A photoelectric detector laser damage testing device and method

Abstract

A kind of testing device of photoelectric detector laser damage, comprising: laser, half-wave plate, 56 degree polaroid, 45 degree beam splitter, power meter, shutter, high-transmission high-reflection mirror, collimating light source, beam expander system, lens, 45 degree beam splitter, first light filter attenuation component, beam quality analyzer, mirror, sample control console where measured photoelectric detector is placed, first photoelectric detector, second light filter attenuation component, first beam splitter, beam splitter prism, photothermal detector, position-sensitive detector, imaging system, second beam splitter, probe light source, third light filter attenuation component, second photoelectric detector, oscilloscope and terminal control system;When using the present application, the laser damage test of photoelectric detector sensing / sensing part can be realized without disassembly, while adopting the fusion of double photoelectric detector, photothermal detector, position-sensitive detector and online imaging system, complementary advantages, realize the high-precision detection and measurement of detector damage signal.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photoelectric detection device laser damage testing, and particularly relates to a high-precision positioning and online real-time monitoring photoelectric detector laser damage measuring device and method. BACKGROUND

[0002] With the continuous development of photoelectric imaging, photoelectric sensing and other detectors, due to the high sensitivity, small size and other characteristics, the photoelectric detector has been widely used in the photoelectric detection field. At present, the photoelectric detector plays an important role in the field of military strategic defense and civil detection. Since the photoelectric detector has high sensitivity, it is in the focusing position of laser irradiation in the optical system, and is easy to be disturbed or damaged, so the laser damage of the photoelectric detector is an important research topic in the field of laser and matter interaction.

[0003] Therefore, it is necessary to study the interaction process, damage process, rules and mechanism of laser and photoelectric detector, so as to meet the needs of laser protection, anti-interference and laser countermeasure, and has important academic value and application value.

[0004] However, since the photosensitive / sensing part of the photoelectric detector is built-in in the device, it is affected by the shielding of the device shell and other components, and the detector has to be disassembled, so that the monitoring of the device electrical signal and other parameters cannot be compatible. At the same time, since the individual element size of the detector is small, the damage online imaging system cannot accurately determine whether the detector is damaged, and cannot accurately locate the damage position, and the measurement accuracy is low, and only offline detection can be used. Therefore, it is necessary to establish a high-precision positioning and online real-time monitoring system for studying the laser damage of the photoelectric detector. SUMMARY

[0005] The present application relates to the field of photoelectric detection device laser damage testing, and particularly relates to a high-precision positioning and online real-time monitoring photoelectric detector laser damage measuring device and method.

[0006] The present application relates to the field of photoelectric detection device laser damage testing, and particularly relates to a high-precision positioning and online real-time monitoring photoelectric detector laser damage measuring device and method.

[0007] The application relates to a testing device for laser damage of a photoelectric detector, which is characterized by comprising a laser, a half-wave plate, a 56-degree polarizer, a 45-degree beam splitter, a power meter, a shutter, a high-transmittance high-reflectance mirror, a collimating light source, a beam expander system, a lens, a 45-degree beam splitter, a first light-filtering attenuation assembly, a beam quality analyzer, a mirror, a sample control table for placing the photoelectric detector to be measured, a first photoelectric detector, a second light-filtering attenuation assembly, a first beam splitter, a beam-splitting prism, a photo-thermal detector, a position-sensitive detector, an imaging system, a second beam splitter, a detection light source, a third light-filtering attenuation assembly, a second photoelectric detector, an oscilloscope and a terminal control system.

[0008] The laser beam emitted by the laser passes through the half-wave plate, the 56-degree polarizer, the 45-degree beam splitter, the shutter, the high-transmittance high-reflectance mirror, the beam expander system, the lens and the 45-degree beam splitter in sequence and is divided into two parts, one part is reflected by the mirror and irradiated onto the surface of the photoelectric detector to be measured, and the other part passes through the first light-filtering attenuation assembly and is received by the beam quality analyzer.

[0009] The collimating light source passes through the high-transmittance high-reflectance mirror, the beam expander system, the lens, the 45-degree beam splitter and the mirror in sequence and irradiates onto the surface of the photoelectric detector to be measured.

[0010] The detection light beam emitted by the detection light source passes through the second beam splitter and is divided into a first transmitted light beam and a first reflected light beam, the first transmitted light beam is obliquely incident onto the surface of the photoelectric detector to be measured, is reflected by the photoelectric detector to be measured, passes through the first beam splitter and is divided into a second transmitted light beam and a second reflected light beam, the second reflected light beam passes through the second light-filtering attenuation assembly and is received by the first photoelectric detector, the second transmitted light beam passes through the beam-splitting prism and is divided into a third transmitted light beam and a third reflected light beam, and the third transmitted light beam and the third reflected light beam are received by the photo-thermal detector and the position-sensitive detector respectively, and the first reflected light beam passes through the third light-filtering attenuation assembly and is received by the second photoelectric detector.

[0011] The laser beam emitted by the laser, the collimating light beam emitted by the collimating light source and the detection light beam emitted by the detection light source are focused and overlapped on the to-be-measured part of the photoelectric detector to be measured.

[0012] The first photoelectric detector and the second photoelectric detector are connected with the oscilloscope respectively.

[0013] The laser, the power meter, the shutter, the beam quality analyzer, the sample control table, the photo-thermal detector, the position-sensitive detector, the imaging system and the detection light source are connected with the terminal control system respectively.

[0014] Further, the second photoelectric detector and the first photoelectric detector are respectively used for measuring the waveform change before and after the detection light source irradiates the photoelectric detector to be measured.

[0015] Further, the photothermal detector and the position-sensitive detector are used for measuring the photothermal signal and the position change information before and after the laser irradiation of the measured photodetector.

[0016] Further, an independent probe light source is used to irradiate the measured photodetector, and the double photodetector, the photothermal detector and the position-sensitive detector are coupled.

[0017] Further, the transmission and reflection ratios of the first and second beam splitters are both 9:1.

[0018] Further, the sample control console has the function of adjusting the positions in x, y and z directions.

[0019] The high-transmission and high-reflection mirror has high transmission to the light beam output by the laser and high reflection to the collimated light beam output by the collimated light source.

[0020] Further, the distance from the beam quality analyzer to the 45-degree beam splitter is equal to the distance from the test surface of the measured photodetector to the 45-degree beam splitter, so as to ensure that the spot size measured by the beam quality analyzer is the spot size irradiated on the surface of the measured photodetector.

[0021] Compared with the prior art, the present application has the beneficial effects that the laser damage test of the sensing / photoreceptive part of the photodetector is realized without disassembly, and the double photodetector, the photothermal detector, the position-sensitive detector and the online imaging system are fused, the advantages are complementary, and the high-precision detection and measurement of the damage signal of the photodetector are realized. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 FIG. 1 is a schematic diagram of the overall structure of the photodetector laser damage test device according to the present application. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application are clearly described in combination with the drawings. The described embodiments are only a part of the present application, not all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work are within the protection scope of the present application.

[0024] The embodiments of the present application are further described in detail below in combination with the drawings, such as Figure 1The device mainly comprises a laser 1, a half-wave plate 2, a 56-degree polarizer 3, a 45-degree beam splitter 4, a power meter 5, a shutter 6, a high-transmission high-reflection mirror 7, a collimating light source 8, a beam expander system 9, a lens 10, a 45-degree beam splitter 11, a light filtering and attenuating assembly 12, a beam quality analyzer 13, a reflecting mirror 14, a measured photodetector 15, a sample control console 16, a photodetector 17, a light filtering and attenuating assembly 18, a beam splitter 19, a beam splitting prism 20, a photothermal detector 21, a position-sensitive detector 22, an imaging system 23, a beam splitter 24, a probe light source 25, a light filtering and attenuating assembly 26, a photodetector 27, an oscilloscope 28 and a terminal control system 29, wherein:

[0025] The laser emitted by the laser 1 passes through the half-wave plate 2, the 56-degree polarizer 3, the 45-degree beam splitter 4, the shutter 6, the high-transmission high-reflection mirror 7, the beam expander system 9, the lens 10, the 45-degree beam splitter 11 and the reflecting mirror 14 and is irradiated onto the surface of the measured photodetector 15.

[0026] The collimating light source 8 passes through the high-transmission high-reflection mirror 7, the beam expander system 9, the lens 10, the 45-degree beam splitter 11 and the reflecting mirror 14 and is irradiated onto the measured photodetector 15, which is used for determining the position of laser irradiation onto the measured photodetector 15; the high-transmission high-reflection mirror 7 has high transmission for the light beam output by the laser 1 and high reflection for the light beam output by the collimating light source 8.

[0027] The laser passing through the lens 10 is split by the 45-degree beam splitter 11, and part of the light enters the light filtering and attenuating assembly 12 and the beam quality analyzer 13 in sequence, which is used for monitoring the spot morphology and size of the light irradiated onto the surface of the measured photodetector 15; the beam quality analyzer 13 is placed at the same position as the measured photodetector 15, so as to ensure that the spot size measured by the beam quality analyzer 13 is the spot size irradiated onto the surface of the measured photodetector 15.

[0028] The laser emitted by the probe light source 25 passes through the beam splitter 24 and is obliquely incident onto the surface of the measured photodetector 15, and then is reflected into the beam splitter 19 and the beam splitting prism 20 and finally into the photothermal detector 21; the photothermal detector 21 is mainly used for determining the change of the photothermal signal before and after the laser irradiation of the measured photodetector 15.

[0029] Part of the light reflected by the beam splitter 19 enters the light filtering and attenuating assembly 18 and then enters the photodetector 17; the transmission and reflection ratio of the beam splitter 19 is 9:1.

[0030] Part of the light reflected by the beam splitter 24 enters the light filtering and attenuating assembly 26 and then enters the photodetector 27; the transmission and reflection ratio of the beam splitter 24 is 9:1.

[0031] The photoelectric detector 17 and the photoelectric detector 27 are mainly used to compare the waveform changes before and after the laser irradiation on the measured photoelectric detector 15, and the oscilloscope 28 is used to display the waveform.

[0032] The part of light reflected by the light splitting prism 20 enters the position sensitive detector 22, and the transmission and reflection ratio of the light splitting prism is 5:5. The position sensitive detector 22 is mainly used to detect the position changes before and after the laser irradiation on the measured photoelectric detector 15.

[0033] The measured photoelectric detector 15 is placed on the sample control console 16. The sample control console 15 has the functions of adjusting the positions in x, y and z directions.

[0034] The photoelectric detector 17 and the photoelectric detector 27 are connected to the oscilloscope.

[0035] The laser energy output by the laser 1 is adjusted by the combination of the half-wave plate 2 and the 56-degree polarizer 3, and the angle of the half-wave plate 2 is rotated to achieve the adjustment.

[0036] The light beams output by the laser 1 and the collimated laser 8 are coupled via the high-transmission high-reflection mirror 7 and transmitted in a coaxial manner to realize the determination of the position of the light beam output by the laser 1 after being focused by the lens 10 and irradiated on the surface of the measured photoelectric detector 15 through the collimated light source.

[0037] The laser 1, the power meter 5, the shutter 6, the beam quality analyzer 13, the sample control console 16, the pyroelectric detector 21, the position sensitive detector 22, the imaging system 23 and the probe light source 25 are connected to the terminal control system 29, which is used to control and display, record and store all data and results in real time.

[0038] In the specific implementation, first, the collimated light source 8 is turned on, the position irradiated on the measured photoelectric detector 15 is selected, the position of the probe light source 25 is adjusted, and the position of the laser transmitted via the light splitting mirror 24 and irradiated on the surface of the measured photoelectric detector 15 is ensured to coincide with the position irradiated on the measured photoelectric detector 15 by the collimated light source 8. At the same time, it is ensured that the reflected light can be measured by the photoelectric detector 17 after being transmitted via the light splitting mirror 19 and the light filtering and attenuation assembly 18. The light beam after being transmitted via the light splitting prism 20 can be detected by the pyroelectric detector 21 and the position sensitive detector 22.

[0039] The collimated light source 8 is turned off, and the signal calibration step is performed. The signals of the photoelectric detector 27 and the photoelectric detector 17 are collected, the signal difference after being reflected by the measured photoelectric detector 15 is determined, and the signal difference is used as the reference signal for damage judgment. The position of the probe light source 25 irradiated on the position sensitive detector 22 after being reflected by the measured photoelectric detector 15 and the energy signal on the pyroelectric detector are recorded as the reference signals for damage judgment.

[0040] After the system is calibrated, the laser 1 is turned on, when the micro-damage occurs on the surface of the measured photoelectric detector 15 irradiated by the laser, the waveform changes obtained by the photoelectric detector 27 and the photoelectric detector 17, the photo-thermal signal changes obtained by the photo-thermal detector 21 before and after irradiation, and the position information changes obtained by the position-sensitive detector 22 before and after irradiation. If the three signals change relative to the reference signal, it indicates that the measured photoelectric detector 15 has been damaged. If the three signals change strongly, it can be judged that the damage degree is high, and then the imaging system 23 is used to take pictures of the damage point online.

[0041] The test device provided by the embodiment of the application adopts the double photoelectric detectors to detect the waveform changes before and after the laser irradiation of the photoelectric detector, adopts the position-sensitive detector to obtain the position information before and after the laser irradiation of the detector, adopts the photo-thermal detector to obtain the photo-thermal information before and after the laser irradiation of the detector, thereby realizing the judgment of the initial damage and the damage degree of the detector, and realizing the taking of the pictures of the morphology of the damage point by means of the imaging system. Through multiple ways, the advantages of measurement and inspection are complementary, and the system has the advantages of fast response speed, low misjudgment rate, simple operation and the like.

Claims

1. A testing device for laser damage to a photodetector, characterized in that, include: Laser (1), half-wave plate (2), 56-degree polarizer (3), 45-degree beam splitter (4), power meter (5), shutter (6), high-transmission and high-reflection mirror (7), collimating light source (8), beam expansion system (9), lens (10), 45-degree beam splitter (11), first filter attenuation component (12), beam quality analyzer (13), mirror (14), sample control console (16) for placing the photodetector under test (15), first photodetector (17), second filter attenuation component (18), first beam splitter (19), beam splitter prism (20), photothermal detector (21), position-sensitive detector (22), imaging system (23), second beam splitter (24), detection light source (25), third filter attenuation component (26), second photodetector (27), oscilloscope (28) and terminal control system (29); The laser beam emitted by the laser (1) is split into two parts after passing through the half-wave plate (2), the 56-degree polarizer (3), the 45-degree beam splitter (4), the shutter (6), the high-transmission and high-reflection mirror (7), the beam expander (9), the lens (10), and the 45-degree beam splitter (11). One part is reflected by the mirror (14) and irradiates the surface of the photodetector (15) under test. The other part is received by the beam quality analyzer (13) after passing through the first filter attenuation component (12). The collimated light source (8) passes sequentially through the high-transmittance and high-reflection mirror (7), the beam expander (9), the lens (10), the 45-degree beam splitter (11), and the reflector (14) before illuminating the surface of the photodetector (15) under test. The detection beam emitted by the detection light source (25) is split into a first transmitted beam and a first reflected beam after passing through the second beam splitter (24). The first transmitted beam is obliquely incident on the surface of the photodetector (15) under test. After being reflected by the photodetector (15), it is split into a second transmitted beam and a second reflected beam by the first beam splitter (19). The second reflected beam is received by the first photodetector (17) after passing through the second filter attenuation component (18). The second transmitted beam is split into a third transmitted beam and a third reflected beam after passing through the beam splitter prism (20). They are received by the photothermal detector (21) and the position-sensitive detector (22) respectively. The first reflected beam is received by the second photodetector (27) after passing through the third filter attenuation component (26). The laser beam emitted by the laser, the collimated beam emitted by the collimating light source, and the detection beam emitted by the detection light source are focused and overlapped at the test point of the photodetector under test. The first photodetector (17) and the second photodetector (27) are respectively connected to an oscilloscope; The laser (1), power meter (5), shutter (6), beam quality analyzer (13), sample control console (16), photothermal detector (21), position-sensitive detector (22), imaging system (23), and detection light source (25) are respectively connected to the terminal control system (29).

2. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The second photodetector (27) and the first photodetector (17) are used to measure the changes in waveforms before and after the detection light source (25) illuminates the photodetector (15) under test.

3. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The photothermal detector (21) and the position-sensitive detector (22) are used to measure the photothermal signal and position change information before and after the laser (1) irradiates the photodetector (15) under test.

4. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, An independent detection light source (24) is used to illuminate the photodetector under test (15), and this is used to couple a dual photodetector, a photothermal detector, and a position-sensitive detector.

5. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The transmission and reflection ratios of the first beam splitter (19) and the second beam splitter (24) are both 9:

1.

6. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The sample control console (15) has the function of adjusting the position in the x, y, and z directions.

7. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The high-transmittance, high-reflection mirror (7) provides high transmission to the laser beam output from the laser (1) and high reflection to the collimated beam output from the collimated light source (8).

8. The testing apparatus for laser damage to photodetectors according to claim 1, characterized in that, The distance from the beam quality analyzer (13) to the 45-degree beam splitter (11) is equal to the distance from the test surface of the photodetector under test (15) to the 45-degree beam splitter (11), so as to ensure that the size of the light spot measured by the beam quality analyzer (13) is the size of the light spot irradiated on the surface of the photodetector under test (15).

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