Semi-conductor ingot lapping machine

Abstract

The application provides a kind of semiconductor crystal bar's roll grinding machine equipment, it is related to the processing equipment field of semiconductor crystal bar, it includes clamping device, mobile platform, FT-IR infrared spectrometer, roll grinding machine, water spraying device, drying device and X-ray crystal direction detection device;Clamping device includes first clamping part, second clamping part, first drive assembly and first rotating assembly;Roll grinding machine is used to roll grinding workpiece;Water spraying device is used for workpiece water spraying;Drying device is used for workpiece drying;X-ray crystal direction detection device is used for workpiece crystal direction search;FT-IR infrared spectrometer is used for workpiece gap oxygen content measurement.By FT-IR infrared spectrometer, roll grinding machine, water spraying device, drying device and X-ray crystal direction detection device together are set on mobile platform, can be after roll grinding, automatically measure the gap oxygen content of crystal bar, to reduce the handling of crystal bar after roll grinding, reduce handling risk, simplify work flow, improve production efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor crystal rod processing equipment, and more specifically to a semiconductor crystal rod grinding machine. Background Technology

[0002] After the semiconductor crystal ingots are tumbled on the tumbling mill, the interstitial oxygen content needs to be measured. In actual production, after tumbling, the semiconductor crystal ingots need to be unloaded from the clamping device and then moved to another station by a robotic arm or other clamping equipment to measure the interstitial oxygen content using another device. This process carries certain handling risks; if the crystal ingots are bumped or otherwise damaged, it will result in material loss.

[0003] Therefore, there is a need for a tumbling mill that can automatically measure the interstitial oxygen content in order to reduce the handling of crystal rods after tumbling, reduce the handling risks of crystal rods, simplify the workflow, and improve production efficiency. Summary of the Invention

[0004] In view of this, embodiments of this specification provide a semiconductor crystal ingot tumbling machine that can automatically measure the interstitial oxygen content of the crystal ingot after tumbling, thereby reducing the handling of the crystal ingot after tumbling, lowering handling risks, simplifying the workflow, and improving production efficiency.

[0005] The embodiments in this specification provide the following technical solutions:

[0006] This specification provides a semiconductor crystal rod tumbling machine, including a clamping device, a moving platform, an FT-IR infrared spectrometer mounted on the moving platform, a tumbling machine, a water spraying device, a drying device, and an X-ray crystal orientation detection device.

[0007] The clamping device includes a first clamping part, a second clamping part, a first driving assembly for displacing the first clamping part and / or the second clamping part, and a first rotating assembly for rotating the first clamping part and / or the second clamping part. The first clamping part and the second clamping part move closer to each other under the drive of the driving assembly to clamp the workpiece.

[0008] The tumbling mill moves closer to the clamping device under the drive of the moving platform to tumble the workpieces clamped by the first clamping part and the second clamping part.

[0009] The water spraying device moves closer to the clamping device under the drive of the moving platform in order to spray water onto the workpiece.

[0010] The drying device moves closer to the clamping device under the drive of the moving platform in order to dry the workpiece after the workpiece has been tumbled.

[0011] The X-ray crystal orientation detection device moves closer to the clamping device under the drive of the moving stage in order to locate the crystal orientation on the surface of the workpiece.

[0012] The FT-IR infrared spectrometer moves closer to the clamping device under the drive of the moving stage to measure the interstitial oxygen content of the workpiece.

[0013] The above technical solution integrates an FT-IR infrared spectrometer, a tumbling mill, a water spraying device, a drying device, and an X-ray crystal orientation detection device onto a moving platform. After the tumbling mill finishes grinding the crystal rod, the interstitial oxygen content of the crystal rod can be directly measured using the FT-IR infrared spectrometer mounted on the same moving platform. This eliminates the need to disassemble and transport the crystal rod, reducing the risks associated with disassembling and transporting it, simplifying the workflow, and integrating multiple devices onto a single machine. This reduces the transfer between multiple processes, allowing for direct execution of the next process after completing the previous one, resulting in higher integration and improved production efficiency.

[0014] Preferably, the mobile platform includes a second drive assembly, a second rotating assembly, and a support platform;

[0015] The second drive component and the second rotation component cooperate to drive the bearing platform to rotate and move closer to the clamping device.

[0016] The tumbling mill, water spraying device, and drying device are arranged sequentially on the same side of the support platform;

[0017] The X-ray crystal orientation detection device is set on the same side or behind the tumbling mill, water spraying device and drying device on the support platform;

[0018] The FT-IR infrared spectrometer is mounted on the back of the tumbling mill, water spraying device and drying device on the support platform;

[0019] The tumbling mill, water spraying device, drying device, X-ray crystal orientation detection device, and FT-IR infrared spectrometer, driven by the displacement of the second drive component and the rotation process of the second rotation component, respectively perform tumbling, water spraying, drying, crystal orientation detection, and interstitial oxygen content measurement on the workpiece on the clamping device.

[0020] Preferably, after the tumbling mill, water spraying device, drying device, and X-ray crystal orientation detection device have respectively performed tumbling, water spraying, drying, and crystal orientation detection on the workpiece, the second rotating component drives the support platform to rotate, rotating the FT-IR infrared spectrometer to the side facing the clamping device. Driven by the second driving component, the spectrometer approaches the clamping device and performs interstitial oxygen content detection on the workpiece.

[0021] Preferably, the surface of the FT-IR infrared spectrometer is provided with a waterproof cover.

[0022] Preferably, the second drive component is an XY-axis moving platform.

[0023] Preferably, the mobile platform includes a first mounting platform, a first driving device, a second mounting platform, and a second driving device;

[0024] The first mounting platform and the second mounting platform are respectively disposed on both sides of the clamping device;

[0025] The tumbling mill, water spraying device, and drying device are mounted on the first mounting platform, and the first driving device is used to drive the first mounting platform closer to the clamping device.

[0026] The X-ray crystal orientation detection device and the FT-IR infrared spectrometer are mounted on the second mounting platform, and the second driving device is used to drive the second mounting platform closer to the clamping device.

[0027] Preferably, the surface of the FT-IR infrared spectrometer is provided with a dust cover.

[0028] Preferably, both the first driving device and the second driving device are linear modules.

[0029] Preferably, the first drive component includes a hydraulic cylinder.

[0030] Preferably, the first rotating component includes a combination of a servo motor and a speed reducer.

[0031] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least:

[0032] 1. By setting up the FT-IR infrared spectrometer, tumbling mill, water spraying device, drying device and X-ray crystal orientation detection device on the same moving platform, after the tumbling mill finishes grinding the crystal rod, the FT-IR infrared spectrometer set on the same moving platform can directly measure the interstitial oxygen content of the crystal rod without disassembling and handling the crystal rod, reducing the risk of crystal rod disassembly and handling and simplifying the workflow.

[0033] 2. Integrating multiple devices onto a single machine reduces the transfer between multiple processes, allowing the next process to proceed directly after completing one process. This higher level of integration improves production efficiency. Attached Figure Description

[0034] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the overall structure in Embodiment 1 of this application;

[0036] Figure 2 This is a schematic diagram of the overall structure of the support platform after it has been rotated 180 degrees in Embodiment 1 of this application;

[0037] Figure 3 This is a schematic diagram of the overall structure in Embodiment 2 of this application.

[0038] Reference numerals: 1. Clamping device; 101. First clamping part; 102. Second clamping part; 103. First driving assembly; 104. First rotating assembly; 2. Moving stage; 201. Second driving assembly; 202. Second rotating assembly; 203. Support stage; 204. First mounting platform; 205. First driving device; 206. Second mounting platform; 207. Second driving device; 3. FT-IR infrared spectrometer; 4. Tumbler; 5. Water spray device; 6. Drying device; 7. X-ray crystal orientation detection device. Detailed Implementation

[0039] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0040] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0041] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0042] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0043] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0044] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0045] Example 1

[0046] like Figure 1 and Figure 2 As shown in the figure, this specification provides a semiconductor crystal rod tumbling machine, including a clamping device 1, a movable stage 2, an FT-IR infrared spectrometer 3 mounted on the movable stage 2, a tumbling machine 4, a water spraying device 5, a drying device 6, and an X-ray crystal orientation detection device 7.

[0047] The clamping device 1 includes a first clamping part 101, a second clamping part 102, a first driving assembly 103 for driving the first clamping part 101 and / or the second clamping part 102 to move, and a first rotating assembly 104 for driving the first clamping part 101 and / or the second clamping part 102 to rotate. The first clamping part 101 and the second clamping part 102 move closer to each other under the drive of the driving assembly to clamp the workpiece.

[0048] The first clamping part 101 and the second clamping part 102 are cylindrical platforms for clamping crystal rods, the first driving assembly 103 includes a hydraulic cylinder, and the first rotating assembly 104 includes a combination of a servo motor and a reducer.

[0049] More specifically, the clamping device 1 also includes an upper base and a lower base (not shown in the figure). The first drive assembly 103 includes two hydraulic cylinders, which are respectively installed at opposite ends of the upper and lower bases. The output shaft of the hydraulic cylinder located on the upper base is vertically downward, and the output shaft of the hydraulic cylinder located on the lower base is vertically upward. There are two sets of first rotating assemblies 104, which are respectively installed on the output shafts of the two hydraulic cylinders. The first clamping part 101 and the second clamping part 102 are respectively installed on the rotating output shafts of the two rotating assemblies. In actual use, the two hydraulic cylinders are used to drive the first clamping part 101 and the second clamping part 102 to move closer to each other in the vertical direction to clamp the crystal rod. The rotating assemblies are used to drive the first clamping part 101 and the second clamping part 102 to rotate, thereby driving the crystal rod to rotate, and then cooperating with the tumbling mill 4 to perform tumbling.

[0050] In some other embodiments, only one hydraulic cylinder may be provided to drive the first clamping part 101 or the second clamping part 102 to move in the vertical direction.

[0051] In some other embodiments, the first drive component 103 may also be a drive cylinder.

[0052] In some other embodiments, the first rotating component 104 may also be a combination of a stepper motor and a speed reducer.

[0053] It should be noted that the displacement and rotation directions of the first clamping part 101 and the second clamping part 102 are not limited to the vertical direction and can be adjusted according to actual needs. No further restrictions are imposed here.

[0054] The mobile platform 2 includes a second drive assembly 201, a second rotation assembly 202, and a support platform 203.

[0055] The tumbling mill 4, water spray device 5, drying device 6, and X-ray crystal orientation detection device 7 are sequentially arranged on the same side of the upper end of the support platform 203. The FT-IR infrared spectrometer 3 is arranged on the back side of the support platform 203 on the upper end of the tumbling mill 4, water spray device 5, drying device 6, and X-ray crystal orientation detection device 7.

[0056] In other instances, the X-ray crystal orientation detection device 7 may also be positioned on the upper end of the support stage 203 on the side opposite to the tumbling mill 4, the water spray device 5, and the drying device 6.

[0057] The second drive assembly 201 is an XY axis moving platform, wherein the X-axis direction is the distribution direction of the clamping device 1 and the moving platform 2, and the Y-axis direction is the horizontal direction perpendicular to the X-axis.

[0058] The second rotating component 202 is a rotary cylinder, mounted on the XY-axis moving platform, with its rotation output end set vertically. The support platform 203 is mounted on the rotation output end of the rotary cylinder, and can rotate vertically through the drive of the rotary cylinder. Furthermore, the rotary cylinder can achieve displacement in the X and Y axes through the adjustment of the XY-axis moving platform, thereby driving the support platform 203 and the roller mill 4, water spray device 5, drying device 6, X-ray crystal orientation detection device 7, and FT-IR infrared spectrometer 3 mounted on the support platform 203 to move in the X and Y axes.

[0059] In some other embodiments, the mobile platform 2 may also be a combination of an XYR three-axis displacement platform and a bearing platform 203.

[0060] Furthermore, the surface of the FT-IR infrared spectrometer 3 is also covered with a waterproof cover to reduce the water mist generated during the tumbling process from entering the interior of the FT-IR infrared spectrometer 3.

[0061] In actual use, the second drive assembly 201 and the second rotation assembly 202 cooperate to drive the support stage 203 to rotate and move closer to the clamping device 1, thereby enabling the tumbling mill 4, water spraying device 5, drying device 6, X-ray crystal orientation detection device 7, and FT-IR infrared spectrometer 3 on the support stage 203 to approach the clamping device 1 and perform processes. Specifically, the second rotation assembly 202 drives the support stage 203 to rotate to achieve process switching, including tumbling, water spraying, drying, crystal orientation detection, and interstitial oxygen content measurement.

[0062] The specific procedures are as follows:

[0063] S1, the crystal rod is loaded between the first clamping part 101 and the second clamping part 102 by a robotic arm or other clamping device. The first clamping part 101 and the second clamping part 102 clamp the crystal rod and automatically measure the length of the crystal rod according to the displacement of the first clamping part 101 and the second clamping part 102.

[0064] S2, the second drive component 201 drives the support platform 203 to move, so that the roller mill 4 moves along the X-axis and approaches the crystal rod.

[0065] S3, the water spraying device 5 is started, and water is sprayed onto the surface of the crystal rod through the adjustment of the second drive component 201 and the cooperation of the first rotating component 104.

[0066] S4, the grinding wheel assembly in the grinding machine 4, in cooperation with the first rotating component 104 and the second driving component 201, grinds the surface of the crystal rod.

[0067] S5, the X-ray crystal orientation detection device 7 approaches the crystal rod to find the crystal orientation on the surface of the crystal rod, and the notch groove is opened on the crystal rod by the rolling mill 4.

[0068] S6. After the tumbling process is completed, the surface of the crystal rod is dried by the drying device 6.

[0069] S7. After the crystal rod surface is dried, the second drive component 201 drives the support stage 203 away from the clamping device 1, and the second rotation component 202 drives the support stage 203 to rotate 180 degrees, so that the FT-IR infrared spectrometer 3 faces the clamping device 1.

[0070] S8, the second drive component 201 drives the support stage 203 to approach the clamping device 1, so that the FT-IR infrared spectrometer 3 approaches the crystal rod.

[0071] S9, open the waterproof cover and measure the interstitial oxygen content of the crystal rod. During the measurement, the first clamping part 101 and the second clamping part 102 drive the crystal rod to move and rotate under the action of the first driving component 103 and the first rotating component 104.

[0072] S10. After the interstitial oxygen content measurement is completed, close the waterproof cover and save the measurement data.

[0073] S11, the second drive component 201 and the second rotation component 202 drive the support platform 203 to reset.

[0074] S12, an alarm will be triggered after the process ends.

[0075] In practical use, by mounting the FT-IR infrared spectrometer 3, tumbling mill 4, water spray device 5, drying device 6, and X-ray crystal orientation detection device 7 together on the moving stage 2, after the tumbling mill 4 has finished tumbling the crystal rod, the FT-IR infrared spectrometer 3 mounted on the same moving stage 2 can directly measure the interstitial oxygen content of the crystal rod without disassembling or handling it, reducing the risk of disassembly and handling and simplifying the workflow. Furthermore, integrating multiple devices onto a single machine reduces transfers between processes, allowing for direct execution of the next process after completing one, resulting in higher integration and improved production efficiency.

[0076] Example 2

[0077] The difference from Example 1 is that, as Figure 3 As shown, the mobile platform 2 includes a first mounting platform 204, a first driving device 205, a second mounting platform 206, and a second driving device 207.

[0078] The first mounting platform 204 and the second mounting platform 206 are respectively disposed on both sides of the clamping device 1, and the first mounting platform 204, the clamping device 1 and the second mounting platform 206 are distributed sequentially along the X-axis direction.

[0079] The tumbling mill 4, the water spraying device 5, and the drying device 6 are located at the upper end of the first mounting platform 204. The first driving device 205 is a linear module, and the output end of the first driving device 205 moves along the X-axis. The first driving device 205 is used to drive the first mounting platform 204 closer to the clamping device 1, so that the tumbling mill 4, the water spraying device 5, and the drying device 6 are close to the clamping device 1.

[0080] In other embodiments, the first drive device 205 may also be a linear motor or a drive cylinder.

[0081] The X-ray crystal orientation detection device 7 and the FT-IR infrared spectrometer 3 are mounted on the upper end of the second mounting platform 206. The second driving device 207 is a linear module. The output end of the second driving device 207 moves along the Y-axis direction. The second driving device 207 is used to drive the X-ray crystal orientation detection device 7 and the FT-IR infrared spectrometer 3 on the second mounting platform 206 to move sequentially towards the clamping device 1 along the Y-axis direction.

[0082] In other embodiments, the second drive device 207 may also be a linear motor or a drive cylinder.

[0083] Furthermore, the FT-IR infrared spectrometer 3 is also covered with a dust cover.

[0084] In practical applications, after the tumbling mill 4, water spraying device 5, and drying device 6 have completed tumbling, water spraying, and drying of the workpiece respectively under the drive of the first drive device 205, the second drive device 207 drives the second mounting platform 206 to approach the clamping device 1 so that the X-ray crystal orientation detection device 7 and the FT-IR infrared spectrometer 3 can sequentially perform crystal orientation search and interstitial oxygen content detection on the workpiece.

[0085] The specific procedures are as follows:

[0086] S1, the crystal rod is loaded between the first clamping part 101 and the second clamping part 102 by a robotic arm or other clamping device. The first clamping part 101 and the second clamping part 102 clamp the crystal rod and automatically measure the length of the crystal rod according to the displacement of the first clamping part 101 and the second clamping part 102.

[0087] S2, the first driving device 205 drives the first mounting platform 204 to move, so that the grinding mill 4 gets closer to the crystal rod.

[0088] S3, water spray device 5 is activated to spray water onto the surface of the crystal rod.

[0089] S4, the grinding wheel assembly in the grinding mill 4, in cooperation with the first rotating assembly 104, the first driving assembly 103 and the first driving device 205, grinds the surface of the crystal rod.

[0090] S5, the second driving device 207 drives the second mounting platform 206 to move, so that the X-ray crystal orientation detection device 7 approaches the crystal rod. The X-ray crystal orientation detection device 7 searches the crystal orientation on the surface of the crystal rod and opens notch grooves on the crystal rod through the roller mill 4.

[0091] S6. After the tumbling process is completed, the surface of the crystal rod is dried by the drying device 6.

[0092] S7. After the surface of the crystal rod is dried, the second driving device 207 drives the second mounting platform 206 to move, so that the FT-IR infrared spectrometer 3 is close to the crystal rod.

[0093] S9, open the dust cover and measure the interstitial oxygen content of the crystal rod. During the measurement, the first clamping part 101 and the second clamping part 102 drive the crystal rod to move and rotate under the action of the first driving component 103 and the first rotating component 104.

[0094] S10. After the interstitial oxygen content measurement is completed, close the dust cover and save the measurement data.

[0095] S11, the first driving device 205 and the second driving device 207 respectively drive the first mounting platform 204 and the second mounting platform 206 to reset.

[0096] S12, an alarm will be triggered after the process ends.

[0097] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0098] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A rolling mill for semiconductor crystal rods, characterized in that, It includes a clamping device (1), a moving stage (2), an FT-IR infrared spectrometer (3) mounted on the moving stage (2), a tumbling mill (4), a water spraying device (5), a drying device (6), and an X-ray crystal orientation detection device (7); The clamping device (1) includes a first clamping part (101), a second clamping part (102), a first driving assembly (103) for displacing the first clamping part (101) and / or the second clamping part (102), and a first rotating assembly (104) for rotating the first clamping part (101) and / or the second clamping part (102). The first clamping part (101) and the second clamping part (102) move closer to each other under the drive of the driving assembly to clamp the workpiece. The mobile platform (2) includes a second drive assembly (201), a second rotation assembly (202), and a support platform (203). The second drive assembly (201) and the second rotation assembly (202) cooperate with each other to drive the support platform (203) to rotate and move closer to or away from the clamping device (1). The tumbling mill (4) moves toward the clamping device (1) under the drive of the moving platform (2) to tumble the workpieces clamped by the first clamping part (101) and the second clamping part (102). The water spraying device (5) moves closer to the clamping device (1) under the drive of the moving platform (2) to spray water onto the workpiece; The drying device (6) moves closer to the clamping device (1) under the drive of the moving platform (2) to dry the workpiece after the workpiece tumbling is completed. The X-ray crystal orientation detection device (7) moves closer to the clamping device (1) under the drive of the moving stage (2) to locate the crystal orientation on the surface of the workpiece. The FT-IR infrared spectrometer (3) is driven by the moving stage (2) to approach the clamping device (1) to measure the interstitial oxygen content of the workpiece. When the tumbling mill (4), water spraying device (5), drying device (6), and X-ray crystal orientation detection device (7) respectively perform tumbling, water spraying, drying, and crystal orientation search on the workpiece, the second rotating component (202) drives the support platform (203) to rotate, and rotates the FT-IR infrared spectrometer (3) to the side facing the clamping device (1). Driven by the second driving component (201), it approaches the clamping device (1) and performs interstitial oxygen content detection on the workpiece.

2. The semiconductor crystal rod grinding machine according to claim 1, characterized in that, The tumbling mill (4), water spraying device (5) and drying device (6) are arranged sequentially on the same side of the support platform (203); The X-ray crystal orientation detection device (7) is set on the same side or back of the roller mill (4), water spray device (5) and drying device (6) on the support stage (203); The FT-IR infrared spectrometer (3) is mounted on the back of the tumbling mill (4), the water spray device (5) and the drying device (6) on the support platform (203); The tumbling mill (4), water spraying device (5), drying device (6), X-ray crystal orientation detection device (7), and FT-IR infrared spectrometer (3) perform tumbling, water spraying, drying, crystal orientation finding, and interstitial oxygen content measurement on the workpiece on the clamping device (1) under the displacement drive of the second drive component (201) and the rotation process conversion of the second rotation component (202).

3. The semiconductor crystal rod grinding machine according to claim 2, wherein the surface of the FT-IR infrared spectrometer (3) is provided with a waterproof cover.

4. The semiconductor ingot rolling mill equipment according to claim 2, wherein the second drive component (201) is an XY axis moving platform.

5. The semiconductor crystal rod grinding machine according to claim 1, wherein the moving platform (2) comprises a first mounting platform (204), a first driving device (205), a second mounting platform (206) and a second driving device (207); The first mounting platform (204) and the second mounting platform (206) are respectively disposed on both sides of the clamping device (1); The tumbling mill (4), water spraying device (5) and drying device (6) are mounted on the first mounting platform (204), and the first driving device (205) is used to drive the first mounting platform (204) to approach the clamping device (1); The X-ray crystal orientation detection device (7) and the FT-IR infrared spectrometer (3) are mounted on the second mounting platform (206), and the second driving device (207) is used to drive the second mounting platform (206) to approach the clamping device (1).

6. The semiconductor crystal rod grinding machine according to claim 5, wherein the surface of the FT-IR infrared spectrometer (3) is provided with a dust cover.

7. The semiconductor crystal rod grinding machine according to claim 5, wherein the first driving device (205) and the second driving device (207) are both linear modules.

8. The semiconductor ingot rolling mill equipment according to claim 1, wherein the first drive component (103) includes a hydraulic cylinder.

9. The semiconductor ingot rolling mill equipment according to claim 1, wherein the first rotating component (104) comprises a combination of a servo motor and a speed reducer.

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