Sandwich structure quartz resonator and optimization method thereof, hydrogen sensor

Abstract

The application relates to a sandwich structure quartz resonator and an optimization method thereof and a hydrogen sensor. The quartz resonator comprises metal electrodes and a quartz light plate; the metal electrodes are arranged on the upper and lower sides of the quartz light plate to form a sandwich structure; the lower metal electrode comprises a platinum electrode and a chromium electrode which are sequentially arranged in layers from bottom to top; the upper metal electrode comprises a first electrode and a second electrode which are arranged at intervals along the length direction of the quartz light plate; the first electrode comprises a chromium electrode, a gold electrode and a platinum electrode which are sequentially arranged in layers from bottom to top; the second electrode comprises a chromium electrode and a gold electrode which are sequentially arranged in layers from bottom to top; and the thickness of the platinum electrode is 0.2 mu m. The quartz resonator with the optimized thickness of the platinum electrode realizes good decoupling characteristics and energy trapping effect of the quartz resonator, reduces the interference of the resonator parasitic mode during the working of the sensor, reduces energy loss, improves the working performance of the quartz resonator, and further improves the sensitivity of the sensor.

Description

Technical Field

[0001] This invention belongs to the field of sensor design, specifically relating to a sandwich structure quartz resonator and its optimization method, and a hydrogen sensor. Background Technology

[0002] New energy vehicles have developed rapidly in recent years. Hydrogen, their main energy source, is a flammable and explosive gas, so it is necessary to monitor the hydrogen concentration in real time to ensure its safety.

[0003] Hydrogen sensors require high sensitivity, long operating time, low power consumption, small size, and low cost. Existing hydrogen sensors include: contact combustion hydrogen sensors, semiconductor sensors, thermoelectric hydrogen sensors, and electrochemical hydrogen sensors; however, these sensors have issues with power consumption, sensitivity, or adaptability to the operating environment, which affects their performance.

[0004] Quartz resonant hydrogen sensors have excellent performance. The main components of the quartz resonant part are an AT-cut rectangular quartz plate and gold, chromium and platinum electrodes. Previous designs lacked optimization of the thickness dimension of the platinum electrode, and there is still room for improvement in decoupling characteristics and energy trapping effect, which affected the sensitivity of hydrogen detection. Summary of the Invention

[0005] To address the aforementioned problems in the prior art, this invention provides a sandwich-structure quartz resonator and its optimization method, as well as a hydrogen sensor. The technical problem to be solved by this invention is achieved through the following technical solution:

[0006] This invention provides a sandwich structure quartz resonator, comprising: a metal electrode and a quartz plate;

[0007] The metal electrodes are respectively disposed on the upper and lower sides of the quartz plate, forming a sandwich structure; the lower metal electrode includes a platinum electrode and a chromium electrode stacked sequentially from bottom to top; the upper metal electrode includes a first electrode and a second electrode spaced apart along the length of the quartz plate; the first electrode includes a chromium electrode, a gold electrode and a platinum electrode stacked sequentially from bottom to top; the second electrode includes a chromium electrode and a gold electrode stacked sequentially from bottom to top; wherein the platinum electrodes have equal thickness.

[0008] In one embodiment of the present invention, the thickness of the platinum electrodes is 0.2 μm.

[0009] In one embodiment of the present invention, the thickness of the gold electrodes is 0.2 μm.

[0010] In one embodiment of the present invention, the thickness of the chromium electrodes is uniform.

[0011] This invention also provides an optimization method for a sandwich-structured quartz resonator, comprising:

[0012] Step 1: Using the mass equivalence method, divide the quartz resonator into equivalent regions along the length direction to construct a simulation model of the quartz resonator; within the equivalent region, with the quartz plate as the reference, the size of the electrodes above and below it is equivalent to that of the quartz plate; wherein, the first electrode and the second electrode are located in different equivalent regions.

[0013] Step 2: Set path X along the length of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate to obtain the distribution curves of the normalized displacement values ​​of the quartz resonator with different platinum electrode thicknesses on path X, and determine the platinum electrode thickness with the best decoupling characteristics.

[0014] Step 3: Simulate the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses on the three-dimensional surface plots of the corresponding quartz resonator thickness shear vibration modes, and determine the platinum electrode thickness with the best energy trapping effect.

[0015] Step 4: Determine the thickness of the platinum electrode based on the platinum electrode thickness with the best decoupling characteristics and the platinum electrode thickness with the best energy trapping effect.

[0016] In one embodiment of the present invention, step two includes:

[0017] Step 21: Set a path X along the length direction of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate to obtain the displacement values ​​on the path X corresponding to quartz resonators with platinum electrodes of different thicknesses.

[0018] Step 22: Normalize the displacement values ​​to obtain a curve showing the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses along path X.

[0019] Step 23: Based on the curve, calculate the coupling coefficient C of the quartz resonator with platinum electrodes of different thicknesses. i Determine the optimal platinum electrode thickness for decoupling characteristics; coupling coefficient C i for:

[0020] C i =D C / D T ;

[0021] Among them, D C D is the minimum value of the curve. T This represents the maximum value of the curve.

[0022] In one embodiment of the present invention, step three includes:

[0023] Step 31: Using simulation software, three-dimensional surface plots of quartz resonators with platinum electrodes of different thicknesses under thickness shear vibration modes are established to obtain the distribution of normalized displacement values ​​on path X.

[0024] Step 32: Based on the distribution of displacement values ​​on the three-dimensional surface diagram, analyze the range of vibration energy capture in the quartz resonator and determine the platinum electrode thickness with the best energy trapping effect.

[0025] In one embodiment of the present invention, in step two, the thickness of the platinum electrode ranges from 0.1 to 0.3 μm.

[0026] The present invention also provides a hydrogen sensor for new energy vehicles, using the above-mentioned sandwich structure quartz resonator.

[0027] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0028] The sandwich-structure quartz resonator and its optimization method, and the hydrogen sensor of the present invention, use a quartz resonator with optimized platinum electrode thickness to achieve good decoupling characteristics and energy trapping effect of the quartz resonator, reduce interference from parasitic modes of the resonator during sensor operation, reduce energy loss, improve the working performance of the quartz resonator, and thus improve the sensitivity of the sensor.

[0029] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0030] Figure 1 This is a front view of the sandwich structure quartz resonator according to an embodiment of the present invention;

[0031] Figure 2 This is a side view of a sandwich-structured quartz resonator according to an embodiment of the present invention;

[0032] Figure 3 This is a top view of the sandwich structure quartz resonator according to an embodiment of the present invention;

[0033] Figure 4 This is a flowchart of the sandwich structure quartz resonator optimization method according to an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of a simulation model of a sandwich-structured quartz resonator according to an embodiment of the present invention;

[0035] Figure 6 This is a line graph showing the simulated frequency and calculated frequency of the quartz resonator according to an embodiment of the present invention;

[0036] Figure 7 This is a schematic diagram of path X of the simulation model of the sandwich structure quartz resonator according to an embodiment of the present invention;

[0037] Figures 8-12 This is a distribution curve of the normalized displacement value on the path X of the sandwich structure quartz resonator (platinum electrode thickness T is 0.1, 0.15, 0.2, 0.25, 0.3 μm) according to an embodiment of the present invention;

[0038] Figure 13 The coupling coefficient C of the sandwich structure quartz resonator in this embodiment of the invention is... i Line chart;

[0039] Figures 14-18 This is a three-dimensional surface plot of a sandwich-structured quartz resonator (platinum electrode thickness T is 0.1, 0.15, 0.2, 0.25, 0.3 μm) in the thickness shear vibration mode according to an embodiment of the present invention;

[0040] Figures 19-20 This is a three-dimensional surface diagram of a sandwich-structured quartz resonator (platinum electrode thickness T is 0.2 or 0.25 μm) in the thickness shear vibration mode of an embodiment of the present invention. Detailed Implementation

[0041] To further illustrate the technical means and effects adopted by the present invention to achieve the intended purpose, the following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a sandwich structure quartz resonator and its optimization method, as well as a hydrogen sensor, proposed according to the present invention.

[0042] The foregoing and other technical contents, features, and effects of the present invention will be clearly presented in the following detailed description of specific embodiments in conjunction with the accompanying drawings. Through the description of the specific embodiments, a more in-depth and concrete understanding can be gained of the technical means and effects adopted by the present invention to achieve its intended purpose. However, the accompanying drawings are for reference and illustration only and are not intended to limit the technical solutions of the present invention.

[0043] Example 1

[0044] Please refer to the above. Figure 1 and Figure 3 , Figure 1 This is a front view of the sandwich structure quartz resonator according to an embodiment of the present invention; Figure 2 This is a side view of a sandwich-structured quartz resonator according to an embodiment of the present invention; Figure 3 This is a top view of the sandwich structure quartz resonator according to an embodiment of the present invention.

[0045] As shown in the figure, this embodiment provides a sandwich structure quartz resonator, including: metal electrodes and a quartz plate; the metal electrodes are respectively disposed on the upper and lower sides of the quartz plate to form a sandwich structure; the lower metal electrode includes: a platinum electrode and a chromium electrode stacked sequentially from bottom to top; the upper metal electrode includes: a first electrode and a second electrode spaced apart along the length of the quartz plate; the first electrode includes: a chromium electrode, a gold electrode and a platinum electrode stacked sequentially from bottom to top; the second electrode includes: a chromium electrode and a gold electrode stacked sequentially from bottom to top; wherein, the platinum electrodes have equal thickness, both being 0.2 μm.

[0046] In one optional embodiment, the thickness of the gold electrodes is 0.2 μm, and the thickness of the chromium electrodes is equal.

[0047] Example 2

[0048] Please see Figure 4 , Figure 4 This is a flowchart of the sandwich structure quartz resonator optimization method according to an embodiment of the present invention.

[0049] As shown in the figure, this embodiment provides an optimization method for a sandwich-structured quartz resonator, including:

[0050] Step 1: Using the mass equivalence method, divide the quartz resonator into equivalent regions along the length direction to construct a simulation model of the quartz resonator; within the equivalent region, with the quartz plate as the reference, the size of the electrodes above and below it is equivalent to that of the quartz plate; among them, the first electrode and the second electrode are located in different equivalent regions.

[0051] Please see Figure 5 , Figure 5 This is a schematic diagram of a simulation model of a sandwich-structured quartz resonator according to an embodiment of the present invention.

[0052] As shown in the figure, the quartz resonator is divided into 5 regions along its length. The first electrode is located in the equivalent region 2, and the second electrode is located in the equivalent region 4. Within the equivalent region, with the quartz plate as the reference, the length and width of the electrode materials covering it are equivalent to the quartz plate. That is, the entire equivalent region is equivalent to a quartz plate with a changed density, while the elastic coefficient matrix and dielectric constant matrix of the quartz plate remain unchanged.

[0053] In an alternative implementation, the feasibility of the mass equivalence method is verified through comparative experiments:

[0054] The relationship between the theoretical frequency shift of a quartz crystal resonator and the change in the mass of the material adsorbed on the resonator surface is calculated using the Solbray equation. The application of the Solbray equation requires three conditions to be met: (1) the mass of the material adsorbed on the quartz crystal surface is much smaller than the mass of the quartz crystal; (2) the material adsorbed on the quartz crystal surface is a thin coating film and is uniformly distributed; (3) the theoretical frequency shift Δf of the quartz resonator caused by the thin coating film is much smaller than the resonant frequency f0 of the quartz crystal, i.e., Δff0≤0.05. The sandwich structure quartz resonator simulation model in this embodiment meets the application conditions of the Solbray equation.

[0055] According to the Solbre equation, the theoretical frequency of a quartz resonator in TS mode is calculated using the following formula:

[0056] f = f0 + Δf(1);

[0057]

[0058]

[0059] Where f is the theoretical frequency of the quartz resonator in TS mode; Δf is the theoretical frequency shift caused by the electrode mass load effect; f0 is the vibration frequency of the quartz plate in TS mode without electrodes; ΔM is the mass of the electrode thin layer on the quartz plate; G is the shear modulus of the AT-cut quartz plate; ρ is the density of the quartz plate; b is the thickness of the quartz plate; and A is the surface area of ​​the electrodes in the quartz resonator.

[0060] Furthermore, since the mass equivalence method is to equivalence the density, and to equivalence the metal electrode to a quartz plate of different densities, the density ρ of the quartz plate in formula (2) needs to be calculated equivalently.

[0061] In this embodiment, for equivalent regions 1 to 5, the equivalent mass ratio of the electrode to the quartz plate in the equivalent region is defined as R. i R1, R2, R3, R4, and R5 are the equivalent quality ratios of equivalent regions 1 to 5, respectively.

[0062] R1 = R5(4);

[0063]

[0064]

[0065]

[0066] Among them, T Au T represents the thickness of the gold electrode. Cr T represents the thickness of the chromium electrode. Pt T represents the thickness of the platinum electrode.q ρ is the thickness of the quartz plate; ρ is the density.

[0067] The equivalent density ρ′ after equivalence and the vibration frequency f of the quartz resonance using the mass equivalence method in TS mode. e As shown in the following formula:

[0068] ρ i ′=ρ(1+R i ) 2 (8);

[0069]

[0070] The equivalent density ρ obtained based on the mass equivalence method i The input is fed into the quartz resonator simulation model to obtain the oscillation frequency f of the quartz resonator in TS mode. e The line graph comparing the theoretical frequency offset Δf of the quartz resonator in TS mode calculated according to the Solbre equation is shown below. Figure 6 As shown in the figure, the broken lines are close to each other, which means that the quartz resonator simulation model using the mass equivalence method has the correct mass effect within the allowable error range. Therefore, the mass equivalence method can be used to simulate and study the quartz resonator part.

[0071] It is worth noting that the TS mode, or thickness shear vibration mode, is a stable vibration mode. In this mode, the quartz resonator of the hydrogen sensor vibrates at a high frequency. At the same time, this vibration mode is less affected by the surrounding gas. Therefore, the thickness shear vibration mode is used as the main vibration mode of the quartz resonator.

[0072] Step 2: Set path X along the length of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate the distribution curves of the normalized displacement values ​​of the quartz resonator with different platinum electrode thicknesses on path X to determine the platinum electrode thickness with the best decoupling characteristics.

[0073] In this embodiment, after verifying the feasibility of the mass equivalence method, the mass equivalence method is used to find the optimal value of the platinum electrode thickness in the quartz resonator of the sandwich structure quartz resonator and its optimization method through simulation analysis. Step two includes:

[0074] Step 21: Set path X along the length of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate to obtain the displacement values ​​on path X corresponding to quartz resonators with different platinum electrode thicknesses.

[0075] Please see Figure 7 , Figure 7 This is a schematic diagram of path X of the simulation model of the sandwich structure quartz resonator according to an embodiment of the present invention.

[0076] As shown in the figure, in order to make the vibration characteristics of the quartz resonator more intuitive, a path X is set at the center position of the width direction of the quartz resonator along the length direction of the quartz resonator. The path X passes through both the first electrode and the second electrode. The displacement value of the quartz resonator distributed on the upper surface of the path X is obtained by simulation.

[0077] Step 22: Normalize the displacement values ​​to obtain a curve showing the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses along path X.

[0078] Please refer to the above. Figures 8-12 , Figures 8-12 This is a distribution curve of the normalized displacement value on the path X of the sandwich structure quartz resonator (platinum electrode thickness T is 0.1, 0.15, 0.2, 0.25, 0.3 μm) according to an embodiment of the present invention.

[0079] As shown in the figure, the displacement values ​​are normalized and their line graphs are linearly fitted to obtain a smooth curve.

[0080] Step 23: Based on the curve, calculate the coupling coefficient C of the quartz resonator with platinum electrodes of different thicknesses. i Determine the optimal platinum electrode thickness for decoupling characteristics; coupling coefficient C i for:

[0081] C i =D C / D T (10);

[0082] Among them, D C D is the minimum value of the curve. T This represents the maximum value of the curve.

[0083] Please see Figure 13 , Figure 13 The coupling coefficient C of the sandwich structure quartz resonator in this embodiment of the invention is... i Line chart.

[0084] As shown in the figure, the coupling coefficient C is determined based on the curve. i The smaller the value, the smaller the coupling of the quartz resonator, meaning the quartz resonator has better decoupling characteristics. As shown in the figure, the thickness of the platinum electrode is 0.2 μm. It can be considered that when the thickness of the platinum electrode T = 0.2 μm, the coupling coefficient of the quartz resonator remains stable and small, and the unnecessary vibration effects such as non-harmonic overtones (IO) and TF vibrations are minimal. This is the optimal value for the platinum electrode thickness to satisfy the decoupling characteristics.

[0085] In this embodiment, based on existing experience, the thickness of the gold electrode in the quartz resonator simulation model was determined to be 0.2 μm. The optimal thickness of the platinum electrode, considering decoupling characteristics and energy efficiency, was obtained through simulation. Given that metal electrodes are often fabricated using sputtering processes, five dimensions—0.1 μm, 0.15 μm, 0.2 μm, 0.25 μm, and 0.3 μm—were selected for simulation to meet the requirements of the fabrication process and better satisfy real-world needs. Furthermore, due to the sputtering process, spin sputtering was employed, resulting in identical thicknesses for the metal electrodes on both sides of the sandwich structure; this will not be elaborated upon further.

[0086] Step 3: Simulate the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses on the three-dimensional surface plots of the corresponding quartz resonator thickness shear vibration modes, and determine the platinum electrode thickness with the best energy trapping effect.

[0087] In this embodiment, step three includes:

[0088] Step 31: Using simulation software, three-dimensional surface plots of quartz resonators with platinum electrodes of different thicknesses under thickness shear vibration modes are established to obtain the distribution of normalized displacement values ​​on path X.

[0089] Step 32: Based on the distribution of displacement values ​​on the three-dimensional surface diagram, analyze the range of vibration energy capture in the quartz resonator and determine the platinum electrode thickness with the best energy trapping effect.

[0090] Please refer to the above. Figures 14-18 , Figures 14-18 This is a three-dimensional surface plot of a sandwich-structured quartz resonator (platinum electrode thickness T is 0.1, 0.15, 0.2, 0.25, 0.3 μm) in the thickness shear vibration mode according to an embodiment of the present invention.

[0091] As shown in the figure, to further simulate and determine the optimal platinum electrode thickness for the energy trapping effect of the quartz resonator, three-dimensional surface plots of the quartz resonator under thickness shear (TS) mode with platinum electrodes of different thicknesses were established. The input data included: the length, width, and height of the quartz resonator, and the surface distribution of displacement values ​​along path X under TS mode. It can be seen that at T = 0.2 μm and 0.25 μm, the image protrusions at the positions of the first and second electrodes are narrow and high, and the microwave refraction is small, indicating that the vibrational energy in the quartz resonator is effectively confined to the central excitation region of the electrodes, that is, most of the energy is trapped in the electrode region.

[0092] Step 4: Determine the thickness of the platinum electrode based on the platinum electrode thickness with the best decoupling characteristics and the platinum electrode thickness with the best energy trapping effect.

[0093] Please refer to the above. Figures 19-20 , Figures 19-20This is a three-dimensional surface diagram of a sandwich-structured quartz resonator (platinum electrode thickness T is 0.2 or 0.25 μm) in the thickness shear vibration mode of an embodiment of the present invention.

[0094] As shown in the figure, in order to further determine the platinum electrode thickness with the best energy trapping effect, a three-dimensional surface plot from another angle was selected for comparison. It can be seen that when T = 0.2 μm, there are fewer stray vibrations and smaller fluctuation amplitudes, resulting in the best energy trapping effect.

[0095] Therefore, T = 0.2 μm is the optimal thickness for the quartz resonator, achieving good decoupling characteristics and energy trapping effect. Since the sensitivity of the quartz resonator is affected by the Q value, improving the resonator's decoupling characteristics and energy trapping effect can increase the Q value, thus improving the sensitivity of the hydrogen sensor using this quartz resonator.

[0096] In this embodiment, a hydrogen sensor for new energy vehicles is also provided, using the sandwich structure quartz resonator of this embodiment.

[0097] The sandwich-structure quartz resonator and its optimization method, and the hydrogen sensor of this invention, use a quartz resonator with optimized platinum electrode thickness to achieve good decoupling characteristics and energy trapping effect of the quartz resonator, reduce interference from parasitic modes of the resonator during sensor operation, reduce energy loss, improve the working performance of the quartz resonator, and thus improve the sensitivity of the sensor.

[0098] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations are intended to cover non-exclusive inclusion, such that an article or apparatus comprising a list of elements includes not only those elements but also other elements not expressly listed. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or apparatus that includes said element. Terms such as "connected" or "linked" are not limited to physical or mechanical connections but can include electrical connections, whether direct or indirect. The orientations or positional relationships indicated by terms such as "upper," "lower," "left," and "right" are based on the orientations or positional relationships shown in the accompanying drawings and are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the invention.

[0099] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A method for optimizing a sandwich-structured quartz resonator, characterized in that, A sandwich-structured quartz resonator includes metal electrodes and a quartz plate; the metal electrodes are respectively disposed on the upper and lower sides of the quartz plate to form a sandwich structure; The lower metal electrode includes a platinum electrode and a chromium electrode stacked sequentially from bottom to top; the upper metal electrode includes a first electrode and a second electrode spaced apart along the length of the quartz plate; the first electrode includes a chromium electrode, a gold electrode, and a platinum electrode stacked sequentially from bottom to top; the second electrode includes a chromium electrode and a gold electrode stacked sequentially from bottom to top. The optimization method for the sandwich structure quartz resonator includes: Step 1: Using the mass equivalence method, divide the quartz resonator into equivalent regions along the length direction to construct a simulation model of the quartz resonator; within the equivalent region, with the quartz plate as the reference, the electrode dimensions above and below it are equivalent to those of the quartz plate. The first electrode and the second electrode are located in different equivalent regions; Step 2: Set path X along the length of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate to obtain the distribution curves of the normalized displacement values ​​of the quartz resonator with different platinum electrode thicknesses on path X, and determine the platinum electrode thickness with the best decoupling characteristics. Step two includes: Step 21: Set a path X along the length direction of the quartz resonator simulation model, select several platinum electrode thicknesses, and simulate to obtain the displacement values ​​on the path X corresponding to quartz resonators with platinum electrodes of different thicknesses. Step 22: Normalize the displacement values ​​to obtain a curve showing the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses along path X. Step 23: Based on the curve, calculate the coupling coefficient of the quartz resonators with platinum electrodes of different thicknesses. Determine the optimal platinum electrode thickness for decoupling characteristics; coupling coefficient. for: ； in, This is the minimum value of the curve; This represents the maximum value of the curve; Step 3: Simulate the distribution of normalized displacement values ​​of quartz resonators with platinum electrodes of different thicknesses on the three-dimensional surface plots of the corresponding quartz resonator thickness shear vibration modes, and determine the platinum electrode thickness with the best energy trapping effect. Step three includes: Step 31: Using simulation software, three-dimensional surface plots of quartz resonators with platinum electrodes of different thicknesses under thickness shear vibration modes are established to obtain the distribution of normalized displacement values ​​on path X. Step 32: Based on the distribution of displacement values ​​on the three-dimensional surface diagram, analyze the range of vibration energy capture in the quartz resonator and determine the platinum electrode thickness with the best energy trapping effect. Step 4: Determine the thickness of the platinum electrode based on the platinum electrode thickness with the best decoupling characteristics and the platinum electrode thickness with the best energy trapping effect to obtain the optimized sandwich structure quartz resonator.

2. The method for optimizing a sandwich-structure quartz resonator according to claim 1, characterized in that, In step two, the thickness of the platinum electrode ranges from 0.1 to 0.3 μm.

3. A hydrogen sensor for new energy vehicles, characterized in that, The sandwich structure quartz resonator optimized using the optimization method described in any one of claims 1 to 2.

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