Centering device and method

Abstract

The present application belongs to the technical field of coaxial adjustment equipment, and in particular, relates to a centering device and method. The centering device is used to adjust the coaxiality between the second centering member and the first centering member, and the centering device includes a first detection module, an adjustment module, and a second detection module; the second centering member is pre-fixed to the first centering member to form a pre-connected workpiece group, and the pre-connected workpiece group can be placed on the adjustment module; the first detection module is used to detect the first coaxiality between the first centering member and the adjustment module, and the second detection module is used to detect the second coaxiality between the second centering member and the adjustment module; the adjustment module is configured to adjust the position of the pre-connected workpiece group according to the first coaxiality, and to adjust the position of the second centering member according to the second coaxiality. The centering device detects and adjusts the position of the centering member through the cooperation of multiple modules, and can obtain the specific value of the coaxiality with higher accuracy.

Description

Technical Field

[0001] The present application belongs to the technical field of coaxial adjustment equipment, and in particular relates to a centering device and method. Background Art

[0002] In the field of scanning electron microscopy, when assembling the main parts inside the electron microscope, the concentricity of the assembly is required to be very high, usually a few microns to tens of microns.

[0003] like Figure 1 As shown, the prior art only requires using a centering rod B to string the first centering piece A1 and the second centering piece A2 from top to bottom, and then tightening the fixing screw 201 to complete the centering assembly of the two workpieces. However, this alignment method cannot obtain a specific value of the alignment accuracy;

[0004] In addition, the processing accuracy of the centering rod B is difficult to guarantee. Moreover, the diameter of the micropores in the second centering part A2 is too small. Accordingly, the diameter of the centering rod B is small and its structural strength is low. Wear and deformation may occur during frequent use, resulting in low centering accuracy. Summary of the Invention

[0005] The present application provides a centering device and method to solve the technical problem in the prior art that the centering accuracy is low due to the use of a centering rod.

[0006] According to one aspect of the present application, a centering device is provided for adjusting the coaxiality between a second centering member and a first centering member, the centering device comprising a first detection module, an adjustment module and a second detection module; the second centering member is pre-fixed to the first centering member to form a pre-connected workpiece group, and the pre-connected workpiece group can be placed on the adjustment module; the first detection module is used to detect a first coaxiality between the first centering member and the adjustment module, and the second detection module is used to detect a second coaxiality between the second centering member and the adjustment module; the adjustment module is configured to adjust the position of the pre-connected workpiece group according to the first coaxiality, and to adjust the position of the second centering member according to the second coaxiality.

[0007] In an optional solution of the present application, the adjustment module includes a rotating mechanism, a first adjusting mechanism and a second adjusting mechanism connected in sequence from bottom to top along the Z axis; the second adjusting mechanism is used to be connected to the pre-connected workpiece group, and the rotating mechanism can drive the first adjusting mechanism, the second adjusting mechanism and the pre-connected workpiece group to rotate around the Z axis; the first adjusting mechanism is used to drive the second adjusting mechanism to move so as to adjust the position of the pre-connected workpiece group according to the first coaxiality; the second adjusting mechanism is used to adjust the position of the second centering member according to the second coaxiality.

[0008] In an optional solution of the present application, the second adjustment mechanism includes a centering disk and multiple pressure pieces. The first centering piece is connected to the centering disk. The multiple pressure pieces are arranged at circumferential intervals along the centering disk and movably connected to the centering disk to clamp the second centering piece.

[0009] In an optional solution of the present application, the first centering member is provided with a reference hole; the first detection module includes a first support arm and a measuring tool, and the measuring tool is installed on the first support arm; the measuring tool is configured to detect the first coaxiality between the first centering member and the rotating mechanism by contacting the inner wall of the reference hole, and the measuring tool is also configured to detect the parallelism of the first centering member relative to the horizontal plane by contacting the surface of the first centering member on the Z axis.

[0010] In an optional solution of the present application, the first centering piece is provided with a reference hole, and the second centering piece is provided with a centering hole; the second detection module includes an image acquisition device and a focusing mechanism, the image acquisition device is used to acquire the position of the centering hole to detect the second coaxiality between the second centering piece and the adjustment module, and the focusing mechanism is used to adjust the position of the image acquisition device on the Z axis to focus.

[0011] In an optional solution of the present application, the centering device also includes a third adjustment mechanism and a second support arm; the second support arm is connected to the third adjustment mechanism, and the second detection module is connected to the second support arm; the third adjustment mechanism is configured to drive the second support arm to move to adjust the relative position of the second detection module and the second centering member.

[0012] According to another aspect of the present application, a centering method is provided, which is applied to the centering device described above, and the method includes:

[0013] Placing the pre-connected workpiece group on the adjustment module;

[0014] Based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group by the first adjustment mechanism until the first coaxiality is less than or equal to a first threshold;

[0015] Based on the second coaxiality detected by the second detection module, the position of the second centering member is adjusted by the second adjustment mechanism until the second coaxiality is less than or equal to the second threshold.

[0016] In an optional solution of the present application, based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group by the first adjustment mechanism until the first coaxiality is less than or equal to the first threshold, the method further includes:

[0017] Detecting the parallelism of the first centering member relative to the horizontal plane by a first detection module;

[0018] Based on the parallelism detected by the first detection module, the position of the pre-connected workpiece group is adjusted by the first adjustment mechanism until the parallelism is less than or equal to a third threshold.

[0019] In an optional solution of the present application, the second centering member is provided with a centering hole, and based on the second coaxiality detected by the second detection module, the position of the second centering member is adjusted by the second adjustment mechanism until the second coaxiality is less than or equal to the second threshold, including:

[0020] Adjusting the position of the second centering member by the rotating mechanism, and determining the target position of the center of the centering hole based on the position of the centering hole detected by the second detection module;

[0021] Determine the second coaxiality according to the target position and the center position of the centering hole;

[0022] Based on the target position and the second coaxiality, the position of the second centering member is adjusted by the second adjusting mechanism so that the center of the centering hole is close to the target position.

[0023] In an optional solution of the present application, adjusting the position of the second centering member by a rotating mechanism and determining the target position of the center of the centering hole based on the position of the centering hole detected by the second detection module include:

[0024] The pre-connected workpiece assembly is driven to rotate to a first position by a rotating mechanism, and a first center position of the centering hole is detected by a second detection module;

[0025] The pre-connected workpiece assembly is driven to rotate to a second position by a rotating mechanism, and a second center position of the centering hole is detected by a second detection module;

[0026] The pre-connected workpiece assembly is driven to rotate to a third position by the rotating mechanism, and the third center position of the centering hole is detected by the second detection module;

[0027] A fitting circle is determined based on the first center position, the second center position, and the third center position. The center position of the fitting circle is the target position of the center of the centering hole.

[0028] In summary, the centering device and method provided by this application have at least the following beneficial effects:

[0029] In the solution provided by this application, the first and second centering members are adjusted for coaxiality using an adjustment module. Specifically, the first and second detection modules cooperate with the adjustment module to obtain corresponding coaxiality data. Based on this coaxiality data, the adjustment module acts on the pre-connected workpiece assembly to change its position, thereby aligning the first and second centering members. By integrating multiple modules to detect and adjust the position of the centering members, this centering device can obtain specific coaxiality values ​​with higher accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] To more clearly illustrate the specific embodiments of this application or the technical solutions in the prior art, the following briefly introduces the drawings required for the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be derived from these drawings without inventive effort.

[0031] Figure 1 A schematic diagram of centering using a centering rod in the prior art is presented;

[0032] Figure 2 A schematic diagram of a centering device provided according to one embodiment of the present application;

[0033] Figure 3a A simplified cross-sectional view of a pre-connected workpiece assembly according to one embodiment of the present application;

[0034] Figure 3b for Figure 3a Cross-sectional view at CC;

[0035] Figure 3c for Figure 3a Cross-sectional view at DD in the middle;

[0036] Figure 4a A top view of an assembly of a pre-connected workpiece group and a second adjustment mechanism according to one embodiment of the present application;

[0037] Figure 4b for Figure 4a Cross-sectional view at EE;

[0038] Figure 5 A partial schematic diagram of a centering device provided in an embodiment of the present application performing parallelism detection is shown;

[0039] Figure 6 A partial schematic diagram of the first coaxiality test performed by the centering device provided in an embodiment of the present application is shown;

[0040] Figure 7 A flowchart of a centering method according to one embodiment of the present application;

[0041] Figure 8 An enlarged schematic diagram of the centering hole at different rotation angles is shown.

[0042] The accompanying drawings are as follows: .

[0043] 100. Centering device;

[0044] 10. First platform;

[0045] 20. First detection module; 21. First support arm; 22. Measuring tool;

[0046] 30. Adjustment module; 31. Rotation mechanism; 32. First adjustment mechanism; 33. Second adjustment mechanism; 331. Centering plate; 332. Pressing member;

[0047] 40. Second detection module; 41. Image acquisition device; 42. Focusing mechanism; 43. Display;

[0048] 50. Second platform;

[0049] 60. Third adjustment mechanism; 70. Second support arm;

[0050] 201, screw; 202, preload spring;

[0051] A0, pre-connected workpiece group; A1, first centering piece; A2, second centering piece; B, centering rod; H1, reference hole; H2, centering hole. DETAILED DESCRIPTION

[0052] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear to indicate the orientation or position relationship, unless otherwise specified, they are understood to be based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting this application.

[0053] Furthermore, the use of "first" or "second" in describing features is for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features identified. Features identified as "first" or "second" may explicitly or implicitly include at least one of the identified features. The use of the word "plurality" generally implies at least two, such as two or three, unless otherwise specifically defined.

[0054] In this application, unless otherwise specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integration; mechanical connections, electrical connections, direct connections, or indirect connections through an intermediary; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0055] In the description of this specification, if the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0056] Figure 2 This is a schematic diagram of a centering device 100 provided according to one embodiment of the present application. Figure 2 The centering device 100 is used to adjust the coaxiality between the second centering member A2 and the first centering member A1. The centering device 100 includes a first detection module 20, an adjustment module 30, and a second detection module 40.

[0057] The second centering piece A2 is pre-fixed to the first centering piece A1 to form a pre-connected workpiece group A0 . The pre-connected workpiece group A0 can be placed on the adjustment module 30 . Figure 3a This is a simplified cross-sectional view of a pre-connected workpiece assembly A0 provided according to one embodiment of the present application. Figure 3b for Figure 3a Cross-sectional view at CC, Figure 3c for Figure 3a Cross-sectional view at DD in the middle.

[0058] See also Figure 3a to Figure 3b The first centering member A1 and the second centering member A2 are both rotating parts. The same end of the first centering member A1 and the second centering member A2 is a flange structure. The first centering member A1 and the second centering member A2 are spliced ​​along the Z axis and the flange structures of the two are connected, and are pre-fixed by screws 201 and pre-tightening springs 202.

[0059] In the illustrated embodiment, four screws 201 are installed inside the flange structure. Two of the opposing screws 201 are each equipped with a preload spring 202, while the other two screws 201 are not equipped with preload springs 202. In practice, the two screws 201 equipped with preload springs 202 are first tightened (not necessarily locked), and the other two screws 201 are then tightened, thereby pre-fixing the first centering member A1 and the second centering member A2.

[0060] After pre-fixing the second centering member A2 to the first centering member A1, the second centering member A2 does not have Z-axis freedom of movement, but does have X- and Y-axis freedom of movement. It should be understood that coaxiality can be adjusted by adjusting the relative position of the second centering member A2 in the XY plane.

[0061] Furthermore, the first detection module 20 is used to detect a first coaxiality between the first centering member A1 and the adjustment module 30, and the second detection module 40 is used to detect a second coaxiality between the second centering member A2 and the adjustment module 30. The adjustment module 30 is configured to adjust the position of the pre-connected workpiece assembly A0 based on the first coaxiality and to adjust the position of the second centering member A2 based on the second coaxiality.

[0062] In this embodiment, the second centering piece A2 is installed on the first centering piece A1 to form a pre-connected workpiece group A0, and the first centering piece A1 in the pre-connected workpiece group A0 is installed on the adjustment module 30 to realize the setting of the pre-connected workpiece group A0 on the adjustment module 30.

[0063] The adjustment module 30 can provide multiple degrees of freedom to adjust the position of the pre-connected workpiece assembly A0, including a first coaxiality between the first centering member A1 and the adjustment module 30 and a second coaxiality between the second centering member A2 and the adjustment module 30. The first coaxiality is inspected by the first inspection module 20, and the second coaxiality is inspected by the second inspection module 40.

[0064] In this embodiment, the coaxiality of the first and second centering members A1 and A2 is adjusted using an adjustment module 30. Specifically, the first and second detection modules 20 and 40 cooperate with the adjustment module 30 to obtain corresponding coaxiality data. Based on this coaxiality data, the adjustment module 30 acts on the pre-connected workpiece assembly A0 to change its position, thereby aligning the first and second centering members A1 and A2. Compared to existing solutions that use a centering rod B for alignment, this centering device 100 utilizes multiple modules to detect and adjust the position of the centering members, enabling accurate coaxiality determination and achieving higher precision.

[0065] In some optional embodiments, the adjustment module 30 includes a rotation mechanism 31, a first adjustment mechanism 32, and a second adjustment mechanism 33, connected sequentially along the Z axis from bottom to top. It should be noted that the rotation mechanism 31 can provide rotational freedom about the Z axis. The second adjustment mechanism 33 is connected to the pre-connected workpiece assembly A0, and the rotation mechanism 31 can drive the first adjustment mechanism 32, the second adjustment mechanism 33, and the pre-connected workpiece assembly A0 to rotate about the Z axis.

[0066] It should be noted that, when the rotating mechanism 31 drives the pre-connected workpiece group A0 to rotate around the Z axis, the first detection module 20 and the second detection module 40 perform detection, thereby obtaining the first coaxiality and the second coaxiality.

[0067] The first adjustment mechanism 32 is used to drive the second adjustment mechanism 33 to adjust the position of the pre-connected workpiece assembly A0 according to the first coaxiality. Specifically, as the rotation mechanism 31 rotates the pre-connected workpiece assembly A0, the first detection module 20 determines the deviation between the axis of the first centering member A1 and the rotation center of the rotation mechanism 31, i.e., the first coaxiality. The first adjustment mechanism 32 then adjusts the position of the second adjustment mechanism 33, thereby changing the position of the pre-connected workpiece assembly A0, and therefore the position of the first centering member A1, so that the axis of the first centering member A1 is as close as possible to the rotation center of the rotation mechanism 31.

[0068] The second adjustment mechanism 33 is used to adjust the position of the second centering member A2 according to the second coaxiality. Specifically, during the rotation of the pre-connected workpiece assembly A0 by the rotation mechanism 31, the second detection module 40 determines the deviation between the axis of the second centering member A2 and the rotation center of the rotation mechanism 31, i.e., the second coaxiality.

[0069] As can be seen from the foregoing, the second centering member A2 in the pre-connected workpiece assembly A0 has freedom of movement within the XY plane, and its position within the XY plane can be adjusted via the second adjustment mechanism 33. Once the second coaxiality is determined, the second adjustment mechanism 33 adjusts the position of the second centering member A2 so that its axis is as close as possible to the rotation center of the rotation mechanism 31.

[0070] It can be seen that in this embodiment, during the centering process, the centering is performed based on the rotation center of the rotating mechanism 31 in the adjustment module 30 as a reference.

[0071] In some optional embodiments, the rotating mechanism 31 may be a turntable, a converter, etc. The first adjusting mechanism 32 may be a multi-axis slide.

[0072] Figure 4a This is a top view of the assembly of the pre-connected workpiece group A0 and the second adjustment mechanism 33 according to one embodiment of the present application. Figure 4b for Figure 4a Cross-sectional view at EE in the figure. Figures 4a to 4b In some optional embodiments, the second adjustment mechanism 33 includes a centering disk 331 and a plurality of pressing members 332. The first centering member A1 is connected to the centering disk 331. The plurality of pressing members 332 are arranged at axial intervals along the centering disk 331 and are movably connected to the centering disk 331 to clamp the second centering member A2.

[0073] Because the second centering member A2 is connected to the first centering member A1, installing the first centering member A1 on the centering disk 331 secures the pre-connected workpiece assembly A0 to the centering disk 331. In this embodiment, the centering disk 331 is a flange structure, and multiple pressure members 332 are symmetrically arranged about the center of the centering disk 331. This ensures that the force exerted by each pressure member 332 on the second centering member A2 is evenly distributed, thereby stably clamping the second centering member A2. It should be understood that by adjusting the relative position of each pressure member 332 and the centering disk 331, the position of the second centering member A2 can be changed within the XY-axis plane to adjust the second coaxiality.

[0074] In the embodiment shown in Figure 4 , four screws 201 are provided on the outer side of the flange structure of the first centering member A1 to connect it to the centering plate 331. Four pressing members 332 are arranged symmetrically around the center. In specific applications, the pressing members 332 can be, for example, jackscrews, screws, or micrometer heads.

[0075] See also Figure 2 and Figure 3b In some further optional embodiments, the first centering member A1 is provided with a reference hole H1, and the first detection module 20 includes a first support arm 21 and a measuring tool 22, with the measuring tool 22 mounted on the first support arm 21. In some embodiments, the first support arm 21 is composed of a plurality of arm segments connected in sequence, each of which is movably connected. The measuring tool 22 is mounted on the tail arm segment, and the position of the measuring tool 22 can be adjusted by adjusting the posture of each arm segment so that the measuring tool 22 can abut against the first centering member A1.

[0076] In a specific application, the first support arm 21 may be a universal arm, and the measuring tool 22 may be a dial indicator, but the present invention is not limited thereto.

[0077] Figure 5 A partial schematic diagram of the centering device 100 performing parallelism detection is shown; Figure 6 A partial schematic diagram of the centering device 100 performing the first coaxiality test is shown. Figure 5 and Figure 6The measuring tool 22 is configured to detect the first coaxiality between the first centering member A1 and the adjustment module 30 by contacting the inner wall of the reference hole H1. The measuring tool 22 is also configured to detect the parallelism of the first centering member A1 relative to the horizontal plane by contacting the surface of the first centering member A1 on the Z axis.

[0078] In this embodiment, the first centering member A1 is provided with a coaxial through-hole H1. During the rotation of the rotating mechanism 31, the fluctuation value obtained by the measuring tool 22 abutting against the inner wall of the reference hole H1 is used to determine the deviation between the axis of the reference hole H1 and the rotation center of the rotating mechanism 31, that is, the first coaxiality.

[0079] Furthermore, during the rotation of the rotating mechanism 31, the fluctuation value obtained by the measuring tool 22 contacting the surface of the first alignment member A1 on the Z axis is used to determine the parallelism of the first alignment member A1 relative to the horizontal plane. It should be noted that the horizontal plane mentioned in this application refers to the XY axis plane.

[0080] In the illustrated embodiment, measuring tool 22 is a dial indicator. During levelness testing, the probe of measuring tool 22 abuts the upper end surface of first alignment member A1. As the rotating mechanism 31 rotates, the dial of measuring tool 22 measures the corresponding fluctuation value, thereby determining parallelism. During first coaxiality testing, the probe of measuring tool 22 abuts the inner wall of reference hole H1. As the rotating mechanism 31 rotates, the dial of measuring tool 22 measures the corresponding fluctuation value, thereby determining first coaxiality.

[0081] It should be understood that the position of the second adjustment mechanism 33 can be adjusted by the first adjustment mechanism 32 and the pre-connected workpiece group A0 can be driven to change the position of the first centering member A1, thereby adjusting the parallelism and the first coaxiality.

[0082] It can be understood that since the corresponding fluctuation values ​​are obtained through the upper end surface of the first centering part A1 and the inner circumferential wall of the reference hole H1, there are higher requirements on the flatness of the upper end surface of the first centering part A1 and the inner circumferential wall of the reference hole H1 to ensure the accuracy of the corresponding parameters obtained.

[0083] See also Figure 2 In some optional embodiments, the first alignment member A1 is provided with a reference hole H1, and the second alignment member A2 is provided with a centering hole H2. The second detection module 40 includes an image acquisition device 41 and a focusing mechanism 42. The image acquisition device 41 is used to capture the position of the centering hole H2 to detect the second coaxiality between the second alignment member A2 and the adjustment module 30. The focusing mechanism 42 is used to adjust the position of the image acquisition device 41 on the Z axis to adjust the focus.

[0084] In this embodiment, the second centering member A2 is provided with a coaxial through-hole H2. To ensure that the image acquisition device 41 can obtain image data of the centering hole H2, the projection of the reference hole H1 in the Z-axis direction at least covers the centering hole H2, that is, the image acquisition device 41 can observe the centering hole H2 through the reference hole H1, thereby obtaining image data of the centering hole H2 to determine its position.

[0085] The focusing mechanism 42 is used to change the Z-axis position of the image acquisition device 41 for focusing, so that the image acquisition device 41 can acquire clear image data of the centering hole H2.

[0086] It should be understood that since the first centering component A1 and the second centering component A2 are spliced ​​on the Z axis, when it is determined that the parallelism of the first centering component A1 meets the requirements, the second centering component A2 also meets the parallelism conditions accordingly, so as to ensure the accuracy of the detected coaxiality data.

[0087] In some optional embodiments, the second detection module 40 also includes a display 43 and a processor (not shown in the figure), and the processor can obtain the image data of the centering hole H2 captured by the image acquisition device 41 and transmit it to the display 43 for enlarged display on the display 43.

[0088] In this embodiment, the centering hole H2 is a microporous structure, and thus the image acquisition device 41 may be a microscope to magnify the centering hole H2.

[0089] In some optional embodiments, the centering device 100 further includes a third adjustment mechanism 60 and a second support arm 70. The second support arm 70 is connected to the third adjustment mechanism 60, and the second detection module 40 is connected to the second support arm 70. The third adjustment mechanism 60 is configured to drive the second support arm 70 to adjust the position of the second detection module 40 to facilitate image data acquisition.

[0090] In this embodiment, the second support arm 70 is composed of multiple arm sections that are movably connected in sequence. The second support arm 70 is used to support the second detection module 40. The position of the second detection module 40 can be changed by adjusting the position of each arm section, thereby coarsely adjusting the position of the second detection module 40.

[0091] The second support arm 70 is mounted on the third adjustment mechanism 60 . The position of the second support arm 70 is adjusted by the third adjustment mechanism 60 to change the position of the second detection module 40 , thereby fine-tuning the position of the second detection module 40 .

[0092] In the illustrated embodiment, the image acquisition device 41 and the focusing mechanism 42 in the second detection module 40 are both disposed on the second support arm 70. To facilitate understanding of this solution, an example is given in which the image acquisition device 41 is a microscope and the focusing mechanism 42 includes a focusing motor for adjusting the position of the microscope on the Z axis. This example illustrates how to acquire an image of the centering hole H2. The details are as follows:

[0093] First, move the second support arm 70 to position the microscope above the pre-connected workpiece assembly A0. Then, set the microscope to a low magnification. Then, control the focus motor to adjust the microscope's position on the Z axis until the centering hole H2 can be observed on the display 43. Next, adjust the third adjustment mechanism 60 to move the second support arm 70, driving the microscope, until the centering hole H2 appears in the center of the display 43. Then, increase the microscope's magnification and adjust the focus motor to control the microscope's position on the Z axis until the outline of the centering hole H2 is most clearly displayed in the center of the display 43.

[0094] It should be noted that, in this embodiment, the second support arm 70 may be a universal arm, and the third adjustment mechanism 60 may be a multi-axis slide with 6 degrees of freedom to ensure that the image acquisition device 41 is aligned with the centering hole H2 in the Z-axis direction.

[0095] In some optional embodiments, the centering device 100 further includes a first platform 10, and the adjustment module 30, the first detection module 20, and the third adjustment mechanism 60 are all disposed on the first platform 10. It should be noted that, because the second detection module 40 is connected to the third adjustment mechanism 60 via the second support arm 70, the various components of the centering device 100 are all arranged based on the first platform 10 to ensure the accuracy of subsequent detection parameters.

[0096] In some optional embodiments, the centering device 100 further includes a first platform 10 and a second platform 50, the third adjustment mechanism 60 is disposed on the second platform 50, and the adjustment module 30 and the first detection module 20 are disposed on the first platform 10. In this way, components related to the image acquisition function for detecting the second coaxiality in the centering device 100 are integrated on the second platform 50, and components related to detecting horizontality and first coaxiality in the centering device 100 are integrated on the first platform 10. Both the first platform 10 and the second platform 50 are integrated with different functional modules, thereby providing greater flexibility.

[0097] It should be understood that the first platform 10 and the second platform 50 are platforms with a high level of precision, including, for example, an optical platform table, a marble platform table, etc.

[0098] Figure 7 This is a flowchart of the steps of the centering method provided according to one embodiment of the present application. Figure 7The present application also provides a centering method, which is implemented based on the above-mentioned centering device and includes:

[0099] Step S10 : placing the pre-connected workpiece group A0 on the adjustment module 30 .

[0100] In an optional embodiment, the pre-connected workpiece assembly A0 is formed by pre-fixing the second centering member A2 and the first centering member A1 via screws 201 and a preload spring 202 (described in detail above). The adjustment module 30 includes a rotation mechanism 31, a first adjustment mechanism 32, and a second adjustment mechanism 33. The second adjustment mechanism 33 includes a centering disk 331 and a plurality of pressing members 332. The first centering member A1 is fixed to the centering disk 331, thereby mounting the pre-connected workpiece assembly A0 on the second adjustment mechanism 33.

[0101] In step S20 , based on the first coaxiality detected by the first detection module 20 , the position of the first centering member A1 pre-connected to the workpiece group A0 is adjusted by the first adjustment mechanism 32 until the first coaxiality is less than or equal to a first threshold.

[0102] In an optional embodiment, the first detection module 20 includes a first support arm 21 and a measuring tool 22. The first centering member A1 is provided with a coaxial through-hole H1. The measuring tool 22 is placed against the inner wall of the reference hole H1, and the rotation mechanism 31 is controlled to drive the pre-connected workpiece group A0 to rotate to obtain a fluctuation value of the measuring tool 22. This fluctuation value is the first coaxiality. When the fluctuation value is greater than a first threshold, the first adjustment mechanism 32 is adjusted to change the position of the pre-connected workpiece group A0 to reduce the fluctuation value, that is, to make the axis of the first centering member A1 as close as possible to the rotation center of the rotation mechanism 31, until the fluctuation value is no greater than the first threshold, that is, the first coaxiality is less than or equal to the first threshold.

[0103] In this embodiment, the first threshold is 1 μm, that is, the first coaxiality is less than or equal to 1 μm.

[0104] In step S30 , based on the second coaxiality detected by the second detection module 40 , the position of the second centering member A2 is adjusted by the second adjustment mechanism 33 until the second coaxiality is less than or equal to a second threshold.

[0105] In an optional embodiment, the second detection module 40 includes an image acquisition device 41 and a focusing mechanism 42. A coaxial through-hole H2 is provided on the second centering member A2. The second detection module 40 can obtain image data of the centering hole H2 to determine the position of the centering hole H2, and then determine the deviation between the axis of the centering hole H2 and the rotation center of the rotating mechanism 31, that is, the second coaxiality.

[0106] According to the position of the centering hole H2, the position of each pressing member 332 relative to the centering disk 331 is adjusted to change the position of the second centering member A2 clamped between the multiple pressing members 332, so that the axis of the centering hole H2 is as close as possible to the rotation center of the rotating mechanism 31 until the second coaxiality is less than or equal to the second threshold.

[0107] When the first coaxiality is not greater than the first threshold, the axis of the reference hole H1 can be considered to be concentric with the rotation center of the rotating mechanism 31; when the second coaxiality is not greater than the second threshold, the axis of the centering hole H2 can be considered to be concentric with the rotation center of the rotating mechanism 31, thereby completing the alignment of the centering hole H2 and the reference hole H1.

[0108] It should be understood that when the first adjustment mechanism 32 changes the position of the pre-connected workpiece assembly A0, it changes the relative position of the first centering member A1 and the rotation mechanism 31 to adjust the first coaxiality. However, during this process, the second centering member A2 also moves synchronously with the first centering member A1. Therefore, it is necessary to first adjust the first coaxiality to ensure that the first coaxiality meets the requirements, and then adjust the position of the second centering member A2 to adjust the second coaxiality.

[0109] In this embodiment, the second threshold is 10 μm, that is, the second coaxiality is less than or equal to 10 μm. It should be noted that in order to ensure the accuracy of the detected coaxiality data, it is necessary to ensure the parallelism between the pre-connected workpiece group A0 and the horizontal plane (XY axis plane). In some optional embodiments, before step S20, the following is also included:

[0110] In step S11 , the first detection module 20 detects the parallelism of the first centering member A1 relative to the horizontal plane.

[0111] In some optional embodiments, the centering device 100 includes a first platform 10, on which a first detection module 20 and an adjustment module 30 are mounted. During rotation, the rotation mechanism 31 causes the measuring tool 22 in the first detection module 20 to abut against the upper end surface of the first centering member A1. The fluctuation value of the measuring tool 22 is obtained to determine the parallelism between the upper end surface of the first centering member A1 and the tabletop (horizontal plane) of the first platform 10, i.e., the parallelism of the first centering member A1 relative to the horizontal plane.

[0112] Step S12 : Based on the parallelism detected by the first detection module 20 , the position of the pre-connected workpiece group A0 is adjusted by the first adjustment mechanism 32 until the parallelism is less than or equal to a third threshold.

[0113] Specifically, when it is determined that the parallelism is greater than the third threshold, the position of the pre-connected workpiece group A0 is continuously adjusted by the first adjusting mechanism 32 , that is, the position of the centering member A1 is adjusted until the parallelism is no greater than the third threshold.

[0114] In this embodiment, the third threshold is 1 μm, meaning the parallelism is less than or equal to 1 μm. Thus, after steps S11 to S12, the pre-connected workpiece assembly A0 is placed horizontally. In a specific application, the first adjustment mechanism 32 is a multi-axis slide with 5 degrees of freedom (the degree of freedom of rotation about the Z axis is provided by the rotation mechanism 31), which allows for adjustment of both parallelism and coaxiality.

[0115] In some optional embodiments, step S30 includes:

[0116] In step S31 , the position of the second centering member A2 is adjusted by the rotating mechanism 31 , and the target position of the center of the centering hole H2 is determined based on the position of the centering hole H2 detected by the second detection module 40 .

[0117] In this embodiment, the target position of the center of the centering hole H2 is the rotation center of the rotating mechanism 31. In an optional embodiment, the second detection module 40 includes an image acquisition device 41, which can determine the contour of the centering hole H2 and the center position of the centering hole H2. Before the second centering element A2 is aligned, the centering hole H2 is offset from the rotating mechanism 31. The rotating mechanism 31 can obtain multiple center positions of the centering hole H2 at different rotation angles, and the target position can be determined based on these multiple center positions.

[0118] Step S32: determining a second coaxiality according to the target position and the center position of the centering hole H2.

[0119] It should be understood that the distance between the center position of the centering hole H2 and the target position is the second coaxiality. In a specific application, the distances between multiple center positions of the centering hole H2 and the target position are determined and averaged to determine the second coaxiality.

[0120] In step S33 , based on the target position and the second coaxiality, the position of the second centering member A2 is adjusted by the second adjusting mechanism 33 so that the center of the centering hole H2 is close to the target position.

[0121] Specifically, after the target position and the second coaxiality are determined, when the second coaxiality is greater than the second threshold, the position of the second centering member A2 is changed by adjusting the pressing member 332 so that the center of the centering hole H2 is close to the target position.

[0122] It should be understood that by repeating the above steps S31 to S33 and performing multiple adjustments, the second coaxiality can be made not greater than the second threshold.

[0123] In some optional embodiments, step S31 includes:

[0124] Step S311: driving the pre-connected workpiece assembly A0 to rotate to a first position via the rotating mechanism 31, and detecting a first center position of the centering hole H2 via the second detection module 40;

[0125] Step S312: driving the pre-connected workpiece assembly A0 to rotate to a second position via the rotating mechanism 31, and detecting the second center position of the centering hole H2 via the second detection module 40;

[0126] Step S313: driving the pre-connected workpiece assembly A0 to rotate to a third position via the rotating mechanism 31, and detecting the third center position of the centering hole H2 via the second detection module 40;

[0127] In step S314 , a fitting circle is determined according to the first center position, the second center position, and the third center position. The center position of the fitting circle is the target position of the center of the centering hole H2 .

[0128] It should be understood that three points can fit a circle, and the center position of the fitted circle is the target position. In other words, in step S31, at least the center position of the centering hole H2 at three rotation angles needs to be collected to obtain the fitted circle.

[0129] In order to facilitate the understanding of this solution, the following Figure 8 Provide explanation. Figure 8 An enlarged schematic diagram of the centering hole H2 at different rotation angles is shown. Center O1 corresponds to the center of centering hole H2 at position 1, center O2 corresponds to the center of centering hole H2 at position 2, and center O3 corresponds to the center of centering hole H3 at position 3. A circle is fitted through centers O1, O2, and O3, and the center of the fitted circle, O0, is determined. This center O0 is the target position (the center of rotation). The distance between centers O1, O2, and O3 and center O0 is the second coaxiality, or the radius of the fitted circle.

[0130] When it is determined that the second coaxiality is less than the second threshold, the top pressure piece 332 can be locked to fix the second centering piece A2, and then the two screws 201 on the inside that are not matched with the preload spring 202 are locked. Then, the remaining two screws on the inside are loosened to remove the preload spring 202, and then the two screws 201 are reinstalled and locked. In this way, the centering assembly of the first centering piece A1 and the second centering piece A2 is completed.

[0131] In summary, by using the centering device 100 and the centering method, the centering accuracy of component assembly can be controlled within a deviation of 10 microns, greatly improving the centering accuracy during component assembly. In particular, for the assembly of a scanning electron microscope, the assembly accuracy is improved, ensuring the imaging quality and stability of the scanning electron microscope.

[0132] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Those skilled in the art can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A centering device for adjusting the coaxiality between a second centering member and a first centering member, characterized in that: The centering device includes a first detection module, an adjustment module and a second detection module; The second centering member is pre-fixed to the first centering member to form a pre-connected workpiece group, and the pre-connected workpiece group can be placed on the adjustment module; The first detection module is used to detect a first coaxiality between the first centering member and the adjusting module, and the second detection module is used to detect a second coaxiality between the second centering member and the adjusting module; The adjusting module is configured to adjust the position of the pre-connected workpiece group according to the first coaxiality, and to adjust the position of the second centering member according to the second coaxiality; The adjustment module includes a rotation mechanism, a first adjustment mechanism, and a second adjustment mechanism connected sequentially from bottom to top along the Z axis; The second adjustment mechanism is used to be connected to the pre-connected workpiece group, and the rotation mechanism can drive the first adjustment mechanism, the second adjustment mechanism and the pre-connected workpiece group to rotate around the Z axis; The first adjusting mechanism is used to drive the second adjusting mechanism to move, so as to adjust the position of the pre-connected workpiece group according to the first coaxiality; The second adjustment mechanism is used to adjust the position of the second centering member according to the second coaxiality; The second adjustment mechanism includes a centering disk and a plurality of pressing members, the first centering member is connected to the centering disk, and the plurality of pressing members are arranged at intervals along the circumference of the centering disk and movably connected to the centering disk to clamp the second centering member.

2. The centering device according to claim 1, characterized in that: The first centering member is provided with a reference hole; The first detection module includes a first support arm and a measuring tool, and the measuring tool is installed on the first support arm; The measuring tool is configured to detect the first coaxiality between the first centering member and the rotating mechanism by contacting the inner wall of the reference hole, and to detect the parallelism of the first centering member relative to the horizontal plane by contacting the surface of the first centering member on the Z axis.

3. The centering device according to claim 1, characterized in that: The first centering member is provided with a reference hole, and the second centering member is provided with a centering hole; The second detection module includes an image acquisition device and a focusing mechanism. The image acquisition device is used to acquire the position of the centering hole to detect the second coaxiality between the second centering member and the adjustment module. The focusing mechanism is used to adjust the position of the image acquisition device on the Z axis to focus.

4. The centering device according to claim 1, characterized in that: The centering device further includes a third adjustment mechanism and a second support arm; The second supporting arm is connected to the third adjusting mechanism, and the second detecting module is connected to the second supporting arm; The third adjustment mechanism is configured to drive the second support arm to move so as to adjust the relative position of the second detection module and the second centering member.

5. A centering method, characterized in that: Applied to the centering device according to claim 1 or 2, the method comprises: placing the pre-connected workpiece group on the adjustment module; Based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group by the first adjustment mechanism until the first coaxiality is less than or equal to a first threshold; Based on the second coaxiality detected by the second detection module, the position of the second centering member is adjusted by the second adjustment mechanism until the second coaxiality is less than or equal to a second threshold.

6. The centering method according to claim 5, characterized in that: Based on the first coaxiality detected by the first detection module, adjusting the position of the pre-connected workpiece group by the first adjustment mechanism until the first coaxiality is less than or equal to a first threshold, the method further includes: detecting the parallelism of the first centering member relative to a horizontal plane by the first detection module; Based on the parallelism detected by the first detection module, the position of the pre-connected workpiece group is adjusted by the first adjustment mechanism until the parallelism is less than or equal to a third threshold.

7. The centering method according to claim 5, characterized in that: The second centering member is provided with a centering hole, and the position of the second centering member is adjusted by the second adjustment mechanism based on the second coaxiality detected by the second detection module until the second coaxiality is less than or equal to a second threshold, including: adjusting the position of the second centering member by the rotating mechanism, and determining a target position of the center of the centering hole based on the position of the centering hole detected by the second detection module; determining the second coaxiality according to the target position and the center position of the centering hole; Based on the target position and the second coaxiality, the position of the second centering member is adjusted by the second adjusting mechanism so that the center of the centering hole is close to the target position.

8. The centering method according to claim 7, characterized in that: The adjusting the position of the second centering member by the rotating mechanism and determining the target position of the center of the centering hole based on the position of the centering hole detected by the second detection module includes: The pre-connected workpiece assembly is driven to rotate to a first position by the rotating mechanism, and the first center position of the centering hole is detected by the second detection module; Driving the pre-connected workpiece assembly to rotate to a second position by the rotating mechanism, and detecting the second center position of the centering hole by the second detection module; driving the pre-connected workpiece assembly to rotate to a third position by the rotating mechanism, and detecting a third center position of the centering hole by the second detection module; A fitting circle is determined according to the first center position, the second center position and the third center position, and the center position of the fitting circle is the target position of the center of the centering hole.

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