A four-column high-precision polishing machine

Abstract

The present invention relates to polishing equipment, specifically a four-column high-precision polishing machine, which includes a base and a frame arranged on the base. A lower large disc is installed on the base, and four upper disc components are provided on the lower large disc. The four upper disc components are evenly distributed on the lower large disc through a positioning component. A servo motor arranged in the base drives the lower large disc to rotate through a speed reducer. Each upper disc component is driven to move up and down by a cylinder. When the upper disc component descends to the lower large disc, the upper disc component carrying the workpiece to be polished rotates on the rotating lower large disc to grind and polish the workpiece to be polished. The present invention uses four upper disc components to perform grinding and polishing on the rotating lower large disc, and can process four workpieces to be polished simultaneously, improving the processing efficiency. Moreover, each upper disc component realizes that the upper disc can move up and down during rotation by arranging a rotating central shaft in the hollow cylinder, so as to maintain a certain pressure on the workpiece to be polished and ensure the processing accuracy of the workpiece to be polished.

Description

Technical Field

[0001] The present invention relates to polishing equipment, specifically a four-column high-precision polishing machine. Background Art

[0002] Semiconductor materials are increasingly widely used in electronic devices, such as sapphire substrate wafers, etc. As the main material for current LED chip substrates, they have excellent mechanical properties, stability, and optical permeability. However, for such semiconductor chip materials, high requirements are imposed on flatness and parallelism, and double-sided grinding and polishing are required. Currently, generally, a polishing machine with an upper platen system and a lower large platen is used for double-sided grinding and polishing. When the polishing machine is working, a certain pressure needs to be maintained on the upper platen to ensure the processing efficiency and processing accuracy of the parts to be processed. Specifically, when the upper platen rotates, it needs to move up and down to apply pressure to the lower large platen that supports the upper platen with the workpiece to be polished. For this reason, the structure of the upper platen system of the existing polishing machine is complex and the driving is not stable enough, resulting in insufficient processing accuracy. Moreover, due to the complex structure of the upper platen, most polishing machines are only provided with single-column or two-column processing, and their processing efficiency is low. Summary of the Invention

[0003] In view of the above technical problems, the present invention provides a four-column high-precision polishing machine that can ensure processing accuracy and high efficiency.

[0004] The technical solution adopted by the present invention to solve the above technical problems is: a four-column high-precision polishing machine, including a base and a frame arranged on the base. A lower large platen is installed on the base, and four upper platen assemblies are provided on the lower large platen. The four upper platen assemblies are evenly distributed on the lower large platen through a positioning assembly. A servo motor arranged in the base drives the lower large platen to rotate through a speed reducer. Each upper platen assembly is driven to move up and down by a cylinder. When the upper platen assembly descends to the lower large platen, the upper platen assembly carrying the workpiece to be polished rotates on the rotating lower large platen to grind and polish the workpiece to be polished.

[0005] Preferably, each upper platen assembly includes a motor arranged on the frame and an upper platen driven to rotate by the motor through a central shaft. The upper platen carries the workpiece to be polished. The cylinder is hollow and drives the upper platen to move up and down through the central shaft. The lower end of the central shaft vertically passes through the cavity of the cylinder and is connected to the upper platen. An outer sliding sleeve installed on the frame is sleeved outside the upper end of the central shaft. The outer sliding sleeve is driven to rotate by the motor. Internal splines are provided on the inner wall of the outer sliding sleeve, and external splines are provided on the outer wall of the central shaft. The outer sliding sleeve drives the central shaft to rotate through the mutually cooperating internal and external splines. The external splines axially extend towards both ends of the central shaft. When the central shaft is driven to move up and down by the cylinder, the external splines slide up and down relative to the internal splines.

[0006] Preferably, the cylinder is provided on the lower side of the sliding sleeve, the upper end of the cylinder body is connected to the frame, and the lower end of the body is arranged on the cylinder seat saddle, the cylinder seat saddle cooperates with the saddle plate fixed on the frame and is slidably connected, the drive shaft of the cylinder is hollow, and the inner walls of the cavity at the upper and lower ends of the drive shaft are provided with combined bearings, and the central shaft is installed on two combined bearings.

[0007] Preferably, the lower end of the driving shaft of the cylinder is mounted on a bearing seat via a self-aligning ball bearing, the lower end of the bearing seat is fixedly connected to the edge of the upper plate, a receiving cavity is formed in the middle of the upper plate, a dial is provided in the receiving cavity, the lower end of the central axis passes through the cavity at the lower end of the driving shaft, the dial is locked to the lower end of the central axis by a nut, and the dial driven to rotate by the central axis drives the upper plate to rotate.

[0008] Preferably, the positioning assembly includes a central positioning assembly and four outer positioning assemblies arranged on the frame. When four carriers with workpieces to be polished are placed on the lower large plate, the central positioning assembly is placed at the center of the array of the four carriers from top to bottom, and then each outer positioning assembly positions a corresponding carrier between the outer positioning assembly and the central positioning assembly from the outside of the lower large plate to the inside, and then each carrier is inserted into the upper plate of the corresponding upper plate assembly by moving the four upper plate assemblies downward.

[0009] Preferably, the center positioning assembly includes a center positioning base fixed on the frame, a center cylinder arranged at the upper end of the center positioning base, and a positioning plate driven by the center cylinder to move up and down and rotate, the lower end of the center positioning base is fixedly connected to a sleeve, a center positioning shaft is installed in the sleeve through a bearing, the upper end of the center positioning shaft is hinged to the center cylinder through a floating joint, and the lower end is connected to the positioning plate; when the center cylinder drives the positioning plate to descend to the lower large plate through the center positioning shaft, the positioning plate rotates to abut against the inner side walls of the four carrier plates on the lower large plate.

[0010] Preferably, an inclined groove is provided on the wall of the sleeve along the axial direction, and a bolt-type roller needle bearing is provided along the radial direction of the sleeve, the bolt end of the bolt-type roller needle bearing is radially locked on the center positioning shaft, and the roller end is placed in the inclined groove; when the center cylinder drives the center positioning shaft to move up and down, the roller end of the bolt-type roller needle bearing moves along the inclined groove to drive the center positioning shaft to rotate, and the rotating center positioning shaft drives the positioning plate to rotate.

[0011] Preferably, each outer positioning component includes a fixed bottom shell disposed on the frame and outside the lower large disc, a side cylinder mounted on the fixed bottom shell, and a side positioning disc driven by the side cylinder through a side transmission mechanism; when four carrier discs are placed on the lower large disc, the side positioning disc drives and approaches the corresponding carrier disc from the outside to the inside through the side transmission mechanism and abuts against the outer wall of the carrier disc.

[0012] Preferably, the side transmission mechanism includes a vertically arranged rotating shaft, a horizontally arranged swing assembly, a rack disposed in the fixed bottom shell and connected to the telescopic rod of the side cylinder through a spherical eye joint, and a gear horizontally arranged in the fixed bottom shell and meshing with the rack. A deep groove ball bearing is installed at the lower end of the rotating shaft and is located above the gear in the fixed bottom shell, and the upper end of the rotating shaft is connected to the swing assembly; the rotating shaft driven by the gear drives the swing assembly to swing, and the swing assembly drives the side positioning disc to swing to abut against the outer wall of the carrier disc.

[0013] Preferably, the central axis of each upper disc assembly is hollow, an outer tube is provided in the inner cavity of the central axis, an inner tube is provided in the outer tube, the upper ends of the inner and outer tubes are connected to a rotary joint installed at the upper end of the central axis, the lower ends of the inner and outer tubes are connected to the upper disc, and the inner and outer tubes form a circulating cooling system to cool the upper disc; a water pot for collecting grinding liquid is provided outside the lower large disc, and the water pot is connected to a recovery assembly, and the grinding liquid is recovered and recycled through the recovery assembly.

[0014] As can be seen from the above technical solutions, the present invention uses four upper disc assemblies to perform grinding and polishing on a rotating lower large disc, and can process four workpieces to be polished simultaneously, improving the processing efficiency. Moreover, each upper disc assembly realizes the up and down movement of the upper disc during rotation by arranging a rotating central axis in a hollow cylinder, not only maintaining a certain pressure on the workpiece to be polished to ensure the processing accuracy of the workpiece to be polished, but also having stable transmission, compact structure and small occupied space for the upper disc assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a three-dimensional structural schematic diagram of a preferred embodiment of the present invention.

[0016] Figure 2 is a sectional structural schematic diagram of the upper disc assembly in the present invention.

[0017] Figure 3 is a matching structural schematic diagram of the sliding sleeve and the central axis in the present invention.

[0018] Figure 4 is Figure 2 an enlarged structural schematic diagram at A in

[0019] Figure 5 is Figure 2 an enlarged structural schematic diagram at B in

[0020] Figure 6 It is a schematic structural diagram of the positioning component of the present invention.

[0021] Figure 7 It is a schematic structural diagram of the central positioning component of the present invention.

[0022] Figure 8 It is a schematic structural diagram of the side positioning component of the present invention. Detailed implementation manners

[0023] The present invention will be described in detail below with reference to the accompanying drawings. Here, the schematic embodiments and descriptions of the present invention are used to explain the present invention, but not to limit the present invention.

[0024] As Figure 1 , the present invention provides a four-column high-precision polishing machine, which includes a base 100 and a frame 1 provided on the base. A lower large plate 101 is installed on the base, and four upper plate components 102 are provided on the lower large plate. The four upper plate components are evenly distributed on the lower large plate through a positioning component 103. A servo motor 104 installed in the base drives the lower large plate to rotate through a speed reducer 105. Each upper plate component 102 moves up and down through a cylinder 3, thereby applying pressure to the upper plate component to improve the polishing accuracy. When the upper plate component descends to the lower large plate, the upper plate component carrying the workpiece to be polished rotates on the rotating lower large plate to grind and polish the workpiece to be polished. The present invention uses four upper plate components for simultaneous processing, which is not only compact in structure, stable in transmission, but also has a high processing efficiency.

[0025] As Figure 2 , Figure 3 , Figure 4 and Figure 5 , each upper plate component 102 includes a motor 2 provided on the frame 1 and an upper plate 5 driven to rotate by the motor through a central shaft 4. The upper plate carries the workpiece to be polished. The cylinder 3 is hollow and drives the upper plate to move up and down. The lower end of the central shaft vertically passes through the cavity of the cylinder and is connected to the upper plate. A sliding sleeve 11 installed on the frame is sleeved outside the upper end of the central shaft. The sliding sleeve is driven to rotate by the motor. The rotating sliding sleeve drives the central shaft to rotate, and the central shaft drives the upper plate to rotate. When the cylinder drives the upper plate to move up and down, the central shaft slides up and down relative to the sliding sleeve. It can be seen that through the design of the sliding sleeve, the present invention realizes the dual movements of rotation and sliding of the central shaft, with a simple structure and low processing cost. And each upper plate is driven to move by an independent motor and cylinder, and the transmission is more stable.

[0026] The inner wall of the sliding sleeve 11 of the present invention is provided with an internal spline 12, and the outer wall of the central shaft 4 is provided with an external spline 41. The sliding sleeve drives the central shaft to rotate through the mutually cooperating internal and external splines; the external spline axially extends towards both ends of the central shaft to ensure that the central shaft has sufficient sliding distance. When the central shaft moves up and down, the external spline slides up and down relative to the internal spline. It can be seen therefrom that the key connection method realizes the rotation of the central shaft, and the extended external spline realizes the sliding of the central shaft, thereby achieving the purpose of pressing the upper plate. Preferably, the upper end of the sliding sleeve is fixedly connected to a synchronous pulley 6 driven by the motor to rotate. A bearing sleeve 13 is fixedly provided on the frame 1, and a bearing 14 is installed in the bearing sleeve. The lower end of the sliding sleeve is fixed to the inner ring of the bearing; during the implementation process, the motor drives the synchronous pulley to rotate, the synchronous pulley drives the sliding sleeve to rotate, and the sliding sleeve drives the central shaft to rotate. The bearing sleeve supports the sliding sleeve through the bearing to ensure the smooth transmission of the sliding sleeve; a gland 15 for pressing the outer ring of the bearing is fixedly provided on the frame above the bearing, and an end cover 16 is provided below the bearing, which is locked to the lower end of the sliding sleeve and abuts against the inner ring of the bearing, so as to restrict the bearing and the sliding sleeve through the gland and the end cover, further improving the smoothness of the transmission.

[0027] A cylinder 3 is provided below the sliding sleeve 11 of the present invention. The upper end of the body 31 of the cylinder is connected to the frame 1, and the lower end of the body is arranged on a cylinder seat saddle 32. The cylinder seat saddle is slidably connected to a saddle plate 33 fixed on a support plate 7 of the polishing machine. Thus, the frame, the cylinder and the support plate are connected into a rigid structure through the body of the cylinder, ensuring the stability of the connection of the entire upper plate system; at the same time, the installation position of the upper plate system can be adjusted by the relative sliding of the cylinder seat saddle and the saddle plate, so as to achieve precise positioning of multiple upper plates. The drive shaft 34 of the cylinder is hollow, and combined bearings 35 are provided on the inner walls of the cavities at the upper and lower ends of the drive shaft. The central shaft is installed on the two combined bearings. During the implementation process, each combined bearing is composed of a deep groove ball bearing at the upper end, a double row cylindrical roller bearing in the middle and a deep groove ball bearing at the lower end, which can not only firmly fix the central shaft in the cavity of the drive shaft, but also make the transmission more stable.

[0028] Preferably, the lower end of the driving shaft 34 of the cylinder is installed on the bearing seat 37 through a spherical roller bearing 36. The lower end of the bearing seat is fixedly connected to the edge of the upper disc. A receiving cavity 51 is formed in the middle of the upper disc. A dial 52 is arranged in the receiving cavity. The lower end of the middle shaft passes through the cavity at the lower end of the driving shaft. The dial is locked to the lower end of the middle shaft by a nut 53. The dial driven by the middle shaft rotates the upper disc. The upper disc drives the bearing seat to rotate. Thus, synchronous rotating bodies with different diameters are arranged on both the inner and outer sides of the driving shaft, which can offset part of the vibration generated by rotation, thereby improving the smoothness of transmission. Preferably, several dial grooves 54 are radially formed on the upper disc. Corresponding to the radial direction, several dial rods 55 are arranged on the side wall of the dial. Each dial rod is placed in the corresponding dial groove, so as to drive the upper disc to rotate through the dial rod. The present invention adopts a dial to realize the split design of the middle shaft and the upper disc, which is more convenient for disassembly and maintenance. The dial extends upward with a boss 56 sleeved on the outer wall of the lower end of the middle shaft. The boss extends into the cavity at the lower end of the driving shaft. A spacer sleeve 57 is arranged on the boss. The inner end of the spacer sleeve abuts against the bottom wall of the inner ring of the combined bearing at the lower end of the driving shaft, which not only stably supports the combined bearing and improves the smoothness of transmission, but also has a larger contact area between the middle shaft and the dial, making the connection between the two more stable and the transmission more smooth.

[0029] During implementation, a bearing waterproof cover 38 is fixedly connected to the upper side of the bearing seat 37. A waterproof cover 8 covering the bearing seat and the bearing waterproof cover is arranged on the outer side of the lower end of the driving shaft. The bearing waterproof cover can prevent grinding fluid, waste chips, etc. from entering the bearing during grinding and polishing. The waterproof cover prevents grinding fluid, waste chips, etc. from entering the bearing seat, thus realizing the waterproof and dustproof of the upper disc system. At the same time, the rotating bearing seat drives the bearing waterproof cover to rotate. It can be seen that the upper disc, the bearing seat and the bearing waterproof cover are connected into a rotating body driven by the middle shaft to rotate. The rotating body rotates in the waterproof cover, and the protection performance is good. And the rotating body is driven by the driving shaft to move up and down integrally through the spherical roller bearing 36 in the bearing seat, which not only ensures the smoothness of rotation, but also realizes the pressurization of the upper disc.

[0030] On the upper side of the waterproof cover 8 of the present invention, a fixing seat 81 fixedly connected to the outer wall of the driving shaft is provided. The upper side of the fixing seat is connected to the lower end of a flexible protective sleeve 82 sleeved on the outer side of the driving shaft. The upper end of the flexible protective sleeve is connected to the cylinder seat saddle. When the driving shaft moves downward, the above-mentioned rotating body, together with the waterproof cover and the fixing seat, moves downward at the same time. The lower end of the flexible protective sleeve moves downward accordingly, and its upper end remains stationary because it is connected to the cylinder seat saddle. Therefore, the flexible protective sleeve is stretched. On the contrary, when the driving shaft moves upward, the flexible protective sleeve retracts. The flexible protective sleeve of the present invention always remains on the outer side of the driving shaft, further improving the waterproof and dustproof performance.

[0031] As Figure 6 、 Figure 7 and Figure 8, the positioning component 103 of the present invention includes a central positioning component 120 and four outer positioning components 130 provided on the frame 1. When four trays 107 with workpieces to be polished are placed on the lower large plate 101, the central positioning component 120 is placed vertically above the center of the array of the four trays from top to bottom. Then, each outer positioning component positions a corresponding tray between the outer side of the lower large plate and the central positioning component from the outside of the lower large plate inward. Subsequently, the four upper plate components are lowered to make each tray snap into the upper plate of the corresponding upper plate component. During implementation, the workpieces to be polished are mobile phone components, chips, etc. When polishing a sapphire chip substrate, a ceramic tray is preferably used to improve the polishing accuracy. The mechanical structures of the central positioning component and the outer positioning components of the present invention are relatively simple, and the movements of both are automatically controlled by control software without manual operation, which not only improves the intelligence level of the equipment but also enables accurate and rapid positioning.

[0032] Specifically, the central positioning component 120 includes a central positioning base 121 fixed on the frame 1, a central cylinder 122 provided on the central positioning base, and a central transmission mechanism 108 driven by the central cylinder. The lower end of the central transmission mechanism is connected with a positioning disk 109. The central cylinder drives the positioning disk to rotate and move up and down through the central transmission mechanism. When the positioning disk descends to the lower large plate, the positioning disk rotates and abuts against the inner side walls of several trays on the lower large plate, thereby preventing the trays from moving inward to the lower large plate. Preferably, the central cylinder is installed on a cylinder seat 123 fixedly connected to the upper end of the central positioning base. The central transmission mechanism 108 includes a bushing 124 fixedly connected to the lower end of the central positioning base and a central positioning shaft 125 installed in the bushing through bearings. The upper end of the central positioning shaft is connected to the central cylinder, and the lower end is connected to the positioning disk. When the central cylinder extends or contracts, the central positioning shaft descends or ascends, thereby driving the positioning disk to approach or move away from the lower large plate. The central transmission mechanism of the present invention has few components, a simple structure, and high transmission accuracy, and can achieve precise control.

[0033] Furthermore, an inclined groove 126 is axially formed on the wall of the bushing 124, and a bolt-type roller needle bearing 127 is arranged radially along the bushing. The bolt end of the bolt-type roller needle bearing is radially locked on the central positioning shaft, and the roller end is placed in the inclined groove. When the central cylinder drives the central positioning shaft to move up and down, the roller end of the bolt-type roller needle bearing moves along the inclined groove to drive the central positioning shaft to rotate. Due to the constraint of the inclined groove in the present invention, the central positioning shaft can rotate at a designed angle, that is, the inclination degree of the inclined groove designed on the wall of the bushing, such as spiral, etc., can realize the central positioning shaft rotating at a set angle, so as to achieve the purpose of precise control. The present invention also ingeniously adopts a bolt-type roller needle bearing, which is not only convenient for material selection and installation and has a low cost, but also generates rolling friction between the roller end moving along the inclined groove and the inclined groove wall, with small resistance and wear, which is beneficial to improving the service life of the equipment.

[0034] During the implementation process, the telescopic rod of the central cylinder is hinged to the upper end of the central positioning shaft through a floating joint 128, that is, the use of a floating joint can ensure that the central positioning shaft can rotate relative to the telescopic rod when driven by the central cylinder to move up and down. The floating joint is such as a ball joint. A protective cover 110 is sleeved on the lower end of the central positioning shaft, which can prevent water and dust, especially prevent the coolant during the operation of the polishing machine from splashing on the central positioning shaft and avoid affecting the up and down movement of the central positioning shaft. Preferably, the positioning disk 109 includes a disk body 106 fixedly connected to the lower end of the central positioning shaft and a positioning ring 111 arranged on the lower side of the disk body. The positioning ring is generally made of a flexible material to avoid damaging the carrier disk. A plurality of arc-shaped bayonets 129 are circumferentially arranged on the side wall of the positioning ring. When the positioning ring descends to the lower large disk along with the disk body, the inner side wall of each carrier disk is clamped into the corresponding arc-shaped bayonet, so as to accurately position the carrier disk and prevent it from sliding.

[0035] Each outer positioning component 130 of the present invention includes a fixed bottom shell 131 arranged on the frame and located outside the lower large disk, a side cylinder 132 installed on the fixed bottom shell, and a side positioning disk 133 driven by the side cylinder through a side transmission mechanism. When several carrier disks are placed on the lower large disk, the side positioning disk drives through the side transmission mechanism to approach the corresponding carrier disk from the outside to the inside and abuts against the outer side wall of the carrier disk, so as to prevent the carrier disk from sliding outwards. Specifically, the side transmission mechanism includes a gear-rack mechanism and a rotating mechanism. The side cylinder drives the rotating mechanism to rotate through the gear-rack mechanism, and the rotating mechanism drives the side positioning disk to move from the outside of the lower large disk to the inside until it abuts against the outer side wall of the corresponding carrier disk. The side positioning disk of the present invention is made of nylon to prevent damage when contacting the carrier disk.

[0036] During the implementation process, the rack and pinion mechanism includes a rack 134 disposed within the fixed bottom case and connected to the telescopic rod of the side cylinder through a spherical eye joint, and a pinion 135 horizontally disposed within the fixed bottom case and meshing with the rack; the rotating mechanism includes a vertically disposed rotating shaft 136 and a horizontally disposed swinging assembly 112. The lower end of the rotating shaft is installed within the inner ring of the pinion. A deep groove ball bearing 137 is installed at the lower end of the rotating shaft and is located above the pinion within the fixed bottom case. The deep groove ball bearing installed within the fixed bottom case can support the pinion and the rotating shaft, ensuring firm installation and smooth transmission of the pinion and the rotating shaft; the upper end of the rotating shaft is connected to the swinging assembly 112. When the side cylinder drives the rack to move, the rack drives the pinion to rotate, and the rotating shaft driven by the pinion drives the swinging assembly to swing. The swinging assembly drives the side positioning disk to swing, so as to approach or move away from the carrier disk on the lower large disk.

[0037] Preferably, the swinging assembly 112 includes a fixed seat 138 connected to the fixed bottom case and a horizontally disposed swing arm 139. One end of the swing arm is fixedly connected to the upper end of the rotating shaft, and the other end is connected to the side positioning disk through a vertically disposed movable shaft 140. The movable shaft ensures that the side positioning disk can rotate after contacting the carrier disk, thereby reducing wear on the carrier disk. The rotating shaft drives the swing arm to rotate, that is, the other end of the swing arm rotates around the one end of the swing arm. As the rotating shaft rotates forward and backward, the other end of the swing arm approaches or moves away from the carrier disk. When positioning is required, the swing arm swings to the position of the carrier disk, and the side positioning disk abuts against the outer side wall of the carrier disk; after positioning is completed, the swing arm drives the side positioning disk to move away from the carrier disk and is located outside the lower large disk. In the present invention, the positioning disk clamps the inner side wall of the carrier disk from the inside out, and at the same time, the side positioning disk presses against the outer side wall of the carrier disk from the outside in, so that the carrier disk can be quickly and accurately positioned at the specified position, greatly improving the efficiency.

[0038] The central axis 4 of each upper platen assembly 102 of the present invention is hollow. An outer tube 113 is provided in the inner cavity of the central axis. An inner tube 114 is provided inside the outer tube. The upper ends of the inner and outer tubes are connected to a rotary joint 115 installed at the upper end of the central axis. The lower ends of the inner and outer tubes are connected to the upper platen 5. The inner and outer tubes form a circulating cooling system to cool the upper platen. During implementation, the cooling water flows from the water inlet channel of the rotary joint through the water distribution sleeve into the water inlet cavity formed between the inner cavity of the central axis and the outer tube under the action of the power provided by an external water pump, then flows into the water jacket provided inside the upper platen through the water inlet pad from the water inlet of the upper platen, then flows back to the inner tube from the water outlet of the upper platen, and finally flows into the water return channel of the rotary joint from the inner tube, thereby realizing the circulation of the cooling water. Thus, the heat generated inside the upper platen during operation is taken away by the cooling water, greatly improving the cooling effect. Furthermore, the temperature of grinding and polishing can be effectively controlled, making the polishing process have high precision, high efficiency, and high stability. A baffle 9 is horizontally provided on the rotary joint 115. A guide rod 91 is vertically provided on the frame. The guide rod is snapped into a card slot 92 opened on one side of the baffle. The baffle is connected to the fixed part of the rotary joint, and the water inlet of the rotary joint can be fixed at a specified position. Moreover, when the central axis drives the rotary joint to move up and down, the card slot moves along the guide rod, ensuring smoother movement.

[0039] A water pan 116 for collecting grinding fluid is provided outside the lower large platen of the present invention. The water pan is connected to a recycling assembly 117, and the grinding fluid is recycled through this recycling assembly. Specifically, the water pan 116 is arranged around the lower large platen to collect the grinding fluid. The water pan adopts a ring groove structure. During the operation of the polishing machine, the grinding fluid flows from the periphery of the lower large platen into the water pan. The recycling assembly 117 includes a filter tank 118 provided on the lower side of the water pan. The grinding fluid collected by the water pan flows into a water tank 119 provided on the lower side of the water pan after being filtered by the filter tank. A water pump is provided on the water tank. The grinding fluid is conveyed to the lower large platen by this water pump after being filtered again, thereby ensuring the purity of the grinding fluid through two filtrations and achieving the purpose of recycling.

Claims

1. A four-column high-precision polishing machine, comprising a base and a frame arranged on the base, wherein a lower large plate is installed on the base, and four upper plate components are provided on the lower large plate, and it is characterized in that: The four upper disc assemblies are evenly distributed on the lower large disc through a positioning assembly. The servo motor arranged in the base drives the lower large disc to rotate through a reducer. Each upper disc assembly is driven up and down by a cylinder. When the upper disc assembly descends to the lower large disc, the upper disc assembly carrying the workpiece to be polished rotates on the rotating lower large disc to grind and polish the workpiece to be polished. The positioning assembly includes a central positioning assembly and four outer positioning assemblies arranged on the frame. When four carriers with workpieces to be polished are placed on the lower large disc, the central positioning assembly is placed from top to bottom at the center of the array of the four carriers, and then each outer positioning assembly positions a corresponding carrier between the outer positioning assembly and the central positioning assembly from the outside of the lower large disc to the inside, and then each carrier is inserted into the upper disc of the corresponding upper disc assembly by moving the four upper disc assemblies downward.

2. The four-column high-precision polishing machine according to claim 1, wherein: Each upper disk assembly includes a motor arranged on the frame and an upper disk driven to rotate by the motor through a central shaft, the upper disk carries a workpiece to be polished, the cylinder is hollow and drives the upper disk to move up and down through the central shaft, the lower end of the central shaft vertically passes through the cavity of the cylinder and is connected to the upper disk, the upper end outer side of the central shaft is sleeved with a sliding sleeve installed on the frame, the sliding sleeve is driven to rotate by the motor; the inner wall of the sliding sleeve is provided with an inner spline, the outer wall of the central shaft is provided with an outer spline, the sliding sleeve drives the central shaft to rotate through the inner and outer splines that cooperate with each other; the outer spline extends axially to the two ends of the central shaft, and when the central shaft is driven up and down by the cylinder, the outer spline slides up and down relative to the inner spline.

3. The four-column high-precision polishing machine according to claim 2, wherein: The cylinder is provided on the lower side of the sliding sleeve, the upper end of the cylinder body is connected to the frame, and the lower end of the body is arranged on the cylinder seat saddle, the cylinder seat saddle cooperates with the saddle plate fixed on the frame and is slidably connected, the driving shaft of the cylinder is hollow, and the inner walls of the cavities at the upper and lower ends of the driving shaft are provided with combined bearings, and the central shaft is installed on two combined bearings.

4. The four-column high-precision polishing machine according to claim 3, wherein: The lower end of the driving shaft of the cylinder is installed on the bearing seat through a self-aligning ball bearing. The lower end of the bearing seat is fixedly connected to the edge of the upper plate. A accommodating cavity is formed in the middle of the upper plate. A dial is arranged in the accommodating cavity. The lower end of the central axis passes through the cavity at the lower end of the driving shaft. The dial is locked to the lower end of the central axis by a nut. The dial driven to rotate by the central axis drives the upper plate to rotate.

5. The four-column high-precision polishing machine according to claim 1, wherein: The center positioning assembly includes a center positioning base fixed on the frame, a center cylinder arranged at the upper end of the center positioning base, and a positioning plate driven by the center cylinder to move up and down and rotate. The lower end of the center positioning base is fixedly connected to a sleeve, and a center positioning shaft is installed in the sleeve through a bearing. The upper end of the center positioning shaft is hinged to the center cylinder through a floating joint, and the lower end is connected to the positioning plate; when the center cylinder drives the positioning plate to descend to the lower large plate through the center positioning shaft, the positioning plate is rotated to abut against the inner side walls of the four carrier plates on the lower large plate.

6. The four-column high-precision polishing machine according to claim 5, characterized in that: An inclined groove is axially formed on the wall of the bushing, and a bolt-type roller needle bearing is arranged radially along the bushing. The bolt end of the bolt-type roller needle bearing is radially locked on the central positioning shaft, and the roller end is placed in the inclined groove. When the central cylinder drives the central positioning shaft to move up and down, the roller end of the bolt-type roller needle bearing moves along the inclined groove to drive the central positioning shaft to rotate, and the rotating central positioning shaft drives the positioning disc to rotate.

7. The four-column high-precision polishing machine according to claim 1, wherein: Each outer positioning assembly includes a fixed bottom shell arranged on the frame and located outside the lower large disc, a side cylinder installed on the fixed bottom shell, and a side positioning disc driven by the side cylinder through a side transmission mechanism. When the four carrier discs are placed on the lower large disc, the side positioning disc drives through the side transmission mechanism to approach the corresponding carrier disc from the outside to the inside and abut against the outer wall of the carrier disc.

8. The four-column high-precision polishing machine according to claim 7, wherein: The side transmission mechanism includes a vertically arranged rotating shaft, a horizontally arranged swinging assembly, a rack arranged in the fixed bottom shell and connected to the telescopic rod of the side cylinder through a spherical eye joint, and a gear horizontally arranged in the fixed bottom shell and meshing with the rack. The lower end of the rotating shaft is installed with a deep groove ball bearing arranged in the fixed bottom shell and located above the gear, and the upper end of the rotating shaft is connected to the swinging assembly. The rotating shaft driven by the gear drives the swinging assembly to swing, and the swinging assembly drives the side positioning disc to swing to abut against the outer wall of the carrier disc.

9. The four-column high-precision polishing machine according to claim 2, wherein: The central axis of each upper disc assembly is hollow. An outer tube is arranged in the inner cavity of the central axis, and an inner tube is arranged in the outer tube. The upper ends of the inner and outer tubes are connected to a rotary joint installed at the upper end of the central axis, and the lower ends of the inner and outer tubes are connected to the upper disc. The inner and outer tubes form a circulating cooling system to cool the upper disc. A water pot for collecting grinding fluid is arranged outside the lower large disc, and the water pot is connected to a recycling assembly, and the grinding fluid is recycled and reused through the recycling assembly.

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