Laser power measurement device and method

Abstract

The present invention provides a laser power measurement device and method. The device includes: an adapter, which is used to adjust and fix the output head of the laser to be measured, so that the output light reaches the predetermined position of the power detection head after being transmitted through the spectroscope; a spectroscope, which is used to divide the output light into reflected light and transmitted light, and control the transmittance of the transmitted light by adjusting its own angle; a light receiving device, which is used to absorb the reflected light; a power detection head, which is used to measure the power of the transmitted light; a control unit, which is used to store the correspondence between the spectroscopic angle and the transmittance under a certain wavelength of the output light, predetermine the required transmittance, determine the angle of the spectroscope according to the correspondence, and control the spectroscope to rotate to the determined angle, and calculate the power of the output light according to the determined transmittance and the measurement result of the power detection head at this time. The measuring device of the present invention effectively realizes the measurement of a certain wavelength range and the power of different laser ranges.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and in particular to a laser power measurement device and a method thereof. Background Art

[0002] In recent years, the domestic laser industry has developed rapidly, and the current laser power level has entered the 10,000-watt era. As the core optical indicator of the laser, power is very necessary to measure it accurately. At present, the technical level of domestic power meter products is low, and power meters of 10,000 watts and above are all imported. Imported power meters are expensive, and the maintenance and repair cycle is long, and the comprehensive use cost is very high.

[0003] In order to solve the above contradiction, domestic technicians with high-power measurement needs have developed various measurement methods. Among them, the splitting scheme using a spectroscope is to divide the high-power laser into a beam of mostly-powered laser and a beam of less-powered laser, and use a small-range power probe to safely measure the less-powered laser, so that the total laser power can be obtained according to the splitting ratio. Existing technologies such as patents CN 208953128 U and CN 211717618 U are laser power measurement methods based on the above schemes, but the existing technical schemes based on spectroscope splitting have poor measurement accuracy and can only measure lasers of specific wavelengths. These problems are mainly determined by the working mechanism of the spectroscope. The spectroscope divides the incident light into reflected light and transmitted light of a certain power ratio, and the power ratio of reflected light and transmitted light is directly determined by the coating properties of the spectroscope, specifically related to the incident wavelength and incident angle. In other words, the power ratio of reflected light and incident light is for a specific incident wavelength and incident angle. The specific incident wavelength makes the applicable measurement wavelength single, and the specific incident angle makes the measurement accuracy not too high (the angle is difficult to control). Therefore, the practicality is not strong. Since the incident angle of the prior art spectroscope is fixed, the transmittance of light at a specific wavelength is also fixed. Since the power range that can be measured by the power detector is limited, the range of output light power that can be measured for a fixed transmittance is also relatively narrow. Summary of the invention

[0004] The present invention provides a laser power measurement device and method thereof, which effectively avoids the measurement error caused by the incident angle error of the laser to be measured and realizes the measurement of a certain wavelength range and the power of different laser ranges.

[0005] In a first aspect, the present invention provides a laser power measurement device, characterized in that the device comprises: an adapter, a spectroscope, a light receiving device, a power detection head and a control unit; wherein

[0006] The adapter is used to adjust and fix the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter;

[0007] The beam splitter is used to split the output light into reflected light and transmitted light, and to control the transmittance of the transmitted light to the output light by adjusting its own angle;

[0008] The light receiving device is used to absorb the reflected light;

[0009] The power detection head is used to measure the power of the transmitted light;

[0010] The control unit is used to store the correspondence between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermine the required transmittance, and determine the angle of the beam splitter based on the correspondence, and control the beam splitter to rotate to the determined angle, and then calculate the power of the output light of the laser to be tested based on the determined transmittance and the measurement result of the power detector at this time.

[0011] In a second aspect, the present invention further provides a laser power measurement method, characterized in that a laser power measurement device is provided, including: an adapter, a spectroscope, a light receiving device, a power detection head and a control unit; the method includes:

[0012] The adapter adjusts and fixes the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter;

[0013] The beam splitter divides the output light into reflected light and transmitted light, and controls the transmittance of the transmitted light to the output light by adjusting its own angle;

[0014] The light receiving device absorbs the reflected light;

[0015] The power detection head measures the power of the transmitted light;

[0016] The control unit stores the correspondence between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermines the required transmittance, and determines the angle of the beam splitter based on the correspondence, and controls the beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be tested based on the determined transmittance and the measurement result of the power detector at this time.

[0017] The laser power measurement device and method provided by the present invention: first, the pointing angle of the laser output laser is adjusted to avoid measurement errors caused by incident angle errors; second, the type and number of the spectroscopes are optional, and the angle is adjustable, that is, the transmittance is optional, so that the measurement of powers of different ranges can be realized; third, the measurement of laser power within a certain wavelength range can be realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0019] Figure 1 is a schematic diagram of a laser power measurement device provided by an embodiment of the present invention;

[0020] Figure 2 is a curve diagram of the corresponding relationship between the angle and transmittance of the beam splitter under output light of a certain wavelength provided by an embodiment of the present invention;

[0021] Figure 3 is a graph of output optical power measured at multiple angles of a spectroscope provided by an embodiment of the present invention;

[0022] Figure 4 is a flow chart of a laser power measurement method provided by an embodiment of the present invention;

[0023] Figure 5 It is a curve diagram of the corresponding relationship between the wavelength of the output light and the transmittance at a certain angle of the beam splitter provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0024] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. SUMMARY OF THE INVENTION

[0026] As mentioned above, the present invention provides a laser power measurement device and method thereof, which effectively realizes the measurement of a certain wavelength range and different laser range powers.

[0027] Exemplary Devices

[0028] Figure 1 Schematic diagram of a laser power measurement device provided by an embodiment of the present invention. Figure 1 As shown, the device provided in this embodiment includes: an adapter 1, a spectroscope 2, a light collecting device 3, a moving unit 4, an up-converter 5, a power detection head 6 and a control unit 7.

[0029] The adapter 1 is used to adjust and fix the output head of the laser to be tested, so that after the output light of the laser to be tested is transmitted through the beam splitter 2, the transmitted light reaches the predetermined position of the power detection head 6. For example, by adjusting the pitch angle on the X-axis and the pitch angle on the Y-axis of the adapter 1, the transmitted light is at the detection center of the power detection head 6, thereby avoiding the measurement error caused by the output light pointing angle error.

[0030] The beam splitter 2 is used to split the output light into two laser beams, namely, reflected light and transmitted light, and to control the transmittance of the transmitted light to the output light by adjusting its own angle, such as Figure 2 As shown, curve B represents the corresponding relationship between the incident angle θ and the transmittance t of the output light with a wavelength of 1080nm passing through the beam splitter B. It can be seen from the three points 130, 110 and 140 on the curve B that the transmittances corresponding to different incident angles are different.

[0031] Among them, the reflected light accounts for most of the power, and the transmitted laser accounts for a small part of the power. The transmitted light with a smaller proportion is used for subsequent power measurement, and the reflected light with a larger proportion needs to be safely absorbed.

[0032] The angle of the beam splitter 2 is adjusted so that the incident angle of the output light on the beam splitter 2 is 45±5°, and the angle of the beam splitter 2 mentioned below is the incident angle of the output light on the beam splitter 2. The beam splitter 2 may also include a base for rotating the angle.

[0033] When the thickness, material and / or doping component of the beam splitter 2, as well as the coating process, thickness and / or material are different, the corresponding relationship between the incident angle θ and the transmittance of the output light of a certain wavelength passing through the beam splitter 2 is different, that is, the transmittance curve of the beam splitter 2 can be changed by changing the coating process, thickness and / or material of the beam splitter 2, as well as the thickness, material and / or doping component of the beam splitter 2. Figure 2 The three curves A to C shown are the corresponding relationships between the incident angle θ and the transmittance t for the output light with a wavelength of 1080 nm when it passes through three different beam splitters 2. For example, the transmittance t when it is irradiated to three different beam splitters at the same incident angle of 50° is 24%, 12.5% ​​and 7.5% respectively.

[0034] After the transmittance of the output light of a certain wavelength is determined, the appropriate beam splitter 2 can be selected in combination with the adjustable range of the incident angle, i.e., 40° to 50°. For example, the transmittance of the output light of a wavelength of 1080nm is determined to be 20%. Figure 2 It can be seen that among the three curves, only the incident angle θ corresponding to curve B is within the adjustable range of 40° to 50°, so the beam splitter 2 corresponding to curve B is selected.

[0035] In summary, an optional transmittance range can be calculated based on the detection power range of the power detection head 6 and combined with the approximate power range of the output light of the laser to be detected, and a specific transmittance parameter can be selected based on the optional transmittance range. A suitable beam splitter 2 can be selected from a variety of beam splitters 2, or a suitable incident angle can be selected for a specific beam splitter 2.

[0036] In addition, in order to obtain a lower transmittance, a plurality of beam splitters 2 may be provided in combination, and a detailed description may be found in the subsequent optional embodiments.

[0037] The spectroscope 2 may also include a heat sink for maintaining the spectroscope 2 at a predetermined operating temperature. For example, the outer frame of the spectroscope 2 is provided with a water-cooled heat sink to reduce the influence of the thermal effect of the spectroscope 2 on the measurement accuracy at high power.

[0038] The light receiving device 3 is used to absorb the reflected light which accounts for most of the power of the output light.

[0039] In order to achieve safe absorption of reflected light, the interior of the light collecting device 3 is a wedge-shaped cavity, so that the reflected light can be reflected multiple times after entering the light collecting device 3; its inner wall has a matte coating for absorbing and reflecting the reflected light; its exterior has a cooling device, such as water cooling, which can safely absorb the reflected light.

[0040] The upper conversion plate 5 is used to measure the position of the transmitted light when it reaches the power detection head 6 .

[0041] The moving unit 4 is used to move the position of the upper conversion plate 5 .

[0042] The up-conversion film 5 may be a light spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

[0043] The light spot display board is a board coated with a specific coating, which is used to display the light spot position of the transmitted light, so as to facilitate manual adjustment of the adapter 1 so that the light spot is located at the detection center of the power detection head 6. The coating is selected according to the characteristics of the laser. For example, if the laser is invisible ultraviolet light, a fluorescent material is selected to display the light spot; if the laser intensity is too high, an extinction material is selected to reduce the brightness of the light spot for easy observation.

[0044] The effective pixels of the CCD camera are 480-720×640-1024.

[0045] The CCD camera, CMOS camera and infrared sensor can display the position of the light spot on the screen, and the adapter 1 can be manually or automatically adjusted so that the light spot is located at the detection center of the power detection head 6.

[0046] It should be noted that the upper conversion plate 5 must work under low-power laser, and high-power laser will cause irreversible damage to the upper conversion plate 5, that is, the upper conversion plate 5 can be used to measure the position of the transmitted light when it reaches the power detection head 6 in real time under low-power laser. The control unit 7 adjusts the pitch angle on the X-axis and the pitch angle on the Y-axis of the adapter 1 based on the position of the transmitted light when it reaches the power detection head 6, that is, the spot position of the transmitted light on the upper conversion plate 5, so that the transmitted light reaches the predetermined position of the power detection head 6, that is, the spot of the transmitted light irradiated on the upper conversion plate 5 is located at the detection center of the power detection head 6. After determining that the spot can hit the detection center exactly, the upper conversion plate 5 completes the determination of the position of the transmitted light on the power detection head 6, and the upper conversion plate 5 can be moved away by the moving unit 4, so that the transmitted light directly hits the surface of the power detection head 6. Since the upper conversion plate 5 is moved away, it will not be irradiated by the laser. At this time, the output light can be replaced or adjusted to high power. When the above-mentioned upper conversion plate 5 is working, the method of realizing low-power laser includes: if the power of the laser to be tested is adjustable, it can be directly adjusted to low power; if the power of the laser to be tested is not adjustable, a predetermined low-power laser can be used to complete the pointing and alignment of the transmitted light, and then replaced with the laser to be tested.

[0047] The power detector 6 is used to measure the power of the transmitted light. The power detector 6 can calculate the power of the output light of the laser to be tested by detecting the power of the transmitted light and combining the transmittance. For example, if the power detector 6 detects that the transmitted light is 5kW and the transmittance is 5%, the output light power is 5kW / 5%=100kW.

[0048] Generally, the power detection head 6 can detect a power range of 0 to 5 kW.

[0049] The control unit 7 can be used to control the adapter 1 so that the transmitted light reaches a predetermined position of the power detection head 6 , and can also control the movement of the upper conversion plate 5 .

[0050] The control unit 7 is also used to store the correspondence between the angle of the beam splitter 2 and the transmittance under various wavelengths of output light, and predetermine the required transmittance according to the detection power range of the power detector 6 and the approximate range of the power of the laser to be measured, and determine the angle of the beam splitter 2 according to the correspondence, and control the beam splitter 2 to rotate to the determined angle, and then calculate the power of the output light of the laser to be measured according to the determined transmittance and the measurement result of the power detector 6 at this time.

[0051] For example, the ideal detection power range of the power detector 6 is 400W to 500W (i.e., the measurement accuracy is high within this range), and the approximate range of the laser power to be measured is 2kW to 2.5kW. The required transmittance is 20%, which can make the power range of the output light power after passing through the beam splitter 2 within the ideal detection power range of the power detector 6. The control unit 7 uses the stored Figure 2 From the corresponding relationship shown in the middle curve B, it can be seen that the incident angle corresponding to the transmittance of 20% is 46.25°. Therefore, by selecting the beam splitter B and controlling the beam splitter B to rotate to 46.25°, the transmittance of 20% can be accurately obtained. Assuming that the measurement result of the power detection head 6 at this time is 450W, the power of the output light of the laser to be measured is 450W / 20%=2.25kW.

[0052] In short, by adjusting the angle of the spectrometer 2, that is, adjusting the output light incident angle θ, it is possible to avoid the problem of inaccurate measurement results caused by the output light power to be measured being small and the transmittance being small, and the power received by the power detection head 6 being too small. It is also possible to avoid measurement hazards caused by the output light power to be measured being large and the transmittance being large, and the power received by the power detection head 6 being too large.

[0053] Specifically, as an optional implementation, the step of determining the corresponding relationship between the angle of the beam splitter 2 and the transmittance under output lights of various wavelengths includes:

[0054] Low power output light of known power at various selected wavelengths;

[0055] The control unit 7 uses the upper conversion plate 5 to adjust the transmitted light to reach a predetermined position of the power detection head 6;

[0056] The moving unit 4 moves the upper conversion plate 5 out of the detection position of the power detection head 6;

[0057] The controller adjusts the angle of the beam splitter 2 and records the corresponding measurement result of the power detector 6;

[0058] The measurement results of each power detector 6 are divided by the power of the low-power output light to obtain the transmittance of the spectroscope 2 at various angles, and the corresponding relationship between the angle of the spectroscope 2 and the transmittance at various wavelengths is obtained.

[0059] like Figure 2As shown, the certain wavelength is 1080nm, which shows the corresponding relationship curves of the incident angle θ and the transmittance t of three different beam splitters 2. The control unit 7 in the present invention can store a series of corresponding relationship curves of the incident angle and transmittance of different beam splitters 2 under a common wavelength. As factors affecting the transmittance, the more data of different wavelengths, different beam splitters 2 and different incident angles are stored, the more conducive it is to select the optimal parameters and obtain more accurate laser power measurement.

[0060] As another optional implementation, the step of determining the corresponding relationship between the angle of the beam splitter 2 and the transmittance under output lights of various wavelengths includes:

[0061] Select a specific beam splitter 2;

[0062] The parameters of various wavelengths and the parameters of the selected beam splitter 2 are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the beam splitter 2 and the transmittance of the beam splitter 2 at various wavelengths.

[0063] For example, the parameters of the beam splitter 2, such as the coating thickness of the beam splitter 2 being 480 nm, the material being BaF2, the thickness of the beam splitter 2 being 1 mm, the material being SiO2, etc., are input into the simulation device for simulation calculation to obtain the corresponding relationship between the angle of the beam splitter 2 and the transmittance at various wavelengths, or the corresponding relationship between various wavelengths and the transmittance at a specific angle of the beam splitter 2. Figure 5 The curve 501 obtained by simulation shows that the transmittance t varies with wavelength at a beam splitter angle of 45°, wherein 502 is a point on the curve 501 corresponding to the laser of the current wavelength of 1080nm selected based on the curve 501, and the transmittance of a certain wavelength at a specific angle can be obtained. When replacing any light source of different wavelengths, the transmittance of the corresponding wavelength can still be easily obtained. Since it is difficult to actually measure the transmittance relationship curve corresponding to different continuous wavelengths by changing the wavelength, obtaining the curve through simulation is a feasible solution.

[0064] As an optional embodiment, if it is necessary to measure a high-power laser, the required transmittance is small, and a single spectroscope cannot obtain a sufficiently small transmittance, it is possible to consider combining multiple spectroscopes to obtain a smaller transmittance, and the transmittance of the combination of multiple spectroscopes is equal to the product of the transmittances of each spectroscope. According to the detection power range of the power detector 6, a suitable transmittance can be selected, and a combination of multiple spectroscopes 2 can be selected based on the transmittance. Usually, a combination of up to two spectroscopes 2 is selected, and the two spectroscopes can be set to be parallel and fixed on a rotating mechanism at a certain distance to avoid mutual interference between the reflected light of the two spectroscopes. The control unit 7 synchronously rotates the two spectroscopes to keep their incident angles consistent, so that the measurement range can be expanded by simply adding a spectroscope without making major changes to the rotating mechanism. If the incident angle of each spectroscope can be controlled separately, different transmittances can be combined more flexibly. For example, when there are multiple beam splitters 2, the control unit 7 determines the angle of each beam splitter 2 in turn according to a predetermined transmittance and the corresponding relationship between the angles of the multiple beam splitters 2 and the transmittance, and controls each beam splitter 2 to rotate to the determined angle, and then calculates the power of the output light of the laser to be tested according to the determined transmittance and the measurement result of the power detector 6 at this time.

[0065] For example, assuming that two beam splitters are provided, when the total transmittance is determined to be 3.9%, as Figure 2 As shown, the transmittance t of one of the beam splitters B is selected to be 26%, and the incident angle θ is 40°, then the transmittance t of the other beam splitter C is selected to be 15%, and the incident angle θ is 42.5°.

[0066] In summary, the present invention is improved compared with the prior art in that, first, the adapter 1 and the upper conversion plate 5 are introduced, the adapter 1 is used to adjust the pointing angle of the output head of the laser to be detected, and the upper conversion plate 5 is used to measure the position of the transmitted light when it reaches the power detection head. The two cooperate to make the transmitted light reach the predetermined position of the power detection head 6, that is, the detection center of the power detection head 6, thereby avoiding the measurement error caused by the output light pointing angle error;

[0067] Second, by selecting different beam splitters 2, selecting the number of beam splitters 2, and adjusting the angle of the beam splitters 2, accurate measurement of the power of the laser to be measured within the ideal detection power range of the power detector 6 can be achieved. A large number of combination schemes also expand the measurement range of the laser power.

[0068] Third, the control unit 7 stores the corresponding relationship between the incident angle and the transmittance at different wavelengths, so the laser power in different wavelength ranges can also be accurately measured.

[0069] As another optional embodiment of the present invention, the control unit 7 predetermines a plurality of required transmittances according to the detection power range of the power detection head 6, which may be a plurality of continuous transmittances or a plurality of discrete transmittances, and determines a plurality of angles of the beam splitter 2 according to the corresponding relationship, and controls the beam splitter 2 to rotate to the determined plurality of angles respectively, and then calculates the power of the output light of the plurality of lasers to be tested according to the plurality of determined transmittances and the corresponding measurement results of the plurality of power detection heads 6, and takes an average value thereof as the final power of the output light of the laser to be tested.

[0070] For example, the control unit 7 predetermines three required transmittances t as 26%, 22% and 13% respectively according to the detection power range of the power detector 6, and Figure 2 According to the corresponding relationship shown in FIG. 1 , the angle θ of the beam splitter B is determined to be 40°, 45° and 50°, and the beam splitter B is controlled to rotate to the three determined angles respectively. Then, according to the three determined transmittances of 26%, 22% and 13% and the corresponding three measurement results of the power detector 6 of 115.7W, 100.1W and 58.5W, the output powers of the three lasers to be tested are calculated to be 445W, 455W and 450W, as shown in FIG. Figure 3 The three points 230, 210 and 240 are shown, and the average value is taken as the final output light power of the laser to be tested, which is 450W.

[0071] The above embodiment measures the output optical power by first determining the transmittance and then selecting the corresponding angle. Alternatively, the output optical power may be measured by first determining the angle of the beam splitter B and then based on the transmittance corresponding to the angle. For example, assuming that the transmitted optical power within the adjustable angle range of the beam splitter B (45°±5°) falls within the detectable power range of the power detector 6, the output optical power may be measured by selecting a plurality of specific angles and reading the transmittance corresponding to the angles, and averaging the measured output optical powers. It is also possible to continuously change the beam splitter B from 40° to 50°, read the transmittance corresponding to the beam splitter angle during the change in real time, and calculate the measured output optical power in real time to obtain an output optical power curve (see Figure 3 A more accurate output optical power can be obtained by averaging the continuous curve, that is, integrating the curve to obtain the area under the curve and dividing it by the angle variation range (10°).

[0072] In summary, the present invention can also determine multiple transmittances within the detection power range of the power detector 6 and then determine multiple angles of the beam splitters 2, obtain multiple transmitted light powers, and then average them to obtain the final output light power. The average of multiple measurements has a smaller error than a single measurement. This multi-angle measurement and averaging method can avoid errors caused by inaccurate points on the pre-measured transmittance curve.

[0073] Exemplary Methods

[0074] Accordingly, an embodiment of the present invention further provides a laser power measurement method. A laser power measurement device is provided, comprising: an adapter, a spectroscope, a light receiving device, a power detection head and a control unit; Figure 4 : is a flow chart of a laser power measurement method provided by an embodiment of the present invention, and the embodiment comprises the following steps:

[0075] S401: the adapter adjusts and fixes the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter;

[0076] S402: the beam splitter divides the output light into reflected light and transmitted light, and controls the transmittance of the transmitted light to the output light by adjusting its own angle;

[0077] S403: The light receiving device absorbs the reflected light;

[0078] S404: the power detection head measures the power of the transmitted light;

[0079] S405: The control unit stores the correspondence between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermines the required transmittance, and determines the angle of the beam splitter based on the correspondence, and controls the beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be tested based on the determined transmittance and the measurement result of the power detector at this time.

[0080] The device further comprises an upper conversion plate, and the method further comprises the upper conversion plate measuring a position of the transmitted light when the transmitted light reaches the power detection head.

[0081] The apparatus further includes a moving unit, and the method further includes the moving unit moving the position of the upper conversion plate.

[0082] The up-conversion plate is a light spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

[0083] The effective pixels of the CCD camera are 480-720×640-1024.

[0084] The method further comprises:

[0085] Under low-power laser, using the up-conversion plate to measure in real time the position of the transmitted light when it reaches the power detection head;

[0086] The control unit adjusts the adapter based on the position of the transmitted light when it reaches the power detection head so that the transmitted light reaches a predetermined position of the power detection head.

[0087] The detection power range of the power detection head is 0-5kW.

[0088] The method further includes predetermining a required transmittance according to a detection power range of the power detection head.

[0089] The method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths includes:

[0090] Low power output light of known power at various selected wavelengths;

[0091] The control unit uses the upper conversion plate to adjust the transmitted light to a predetermined position of the power detection head;

[0092] The moving unit moves the upper conversion plate out of the detection position of the power detection head;

[0093] The controller adjusts the angle of the beam splitter and records the corresponding measurement result of the power detection head;

[0094] The measurement results of each power detector are divided by the power of the low-power output light to obtain the transmittance of the spectroscope at various angles, and the corresponding relationship between the angle of the spectroscope and the transmittance at various wavelengths is obtained.

[0095] The method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths includes:

[0096] Select a specific beam splitter;

[0097] The parameters of various wavelengths and the parameters of the selected spectroscope are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the spectroscope and the transmittance of the spectroscope at various wavelengths.

[0098] The method further comprises selecting different spectroscopes according to the detection power range of the power detection head;

[0099] The transmittance of the beam splitter is changed by changing the thickness and material of the coating as well as the thickness, material and doping components of the beam splitter.

[0100] The method further includes selecting and setting the number of the spectroscopes according to the detection power range of the power detection head.

[0101] The method further comprises: when there are multiple beam splitters,

[0102] Determining the angle of each beam splitter in sequence according to a predetermined transmittance and a corresponding relationship between the angles of a plurality of beam splitters and the transmittance;

[0103] By controlling each of the beam splitters to rotate to a determined angle;

[0104] The power of the output light of the laser to be measured is calculated based on the determined transmittance and the measurement result of the power detection head at this time.

[0105] The beam splitter includes a heat sink, and the method further includes the heat sink maintaining the beam splitter at a predetermined operating temperature.

[0106] The method also includes the control unit controlling movement of the adapter and the upper conversion plate.

[0107] The method further comprises:

[0108] Predetermining a plurality of required transmittances according to a detection power range of the power detection head;

[0109] According to the corresponding relationship, determining multiple angles of the beam splitter;

[0110] By controlling the beam splitter to rotate to the determined multiple angles respectively;

[0111] The power of the output light of the plurality of lasers to be tested is calculated based on the plurality of determined transmittances and the corresponding measurement results of the plurality of power detectors, and an average value is taken as the final power of the output light of the lasers to be tested.

[0112] The interior of the light collecting device is a wedge-shaped cavity, the inner wall of which is provided with a matte coating for absorbing and reflecting the reflected light, and the exterior of the cavity is provided with a device for cooling.

[0113] The angle of the beam splitter is adjusted so that the incident angle of the output light on the beam splitter is 45±5°.

[0114] It should be noted that although several devices, units, or modules of the laser power measurement device are mentioned in the above detailed description, this division is only exemplary and not mandatory. In fact, according to an embodiment of the present invention, the features and functions of two or more modules described above can be embodied in one module. Conversely, the features and functions of one module described above can be further divided into multiple modules to be embodied.

[0115] In addition, although the operations of the laser power measurement method of the present invention are described in a specific order in the drawings, this does not require or imply that the operations must be performed in this specific order, or that all the operations shown must be performed to achieve the desired results. Additionally or alternatively, some steps may be omitted, multiple steps may be combined into one step, and / or one step may be decomposed into multiple steps.

[0116] Although the spirit and principle of the present invention have been described with reference to several specific embodiments, it should be understood that the present invention is not limited to the disclosed specific embodiments, and the division of various aspects does not mean that the features in these aspects cannot be combined to benefit, and such division is only for the convenience of expression. The present invention is intended to cover various modifications and equivalent arrangements included in the spirit and scope of the attached claims.

[0117] The present invention provides:

[0118] 1. A laser power measurement device, characterized in that the device comprises: an adapter, a spectroscope, a light receiving device, a power detection head and a control unit; wherein

[0119] The adapter is used to adjust and fix the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter;

[0120] The beam splitter is used to split the output light into reflected light and transmitted light, and to control the transmittance of the transmitted light to the output light by adjusting its own angle;

[0121] The light receiving device is used to absorb the reflected light;

[0122] The power detection head is used to measure the power of the transmitted light;

[0123] The control unit is used to store the correspondence between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermine the required transmittance, and determine the angle of the beam splitter based on the correspondence, and control the beam splitter to rotate to the determined angle, and then calculate the power of the output light of the laser to be tested based on the determined transmittance and the measurement result of the power detector at this time.

[0124] 2. The measuring device according to item 1 is characterized in that the device also includes an upper conversion plate, which is used to measure the position of the transmitted light when it reaches the power detection head.

[0125] 3. The measuring device according to item 2 is characterized in that the device also includes a moving unit, which is used to move the position of the upper conversion plate.

[0126] 4. The measuring device according to item 2 or 3 is characterized in that the up-conversion plate is a spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

[0127] 5. The measuring device according to item 4 is characterized in that the effective pixels of the CCD camera are 480-720×640-1024.

[0128] 6. The measuring device according to any one of items 2 to 5, characterized in that, under low-power laser, the up-conversion plate is used to measure in real time the position of the transmitted light when it reaches the power detection head;

[0129] The control unit adjusts the adapter based on the position of the transmitted light when it reaches the power detection head so that the transmitted light reaches a predetermined position of the power detection head.

[0130] 7. The measuring device according to any one of items 1 to 6 is characterized in that the detection power range of the power detection head is 0 to 5 kW.

[0131] 8. The measuring device according to item 7 is characterized in that the required transmittance is predetermined based on the detection power range of the power detection head.

[0132] 9. The measuring device according to any one of items 3 to 8, characterized in that the determination of the corresponding relationship between the angle of the beam splitter and the transmittance under the output light of various wavelengths comprises:

[0133] Low power output light of known power at various selected wavelengths;

[0134] The control unit uses the upper conversion plate to adjust the transmitted light to a predetermined position of the power detection head;

[0135] The moving unit moves the upper conversion plate out of the detection position of the power detection head;

[0136] The controller adjusts the angle of the beam splitter and records the corresponding measurement result of the power detection head;

[0137] The measurement results of each power detector are divided by the power of the low-power output light to obtain the transmittance of the spectroscope at various angles, and the corresponding relationship between the angle of the spectroscope and the transmittance at various wavelengths is obtained.

[0138] 10. The measuring device according to any one of items 3 to 8, characterized in that the determination of the corresponding relationship between the angle of the beam splitter and the transmittance under the output light of various wavelengths comprises:

[0139] Select a specific beam splitter;

[0140] The parameters of various wavelengths and the parameters of the selected spectroscope are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the spectroscope and the transmittance of the spectroscope at various wavelengths.

[0141] 11. The measuring device according to any one of items 7 to 10, characterized in that different spectroscopes are selected according to the detection power range of the power detection head;

[0142] The transmittance of the beam splitter is changed by changing the thickness and material of the coating as well as the thickness, material and doping components of the beam splitter.

[0143] 12. The measuring device according to any one of items 7 to 11 is characterized in that the number of the spectroscopes is selected and set according to the detection power range of the power detection head.

[0144] 13. The measuring device according to item 12 is characterized in that, when there are multiple beam splitters, the control unit determines the angle of each beam splitter in turn according to a predetermined transmittance and the corresponding relationship between the angles of the multiple beam splitters and the transmittance, and controls each beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be measured according to the determined transmittance and the measurement result of the power detector at this time.

[0145] 14. The measuring device according to any one of items 1 to 13, characterized in that the spectroscope comprises a heat dissipation device for maintaining the spectroscope at a predetermined operating temperature.

[0146] 15. The measuring device according to any one of items 1 to 14, characterized in that the control unit is also used to control the movement of the adapter and the upper conversion plate.

[0147] 16. The measuring device according to any one of items 7 to 15 is characterized in that the control unit predetermines a plurality of required transmittances according to the detection power range of the power detection head, and determines a plurality of angles of the spectroscope according to the corresponding relationship, and controls the spectroscope to rotate to the determined plurality of angles respectively, and then calculates the power of the output lights of the plurality of lasers to be measured according to the plurality of determined transmittances and the corresponding measurement results of the plurality of power detection heads, and takes an average value thereof as the final power of the output lights of the lasers to be measured.

[0148] 17. The measuring device according to any one of items 1 to 16 is characterized in that the interior of the light collecting device is a wedge-shaped cavity, the inner wall of which has a matte coating for absorbing and reflecting the reflected light, and the outside of which has a device for cooling.

[0149] 18. The measuring device according to any one of items 1 to 17, characterized in that the angle of the beam splitter is adjusted so that the incident angle of the output light on the beam splitter is 45±5°.

[0150] 19. A laser power measurement method, characterized in that a laser power measurement device is provided, comprising: an adapter, a spectroscope, a light receiving device, a power detection head and a control unit; the method comprises:

[0151] The adapter adjusts and fixes the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter;

[0152] The beam splitter divides the output light into reflected light and transmitted light, and controls the transmittance of the transmitted light to the output light by adjusting its own angle;

[0153] The light receiving device absorbs the reflected light;

[0154] The power detection head measures the power of the transmitted light;

[0155] The control unit stores the correspondence between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermines the required transmittance, and determines the angle of the beam splitter based on the correspondence, and controls the beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be tested based on the determined transmittance and the measurement result of the power detector at this time.

[0156] 20. The measurement method according to Item 19 is characterized in that the device also includes an upper conversion plate, and the method also includes the upper conversion plate measuring the position of the transmitted light when it reaches the power detection head.

[0157] 21. The measurement method according to Item 20 is characterized in that the device further includes a moving unit, and the method further includes the moving unit moving the position of the upper conversion plate.

[0158] 22. The measurement method according to item 20 or 21 is characterized in that the up-conversion plate is a spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

[0159] 23. The measurement method according to item 22 is characterized in that the effective pixels of the CCD camera are 480-720×640-1024.

[0160] 24. The measurement method according to any one of items 20 to 23, characterized in that the method further comprises:

[0161] Under low-power laser, using the up-conversion plate to measure in real time the position of the transmitted light when it reaches the power detection head;

[0162] The control unit adjusts the adapter based on the position of the transmitted light when it reaches the power detection head so that the transmitted light reaches a predetermined position of the power detection head.

[0163] 25. The measurement method according to any one of items 19 to 24 is characterized in that the detection power range of the power detection head is 0 to 5 kW.

[0164] 26. The measurement method according to item 25 is characterized in that the method also includes predetermining the required transmittance based on the detection power range of the power detection head.

[0165] 27. The measuring method according to any one of items 21 to 26, characterized in that the method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths comprises:

[0166] Low power output light of known power at various selected wavelengths;

[0167] The control unit uses the upper conversion plate to adjust the transmitted light to a predetermined position of the power detection head;

[0168] The moving unit moves the upper conversion plate out of the detection position of the power detection head;

[0169] The controller adjusts the angle of the beam splitter and records the corresponding measurement result of the power detection head;

[0170] The measurement results of each power detector are divided by the power of the low-power output light to obtain the transmittance of the spectroscope at various angles, and the corresponding relationship between the angle of the spectroscope and the transmittance at various wavelengths is obtained.

[0171] 28. The measuring device according to any one of items 21 to 26, characterized in that the method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths comprises:

[0172] Select a specific beam splitter;

[0173] The parameters of various wavelengths and the parameters of the selected spectroscope are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the spectroscope and the transmittance of the spectroscope at various wavelengths.

[0174] 29. The measurement method according to any one of items 25 to 28, characterized in that the method further comprises selecting different spectroscopes according to the detection power range of the power detection head;

[0175] The transmittance of the beam splitter is changed by changing the thickness and material of the coating as well as the thickness, material and doping components of the beam splitter.

[0176] 30. The measurement method according to any one of items 25 to 29 is characterized in that the method further comprises selecting and setting the number of the spectroscopes according to the detection power range of the power detection head.

[0177] 31. The measurement method according to item 30 is characterized in that the method further comprises: when there are multiple spectroscopes,

[0178] Determining the angle of each beam splitter in sequence according to a predetermined transmittance and a corresponding relationship between the angles of a plurality of beam splitters and the transmittance;

[0179] By controlling each of the beam splitters to rotate to a determined angle;

[0180] The power of the output light of the laser to be measured is calculated based on the determined transmittance and the measurement result of the power detection head at this time.

[0181] 32. The measuring method according to any one of items 19 to 31 is characterized in that the spectroscope comprises a heat dissipation device, and the method further comprises the heat dissipation device enabling the spectroscope to maintain a predetermined operating temperature.

[0182] 33. The measuring method according to any one of items 19 to 32 is characterized in that the method further includes the control unit controlling the movement of the adapter and the upper conversion plate.

[0183] 34. The measurement method according to any one of items 25 to 33, characterized in that the method further comprises:

[0184] Predetermining a plurality of required transmittances according to a detection power range of the power detection head;

[0185] According to the corresponding relationship, determining multiple angles of the beam splitter;

[0186] By controlling the beam splitter to rotate to the determined multiple angles respectively;

[0187] The power of the output light of the plurality of lasers to be tested is calculated based on the plurality of determined transmittances and the corresponding measurement results of the plurality of power detectors, and an average value is taken as the final power of the output light of the lasers to be tested.

[0188] 35. The measuring method according to any one of items 19 to 34 is characterized in that the interior of the light collecting device is a wedge-shaped cavity, the inner wall of which has a matte coating for absorbing and reflecting the reflected light, and the outside of which has a cooling device.

[0189] 36. The measuring method according to any one of items 19 to 35 is characterized in that the angle of the beam splitter is adjusted so that the incident angle of the output light on the beam splitter is 45±5°.

Claims

1. A laser power measuring device, characterized in that: The device comprises: an adapter, a spectroscope, a light receiving device, a power detection head, a control unit and an up-conversion plate; wherein The adapter is used to adjust and fix the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter; The beam splitter is used to split the output light into reflected light and transmitted light, and to control the transmittance of the transmitted light to the output light by adjusting its own angle; The light receiving device is used to absorb the reflected light; The power detection head is used to measure the power of the transmitted light; The control unit is used to store the corresponding relationship between the angle of the beam splitter and the transmittance under the output light of various wavelengths, predetermine the required transmittance, and determine the angle of the beam splitter according to the corresponding relationship, and control the beam splitter to rotate to the determined angle, and then calculate the power of the output light of the laser to be measured according to the determined transmittance and the measurement result of the power detector at this time; The upper conversion plate is used to measure the position of the transmitted light when it reaches the power detection head.

2. The measuring device according to claim 1, characterized in that The device further comprises a moving unit, which is used to move the position of the upper conversion plate.

3. The measuring device according to claim 1 or 2, characterized in that: The up-conversion plate is a light spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

4. The measuring device according to claim 3, characterized in that The effective pixel of the CCD camera is 480~720×640~1024.

5. The measuring device according to claim 1 or 2, characterized in that: Under low-power laser, using the up-conversion plate to measure in real time the position of the transmitted light when it reaches the power detection head; The control unit adjusts the adapter based on the position of the transmitted light when it reaches the power detection head so that the transmitted light reaches a predetermined position of the power detection head.

6. The measuring device according to claim 2, characterized in that The detection power range of the power detection head is 0~5kW.

7. The measuring device according to claim 6, characterized in that The required transmittance is predetermined according to the detection power range of the power detection head.

8. The measuring device according to claim 7, characterized in that The determination of the corresponding relationship between the angle of the beam splitter and the transmittance under the output light of various wavelengths includes: Low power output light of known power at various selected wavelengths; The control unit uses the upper conversion plate to adjust the transmitted light to a predetermined position of the power detection head; The moving unit moves the upper conversion plate out of the detection position of the power detection head; The control unit adjusts the angle of the beam splitter and records the corresponding measurement result of the power detection head; The measurement results of each power detector are divided by the power of the low-power output light to obtain the transmittance of the spectroscope at various angles, and the corresponding relationship between the angle of the spectroscope and the transmittance at various wavelengths is obtained.

9. The measuring device according to claim 7, characterized in that The determination of the corresponding relationship between the angle of the beam splitter and the transmittance under the output light of various wavelengths includes: Select a specific beam splitter; The parameters of various wavelengths and the parameters of the selected spectroscope are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the spectroscope and the transmittance of the spectroscope at various wavelengths.

10. The measuring device according to claim 1, characterized in that Selecting different spectroscopes according to the detection power range of the power detection head; The transmittance of the beam splitter is changed by changing the thickness and material of the coating as well as the thickness, material and doping components of the beam splitter.

11. The measuring device according to claim 1, characterized in that The number of the spectroscopes is selected and set according to the detection power range of the power detection head.

12. The measuring device according to claim 11, characterized in that When there are multiple beam splitters, the control unit determines the angle of each beam splitter in turn according to a predetermined transmittance and the corresponding relationship between the angles of multiple beam splitters and the transmittance, and controls each beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be tested according to the determined transmittance and the measurement result of the power detection head at this time.

13. The measuring device according to claim 1 or 2, characterized in that: The beam splitter comprises a heat dissipation device for maintaining the beam splitter at a predetermined operating temperature.

14. The measuring device according to claim 1 or 2, characterized in that: The control unit is also used to control the movement of the adapter and the upper conversion plate.

15. The measuring device according to claim 14, characterized in that The control unit predetermines a plurality of required transmittances according to the detection power range of the power detection head, and determines a plurality of angles of the spectroscope according to the corresponding relationship, and controls the spectroscope to rotate to the plurality of determined angles respectively, and then calculates the power of the output lights of the plurality of lasers to be tested according to the plurality of determined transmittances and the corresponding measurement results of the plurality of power detection heads, and takes an average value thereof as the final power of the output lights of the lasers to be tested.

16. The measuring device according to claim 1 or 2, characterized in that: The interior of the light collecting device is a wedge-shaped cavity, the inner wall of which is provided with a matte coating for absorbing and reflecting the reflected light, and the exterior of the cavity is provided with a device for cooling.

17. The measuring device according to claim 1 or 2, characterized in that: The angle of the beam splitter is adjusted so that the incident angle of the output light on the beam splitter is 45±5°.

18. A laser power measurement method, characterized in that: A laser power measurement device is provided, comprising: an adapter, a spectroscope, a light receiving device, a power detection head, a control unit and an up-conversion plate; the method comprises: The adapter adjusts and fixes the output head of the laser to be tested, so that the output light of the laser to be tested reaches the predetermined position of the power detection head after being transmitted through the beam splitter; The beam splitter divides the output light into reflected light and transmitted light, and controls the transmittance of the transmitted light to the output light by adjusting its own angle; The light receiving device absorbs the reflected light; The power detection head measures the power of the transmitted light; The control unit stores the corresponding relationship between the angle of the beam splitter and the transmittance under various wavelengths of output light, predetermines the required transmittance, and determines the angle of the beam splitter according to the corresponding relationship, and controls the beam splitter to rotate to the determined angle, and then calculates the power of the output light of the laser to be measured according to the determined transmittance and the measurement result of the power detector at this time; The upper conversion plate measures the position of the transmitted light when it reaches the power detection head.

19. The measuring method according to claim 18, characterized in that: The apparatus further includes a moving unit, and the method further includes the moving unit moving the position of the upper conversion plate.

20. The measuring method according to claim 18 or 19, characterized in that: The up-conversion plate is a light spot display panel, a CCD camera, a CMOS camera or an infrared sensor.

21. The measuring method according to claim 20, characterized in that: The effective pixel of the CCD camera is 480~720×640~1024.

22. The measuring method according to claim 18 or 19, characterized in that: The method further comprises: Under low-power laser, using the up-conversion plate to measure in real time the position of the transmitted light when it reaches the power detection head; The control unit adjusts the adapter based on the position of the transmitted light when it reaches the power detection head so that the transmitted light reaches a predetermined position of the power detection head.

23. The measuring method according to claim 18 or 19, characterized in that: The detection power range of the power detection head is 0~5kW.

24. The measuring method according to claim 23, characterized in that: The method further includes predetermining a required transmittance according to a detection power range of the power detection head.

25. The measuring method according to claim 19, characterized in that: The method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths includes: Low power output light of known power at various selected wavelengths; The control unit uses the upper conversion plate to adjust the transmitted light to a predetermined position of the power detection head; The moving unit moves the upper conversion plate out of the detection position of the power detection head; The control unit adjusts the angle of the beam splitter and records the corresponding measurement result of the power detection head; The measurement results of each power detector are divided by the power of the low-power output light to obtain the transmittance of the spectroscope at various angles, and the corresponding relationship between the angle of the spectroscope and the transmittance at various wavelengths is obtained.

26. The measuring method according to claim 19, characterized in that: The method for determining the corresponding relationship between the angle of the beam splitter and the transmittance under output light of various wavelengths includes: Select a specific beam splitter; The parameters of various wavelengths and the parameters of the selected spectroscope are input into a simulation device for simulation calculation to obtain the corresponding relationship between the angle of the spectroscope and the transmittance of the spectroscope at various wavelengths.

27. The measuring method according to claim 18 or 19, characterized in that: The method further comprises selecting different spectroscopes according to the detection power range of the power detection head; The transmittance of the beam splitter is changed by changing the thickness and material of the coating as well as the thickness, material and doping components of the beam splitter.

28. The measuring method according to claim 18 or 19, characterized in that: The method further includes selecting and setting the number of the spectroscopes according to the detection power range of the power detection head.

29. The measuring method according to claim 28, characterized in that The method further comprises: when there are multiple beam splitters, Determining the angle of each beam splitter in sequence according to a predetermined transmittance and a corresponding relationship between the angles of a plurality of beam splitters and the transmittance; By controlling each of the beam splitters to rotate to a determined angle; The power of the output light of the laser to be measured is calculated based on the determined transmittance and the measurement result of the power detection head at this time.

30. The measuring method according to claim 18 or 19, characterized in that: The beam splitter includes a heat sink, and the method further includes the heat sink maintaining the beam splitter at a predetermined operating temperature.

31. The measuring method according to claim 18 or 19, characterized in that: The method also includes the control unit controlling movement of the adapter and the upper conversion plate.

32. The measuring method according to claim 31, characterized in that The method further comprises: Predetermining a plurality of required transmittances according to a detection power range of the power detection head; According to the corresponding relationship, determining multiple angles of the beam splitter; By controlling the beam splitter to rotate to the determined multiple angles respectively; The power of the output light of the plurality of lasers to be tested is calculated based on the plurality of determined transmittances and the corresponding measurement results of the plurality of power detectors, and an average value is taken as the final power of the output light of the lasers to be tested.

33. The measuring method according to claim 18 or 19, characterized in that: The interior of the light collecting device is a wedge-shaped cavity, the inner wall of which is provided with a matte coating for absorbing and reflecting the reflected light, and the exterior of the cavity is provided with a device for cooling.

34. The measuring method according to claim 18 or 19, characterized in that: The angle of the beam splitter is adjusted so that the incident angle of the output light on the beam splitter is 45±5°.

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