An integrated cleaning and drying device for quartz crucible production

Abstract

The present invention discloses an integrated cleaning and drying device for producing quartz crucibles, comprising a control unit, a chassis, a conveying device passing through the chassis, and a plurality of carrying devices conveyed by the conveying device, each carrying device being capable of carrying a quartz crucible; a cleaning device, a water blowing device, and a drying device are installed in the chassis. The quartz crucible production device of the present application has a cleaning device, a water blowing device, and a drying device in the chassis, thereby realizing the integration of cleaning and drying, saving production costs, and facilitating the cleaning and drying of the inside and outside of the quartz crucible, with good cleaning effect and capable of improving work efficiency. The chassis has a cleaning position corresponding to the cleaning device, a water blowing position corresponding to the water blowing device, and a drying position corresponding to the drying device, so that each process does not interfere with each other, and each process is automated.

Description

Technical Field

[0001] The invention belongs to the technical field of quartz crucible production, and in particular relates to an integrated cleaning and drying device for quartz crucible production. Background Art

[0002] Quartz crucible is an indispensable component in the field of silicon wafer production. The translucent quartz crucible made by arc method is an essential basic material for pulling large-diameter single crystal silicon and developing large-scale integrated circuits. After the quartz crucible is produced, it needs to go through the cleaning and drying process to ensure the cleanliness of the inner and outer surfaces of the quartz crucible.

[0003] After the production of the quartz crucible in the prior art is completed, the quartz crucible is usually placed in a cleaning device for cleaning. After cleaning, the quartz crucible is transferred to a drying device to dry the inner and outer surfaces of the quartz crucible. The two processes are usually completed in different production devices. This cumbersome work leads to reduced production efficiency of the quartz crucible, affecting the production cycle of the quartz crucible. In addition, the production cost needs to be increased when setting up different production devices, resulting in higher production costs. In addition, since the texture of the quartz crucible is relatively crisp, the quartz crucible is easily damaged when the quartz crucible is transferred between the two processes, increasing the risk of scrap rate. Summary of the invention

[0004] The present invention aims to overcome the defects of the prior art and provides an integrated cleaning and drying device for producing quartz crucibles.

[0005] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions: a quartz crucible cleaning and drying device, comprising a control unit, a chassis, a conveying device passing through the chassis, and a plurality of carrying devices conveyed by the conveying device, each carrying device being capable of carrying one quartz crucible; a cleaning device, a water blowing device and a drying device are installed in the chassis.

[0006] Furthermore, a liquid receiving hopper is installed in the chassis, the liquid receiving hopper is connected to a liquid down pipe, and a liquid down pipe valve is installed at the liquid down pipe.

[0007] This makes it easy to really connect the liquid during the cleaning and blowing process and discharge the waste liquid out of the chassis.

[0008] Furthermore, the conveying device is a rotating roller conveying device, comprising a plurality of rotating rollers and a rotating roller driving unit for driving the rotating rollers to rotate.

[0009] The rotating roller driving unit drives the rotating roller to rotate, thereby enabling the carrying device to be transported.

[0010] In some embodiments, a conveyor belt type transport device may also be used.

[0011] Furthermore, the carrying device includes a carrying plate placed at the conveying device and two bracket units, wherein one bracket unit is hinged to the carrying plate, and the other bracket unit is abutted against the carrying plate, two rotating shafts are installed between the two bracket units, and carrying rollers that rotate synchronously with the rotating shafts are installed at the rotating shafts, the quartz crucible is carried between the two carrying rollers, and a passive abutment wheel is installed at one end of the rotating shaft; a driving wheel drive unit is installed in the chassis, and a driving wheel is installed at the driving wheel drive unit.

[0012] The carrying device is used to carry the quartz crucible. The driving wheel driving unit drives the driving wheel to rotate, thereby driving the passive abutting wheel to rotate, and then driving the rotating shaft and the carrying roller to rotate, so that the quartz crucible rotates.

[0013] Furthermore, the carrying roller has an anti-slip coating.

[0014] This increases the friction force, allowing the driving wheel and the passive abutment wheel to abut and rotate better.

[0015] Furthermore, the chassis has a cleaning position for cleaning by the cleaning device, a water blowing position for blowing water by the water blowing device, and a drying position for drying by the drying device. When the carrying device is located at the cleaning position, the active wheel abuts against one of the passive abutment wheels and can drive the passive abutment wheel to rotate.

[0016] The active wheel abuts against one of the passive abutting wheels and drives the passive abutting wheel to rotate, thereby driving the quartz crucible to rotate, so as to facilitate cleaning of the quartz crucible.

[0017] Further, when the bearing device is located at the water blowing position, the active wheel abuts against two passive abutting wheels and can drive the two passive abutting wheels to rotate, and at this time, the angle between the axis of the rotating shaft and the bearing plate is greater than or equal to 5 degrees, preferably greater than or equal to 10 degrees.

[0018] Furthermore, when the carrying device is located at the water blowing position, the angles formed by the axes of the two rotating shafts and the carrying plate are equal.

[0019] Thereby, the quartz crucible is driven to tilt and rotate rapidly, so that the water attached to the inside and outside of the quartz crucible can be blown off.

[0020] Furthermore, when the carrying device is located at the drying position, the active wheel abuts against another passive abutting wheel and can drive the passive abutting wheel to rotate.

[0021] Thereby, the quartz crucible is driven to rotate, making it easier to dry the quartz crucible.

[0022] Furthermore, the cleaning device includes an L-shaped external cleaning unit, a first translation drive unit for driving the external cleaning unit to translate, an L-shaped internal cleaning unit, a second translation drive unit for driving the internal cleaning unit to translate, and a liquid supply unit for supplying liquid to the external cleaning unit and the internal cleaning unit.

[0023] The liquid supply unit comprises a liquid pump, a liquid storage container and a liquid supply pipeline.

[0024] The liquid supply unit is convenient for providing cleaning liquid, the first translation drive unit drives the outer cleaning unit to translate, and the second translation drive unit drives the inner cleaning unit to translate, thereby achieving a good cleaning effect.

[0025] Furthermore, the water blowing device includes an external water blowing unit and an internal water blowing unit, the external water blowing unit includes a first electric push rod installed in the chassis, an L-shaped first air jet pipe driven by the first electric push rod, and a first fan connected to the first air jet pipe, the first air jet pipe has a plurality of first nozzles, the internal water blowing unit includes a mounting plate installed in the chassis, a second electric push rod installed at the mounting plate, a supporting plate driven by the second electric push rod, a ventilation pipe fixed at the supporting plate, a U-shaped second air jet pipe connected to the ventilation pipe, and a second fan connected to the ventilation pipe, the second air jet pipe has a plurality of second nozzles, the supporting plate has a plurality of supporting frames, and the supporting frames are provided with guide rollers capable of abutting against the circular edge of the open end of the quartz crucible.

[0026] Therefore, the outer water blowing unit and the inner water blowing unit blow water to the inside and outside of the quartz crucible, and the cleaning effect is good.

[0027] Furthermore, the drying device includes an external drying unit and an internal drying unit, the external drying unit includes an L-shaped drying plate, a first air supply pipe connected to the drying plate, a first heating unit installed at the first air supply pipe, and a third fan connected to the first air supply pipe, the drying plate has a plurality of drying nozzles, the internal drying unit includes a drying nozzle, a second air supply pipe connected to the drying nozzle, a second heating unit installed at the second air supply pipe, and a fourth fan connected to the second air supply pipe.

[0028] The outer drying unit and the inner drying unit dry the inner and outer sides of the quartz crucible, thereby achieving drying.

[0029] Furthermore, three supporting frames and three supporting frames are installed on the supporting plate; more than four guide rollers are installed on each supporting frame; there are two second electric push rods, the supporting plate has multiple guide rods, and the mounting plate has multiple guide holes that cooperate with the guide rods.

[0030] The guide rod guides the supporting plate, so that the supporting plate can move and position accurately.

[0031] Further, the external cleaning unit includes an L-shaped external spray rod having multiple spray holes, and a first buffer box connected to the inner cavity of the external spray rod; the first translation drive unit includes a first mounting frame, a first slide rail located at the first mounting frame, a first slider installed on the first slide rail and connected to the first buffer box, a first motor installed at the first mounting frame, and a first screw rod installed on the first mounting frame and driven by the first motor, and the first slider has a first threaded hole that cooperates with the first screw rod; the internal cleaning unit includes an L-shaped internal spray rod having multiple spray holes, and a second buffer box connected to the inner cavity of the internal spray rod; the second translation drive unit includes a second mounting frame, a second slide rail located at the second mounting frame, a second slider installed on the second slide rail and connected to the second buffer box, a second motor installed at the second mounting frame, and a second screw rod installed on the second mounting frame and driven by the second motor, and the second slider has a second threaded hole that cooperates with the second screw rod; the liquid supply unit is used to supply liquid to the first buffer box and the second buffer box.

[0032] The outer spray rod and the inner spray rod are driven to translate respectively by corresponding translation drive units, so that the cleaning liquid sprayed from the spray holes at the inner spray rod cleans the inside of the quartz crucible, and the cleaning liquid sprayed from the spray holes at the outer spray rod cleans the outside of the quartz crucible.

[0033] Furthermore, the chassis includes a front panel and a back panel, the back panel is provided with three image acquisition units corresponding to the cleaning position, the water blowing position and the drying position respectively; the carrying device is installed with an identification mark that can be recognized by the image acquisition unit.

[0034] Therefore, the three image acquisition units can respectively acquire images of the cleaning position, water blowing position and drying position, so as to facilitate monitoring of the cleaning and drying conditions in the chassis.

[0035] Further, when the carrying device is located at the washing position, the carrying plate is parallel to the horizontal plane; when the carrying device is located at the drying position, the carrying plate is parallel to the horizontal plane.

[0036] Furthermore, both ends of the bearing plate are connected to counterweight blocks via connecting plates.

[0037] Further, the weight of the counterweight block at each end is greater than the weight of the quartz crucible.

[0038] Preferably, the weight of the counterweight block at each end of the carrying plate is greater than 1.5 times the weight of the quartz crucible.

[0039] Since the counterweight blocks are located at both ends and the counterweight blocks make the center of gravity of the load-bearing device lower, the transportation of the load-bearing device is more stable.

[0040] Furthermore, the bracket unit hinged to the supporting plate is hinged to the supporting plate through an elastic reset hinge component, and the bracket unit includes a horizontal plate and two vertical plates connected to the horizontal plate, each vertical plate is passed through by a rotating shaft and a bearing is installed between each vertical plate and the corresponding rotating shaft.

[0041] Furthermore, a touch screen, physical buttons and an observation window are installed on the panel.

[0042] Furthermore, the chassis includes a top plate and a bottom plate, and the bottom plate is provided with a plurality of supporting legs.

[0043] Furthermore, the supporting plate includes a circular ring plate and a plurality of radial plates connected to the circular ring plate.

[0044] Furthermore, the outer spray bar and the inner spray bar both have an inner cavity.

[0045] Furthermore, the drying plate has an inner cavity connected to the drying nozzle.

[0046] Furthermore, a pressure sensor, a microprocessor, a first Bluetooth unit and a battery unit are installed on the supporting plate; the bracket unit hinged to the supporting plate among the two bracket units of the supporting device is the first bracket unit, and the other bracket unit is the second bracket unit, and the second bracket unit can press the pressure sensor; the control unit includes a second Bluetooth unit that can communicate with the first Bluetooth unit.

[0047] Therefore, based on the measurement value of the pressure sensor, the abutment between the passive abutment wheel and the active wheel can be better detected. Because when the passive abutment wheel abuts against the active wheel, the conveying device will push the carrying plate upward when it moves forward a little bit, so that the pressure value of the pressure sensor becomes smaller, thereby achieving better positioning of the carrying device at the conveying device based on the measurement value of the pressure sensor.

[0048] In some embodiments, multiple position sensors may be installed at the delivery device.

[0049] Thereby, the position of the carrying device at the conveying device can be better known.

[0050] Beneficial effects:

[0051] 1. The quartz crucible production device of the present application has a cleaning device, a water blowing device and a drying device in the chassis, thereby realizing the integration of cleaning and drying, saving production costs and facilitating the cleaning and drying of the inside and outside of the quartz crucible, with good cleaning effect and able to improve work efficiency.

[0052] 2. The chassis is provided with a cleaning position corresponding to the cleaning device, a water blowing position corresponding to the water blowing device, and a drying position corresponding to the drying device, so that each process does not interfere with each other and each process is automated. BRIEF DESCRIPTION OF THE DRAWINGS

[0053] Figure 1 It is a schematic diagram of the carrier device being prepared to be moved to the cleaning position;

[0054] Figure 2 It is an enlarged schematic diagram of area 1A;

[0055] Figure 3 It is an enlarged schematic diagram of area 1B;

[0056] Figure 4 It is a magnified schematic diagram of the 1C area;

[0057] Figure 5 is a schematic diagram of the carrier device being located in the cleaning position;

[0058] Figure 6 It is an enlarged schematic diagram of the 2A area;

[0059] Figure 7 It is an enlarged schematic diagram of area 2B;

[0060] Figure 8 is a schematic diagram of the carrier device at the water blowing position;

[0061] Fig. 9 This is an enlarged schematic diagram of the 3A area;

[0062] Fig.10 is a schematic diagram of the carrying device being located at the drying position;

[0063] Fig.11 This is an enlarged schematic diagram of area 4A;

[0064] Fig.12 It is a schematic diagram of the carrying device coming down from the drying position;

[0065] Description of reference numerals:

[0066] 1 chassis; 1.1 back panel; 1.2 image acquisition unit;

[0067] 2 conveying device; 2.1 rotating roller;

[0068] 3 bearing device; 3.1 quartz crucible; 3.2 bearing plate; 3.2.1 connecting plate; 3.2.2 counterweight; 3.3 bracket unit; 3.3.1 horizontal plate; 3.3.2 vertical plate; 3.4 bearing roller; 3.5 passive abutment wheel; 3.6 identification mark;

[0069] 4. Liquid receiving hopper; 4.1 Liquid lower pipe;

[0070] 5 driving wheel drive unit; 5.1 driving wheel;

[0071] 6.1 first jet pipe; 6.1.1 first nozzle; 6.2 mounting plate; 6.2.1 second electric push rod; 6.3 supporting plate; 6.3.1 guide rod; 6.4 ventilation pipe; 6.5 second jet pipe; 6.5.1 second nozzle; 6.6 supporting frame; 6.6.1 guide roller;

[0072] 7.1 Drying plate; 7.1.1 Drying nozzle; 7.2 First air supply pipe; 7.2.1 First heating unit; 7.3 Third fan; 7.4 Drying nozzle; 7.5 Second air supply pipe; 7.5.1 Second heating unit; 7.6 Fourth fan;

[0073] 8.1 outer spray rod; 8.2 first buffer box; 8.3 first slider; 8.4; first motor; 8.5 first screw rod; 8.6 inner spray rod; 8.7 second buffer box; 8.8 second slider; 8.9 second screw rod. DETAILED DESCRIPTION

[0074] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0075] The present invention provides Figure 1-12 The shown integrated cleaning and drying device for quartz crucible production includes a control unit, a chassis 1, a conveying device 2 passing through the chassis, and a plurality of carrying devices 3 conveyed by the conveying device 2, each carrying device 3 being capable of carrying one quartz crucible 3.1; a cleaning device, a water blowing device and a drying device are installed in the chassis 1.

[0076] A liquid receiving hopper 4 is installed in the chassis 1, and the liquid receiving hopper 4 is connected to a liquid down pipe 4.1, and a liquid down pipe valve is installed at the liquid down pipe 4.1; the conveying device 2 is a rotating roller conveying device, including a plurality of rotating rollers 2.1 and a rotating roller driving unit for driving the rotating rollers 2.1 to rotate.

[0077] The carrying device 3 includes a carrying plate 3.2 placed at the conveying device 2 and two bracket units 3.3, wherein one bracket unit 3.3 is hinged to the carrying plate 3.2, and the other bracket unit 3.3 is in contact with the carrying plate 3.2, two rotating shafts are installed between the two bracket units 3.3, and a carrying roller 3.4 that rotates synchronously with the rotating shaft is installed at the rotating shaft, the quartz crucible 3.1 is carried between the two carrying rollers 3.4, and a passive abutment wheel 3.5 is installed at one end of the rotating shaft; a driving wheel driving unit 5 is installed in the chassis 1, and a driving wheel 5.1 is installed at the driving wheel driving unit 5, and the chassis 1 has a cleaning position cleaned by the cleaning device, a water blowing position blown by the water blowing device, and a water blowing position blown by the water blowing device. The drying position of the drying device, when the carrying device 3 is located in the washing position, the active wheel 5.1 abuts against one of the passive abutting wheels 3.5 and can drive the passive abutting wheel 3.5 to rotate; when the carrying device 3 is located in the water blowing position, the active wheel 5.1 abuts against two passive abutting wheels 3.5 and can drive the two passive abutting wheels 3.5 to rotate, and at this time, the angle between the axis of the rotating shaft and the carrying plate is greater than or equal to 5 degrees; when the carrying device 3 is located in the drying position, the active wheel 5.1 abuts against another passive abutting wheel 3.5 and can drive the passive abutting wheel 3.5 to rotate; the washing device comprises an L-shaped outer washing unit, a first translation driving unit for driving the outer washing unit to translate, and an L-shaped inner The water blowing device comprises an outer water blowing unit and an inner water blowing unit, wherein the outer water blowing unit comprises a first electric push rod installed in the chassis 1, an L-shaped first air jet pipe 6.1 driven by the first electric push rod, and a first fan connected to the first air jet pipe 6.1, wherein the first air jet pipe 6.1 has a plurality of first nozzles 6.1.1, and the inner water blowing unit comprises a mounting plate 6.2 installed in the chassis 1, a second electric push rod 6.2.1 installed at the mounting plate 6.2, a supporting plate 6.3 driven by the second electric push rod 6.2.1, a ventilation pipe 6.4 fixed at the supporting plate 6.3, and a first fan connected to the first air jet pipe 6.1. A U-shaped second air injection pipe 6.5 connected to the ventilation pipe 6.4 and a second fan connected to the ventilation pipe 6.4, the second air injection pipe 6.5 has a plurality of second nozzles 6.5.1, the supporting plate 6.3 has a plurality of supporting frames 6.6, the supporting frames 6.6 are equipped with guide rollers 6.6.1 capable of abutting against the circular edge of the open end of the quartz crucible 3.1; the drying device comprises an outer drying unit and an inner drying unit, the outer drying unit comprises an L-shaped drying plate 7.1, a first air supply pipe 7.2 connected to the drying plate 7.1, a first heating unit 7.2.1 installed at the first air supply pipe 7.2 and a third fan 7.3 connected to the first air supply pipe 7.2, the drying plate 7.1 has a plurality of drying nozzles 7.1.1, the inner drying unit comprises a drying nozzle 7.4, a second air supply pipe 7.5 connected to the drying nozzle 7.4, a second heating unit 7.5.1 installed at the second air supply pipe 7.5, and a fourth fan 7.6 connected to the second air supply pipe 7.5; three supporting frames 6.6 are installed at the supporting plate 6.3, and three supporting frames 6.6; each supporting frame 6.6 is installed with more than four guide rollers 6.6.1; there are two second electric push rods 6.2.1, the supporting plate 6.3 has a plurality of guide rods 6.3.1, and the mounting plate 6.2 has a plurality of guide holes matched with the guide rods 6.3.1. .

[0078] The external cleaning unit comprises an L-shaped external spray bar 8.1 having a plurality of spray holes, a first buffer box 8.2 connected to the inner cavity of the external spray bar 8.1, the first translation drive unit comprises a first mounting frame, a first slide rail located at the first mounting frame, a first slider 8.3 mounted on the first slide rail and connected to the first buffer box 8.2, a first motor 8.4 mounted on the first mounting frame, a first screw rod 8.5 mounted on the first mounting frame and driven by the first motor 8.4, the first slider 8.3 having a first threaded hole matched with the first screw rod 8.5; the internal cleaning unit comprises An L-shaped inner spray rod 8.6 with multiple spray holes, a second buffer box 8.7 connected to the inner cavity of the inner spray rod 8.6, the second translation drive unit includes a second mounting frame, a second slide rail located at the second mounting frame, a second slider 8.8 installed on the second slide rail and connected to the second buffer box 8.7, a second motor installed on the second mounting frame, a second screw rod 8.9 installed on the second mounting frame and driven by the second motor, the second slider 8.8 has a second threaded hole that cooperates with the second screw rod 8.9; the liquid supply unit is used to supply liquid to the first buffer box 8.2 and the second buffer box 8.7.

[0079] The chassis 1 includes a panel and a back panel 1.1, and the back panel 1.1 is provided with three image acquisition units 1.2, which correspond to the washing position, the water blowing position and the drying position respectively; the carrying device 3 is installed with an identification mark 3.6 that can be recognized by the image acquisition unit 1.2; the panel is installed with a touch screen, a physical button and an observation window; when the carrying device 3 is located in the washing position, the carrying plate 3.2 is parallel to the horizontal plane; when the carrying device 3 is located in the drying position, the carrying plate 3.2 is parallel to the horizontal plane; both ends of the carrying plate 3.2 are connected with counterweight blocks 3.2.2 through connecting plates 3.2.1; the bracket unit 3.3 hinged to the carrying plate 3.2 is hinged to the carrying plate 3.2 through an elastic reset hinge component, and the bracket unit 3.3 includes a horizontal plate 3.3.1 and two vertical plates 3.3.2 connected to the horizontal plate, each vertical plate 3.3.2 is passed through by one of the rotating shafts and a bearing is installed between each vertical plate and the corresponding rotating shaft.

[0080] Working principle: The device of the present application has a cleaning device, a water blowing device and a drying device in the chassis, so as to realize the integration of cleaning and drying, save production costs and facilitate the cleaning and drying of the inside and outside of the quartz crucible, with good cleaning effect and improved work efficiency. The waste liquid after cleaning is collected by the liquid receiving hopper and then discharged through the lower liquid pipe. The chassis has a cleaning position corresponding to the cleaning device, a water blowing position corresponding to the water blowing device and a drying position corresponding to the drying device, so that each process does not interfere with each other and each process is automated.

[0081] The specific workflow is as follows:

[0082] Step 1, cleaning:

[0083] Start the rotating roller driving unit to drive the rotating roller to rotate, and transport the carrying device carrying the quartz crucible to the cleaning position, start the active wheel driving unit to drive the active wheel to rotate, thereby driving one of the passive abutment wheels to rotate, and then driving the rotating shaft and the carrying roller to rotate, so that the quartz crucible rotates, start the first translation driving unit to drive the outer spray rod to translate, and start the second translation driving unit to drive the inner spray rod to translate, so that the cleaning liquid sprayed from the spray hole at the inner spray rod cleans the inside of the quartz crucible, and the cleaning liquid sprayed from the spray hole at the outer spray rod cleans the outside of the quartz crucible.

[0084] Step 2: Blow water:

[0085] The rotating roller driving unit is started to drive the rotating roller to rotate, and the quartz crucible is transported to the water blowing position. Due to the effect of the elastic reset hinged component, the bottom of the quartz crucible is lifted up and forms a certain angle with the horizontal plane. The active wheel abuts against the two passive abutting wheels and drives the two passive abutting wheels to rotate, thereby driving the quartz crucible to tilt and rotate. Moreover, due to the existence of the support frame, the crucible is supported more stably under the support of the two bearing rollers and the guide rollers. Therefore, the active wheel can rotate at a faster speed at this time, thereby driving the quartz crucible to rotate faster. At this time, the first and second nozzles blow out high-speed airflow (high-speed airflow does not need to be heated), thereby quickly blowing off the water attached to the surface of the quartz crucible. And at this time, because the quartz crucible is tilted and the opening is facing downward, the water attached to the inner and outer surfaces of the quartz crucible can be blown off quickly. The quartz crucible rotates faster, which is more conducive to the rapid blowing off of attached water.

[0086] The third step, drying:

[0087] The rotating roller driving unit is started to drive the rotating roller to rotate and transport the quartz crucible to the drying position. The active wheel driving unit is started to drive the active wheel to rotate, thereby driving another passive abutting wheel to rotate, so that the quartz crucible rotates. At this time, due to the action of the elastic reset hinged component, the lifted bracket unit is reset to the supporting plate. The third fan is started to supply air through the first air supply pipe, and the gas in the first air supply pipe is heated by the first heating unit, so that the hot air flow ejected from the drying nozzle at the drying plate dries the outside of the quartz crucible. At the same time, the fourth fan is started to supply air through the second air supply pipe, and the gas in the second air supply pipe is heated by the second heating unit, and the hot air flow ejected from the drying nozzle dries the inside of the quartz crucible.

[0088] The design of the present application realizes the driving rotation of the quartz crucible at different positions through the driving wheel on the one hand, and also realizes the lifting and tilting of the quartz crucible at the water blowing position on the other hand. The three working positions are more compact, so that the whole structure is more compact and the work is more efficient.

[0089] Although the present invention has been illustrated and described with respect to the preferred embodiments, it will be appreciated by those skilled in the art that various changes and modifications may be made to the present invention without departing from the scope of the present invention as defined by the claims.

Claims

1. An integrated cleaning and drying device for quartz crucible production, It is characterized in that The invention comprises a control unit, a chassis, a conveying device passing through the chassis, and a plurality of bearing devices conveyed by the conveying device, each bearing device being capable of bearing one of the quartz crucibles; a cleaning device, a water blowing device, and a drying device are installed in the chassis; the bearing device comprises a bearing plate placed at the conveying device and two bracket units, one of which is hinged to the bearing plate, and the other is abutted against the bearing plate, two rotating shafts are installed between the two bracket units, a bearing roller which rotates synchronously with the rotating shaft is installed at the rotating shaft, the quartz crucible is carried between the two bearing rollers, and a passive abutting wheel is installed at one end of the rotating shaft; a driving wheel driving unit is installed in the chassis, and the driving wheel driving unit A driving wheel is installed at the element, and the chassis has a washing position for washing by the washing device, a water blowing position for blowing water by the water blowing device, and a drying position for drying by the drying device. When the carrying device is located at the washing position, the driving wheel abuts against one of the passive abutting wheels and can drive the passive abutting wheel to rotate; when the carrying device is located at the water blowing position, the driving wheel abuts against two passive abutting wheels and can drive the two passive abutting wheels to rotate, and at this time, the angle between the axis of the rotating shaft and the carrying plate is greater than or equal to 5 degrees; when the carrying device is located at the drying position, the driving wheel abuts against another passive abutting wheel and can drive the passive abutting wheel to rotate; the washing device includes an L-shaped external washing unit , a first translation drive unit for driving the translation of the outer cleaning unit, an L-shaped inner cleaning unit, a second translation drive unit for driving the translation of the inner cleaning unit, and a liquid supply unit for supplying liquid to the outer cleaning unit and the inner cleaning unit; the water blowing device includes an outer water blowing unit and an inner water blowing unit, the outer water blowing unit includes a first electric push rod installed in the chassis, an L-shaped first jet pipe driven by the first electric push rod, and a first fan connected to the first jet pipe, the first jet pipe has a plurality of first nozzles, the inner water blowing unit includes a mounting plate installed in the chassis, a second electric push rod installed at the mounting plate, a supporting plate driven by the second electric push rod, a ventilation pipe fixed at the supporting plate, and a first fan connected to the ventilation pipe. A U-shaped second air injection pipe and a second fan connected to the ventilation pipe, the second air injection pipe is provided with a plurality of second nozzles, the supporting plate is provided with a plurality of supporting frames, and the supporting frames are provided with guide rollers capable of abutting against the circular edge of the open end of the quartz crucible; the drying device comprises an outer drying unit and an inner drying unit, the outer drying unit comprises an L-shaped drying plate, a first air supply pipe connected to the drying plate, a first heating unit installed at the first air supply pipe, and a third fan connected to the first air supply pipe, the drying plate is provided with a plurality of drying nozzles, the inner drying unit comprises a drying nozzle, a second air supply pipe connected to the drying nozzle, a second heating unit installed at the second air supply pipe, and a fourth fan connected to the second air supply pipe.

2. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that A liquid receiving hopper is installed in the chassis, the liquid receiving hopper is connected with a liquid down pipe, and a liquid down pipe valve is installed at the liquid down pipe.

3. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that The conveying device is a rotating roller conveying device, which includes a plurality of rotating rollers and a rotating roller driving unit for driving the rotating rollers to rotate.

4. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that The supporting plate is provided with three supporting frames; each supporting frame is provided with more than four guide rollers; there are two second electric push rods, the supporting plate is provided with a plurality of guide rods, and the mounting plate is provided with a plurality of guide holes matched with the guide rods.

5. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that The external cleaning unit includes an L-shaped external spray rod with multiple spray holes, and a first buffer box connected to the inner cavity of the external spray rod; the first translation drive unit includes a first mounting frame, a first slide rail located at the first mounting frame, a first slider installed on the first slide rail and connected to the first buffer box, a first motor installed at the first mounting frame, and a first screw rod installed on the first mounting frame and driven by the first motor, and the first slider has a first threaded hole that cooperates with the first screw rod; the internal cleaning unit includes an L-shaped internal spray rod with multiple spray holes, and a second buffer box connected to the inner cavity of the internal spray rod; the second translation drive unit includes a second mounting frame, a second slide rail located at the second mounting frame, a second slider installed on the second slide rail and connected to the second buffer box, a second motor installed at the second mounting frame, and a second screw rod installed on the second mounting frame and driven by the second motor, and the second slider has a second threaded hole that cooperates with the second screw rod; the liquid supply unit is used to supply liquid to the first buffer box and the second buffer box.

6. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that The chassis includes a front panel and a back panel. The back panel is provided with three image acquisition units corresponding to the cleaning position, the water blowing position and the drying position respectively. The carrying device is provided with an identification mark that can be identified by the image acquisition unit.

7. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that When the carrying device is located at the washing position, the carrying plate is parallel to the horizontal plane; when the carrying device is located at the drying position, the carrying plate is parallel to the horizontal plane.

8. The integrated cleaning and drying device for producing quartz crucible according to claim 1, It is characterized in that Both ends of the support plate are connected to counterweight blocks via connecting plates; the bracket unit hinged to the support plate is hinged to the support plate via an elastic reset hinge component, and the bracket unit includes a horizontal plate and two vertical plates connected to the horizontal plate, each vertical plate is penetrated by a rotating shaft and a bearing is installed between each vertical plate and the corresponding rotating shaft.

9. The integrated cleaning and drying device for producing quartz crucible according to claim 6, It is characterized in that The panel is equipped with a touch screen, physical buttons and an observation window.

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