A multi-mode burn-in test chamber

Abstract

The application discloses a multi-mode aging test box, which comprises a box body, an aging assembly, a power supply, a driving assembly, a control assembly and a plurality of electric air door assemblies arranged in the box body, wherein the aging assembly is electrically connected with the driving assembly, the power supply is fixed to the upper end of the aging assembly, the electric air door assembly comprises a ventilation box and an electric push rod, a fan plate is arranged on the air inlet of the ventilation body, a rotating plate is arranged on the air outlet of the ventilation body, an optical axis penetrates through the ventilation body, the rotating plate is rotationally connected with the optical axis, the electric push rod comprises a telescopic rod, the telescopic rod is fixedly connected with the rotating plate, a plurality of first fans are arranged on the fan plate, the first fans are electrically connected with the control assembly, the aging assembly comprises an aging rack and a plurality of first aging plates which are horizontally arranged on the inner wall of the aging rack, and the plurality of electric air door assemblies are arranged on the outer wall of the aging rack in pairs. The application can reduce the thermal interference between the aging plates and realize the function of testing semiconductor chips in multiple temperature modes.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and in particular to a multi-mode aging test chamber. Background Technology

[0002] Existing semiconductor aging test chambers typically include aging components and drive components. The aging components generally include an oven or a hollow aging rack, on which many aging boards are set for loading semiconductor chips under test. For batch testing of devices under test and for ease of testing, all devices under test on the aging boards are heated simultaneously using a single heating mode (heating wire or hot air). After the devices under test are aged, they are cooled simultaneously using a single cooling mode (same air duct). Although this single testing mode is convenient, the heating and cooling of each aging board will affect each other, resulting in inaccurate test results and making it impossible to achieve multi-temperature mode testing. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the purpose of this invention is to provide a multi-mode aging test chamber, which can reduce thermal interference between aging boards and realize the function of testing semiconductor chips in multiple temperature modes.

[0004] The objective of this invention is achieved through the following technical solution:

[0005] A multi-mode aging test chamber includes a chamber body and an aging component, a power supply, a drive component, a control component, and multiple electric damper components disposed within the chamber body. The aging component, the drive component, and the power supply are all electrically connected to the control component. The aging component is electrically connected to the drive component, and the power supply is fixed to the upper end of the aging component.

[0006] The electric damper assembly includes a ventilation box and an electric actuator. The ventilation box includes a ventilation body, a fan plate, a light axis, and a rotating plate. The fan plate is disposed on the air inlet of the ventilation body, and the rotating plate is disposed on the air outlet of the ventilation body. The light axis passes through the ventilation body, and the rotating plate is rotatably connected to the light axis. The electric actuator includes a telescopic rod, which is fixedly connected to the rotating plate. The fan plate is provided with a plurality of first fans, which are electrically connected to the control component. The aging component includes an aging rack and a plurality of first aging plates that are horizontally disposed on the inner wall of the aging rack. The plurality of electric damper assemblies are disposed one-to-one opposite to each other on the outer wall of the aging rack, and each first aging plate is disposed between the fan plates of two oppositely disposed electric damper assemblies. When the electric actuator is activated, the telescopic rod pushes the rotating plate to rotate around the light axis.

[0007] Preferably, both sides of the aging rack are provided with multiple layers of first air vent plates, each layer of first air vent plate is connected to an electric air damper assembly, the first air vent plate is provided with multiple first air holes, and the first fan is arranged opposite to the first air holes one by one.

[0008] Preferably, the aging assembly further includes a plurality of guide rails arranged one-to-one and sealing plates arranged parallel to each other. The sealing plates are fixed between two first air vent plates on the same layer by the guide rails. The sealing plates are arranged parallel to the first aging plates. The upper end of the guide rails is provided with a sliding groove, and the first aging plates are slidably connected to the first air vent plates through the sliding groove.

[0009] Preferably, the multi-mode aging test chamber further includes an oven, which is located at the lower end of the control component. A second aging plate is disposed inside the oven, and the second aging plate is electrically connected to the drive component.

[0010] Preferably, the drive assembly includes a drive frame and multiple drive plates, which are arranged parallel to each other on the drive frame. The drive plates are electrically connected to the first aging plate and the second aging plate, respectively. Multiple layers of second air vent plates are provided on both sides of the drive frame, and multiple second air vent plates are provided on the second air vent plates. The drive plate is disposed between two second air vent plates on the same layer.

[0011] Preferably, the power supply includes multiple IU power supplies, which are electrically connected to the drive assembly, the control assembly, and the electric damper assembly, respectively.

[0012] Preferably, the control component includes a display screen and a host electrically connected to the display screen, and the host is electrically connected to the drive component and the electric damper component respectively.

[0013] Preferably, the housing includes a top plate, on which a second fan hole and a third fan hole are provided. A second fan for cooling the main unit is provided in the second fan hole, and a third fan for cooling the power supply is provided in the third fan hole. Both the second fan and the third fan are electrically connected to the main unit.

[0014] Preferably, the fan plate is provided with a plurality of first fan holes, the first fan is disposed in the first fan holes, and the first fan holes are connected to the first air holes one by one. The rotating plate is provided with a plurality of U-shaped parts, and the rotating plate is rotatably connected to the optical axis through the U-shaped parts.

[0015] Preferably, the electric actuator further includes a body and a cylinder for pushing the telescopic rod, one end of the cylinder being connected to the body and the other end being connected to the telescopic rod.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] The multi-mode aging test chamber disclosed in this application includes multiple electric damper assemblies and a first aging plate disposed between two opposing fan plates. Each electric damper assembly has an electric push rod and multiple first fans inside its ventilation body. When the electric push rod pushes open the rotating plate on the ventilation body, the first fan in the ventilation body on one side of the first aging plate blows air in a single direction, while the first fan in the ventilation body on the other side of the first aging plate exhausts air outward, forming a single airflow channel to cool the first aging plate. Furthermore, due to the obstruction of the ventilation bodies on both sides of each layer of the first aging plate, the airflow through each layer of the first aging plate is not easily diffused, thus reducing mutual airflow interference and minimizing thermal interference between the layers of the first aging plate. When the electric push rod closes the rotating plate on the ventilation body, the first fans on both sides of the first aging plate cannot blow or exhaust air, allowing the aging plate to heat up via heating wires or hot air. The control component can control one or more electric actuators and the first fan to work, which can enable one or more layers of the first aging board to dissipate heat, while other layers or layers of the first aging board are kept warm or heated, thereby enabling multi-temperature mode testing of semiconductor chips. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the multi-mode aging test chamber of the present invention;

[0019] Figure 2 for Figure 1 A magnified structural diagram of the middle section;

[0020] Figure 3 This is a top view of the multi-mode aging test chamber of the present invention;

[0021] Figure 4 This is a three-dimensional structural diagram of the aging component and the driving component of the present invention;

[0022] Figure 5 This is a three-dimensional structural diagram of the electric damper assembly of the present invention;

[0023] Figure 6 This is a schematic diagram of the planar structure of the electric damper assembly of the present invention;

[0024] Figure 7 This is a three-dimensional structural diagram of the push rod of the present invention.

[0025] In the diagram: 100, Multi-mode aging test chamber; 10, Chamber body; 11, Oven; 12, Power supply; 13, Top plate; 131, Second fan hole; 132, Third fan hole; 20, Aging component; 21, Aging rack; 22, First aging plate; 221, Frame; 23, Guide rail; 24, Sealing plate; 25, First air vent plate; 251, First air vent; 30, Drive component; 31, Drive rack; 32, Drive plate; 33, Second air vent plate; 331, Second air vent; 40, Control component; 41, Display screen; 50, Electric damper component; 51, Ventilation box; 511, Ventilation body; 52, Fan plate; 521, First fan hole; 53, Rotating plate; 54, Optical axis; 55, U-shaped part; 56, Electric push rod; 561, Body; 562, Cylinder; 563, Telescopic rod. Detailed Implementation

[0026] To better understand the specific technical solutions, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0027] In the description of this invention, it should be noted that the terms "upper," "lower," "left," "right," "lateral," "longitudinal," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] like Figures 1-4As shown, this application discloses a multi-mode aging test chamber 100, including a chamber body 10 and an aging component 20, a power supply 12, a drive component 30, a control component 40, and multiple electric damper components 50 disposed within the chamber body 10. The aging component 20, the drive component 30, and the power supply 12 are all electrically connected to the control component 40, and the aging component 20 is electrically connected to the drive component 30. The power supply 12 is fixed to the upper end of the aging component 20. The electric damper components 50 include a ventilation box 51 and an electric push rod 56. The ventilation box 51 includes a ventilation body 511, a fan plate 52, an optical axis 54, and a rotating plate 53. The fan plate 52 is disposed on the air inlet of the ventilation body 511, and the rotating plate 53 is disposed on the air outlet of the ventilation body 511. The optical axis 54 passes through the ventilation body 511. The rotating plate 53 is rotatably connected to the optical axis 54. The electric push rod 56 includes a telescopic rod 563, which is fixedly connected to the rotating plate 53. A plurality of first fans (not shown) are provided on the fan plate 52. The first fans are electrically connected to the control component 40. The aging component 20 includes an aging frame 21 and a plurality of first aging plates 22, which are all horizontally arranged on the inner wall of the aging frame 21. A plurality of electric damper components 50 are arranged one-to-one on the outer wall of the aging frame 21, and each first aging plate 22 is arranged between the fan plates 52 of two electric damper components 50 arranged opposite each other. When the electric push rod 56 is activated, the telescopic rod 56 pushes the rotating plate 53 to rotate around the optical axis 54.

[0029] In the above embodiments, the multi-mode aging test chamber 100 disclosed in this application discloses multiple electric damper assemblies 50 and a first aging plate 22 disposed between two opposing fan plates 52. The ventilation body 511 of each electric damper assembly 50 is equipped with an electric push rod 56 and multiple first fans. When the electric push rod 56 pushes open the rotating plate 53 on the ventilation body 511, the first fan in the ventilation body 511 on one side of the first aging plate 22 can blow air in a single direction, and the first fan in the ventilation body 511 on the other side of the first aging plate 22 can... The exhaust air forms a single air duct to cool the first aging board 22. Due to the obstruction of the ventilation bodies 511 on both sides of each layer (referring to the vertical layers) of the first aging board 22, the air passing through each layer of the first aging board 22 is not easily diffused, thus reducing the mutual influence of the air and reducing the thermal interference between the layers of the first aging board 22. When the electric push rod 56 closes the rotating plate 53 on the ventilation body 511, the first fans on both sides of the first aging board 22 cannot blow or exhaust air, which is conducive to the first aging board 22 being heated by heating wires or hot air.

[0030] The control component 40 can control one or more electric actuators 56 and the first fan to operate, enabling one or more layers of the first aging board 22 to dissipate heat while other layers or layers of the first aging board are kept warm or heated, thus achieving multi-temperature mode testing of semiconductor chips. The control component 40 can also send control commands to the drive component 30, which generates test signals for the first aging board 22 based on the control commands. The first aging board 22 then tests the semiconductor device under test based on the test signals.

[0031] For example, there are 5 layers of first aging boards 22. Assuming that the control component 40 controls the rotating plate 53 on the electric damper component 50 of the first and third layers to open and the first fan to rotate, while the rotating plate 53 of the other layers is closed, then the aging boards of the first and third layers of first aging boards 22 are in heat dissipation mode. If the heating wires or hot air on the first aging boards 22 of the second, fourth and fifth layers are heating, then they are in heating mode; if the heating wires are not heating, then they are in heat preservation mode.

[0032] In a preferred embodiment, such as Figure 2 and Figure 4 As shown, the aging rack 21 has multiple layers of first air vent plates 25 on both sides. Each layer of first air vent plate 25 is connected to an electric damper assembly 50. Multiple first air vents 251 are provided on each first air vent plate 25, and the first fan is positioned opposite to each first air vent 251. The aging assembly 20 also includes multiple guide rails 23 positioned opposite to each other and parallel sealing plates 24. The sealing plates 24 are fixed between two first air vent plates 25 on the same layer via the guide rails 23. The sealing plates 24 are parallel to the first aging plate 22. A sliding groove is provided at the upper end of the guide rail 23, through which the first aging plate 22 is slidably connected to the first air vent plate 25.

[0033] In the above embodiment, both ends of the aging rack 21 are composed of the first air vent plates 25. The sealing plate 24 can prevent heat or cold air on the first aging plate 22 from diffusing upwards and downwards, so that each layer of the first aging plate 22 can be in a sealed space composed of two layers of sealing plates 24 and two left and right electric damper assemblies 50, thereby reducing interference with the heat dissipation or heating of other first aging plates 22. The first aging plate 22 can be mounted on the guide rail 23 through the sliding groove, and each guide rail 23 is fixed on the first air vent plate 25.

[0034] In a preferred embodiment, such as Figures 1-3As shown, the multi-mode aging test chamber 100 also includes an oven 11, which is located at the lower end of the control component 40. A second aging plate (not shown) is disposed inside the oven 11, and the second aging plate is electrically connected to the drive component 30. The control component 40 includes a display screen 41 and a host unit electrically connected to the display screen. The host unit is electrically connected to the drive component 30 and the electric damper component 50, respectively. The chamber 11 includes a top plate 13, on which a second fan hole 131 and a third fan hole 132 are provided. A second fan for cooling the host unit is disposed in the second fan hole 131, and a third fan for cooling the power supply 12 is disposed in the third fan hole 132. Both the second and third fans are electrically connected to the host unit.

[0035] In the above embodiment, the oven 11 can perform independent high-temperature testing on the device under test, avoiding the influence of the first fan and increasing the number of testing modes. The display screen 41 can display test information. The host is preferably an industrial control computer, which can send test commands to the drive board and store test information. The second fan and the third fan can improve heat dissipation efficiency.

[0036] In a preferred embodiment, such as Figure 1 and Figure 4 As shown, the power supply 12 includes multiple IU power supplies, which are electrically connected to the drive assembly 30, the control assembly 40, and the electric damper assembly 50, respectively. The drive assembly 30 includes a drive frame 31 and multiple drive plates 32, which are arranged parallel to each other on the drive frame 31. The drive plates 32 are electrically connected to the first aging plate 22 and the second aging plate, respectively. Multiple layers of second air vent plates 33 are provided on both sides of the drive frame 31, and multiple second air vents 331 are provided on the second air vent plates 33. The drive plates 32 are disposed between two second air vent plates 33 on the same layer.

[0037] In the above embodiment, the IU power supply is electrically connected to the driver board 32 and the electric damper assembly 50, respectively. The host can control one or more driver boards to operate, thereby enabling one or more aging boards to operate. Most of the driver boards 32 are electrically connected to the first aging board 22, and the second vent 331 can be equipped with a second fan for cooling the driver board 32. The driver board 32 includes an FPGA chip board for information compilation.

[0038] In a preferred embodiment, such as Figure 5 and Figure 7As shown, the fan plate 52 is provided with a plurality of first fan holes 521, and the first fan is disposed in the first fan hole. The first fan hole 521 is connected to the first air hole 251 one by one. The rotating plate 53 is provided with a plurality of U-shaped parts 55, and the rotating plate 53 is rotatably connected to the optical axis 54 through the U-shaped parts 55. The electric actuator 56 also includes a body 561 and a cylinder 562 for pushing the telescopic rod 563. One end of the cylinder 562 is connected to the body 561, and the other end of the cylinder 562 is connected to the telescopic rod 563.

[0039] In the above embodiment, the body 561 enables the cylinder 562 to push the telescopic rod 563 to extend and retract, thereby causing the rotating plate 53 to rotate around the optical axis 54. The U-shaped component 55 facilitates the rotation of the rotating plate 53. The optical axis 54 can also be fixedly connected to the ventilation body 511, and the U-shaped component 55 can also be fixed on the rotating plate 53, facilitating the rotation of the U-shaped component 55 around the optical axis.

[0040] In summary, this multi-mode aging test chamber 100 seals and layers the first aging boards 22 of each layer through the electric damper assembly 50 and the sealing plate 24. The operating states of each electric damper assembly 50 can be different, thus enabling the first aging boards 22 of different layers to undergo various test modes such as heat dissipation, heat preservation, or high temperature.

[0041] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A multi-mode aging test chamber, characterized in that: It includes a housing and an aging component, a power supply, a drive component, a control component, and multiple electric damper components disposed within the housing. The aging component, the drive component, and the power supply are all electrically connected to the control component. The aging component is electrically connected to the drive component. The power supply is fixed to the upper end of the aging component. The electric damper assembly includes a ventilation box and an electric actuator. The ventilation box includes a ventilation body, a fan plate, a light axis, and a rotating plate. The fan plate is disposed on the air inlet of the ventilation body, and the rotating plate is disposed on the air outlet of the ventilation body. The light axis passes through the ventilation body, and the rotating plate is rotatably connected to the light axis. The electric actuator includes a telescopic rod, which is fixedly connected to the rotating plate. The fan plate is provided with a plurality of first fans, which are electrically connected to the control component. The aging component includes an aging rack and a plurality of first aging plates that are horizontally disposed on the inner wall of the aging rack. The plurality of electric damper assemblies are disposed one-to-one opposite to each other on the outer wall of the aging rack, and each first aging plate is disposed between the fan plates of two oppositely disposed electric damper assemblies. When the electric actuator is activated, the telescopic rod pushes the rotating plate to rotate around the light axis. The aging assembly also includes multiple guide rails arranged one-to-one and sealing plates arranged parallel to each other. The sealing plates are fixed between two first air vent plates on the same layer by the guide rails, and the sealing plates are arranged parallel to the first aging plates.

2. The multi-mode aging test chamber according to claim 1, characterized in that: The aging rack has multiple layers of first air vent plates on both sides. Each layer of first air vent plate is connected to an electric air damper assembly. The first air vent plate has multiple first air vents. The first fan is arranged opposite to each of the first air vents.

3. The multi-mode aging test chamber according to claim 2, characterized in that: The aging assembly also includes multiple guide rails arranged one-to-one and sealing plates arranged parallel to each other. The sealing plates are fixed between two first air vent plates on the same layer by the guide rails. The sealing plates are arranged parallel to the first aging plates. The upper end of the guide rails is provided with a sliding groove, and the first aging plates are slidably connected to the first air vent plates through the sliding groove.

4. The multi-mode aging test chamber according to claim 3, characterized in that: The multi-mode aging test chamber also includes an oven, which is located at the lower end of the control component. A second aging plate is disposed inside the oven and is electrically connected to the drive component.

5. The multi-mode aging test chamber according to claim 4, characterized in that: The drive assembly includes a drive frame and multiple drive plates. The multiple drive plates are arranged parallel to each other on the drive frame. The drive plates are electrically connected to the first aging plate and the second aging plate, respectively. Multiple layers of second air vent plates are provided on both sides of the drive frame. Multiple second air vent plates are provided on the second air vent plates. The drive plates are arranged between two second air vent plates on the same layer.

6. The multi-mode aging test chamber according to claim 1, characterized in that: The power supply includes multiple IU power supplies, which are electrically connected to the drive assembly, the control assembly, and the electric damper assembly, respectively.

7. The multi-mode aging test chamber according to claim 1, characterized in that: The control component includes a display screen and a host electrically connected to the display screen. The host is electrically connected to the drive component and the electric damper component, respectively.

8. The multi-mode aging test chamber according to claim 7, characterized in that: The enclosure includes a top plate, on which a second fan hole and a third fan hole are provided. A second fan for cooling the main unit is provided in the second fan hole, and a third fan for cooling the power supply is provided in the third fan hole. Both the second fan and the third fan are electrically connected to the main unit.

9. The multi-mode aging test chamber according to claim 1, characterized in that: The fan plate is provided with a plurality of first fan holes, and the first fan is disposed in the first fan holes. The first fan holes are connected to the first air holes one by one. The rotating plate is provided with a plurality of U-shaped parts, and the rotating plate is rotatably connected to the optical axis through the U-shaped parts.

10. The multi-mode aging test chamber according to claim 1, characterized in that: The electric actuator also includes a body and a cylinder for pushing the telescopic rod, with one end of the cylinder connected to the body and the other end connected to the telescopic rod.

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