An ion implantation device for processing optoelectronic components

Abstract

The application discloses an ion implantation device for photoelectric element processing, which comprises a vacuum box, a sealing cover and a working turntable, an installation opening is formed in the top inner wall of the working turntable, equidistantly distributed extrusion holes are formed in the inner wall of the installation opening, equidistantly distributed fixing sheets are fixedly arranged on the inner wall of the working turntable, equidistantly distributed extrusion springs are fixedly arranged on the outer wall of one side of the fixing sheets, extrusion balls are fixedly arranged at one end of the extrusion springs, the extrusion balls are located on the inner wall of the extrusion holes, and the inner diameter of the extrusion holes is smaller than the inner diameter of the extrusion balls. The extrusion holes are formed in the inner wall of the installation opening, the inner wall of the extrusion holes is provided with the extrusion balls, the photoelectric element is pressed into the inner wall of the working turntable by the extrusion balls, the extrusion springs arranged on the inner wall of the working turntable pressurize the extrusion balls, and thus the extrusion balls extrude the photoelectric element, so that the photoelectric element is conveniently installed on the inner wall of the installation opening and is conveniently installed.

Description

Technical Field

[0001] This invention relates to the field of optoelectronic components, and more specifically to an ion implantation device for processing optoelectronic components. Background Technology

[0002] When an ion beam strikes a solid material, it is resisted by the solid material and its speed gradually decreases until it eventually remains in the solid material. This phenomenon is called ion implantation.

[0003] The basic principle is as follows: an ion beam with energy on the order of 100 keV is incident on the material. The ion beam undergoes a series of physical and chemical interactions with the atoms or molecules in the material. The incident ions gradually lose energy and eventually remain in the material, causing changes in the material's surface composition, structure, and properties. This optimizes the material's surface properties or acquires certain new and superior properties. The injected gas is ionized into a positively charged ion beam. After the ion beam is filtered using a magnetic field, the desired implanted ions are obtained and then accelerated to impact the implantation surface, achieving the purpose of ion implantation. Due to its unique and outstanding advantages, this high-tech method has been widely used in the doping of semiconductor materials and the surface modification of metals, ceramics, and polymers, achieving significant economic and social benefits.

[0004] In the process of processing optoelectronic components, ion implantation is required. However, most existing ion implantation devices are fixed. During the ion implantation process, the ion implantation is always performed on a single point of the electrical component, which can easily lead to uneven ion implantation. Furthermore, the tilt angle of the optoelectronic component cannot be adjusted, making it difficult to adjust the ion implantation depth and making it inconvenient to fix the optoelectronic component. Summary of the Invention

[0005] The purpose of this invention is to provide an ion implantation device for processing optoelectronic components, in order to solve the problem that in the process of processing optoelectronic components, ion implantation is required. However, most existing ion implantation devices are fixed, and the ion implantation of optoelectronic components is always at a single point on the electrical component during the process of ion implantation. This can easily lead to uneven ion implantation and the inability to adjust the tilt angle of the optoelectronic components, making it difficult to adjust the depth of ion implantation and making it inconvenient to fix the optoelectronic components.

[0006] To achieve the above objectives, the present invention provides the following technical solution: an ion implantation device for processing optoelectronic components, comprising a vacuum chamber, a sealing cover, and a working turntable. The sealing cover is disposed on the top of the vacuum chamber, and the working turntable is located inside the vacuum chamber. An installation opening is provided on the inner wall of the top of the working turntable, and extrusion holes are evenly distributed on the inner wall of the installation opening. Evenly distributed fixing plates are fixedly disposed on the inner wall of the working turntable, and evenly distributed extrusion springs are fixedly disposed on the outer wall of one side of each fixing plate. An extrusion ball is fixedly disposed at one end of each extrusion spring, and the extrusion ball is located on the inner wall of the extrusion hole. The inner diameter of the extrusion hole is smaller than the inner diameter of the extrusion ball. An annular guide rail is fixedly disposed on one side of the bottom of the working turntable. The inner wall of the vacuum chamber is slidably connected to a guide ball. A support plate is fixedly installed on the bottom inner wall of the vacuum chamber. A push rod motor is fixedly installed on one side of the top of the support plate. The output shaft of the push rod motor is fixedly connected to the bottom outer wall of the guide ball through a coupling. A steering connecting ball is fixedly installed at the bottom center of the working turntable through a bracket. The side wall of the steering connecting ball has equally spaced arc-shaped limiting slide rails. A motor is fixedly installed on the bottom inner wall of the vacuum chamber. One end of the output shaft of the motor is fixedly installed with equally spaced arc-shaped claws through a coupling. A transmission ball is slidably connected to the inner wall of the arc-shaped claws. A slide rail is fixedly installed at the bottom center of the sealing cover. A horizontally moving ion nozzle is slidably connected to the bottom outer wall of the slide rail.

[0007] Preferably, the arc-shaped claw is sleeved on the outer wall of the steering connecting ball, and the transmission ball is slidably connected on the outer wall of the arc-shaped limiting slide rail. The output shaft of the push rod motor extends and retracts, moving upward or downward to drive the guide ball to move. The guide ball causes one side of the working turntable to tilt downward or downward. When the working turntable tilts, it causes the photoelectric components installed in the mounting port to tilt. When the working turntable tilts, the steering connecting ball begins to rotate. The steering connecting ball tilts on the inner wall of the arc-shaped claw, and the output shaft of the motor drives the arc-shaped claw to rotate. The transmission ball on the inner wall of the arc-shaped claw cooperates with the arc-shaped limiting slide rail on the outer wall of the steering connecting ball. The arc-shaped claw drives the steering connecting ball to rotate. After the steering connecting ball rotates, it can drive the working turntable to rotate. The working turntable can drive the tilted photoelectric components to rotate.

[0008] Preferably, the top outer wall of the vacuum chamber has a sealing groove, and the bottom outer wall of the sealing cover is fixedly provided with a sealing strip. The inner wall of the sealing groove and the outer wall of the sealing strip are interference-fitted. The sealing strip at the bottom of the sealing cover is pressed into the sealing groove at the top of the vacuum chamber, so that the inside of the vacuum chamber is sealed. The sealing strip being pressed into the inner wall of the sealing groove helps to improve the sealing effect of the present invention.

[0009] Preferably, the top end of the sealing cover has an air extraction port, and the top end of the sealing cover is fixedly provided with a vacuum tube connector, which is connected to a vacuum pump to extract the air from the vacuum chamber and make the vacuum chamber a vacuum.

[0010] Preferably, the top end of the sealing cover has an exhaust hole, and an exhaust piston is fixedly provided on the inner wall of the exhaust hole, which facilitates the balancing of the gas in the vacuum chamber with the outside gas.

[0011] Preferably, a barometer is fixedly provided at one end of the top of the sealing cover, so that the air pressure inside the sealing cover can be easily obtained through the barometer.

[0012] Preferably, the inner wall of the mounting port is equipped with a compatible photoelectric component body, which absorbs ions emitted by the ion nozzle.

[0013] Preferably, the ion nozzle, the motor, and the push rod motor are connected to a power switch via wires, and the power switch is connected to a power cord.

[0014] The technical effects and advantages provided by the present invention in the above technical solution are as follows:

[0015] The photoelectric component is installed on the inner wall of the mounting port through a compression hole. The inner wall of the compression hole is equipped with a compression ball. The photoelectric component is pressed into the inner wall of the working turntable by the compression spring on the inner wall of the working turntable. The compression ball is then compressed by the compression ball, so that the photoelectric component can be installed on the inner wall of the mounting port, which is convenient for installation.

[0016] The output shaft of the push rod motor extends and retracts, moving upwards or downwards to drive the guide ball. The guide ball causes one side of the working turntable to tilt downwards or downwards. When the working turntable tilts, it causes the photoelectric components installed in the mounting port to tilt as well. When the working turntable tilts, the steering connecting ball begins to rotate. The steering connecting ball tilts on the inner wall of the arc-shaped claw plate, and the output shaft of the motor drives the arc-shaped claw plate to rotate. The transmission ball on the inner wall of the arc-shaped claw plate cooperates with the arc-shaped limit slide rail on the outer wall of the steering connecting ball. The arc-shaped claw plate drives the steering connecting ball to rotate, and the rotating connecting ball can drive the working turntable to rotate. The working turntable can drive the tilted photoelectric components to rotate. At this time, ions are injected into the surface of the photoelectric components through the ion nozzle, which not only makes the injected ions uniform but also controls the depth of ion injection. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 2 This is a schematic diagram of the cross-sectional structure of the vacuum chamber of the present invention;

[0020] Figure 3 This is a schematic diagram of the three-dimensional structure of the sealing cap of the present invention;

[0021] Figure 4 This is a schematic diagram of the three-dimensional structure of the working turntable of the present invention;

[0022] Figure 5 This is a schematic diagram of the cross-sectional structure of the working turntable of the present invention;

[0023] Figure 6 This is a schematic diagram of the cross-sectional structure of the working turntable of the present invention;

[0024] Figure 7 This is a three-dimensional structural diagram of the electric motor of the present invention;

[0025] Figure 8 This is a schematic diagram of the three-dimensional structure of the steering connection ball of the present invention.

[0026] Explanation of reference numerals in the attached figures:

[0027] 1. Vacuum chamber, 2. Sealing cover, 3. Sealing groove, 4. Sealing strip, 5. Slide rail, 6. Ion nozzle, 7. Air extraction port, 8. Vacuum tube connector, 9. Exhaust hole, 10. Exhaust piston, 11. Barometer, 12. Support plate, 13. Motor, 14. Working turntable, 15. Mounting port, 16. Extrusion hole, 17. Fixing plate, 18. Extrusion spring, 19. Extrusion ball, 20. Circular guide rail, 21. Guide ball, 22. Push rod motor, 24. Steering connecting ball, 25. Arc-shaped limit slide rail, 26. Arc-shaped claw, 27. Transmission ball, 28. Main body of optoelectronic components. Detailed Implementation

[0028] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0029] Example 1

[0030] Refer to the instruction manual appendix Figure 1-8An ion implantation apparatus for processing optoelectronic components includes a vacuum chamber 1, a sealing cover 2, and a working turntable 14. The sealing cover 2 is located on the top of the vacuum chamber 1, and the working turntable 14 is located inside the vacuum chamber 1. An installation port 15 is provided on the inner wall of the top of the working turntable 14. Equally spaced extrusion holes 16 are provided on the inner wall of the installation port 15. Equally spaced fixing plates 17 are fixed to the inner wall of the working turntable 14. Equally spaced compression springs 18 are fixed to one outer wall of one side of each fixing plate 17. An extrusion ball 19 is fixed to one end of each compression spring 18 and is located on the inner wall of the extrusion holes 16. The inner diameter of the working turntable 14 is smaller than the inner diameter of the extrusion ball 19. A ring-shaped guide rail 20 is fixedly installed on one side of the bottom of the working turntable 14. A guide ball 21 is slidably connected to the inner wall of the ring-shaped guide rail 20. A support plate 12 is fixedly installed on the inner wall of the bottom of the vacuum chamber 1. A push rod motor 22 is fixedly installed on one side of the top of the support plate 12. The output shaft of the push rod motor 22 is fixedly connected to the outer wall of the bottom of the guide ball 21 via a coupling. A steering connecting ball 24 is fixedly installed at the center of the bottom of the working turntable 14 via a bracket. Arc-shaped limiting slide rails 25 are evenly distributed on the side wall of the steering connecting ball 24. An electric... The top end of the output shaft of the motor 13 is fixed with equally spaced arc-shaped claw plates 26 via a coupling. Transmission balls 27 are slidably connected to the inner wall of the arc-shaped claw plates 26. The arc-shaped claw plates 26 are sleeved on the outer wall of the steering connecting ball 24. The transmission balls 27 are slidably connected to the outer wall of the arc-shaped limiting slide rail 25. The output shaft of the push rod motor 22 extends and retracts, moving upwards or downwards, causing the guide ball 21 to move. The guide ball 21 causes one side of the working turntable 14 to tilt downwards or downwards. When the working turntable 14 tilts, it causes the photoelectric components installed in the mounting port 15 to tilt. The steering connecting ball 24 starts to rotate. The steering connecting ball 24 is inclined on the inner wall of the arc-shaped claw plate 26. The output shaft of the motor 13 drives the arc-shaped claw plate 26 to rotate. The transmission ball 27 provided on the inner wall of the arc-shaped claw plate 26 cooperates with the arc-shaped limiting slide rail 25 on the outer wall of the steering connecting ball 24. The arc-shaped claw plate 26 drives the steering connecting ball 24 to rotate. After the steering connecting ball 24 rotates, it can drive the working turntable 14 to rotate. The working turntable 14 can drive the inclined photoelectric components to rotate. The bottom center of the sealing cover 2 is fixedly provided with a slide rail 5. The bottom outer wall of the slide rail 5 is slidably connected to a horizontally moving ion nozzle 6.

[0031] Example 2

[0032] Refer to the instruction manual appendix Figure 1-8Based on Embodiment 1, a sealing groove 3 is provided on the top outer wall of the vacuum chamber 1, and a sealing strip 4 is fixedly provided on the bottom outer wall of the sealing cover 2. The inner wall of the sealing groove 3 and the outer wall of the sealing strip 4 are interference-fitted. The sealing strip 4 provided at the bottom of the sealing cover 2 is pressed into the sealing groove 3 provided on the top of the vacuum chamber 1, so that the interior of the vacuum chamber 1 is sealed. The sealing strip 4 is pressed into the inner wall of the sealing groove 3, which helps to improve the sealing effect of the present invention.

[0033] Example 3

[0034] Refer to the instruction manual appendix Figure 1-8 Based on Embodiment 1, the top end of the sealing cover 2 has an air extraction port 7, and the top end of the sealing cover 2 is fixedly provided with a vacuum tube connector 8, which is connected to a vacuum pump to extract the air from the vacuum chamber 1 and make the vacuum chamber 1 a vacuum. The top end of the sealing cover 2 has an exhaust port 9, and the inner wall of the exhaust port 9 is fixedly provided with an exhaust piston 10, which facilitates the balance between the gas in the vacuum chamber 1 and the outside gas. The top end of the sealing cover 2 is fixedly provided with a barometer 11, which facilitates the understanding of the gas pressure inside the sealing cover 2.

[0035] Example 4

[0036] Refer to the instruction manual appendix Figure 1-8 Based on Embodiment 1, the inner wall of the mounting port 15 is equipped with a compatible photoelectric component body 28, which absorbs ions emitted by the ion nozzle 6. The ion nozzle 6, the motor 13 and the push rod motor 22 are connected to a power switch via wires, and the power switch is connected to a power cord.

[0037] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

[0038] Working principle of this invention:

[0039] Refer to the instruction manual appendix Figure 1-8In use, first open the sealing cover 2 on the top of the vacuum chamber 1, press the optoelectronic component into the inner wall of the mounting port 15, and press it through the extrusion hole 16 on the inner wall of the mounting port 15. The inner wall of the extrusion hole 16 is equipped with an extrusion ball 19. The optoelectronic component presses the extrusion ball 19 into the inner wall of the working turntable 14. The extrusion spring 18 on the inner wall of the working turntable 14 presses the extrusion ball 19, thereby extruding the optoelectronic component into the inner wall of the mounting port 15. After the optoelectronic component is installed, put the sealing cover 2 on the top of the vacuum chamber 1, and press the sealing strip 4 at the bottom of the sealing cover 2 into the top of the vacuum chamber 1. The sealing groove 3 is provided to seal the interior of the vacuum chamber 1. The sealing strip 4 is pressed into the inner wall of the sealing groove 3, which helps to improve the sealing effect of the present invention. Then, a vacuum pump is connected to the vacuum tube connector 8 provided at the top of the air extraction port 7. The vacuum pump extracts the air from the vacuum chamber 1. After the vacuum chamber 1 is evacuated, the remaining air in the vacuum chamber 1 can be easily observed by observing the barometer 11 provided at the top of the sealing cover 2. After the vacuum chamber 1 is evacuated, the output shaft of the push rod motor 22 moves upward or downward, driving the guide ball 21 to move. The guide ball 21 causes one side of the working turntable 14 to tilt downward or downward. When the disk 14 tilts, it causes the photoelectric components installed in the mounting port 15 to tilt as well. When the working disk 14 tilts, the steering connecting ball 24 begins to rotate. The steering connecting ball 24 tilts on the inner wall of the arc-shaped claw plate 26, and the output shaft of the motor 13 drives the arc-shaped claw plate 26 to rotate. The transmission balls 27 on the inner wall of the arc-shaped claw plate 26 cooperate with the arc-shaped limiting slide rail 25 on the outer wall of the steering connecting ball 24, causing the arc-shaped claw plate 26 to drive the steering connecting ball 24 to rotate. The rotation of the steering connecting ball 24 then drives the working disk 14 to rotate, which in turn drives the tilted photoelectric components to rotate. At this time, ions are ejected through the ion nozzle 6 and implanted into the photoelectric components. The surface of the component not only ensures uniform ion implantation but also allows control over the ion implantation depth. Ion implantation on the surface of the optoelectronic component improves its performance. The ion nozzle 6 located on the inner wall of the bottom of the sealing cover 2 is closed. At this time, the output shaft of the motor 13 stops rotating, and the output shaft of the push rod motor 22 is returned to its original position. Gas is introduced into the vacuum chamber 1 through the exhaust hole 9 located on the top of the sealing cover 2 and the exhaust piston 10 located inside the exhaust hole 9. After the gas pressure inside the vacuum chamber 1 is balanced with the external gas pressure, the sealing cover 2 located on the top of the vacuum chamber 1 is removed, and then the optoelectronic component with ion implantation on its surface is removed from the inner wall of the mounting port 15.

[0040] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

[0041] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of the invention and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of the invention should be included within the protection scope of the invention. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

Claims

1. An ion implantation apparatus for processing optoelectronic components, comprising a vacuum chamber (1), a sealing cover (2), and a working turntable (14), wherein the sealing cover (2) is disposed on the top of the vacuum chamber (1), and the working turntable (14) is located inside the vacuum chamber (1), characterized in that: The top inner wall of the working turntable (14) is provided with an installation port (15), and the inner wall of the installation port (15) is provided with equally spaced extrusion holes (16). The inner wall of the working turntable (14) is fixed with equally spaced fixing plates (17). One side outer wall of the fixing plate (17) is fixed with equally spaced extrusion springs (18). One end of the extrusion springs (18) is fixed with an extrusion ball (19). The extrusion ball (19) is located on the inner wall of the extrusion hole (16). The inner diameter of the extrusion hole (16) is smaller than the inner diameter of the extrusion ball (19). One side of the bottom of the working turntable (14) is fixed with an annular guide rail (20). The inner wall of the annular guide rail (20) is slidably connected with a guide ball (21). The bottom inner wall of the vacuum box (1) is fixed with a support plate (12). A push rod motor (22) is fixedly installed on one side of the top of the plate (12). The output shaft of the push rod motor (22) is fixedly connected to the bottom outer wall of the guide ball (21) through a coupling. A steering connecting ball (24) is fixedly installed at the bottom center of the working turntable (14) through a bracket. The side wall of the steering connecting ball (24) has arc-shaped limiting slide rails (25) distributed at equal distances. A motor (13) is fixedly installed on the bottom inner wall of the vacuum box (1). One end of the output shaft of the motor (13) is fixedly installed with arc-shaped claws (26) distributed at equal distances through a coupling. The inner wall of the arc-shaped claws (26) is slidably connected with transmission balls (27). A slide rail (5) is fixedly installed at the bottom center of the sealing cover (2). A horizontally moving ion nozzle (6) is slidably connected to the bottom outer wall of the slide rail (5).

2. The ion implantation device for processing optoelectronic components according to claim 1, characterized in that: The arc-shaped claw (26) is sleeved on the outer wall of the steering connecting ball (24), and the transmission ball (27) is slidably connected on the outer wall of the arc-shaped limiting slide rail (25).

3. The ion implantation device for processing optoelectronic components according to claim 1, characterized in that: The top outer wall of the vacuum box (1) has a sealing groove (3), and the bottom outer wall of the sealing cover (2) is fixedly provided with a sealing strip (4). The inner wall of the sealing groove (3) and the outer wall of the sealing strip (4) are interference fit.

4. The ion implantation apparatus for processing optoelectronic components according to claim 1, characterized in that: The top end of the sealing cover (2) has an air extraction port (7), and the top end of the sealing cover (2) is fixedly provided with a vacuum tube connector (8).

5. The ion implantation apparatus for processing optoelectronic components according to claim 1, characterized in that: The top end of the sealing cover (2) has an exhaust hole (9), and an exhaust piston (10) is fixedly provided on the inner wall of the exhaust hole (9).

6. The ion implantation apparatus for processing optoelectronic components according to claim 1, characterized in that: A barometer (11) is fixedly installed at one end of the top of the sealing cover (2).

7. The ion implantation apparatus for processing optoelectronic components according to claim 1, characterized in that: The inner wall of the mounting port (15) is equipped with a compatible optoelectronic component body (28).

8. The ion implantation apparatus for processing optoelectronic components according to claim 1, characterized in that: The ion nozzle (6), the motor (13) and the push rod motor (22) are connected to a power switch via wires, and the power switch is connected to a power cord.

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