Fog flow measuring device ultrasonic atomization system and fog flow measuring method

Abstract

An object of the present disclosure is to provide a mist flow rate measuring device capable of accurately calculating the flow rate of raw material mist. In the mist flow rate measuring device of the present disclosure, a camera (5) performs imaging of reflected light (L2) of at least a portion of a mist flow passage area through which mist-containing gas (G3) flows as an imaging target area within a transparent pipe (10), and acquires imaging information (S5). A mist flow rate calculation unit (16) performs a mist flow rate calculation process based on the imaging information (S5). The mist flow rate calculation process includes a sum value calculation process of calculating a sum of a plurality of luminance values indicated by the imaging information (S5), i.e., a luminance sum value, and a flow rate derivation process of deriving the flow rate of raw material mist (3) from the luminance sum value.

Description

Technical Field

[0001] This invention relates to a mist flow measurement device for measuring the flow rate of a raw material mist under conditions of mist-containing gas flow. Background Technology

[0002] Previously, no method had been established for measuring the flow rate of fog contained in a fog-containing gas. Instead, the flow rate of fog was indirectly measured by measuring the consumption of the liquid raw material solution before atomization.

[0003] Figure 14 This is an explanatory diagram showing the structure (1) of a conventional ultrasonic atomization system. For example... Figure 14 As shown, the conventional ultrasonic atomization system 2001 has an ultrasonic atomizing device 201, a raw material solution supply unit 20 and a flow control unit 27 as its main components.

[0004] The ultrasonic atomizing device 201 includes, as its main components, an atomizing container 1, a liquid level detection sensor 25, and an ultrasonic transducer 2.

[0005] The atomizing container 1 contains a raw material solution 15. A predetermined number of ultrasonic transducers 2 are arranged on the bottom surface of the atomizing container 1. Figure 14 (This only indicates one).

[0006] In the ultrasonic atomizing device 201 with such a structure, if ultrasonic vibration treatment is performed by applying ultrasonic vibration to the ultrasonic transducer 2, the vibration energy of the ultrasonic waves is transmitted to the raw material solution 15 inside the atomizing container 1 via the bottom surface of the atomizing container 1.

[0007] Thus, the raw material solution 15 is transferred to mist with a particle size of less than 10 μm, thereby enabling the raw material mist 3 to be obtained in the atomization container 1.

[0008] Carrier gas G4 is supplied to atomizing container 1 from gas supply pipe 4. In order to transport raw material mist 3 to the mist utilization processing unit outside ultrasonic atomizing device 201 via mist pipe 28, carrier gas G4 is supplied to atomizing container 1 at a specified flow rate.

[0009] As a result, the mist-containing gas G3, which includes the raw material mist 3, is transported to the outside through the mist piping 28.

[0010] The atomizing container 1 has a liquid level detection sensor 25 inside. The liquid level detection sensor 25 is a sensor capable of detecting the height of the liquid level in the raw material solution 15. A portion of the liquid level detection sensor 25 is immersed in the raw material solution 15. The liquid level detection sensor 25 detects the position of the liquid level 15a in the raw material solution 15 and obtains sensor information S25 indicating the detected position of the liquid level 15a.

[0011] The raw material solution supply unit 20 includes, as a main component, a container 21, a pump 22, a flow meter 23, and a raw material solution supply side piping 24. The container 21 contains the raw material solution 15. The flow meter 23 measures the flow rate through the raw material solution supply side piping 24 and obtains measured flow rate information S23, which represents the measured flow rate.

[0012] The flow control unit 27 receives flow measurement information S23 from the flow meter 23 and sensor information S25 from the liquid level detection sensor 25.

[0013] The flow control unit 27 continuously identifies the flow rate flowing through the raw material solution supply side piping 24 based on the measured flow rate indicated by the measured flow rate information S23.

[0014] The flow control unit 27 continuously identifies the change in the amount of raw material solution 15 in the atomizing container 1 based on the position of the liquid surface 15a of the raw material solution 15 indicated by the sensor information S25.

[0015] Based on the measured flow information S23 and the sensor information S25, the flow control unit 27 performs raw material supply control processing by outputting a pump drive signal S27 to indicate the driving amount of the pump 22, so as to meet the flow control conditions described later.

[0016] The aforementioned flow control condition is that "the position of the liquid surface 15a of the raw material solution 15, as indicated by sensor information S25, is within the allowable range of the specified liquid surface height".

[0017] In the previous ultrasonic atomization system 2001, the following first flow estimation method was used: based on the sensor information S25 obtained from the liquid level detection sensor 25, the change in the height of the raw material solution 15 in the atomization container 1 from the specified liquid level was identified, and based on the identified change in the raw material solution 15, the flow rate of the raw material mist 3 contained in the mist-containing gas G3 was estimated.

[0018] Figure 15 This is an explanatory diagram showing the structure (2) of a conventional ultrasonic atomization system. For example... Figure 15 As shown, the ultrasonic atomization system 2002 includes an ultrasonic atomizing device 202, a raw material solution supply unit 20, a weighing meter 26, and a flow control unit 27B as its main components.

[0019] The following is related to... Figure 14 The same components as those of the ultrasonic atomizing system 2001 are appropriately omitted by assigning the same reference numerals, and the description will focus on the characteristic parts of the ultrasonic atomizing system 2002.

[0020] The ultrasonic atomizing device 202 includes an atomizing container 1 and an ultrasonic transducer 2 as its main components. The ultrasonic atomizing device 202 differs from the ultrasonic atomizing device 201 in that it does not have a liquid level detection sensor 25.

[0021] The raw material solution supply unit 20 includes, as a main component, a container 21, a pump 22, a flow meter 23, and a raw material solution supply side piping 24. The raw material solution supply unit 20 supplies raw material solution 15 to the ultrasonic atomizing device 202.

[0022] In the raw material solution supply section 20, container 21 holds the raw material solution 15. Flow meter 23 measures the flow rate through the raw material solution supply side piping 24 and obtains measured flow rate information S23, which represents the measured flow rate.

[0023] Weighing gauge 26 supports container 21 in a measurable weight manner. Weighing gauge 26 measures the weight of container 21 containing raw material solution 15 and outputs a weighing signal S26 indicating the weight.

[0024] The flow control unit 27B receives flow measurement information S23 from the flow meter 23 and weighing signal S26 from the weighing meter 26.

[0025] The flow control unit 27B continuously identifies the flow rate flowing through the raw material solution supply side piping 24 by measuring the flow rate indicated by the flow information S23.

[0026] The flow control unit 27B continuously identifies the residual amount of raw material solution 15 in container 21 based on the weight of container 21 indicated by weighing signal S26.

[0027] Based on the measured flow information S23 and the weighing signal S26, the flow control unit 27B performs raw material supply control processing by outputting the pump drive signal S27B of the pump indicating the drive amount of the pump 22, so as to meet the flow control conditions described later.

[0028] The aforementioned flow control condition is that "the change in weight represented by the weighing signal S26 per unit time is within the allowable range".

[0029] In the conventional ultrasonic atomization system 2002, the change in the amount of raw material solution 15 in container 21 is identified based on the weighing signal S26 obtained from weighing meter 26. Furthermore, the ultrasonic atomization system 2002 employs a second flow estimation method to estimate the flow rate of raw material mist 3 contained in mist-containing gas G3 based on the change in the amount of raw material solution 15 in container 21.

[0030] The second flow estimation method is used by, for example, an atomizing device disclosed in Patent Document 1.

[0031] Existing technical documents

[0032] Patent documents

[0033] Patent Document 1: Japanese Patent No. 6158336 Summary of the Invention

[0034] The problem that the invention aims to solve

[0035] However, the first and second flow estimation methods in the past indirectly calculated the flow rate of the raw material mist 3 based on the change in the raw material solution 15 in the atomizing container 1 or the change in the raw material solution 15 in the container 21.

[0036] Therefore, in the previous method for measuring the flow rate of raw material mist 3, the following reasons for the inferred error (1) and (2) have arisen.

[0037] (1) There is a time deviation in the timing of the flow of mist-containing gas G3 containing raw material mist 3 and the consumption of raw material solution 15.

[0038] (2) If the atomization efficiency of the raw material mist 3 from the raw material solution 15 is lower than that set, the deviation between the estimated flow rate and the actual flow rate of the raw material mist 3 will increase accordingly.

[0039] Thus, in conventional methods for measuring the flow rate of raw material mist 3, including the first and second flow estimation methods, the aforementioned estimation error factors result in the inability to accurately measure the flow rate of raw material mist 3.

[0040] The purpose of this disclosure is to solve the problems mentioned above and to provide a mist flow rate measuring device that can accurately determine the flow rate of raw material mist.

[0041] Methods used to solve problems

[0042] The fog flow measurement device disclosed herein is characterized by comprising: a fog camera that takes at least a portion of a fog flow area containing a fog-containing gas containing raw material fog as the image target area and performs image processing to obtain image information; and a fog flow calculation unit that performs fog flow calculation processing to calculate the flow rate of the raw material fog in the fog-containing gas based on the image information, wherein the image information represents multiple brightness values ​​of multiple pixels corresponding to the image target area.

[0043] Invention Effects

[0044] The fog flow calculation unit of the fog flow measurement device disclosed herein performs fog flow calculation processing based on camera information representing multiple brightness values ​​corresponding to the camera object area.

[0045] Since the flow rate of the raw material mist is correlated with multiple brightness values, it is possible to obtain relevant parameters in advance for deriving the flow rate of the raw material mist based on multiple brightness values.

[0046] As a result, the fog flow measurement device of this disclosure can perform fog flow calculation processing based on camera information and relevant parameters, and accurately determine the flow rate of the raw material fog.

[0047] The purpose, features, form and advantages of this disclosure will become clearer from the following detailed description and accompanying drawings. Attached Figure Description

[0048] Figure 1 This is an explanatory diagram showing the structure of the ultrasonic atomization system as Embodiment 1 of this disclosure.

[0049] Figure 2 It means by in Figure 1 The diagram shows an example of the video output obtained by the camera.

[0050] Figure 3 It is a schematic representation of... Figure 1 The diagram below illustrates an example of camera recording information.

[0051] Figure 4 It means in Figure 1 The diagram shows the cross-sectional structure of the upstream piping, transparent piping, and downstream piping.

[0052] Figure 5 It is a flowchart representing the processing steps for calculating the relevant parameters.

[0053] Figure 6 This is a flowchart illustrating the processing steps of the method for controlling the raw material solution of the ultrasonic atomization system in Embodiment 1.

[0054] Figure 7 This is a graph showing an example of the measurement result of fog flow obtained by the fog flow measuring device of Embodiment 1.

[0055] Figure 8 This is a flowchart illustrating the camera processing and fog flow calculation processing of a modified example of Implementation Method 1.

[0056] Figure 9 This is an explanatory diagram showing the structure of the ultrasonic atomization system as Embodiment 2 of this disclosure.

[0057] Figure 10 This is an explanatory diagram showing the structure of the ultrasonic atomization system as Embodiment 3 of this disclosure.

[0058] Figure 11 This is an explanatory diagram showing the structure of the ultrasonic atomization system as Embodiment 4 of this disclosure.

[0059] Figure 12This is an explanatory diagram showing the structure of the ultrasonic atomization system as Embodiment 5 of this disclosure.

[0060] Figure 13 It means in Figure 12 The diagram shows the cross-sectional structure of the upstream and downstream piping.

[0061] Figure 14 This is an explanatory diagram showing the structure (1) of a conventional ultrasonic atomization system.

[0062] Figure 15 This is an explanatory diagram showing the structure (2) of a conventional ultrasonic atomization system. Detailed Implementation

[0063] <Implementation Method 1>

[0064] Figure 1 This is an explanatory diagram showing the structure of the ultrasonic atomizing system 1001 as Embodiment 1 of this disclosure. The ultrasonic atomizing system 1001 includes the mist flow measurement device of Embodiment 1. The mist flow measurement device of Embodiment 1 includes a camera 5, a light source 6, a transparent pipe 10, and a mist flow calculation unit 16 as its main components.

[0065] like Figure 1 As shown, the ultrasonic atomization system 1001, in addition to the aforementioned mist flow measurement device, also includes an ultrasonic atomizing device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream piping 7, and a downstream piping 8 as its main components. Furthermore, the upstream piping 7 and the downstream piping 8 function as auxiliary components for installing the mist flow measurement device on the transparent piping 10.

[0066] The upstream piping 7, the transparent piping 10, and the downstream piping 8 are interconnected, and the combination of piping 7, 10, and 8 constitutes the external discharge piping for the mist-containing gas G3. The upstream piping 7 is the piping for supplying the first gas, the downstream piping 8 is the piping for supplying the second gas, and the transparent piping 10 is the piping for camera operation.

[0067] The ultrasonic atomizing device 100 includes an atomizing container 1 and an ultrasonic transducer 2 as its main components.

[0068] The atomizing container 1 contains a raw material solution 15. A predetermined number of ultrasonic transducers 2 are disposed on the bottom surface of the atomizing container 1. Figure 1 (This refers to only one). Additionally, as a raw material solution 15, one could conceive of a material solution containing metallic elements such as aluminum (Al) and zinc (Zn).

[0069] For an ultrasonic atomizing device 100 with such a structure, if ultrasonic vibration processing is performed by applying ultrasonic vibrations by ultrasonic transducer 2, the vibration energy of the ultrasonic waves is transmitted to the raw material solution 15 inside the atomizing container 1 via the bottom surface of the atomizing container 1.

[0070] Thus, the raw material solution 15 is transformed into mist with a particle size of less than 10 μm, thereby obtaining raw material mist 3 in the atomization container 1.

[0071] On the other hand, carrier gas G4 is supplied to the atomizing container 1 from the gas supply pipe 4. In order to transport the raw material mist 3 in the atomizing container 1 to the mist utilization and processing unit outside the ultrasonic atomizing device 100 via an external discharge pipe such as the upstream pipe 7, carrier gas G4 is supplied to the atomizing container 1 at a predetermined flow rate. For example, a high-concentration inert gas can be used as the carrier gas G4.

[0072] As a result, the mist-containing gas G3, which includes the raw material mist 3, is transported within an external discharge piping system consisting of an upstream piping 7, a transparent piping 10, and a downstream piping 8, and is ultimately supplied to the outside. The mist-containing gas G3 refers to the gas in the state in which the raw material mist 3 is transported by the carrier gas G4.

[0073] The raw material solution supply unit 20 includes a container 21, a pump 22, a flow meter 23, and a raw material solution supply side piping 24 as its main components. The container 21 contains the raw material solution 15. The flow meter 23 measures the flow rate through the raw material solution supply side piping 24 and obtains measured flow rate information S23, which represents the measured flow rate.

[0074] As described above, the mist-containing gas G3, which includes the raw material mist 3, is supplied to the outside from the atomizing container 1 via the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8. The interior of each of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8 forms a flow path for the mist-containing gas G3. That is, the upstream pipe 7 and the downstream pipe 8 each have a mist flow area inside.

[0075] In this way, the ultrasonic atomizing device 100 performs ultrasonic vibration treatment on the raw material solution 15 based on the ultrasonic transducer 2 to generate raw material mist 3, and the mist-containing gas G3 flows through the mist flow area through the carrier gas G4.

[0076] In the fog flow measurement device of Embodiment 1, part of the fog flow area within the transparent piping 10, which serves as a camera piping, becomes the camera target area of ​​the camera 5, which serves as a fog camera.

[0077] Light source 6 illuminates the object area within the transparent piping 10 with incident light L1. The incident light L1 is then reflected within the object area containing the fog gas G3, resulting in reflected light L2.

[0078] Next, camera 5, which is a fog camera, performs image processing to capture the reflected light L2. That is, the image processing performed by camera 5 is to capture the reflected light L2 as the object area of ​​the fog flow area that flows through the fog-containing gas G3 containing the raw material fog 3.

[0079] Camera 5 performs image processing and obtains image information S5. Image information S5 represents multiple brightness values ​​of multiple pixels corresponding to the image object area.

[0080] Figure 2 This is an explanatory diagram showing an example of the video recording result obtained by camera 5. Figure 3 This is an illustrative diagram illustrating an example of camera information S5.

[0081] If camera 5 performs the image processing to capture the reflected light L2, then as follows Figure 2 As shown, the image captured at the subject area R5 is obtained. Within the subject area R5, areas with denser black areas represent areas with lighter black areas, indicating a higher brightness.

[0082] Camera 5 according to Figure 2 The image captured is processed internally to obtain... Figure 3 The camera information S5 is shown.

[0083] In the camera information S5, such as Figure 3 As shown, multiple pixels arranged in a matrix of N (≥2) × M (≥2) correspond to the camera object area R5, and each pixel has a brightness value. Figure 3 In this context, the larger the brightness value of a pixel, the higher its brightness.

[0084] Thus, the camera information S5 represents multiple brightness values ​​for multiple pixels. Additionally, in Figure 2 The video results shown in the image and in Figure 3 The camera information S5 represented in the middle is only represented as one example each, and the two are not related.

[0085] Based on the image information S5 obtained by the camera 5, the fog flow calculation unit 16 performs fog flow calculation processing to calculate the flow rate of the raw material fog 3 in the fog-containing gas G3, and obtains fog flow information S16 representing the flow rate of the raw material fog 3. The fog flow information S16 is given to the flow control unit 17.

[0086] The fog flow calculation process performed by the fog flow calculation unit 16 includes the following summation calculation process and flow derivation process.

[0087] Sum value calculation processing... This process calculates the sum of multiple brightness values ​​represented as camera information S5.

[0088] Flow rate export processing... Processing of exporting the flow rate of raw material fog 3 based on the sum of brightness values ​​obtained from the summation calculation.

[0089] In this way, the fog flow calculation unit 16 performs fog flow calculation processing, including summation processing and flow derivation processing, based on the multiple brightness values ​​represented by the camera information S5.

[0090] Figure 4 This is an explanatory diagram showing the cross-sectional structure of the upstream piping 7, the transparent piping 10, and the downstream piping 8. Additionally, in Figure 4 The document contains an XYZ orthogonal coordinate system.

[0091] As shown in the figure, the upstream piping 7, transparent piping 10 and downstream piping 8 that constitute the external discharge piping are arranged along the Z direction, which is parallel to the vertical direction, and the upstream piping 7 is connected to the transparent piping 10 and the transparent piping 10 is connected to the downstream piping 8.

[0092] Therefore, the mist-containing gas G3 supplied from the ultrasonic atomizing device 100 flows along the +Z direction through the interiors of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8. That is, the flow path of the mist-containing gas G3 is set inside the interiors of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8. Furthermore, the cross-sectional shape of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8 is a circle with a fixed inner diameter, and the inner diameters of the upstream pipe 7, the transparent pipe 10, and the downstream pipe 8 are all set to be the same.

[0093] The transparent piping 10 used for camera installation is made of a transparent material. Furthermore, the inner surface S10 of the transparent piping 10 is made of a hydrophilic material. In addition, the thicknesses of the upstream piping 7, the transparent piping 10, and the downstream piping 8 are arbitrarily set.

[0094] Figure 5 This is a flowchart illustrating the processing steps for calculating relevant parameters used to determine the flow rate of the raw material mist 3. The calculation of relevant parameters is performed prior to the actual operation of the mist flow rate measuring device in Embodiment 1.

[0095] Referring to the figure, in step ST11, a specified ultrasonic atomizing device with a known flow rate of raw material mist 3 is prepared. Here, the flow rate of raw material mist 3 is assumed to be the mist flow rate MF.

[0096] Next, in step ST12, the camera conditions for camera 5 are set. These camera conditions are the same as those for camera 5 during actual operation of the fog flow measuring device in Embodiment 1. Furthermore, camera 5 is the same camera used in the fog flow measuring device of Embodiment 1.

[0097] As imaging conditions, one can consider, for example, the light intensity and wavelength of the light source 6, the illumination angle of the incident light L1 onto the transparent pipe 10, the imaging position of the camera 5, the imaging object area, and the type of imaging light (reflected light, transmitted light), etc. Furthermore, it is preferable that the flow rate of the carrier gas G4 at the ultrasonic atomizing device 100 is preset to be the same.

[0098] Then, in step ST13, the camera 5 begins image processing, and in step ST14, the camera 5 obtains image information S5 by performing image processing on the reflected light L2.

[0099] Next, in step ST15, a total brightness value is calculated as the sum of multiple brightness values ​​represented by the camera information S5. Here, it is assumed that the total brightness value LS has been calculated.

[0100] Then, in step ST16, the relevant parameter K1 is calculated. The fog flow rate MF and the total brightness value LS have a certain correlation. For example, assume that the fog flow rate MF has a relationship expressed as a linear function of the total brightness value LS as shown in equation (1).

[0101] MF=K1·LS+c1…(1)c1 is a constant.

[0102] In this case, the relevant parameter K1 can be calculated based on the following equation (2) based on equation (1).

[0103] K1=(MF-c1) / LS…(2)

[0104] In this way, for the fog flow measurement device of Embodiment 1, it is possible to prepare in advance a device that can measure the fog flow rate through... Figure 5 The relevant parameter K1 for the process calculation is represented in the figure.

[0105] Figure 6 It means in Figure 1 The flowchart shows the processing steps of the control method for the raw material solution 15 at the ultrasonic atomization system 1001. This process includes a mist flow measurement method performed by the mist flow measurement device of Embodiment 1. Hereinafter, the control of the ultrasonic atomization system 1001 will be described with reference to this diagram.

[0106] First, in step ST1, the imaging conditions of the fog flow measurement device of Embodiment 1 are set. Here, the imaging conditions are related to... Figure 5 The calculation of the relevant parameter K1 is the same as that in the text.

[0107] Next, in step ST2, the fog flow calculation unit 16 obtains the relevant parameter K1. Methods for obtaining the relevant parameter K1 include, for example, pre-storing the relevant parameter K1 in an external storage device (not shown) or obtaining it from the fog flow calculation unit 16 as needed.

[0108] Thus, step ST2 becomes the step of obtaining the relevant parameter K1, which is used to derive the fog flow rate MF based on the sum of the brightness values ​​of multiple brightness values.

[0109] Then, in step ST3, the fog flow measurement device of embodiment 1 begins to perform image processing on the reflected light L2 by camera 5. In step ST4, camera 5 obtains image information S5 by performing image processing.

[0110] The above-mentioned step ST4 becomes the step of using camera 5 to perform imaging processing on at least a portion of the fog flow area passing through the fog-containing gas G3 as the imaging object area to obtain imaging information S5.

[0111] In addition, the process of obtaining the relevant parameter K1 in step ST2 can also be performed after step ST4 and before step ST5.

[0112] Next, in step ST5, the fog flow calculation unit 16 performs fog flow calculation processing to calculate the fog flow rate MF. The details of the fog flow calculation processing are described below.

[0113] The fog flow calculation unit 16 first performs a summation operation to calculate the sum of the multiple brightness values ​​represented by the camera information S5. Then, the fog flow calculation unit 16 performs a flow derivation operation to derive the fog flow MF based on the summation value obtained in the summation operation.

[0114] For example, if the total brightness value obtained in the total value calculation is LS, then the fog flow rate MF can be calculated by applying the following equation (1A) of the above equation (1).

[0115] MF = K1·LS + c1…(1A)

[0116] As described above, step ST5 performs fog flow rate calculation based on camera information S5 using relevant parameter K1. The fog flow rate calculation calculates the fog flow rate MF of fog-containing gas G3 based on the sum of brightness values ​​LS of multiple brightness values.

[0117] Therefore, the fog flow rate measuring device of Embodiment 1 can measure the fog flow rate MF based on the camera information S5 by executing the fog flow rate measuring method including steps ST1 to ST5. Furthermore, the unit for fog flow rate MF can be, for example, (L (liters) / min).

[0118] The fog flow information S16, which represents the fog flow MF calculated by the fog flow calculation unit 16, is output to the next level flow control unit 17.

[0119] In step ST6, the flow control unit 17 of the ultrasonic atomization system 1001 performs a raw material supply control process to control the supply status of the raw material solution 15 supplied from the container 21 of the raw material solution supply unit 20 to the atomization container 1. The details of the processing performed by the flow control unit 17 in step ST6 will be described below.

[0120] The flow control unit 17, which is the raw material supply control unit, receives measured flow information S23 from the flow meter 23 and fog flow information S16 from the fog flow calculation unit 16.

[0121] The flow control unit 17 continuously identifies the flow rate flowing through the raw material solution supply side piping 24 by measuring the flow rate indicated by the flow rate information S23.

[0122] The flow control unit 17 continuously identifies the flow rate of the raw material mist 3 by using the mist flow rate MF represented by the mist flow rate information S16.

[0123] Based on the measured flow rate information S23 and the mist flow rate information S16, the flow control unit 17 performs raw material supply control processing by outputting a pump drive signal S17 that indicates the drive amount of the pump 22, in order to satisfy the flow control conditions described later. The flow control conditions are, for example, the condition that "the mist flow rate MF indicated by the mist flow rate information S16 is within the allowable range from the reference mist flow rate".

[0124] In this way, the flow control unit 17 identifies the flow rate of the raw material mist 3 generated by the ultrasonic atomizing device 100 based on the mist flow rate information S16 obtained from the mist flow rate calculation unit 16, and performs raw material supply control processing so that the identified flow rate of the raw material mist 3 becomes a specified flow rate that is within the allowable range from the reference mist flow rate.

[0125] Figure 7 This is a graph showing an example of the measurement result of fog flow rate MF obtained by the fog flow rate measuring device of Embodiment 1. In this graph, the horizontal axis represents the elapsed time (sec), and the vertical axis represents the converted flow rate (value) (in arbitrary units) based on the fog flow rate MF.

[0126] In this figure, the converted flow rate F1 represents the case where one ultrasonic transducer 2 performs ultrasonic vibration treatment, and the converted flow rate F4 represents the case where four ultrasonic transducers 2 perform ultrasonic vibration treatment. As shown in the figure, it can be seen that the converted flow rate F4 is larger than the converted flow rate F1. The converted flow rates F1 and F4 are both within the same range, and the raw material supply control treatment performed by the flow control unit 17 is appropriately executed.

[0127] The fog flow calculation unit 16 of the fog flow measurement device in Embodiment 1 performs fog flow calculation processing based on the imaging information S5, which represents multiple brightness values ​​of multiple pixels corresponding to the imaging target area R5.

[0128] The fog flow rate MF (flow rate of raw fog 3) and multiple brightness values ​​are correlated, so the relevant parameter K1 can be obtained in advance. The relevant parameter K1 is used to derive the fog flow rate MF (refer to the image information S5) based on the multiple brightness values. Figure 5 ).

[0129] As a result, the fog flow rate measuring device of Embodiment 1 can calculate the fog flow rate MF with good accuracy by performing fog flow rate calculation processing using relevant parameters K1 based on the camera information S5.

[0130] Camera 5, which is used for fog photography, can easily obtain camera information S5 by performing camera processing to capture reflected light L2.

[0131] The fog flow calculation unit 16 can perform simple and highly accurate fog flow calculation processing by deriving the fog flow MF based on the total brightness value.

[0132] The fog flow measurement device of Embodiment 1 can perform imaging processing by camera 5 in a space where the diffusion of raw material fog 3 contained in fog gas G3 is suppressed by a transparent pipe 10 installed inside the flow path of fog gas G3.

[0133] Furthermore, since the transparent piping 10 is made of transparent material, its presence will not affect the image processing performed by the camera 5.

[0134] Since the transparent piping 10 used for camera is arranged along the vertical direction (Z direction), liquid that condenses inside the transparent piping 10 can be discharged downwards (-Z direction) relative to the transparent piping 10 without accumulating inside the transparent piping 10.

[0135] Therefore, the fog flow measurement device of Embodiment 1 can minimize the impact of condensation in the transparent piping 10 while performing image processing by the camera 5.

[0136] On the other hand, when the transparent pipe 10 is arranged horizontally, the liquid volume of the raw material mist 3 that condenses inside the transparent pipe 10 exists below the transparent pipe 10. In the mist flow measuring device of Embodiment 1, since the transparent pipe 10 is arranged vertically, the above-mentioned phenomenon does not occur.

[0137] Because the material constituting the inner surface S10 of the transparent piping 10 is hydrophilic, even if condensation occurs inside the transparent piping 10, the phenomenon of the condensed liquid adhering to the inner surface S10 of the transparent piping 10 as water droplets can be suppressed.

[0138] In Embodiment 1, the flow control unit 17 (raw material supply control unit) of the ultrasonic atomization system 1001 performs raw material supply control processing based on the mist flow information S16 obtained from the mist flow calculation unit 16, so that the mist flow MF becomes the specified flow rate.

[0139] Therefore, the ultrasonic atomization system 1001 of Embodiment 1 can keep the flow rate MF of the mist generated from the ultrasonic atomization device 100 stable at a specified flow rate for a long period of time.

[0140] Step ST5 in the fog flow measurement method performed by the fog flow measurement device of Embodiment 1 (refer to) Figure 6 Based on multiple brightness values ​​of multiple pixels corresponding to the camera object area R5, the fog flow rate MF is calculated using the relevant parameter K1.

[0141] Since there is a certain correlation between fog flow rate MF and multiple brightness values, the fog flow rate measurement method of Implementation Method 1 can accurately determine the fog flow rate MF by using the relevant parameter K1.

[0142] (Modified Example)

[0143] In the Figures 1 to 7 The fog flow measurement device shown in Embodiment 1 illustrates the case where the image processing performed by the camera 5 is performed once, but variations where multiple image processing operations are performed consecutively are also possible.

[0144] For example, if camera 5 has the capability to perform video processing at a rate of once per second, by making camera 5 operate continuously for 20 seconds, it is possible to perform 20 video processing operations.

[0145] Figure 8 This is a flowchart illustrating the image processing and fog flow calculation processing of a modified example of the fog flow measurement device according to Embodiment 1.

[0146] In this figure, the processes of steps ST41 to ST44 correspond to Figure 6 The processing of step ST4 and the processing of step ST50 correspond to Figure 6 The processing of step ST5. Additionally, by... Figure 8 The control represented by steps ST41 to ST44 can be considered to be performed, for example, under the control of the fog flow calculation unit 16 or by a control mechanism such as the CPU built into the camera 5. Furthermore, in the case of… Figure 8The example shown represents the case where K (≥2) camera processes are performed.

[0147] Reference Figure 8 In step ST41, the control parameter value i is initially set to {i = 1}.

[0148] Next, in step ST42, the first video recording of camera 5 is performed, and the obtained video information S5 is used as the first video information.

[0149] Then, in step ST43, regarding the control parameter value i, it is verified whether {i = K}. Here, if {i = K} (yes), proceed to step ST50; if {i = K} (no), proceed to step ST44.

[0150] In step ST44, the control parameter value i is incremented by "1" {i = i + 1}, and the process returns to step ST42. Then, steps ST42 through ST44 are repeated until a "yes" result is determined in step ST43.

[0151] If step ST43 is "yes", then by executing K (multiple) camera processing steps, the first to Kth camera information (multiple camera information) are obtained. Alternatively, it is possible to consider a configuration where the camera 5 itself has the function of temporarily storing the first to Kth camera information or is configured in the fog flow calculation unit 16.

[0152] In step ST50, which is executed if step ST43 is true, the fog flow calculation unit 16 first performs fog flow calculation processing based on the first to Kth camera information. The first to Kth camera information are multiple camera information obtained by executing multiple camera processing steps. The details of step ST50 will be explained below.

[0153] First, the fog flow calculation unit 16 performs summation calculation on the first to the Kth camera information respectively to obtain the first to the Kth brightness sum values ​​LS(1) to LS(K) (multiple brightness sum values).

[0154] Next, the fog flow calculation unit 16 calculates the average value of the sum of brightness values ​​LS(1) to LS(K) as the sum average value, and calculates the fog flow rate MF based on the sum average value using the relevant parameter K1.

[0155] For example, if the total average value is MS, the fog flow rate MF can be obtained by applying the following equation (1B) using the above equation (1).

[0156] MF = K1·MS + c1…(1B)

[0157] Thus, the fog flow calculation unit 16 derives the fog flow rate MF based on the sum of the first to the Kth brightness values ​​LS(1) to LS(K). Furthermore, when calculating the relevant parameter K1 in the modified example, similarly to the actual operation of the fog flow measurement device in the modified example, it is preferable to calculate the average value of the sum of the first to the Kth brightness values ​​LS(1) to LS(K) along the path from... Figure 5 The calculation is performed according to the indicated process.

[0158] A variation of Implementation 1 can derive the fog flow rate MF with higher accuracy by deriving the fog flow rate MF from the sum average value MS of the first to the Kth sum values ​​of brightness (LS(1) to LS(K)), which are multiple sum values ​​of brightness.

[0159] <Implementation Method 2>

[0160] Figure 9 This is an explanatory diagram showing the structure of the ultrasonic atomizing system 1002 as Embodiment 2 of this disclosure. The ultrasonic atomizing system 1002 includes the mist flow measurement device of Embodiment 2. The mist flow measurement device of Embodiment 2 includes, as a main component, a camera 5, a light source 6, a transparent pipe 10, and a mist flow calculation unit 16.

[0161] Hereinafter, descriptions will be provided focusing on the characteristic parts of Embodiment 2, by assigning the same reference numerals to the same constituent elements as in Embodiment 1.

[0162] like Figure 9 As shown, in addition to the aforementioned mist flow measurement device, the ultrasonic atomization system 1002 also includes, as its main components, an ultrasonic atomizing device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream piping 7, and a downstream piping 8. Furthermore, the upstream piping 7 and the downstream piping 8 function as auxiliary components for installing the transparent piping 10, thus serving as the mist flow measurement device.

[0163] like Figure 9 As shown, in the fog flow measurement device of Embodiment 2, part of the fog flow area within the transparent piping 10, which serves as the camera piping, becomes the camera object area of ​​the fog camera, i.e., the camera 5.

[0164] Light source 6 illuminates the object area within the transparent piping 10 with incident light L1. Thus, incident light L1 passes through the object area containing fog gas G3, resulting in transmitted light L3.

[0165] Camera 5, used as a fog camera, is positioned opposite the light source 6, sandwiching the transparent conduit 10, and performs image processing to capture transmitted light L3. That is, the image processing of camera 5 becomes the image processing of transmitted light L3 that passes through at least a portion of the fog flow area containing the fog-containing gas G3 containing the raw material fog 3 as the image object area.

[0166] Camera 5 performs image processing and obtains image information S5. Image information S5 contains multiple brightness values ​​of multiple pixels corresponding to the image object area.

[0167] The fog flow calculation unit 16 of the fog flow measurement device in Embodiment 2 performs fog flow calculation processing based on the image information S5, which represents multiple brightness values ​​obtained by image processing of the camera 5 that transmits light L3.

[0168] Therefore, the fog flow rate measuring device of Embodiment 2, like that of Embodiment 1, can perform fog flow rate calculation processing using relevant parameters K1 based on the camera information S5, thereby accurately calculating the fog flow rate MF.

[0169] Furthermore, the camera 5 of the fog camera in the fog flow measurement device of Embodiment 2 can more easily obtain the image information S5 by performing image processing to capture transmitted light L3.

[0170] <Implementation Method 3>

[0171] Figure 10 This is an explanatory diagram showing the structure of the ultrasonic atomizing system 1003 as Embodiment 3 of this disclosure. The ultrasonic atomizing system 1003 includes the mist flow measurement device of Embodiment 3. The mist flow measurement device of Embodiment 3 includes, as a main component, a camera 5, a light source 6, a transparent pipe 10, a heater 12, and a mist flow calculation unit 16.

[0172] Hereinafter, descriptions will be provided focusing on the characteristic parts of Embodiment 3, by assigning the same reference numerals to the same constituent elements as in Embodiment 1.

[0173] like Figure 10 As shown, in addition to the aforementioned mist flow measurement device, the ultrasonic atomization system 1003 also includes, as its main components, an ultrasonic atomizing device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream piping 7, and a downstream piping 8. Furthermore, the upstream piping 7 and the downstream piping 8 function as auxiliary components for installing the transparent piping 10, thus serving as the mist flow measurement device.

[0174] like Figure 10As shown, in the fog flow measuring device of Embodiment 3, a heater 12 is installed close to the transparent pipe 10, which serves as a camera piping, and along the extending direction (Z direction) of the transparent pipe 10. The heater 12 heats the transparent pipe 10 and its interior.

[0175] The fog flow calculation unit 16 of the fog flow measurement device in Embodiment 3 performs fog flow calculation processing based on the camera information S5 representing multiple brightness values, similar to that in Embodiment 1.

[0176] Therefore, the fog flow rate measuring device of Embodiment 3, like that of Embodiment 1, can perform fog flow rate calculation processing using relevant parameters K1 based on camera information S5, thereby accurately calculating the fog flow rate MF.

[0177] Furthermore, the fog flow measuring device of Embodiment 3 also includes a heater 12, which can heat the transparent pipe 10, which serves as a camera piping, and its interior, thereby suppressing condensation inside the transparent pipe 10.

[0178] <Implementation Method 4>

[0179] Figure 11 This is an explanatory diagram showing the structure of the ultrasonic atomizing system 1004 as Embodiment 4 of this disclosure. The ultrasonic atomizing system 1004 includes the fog flow measurement device of Embodiment 4. The fog flow measurement device of Embodiment 4 includes, as a main component, a light source 6, a transparent pipe 10, a fog flow calculation unit 16, and cameras 51 and 52.

[0180] Hereinafter, descriptions will be provided focusing on the characteristic parts of Embodiment 4, by assigning the same reference numerals to the same constituent elements as in Embodiment 1.

[0181] like Figure 11 As shown, in addition to the aforementioned mist flow measurement device, the ultrasonic atomization system 1004 also includes, as its main components, an ultrasonic atomizing device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream piping 7, and a downstream piping 8. Furthermore, the upstream piping 7 and the downstream piping 8 function as auxiliary components for installing the transparent piping 10, thus serving as the mist flow measurement device.

[0182] In the fog flow measurement device of embodiment 4, part of the fog flow area within the transparent piping 10, which is a camera piping, becomes the camera target area of ​​the fog camera, namely cameras 51 and 52.

[0183] Light source 6 illuminates the object area within the transparent piping 10 with incident light L1. The incident light L1 is then reflected within the object area containing the fog gas G3, resulting in two reflected lights L21 and L22 (multiple reflected lights). The reflected lights L21 and L22 reflect in different directions and do not interfere with each other.

[0184] Furthermore, multiple fog cameras, namely cameras 51 and 52, are configured for capturing images of the multiple reflected lights, namely reflected lights L21 and L22. Camera 51 performs the image processing for capturing images of reflected light L21, and camera 52 performs the image processing for capturing images of reflected light L22.

[0185] Thus, the imaging processing performed by cameras 51 and 52 becomes the imaging processing of reflected light L21 and L22 that flows through at least a portion of the fog-containing gas G3 containing the raw material fog 3 as the imaging target area.

[0186] Camera 51 performs image processing on reflected light L21 and obtains image information S51. Image information S51 represents multiple brightness values ​​of multiple pixels corresponding to reflected light L21 from the object area being imaged. Camera 52 performs image processing on reflected light L22 and obtains image information S52. Image information S52 contains multiple brightness values ​​of multiple pixels corresponding to reflected light L22 from the object area being imaged.

[0187] The reflected light L21 and L22 do not interfere with each other, and the camera information S51 and S52, which are multiple types of camera information, represent multiple brightness values ​​for different content.

[0188] The fog flow calculation unit 16 performs fog flow calculation processing to calculate the flow rate of the raw material fog 3 in the fog-containing gas G3 based on various camera information, namely camera information S51 and S52, and obtains fog flow information S16 representing the flow rate of the raw material fog 3.

[0189] Fog flow calculation processing includes the following summation value calculation processing and flow export processing.

[0190] The summation process involves calculating the first summation value of the multiple brightness values ​​represented by camera information S51 and the second summation value of the multiple brightness values ​​represented by camera information S52. The average of the first and second summation values ​​is then used as the average brightness summation value.

[0191] Flow rate export processing... The flow rate of raw material fog 3 is exported based on the average brightness obtained through summation calculation.

[0192] For example, if the average brightness value obtained in the above summation operation is LM, the fog flow rate MF can be calculated by applying the following equation (1C) using the above equation (1).

[0193] MF = K1·LM + c1…(1C)

[0194] Thus, the fog flow calculation unit 16 performs fog flow calculation processing based on the multiple brightness values ​​represented by the camera information S51 and S52 respectively. Furthermore, when calculating the relevant parameter K1 in Embodiment 4, similarly to the actual operation of the fog flow measuring device in Embodiment 4, it is preferable to calculate the average value of the sum of the first and second brightness values ​​along the... Figure 5 The calculation is performed according to the process indicated in the figure.

[0195] The fog flow calculation unit 16 of the fog flow measurement device in Embodiment 4 performs fog flow calculation processing based on the camera information S51 and S52, which respectively represent multiple brightness values.

[0196] Therefore, the fog flow rate measuring device of Embodiment 4, like that of Embodiment 1, can perform fog flow rate calculation processing using relevant parameters K1 based on camera information S51 and S52, thereby accurately calculating the fog flow rate MF.

[0197] The fog flow calculation unit 16 performs fog flow calculation processing based on the various camera information S51 and S52 (multiple camera information) obtained from the cameras 51 and 52, which are multiple fog cameras.

[0198] Therefore, the fog flow measurement device of embodiment 4 can further determine the flow rate of the raw material fog 3 with good accuracy.

[0199] Furthermore, while the fog flow calculation unit 16 in Embodiment 4 calculates the average of the first and second total brightness values ​​during the summation process, it is also possible to weight the first and second total brightness values, setting the ratio of one to the other higher. For example, the ratio of the first total brightness value to the second total brightness value can be {2:1}.

[0200] exist Figure 11 In the embodiment 4 shown, a structure with one light source 6 is illustrated, but the number of light sources 6 can also be matched with cameras 51 and 52 and set to two.

[0201] Furthermore, in Embodiment 4, two cameras 51 and 52 are shown as multiple fog cameras, but three or more fog cameras can also be used to obtain three or more types of camera information.

[0202] <Implementation Method 5>

[0203] Figure 12This is an explanatory diagram showing the structure of the ultrasonic atomizing system 1005 as Embodiment 5 of this disclosure. The ultrasonic atomizing system 1005 includes the fog flow measurement device of Embodiment 5. The fog flow measurement device of Embodiment 5 includes, as a main structural element, a camera 5, a light source 6, an upstream piping 7, a downstream piping 8, a piping-free space 9, and a fog flow calculation unit 16.

[0204] Hereinafter, descriptions will be provided focusing on the characteristic parts of Embodiment 5, by assigning the same reference numerals to the same constituent elements as in Embodiment 1.

[0205] like Figure 12 As shown, in addition to the mist flow measurement device mentioned above, the ultrasonic atomization system 1005 also includes an ultrasonic atomizing device 100, a raw material solution supply unit 20, a flow control unit 17, an upstream piping 7, and a downstream piping 8 as its main components.

[0206] The upstream piping 7 and the downstream piping 8 are configured separately from each other, sandwiching a pipeless space 9. The combination of the separate upstream piping 7 and the downstream piping 8 constitutes the external discharge piping for the mist-containing gas G3. The upstream piping 7 is the piping for supplying the first gas, the downstream piping 8 is the piping for supplying the second gas, and the pipeless space 9 is a gap space.

[0207] In embodiment 5, the upstream piping 7 (piping for the first gas supply) and the downstream piping 8 (piping for the second gas supply) also function as key components of the fog flow measurement device, which is essential for setting up the pipingless space 9.

[0208] Furthermore, the mist-containing gas G3, which includes the raw material mist 3, is supplied to the outside from the atomizing container 1 via the upstream piping 7, the unpiped space 9, and the downstream piping 8.

[0209] Figure 13 This is an explanatory diagram showing the cross-sectional structure of the upstream pipe 7 and the downstream pipe 8. Additionally, in Figure 13 The XYZ orthogonal coordinate system is recorded in it.

[0210] like Figure 13 As shown, the upstream pipe 7 and the downstream pipe 8 each have an internal flow path for the mist-containing gas G3. That is, the upstream pipe 7 and the downstream pipe 8 each have a mist flow area inside. Furthermore, there exists a pipeless space 9 as a gap space between the upstream pipe 7 and the downstream pipe 8. This pipeless space 9 also has a flow path for the mist-containing gas G3. That is, the pipeless space 9 has a mist flow area inside.

[0211] like Figure 13 As shown, the upstream piping 7 and the downstream piping 8 are arranged along the extension direction (+Z direction).

[0212] Since the mist-containing gas G3 is transported at a certain flow rate through the carrier gas G4, the mist-containing gas G3 flowing from the upstream pipe 7 through the unpiped space 9 does not leak out of the unpiped space 9 to the outside, but flows along the +Z direction into the downstream pipe 8.

[0213] In the fog flow measurement device of embodiment 5, part of the fog flow area in the unpiped space 9, which is a gap space, becomes the camera object area of ​​the fog camera, i.e., the camera 5.

[0214] Light source 6 illuminates the object area within the unpiped space 9 with incident light L1. The incident light L1 is then reflected in the object area containing the fog gas G3, resulting in reflected light L2.

[0215] Next, camera 5, which is a fog camera, performs the image processing of capturing reflected light L2.

[0216] Camera 5 performs image processing and obtains image information S5. Image information S5 contains multiple brightness values ​​of multiple pixels corresponding to the image object area within the unpiped space 9.

[0217] The fog flow calculation unit 16 of the fog flow measurement device in Embodiment 5 performs fog flow calculation processing based on the camera information S5 representing multiple brightness values, similar to that in Embodiment 1.

[0218] Therefore, the fog flow rate measuring device of Embodiment 5, like that of Embodiment 1, can perform fog flow rate calculation processing based on the camera information S5 using the relevant parameter K1, thereby accurately calculating the fog flow rate MF.

[0219] Since the camera object area of ​​the camera 5, which serves as a fog camera, exists within the unpiped space 9, which becomes a gap space, the camera 5 of the fog flow measurement device in Embodiment 5 can perform image processing on the reflected light L2 with good accuracy without being affected by condensation.

[0220] <Other>

[0221] This disclosure has been described in detail, but the foregoing description is illustrative in all instances and this disclosure is not limited thereto. It should be understood that numerous variations not illustrated can be conceived without departing from the scope of this disclosure.

[0222] Furthermore, within the scope of this disclosure, various embodiments can be freely combined, or appropriately modified or omitted.

[0223] For example, the heater 12 used in Embodiment 3 can also be used in Embodiments 2, 4 and 5, or the structure with transparent piping 10 in Embodiments 2 to 4 can be changed to the structure with piping-free space 9 shown in Embodiment 5.

[0224] Label Explanation

[0225] 1. Atomizing container

[0226] 2. Ultrasonic transducer

[0227] 3. Raw material mist

[0228] 4 Gas supply piping

[0229] Cameras 5, 51, and 52

[0230] 6. Light source

[0231] 7. Upstream piping

[0232] 8. Downstream piping

[0233] 9. No piping space

[0234] 10 Transparent piping

[0235] 12 heaters

[0236] 16 Fog Flow Calculation Department

[0237] 17 Flow Control Department

[0238] 20 Raw Material Solution Supply Department

[0239] 1001~1005 Ultrasonic Atomization System

[0240] L1 incident light

[0241] L2, L21, L22 reflected light

[0242] L3 transmitted light

Claims

1. A mist flow measuring device, characterized by, Having: a light source that irradiates incident light to a photographing target region; a fog photographing camera that performs photographing processing of at least a part of a fog flow passage region through which a fog-containing gas including a raw material fog flows as the photographing target region, and acquires photographing information; and a fog flow amount calculation section that performs a fog flow amount calculation processing of calculating a flow amount of the raw material fog in the fog-containing gas based on the photographing information, the photographing information indicates a plurality of luminance values of a plurality of pixels corresponding to the photographing target region, the fog flow amount measuring device further has a first gas supply pipe and a second gas supply pipe each having the fog flow passage region in the inside, a gap space exists between the first gas supply pipe and the second gas supply pipe, the gap space has the fog flow passage region in the inside, the fog-containing gas flows through the first gas supply pipe and the second gas supply pipe via the gap space, a part of the fog flow passage region in the gap space becomes the photographing target region.

2. The fog flow amount measuring device according to claim 1, wherein the photographing processing performed by the fog photographing camera includes processing of capturing reflected light obtained by reflection of the incident light in the photographing target region.

3. The fog flow amount measuring device according to claim 1, wherein the photographing processing performed by the fog photographing camera includes processing of capturing transmitted light obtained by transmission of the incident light through the photographing target region.

4. The fog flow amount measuring device according to claim 1, wherein the fog flow amount calculation processing performed by the fog flow amount calculation section includes: a sum value calculation processing of calculating a sum of the plurality of luminance values indicated by the photographing information, that is, a luminance sum value; and a flow amount derivation processing of deriving the flow amount of the raw material fog based on the luminance sum value.

5. The fog flow amount measuring device according to claim 4, wherein the photographing processing includes a plurality of photographing processing, the photographing information includes a plurality of photographing information obtained by performing the plurality of photographing processing, and the luminance sum value includes a plurality of luminance sum values, the fog flow amount calculation section performs the sum value calculation processing on the plurality of photographing information respectively, and calculates the plurality of luminance sum values, the flow amount derivation processing derives the flow amount of the raw material fog based on the plurality of luminance sum values.

6. The fog flow amount measuring device according to any one of claims 1 to 5, wherein the fog photographing camera includes a plurality of fog photographing cameras, the photographing information includes a plurality of photographing information corresponding to the plurality of fog photographing cameras, and the plurality of photographing information is different in content, the fog flow amount calculation section performs the fog flow amount calculation processing based on the plurality of photographing information.

7. An ultrasonic atomization system, characterized in that, Having: the fog flow amount measuring device according to any one of claims 1 to 5; an ultrasonic atomization device that generates the raw material fog by performing ultrasonic vibration processing of a raw material solution, and causes the fog-containing gas including the raw material fog to flow through the fog flow passage region; a raw material solution supply section that supplies the raw material solution to the ultrasonic atomization device; and The raw material supply control section executes a raw material supply control process of controlling a supply state of the raw material solution supplied from the raw material solution supply section to the ultrasonic atomization device, The mist flow amount measuring device further includes a first gas supply pipe and a second gas supply pipe each having the mist flow-through region inside, a gap space being present between the first gas supply pipe and the second gas supply pipe, the mist flow-through region being inside the gap space, the mist-containing gas flowing through between the first gas supply pipe and the second gas supply pipe via the gap space, The raw material supply control section executes the raw material supply control process in such a manner that the flow amount of the raw material mist becomes a prescribed flow amount, based on the mist flow amount information.

8. A method of measuring the flow of mist, characterized by, The mist flow amount measuring device further includes a first gas supply pipe and a second gas supply pipe each having the mist flow-through region inside, a gap space being present between the first gas supply pipe and the second gas supply pipe, the mist flow-through region being inside the gap space, the mist-containing gas flowing through between the first gas supply pipe and the second gas supply pipe via the gap space, The mist flow amount measuring method has the following steps: (a) using the mist camera, performing a camera process of taking at least a part of the mist flow-through region as the camera object region, and acquiring camera information indicating a plurality of luminance values of a plurality of pixels corresponding to the camera object region, The mist flow amount measuring method further has the following steps: (b) acquiring a correlation parameter for deriving the flow amount of the raw material mist from the plurality of luminance values; and (c) performing a mist flow amount calculation process of calculating the flow amount of the raw material mist in the mist-containing gas from the plurality of luminance values based on the camera information using the correlation parameter, The mist flow amount measuring device further includes a first gas supply pipe and a second gas supply pipe each having the mist flow-through region inside, a gap space being present between the first gas supply pipe and the second gas supply pipe, the mist flow-through region being inside the gap space, the mist-containing gas flowing through between the first gas supply pipe and the second gas supply pipe via the gap space, A part of the mist flow-through region inside the gap space becomes the camera object region.

Images