Diamond wire inclined pull deviation correction system at incoming wire side and deviation correction method thereof

Abstract

The application discloses a kind of wire feeding side diamond wire cable-stayed deviation correction system and its deviation correction method, including controller, diamond wire, wire arranging wheel and take-up roller, wire arranging wheel is parallelly arranged relative to the axial direction of take-up roller;Take-up roller is used to wind diamond wire from wire arranging wheel, and wire arranging wheel drives diamond wire to move along the axial direction of take-up roller parallelly reciprocating;The corresponding side of wire arranging wheel and take-up roller along the axial direction of take-up roller is respectively parallelly arranged with multiple groups of sensors corresponding to the other side two by two, and the two by two corresponding sensor group is respectively electrically connected with controller;When diamond wire is horizontally inclined cutting or vertically inclined cutting, the time difference of diamond wire sensed by two sensors in a group of paired sensors, controller calculates and interprets the cable-stayed information, cable-stayed direction and cable-stayed inclination of diamond wire, to control the real-time horizontal movement of wire arranging wheel to eliminate cable-stayed, realize the real-time automatic deviation correction of diamond wire.

Description

[Technical Field]

[0001] This invention relates to diamond wire alignment technology in monocrystalline silicon processing, and more particularly to a diamond wire inclined alignment system and its alignment method on the wire inlet and outlet sides. [Background Technology]

[0002] With the development of the photovoltaic industry, the requirements for polysilicon production processes and product quality are becoming increasingly stringent. In existing technologies, diamond wire multi-wire slicing machines cut multiple silicon rods using diamond wire. The diamond wire achieves the cutting effect by rubbing against hard and brittle materials like silicon rods during high-speed reciprocating motion. To ensure stable operation of diamond wire cutting over long periods and smooth wire routing, the diamond wire segments between the guide wheel and the moving wire reel need to be kept as vertical as possible, ideally vertically leading out or back. However, due to errors in the wire routing spacing between the wire winding equipment and the slicing machine, and because these differences accumulate with the number of winding turns, severe wire skewing occurs, making vertical wire routing difficult. Large-angle deviations can cause the diamond wire to run off-center, leading to uneven kerfs, cracking, and other defects due to the hard and brittle nature of diamond wire, resulting in poor cutting quality. Furthermore, it can cause wire breakage, severely affecting the operation of the diamond wire multi-wire slicing machine and causing poor equipment stability.

[0003] To address the above technical issues, a tension sensor is installed during the diamond wire cutting process. The diamond wire multi-wire slicing machine senses the fluctuations in the diamond wire through the tension sensor to identify whether the diamond wire is being pulled at an angle. It also senses whether the angle of the pull is acute or obtuse. Finally, the degree of pull is controlled by adjusting the speed of the wire guide rollers for lateral correction, thus completing the correction of the diamond wire's angle pull. However, since the diamond wire multi-wire slicing machine determines whether the diamond wire is being pulled at an angle by sensing the fluctuations in the diamond wire through the tension sensor, many factors can cause tension fluctuations during the cutting process. This leads to frequent misjudgments by the tension sensor correction system, preventing effective monitoring and correction of the diamond wire. In fact, misoperation can result in the diamond wire breaking due to the pulling at an angle. [Summary of the Invention]

[0004] This invention provides a diamond wire inclined pull correction system and correction method on the inlet and outlet sides. The system obtains the movement posture of the diamond wire by reading the position of the diamond wire at multiple points through multiple sets of pairs of positively corresponding sensor groups, thereby realizing real-time automatic correction of the diamond wire.

[0005] The technical solution adopted in at least one embodiment of the present invention is:

[0006] A diamond wire inclined pull correction system for the take-up side includes a controller, diamond wire, wire feeding wheel and take-up roller, wherein the wire feeding wheel is parallel to the axial direction of the take-up roller and is spaced apart by a certain distance;

[0007] The take-up roller is used to wind the diamond wire led out from the wire guide wheel, and the wire guide wheel drives the diamond wire to move in parallel reciprocating motion along the axial direction of the take-up roller;

[0008] Multiple sets of sensors are arranged parallel to each other on the corresponding side of the take-up roller along the axial direction of the take-up roller. Each sensor on the take-up roller side and the sensor on the take-up roller side form a pair of sensors that sense the passage of diamond wire. The pair of sensors that are positively corresponding to each other are electrically connected to the controller.

[0009] When the diamond wire is cut horizontally or vertically, the input and output ends of the diamond wire simultaneously pass through a pair of corresponding sensors. When the diamond wire is cut horizontally at an angle or vertically at an angle, in the pair of corresponding sensors, one sensor senses the diamond wire input or output end passing in advance, while the other sensor senses the diamond wire output or input end passing after a delay. The controller calculates and interprets the angled pull information, direction, and tilt of the diamond wire based on the time difference between the two sensors in the pair of sensors. The controller further controls the lateral movement of the wire guide wheel to eliminate the angled pull.

[0010] A method for correcting the wire guide system on the take-up side as described above involves multiple sets of sensors arranged parallel to each other on the corresponding sides of the take-up roller and the winding wheel along the axial direction of the take-up roller. One sensor on the winding wheel side and one sensor on the take-up roller side form a pair of sensors that mutually sense the passage of the diamond wire. These pair of sensors are electrically connected to a controller. The correction method includes the following steps:

[0011] Step S1: The wire guide wheel drives the diamond wire to move back and forth in parallel along the axial direction of the take-up roller;

[0012] Step S2: When the diamond wire is cutting horizontally or vertically, the diamond wire input end and the diamond wire output end pass through a pair of corresponding sensors in the same direction at the same time. Since there is no time difference between the diamond wire sensed by the two sensors, the controller controls the wire guide wheel to move and cut normally.

[0013] Step S3: When the diamond wire is horizontally inclined or vertically inclined, in a pair of corresponding sensors, one sensor senses the diamond wire input or output end passing in advance, while the other sensor senses the diamond wire output or input end passing after a certain delay. The controller determines that the diamond wire is in an inclined state by sensing the time difference between the two sensors in the pair of sensors. Based on the received time difference information, the controller calculates the inclined direction and the inclined amount of the diamond wire. The controller further controls the wire guide wheel to move laterally to eliminate the inclined state.

[0014] Furthermore, step S3 also includes: during the process of eliminating the oblique pull, the adjacent pair of sensor groups or other pair of sensor groups simultaneously confirm whether the abnormal oblique pull of the diamond wire has been eliminated, and based on the processing result, the controller decides whether it is necessary to further eliminate the oblique pull by controlling the lateral movement of the wire guide wheel to readjust.

[0015] The beneficial effects of this invention are:

[0016] This invention uses multiple sets of sensors, arranged in pairs vertically or horizontally, to sense the lead-out and take-up ends of the diamond wire. Based on the time difference in sensing the diamond wire, it calculates the diagonal pull information, diagonal pull direction, and diagonal pull inclination, thereby controlling the movement of the wire guide wheel to eliminate diagonal pull, improving the accuracy of diamond wire diagonal pull identification, and effectively reducing the false judgment rate of diamond wire diagonal pull.

[0017] When diamond wire is being cut horizontally at an angle or vertically at an angle, in a pair of positively aligned sensors, one sensor detects the passage of the diamond wire's input or output end in advance, while the other sensor detects its passage a certain time later. This time difference in sensing between the two sensors in the pair allows the controller to calculate and interpret the angled wire information, direction, and tilt amount, thereby controlling the wire guide wheel to move laterally in real time to eliminate the angled wire movement. Compared to existing angled wire correction methods, this approach uses multiple pairs of positively aligned sensors to read the diamond wire's position at multiple points, obtaining its motion posture and achieving real-time automatic correction. It features a simple structure, ease of operation, and intuitive and accurate identification of the diamond wire's working status by recognizing its motion posture, resulting in a low false alarm rate and significantly improving the accuracy of diamond wire angled wire identification while reducing the false alarm rate.

[0018] Moreover, this correction method can be controlled and used during both the processing and machine adjustment processes, effectively reducing the operator's need to adjust the diamond wire angle pull and effectively improving the cutting efficiency of semiconductor hard and brittle materials. [Attached Image Description]

[0019] Figure 1This is an enlarged schematic diagram of the installation and connection structure of the diamond wire in an embodiment of the present invention.

Detailed Implementation Methods

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] A diamond wire inclined guide correction system for the inlet and outlet sides, such as Figure 1 As shown, it includes a controller (not shown in the figure), diamond wire 1, a wire feeding wheel 2 and a take-up roller 3. The wire feeding wheel 2 is parallel to the axis of the take-up roller 3 and is set at a distance from it. The take-up roller 3 is used to wind the diamond wire 1 led out from the wire feeding wheel 2. The wire feeding wheel 2 drives the diamond wire 1 to move back and forth in parallel along the axis of the take-up roller 3.

[0022] Continue as Figure 1 As shown, multiple sets of sensors 4 are arranged parallel to each other on the corresponding sides of the take-up roller 3 and the take-up roller 2 along the axial direction of the take-up roller 3. One sensor 4 on the side of the take-up roller 2 and one sensor 4 on the side of the take-up roller 3 form a pair of sensors that sense the passage of the diamond wire 1. The pairs of sensors that are positively correlated are electrically connected to the controller. When the diamond wire 1 cuts horizontally or vertically, the input end and the output end of the diamond wire 1 simultaneously pass through a pair of sensors that are positively correlated. When the diamond wire 1 is horizontally inclined or vertically inclined, in a pair of corresponding sensors, one sensor 4 senses the passing of the input or output end of the diamond wire 1 in advance, and the other sensor 4 senses the passing of the output or input end of the diamond wire 1 after a certain delay. The controller calculates and interprets the inclined information, inclined direction and inclined amount of the diamond wire 1 by sensing the time difference of the diamond wire 1 sensed by the two sensors 4 in the pair of sensors. The controller further controls the traverse wheel 2 to eliminate the inclined pull.

[0023] The correction method corresponding to the diamond wire inclined pull correction system on the inlet and outlet sides includes the following steps:

[0024] Step S1: The wire guide wheel drives the diamond wire to move back and forth in parallel along the axial direction of the take-up roller;

[0025] Step S2: When the diamond wire is cutting horizontally or vertically, the diamond wire input end and the diamond wire output end pass through a pair of corresponding sensors in the same direction at the same time. Since there is no time difference between the diamond wire sensed by the two sensors, the controller controls the wire guide wheel to move and cut normally.

[0026] Step S3: When the diamond wire is horizontally inclined or vertically inclined, in a pair of corresponding sensors, one sensor senses the diamond wire input or output end passing in advance, while the other sensor senses the diamond wire output or input end passing after a certain delay. The controller determines that the diamond wire is in an inclined state by sensing the time difference between the two sensors in the pair of sensors. Based on the received time difference information, the controller calculates the inclined direction and the inclined amount of the diamond wire. The controller further controls the wire guide wheel to move laterally to eliminate the inclined state.

[0027] In step S3, the process of eliminating the oblique pull also includes: during the process of eliminating the oblique pull, the adjacent pair of sensor groups or other pair of sensor groups simultaneously confirm whether the oblique pull abnormality of the diamond wire has been eliminated, and based on the processing result, the controller decides whether it is necessary to further eliminate the oblique pull by controlling the lateral movement of the wire guide wheel to adjust it again.

[0028] In this embodiment, a time difference is detected by two sensors in a paired sensor group. The controller then calculates and interprets the wire's anti-slip information, anti-slip direction, and anti-slip tilt amount to control the real-time lateral movement of the wire guide wheel to eliminate anti-slip. Compared to existing anti-slip correction methods, this approach uses multiple pairs of positively aligned sensor groups to read the wire's position at multiple points to obtain its motion posture, achieving real-time automatic anti-slip correction. It features a simple structure, ease of operation, and intuitive and accurate identification of the wire's working status by recognizing its motion posture, with a low false positive rate. This effectively improves the accuracy of anti-slip identification and significantly reduces the false positive rate.

[0029] The above-described embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. All equivalent changes made in accordance with the shape, structure and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. A deviation correction method of a feeding and winding side diamond wire cable-stayed deviation correction system, characterized by, The diamond wire inclined pull correction system on the take-up side includes a controller, diamond wire, wire feeding wheel and take-up roller. The wire feeding wheel is parallel to the axial direction of the take-up roller and is set at a distance from it. The take-up roller is used to wind the diamond wire led out from the wire guide wheel, and the wire guide wheel drives the diamond wire to move in parallel reciprocating motion along the axial direction of the take-up roller; Multiple sets of sensors are arranged parallel to each other on the corresponding side of the take-up roller along the axial direction of the take-up roller. Each sensor on the take-up roller side and the sensor on the take-up roller side form a pair of sensors that sense the passage of diamond wire. The pair of sensors that are positively corresponding to each other are electrically connected to the controller. When the diamond wire is cut horizontally or vertically, the input and output ends of the diamond wire simultaneously pass through a pair of corresponding sensors. When the diamond wire is cut horizontally at an angle or vertically at an angle, in the pair of corresponding sensors, one sensor senses the diamond wire input or output end passing in advance, while the other sensor senses the diamond wire output or input end passing after a delay. The controller calculates and interprets the angled pull information, direction, and tilt of the diamond wire based on the time difference between the two sensors in the pair of sensors. The controller further controls the lateral movement of the wire guide wheel to eliminate the angled pull. The corrective method includes the following steps: Step S1: The wire guide wheel drives the diamond wire to move back and forth in parallel along the axial direction of the take-up roller; Step S2: When the diamond wire is cutting horizontally or vertically, the diamond wire input end and the diamond wire output end pass through a pair of corresponding sensors in the same direction at the same time. Since there is no time difference between the diamond wire sensed by the two sensors, the controller controls the wire guide wheel to move and cut normally. Step S3: When the diamond wire is horizontally inclined or vertically inclined, in a pair of corresponding sensors, one sensor senses the diamond wire input or output end passing in advance, while the other sensor senses the diamond wire output or input end passing after a certain delay. The controller determines that the diamond wire is in an inclined state by sensing the time difference between the two sensors in the pair of sensors. Based on the received time difference information, the controller calculates the inclined direction and the inclined amount of the diamond wire. The controller further controls the wire guide wheel to move laterally to eliminate the inclined state.

2. The deviation correction method of the supply and take-up wire side diamond wire cable bending deviation correction system according to claim 1, characterized in that: Step S3 further includes: during the process of eliminating the oblique pull, the adjacent paired sensing group or other paired sensing groups simultaneously confirm whether the oblique pull abnormality of the diamond wire has been eliminated, and based on the processing result, the controller decides whether it is necessary to further eliminate the oblique pull by controlling the lateral movement of the wire guide wheel to adjust it again.

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