Polishing liquid delivery device and polishing liquid supply system

Abstract

The present disclosure provides a polishing liquid conveying device and a polishing liquid supply system. The polishing liquid conveying device comprises a storage container, a conveying pipe, a conveying pump and a flow detection device. A partition plate is arranged in the storage container to divide the internal space of the storage container into a buffer space and a pressure stabilizing space, and the buffer space and the pressure stabilizing space are communicated to form a communicating vessel. The storage container has a liquid outlet communicated with the pressure stabilizing space. One end of the conveying pipe is communicated with the liquid outlet of the storage container, and the other end is communicated with a liquid inlet of a mixing container. The conveying pump is arranged on the conveying pipe to output the liquid in the pressure stabilizing space through the conveying pipe. The flow detection device is arranged on the conveying pipe to detect the flow of the liquid in the conveying pipe. The polishing liquid conveying device and the polishing liquid supply system can improve the matching efficiency and the matching accuracy of the polishing liquid.

Description

Technical Field

[0001] This disclosure relates to the field of grinding technology, and in particular to a grinding fluid delivery device and a grinding fluid supply system. Background Technology

[0002] Polishing slurry is an essential chemical in semiconductor manufacturing processes. It is added to the surface of semiconductor structures during chemical mechanical polishing to planarize the surface and eliminate surface defects. In related technologies, polishing slurry is typically prepared by weighing to achieve the required proportions, but this method results in low precision and efficiency in the mixing process. Summary of the Invention

[0003] The following is an overview of the subject matter described in detail in this disclosure. According to some embodiments of this disclosure, a first aspect provides a grinding fluid delivery device, comprising:

[0004] A liquid storage container, wherein a partition is provided inside the liquid storage container to divide the internal space of the liquid storage container into a buffer space and a pressure stabilizing space, the buffer space and the pressure stabilizing space being connected to form a communicating vessel; the liquid storage container has a liquid outlet communicating with the pressure stabilizing space;

[0005] A delivery pipe, one end of which is connected to the outlet of the liquid storage container and the other end of which is connected to the inlet of the mixing container;

[0006] A delivery pump, disposed on the delivery pipe, is used to output liquid from the pressure-stabilizing space via the delivery pipe; and

[0007] A flow detection device is installed on the delivery pipe to detect the flow rate of the liquid in the delivery pipe.

[0008] According to some embodiments of this disclosure, the two ends of the partition are respectively fixedly connected to the inner sidewall of the liquid storage container, and a first gap is formed between the bottom surface of the partition and the bottom wall of the liquid storage container. The first gap is configured to allow the bottom of the buffer space and the pressure stabilizing space to communicate.

[0009] According to some embodiments of this disclosure, the volume of the buffer space is greater than the volume of the voltage stabilizing space.

[0010] According to some embodiments of this disclosure, the liquid storage container also has a liquid inlet communicating with the buffer space, and the grinding fluid delivery device further includes a liquid inlet pipe and a pressure regulating valve. One end of the liquid inlet pipe is connected to the liquid inlet of the liquid storage container, and the pressure regulating valve is disposed on the liquid inlet pipe.

[0011] According to some embodiments of this disclosure, the liquid storage container is provided with at least one liquid level sensor, which is used to detect the liquid level height information in the buffer space and / or the pressure stabilizing space.

[0012] According to some embodiments of this disclosure, the at least one liquid level sensor includes a first liquid level sensor and a second liquid level sensor disposed on the inner wall of the liquid storage container;

[0013] The first liquid level sensor is located near the bottom wall of the liquid storage container, and the height of the first liquid level sensor relative to the bottom wall of the liquid storage container is greater than the height of the bottom surface of the partition relative to the bottom wall of the liquid storage container; the first liquid level sensor is configured to be triggered when the liquid level in the buffer space is lower than the minimum supply standard.

[0014] The second liquid level sensor is positioned at a height greater than that of the first liquid level sensor relative to the bottom wall of the liquid storage container, and the height of the second liquid level sensor relative to the bottom wall of the liquid storage container is less than that of the top surface of the partition relative to the bottom wall of the liquid storage container. The second liquid level sensor is configured to be triggered when the liquid level in the buffer space reaches the supply standard.

[0015] According to some embodiments of this disclosure, the at least one liquid level sensor further includes a third liquid level sensor disposed on the inner wall of the liquid storage container, the third liquid level sensor being close to the top wall of the liquid storage container, and the height of the third liquid level sensor relative to the bottom wall of the liquid storage container being greater than the height of the second liquid level sensor relative to the bottom wall of the liquid storage container, and less than the height of the top surface of the partition relative to the bottom wall of the liquid storage container, the third liquid level sensor being configured to be triggered when the liquid level in the buffer space is higher than the maximum supply standard.

[0016] According to some embodiments of this disclosure, the liquid storage container further has an exhaust port that is respectively connected to the buffer space and the pressure stabilizing space. The exhaust port is located on the top wall of the liquid storage container. A second gap is formed between the top surface of the partition and the top wall of the liquid storage container. The second gap is respectively connected to the exhaust port, the buffer space and the pressure stabilizing space.

[0017] According to some embodiments of this disclosure, the grinding fluid delivery device further includes a three-way valve and a reflux pipe. The inlet of the three-way valve is connected to the outlet of the delivery pipe. One of the two outlets of the three-way valve is connected to the inlet of the mixing container. The other outlet of the three-way valve is connected to the inlet of the reflux pipe. The outlet of the reflux pipe is connected to the pressure stabilizing space.

[0018] According to some embodiments of this disclosure, a second aspect of this disclosure provides a grinding slurry supply system, including a mixing container and at least one of the above-described grinding slurry delivery devices, the grinding slurry delivery device being connected to the mixing container.

[0019] The grinding slurry delivery device and supply system disclosed herein buffer the liquid entering the storage container through a buffer space and a baffle, reducing the flow rate of the liquid entering the buffer space and balancing pressure changes, thereby minimizing pressure fluctuations in the buffer space. Simultaneously, since the buffer space and the pressure-stabilizing space form a communicating vessel, based on the principle of communicating vessels, the liquid levels in the pressure-stabilizing space and the buffer space are the same, further reducing or eliminating pressure fluctuations in the pressure-stabilizing space. This stabilizes the pressure at the inlet of the delivery pump, reduces pressure fluctuations in the liquid delivered from the pressure-stabilizing space to the delivery pipe, improves the accuracy of the total liquid volume delivered to the mixing container and the detection accuracy of the flow detection device installed on the delivery pipe, thus improving the mixing accuracy of the grinding slurry. Furthermore, this disclosure uses a flow detection device to measure the liquid flow rate in the delivery pipe and determine the proportions of each component constituting the grinding slurry, eliminating the need to weigh each component, saving time spent weighing the components and maintaining the weighing device, and improving the mixing efficiency of the grinding slurry. Attached Figure Description

[0020] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of these embodiments. In these drawings, similar reference numerals are used to denote similar elements. The drawings described below are some embodiments of the present disclosure, but not all embodiments. Other drawings will be readily available to those skilled in the art based on these drawings without inventive effort.

[0021] Figure 1 This is a schematic diagram of the structure of a polishing slurry supply system in related technologies;

[0022] Figure 2 This is a schematic diagram of the structure of an abrasive slurry delivery device according to an exemplary embodiment;

[0023] Figure 3 yes Figure 2 Cross-sectional view of the intermediate liquid storage container;

[0024] Figure 4 These are liquid pressure fluctuation curves at the inlet of a pressure regulating valve and pressure fluctuation curves at the inlet of a delivery pump, as illustrated in an exemplary embodiment.

[0025] Figure 5This is a schematic diagram of a grinding fluid supply system according to an exemplary embodiment.

[0026] Figure label:

[0027] 100. Grinding fluid delivery device;

[0028] 1. Liquid storage container;

[0029] 101. Buffer space; 102. Voltage stabilization space;

[0030] 2. Partition;

[0031] 201, First surface; 202, Second surface;

[0032] 3. Delivery pipe; 4. Delivery pump; 5. Flow detection device; 6. First valve; 7. First gap; 8. Through hole; 9. Inlet pipe; 10. Pressure regulating valve;

[0033] 11. Liquid level sensor;

[0034] 1101, First liquid level sensor; 1102, Second liquid level sensor; 1103, Third liquid level sensor;

[0035] 12. Exhaust port; 13. Second clearance; 14. Exhaust pipe; 15. Exhaust valve; 16. Three-way valve; 17. Return pipe;

[0036] 18. Second valve; 19. Main delivery pipe; 20. Mixing container; 21. Weighing device; 22. Valve. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions in the disclosed embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this disclosure can be arbitrarily combined with each other.

[0038] In the fabrication of semiconductor structures, chemical-mechanical polishing (CMP) equipment is typically used to polish the semiconductor surface, removing impurities such as oxide layers, silicides, and metal residues to achieve surface planarization and a defect-free finish. During CMP, a slurry supply system is required to supply slurry to the equipment to improve polishing effectiveness and efficiency. Since polishing semiconductor structures is an extremely delicate process, the precise proportions of each component in the slurry preparation are crucial.

[0039] like Figure 1 As shown, in related technologies, the grinding slurry supply system includes multiple delivery pipes 3, a mixing container 20, and a weighing device 21. Each delivery pipe 3 is connected to the mixing container 20, and each delivery pipe 3 is used to deliver the raw materials constituting each component of the grinding slurry to the mixing container 20. Each delivery pipe 3 is equipped with a valve 22 for controlling the opening and closing of the delivery pipe. The mixing container 20 is mounted on the weighing device 21, which is used to weigh each component of the grinding slurry delivered to the mixing container 20. To ensure the accuracy of the weighing device 21, the raw materials constituting the grinding slurry need to be added to the mixing container 20 sequentially. That is, only after the weight of one type of raw material delivered to the mixing container 20 has been measured can another type of raw material be injected into the mixing container 20. This measurement process is time-consuming, resulting in low mixing efficiency of the grinding slurry. Moreover, the weighing device 21 requires regular maintenance, during which time the grinding slurry cannot be supplied, further reducing the mixing efficiency of the grinding slurry. In addition, the weighing device 21 has high requirements for levelness and vibration. If the levelness and / or vibration of the weighing device 21 do not meet the requirements, the weighing result will be inaccurate, resulting in low mixing accuracy of the grinding fluid.

[0040] Based on this, the present disclosure provides a grinding slurry delivery device and a grinding slurry supply system. The system uses the buffer space and pressure stabilizing space of the storage container, which forms a communicating vessel, to buffer and reduce the pressure of the liquid entering the storage container. A delivery pump and a flow detection device installed on the delivery pipe measure the components of the grinding slurry, thereby reducing pressure fluctuations in the storage container, ensuring stable liquid delivery by the delivery pump, improving the measurement accuracy of the flow detection device, and ultimately improving the mixing precision of the grinding slurry. Furthermore, all components of the grinding slurry can be simultaneously delivered to the mixing container, eliminating the time required for weighing the components and maintaining the weighing device, thus improving the mixing efficiency of the grinding slurry.

[0041] like Figure 2As shown, this embodiment of the present disclosure provides a grinding slurry conveying device 100 for conveying raw materials that constitute the various components of the grinding slurry. The raw materials can be liquids or solid-liquid mixtures. The grinding slurry conveying device 100 includes a storage container 1 and a partition 2. The storage container receives and stores the grinding slurry raw materials supplied by a raw material source. For example, the raw material source can be a raw material box, raw material barrel, or other device or container for storing raw materials. The partition 2 is disposed inside the storage container 1, dividing the internal space of the storage container 1 into a buffer space 101 and a pressure-stabilizing space 102. The buffer space 101 and the pressure-stabilizing space 102 are connected, forming a communicating vessel. The storage container 1 has an inlet and an outlet. The inlet is connected to the buffer space 101, allowing the grinding slurry raw materials supplied by the raw material source to enter the buffer space 101 of the storage container 1. The outlet is connected to the pressure-stabilizing space 102 of the storage container 1, allowing the liquid in the pressure-stabilizing space 102 to flow out through the outlet.

[0042] When the raw material source supplies any component of the grinding slurry to the storage container 1, the component liquid enters the buffer space 101 of the storage container 1 through the inlet. The buffer space 101 reduces the liquid flow rate and balances pressure changes, thus minimizing or reducing pressure fluctuations within the buffer space 101. Since the buffer space 101 and the pressure stabilizing space 102 are connected by a communicating vessel, the liquid entering the buffer space 101 also enters the pressure stabilizing space 102, and their liquid levels are the same. The pressure stabilizing space 102 further reduces pressure fluctuations, thereby stabilizing the pressure at the inlet of the delivery pump 4, which will be described later, and consequently, stabilizing the delivery rate of the delivery pump 4.

[0043] The grinding fluid delivery device 100 also includes a delivery pipe 3, a delivery pump 4, and a flow detection device 5. (Continue to refer to...) Figure 2 and Figure 3 The inlet end of the delivery pipe 3 is connected to the outlet of the storage container 1, and the outlet end of the delivery pipe 3 is connected to the inlet of the mixing container 20.

[0044] The liquid in the pressure-stabilizing space 102 of the storage container 1 is transported to the mixing container 20 via the delivery pipe 3. The delivery pump 4 is located on the delivery pipe 3, and can output the liquid from the storage container 1 to the mixing container 20 via the delivery pipe 3. (Continue to refer to...) Figure 2 The pressure stabilizing space 102 and the buffer space 101 are interconnected to form a communicating vessel. The liquid entering the liquid storage container 1 is buffered by the buffer space 101 and pressure stabilized by the pressure stabilizing space 102 before being supplied to the inlet of the delivery pump 4. Since the pressure fluctuation of the liquid in the pressure stabilizing space 102 is small or basically does not fluctuate, the pressure of the liquid at the inlet of the delivery pump 4 is stable, thereby making the delivery volume of the delivery pump 4 constant, and thus improving the metering accuracy of the flow detection device 5.

[0045] refer to Figure 2 and Figure 3 The flow detection device 5 is located on the delivery pipe 3. As an example, the flow detection device 5 is located downstream of the delivery pump 4, that is, the flow detection device 5 is positioned between the delivery pump 4 and the mixing container 20. The flow detection device 5 is used to detect the flow rate of the liquid in the delivery pipe 3. The flow detection device 5 may include a flow meter or a flow sensor.

[0046] When the grinding slurry conveying device 100 provided in this embodiment is used to convey grinding slurry raw materials, the grinding slurry raw materials at the raw material source end enter the buffer space 101 of the storage container 1 through the liquid inlet of the storage container 1. The pressure fluctuation of the liquid at the raw material source end can be referenced. Figure 4 The N-curve in the figure shows a significant pressure fluctuation. After being buffered by the buffer space 101, the liquid enters the pressure stabilizing space 102, which forms a communication channel with the buffer space 101, for further pressure stabilization to reduce pressure fluctuations. After stabilization by the pressure stabilizing space 102, the pressure fluctuation at the inlet of the delivery pump 4 can be referenced. Figure 4 The M-curve in the pressure curve shows minimal or no pressure fluctuations, ensuring a constant flow of liquid in the pressure-stabilizing space 102 through the delivery pipe 3 under the action of the delivery pump 4, with precise metering by the flow detection device 5 located on the delivery pipe 3. When the cumulative flow measured by the flow detection device 5 reaches a preset value, the delivery of liquid to the mixing container 20 is stopped.

[0047] In this embodiment, the liquid entering the liquid storage container 1 is buffered by the buffer space 101 and the partition 2, which reduces the flow rate of the liquid entering the buffer space 101 and balances the pressure changes of the liquid, thereby reducing the pressure fluctuation of the liquid in the buffer space 101. At the same time, since the buffer space 101 and the pressure stabilizing space 102 can form a communicating vessel, based on the principle of communicating vessels, the liquid level in the pressure stabilizing space 102 and the buffer space 101 is the same, which can further reduce or eliminate the pressure fluctuation of the liquid in the pressure stabilizing space 102. This stabilizes the pressure at the inlet of the delivery pump 4, reduces the pressure fluctuation of the liquid delivered from the pressure stabilizing space 102 to the delivery pipe, improves the accuracy of the total amount of liquid delivered to the mixing container 20 of the grinding slurry supply system and the detection accuracy of the flow detection device 5 installed on the delivery pipe 3, thereby improving the mixing accuracy of the grinding slurry. Furthermore, this disclosure measures the flow rate of the liquid in the delivery pipe 3 by using the flow detection device 5 to determine the proportion of each component constituting the grinding fluid. This eliminates the need to weigh each component of the grinding fluid, saving the time spent weighing each component and maintaining the weighing device, thus improving the mixing efficiency of the grinding fluid.

[0048] It is understood that the raw materials for the polishing slurry may include, for example, the polishing slurry stock solution, an oxidant, and a solvent. The polishing slurry stock solution may contain, for example, silicon dioxide (SiO2) particles. The oxidant may be, for example, hydrogen peroxide (H2O2), nitric acid (HNO3), potassium periodate (KIO4), hypochlorous acid (HClO), peroxydisulfuric acid (H2S2O8), or ozone (O3). The solvent may be, for example, distilled water, deionized water, or high-purity water.

[0049] In the above embodiments, the buffer space 101 and the voltage stabilizing space 102 constitute a communicating vessel. There are various ways to form a communicating vessel; in some embodiments, such as... Figure 2 As shown, a through hole 8 is provided in the middle of the partition 2, which communicates with the buffer space 101 and the pressure stabilizing space 102, thus forming a communicating vessel between the buffer space 101 and the pressure stabilizing space 102. In some embodiments, a first gap 7 is formed between the bottom surface of the partition 2 and the bottom wall of the liquid storage container 1, or in other words, the bottom surface of the partition 2 and the bottom wall of the liquid storage container 1 are separated by a certain distance to form a first gap 7, which communicates with the buffer space 101 and the pressure stabilizing space 102, thus forming a communicating vessel between the buffer space 101 and the pressure stabilizing space 102. In still other embodiments, while the partition 2 has a through hole 8 in the middle, a first gap 7 is formed between the bottom surface of the partition 2 and the bottom wall of the liquid storage container 1. The through hole 8 communicates with the buffer space 101 and the pressure stabilizing space 102, and the first gap 7 communicates with the buffer space 101 and the pressure stabilizing space 102, thus forming a communicating vessel between the buffer space 101 and the pressure stabilizing space 102 through the through hole 8 and the first gap 7.

[0050] In some embodiments, continue to refer to Figure 2 and combined Figure 3 The two ends of the partition 2 are fixedly connected to the inner sidewall of the liquid storage container 1 to ensure the stability of the partition. The two ends of the partition 2 can refer to... Figure 3 At the left and right ends of the partition 2, the first gap 7 is located between the bottom surface of the partition 2 and the bottom wall of the liquid storage container 1, and the buffer space 101 and the pressure stabilizing space 102 are connected through the first gap 7.

[0051] As an example, such as Figure 2 As shown, the partition 2 may have a first surface 201 and a second surface 202 that are arranged opposite to each other. The first surface 201 is located in the buffer space 101, and the second surface 202 is located in the pressure stabilizing space 102. The through hole 8 is arranged through the first surface 201 and the second surface 202.

[0052] In some embodiments, continue to refer to Figure 2The buffer space 101 and the pressure-stabilizing space 102 on both sides of the partition 2 are configured such that the volume of the buffer space 101 is greater than the volume of the pressure-stabilizing space 102. It should be noted that the volume refers to the volume of liquid that the buffer space 101 or the pressure-stabilizing space 102 can hold. Since the buffer space 101 and the pressure-stabilizing space 102 form a communicating vessel, the liquid level in the buffer space 101 can be the same as the liquid level in the pressure-stabilizing space 102. By setting the volume of the buffer space 101 to be greater than the volume of the pressure-stabilizing space 102, the buffer space 101 can hold more liquid. Therefore, the buffer space 101 can better provide pressure-stabilized liquid to the pressure-stabilizing space 102.

[0053] In some embodiments, reference Figure 2 The grinding slurry conveying device 100 is also provided with a liquid inlet pipe 9 connected to the liquid inlet. The liquid inlet end of the liquid inlet pipe 9 is connected to the raw material source end, and the liquid outlet end of the liquid inlet pipe 9 is connected to the liquid inlet of the liquid storage container 1, so as to convey liquid into the buffer space 101 of the liquid storage container 1 through the liquid inlet pipe 9.

[0054] A pressure regulating valve 10 can be installed on the inlet pipe 9. The outlet of the pressure regulating valve 10 is connected to the inlet of the liquid storage container 1. The pressure regulating valve 10 can be used to maintain a stable liquid pressure at the outlet. When the liquid pressure supplied from the raw material source fluctuates greatly, the pressure of the liquid at the inlet of the liquid storage container 1 can be adjusted by using the pressure regulating valve 10 to reduce or eliminate pressure fluctuations in the liquid entering the buffer space 101.

[0055] It is understandable that when the liquid pressure supplied from the raw material source fluctuates little, the pressure regulating valve 10 may not be installed on the inlet pipe 9, or the pressure regulating valve may not work.

[0056] The pressure regulating valve 10 works in conjunction with the buffer space 101 to ensure that the pressure of the liquid in the pressure regulating space 102 is stable or does not fluctuate, further ensuring that the pressure of the liquid at the inlet of the delivery pump 4 is stable, so that the delivery pump 4 can deliver liquid stably and improve the metering accuracy of the flow detection device 5.

[0057] In some embodiments, such as Figure 2 As shown, the grinding fluid delivery device 100 also includes at least one liquid level sensor 11. When one liquid level sensor 11 is provided, the liquid level sensor 11 can be installed in the buffer space 101 of the liquid storage container 1 to detect the liquid level height information of the buffer space 101. Alternatively, the liquid level sensor 11 can be installed in the pressure stabilizing space 102 of the liquid storage container to detect the liquid level height information of the pressure stabilizing space 102.

[0058] When multiple liquid level sensors 11 are provided, the multiple liquid level sensors 11 can be respectively installed in the buffer space 101 and the pressure stabilizing space 102 of the liquid storage container 1, so as to simultaneously detect the liquid level height information of the pressure stabilizing space 102 and the buffer space 101.

[0059] Continue to refer to Figure 2 In some embodiments, at least one liquid level sensor 11 may include a first liquid level sensor 1101 and a second liquid level sensor 1102. The first liquid level sensor 1101 and the second liquid level sensor 1102 may both be disposed in the buffer space 101, or the first liquid level sensor 1101 and the second liquid level sensor 1102 may both be disposed in the pressure stabilizing space 102.

[0060] As an example, the first liquid level sensor 1101 can be disposed on the inner wall of the liquid storage container 1, close to the bottom wall of the liquid storage container 1, and the height of the first liquid level sensor 1101 relative to the bottom wall of the liquid storage container 1 is greater than the height of the bottom surface of the partition 2 relative to the bottom wall of the liquid storage container 1. Along a direction perpendicular to the bottom wall of the liquid storage container 1, the distance between the first liquid level sensor 1101 and the bottom surface of the partition 2 can have a first dimension, the ratio of the first dimension to the height of the partition 2 itself can be less than or equal to 1 / 3. The first liquid level sensor 1101 is configured to be triggered when the liquid level in the buffer space 101 is lower than the minimum supply standard. When the first liquid level sensor 1101 is triggered, the delivery pump 4 can be turned off to stop the delivery of liquid to the mixing container 20, and the pressure regulating valve 10 can be opened to supply liquid to the liquid storage container 1. Exemplarily, the minimum supply standard liquid level height information is greater than the height between the bottom surface of the partition 2 and the bottom wall of the liquid storage container 1, avoiding the problem of liquid flow interruption in the delivery pipe 3.

[0061] The second liquid level sensor 1102 can be disposed on the inner wall of the liquid storage container 1. The height of the second liquid level sensor 1102 relative to the bottom wall of the liquid storage container 1 is less than the height of the top surface of the partition 2 relative to the bottom wall of the liquid storage container, and the height of the second liquid level sensor 1102 relative to the bottom wall of the liquid storage container is greater than the height of the first liquid level sensor 1101 relative to the bottom wall of the liquid storage container. Along the direction perpendicular to the bottom wall of the liquid storage container 1, the distance between the second liquid level sensor 1102 and the bottom surface of the partition 2 can have a second dimension, and the ratio of the second dimension to the height of the partition 2 itself can be 1 / 3-1. The second liquid level sensor 1102 is configured to be triggered when the liquid level in the buffer space 101 reaches the supply standard. Specifically, the second liquid level sensor 1102 can be triggered after a preset time when the liquid level in the buffer space 101 reaches the supply standard. When the second liquid level sensor 1102 is triggered, it can be assumed that the total amount of liquid in the storage container 1 is greater than or equal to the cumulative flow rate of liquid to be transported by the delivery pipe 3. In other words, the total amount of liquid in the storage container 1 needs to ensure that there will be no interruption in the flow during the subsequent liquid transport process by the delivery pipe 3. At this time, the delivery pump 4 can be controlled to operate to transport liquid into the mixing container 20. At the same time, the pressure regulating valve 10 can be controlled to close to avoid resource waste caused by excessive liquid in the storage container 1 that cannot be used. For example, the maximum liquid level height information of the supply standard should not exceed the height between the top surface of the liquid and the top surface of the partition 2 relative to the bottom wall of the storage container 1, so as to ensure that the buffer space 101 and the pressure regulating space 102 can always form a communication, thereby ensuring the pressure stability of the liquid in the pressure regulating space 102.

[0062] It should be noted that when the partition 2 is provided with a through hole 8, the standard liquid level information is greater than the height between the top surface of the through hole 8 and the bottom wall of the storage container, so as to ensure that the buffer space 101 and the pressure stabilizing space 102 can form a communicating vessel. When the grinding fluid delivery device 100 is provided with two vents as described below and the top surface of the partition 2 is in contact with the top wall of the storage container 1, the standard liquid level information can be less than or equal to the height between the top and bottom walls of the storage container 1.

[0063] Based on the above embodiments, continue to refer to Figure 2In another embodiment of this disclosure, at least one liquid level sensor 11 further includes a third liquid level sensor 1103. The third liquid level sensor 1103 can be disposed on the inner wall of the liquid storage container 1. The height of the third liquid level sensor 1103 relative to the bottom wall of the liquid storage container 1 can be greater than the height of the second liquid level sensor 1102 relative to the bottom wall of the liquid storage container 1, and less than the height of the top surface of the partition 2 relative to the bottom wall of the liquid storage container 1. The third liquid level sensor 1103 can be disposed close to the top wall of the liquid storage container 1. The third liquid level sensor 1103 is configured to be triggered when the liquid level in the buffer space 101 is higher than the maximum supply standard. When the third liquid level sensor 1103 is triggered, the pressure regulating valve 10 can be closed, the liquid inlet pipe 9 can stop injecting liquid into the buffer space 101, and the delivery pump 4 can be operated to deliver liquid to the mixing container 20. After the delivery process is completed, the grinding slurry delivery device 100 can be inspected to ensure the safety and stability of the grinding slurry delivery device 100. For example, the maximum liquid level supply standard can be the height between the top surface of the partition 2 and the bottom wall of the liquid storage container 1.

[0064] It should be noted that when the grinding fluid delivery device 100 is provided with two exhaust ports 12 as described below and the top surface of the partition plate 2 is in contact with the top wall of the liquid storage container 1, the maximum liquid level supply standard can be the height between the top and bottom walls of the liquid storage container 1.

[0065] In some embodiments, reference Figure 2 The liquid storage container 1 is also provided with an exhaust port 12. The exhaust port 12 can be located on the top wall of the liquid storage container 1. The exhaust port 12 is connected to the buffer space 101 and the pressure stabilizing space 102. The exhaust port 12 is used to discharge the gas occupied by the liquid in the liquid storage container 1 when the liquid inlet pipe 9 delivers liquid into the liquid storage container 1. This avoids the problem of excessive internal pressure of the liquid storage container 1 caused by the compression of gas when delivering liquid into the liquid storage container 1, improves the safety of the grinding liquid delivery device 100, and ensures the accuracy of the total amount of liquid delivered to the mixing container 20.

[0066] Based on the above embodiments, continue to refer to Figure 2In a specific embodiment of this disclosure, a second gap 13 is provided between the top surface of the partition 2 and the top wall of the liquid storage container 1. In this embodiment, only one vent 12 may be provided. The vent 12 is configured to communicate with the buffer space 101 and the pressure stabilizing space 102 through the second gap 13. When liquid is delivered into the liquid storage container 1 through the liquid inlet pipe 9, the vent 12 can simultaneously vent the pressure stabilizing space 102 and the buffer space 101. When liquid is delivered into the mixing container 20 through the delivery pipe 3, the vent 12 can simultaneously inject gas into the pressure stabilizing space 102 and the buffer space 101, ensuring that the gas pressure inside the liquid storage container 1 is always consistent with the external gas pressure, thereby reducing the error when the delivery pump 4 pumps liquid into the delivery pipe 3.

[0067] In other embodiments, multiple exhaust ports 12 can be provided. For example, two exhaust ports 12 can be provided, and the two exhaust ports 12 are respectively connected to the buffer space 101 or the pressure stabilizing space 102. In this case, the top surface of the partition 2 can be connected to the top wall of the liquid storage container 1, so as to increase the effective volume of the buffer space 101 and the pressure stabilizing space 102 when the total volume of the liquid storage container 1 is constant, thereby increasing the total amount of liquid that the buffer space 101 and the pressure stabilizing space 102 can hold.

[0068] It should be noted that, under the condition of good stability, the thickness of the partition 2 can be set as thin as possible to reduce the internal space occupied by the partition 2 in the liquid storage container 1, thereby increasing the volume of the buffer space 101 and the pressure stabilizing space 102. For example, the material of the partition 2 can be a corrosion-resistant metal such as titanium, or a corrosion-resistant alloy such as stainless steel, nickel alloy, or copper alloy.

[0069] refer to Figure 2 and combined Figure 3 The grinding slurry delivery device 100 may further include an exhaust pipe 14 connected at one end to the exhaust port 12. An exhaust valve 15 may be installed on the exhaust pipe 14. When the grinding slurry delivery device 100 is running, the exhaust valve 15 can be opened to allow gas to enter and exit the storage container 1 through the exhaust pipe 14. When the grinding slurry delivery device 100 is not running, the exhaust valve 15 can be closed to prevent external impurities from entering the storage container 1 through the exhaust pipe 14, thereby reducing the possibility of contamination of the liquid in the storage container 1. For example, the exhaust valve 15 may be a pneumatic regulating valve to automatically open and close under the action of the pressure difference between the inside and outside of the storage container 1.

[0070] In some embodiments, such as Figure 2As shown, the inlet end of the delivery pipe 3 can be located near the bottom wall of the storage container 1. The grinding slurry delivery device 100 also includes a three-way valve 16 and a return pipe 17. The inlet of the three-way valve 16 is connected to the outlet end of the delivery pipe 3. One of the two outlets of the three-way valve 16 is connected to the inlet of the mixing container 20. The other outlet of the three-way valve 16 is connected to the inlet end of the return pipe 17. The outlet end of the return pipe 17 is connected to the pressure stabilizing space 102. As mentioned above, when the raw material of the grinding slurry is a solid-liquid mixture, by setting the return pipe 17, the solid-liquid mixture with a higher concentration at the bottom of the storage container 1 can be transported to the top of the storage container 1 and remixed with the solid-liquid mixture with a lower concentration at the top of the storage container 1. This process is repeated to make the concentration of the solid-liquid mixture in the storage container 1 more uniform, so as to ensure that the total amount of solid particles delivered to the mixing container 20 meets the expectations, thereby further improving the mixing accuracy of the grinding slurry.

[0071] In some embodiments, continue to refer to Figure 2 A first valve 6 can also be installed on the delivery pipe 3. For example, the first valve 6 can be installed between the three-way valve 16 and the mixing container 20. When the cumulative flow through the flow detection device 5 reaches a preset value, the first valve 6 can be closed and the operation of the delivery pump 4 can be stopped to accurately control the total amount of liquid delivered to the mixing container 20.

[0072] A second valve 18 can be installed on the return pipe 17 to control the opening and closing of the return pipe 17. Before conveying liquid to the mixing container 20, the first valve 6 can be closed and the second valve 18 can be opened so that the return pipe 17 can mix the liquid in the storage container 1. When it is necessary to convey liquid to the mixing container 20, the second valve 18 can be closed and the first valve 6 can be opened so that the liquid measured by the flow detection device 5 can be directly conveyed to the mixing container 20.

[0073] It should be noted that the above-mentioned grinding slurry conveying device 100 can be used not only to convey the raw materials of each component forming the grinding slurry, but also to convey the raw materials of each component forming other mixtures, such as raw materials for forming mixtures of dyes, drugs, etc. One or more grinding slurry conveying devices 100 can be provided. When only one grinding slurry conveying device 100 is provided, the raw materials of each component of the grinding slurry can be conveyed sequentially through this device. The grinding slurry stock solution, oxidant, and iron-containing mixture can be injected into the storage container 1 first, and the solvent can be injected into the storage container 1 last to clean the inlet pipe 9. When multiple grinding slurry conveying devices 100 are provided, the grinding slurry stock solution, oxidant, solvent, iron-containing compound, etc., used to prepare the grinding slurry can be injected into the storage container 1 simultaneously to further improve the feeding efficiency of the mixing container 20 and the mixing efficiency of the grinding slurry.

[0074] An exemplary embodiment of this disclosure also provides a grinding fluid supply system, such as Figure 5 As shown, the grinding slurry supply system includes a mixing container 20 and at least one grinding slurry delivery device 100 provided in the above embodiments, wherein the grinding slurry delivery device 100 is connected to the mixing container 20.

[0075] Taking a grinding slurry whose raw materials include grinding slurry stock solution, oxidant, and solvent as an example, the grinding slurry supply system may include three grinding slurry delivery devices 100. These three devices 100 are respectively used to supply the grinding slurry stock solution, oxidant, and solvent to the mixing container 20. Each of the three delivery devices 100 is connected to one of three raw material sources, which are respectively used to store the grinding slurry stock solution, oxidant, and solvent.

[0076] When using the grinding slurry supply system provided in this embodiment to transport grinding slurry raw materials, refer to Figure 5 and combined Figure 2 Three grinding slurry delivery devices 100 can simultaneously deliver grinding slurry raw materials to the mixing container 20. The grinding slurry raw materials from the three raw material sources enter the buffer space 101 of the storage container 1 of the three grinding slurry delivery devices 100 through the inlet of their respective storage container 1. After being buffered by the buffer space 101, the liquid enters the pressure stabilizing space 102, which forms a communication with the buffer space 101, for pressure stabilization to further reduce pressure fluctuations. After being stabilized by the pressure stabilizing space 102, the liquid in the pressure stabilizing space 102 continues to be transported in the delivery pipe 3 under the action of the delivery pump 4. The flow detection device 5 located on the delivery pipe 3 performs precise measurement and is finally delivered to the mixing container 20. When the cumulative flow measured by the flow detection device 5 reaches the preset value, the delivery of the liquid to the mixing container 20 is stopped.

[0077] In this embodiment, the liquid entering the liquid storage container 1 is buffered by the buffer space 101 and the partition 2, which reduces the flow rate of the liquid entering the buffer space 101 and balances the pressure changes of the liquid, thereby reducing the pressure fluctuation of the liquid in the buffer space 101. At the same time, since the buffer space 101 and the pressure stabilizing space 102 can form a communicating vessel, based on the principle of communicating vessels, the liquid level in the pressure stabilizing space 102 and the buffer space 101 is the same, which can further reduce or eliminate the pressure fluctuation of the liquid in the pressure stabilizing space 102. This stabilizes the pressure at the inlet of the delivery pump 4, reduces the pressure fluctuation of the liquid delivered from the pressure stabilizing space 102 to the delivery pipe, improves the accuracy of the total amount of liquid delivered to the mixing container 20 of the grinding slurry supply system and the detection accuracy of the flow detection device 5 installed on the delivery pipe 3, thereby improving the mixing accuracy of the grinding slurry. Furthermore, this disclosure uses the flow detection device 5 to measure the liquid flow rate in the delivery pipe 3 and determine the proportion of each component constituting the grinding slurry. This eliminates the need to weigh each component, saving time spent weighing the components and maintaining the weighing device, thus improving the mixing efficiency of the grinding slurry. Additionally, supplying the grinding slurry raw materials to the mixing container 20 via at least one grinding slurry delivery device 100 effectively improves the mixing efficiency of the grinding slurry.

[0078] In some embodiments, the delivery pipes 3 of each slurry delivery device 100 can be connected to the mixing container 20. Alternatively, the outlet end of the delivery pipe 3 of each slurry delivery device 100 can be connected to the inlet end of the delivery main pipe 19, and the outlet end of the delivery main pipe 19 can be connected to the inlet of the mixing container 20, which simplifies the pipeline layout of the slurry supply system.

[0079] It is understandable that the diameter of the main conveying pipe 19 can be greater than the sum of the diameters of the conveying pipes 3 of each grinding fluid conveying device 100.

[0080] The various embodiments or implementation methods described in this specification are presented in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be referred to each other.

[0081] In the description of this specification, references to the terms "embodiment," "exemplary embodiment," "some implementation," "illustrated implementation," "example," etc., refer to specific features, structures, materials, or characteristics described in connection with an implementation or example that are included in at least one implementation or example of this disclosure.

[0082] In this specification, the illustrative expressions of the terms used do not necessarily refer to the same implementation or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more implementations or examples.

[0083] In the description of this disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0084] It is understood that the terms "first," "second," etc., as used in this disclosure may be used to describe various structures, but these structures are not limited by these terms. These terms are only used to distinguish one structure from another.

[0085] In one or more accompanying drawings, the same elements are represented by similar reference numerals. For clarity, many parts in the drawings are not drawn to scale. Furthermore, certain well-known parts may not be shown. For simplicity, a structure obtained after several steps may be depicted in a single drawing. Many specific details of this disclosure, such as the structure, materials, dimensions, processing methods, and techniques of the devices, are described below to provide a clearer understanding of the disclosure. However, as those skilled in the art will understand, this disclosure may be implemented without adhering to these specific details.

[0086] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure, and are not intended to limit them. Although this disclosure has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this disclosure.

Claims

1. A grinding fluid delivery device, characterized in that, include: A liquid storage container, wherein a partition is provided inside the liquid storage container to divide the internal space of the liquid storage container into a buffer space and a pressure stabilizing space, the buffer space and the pressure stabilizing space being connected to form a communicating vessel; the liquid storage container has a liquid outlet communicating with the pressure stabilizing space; A delivery pipe, one end of which is connected to the outlet of the liquid storage container and the other end of which is connected to the inlet of the mixing container; A delivery pump, which is mounted on the delivery pipe, is used to output the liquid in the pressure stabilization space through the delivery pipe; as well as A flow detection device is installed on the delivery pipe and is used to detect the flow rate of the liquid in the delivery pipe; The two ends of the partition are fixedly connected to the inner sidewall of the liquid storage container, and there is a first gap between the bottom surface of the partition and the bottom wall of the liquid storage container. The first gap is configured to allow the bottom of the buffer space and the pressure stabilizing space to communicate. The volume of the buffer space is greater than the volume of the voltage stabilizing space; The liquid storage container also has a liquid inlet communicating with the buffer space, and the grinding slurry delivery device further includes a liquid inlet pipe and a pressure regulating valve. The liquid inlet pipe is communicating with the liquid inlet of the liquid storage container, and the pressure regulating valve is disposed on the liquid inlet pipe. The liquid storage container also has an exhaust port that is connected to the buffer space and the pressure stabilizing space respectively, and the exhaust port is located on the top wall of the liquid storage container; There is a second gap between the top surface of the partition and the top wall of the liquid storage container, and the second gap is connected to the vent, the buffer space and the pressure stabilizing space respectively; The grinding fluid delivery device further includes a three-way valve and a reflux pipe. The inlet of the three-way valve is connected to the outlet of the delivery pipe. One of the two outlets of the three-way valve is connected to the inlet of the mixing container. The other outlet of the three-way valve is connected to the inlet of the reflux pipe. The outlet of the reflux pipe is connected to the pressure stabilizing space.

2. The grinding fluid conveying device according to claim 1, characterized in that, The liquid storage container is equipped with at least one liquid level sensor, which is used to detect the liquid level height information in the buffer space and / or the pressure stabilizing space.

3. The grinding fluid conveying device according to claim 2, characterized in that, The at least one liquid level sensor includes a first liquid level sensor and a second liquid level sensor disposed on the inner wall of the liquid storage container; The first liquid level sensor is located near the bottom wall of the liquid storage container, and the height of the first liquid level sensor relative to the bottom wall of the liquid storage container is greater than the height of the bottom surface of the partition relative to the bottom wall of the liquid storage container; the first liquid level sensor is configured to be triggered when the liquid level in the buffer space is lower than the minimum supply standard. The second liquid level sensor is positioned at a height greater than that of the first liquid level sensor relative to the bottom wall of the liquid storage container, and the height of the second liquid level sensor relative to the bottom wall of the liquid storage container is less than that of the top surface of the partition relative to the bottom wall of the liquid storage container. The second liquid level sensor is configured to be triggered when the liquid level in the buffer space reaches the supply standard.

4. The grinding fluid conveying device according to claim 3, characterized in that, The at least one liquid level sensor further includes a third liquid level sensor disposed on the inner wall of the liquid storage container. The third liquid level sensor is close to the top wall of the liquid storage container, and the height of the third liquid level sensor relative to the bottom wall of the liquid storage container is greater than the height of the second liquid level sensor relative to the bottom wall of the liquid storage container, but less than the height of the top surface of the partition relative to the bottom wall of the liquid storage container. The third liquid level sensor is configured to be triggered when the liquid level in the buffer space is higher than the maximum supply standard.

5. A grinding fluid supply system, characterized in that, It includes a mixing container and at least one grinding slurry delivery device as described in any one of claims 1-4, wherein the grinding slurry delivery device is in communication with the mixing container.

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