Pipe end fitting, pipe docking device and semiconductor apparatus

Abstract

Embodiments of the present application provide a pipe end joint, a pipe butt joint device and a semiconductor device, and relate to the technical field of semiconductors. The pipe end joint comprises a connecting pipe body, a sleeve pipe, a butt joint pipe and a valve core. The valve core is arranged at one end of the connecting pipe body and partially protrudes from the connecting pipe body. A flow channel is formed between the valve core and the connecting pipe body for gas to pass through. One end of the butt joint pipe is formed with a valve seat. The sleeve pipe is sleeved on the butt joint pipe and the connecting pipe body, and rotating the sleeve pipe can move the connecting pipe body relative to the butt joint pipe to combine or separate the valve core and the valve seat. The end of the pipe can be blocked, thereby avoiding leakage of gas or liquid.

Description

Technical Field

[0001] This invention relates to the field of semiconductors, and more specifically, to a pipe end connector, a pipe connection device, and a semiconductor device. Background Technology

[0002] Thin films play a very important role in the semiconductor industry. The formation of thin films is the result of the interaction of various gases and liquids. Therefore, thin film equipment has a large number of pipes inside to connect these substances. As the number of pipes increases, the risk of leakage also increases.

[0003] Because gases react with each other or liquids react with each other, in order to ensure the safety of maintenance personnel, it is generally necessary to completely remove the internal gases or liquids during leak repair work. This method is relatively troublesome and may result in incomplete cleaning. Summary of the Invention

[0004] The present invention aims to provide, for example, a pipe end connector, a pipe connection device, and a semiconductor device that can seal the end of a pipe to prevent gas or liquid leakage.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] In a first aspect, the present invention provides a pipe end connector, comprising a connecting pipe body, an outer sleeve, a connecting pipe, and a valve core;

[0007] The valve core is disposed at one end of the connecting pipe body and partially protrudes from the connecting pipe body. A flow channel is formed between the valve core and the connecting pipe body to allow gas to pass through.

[0008] A valve seat is formed at one end of the connecting pipe;

[0009] The outer sleeve is fitted over the connecting pipe and the connecting pipe body, and rotating the outer sleeve allows the connecting pipe body to move relative to the connecting pipe, so that the valve core can engage or disengage from the valve seat.

[0010] In an optional embodiment, a limiting platform is provided on the outer periphery of the connecting tube, and a snap-fit ​​platform is provided on the inner periphery of the outer tube. The outer tube is rotatably fitted onto the outside of the connecting tube, and the limiting platform abuts against the snap-fit ​​platform.

[0011] In an optional embodiment, the outer periphery of the connecting pipe body is provided with threads, the inner periphery of the outer sleeve is provided with threads, and one end of the connecting pipe body where the valve core is disposed is rotatably installed on the outer sleeve through the thread engagement.

[0012] In an optional embodiment, the pipe end connector further includes a telescopic tube, one end of which is connected to the connecting pipe body and the other end of which is connected to the connecting pipe. The telescopic tube can extend or retract by rotating the outer sleeve.

[0013] In an optional embodiment, the telescopic tube is a corrugated tube, one end of which is fixedly connected to the end of the connecting tube body, and the other end of which is fixedly connected to the connecting tube.

[0014] In an optional embodiment, the valve seat is disposed on the inner periphery of the connecting pipe, and the valve seat is provided with an abutting slope on the side near the connecting pipe body. The valve seat is provided with a sealing ring, which can abut against the abutting slope.

[0015] In an optional embodiment, a connecting flange is provided on the outer periphery of the connecting pipe on the side away from the connecting pipe body.

[0016] In an optional embodiment, a switch indicator bar is provided on the outer periphery of the connecting pipe body to indicate the relative position of the valve core and the valve seat.

[0017] Secondly, the present invention provides a pipe connection device for connecting two pipes, including a clamp and two pipe end connectors as described in any of the foregoing embodiments.

[0018] The two connecting pipe bodies of the two pipe end fittings are respectively used to connect to two pipelines;

[0019] The two connecting pipes of the two pipe end fittings are connected by the clamps.

[0020] In an optional embodiment, the pipe connection device further includes a sealing gasket disposed between the two pipe end joints for sealing.

[0021] Thirdly, the present invention provides a semiconductor device including a tube end connector as described in any of the foregoing embodiments; or, including a pipe connection device as described in the foregoing embodiments.

[0022] The beneficial effects of the pipe end connector, pipe connection device, and semiconductor device provided in the embodiments of the present invention include, for example:

[0023] This application utilizes a pipe end connector to connect the connector body to the end of the pipeline. Before disassembling the pipeline, rotating the outer sleeve allows the valve core to engage with the valve seat, thus sealing the pipeline and preventing gas or liquid leakage during maintenance. After maintenance, rotating the outer sleeve again separates the valve core and valve seat, allowing gas or liquid to flow freely. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the pipe connection device provided in an embodiment of the present invention;

[0026] Figure 2 This is an exploded structural diagram of the pipeline connection device provided in an embodiment of the present invention;

[0027] Figure 3 This is a schematic diagram of the pipe end connector provided in an embodiment of the present invention;

[0028] Figure 4 This is a cross-sectional view of the pipe end connector provided in an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the connecting pipe body and valve core of the pipe end connector provided in an embodiment of the present invention.

[0030] Icons: 100 - Pipe end fitting; 110 - Connecting pipe body; 111 - Flow channel; 113 - Switch indicator strip; 130 - Outer sleeve; 131 - Snap-fit ​​platform; 150 - Connecting pipe; 151 - Valve seat; 153 - Limiting platform; 155 - Abutment bevel; 157 - Connecting flange; 170 - Valve core; 171 - Sealing ring groove; 173 - Sealing ring; 180 - Telescopic pipe; 300 - Pipeline docking device; 310 - Clamp; 330 - Sealing gasket. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0035] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0036] It should be noted that, where there is no conflict, the features in the embodiments of the present invention can be combined with each other.

[0037] Example

[0038] The inventors discovered that the membrane device contains numerous pipes connecting these substances, and the increased number of pipes increases the risk of leakage. Because gases and gases, or liquids and liquids, can react, to ensure the safety of maintenance personnel, it is generally necessary to completely remove the internal gases or liquids during leak repair work. This method is cumbersome and may result in incomplete cleaning.

[0039] To solve the above technical problems, please refer to Figure 1 and Figure 2 This embodiment provides a semiconductor device, which may be a TALD atomic layer deposition device. It can prevent gas or liquid leakage during pipeline maintenance.

[0040] In this embodiment, the semiconductor device includes multiple lines for supplying gas or liquid to the chamber. Two lines are connected by a line connection device 300.

[0041] In this embodiment, the pipe connection device 300 includes a clamp 310 and two pipe end connectors 100. The two pipe end connectors 100 are respectively connected to two pipes, and the clamp 310 clamps the two pipe end connectors 100 together.

[0042] Please refer to Figure 3 , Figure 4 and Figure 5In this embodiment, the pipe end connector 100 includes a connecting pipe body 110, an outer sleeve 130, a connecting pipe 150, and a valve core 170. The valve core 170 is disposed at one end of the connecting pipe body 110 and partially protrudes from the connecting pipe body 110. A flow channel 111 is formed between the valve core 170 and the connecting pipe body 110 to allow gas to pass through. The end of the connecting pipe body 110 is fixedly connected to the end of the pipeline. A valve seat 151 is formed at one end of the connecting pipe 150. The outer sleeve is sleeved on the outside of the connecting pipe 150 and the connecting pipe body 110, and rotating the outer sleeve allows the connecting pipe body 110 to move relative to the connecting pipe 150, so that the valve core 170 can engage or disengage from the valve seat 151.

[0043] The pipe end connector 100 provided in this embodiment connects the connecting pipe body 110 of the pipe end connector 100 to the end of the pipeline. Before disassembling the pipeline, rotating the outer sleeve 130 causes the valve core 170 to engage with the valve seat 151, thereby achieving a seal on the pipeline and preventing gas or liquid leakage during maintenance. After maintenance is completed, rotating the outer sleeve 130 again separates the valve core 170 and the valve seat 151, allowing gas or liquid to flow.

[0044] Please refer to Figure 3 , Figure 4 and Figure 5 In this embodiment, the connecting pipe body 110 and the valve core 170 are integrally formed, and a flow channel 111 is formed between the valve core 170 and the connecting pipe body 110.

[0045] In this embodiment, a connecting block is provided at the end of the valve core 170. The connecting block is connected to the inner wall of the connecting pipe body 110, and the gap between the connecting blocks forms a flow channel 111.

[0046] Under normal circumstances, the valve core 170 is separated from the valve seat 151. Liquid or gas flows through the pipeline sequentially through the connecting pipe body 110, the outer sleeve 130, and the connecting pipe 150, before flowing into the rear end connector 100 and into another connected pipeline. When pipeline maintenance is required, first rotate the outer sleeve 130 of the two pipe end connectors 100 with the only identical interface to engage the valve core 170 with the valve seat 151. This seals the ends of the two connected pipelines. Then, remove the clamp 310 to prevent gas or liquid leakage.

[0047] In this embodiment, a limiting platform 153 is provided on the outer periphery of the connecting tube 150, and a snap-fit ​​platform 131 is provided on the inner periphery of the outer tube 130. The outer tube 130 is rotatably fitted onto the outside of the connecting tube 150, and the limiting platform 153 abuts against the snap-fit ​​platform 131.

[0048] Please refer to Figure 3 , Figure 4 and Figure 5In this embodiment, the limiting platform 153 and the snap-fit ​​platform 131 are provided to facilitate the assembly between the connecting tube 150 and the outer tube 130.

[0049] In this embodiment, the outer periphery of the connecting pipe body 110 is provided with threads, the inner periphery of the outer sleeve 130 is provided with threads, and one end of the connecting pipe body 110 with the valve core 170 is rotatably installed on the outer sleeve 130 through thread engagement.

[0050] In this embodiment, the connecting pipe body 110 and the outer sleeve 130 are connected by threads. By rotating the outer sleeve 130, the connecting pipe body 110 can be easily moved toward the connecting pipe 150 or away from the connecting pipe 150, so that the valve core 170 can be engaged or disengaged from the valve seat 151.

[0051] Of course, in other embodiments of this application, the outer sleeve 130 can also be movably connected to the connecting pipe 150 and the connecting pipe body 110 by other mechanical connection methods.

[0052] In this embodiment, the pipe end connector 100 also includes a telescopic pipe 180. One end of the telescopic pipe 180 is connected to the connecting pipe body 110, and the other end is connected to the connecting pipe 150. The telescopic pipe 180 can be extended or retracted by rotating the outer sleeve pipe 130.

[0053] An expansion joint 180 is provided between the pipe end connector 100 and the connecting pipe body 110, thereby preventing gas or liquid from leaking from the connecting pipe body 110 and the mating position of the connecting pipe 150 and the outer sleeve 130.

[0054] Please refer to Figure 3 , Figure 4 and Figure 5 In this embodiment, the telescopic tube 180 is a corrugated tube, one end of which is fixedly connected to the end of the connecting tube body 110, and the other end of which is fixedly connected to the connecting tube 150.

[0055] The bellows can lengthen under tension and shorten under pressure, thus achieving a seal while allowing the connecting pipe body 110 to move relative to the connecting pipe 150 more effectively.

[0056] In this embodiment, the bellows, the connecting pipe body 110, and the connecting pipe 150 are all made of metal. One end of the bellows is welded to the connecting pipe body 110, and the other end is welded to the connecting pipe 150.

[0057] Of course, in other embodiments of this application, the corrugated pipe can also be installed on the connecting pipe body 110 and the connecting pipe 150 by means of snap-fit ​​or interference fit.

[0058] In other embodiments of this application, the telescopic tube 180 may also be configured as other telescopic tubes, such as flexible pipes.

[0059] Please refer to Figure 3 , Figure 4 and Figure 5 In this embodiment, the valve seat 151 is disposed on the inner periphery of the connecting pipe 150, and the valve seat 151 is provided with an abutting slope 155 on the side near the connecting pipe body 110. The valve core 170 is provided with a sealing ring 173, which can abut against the abutting slope 155.

[0060] In this embodiment, by providing an abutment slope 155 on the valve seat 151 and a sealing ring 173 on the valve core 170, the sealing between the valve core 170 and the valve seat 151 can be better achieved.

[0061] In this embodiment, a sealing ring groove 171 is provided on the valve core 170, and a sealing ring 173 is assembled in the sealing ring groove 171.

[0062] Please refer to Figure 3 , Figure 4 and Figure 5 In this embodiment, a connecting flange 157 is provided on the outer periphery of the connecting pipe 150 away from the connecting pipe body 110. The clamp 310 is a KF clamp 310, which is snapped onto the connecting flange 157 of the two pipe end joints 100.

[0063] In this embodiment, the clamp includes two semi-circular ring-shaped locking parts that are rotatably connected to the shell and a fixing bolt. The locking parts of the two semi-circular rings are provided with locking grooves inside. The locking grooves are locked onto the flange, and then the bolts are tightened to make the two parts abut against each other, thereby achieving docking.

[0064] Generally, the cross-section of the slot is trapezoidal, and the larger the preload of the bolt, the tighter and more sealed the connection.

[0065] In some embodiments of this application, in order to facilitate the assembly between the connecting tube 150 and the outer tube 130, the connecting tube 150 can be set as two parts that can be disassembled from the shell, and then connected by means of threads or other connection methods to form a whole.

[0066] In this embodiment, a switch indicator bar 113 is provided on the outer periphery of the connecting pipe body 110 to indicate the relative position of the valve core 170 and the valve seat 151.

[0067] The switch indicator bar 113 has two rings of different colors, such as red and green, which can indicate whether the pipe end connector 100 is in the closed or open state.

[0068] Please refer to Figure 2In this embodiment, the pipe connection device 300 further includes a sealing gasket 330, which is disposed between the two pipe end joints 100 for sealing.

[0069] In summary, the working principle and beneficial effects of the pipe end connector 100, pipe connection device 300, and semiconductor device provided in the embodiments of the present invention include:

[0070] In this embodiment, a pipe end connector 100 is provided to connect the connecting pipe body 110 of the pipe end connector 100 to the end of the pipeline. Before disassembling the pipeline, the outer sleeve 130 is rotated to engage the valve core 170 with the valve seat 151, thereby achieving a seal on the pipeline and preventing gas or liquid leakage during maintenance. After maintenance is completed, the outer sleeve 130 is rotated again to separate the valve core 170 and the valve seat 151, allowing gas or liquid to flow.

[0071] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A pipe end connector, characterized in that, Includes the connecting pipe body, outer sleeve, connecting pipe, and valve core; The valve core is disposed at one end of the connecting pipe body and partially protrudes from the connecting pipe body. A flow channel is formed between the valve core and the connecting pipe body to allow gas to pass through. A valve seat is formed at one end of the connecting pipe; The outer sleeve is fitted onto the connecting pipe and the connecting pipe body, and rotating the outer sleeve allows the connecting pipe body to move relative to the connecting pipe, so that the valve core can engage or disengage from the valve seat; The pipe end connector also includes a telescopic tube, one end of which is connected to the connecting pipe body and the other end of which is connected to the connecting pipe. The telescopic tube can extend or retract by rotating the outer sleeve.

2. The pipe end connector according to claim 1, characterized in that, The outer periphery of the connecting tube is provided with a limiting platform, and the inner periphery of the outer tube is provided with a snap-fit ​​platform. The outer tube is rotatably fitted onto the outside of the connecting tube, and the limiting platform abuts against the snap-fit ​​platform.

3. The pipe end connector according to claim 2, characterized in that, The outer periphery of the connecting pipe body is provided with threads, the inner periphery of the outer sleeve is provided with threads, and the end of the connecting pipe body where the valve core is located is rotatably installed on the outer sleeve through thread engagement.

4. The pipe end connector according to claim 1, characterized in that, The telescopic tube is a corrugated tube, one end of which is fixedly connected to the end of the connecting tube body, and the other end of which is fixedly connected to the connecting tube.

5. The pipe end connector according to any one of claims 1-3, characterized in that, The valve seat is disposed on the inner periphery of the connecting pipe, and the valve seat is provided with an abutting inclined surface on the side near the connecting pipe body. The valve core is provided with a sealing ring, and the sealing ring can abut against the abutting inclined surface.

6. The pipe end connector according to any one of claims 1-3, characterized in that, A connecting flange is provided on the outer periphery of the connecting pipe on the side away from the connecting pipe body.

7. The pipe end connector according to any one of claims 1-3, characterized in that, A switch indicator bar is provided on the outer periphery of the connecting pipe body to indicate the relative position of the valve core and the valve seat.

8. A pipe connection device for connecting two pipes, characterized in that, Includes clamps and two pipe end fittings as described in any one of claims 1-7; The two connecting pipe bodies of the two pipe end fittings are respectively used to connect to two pipelines; The two connecting pipes of the two pipe end fittings are connected by the clamps.

9. The pipeline connection device according to claim 8, characterized in that, The pipe connection device also includes a sealing gasket, which is disposed between the two pipe end joints for sealing.

10. A semiconductor device, characterized in that, It includes the pipe end fitting as described in any one of claims 1-7; or, it includes the pipe connection device as described in claim 8 or 9.

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