible three-dimensional pressure sensing device includes: a substrate; a strain sensor at least partially enclosing the substrate, comprising multiple electrodes; and wires disposed on the surface of the strain sensor and electrically connected to each electrode. The substrate is a composite material comprising a precursor material and an elastomer material, and the strain sensor is formed by laser-induced fabrication of the substrate material. The embodiments provided by this invention enable the in-situ fabrication of strain sensors on the substrate surface using a composite material as the substrate, via laser-induced fabrication, and the formation of flexible multidimensional force sensing devices by setting wires on the surface. This simplifies the fabrication process, enables miniaturization and mass production, and has broad application prospects.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and in particular to a flexible three-dimensional pressure sensing device and its fabrication method, as well as simulated skin and robots. Background Technology

[0002] With the rapid development of robotics technology, achieving human-like and intelligent robots requires the development of tactile sensors that enable robots to directly perceive various physical properties of their environment and target objects. Flexible tactile sensors that can mimic human skin will play a crucial role. Among these, pressure sensing demands even higher levels of sensitivity, requiring the identification of not only the magnitude of pressure but also its direction.

[0003] Therefore, developing multidimensional flexible pressure sensors to acquire three-dimensional force information has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] To address at least one of the aforementioned problems, a first aspect of the present invention provides a flexible three-dimensional pressure sensing device, comprising:

[0005] Matrix;

[0006] A strain sensor that at least partially encloses the substrate includes multiple electrodes; and

[0007] Wires are disposed on the surface of the strain sensor and electrically connected to each of the electrodes; wherein

[0008] The matrix is ​​a composite material comprising a precursor material and an elastomer material, and the strain sensor is formed by laser-induced material formation of the matrix.

[0009] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the flexible three-dimensional pressure sensing device is a cuboid, and the strain sensor includes four sub-sensors respectively disposed on the four sides of the cuboid other than the top and bottom surfaces.

[0010] Each sub-sensor includes a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor;

[0011] The wires include four wire groups that are connected one-to-one with the four sub-sensors. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor.

[0012] The flexible three-dimensional pressure sensing device determines the direction and magnitude of the force applied to it based on the resistance values ​​sensed by the four sets of wires.

[0013] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the strain resistance of the sub-sensor is formed by the laser inducing the substrate according to a preset scanning pattern, and the resistance value of the strain resistance is directly proportional to the length of the pattern lines of the scanning pattern.

[0014] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the scanning patterns may be the same or different, and the resistance values ​​of the strain resistors of the four sub-sensors may be the same or different depending on the scanning patterns.

[0015] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the flexible three-dimensional pressure sensing device is a regular or irregular three-dimensional structure.

[0016] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the substrate is a mixture of precursor material powder and elastomer material, wherein the elastomer material is dimethylsiloxane or platinum-cured silicone.

[0017] For example, in some embodiments of the flexible three-dimensional pressure sensing device provided in this application, the thickness of the strain sensor relative to the substrate is greater than or equal to 0.1 mm and less than or equal to 2 mm.

[0018] A second aspect of the present invention provides a method for fabricating the flexible three-dimensional pressure sensing device described in the first aspect, comprising:

[0019] The matrix body is formed using composite materials of precursor materials and elastomer materials;

[0020] A strain sensor comprising a plurality of electrodes is used to induce the formation of a matrix and at least partially encapsulate the matrix using a laser-induced matrix body.

[0021] Conductors are formed on the surface of the strain sensor that are electrically connected to the electrodes in a one-to-one manner.

[0022] For example, in the manufacturing method provided in some embodiments of this application, the step of forming a matrix body using a composite material of precursor material and elastomer material further includes: forming a cuboid matrix body using a composite material of precursor material and elastomer material;

[0023] The strain sensor that uses laser to induce the substrate body to form a substrate and at least partially encapsulates the substrate further includes: using laser to induce the four sides of the cuboid other than the top and bottom surfaces according to a preset scanning pattern and forming four sub-sensors, each sub-sensor including a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor;

[0024] The step of forming wires on the surface of the strain sensor that are electrically connected to the electrodes in a one-to-one correspondence further includes: bonding the wires to the surface of the strain sensor using conductive silver paste. The wires include four wire groups that are connected to the four sub-sensors in a one-to-one correspondence. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor, so that the flexible three-dimensional pressure sensing device can determine the direction and magnitude of the force on the flexible three-dimensional pressure sensing device based on the resistance values ​​sensed by the four wire groups respectively.

[0025] For example, in some embodiments of the manufacturing method provided in this application, the elastomer material is dimethylsiloxane, and the process of forming the matrix body using a composite material of a precursor material and an elastomer material further includes:

[0026] The dimethylsiloxane and the corresponding curing agent are mixed according to a preset first mass ratio to form a first mixed reagent;

[0027] The precursor material powder and the first mixing reagent are mixed according to a preset second mass ratio to form a second mixing reagent;

[0028] The second mixed reagent is evacuated and poured into a pre-set mold to form the matrix body.

[0029] For example, in some embodiments of the manufacturing method provided in this application, the elastomer material is platinum-cured silicone, comprising platinum-cured silicone component A and platinum-cured silicone component B, and the formation of the matrix body using the composite material of the precursor material and the elastomer material further includes:

[0030] The platinum-cured silicone component A and the precursor material powder are mixed according to a preset third mass ratio to form a third mixing reagent;

[0031] The platinum-cured silicone component B and the third mixing reagent are mixed according to a preset fourth mass ratio to form a fourth mixing reagent;

[0032] The fourth mixed reagent is poured into a pre-set mold and vacuumed to form the matrix body.

[0033] For example, in some embodiments of the manufacturing method provided in this application, the strain sensor that uses laser to induce the substrate body to form a substrate and at least partially encapsulates the substrate further includes:

[0034] According to the preset focal length, specific power, laser frequency, scanning speed and scanning density, a carbon dioxide laser generator is used to scan the surface of the substrate body in a unidirectional scanning manner according to the preset scanning pattern to form a strain sensor.

[0035] A third aspect of the present invention provides a simulated skin, including a flexible three-dimensional pressure sensing device as described in the first aspect.

[0036] A fourth aspect of the present invention provides a robot comprising simulated skin as described in the third aspect.

[0037] The beneficial effects of this invention are as follows:

[0038] This invention addresses existing problems by developing a flexible three-dimensional pressure sensing device and its fabrication method, as well as a simulated skin and robot. By using a composite material as a substrate, a strain sensor is fabricated in situ on the substrate surface using laser induction, and wires are set on the surface to form a flexible multidimensional force sensing device. This invention overcomes the problems existing in the prior art, simplifies the fabrication process, enables miniaturization and mass production, and has broad application prospects. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This diagram illustrates the structure of a flexible three-dimensional pressure sensing device according to an embodiment of the present invention.

[0041] Figure 2 A flowchart illustrating a manufacturing method according to an embodiment of the present invention is shown;

[0042] Figure 3 A cross-sectional schematic diagram of a flexible three-dimensional pressure sensing device according to an embodiment of the present invention is shown;

[0043] Figure 4 A schematic diagram showing a flexible three-dimensional pressure sensing device subjected to positive pressure according to an embodiment of the present invention is illustrated.

[0044] Figure 5 This diagram illustrates the pressure-resistance change of the strain resistors of each strain sensor in an embodiment of the present invention after the flexible three-dimensional pressure sensing device is subjected to positive pressure.

[0045] Figure 6 A schematic diagram showing the flexible three-dimensional pressure sensing device of another embodiment of the present invention subjected to positive pressure;

[0046] Figure 7This diagram illustrates the pressure-resistance change of the strain resistors of each strain sensor in another embodiment of the flexible three-dimensional pressure sensing device of the present invention after being subjected to positive pressure. Detailed Implementation

[0047] To more clearly illustrate the present invention, the following description, in conjunction with preferred embodiments and accompanying drawings, further explains the invention. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of the present invention.

[0048] It should be noted that the terms "on," "formed on," and "set on" used in this document can indicate that one layer is directly formed or set on another layer, or that one layer is indirectly formed or set on another layer, meaning that there are other layers between the two layers. In this document, unless otherwise stated, the term "located on the same layer" means that two layers, components, elements, or parts can be formed through the same patterning process, and that these two layers, components, elements, or parts are generally formed of the same material. In this document, unless otherwise stated, the description of "patterning process" generally includes steps such as photoresist coating, exposure, development, etching, and photoresist stripping. The description of "one-time patterning process" refers to a process that uses a single photomask to form patterned layers, components, elements, etc.

[0049] A resistance strain gauge three-dimensional force sensor is a commonly used multidimensional force sensor, consisting of a strain gauge and an elastic substrate. The resistance strain gauge is the main core component of the three-dimensional force sensor, and it is attached to the side of the elastic substrate by adhesive bonding. Its working principle is that an external force acts on the elastic element, causing it to deform and generate strain. The resistance strain gauge attached to the elastic element converts the strain into a change in resistance.

[0050] Currently, strain gauges in multidimensional force sensors typically employ commercially available metal-sensitive grid resistive strain sensors, which have a narrow strain detection range (detection limit of only 2%), making them unsuitable for applications in environments with large deformations. More importantly, in practical applications, many situations require small-volume, high-sensitivity three-dimensional force sensors. Because strain gauges are bonded to the side of the elastic body via adhesive bonding, precise control of the bonding position becomes extremely difficult after miniaturization, severely impacting the device's accuracy and uniformity.

[0051] In recent years, laser-induced graphene (LIG) technology has developed rapidly. When a laser irradiates certain carbon materials, the target material absorbs the energy of the incident photons and converts it into heat energy. Rapid energy deposition generates extremely high temperatures, triggering carbonization to form LIG. This method can achieve maskless patterned fabrication. However, laser-induced graphene typically uses polyimide (PI) as a substrate. After laser induction of graphene, a silicone elastomer solution is cast onto it, and after curing, the graphene pattern is transferred to the elastic matrix. This process is complex, faces significant challenges in mass production, and has a low yield rate.

[0052] In response to the above situation, the inventors, after extensive research and experimentation, proposed a flexible three-dimensional pressure sensing device, such as... Figure 1 As shown, it includes:

[0053] Matrix 10;

[0054] The strain sensor 20, which at least partially encloses the substrate, includes multiple electrodes; and

[0055] Wires 30 are disposed on the surface of the strain sensor and electrically connected to each electrode respectively; wherein

[0056] The matrix is ​​a composite material comprising a precursor material and an elastomer material, and the strain sensor is formed by laser-induced material formation of the matrix.

[0057] In this embodiment, a composite material is used as the matrix, and a composite material of precursor material and elastomer material is used as the matrix material. The matrix material is laser-induced using laser-induced graphene technology as the manufacturing principle, thereby forming a strain sensor in situ on the matrix surface.

[0058] Specifically, the precursor material is a semiconductor precursor material, mainly used in the thin film deposition process in semiconductor manufacturing. It is a core material in the thin film deposition process. When irradiated by a laser, it absorbs the energy of incident photons and converts it into heat energy. Rapid energy deposition generates extremely high temperatures and triggers carbonization to form LIG, thereby fabricating a strain sensor in situ on the substrate surface. It is worth noting that this embodiment can fabricate strain sensors in situ on the substrate surface according to the sensing requirements of the flexible three-dimensional pressure sensing device. For example, strain sensors can be formed on at least some surfaces of multiple surfaces of the three-dimensional pressure sensing device: for example, strain sensors are formed on the four sides of a cuboid, meaning the strain sensors on the four surfaces of the cuboid three-dimensional pressure sensing device wrap around the substrate; for example, strain sensors are formed on each surface of a soccer ball-shaped polyhedral three-dimensional pressure sensing device, meaning the strain sensors on each surface of the polyhedral three-dimensional pressure sensing device wrap around the substrate. Finally, wires are set on the surface of the strain sensors to form a flexible multi-dimensional force sensing device.

[0059] This embodiment forms a strain sensor in situ on the substrate surface, which not only allows for fabrication based on the specific shape of the three-dimensional pressure sensing device, but also enables design based on the sensing requirements of the three-dimensional pressure sensing device. Compared with related technologies that first fabricate the strain sensor and then transfer it to the elastic substrate, this effectively simplifies the fabrication process, enables miniaturization and mass production, and has practical application value.

[0060] In a specific example, such as Figure 2 The following is an example of the specific steps involved in fabricating a rectangular flexible three-dimensional pressure sensing device:

[0061] The first step is to form the matrix body using a composite material of precursor materials and elastomer materials.

[0062] In this embodiment, a cuboid matrix is ​​formed using a composite material of precursor material and elastomer material, thus forming the desired three-dimensional shape of the flexible three-dimensional pressure sensing device. In this embodiment, the matrix is ​​a mixture of precursor material powder and elastomer material. The precursor material is a non-elastic material such as polyimide (PI) or phenolic resin with limited deformation, while the elastomer material has greater elasticity. The matrix formed by the mixture of the two not only has the required deformation but also can generate a strain sensor through laser induction.

[0063] In an optional embodiment, the elastomer material is dimethylsiloxane, and the composite material of the precursor material and the elastomer material used to form the matrix body further includes: mixing the dimethylsiloxane and the corresponding curing agent according to a preset first mass ratio to form a first mixed reagent; mixing the powder of the precursor material and the first mixed reagent according to a preset second mass ratio to form a second mixed reagent; evacuating the second mixed reagent and pouring it into a preset mold to form the matrix body.

[0064] In this embodiment, firstly, dimethylsiloxane and the corresponding curing agent are mixed at a mass ratio of 10:1 and stirred until homogeneous. Then, polyimide powder, the precursor material, is added to the mixed dimethylsiloxane solution at a pre-set mass ratio, for example, 1:2. The mixture is stirred for 30 minutes using an electric mixer. After removing air bubbles by vacuuming in a room temperature vacuum oven, the mixture is poured into a pre-designed mold and cured at 55°C for 2 hours. Next, the prepared polyimide / dimethylsiloxane composite block material is cut into cuboids to form the matrix body, for example, with dimensions of 4mm*4mm*5mm.

[0065] In another optional embodiment, the elastomer material is platinum-cured silicone, comprising platinum-cured silicone component A and platinum-cured silicone component B. The process of forming the matrix body using the composite material of the precursor material and the elastomer material further comprises: mixing the powder of platinum-cured silicone component A and the precursor material at a preset third mass ratio to form a third mixing reagent; mixing the platinum-cured silicone component B and the third mixing reagent at a preset fourth mass ratio to form a fourth mixing reagent; and pouring the fourth mixing reagent into a preset mold for molding and vacuuming to form the matrix body.

[0066] In this embodiment, a platinum-cured silicone with a lower Young's modulus is used. The Young's modulus of the platinum-cured silicone is E = 0.13 MPa. The platinum-cured silicone includes platinum-cured silicone component A and platinum-cured silicone component B. First, platinum-cured silicone component A and mixed polyimide powder are stirred evenly at a preset mass ratio, for example, 1:1. Platinum-cured silicone component B is added to the above mixed solution and stirred for 3 minutes with a high-speed electric mixer. The above mixture is poured into a pre-designed mold, and then the mold is placed in a room temperature vacuum oven to remove air bubbles and cured at 80°C for 2 hours. Then, the prepared polyimide / platinum-cured silicone composite block material is cut into cuboids to form the matrix body, for example, with dimensions of 4mm*4mm*5mm.

[0067] The second step involves using a laser to induce the formation of a matrix and a strain sensor that at least partially encapsulates the matrix, the strain sensor comprising multiple electrodes.

[0068] In this embodiment, lasers are used to induce four sides of the cuboid other than the top and bottom surfaces according to a preset scanning pattern to form four sub-sensors. Each sub-sensor includes a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor.

[0069] In an optional embodiment, a carbon dioxide laser generator is used to scan the surface of the substrate body in a unidirectional scanning manner according to a preset scanning pattern to form a strain sensor, based on a preset focal length, specific power, laser frequency, scanning speed, and scanning density.

[0070] In the embodiment using dimethylsiloxane, the prepared matrix was placed on a commercial laser platform, with both ends fixed to maintain its flatness during rapid temperature increases. A carbon dioxide laser generator was used to scan the surface of the elastomer according to a preset pattern. Specifically, in this embodiment, the focal length was fixed at 10mm, the scanning method was unidirectional scanning from left to right, with a specific power of 12%, a laser frequency of 16kHz, and a scanning speed of 200mm / s. -1The composite substrate surface is irradiated with a density of 500 rows per inch, and the laser induces graphene to form a strain sensor. After scanning one side, the other sides are irradiated sequentially using the same parameter settings. The strain sensor formed in this embodiment has a thickness relative to the substrate that is greater than or equal to 0.1 mm and less than or equal to 2 mm.

[0071] In the embodiment using platinum-cured silicone, the prepared polyhedral cuboid was placed on a commercial laser platform, with its ends fixed to maintain its flatness during rapid temperature increases. A carbon dioxide laser generator was used to scan the surface of the elastomer according to a preset pattern. Specifically, in this embodiment, the focal length was fixed at 10mm, the scanning method was unidirectional scanning from left to right, with a specific power of 10%, a laser frequency of 12kHz, and a scanning speed of 200mm / s. -1 The composite substrate surface is irradiated with a density of 500 rows per inch, and the laser induces graphene to form a strain sensor. After scanning one side, the other sides are irradiated sequentially using the same parameter settings. The strain sensor formed in this embodiment has a thickness relative to the substrate that is greater than or equal to 0.1 mm and less than or equal to 2 mm.

[0072] In an optional embodiment, the strain resistance of the sub-sensor is formed by the laser inducing the substrate according to a preset scanning pattern, and the resistance value of the strain resistance is directly proportional to the length of the pattern lines of the scanning pattern.

[0073] In this embodiment, the resistance value of the strain sensor's strain resistor is related to the scanning pattern used during laser scanning; specifically, it is directly proportional to the length of the lines in the scanning pattern. Figure 1 As shown, the pattern lines are lines that bend across the entire plane. The longer the line length, the greater the resistance of the strain gauge. Conversely, when the pattern lines are simple and short, the resistance of the strain gauge is smaller. Those skilled in the art should select an appropriate line length to form the corresponding strain gauge according to the actual application requirements, which will not be elaborated here.

[0074] In an optional embodiment, the scanning patterns may be the same or different, and the resistance values ​​of the strain resistors of the four sub-sensors may vary depending on whether the scanning patterns are the same or different.

[0075] In this embodiment, each strain sensor forms a corresponding strain resistance based on the scanning pattern. When the scanning patterns on the four sides of the cuboid flexible three-dimensional pressure sensing device in this embodiment are the same, the strain resistances on the four sides are also the same; when the scanning patterns on the four sides of the cuboid flexible three-dimensional pressure sensing device in this embodiment are different, the strain resistances on the four sides are also different. This application does not impose specific limitations on this, and those skilled in the art should select an appropriate scanning pattern to form the corresponding strain resistance according to actual application requirements, which will not be elaborated further here.

[0076] The third step is to form wires on the surface of the strain sensor that are electrically connected to the electrodes one by one.

[0077] Specifically, conductive silver paste is used to bond the wires to the surface of the strain sensor. The wires include four wire groups that are connected one-to-one with the four sub-sensors. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor. This allows the flexible three-dimensional pressure sensing device to determine the direction and magnitude of the force applied to it based on the resistance values ​​sensed by the four wire groups. In this embodiment, conductive silver paste is used to bond the wires to the electrodes of the graphene strain sensor. By monitoring the resistance change signals of the four side strain sensors, the magnitude and direction of the external force applied to the flexible three-dimensional pressure sensing device can be inferred.

[0078] In this embodiment, as Figure 3 As shown, the formed flexible three-dimensional pressure sensing device includes a substrate 10, a strain sensor 20 formed in situ on the surface of the substrate 10, and a wire 30 attached to the surface of the strain sensor.

[0079] Thus, the flexible three-dimensional pressure sensing device forming a cuboid is a cuboid. The strain sensor includes four sub-sensors respectively disposed on the four sides other than the top and bottom surfaces of the cuboid. Each sub-sensor includes a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor. The wires include four wire groups connected to the four sub-sensors one-to-one. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistor of the corresponding sub-sensor. The flexible three-dimensional pressure sensing device determines the direction and magnitude of the force applied to it based on the resistance values ​​sensed by the four wire groups.

[0080] During use, such as Figure 4As shown, the cuboid flexible multidimensional pressure sensing device has four strain sensors with identical strain resistors on its four sides. The strain resistor R1 is on the left side (R2 is on the side corresponding to the left side), and the strain resistor R3 is on the right side (R4 is on the side corresponding to the right side). Each strain sensor has two electrodes. The output terminals formed by the two electrodes of each strain sensor can measure the resistance of the four sides as a function of strain. Because the graphene conductive layer of the strain sensor contains numerous pores, after applying a certain strain, the conductive layer deforms, increasing its surface area and the porosity, thus changing the resistance of the conductive layer—that is, the strain resistor.

[0081] like Figure 4 As shown, when the cuboid flexible multidimensional pressure sensing device is subjected to a normal force F, the response signals of the four strain sensors are as follows: Figure 5 As shown, the resistance of each strain sensor increases with the increase of the pressure it bears. The changes of the four strain sensors are basically the same, which indicates that the pressure on the four strain sensors is the same and the changes of the strain resistance are consistent. This indicates that the pressure is a downward positive pressure. The specific pressure value can be calculated based on the changes of the strain resistance.

[0082] like Figure 6 As shown, when the cuboid flexible multidimensional pressure sensing device is subjected to lateral pressure F, the response signals of the four strain sensors are as follows: Figure 7 As shown, due to pressure on one side, the resistance R3 of the corresponding strain sensor will decrease; due to tension on one side, the resistance R4 of the corresponding strain sensor will increase. The response signals of the four strain sensors are as follows: Figure 4 As shown, the resistance of the strain sensor R1 on the front and the strain sensor R2 on the back increases with increasing pressure. The resistance of the strain sensor R4 on the left increases with increasing pressure, while the resistance of the strain sensor R3 on the right decreases with increasing pressure. This indicates that the four strain sensors are subjected to different pressures, resulting in different changes in their resistance. This suggests that the pressure is a rightward lateral pressure. The specific pressure value can be calculated based on the changes in each strain sensor.

[0083] This embodiment utilizes the strain resistance of the strain sensors on each side of the cuboid flexible multidimensional pressure sensing device to identify the direction and magnitude of the force by measuring the different resistance values ​​after the force is applied.

[0084] It is worth noting that this embodiment is only used to illustrate the specific implementation of this application. This embodiment does not specifically limit the shape of the flexible three-dimensional pressure sensing device. It can be a regular three-dimensional structure, such as a cuboid or a regular polyhedron; or it can be an irregular three-dimensional structure. Those skilled in the art should select an appropriate three-dimensional structure according to the actual application requirements, with the recognition of the direction and magnitude of the force as the design criterion. This will not be elaborated further here.

[0085] Corresponding to the flexible three-dimensional pressure sensing device provided in the above embodiments, one embodiment of this application also provides a method for manufacturing the above-mentioned flexible three-dimensional pressure sensing device, such as... Figure 2 As shown, it includes:

[0086] The matrix body is formed using composite materials of precursor materials and elastomer materials;

[0087] A strain sensor comprising a plurality of electrodes is used to induce the formation of a matrix and at least partially encapsulate the matrix using a laser-induced matrix body.

[0088] Conductors are formed on the surface of the strain sensor that are electrically connected to the electrodes in a one-to-one manner.

[0089] In this embodiment, a strain sensor is fabricated in situ on the substrate surface using a composite material as the matrix, and a flexible multidimensional force sensing device is formed by setting wires on the surface. This overcomes the problems existing in the prior art, simplifies the manufacturing process, and enables miniaturization and mass production, thus having broad application prospects. Since the manufacturing method provided in this embodiment corresponds to the flexible three-dimensional pressure sensing devices provided in the above embodiments, the manufacturing method provided in this embodiment is also applicable to the previous embodiments, and will not be described in detail in this embodiment.

[0090] In an optional embodiment, the method of forming a matrix body using a composite material of precursor material and elastomer material further includes: forming a cuboid matrix body using a composite material of precursor material and elastomer material;

[0091] The strain sensor that uses laser to induce the substrate body to form a substrate and at least partially encapsulates the substrate further includes: using laser to induce the four sides of the cuboid other than the top and bottom surfaces according to a preset scanning pattern and forming four sub-sensors, each sub-sensor including a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor;

[0092] The step of forming wires on the surface of the strain sensor that are electrically connected to the electrodes in a one-to-one correspondence further includes: bonding the wires to the surface of the strain sensor using conductive silver paste. The wires include four wire groups that are connected to the four sub-sensors in a one-to-one correspondence. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor, so that the flexible three-dimensional pressure sensing device can determine the direction and magnitude of the force on the flexible three-dimensional pressure sensing device based on the resistance values ​​sensed by the four wire groups respectively.

[0093] In this embodiment, the cuboid flexible three-dimensional pressure sensing device can identify the direction and magnitude of the force by observing the resistance changes of the strain sensors on its four sides after the force is applied.

[0094] In an optional embodiment, the elastomer material is dimethylsiloxane, and the composite material of the precursor material and the elastomer material used to form the matrix body further includes:

[0095] The dimethylsiloxane and the corresponding curing agent are mixed according to a preset first mass ratio to form a first mixed reagent;

[0096] The precursor material powder and the first mixing reagent are mixed according to a preset second mass ratio to form a second mixing reagent;

[0097] The second mixed reagent is evacuated and poured into a pre-set mold to form the matrix body.

[0098] In this embodiment, a matrix body is formed by a composite material of dimethylsiloxane and precursor materials, thereby having the required deformation, and can also generate strain sensors by laser induction.

[0099] In an optional embodiment, the elastomer material is platinum-cured silicone, comprising platinum-cured silicone component A and platinum-cured silicone component B, and the composite material of the precursor material and the elastomer material used to form the matrix body further comprises:

[0100] The platinum-cured silicone component A and the precursor material powder are mixed according to a preset third mass ratio to form a third mixing reagent;

[0101] The platinum-cured silicone component B and the third mixing reagent are mixed according to a preset fourth mass ratio to form a fourth mixing reagent;

[0102] The fourth mixed reagent is poured into a pre-set mold and vacuumed to form the matrix body.

[0103] In this embodiment, the matrix body is formed by using a composite material of platinum-cured silicone with a lower Young's modulus and a precursor material, thereby having the required deformation, and can also generate strain sensors by laser induction.

[0104] In an optional embodiment, the strain sensor that uses laser-induced matrix body formation and at least partially encapsulates the matrix further comprises:

[0105] According to the preset focal length, specific power, laser frequency, scanning speed and scanning density, a carbon dioxide laser generator is used to scan the surface of the substrate body in a unidirectional scanning manner according to the preset scanning pattern to form a strain sensor.

[0106] In this embodiment, strain sensors are formed on each side by controlling the focal length of the laser, the specific power, the laser frequency, the scanning speed, and the scanning density.

[0107] Based on the above-mentioned flexible three-dimensional pressure sensing device, one embodiment of this application also provides a simulated skin, including the above-mentioned flexible three-dimensional pressure sensing device.

[0108] The simulated skin created in this embodiment can mimic the soft touch of human skin, and can not only identify the direction of force but also the magnitude of the force.

[0109] Based on the above-described simulated skin, one embodiment of this application also provides a robot including the above-described simulated skin.

[0110] In this embodiment, the robot using the aforementioned simulated skin is further human-like and intelligent, possessing tactile capabilities that enable it to directly perceive various physical properties of the environment and target objects.

[0111] This invention addresses existing problems by developing a flexible three-dimensional pressure sensing device and its fabrication method, as well as a simulated skin and robot. By using a composite material as a substrate, a strain sensor is fabricated in situ on the substrate surface using laser induction, and wires are set on the surface to form a flexible multidimensional force sensing device. This invention overcomes the problems existing in the prior art, simplifies the fabrication process, enables miniaturization and mass production, and has broad application prospects.

[0112] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. A flexible three-dimensional pressure sensing device, characterized in that, include: Matrix; A strain sensor that at least partially encapsulates the substrate includes multiple electrodes, and the strain sensor is fabricated in situ on the surface of the substrate according to sensing requirements; as well as The wires disposed on the surface of the strain sensor and electrically connected to the electrodes one by one are bonded to the surface of the strain sensor using conductive silver paste. in The substrate is a composite material comprising a precursor material and an elastomer material. The strain sensor is formed by laser-induced material of the substrate. The substrate is a mixture of precursor material powder and elastomer material. The precursor material is polyimide or phenolic resin, and the elastomer material is dimethylsiloxane or platinum-cured silicone. The thickness of the strain sensor relative to the substrate is greater than or equal to 0.1 mm and less than or equal to 2 mm.

2. The flexible three-dimensional pressure sensing device according to claim 1, characterized in that, The flexible three-dimensional pressure sensing device is a cuboid, and the strain sensor includes four sub-sensors respectively disposed on the four sides of the cuboid other than the top and bottom surfaces. Each sub-sensor includes a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor; The wires include four wire groups that are connected one-to-one with the four sub-sensors. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor. The flexible three-dimensional pressure sensing device determines the direction and magnitude of the force applied to it based on the resistance values ​​sensed by the four sets of wires.

3. The flexible three-dimensional pressure sensing device according to claim 2, characterized in that, The strain resistance of the sub-sensor is formed by the laser inducing the substrate according to a preset scanning pattern, and the resistance value of the strain resistance is directly proportional to the length of the pattern lines of the scanning pattern.

4. The flexible three-dimensional pressure sensing device according to claim 3, characterized in that, Whether the scanning patterns are the same or different, the resistance values ​​of the strain resistors of the four sub-sensors depend on whether the scanning patterns are the same or different.

5. The flexible three-dimensional pressure sensing device according to claim 1, characterized in that, The flexible three-dimensional pressure sensing device has a regular or irregular three-dimensional structure.

6. A method for fabricating a flexible three-dimensional pressure sensing device as described in any one of claims 1-5, characterized in that, include: The matrix body is formed using a composite material of precursor material and elastomer material. The matrix is ​​a mixture of precursor material powder and elastomer material. The precursor material is polyimide or phenolic resin, and the elastomer material is dimethylsiloxane or platinum-cured silicone. The thickness of the strain sensor relative to the matrix is ​​greater than or equal to 0.1 mm and less than or equal to 2 mm. Laser-induced matrix body is used to form a matrix and a strain sensor that at least partially encapsulates the matrix. The strain sensor includes multiple electrodes and is formed in situ on the surface of the matrix according to sensing requirements. Conductors are formed on the surface of the strain sensor that are electrically connected to the electrodes one-to-one, and conductive silver paste is used to bond the conductors to the surface of the strain sensor.

7. The manufacturing method according to claim 6, characterized in that, The method of forming a matrix body using a composite material of precursor material and elastomer material further includes: forming a cuboid matrix body using a composite material of precursor material and elastomer material; The strain sensor that uses laser to induce the substrate body to form a substrate and at least partially encapsulates the substrate further includes: using laser to induce the four sides of the cuboid other than the top and bottom surfaces according to a preset scanning pattern and forming four sub-sensors, each sub-sensor including a strain resistor, a first electrode and a second electrode connected to the two ends of the strain resistor; The step of forming wires on the surface of the strain sensor that are electrically connected to the electrodes in a one-to-one correspondence further includes: bonding the wires to the surface of the strain sensor using conductive silver paste. The wires include four wire groups that are connected to the four sub-sensors in a one-to-one correspondence. Each wire group includes a first wire electrically connected to the first electrode and a second wire electrically connected to the second electrode to sense the resistance value of the strain resistance of the corresponding sub-sensor, so that the flexible three-dimensional pressure sensing device can determine the direction and magnitude of the force on the flexible three-dimensional pressure sensing device based on the resistance values ​​sensed by the four wire groups respectively.

8. The manufacturing method according to claim 6, characterized in that, The elastomer material is dimethylsiloxane, and the composite material of the precursor material and the elastomer material used to form the matrix body further includes: The dimethylsiloxane and the corresponding curing agent are mixed according to a preset first mass ratio to form a first mixed reagent; The precursor material powder and the first mixing reagent are mixed according to a preset second mass ratio to form a second mixing reagent; The second mixed reagent is evacuated and poured into a pre-set mold to form the matrix body; or The elastomer material is platinum-cured silicone, comprising platinum-cured silicone component A and platinum-cured silicone component B. The matrix body formed using the composite material of the precursor material and the elastomer material further includes: The platinum-cured silicone component A and the precursor material powder are mixed according to a preset third mass ratio to form a third mixing reagent; The platinum-cured silicone component B and the third mixing reagent are mixed according to a preset fourth mass ratio to form a fourth mixing reagent; The fourth mixed reagent is poured into a pre-set mold and vacuumed to form the matrix body.

9. The manufacturing method according to claim 6, characterized in that, The strain sensor that uses laser-induced matrix body to form a matrix and at least partially encapsulates the matrix further includes: According to the preset focal length, specific power, laser frequency, scanning speed and scanning density, a carbon dioxide laser generator is used to scan the surface of the substrate body in a unidirectional scanning manner according to the preset scanning pattern to form a strain sensor.

10. A simulated skin, characterized in that, Includes the flexible three-dimensional pressure sensing device as described in any one of claims 1-5.

11. A robot, characterized in that, Including the simulated skin as described in claim 10.

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