A scanning method of a laser direct writing system
By using the main subdivision and subsubdivision method to process vector images in the laser direct writing system, the exposure accuracy problem caused by the tilt angle deviation of digital micromirror devices is solved, realizing high-precision exposure without angle adjustment and simplifying operation.
CN116626995BActive Publication Date: 2026-06-09YUANZHUO MICROELECTRONICS TECH (SHANGHAI) CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- YUANZHUO MICROELECTRONICS TECH (SHANGHAI) CO LTD
- Filing Date
- 2022-07-06
- Publication Date
- 2026-06-09
AI Technical Summary
Technical Problem
In existing laser direct writing systems, the exposure accuracy is reduced due to the tilt angle deviation of the digital micromirror device, requiring a complex adjustment process to correct the angle.
Method used
Vector images are processed using a primary and secondary subdivision method. The primary and secondary subdivisions are determined by the control system based on the subdivision values of the laser direct writing system. Basic pixel units are then divided and rasterized, stretched, and framed, avoiding direct adjustment of the tilt angle of the graphics generator.
Benefits of technology
It eliminates the need for complex adjustments to the image generator angle, improving exposure accuracy and resolution, and simplifying the operation process.
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Smart Images
Figure CN116626995B_ABST
Abstract
A scanning method of a laser direct writing system, a control system of the laser direct writing system controls a pattern generator to project an image, when a value of a subdivision number of the laser direct writing system is not an integer value, the control system determines a main subdivision number and a secondary subdivision number of the laser direct writing system according to the value of the subdivision number, divides main subdivision number basic pixel units according to the main subdivision number, divides secondary subdivision number basic pixel units according to the secondary subdivision number, and determines a repeating unit containing the main subdivision number basic pixel units and the secondary subdivision number basic pixel units, and performs rasterization operation on a vector image to be operated; performs main subdivision number processing on the pixel units rasterized by the secondary subdivision number to obtain main subdivision number rasterization image data; and performs stretching and framing processing on the main subdivision number rasterization image data. When the value of the subdivision number is a non-integer value, the vector image is processed by using the main subdivision number and the secondary subdivision number, and there is no need to adjust the angle of the pattern generator complicatedly.
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