Vacuum pump pre-dust removal device and single crystal furnace

Abstract

A pre-dust removal device for a vacuum pump includes a separation chamber and a diversion separation mechanism. The separation chamber is a hollow cylinder with an inner diameter that gradually increases from top to bottom. A dust collection plate is provided on the inner wall of the separation chamber, and a cover plate is provided at the top. A first pipe communicating with the interior of the separation chamber is located at the top, and a dust collection chamber is located at the bottom. A second pipe communicating with the interior of the separation chamber is located at the bottom of the dust collection chamber, and a third pipe communicating with the separation chamber is also located at the bottom of the dust collection chamber. The diversion separation mechanism is rotatably disposed inside the separation chamber along its longitudinal axis, with its lower end facing the outlet end of the second pipe. This invention enables automatic cleaning of the separation chamber and automatic recovery of compound particles. During this process, no manual cleaning of the separation chamber is required, simplifying the cleaning process, reducing labor intensity, and improving work efficiency. This invention also provides a single crystal furnace.

Description

Technical Field

[0001] This invention relates to the field of monocrystalline silicon production equipment technology, and in particular to a vacuum pump pre-dust removal device and a monocrystalline furnace. Background Technology

[0002] Semiconductor single crystal growth furnaces are essential equipment in the process of converting polycrystalline silicon into single crystal silicon. Single crystals need to be grown in a near-vacuum environment, so single crystal furnaces are equipped with vacuum pumps. During the vacuuming process, high-temperature gases mixed with compounds are drawn in. These compounds adhere to the vacuum pipes, valve chambers, and the inner cavity of the vacuum pump. This not only easily damages the vacuum pump and valves, but also requires manual labor and time to clean the pipes. Furthermore, it can easily cause unstable furnace pressure and fluctuations, thus affecting production.

[0003] To address the aforementioned issues, utility model patent CN214680586U discloses a dust removal system and single crystal furnace equipment. This system utilizes a dust removal device installed within a vacuum dust removal tank. This device includes a filter screen, which is arranged in a ring shape extending circumferentially within the vacuum dust removal tank. However, the filter screen structure used in this technical solution is costly in terms of consumables and prone to clogging; furthermore, cleaning the filter screen involves complex procedures. Summary of the Invention

[0004] In order to solve the technical problems existing in the above-mentioned technologies, it is necessary to provide a vacuum pump pre-dust removal device.

[0005] A pre-dust removal device for a vacuum pump includes a separation chamber and a diversion and separation mechanism;

[0006] The separation chamber is a hollow cylinder with an inner diameter that gradually increases from top to bottom. A dust collection plate is provided on the inner wall of the separation chamber, a cover plate is provided at the top of the separation chamber, a first pipe is provided at the top of the separation chamber to communicate with the interior of the separation chamber, a dust collection chamber is provided at the bottom of the separation chamber, a second pipe is provided at the bottom of the dust collection chamber to communicate with the interior of the separation chamber, and a third pipe is provided at the bottom of the dust collection chamber to communicate with the separation chamber.

[0007] The diversion and separation mechanism is rotatably installed inside the separation chamber along the longitudinal axis of the separation chamber, with the lower end of the diversion and separation mechanism facing the outlet end of the second pipe.

[0008] Preferably, the drainage separation mechanism includes a drive unit, a rotating rod, and a drainage plate disposed on the rotating rod; the rotating rod is longitudinally disposed inside the separation chamber along the axis of the separation chamber, the upper end of the rotating rod extends to the outside of the separation chamber and is rotatably connected to the separation chamber, and the output end of the drive unit is connected to the rotating rod.

[0009] Preferably, the drainage plate is arranged in a spiral shape along the axial direction of the rotating rod.

[0010] Preferably, the pitch of the drain plate gradually increases from bottom to top.

[0011] Preferably, the dust collection plate is arranged in a spiral shape.

[0012] Preferably, the dust collection plate has an arc-shaped structure, and the arc-shaped concave surface of the dust collection plate faces the bottom of the separation chamber.

[0013] Preferably, the dust collection plate is bent downwards toward one side of the separation chamber axis.

[0014] Preferably, the outlet end of the second pipe is provided with an air inlet with a conical structure.

[0015] Preferably, the bottom of the dust collection chamber is provided with an annular groove distributed circumferentially along the air inlet, and the bottom of the annular groove is connected to the third pipe.

[0016] It is also necessary to provide a single crystal furnace.

[0017] A single crystal furnace includes the vacuum pump pre-dust removal device described above.

[0018] As can be seen from the above technical solution, the vacuum pump pre-dust removal device provided by the present invention includes a separation chamber and a diversion separation mechanism. The separation chamber is a hollow cylinder with an inner diameter that gradually increases from top to bottom. A dust collection plate is provided on the inner wall of the separation chamber, and a cover plate is provided at the upper end of the separation chamber. A first pipe communicating with the interior of the separation chamber is provided at the top of the separation chamber, and a dust collection chamber is provided at the lower end of the separation chamber. A second pipe communicating with the interior of the separation chamber is provided at the bottom of the dust collection chamber, and a third pipe communicating with the separation chamber is also provided at the bottom of the dust collection chamber. The diversion separation mechanism is rotatably disposed inside the separation chamber along the longitudinal axis of the separation chamber, and the lower end of the diversion separation mechanism is directly opposite the outlet end of the second pipe. During crystal pulling, high-temperature gas mixed with compounds enters the separation chamber through the second pipe and is diverted through the diversion separation mechanism. The rotating mechanism generates centrifugal force on the high-temperature gas containing compounds, causing the compound particles in the gas to separate from the gas. The gas then exits through the first pipe at the top of the separation chamber, while the compound particles, blocked by the dust collection plate, gradually fall back into the dust collection chamber under their own gravity. After crystal pulling is completed, the second pipe closes. Compressed air is introduced into the separation chamber through the first pipe, and the flow separation mechanism is reversed to guide the compressed air downwards and generate centrifugal force. This causes the compound particles on the inner wall of the separation chamber and the dust collection plate to detach under the blowing of the compressed air and move towards the bottom of the separation chamber. Simultaneously, the compound particles in the separation chamber are discharged under the suction of the third pipe, achieving automatic cleaning of the separation chamber and automatic recovery of compound particles. During this process, no manual cleaning of the separation chamber is required, which not only simplifies the cleaning procedure but also reduces labor intensity and improves work efficiency. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the pre-dust removal device for the vacuum pump of the present invention.

[0021] Figure 2 For the present invention Figure 1 A schematic diagram of the cross-sectional structure of AA.

[0022] In the figure: Separation chamber 01, diversion and separation mechanism 02, drive unit 21, rotating rod 22, diversion plate 23, dust collection plate 03, cover plate 04, first pipe 05, dust collection chamber 06, annular groove 61, second pipe 07, air inlet 71, third pipe 08. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] In the description of this invention, it should be understood that the terms "upper", "middle", "outer", "inner", "lower", etc., which indicate orientation or positional relationship, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting this invention.

[0025] Please refer to Figures 1 to 2 In one embodiment, the present invention provides a pre-dust removal device for a vacuum pump, including a separation chamber 01 and a diversion separation mechanism 02; the separation chamber 01 is a hollow cylinder with an inner diameter that gradually increases from top to bottom, a dust collection plate 03 is provided on the inner wall of the separation chamber 01, a cover plate 04 is provided at the upper end of the separation chamber 01, a first pipe 05 communicating with the interior of the separation chamber 01 is provided at the top of the separation chamber 01, a dust collection chamber 06 is provided at the lower end of the separation chamber 01, a second pipe 07 communicating with the interior of the separation chamber 01 is provided at the bottom of the dust collection chamber 06, and a third pipe 08 communicating with the separation chamber 01 is also provided at the bottom of the dust collection chamber 06; the diversion separation mechanism 02 is rotatably disposed inside the separation chamber 01 along the longitudinal axis of the separation chamber 01, and the lower end of the diversion separation mechanism 02 is directly opposite the outlet end of the second pipe 07.

[0026] During crystal pulling, high-temperature gas mixed with compounds enters the separation chamber 01 through the second pipe 07. By controlling the rotation of the flow-guiding separation mechanism 02, the high-temperature gas is guided from the bottom to the top of the separation chamber 01, thus playing a guiding role. At the same time, under the axial rotational force of the flow-guiding separation mechanism 02, centrifugal force is generated on the high-temperature gas mixed with compounds, causing the compound particles in the high-temperature gas to separate from the gas. The gas is discharged from the first pipe 05 at the top of the separation chamber 01, while the compound particles are blocked by the dust collection plate 03 and gradually fall back to the dust collection chamber 06 under their own gravity. During the rotation of the flow-guiding separation mechanism 02, the separation of compound particles from gas is achieved, and the high-temperature gas mixed with compounds is stirred, so that it is fully dispersed, which is conducive to solid-gas separation. After crystal pulling is completed, the second pipe 07 is closed. Compressed air is introduced into the separation chamber 01 through the first pipe 05, and the flow separation mechanism 02 is reversed to guide the compressed air downwards and generate centrifugal force. This causes the compound particles on the inner wall of the separation chamber 01 and the dust collection plate 03 to detach under the blowing of the compressed air and move towards the bottom of the separation chamber 01. Simultaneously, the compound particles in the separation chamber 01 are discharged under the suction action of the third pipe 08, achieving automatic cleaning of the separation chamber 01 and automatic recovery of the compound particles. During this process, no manual cleaning of the separation chamber 01 is required, which not only simplifies the cleaning procedure but also reduces labor intensity and improves work efficiency.

[0027] In one embodiment, the drainage separation mechanism 02 includes a drive unit 21, a rotating rod 22, and drainage plates 23 disposed on the rotating rod 22. The rotating rod 22 is longitudinally disposed inside the separation chamber 01 along the axis of the separation chamber 01, and its upper end extends to the outside of the separation chamber 01 and is rotatably connected to the separation chamber 01. The output end of the drive unit 21 is connected to the rotating rod 22. The drainage plates 23 are spirally distributed along the axial direction of the rotating rod 22. When the high-temperature gas containing compounds enters the separation chamber 01 through the second pipe 07, the drive unit 21 will synchronously drive the rotating rod 22 to rotate. At this time, the spirally distributed guide plate 23 will guide the high-temperature gas containing compounds to flow upward while rotating circumferentially, and at the same time form a circumferential force on the high-temperature gas containing compounds, causing the high-temperature gas containing compounds to generate centrifugal force. Since the compound particles themselves have a certain weight, under the action of centrifugal force, the compound particles will move towards the inner wall of the separation chamber 01. After the compound particles come into contact with the inner wall of the separation chamber 01, the dust collection plate 03 can block these compound particles from moving upward. At the same time, the inner diameter of the separation chamber 01 gradually decreases from bottom to top. At this time, the compound particles can be completely blocked by the dust collection plate 03. Under the action of their own gravity, the compound particles gradually fall back into the dust collection chamber 06. When the separation chamber 01 needs to be cleaned, the second pipe 07 is closed, and compressed air is introduced into the separation chamber 01 through the first pipe 05. At this time, the drive unit 21 is controlled to drive the rotating rod 22 to reverse, so that the guide plate 23 follows and reverses synchronously. This not only guides the compressed air to flow downward, but also disperses the compressed air to the surroundings of the separation chamber 01. The compressed air blows the compound particles on the dust collection plate 03 and the inner wall of the separation chamber 01, causing them to float and move downward. Combined with the suction effect of the third pipe 08, the compound particles in the separation chamber 01 can be discharged, achieving automatic cleaning.

[0028] Specifically, the pitch of the guide plate 23 gradually increases from bottom to top. Because the pitch of the guide plates 23 differs—the lower guide plate 23 of the separation chamber 01 has a smaller pitch, while the upper guide plate 23 of the separation chamber 01 has a larger pitch—the centrifugal force generated in the lower part of the separation chamber 01 is greater when the guide plate 23 rotates circumferentially. Furthermore, the lower diameter of the separation chamber 01 is relatively large, which slows down the upward flow of the high-temperature gas. This is more conducive to solid-gas separation of the high-temperature gas containing a higher concentration of compound particles. In the upper part of the separation chamber 01, most of the compound particles have already separated from the high-temperature gas, and the guide plate 23 generates a relatively small centrifugal force there, which is sufficient. Additionally, the relatively small diameter of the upper part of the separation chamber 01 facilitates the discharge of the separated gas. During the cleaning operation, compressed air enters from the top of the separation chamber 01 through the first pipe 05. Because the inner diameter of the upper part of the separation chamber 01 is small, the compressed air can move downward quickly. However, in the lower part of the separation chamber 01, the inner diameter is larger, and the flow rate of the compressed air slows down. At this time, a large centrifugal force is required to remove the compound particles in the lower part of the separation chamber 01.

[0029] In one embodiment, the dust collection plate 03 is arranged in a spiral shape. The dust collection plate 03 has an arc-shaped structure, and the arc-shaped concave surface of the dust collection plate 03 faces the bottom of the separation chamber 01. This design facilitates the dust collection plate 03 in blocking compound particles and also allows compound particles falling back onto the upper surface of the dust collection plate 03 to move downwards, preventing compound particles from adhering to the dust collection plate 03. The dust collection plate 03 bends downwards on the side facing the axis of the separation chamber 01.

[0030] In one embodiment, the outlet end of the second pipe 07 is provided with a conical air inlet 71, that is, the lower end of the air inlet 71 has a smaller diameter and the upper end of the air inlet 71 has a larger diameter, which can slow down the flow rate of the high-temperature gas entering the separation chamber 01.

[0031] In one embodiment, the bottom of the dust collection chamber 06 is provided with an annular groove 61 distributed circumferentially along the air inlet 71, which facilitates the collection of compound particles. The bottom of the annular groove 61 is connected to the third pipe 08.

[0032] In one embodiment, the present invention provides a single crystal furnace, including a vacuum pump pre-dust removal device.

[0033] The vacuum pump pre-dust removal device includes a separation chamber 01 and a diversion separation mechanism 02. The separation chamber 01 is a hollow cylinder with an inner diameter that gradually increases from top to bottom. A dust collection plate 03 is provided on the inner wall of the separation chamber 01. A cover plate 04 is provided at the upper end of the separation chamber 01. A first pipe 05 communicating with the interior of the separation chamber 01 is provided at the top of the separation chamber 01. A dust collection chamber 06 is provided at the lower end of the separation chamber 01. A second pipe 07 communicating with the interior of the separation chamber 01 is provided at the bottom of the dust collection chamber 06. A third pipe 08 communicating with the separation chamber 01 is also provided at the bottom of the dust collection chamber 06. The diversion separation mechanism 02 is rotatably disposed inside the separation chamber 01 along the longitudinal axis of the separation chamber 01. The lower end of the diversion separation mechanism 02 is directly opposite the outlet end of the second pipe 07.

[0034] During crystal pulling, high-temperature gas mixed with compounds enters the separation chamber 01 through the second pipe 07. By controlling the rotation of the flow-guiding separation mechanism 02, the high-temperature gas is guided from the bottom to the top of the separation chamber 01, thus playing a guiding role. At the same time, under the axial rotational force of the flow-guiding separation mechanism 02, centrifugal force is generated on the high-temperature gas mixed with compounds, causing the compound particles in the high-temperature gas to separate from the gas. The gas is discharged from the first pipe 05 at the top of the separation chamber 01, while the compound particles are blocked by the dust collection plate 03 and gradually fall back to the dust collection chamber 06 under their own gravity. During the rotation of the flow-guiding separation mechanism 02, the separation of compound particles from gas is achieved, and the high-temperature gas mixed with compounds is stirred, so that it is fully dispersed, which is conducive to solid-gas separation. After crystal pulling is completed, the second pipe 07 is closed. Compressed air is introduced into the separation chamber 01 through the first pipe 05, and the flow separation mechanism 02 is reversed to guide the compressed air downwards and generate centrifugal force. This causes the compound particles on the inner wall of the separation chamber 01 and the dust collection plate 03 to detach under the blowing of the compressed air and move towards the bottom of the separation chamber 01. Simultaneously, the compound particles in the separation chamber 01 are discharged under the suction action of the third pipe 08, achieving automatic cleaning of the separation chamber 01 and automatic recovery of the compound particles. During this process, no manual cleaning of the separation chamber 01 is required, which not only simplifies the cleaning procedure but also reduces labor intensity and improves work efficiency.

[0035] In one embodiment, the drainage separation mechanism 02 includes a drive unit 21, a rotating rod 22, and drainage plates 23 disposed on the rotating rod 22. The rotating rod 22 is longitudinally disposed inside the separation chamber 01 along the axis of the separation chamber 01, and its upper end extends to the outside of the separation chamber 01 and is rotatably connected to the separation chamber 01. The output end of the drive unit 21 is connected to the rotating rod 22. The drainage plates 23 are spirally distributed along the axial direction of the rotating rod 22. When the high-temperature gas containing compounds enters the separation chamber 01 through the second pipe 07, the drive unit 21 will synchronously drive the rotating rod 22 to rotate. At this time, the spirally distributed guide plate 23 will guide the high-temperature gas containing compounds to flow upward while rotating circumferentially, and at the same time form a circumferential force on the high-temperature gas containing compounds, causing the high-temperature gas containing compounds to generate centrifugal force. Since the compound particles themselves have a certain weight, under the action of centrifugal force, the compound particles will move towards the inner wall of the separation chamber 01. After the compound particles come into contact with the inner wall of the separation chamber 01, the dust collection plate 03 can block these compound particles from moving upward. At the same time, the inner diameter of the separation chamber 01 gradually decreases from bottom to top. At this time, the compound particles can be completely blocked by the dust collection plate 03. Under the action of their own gravity, the compound particles gradually fall back into the dust collection chamber 06. When the separation chamber 01 needs to be cleaned, the second pipe 07 is closed, and compressed air is introduced into the separation chamber 01 through the first pipe 05. At this time, the drive unit 21 is controlled to drive the rotating rod 22 to reverse, so that the guide plate 23 follows and reverses synchronously. This not only guides the compressed air to flow downward, but also disperses the compressed air to the surroundings of the separation chamber 01. The compressed air blows the compound particles on the dust collection plate 03 and the inner wall of the separation chamber 01, causing them to float and move downward. Combined with the suction effect of the third pipe 08, the compound particles in the separation chamber 01 can be discharged, achieving automatic cleaning.

[0036] Specifically, the pitch of the guide plate 23 gradually increases from bottom to top. Because the pitch of the guide plates 23 differs—the lower guide plate 23 of the separation chamber 01 has a smaller pitch, while the upper guide plate 23 of the separation chamber 01 has a larger pitch—the centrifugal force generated in the lower part of the separation chamber 01 is greater when the guide plate 23 rotates circumferentially. Furthermore, the lower diameter of the separation chamber 01 is relatively large, which slows down the upward flow of the high-temperature gas. This is more conducive to solid-gas separation of the high-temperature gas containing a higher concentration of compound particles. In the upper part of the separation chamber 01, most of the compound particles have already separated from the high-temperature gas, and the guide plate 23 generates a relatively small centrifugal force there, which is sufficient. Additionally, the relatively small diameter of the upper part of the separation chamber 01 facilitates the discharge of the separated gas. During the cleaning operation, compressed air enters from the top of the separation chamber 01 through the first pipe 05. Because the inner diameter of the upper part of the separation chamber 01 is small, the compressed air can move downward quickly. However, in the lower part of the separation chamber 01, the inner diameter is larger, and the flow rate of the compressed air slows down. At this time, a large centrifugal force is required to remove the compound particles in the lower part of the separation chamber 01.

[0037] In one embodiment, the dust collection plate 03 is arranged in a spiral shape. The dust collection plate 03 has an arc-shaped structure, and the arc-shaped concave surface of the dust collection plate 03 faces the bottom of the separation chamber 01. This design facilitates the dust collection plate 03 in blocking compound particles and also allows compound particles falling back onto the upper surface of the dust collection plate 03 to move downwards, preventing compound particles from adhering to the dust collection plate 03. The dust collection plate 03 bends downwards on the side facing the axis of the separation chamber 01.

[0038] In one embodiment, the outlet end of the second pipe 07 is provided with a conical air inlet 71, that is, the lower end of the air inlet 71 has a smaller diameter and the upper end of the air inlet 71 has a larger diameter, which can slow down the flow rate of the high-temperature gas entering the separation chamber 01.

[0039] In one embodiment, the bottom of the dust collection chamber 06 is provided with an annular groove 61 distributed circumferentially along the air inlet 71, which facilitates the collection of compound particles. The bottom of the annular groove 61 is connected to the third pipe 08.

[0040] The above description discloses only preferred embodiments of the present invention and should not be construed as limiting the scope of the invention. Those skilled in the art will understand that implementing all or part of the above embodiments and making equivalent changes in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A pre-dust removal device for a vacuum pump, characterized in that: Includes a separation chamber and a diversion and separation mechanism; The separation chamber is a hollow cylinder with an inner diameter that gradually increases from top to bottom. A dust collection plate is provided on the inner wall of the separation chamber, and a cover plate is provided at the top of the separation chamber. A first pipe communicating with the interior of the separation chamber is provided at the top of the separation chamber, and a dust collection chamber is provided at the bottom of the separation chamber. A second pipe communicating with the interior of the separation chamber is provided at the bottom of the dust collection chamber. An air inlet is provided at the outlet end of the second pipe, and a third pipe communicating with the separation chamber is also provided at the bottom of the dust collection chamber. The dust collection plate is spirally arranged and has an arc-shaped structure. The arc-shaped concave surface of the dust collection plate faces the bottom of the separation chamber, and the dust collection plate bends downward on the side facing the axis of the separation chamber. The diversion and separation mechanism is rotatably installed inside the separation chamber along the longitudinal axis of the separation chamber, with the lower end of the diversion and separation mechanism facing the outlet end of the second pipe. The drainage separation mechanism includes a drive unit, a rotating rod, and a drainage plate disposed on the rotating rod; the rotating rod is longitudinally disposed inside the separation chamber along the axis of the separation chamber, the upper end of the rotating rod extends to the outside of the separation chamber and is rotatably connected to the separation chamber, and the output end of the drive unit is connected to the rotating rod; The drainage plate is spirally arranged along the axis of the rotating rod; The pitch of the drain plate gradually increases from bottom to top.

2. The vacuum pump pre-dust collector according to claim 1, characterized in that: The air inlet has a conical structure.

3. The vacuum pump pre-dust collector according to claim 2, characterized in that: The bottom of the dust collection chamber is provided with an annular groove distributed around the air inlet, and the bottom of the annular groove is connected to the third pipe.

4. A single crystal furnace, characterized in that: Includes the vacuum pump pre-dust removal device as described in any one of claims 1-3.

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