A large valve of a high-speed switch

Abstract

The present invention relates to a large valve of a high-speed switch. The valve includes: a support device, a sealing device, and a driving device. The support device includes a cross beam and support seats. There are two support seats which are symmetrically distributed, and the two support seats are fixedly installed on the cavity. The two ends of the cross beam are respectively fixedly connected to the two support seats. The sealing device includes a main shaft, a sealing plate, and at least one set of transmission components. The transmission components include a first swing rod, a second swing rod, and a push rod, which together with the cross beam form a planar four-bar mechanism. The push rod of each set of transmission components is selected from a kit composed of push rods of multiple models. The side of the push rod close to the sealing plate is an extrusion side parallel to the sealing plate, and the distances from the hinge axes of the joints between the push rods of different models in the kit and the second swing rod to the extrusion side are different. By replacing the push rods of different models in the kit, the covering degree of the sealing plate is adjusted, and the sealing effect of the opening of the vacuum coating cavity is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, in particular to a large gate valve capable of high-speed switching, and also to a coating machine using the gate valve. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate or sputter them to solidify and deposit on the object to be coated. Different vacuum degrees need to be formed in the cavity of the vacuum coating equipment, so valves need to be set to provide sealing for the vacuum coating cavity.

[0003] In the prior art, a reversible gate valve is often used to seal the vacuum coating. However, when the existing gate valve structure is turned over to cover the opening of the cavity, due to processing errors and shape and position errors, it is easy for the cover plate to not be completely attached to the outer wall of the cavity, thereby reducing the sealing effect. In addition, the applicability of the existing gate valve is poor, and its assembly parts only support a few specific types of cavities. Some manufacturers are worried about other issues such as positioning accuracy and are unwilling to install gate valves in the form of drilling, grooving, etc. that damage the original outer wall structure of the cavity, resulting in the problem of difficulty in installing the gate valve. Summary of the invention

[0004] Based on this, it is necessary to address the technical problem that the opening sealing structure of the vacuum coating cavity in the prior art has a poor sealing effect. The present invention provides a large gate valve with high-speed switching.

[0005] The invention discloses a large gate valve capable of high-speed switching, comprising a supporting device, a sealing device and a driving device.

[0006] The supporting device includes a crossbeam and a supporting seat. Two supporting seats are provided and symmetrically distributed, and the two supporting seats are fixedly installed on the cavity. The two ends of the crossbeam are respectively fixedly connected to the two supporting seats.

[0007] The sealing device includes a main shaft, a sealing plate and at least one set of transmission components. The axial direction of the main shaft is parallel to the extension direction of the crossbeam and the sealing plate, and the two ends of the main shaft are rotatably connected to the two support seats respectively. Each set of transmission components includes a first swing rod, a second swing rod and a mandrel. One end of the first swing rod is fixedly sleeved on the main shaft, and the other end is hinged to one end of the second swing rod. The other end of the second swing rod is hinged to one end of the mandrel. The other end of the mandrel is hinged to the crossbeam. One side of the sealing plate is a sealing side, and the other side is fixedly connected to the hinge between the mandrel and the second swing rod, and the sealing plate and the mandrel are relatively fixed. Among them, the first swing rod, the second swing rod, the mandrel and the crossbeam together constitute a planar four-bar mechanism, and then the sealing plate is switched between a vertical state and a non-vertical state by rotating the main shaft, and the sealing side of the sealing plate is used to fit and seal the opening of the cavity when it is in a vertical state.

[0008] The driving device is used to drive the main shaft to rotate around its own axis.

[0009] Among them, the ejector rod of each set of transmission components is selected from a kit composed of ejector rods of multiple models. The side of the ejector rod close to the sealing plate is the extrusion side parallel to the sealing plate. The distance from the hinge axis of the hinge between the ejector rods of each model in the kit and the second swing rod to the extrusion side is different. By replacing the ejector rods of different models in the kit, the covering degree of the sealing plate can be adjusted.

[0010] As a further improvement of the above solution, the valve also includes: a substrate. The substrate is detachably and fixedly connected to the standard connector provided on the cavity. One side of the substrate is attached and sealed to the cavity, and the other side is detachably and fixedly connected to two support seats. A through port is provided on the substrate that matches the opening of the cavity and has a coincident projection plane.

[0011] As a further improvement of the above solution, sealing rubber rings are provided on both the side of the substrate close to the cavity and the sealing side of the sealing plate.

[0012] As a further improvement of the above solution, the driving device includes a cylinder, a gearbox, and a rack. The cylinder is fixedly installed with the gearbox, and the piston end of the cylinder extends into the gearbox and is fixed to the rack. An output shaft is rotatably connected in the gearbox. A gear meshing with the rack is fixedly sleeved on the output shaft, and the output shaft is coaxially fixed with the main shaft.

[0013] As a further improvement of the above solution, the driving device further includes a bracket. One end of the bracket is fixedly connected to both the gearbox and the cylinder, and the other end is fixedly installed on the cavity.

[0014] As a further improvement of the above solution, both ends of the main shaft are rotatably connected to two support seats through bearings. An end cover of the bearing is further fixedly installed on one side of each support seat facing away from the main shaft.

[0015] As a further improvement of the above solution, an ear seat is fixedly connected to the cross beam by screws. The number of ear seats corresponds to the number of transmission components, and each ear seat is hinged to the corresponding ejector rod, thereby realizing the hinge between the ejector rod and the cross beam.

[0016] As a further improvement of the above solution, the hinge hole opened at one end of the ejector rod close to the corresponding ear seat is an oval hole, and the corresponding hinge shaft is rotatably installed in the oval hole, thereby realizing the translational movement from rotation to horizontal movement of the sealing plate during the stage of switching to the vertical state.

[0017] As a further improvement of the above solution, multiple sets of transmission components are provided, and the multiple sets of transmission components are arranged at equal intervals along the axial direction of the main shaft.

[0018] The present invention also discloses a coating machine, including: a cavity and a valve installed at the opening of the cavity. The valve adopts any one of the above valves.

[0019] Compared with the prior art, the technical solution disclosed by the present invention has the following beneficial effects:

[0020] 1. The valve gate disclosed by the present invention drives the sealing plate to provide sealing for the opening of the cavity through a four-bar linkage structure. By setting the ejector rod in the four-bar linkage mechanism as different models that can be selected to form a kit, the distance from the hinge axis at the hinge joint between the different-signal ejector rods and the second swing rod to the extrusion side is different when assembled. In this way, by replacing the ejector rods of different models in the kit, the covering degree of the sealing plate can be adjusted, so that the sealing plate can be sealed more tightly at the opening of the cavity through debugging.

[0021] 2. The present invention adds a cross beam in the support device to provide good support for the ejector rod. The cross beam can ensure the integrity of the flap valve and eliminate the process of drilling holes on the vacuum coating cavity to install the four-bar mechanism. In addition, a selectable substrate is provided, and the substrate is detachably connected to both the support device and the vacuum coating cavity. In this way, due to the simple structure of the substrate and easy manufacturing, by adding this component of the substrate, the sealing device can be applied to more models of cavities, and it is not necessary to damage the original outer wall structure of the cavity, reducing the installation difficulty of the valve gate.

[0022] 3. The present invention also makes a structural improvement to the ejector rod of the four-bar linkage mechanism. A waist-shaped hole is opened at one hinge end of the ejector rod. Thus, in the final stage of the rotation of the sealing plate, the hinge shaft moves from one end of the waist-shaped hole to the other end, changing the rotation of the sealing plate into a translational motion to compress the sealing rubber ring to achieve sealing. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a three-dimensional structure diagram of the large valve gate of the high-speed switch in Embodiment 1 of the present invention;

[0024] Figure 2 is Figure 1 the three-dimensional structure diagram of the back of the valve gate in;

[0025] Figure 3 is Figure 1 the partial three-dimensional structure diagram of the valve gate in;

[0026] Figure 4 is Figure 3 the partial structure diagram of the support device and the sealing device of the valve gate in;

[0027] Figure 5 is Figure 4 the partial enlarged view at B in;

[0028] Figure 6 is the displacement-time change curve when the four-bar mechanism and the sealing plate move in Embodiment 1 of the present invention;

[0029] Figure 7For Figure 4 Cross-sectional view of the middle transmission component;

[0030] Figure 8 Side view of a push rod (without a limit block) in the kit in Embodiment 1 of the present invention;

[0031] Figure 9 Three-dimensional structure diagram of the push rod in Embodiment 1 of the present invention;

[0032] Figure 10 Side view structure schematic diagram of the sealing plate of the valve gate in the open state in Embodiment 1 of the present invention;

[0033] Figure 11 For Figure 10 Side view structure schematic diagram when the sealing plate is closed;

[0034] Figure 12 Front view sectional view of the valve gate in Embodiment 1 of the present invention;

[0035] Figure 13 For Figure 12 Side view sectional view of the driving device;

[0036] Figure 14 Display panel state diagram of the helium leak detector when testing the sealing effect of the valve gate in Embodiment 1 of the present invention.

[0037] Description of main component symbols

[0038] 1. Support device; 11. Cross beam; 111. Ear seat; 12. Support seat; 121. Bearing end cover; 2. Sealing device; 21. Main shaft; 22. Sealing plate; 221. Sealing side; 222. Limit groove; 23. Transmission component; 231. First swing rod; 232. Second swing rod; 233. Push rod; 2331. Extrusion side; 2332. Waist-shaped hole; 2333. Limit block; 234. Pressure plate; 2341. Notch; 3. Driving device; 31. Cylinder; 32. Gearbox; 33. Rack; 34. Gear; 35. Output shaft; 36. Bracket; 4. Substrate; 41. Through hole; 501. Coupling; 502. Deep groove ball bearing; 503. Needle bearing; 504. First swing rod rotating shaft; 505. Second swing rod rotating shaft; 506. Snap ring; 507. Bearing pad; 508. Swing rod pad.

[0039] The above description of main component symbols further describes the present invention in detail in conjunction with the accompanying drawings and specific embodiments. Specific embodiments

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0041] It should be noted that when a component is referred to as "installed on" another component, it can be directly on the other component or there may also be an intermediate component. When a component is considered to be "arranged on" another component, it can be directly arranged on the other component or there may be an intermediate component at the same time. When a component is considered to be "fixed to" another component, it can be directly fixed to the other component or there may be an intermediate component at the same time.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present invention belongs. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "or / and" used herein includes any and all combinations of one or more of the related listed items.

[0043] Embodiment 1

[0044] Please refer to Figures 1 to 4 , this embodiment provides a large valve of a high-speed switch, which can be installed on one side of a vacuum coating chamber perpendicular to the horizontal plane and is located in the atmosphere. It can be used to seal a horizontal strip-shaped opening on the chamber, thereby isolating the connection between the inside of the chamber and the atmosphere side. Here, it should be noted that "high-speed" in the high-speed switch means that the response speed of the switch is within 1 second; "large" in the large valve means that the maximum width of the valve exceeds 1.5 meters. The valve includes: a support device 1, a sealing device 2, and a driving device 3, and may also include a substrate 4.

[0045] The support device 1 includes a cross beam 11 and support seats 12. There are two support seats 12 and they are symmetrically distributed. The two support seats 12 are fixedly installed on the chamber. The two ends of the cross beam 11 are respectively fixedly connected to the two support seats 12.

[0046] The sealing device 2 includes a main shaft 21, a sealing plate 22, and multiple sets of transmission components 23.

[0047] The axial direction of the main shaft 21 is parallel to the extension direction of the cross beam 11 and the sealing plate 22, and the two ends of the main shaft 21 are rotatably connected to the two support seats 12. The two ends of the main shaft 21 can be rotatably connected to the two support seats 12 through bearings. Specifically, two deep groove ball bearings are installed inside the support seat 12, and a bearing end cover 121 is fixedly installed on the side of each support seat 12 away from the main shaft 21. The support seat 12, in combination with the bearing and the bearing end cover 121, can achieve axial and radial fixation of the main shaft 21, significantly reducing the deformation of the main shaft 21 under high temperature conditions.

[0048] Please combine Figure 5 A plurality of transmission components 23 are arranged at equal intervals along the axial direction of the main shaft 21 , and each transmission component 23 includes a first swing rod 231 , a second swing rod 232 and a top rod 233 .

[0049] One end of the first swing rod 231 is fixedly sleeved on the main shaft 21, and the other end is hinged to one end of the second swing rod 232. In this embodiment, the main shaft 21 and the first swing rod 231 are connected by shaft hole matching, and clearance matching is selected to ensure the smooth operation of the four-bar mechanism, and the axial fixation of the first swing rod is achieved by a set screw to prevent relative sliding with the main shaft 21.

[0050] The other end of the second swing rod 232 is hinged to one end of the top rod 233. In this embodiment, the second swing rod 232 can be a thin swing rod used in pairs, and can be connected to the first swing rod 231 through a needle bearing 503. The needle bearing 503 is located between the two thin swing rods, and the first swing rod shaft 504 is used to form an axial hole with the thin swing rod and the needle bearing 503. A bearing pad 507 is used between the needle bearing 503 and the two thin swing rods to reduce wear. The thinner end of the first swing rod shaft 504 is fixed with an open retaining ring 506 to achieve axial fixation. The connection method between the second swing rod 232 and the top rod 233 is the same as the connection method between the second swing rod 232 and the first swing rod 231, which will not be repeated here.

[0051] The other end of the top rod 233 is hinged to the cross beam 11. One side of the sealing plate 22 is a sealing side 221, and the other side is fixedly connected to the hinge between the top rod 233 and the second swing rod 232, and the sealing plate 22 and the top rod 233 are relatively fixed.

[0052] Among them, the first rocker arm 231, the second rocker arm 232, the top rod 233 and the cross beam 11 together constitute a planar four-bar mechanism, and then the sealing plate 22 is switched between the vertical state and the non-vertical state by rotating the main shaft 21. The sealing side 221 of the sealing plate 22 is used to fit and seal the opening of the cavity when it is in the vertical state. The four-bar mechanism can transmit torque and provide sufficient pressure for the sealing plate 22 to achieve a sealing effect.

[0053] This embodiment also uses software such as Solidworks to perform kinematic simulation analysis on the sealing plate 22 driven by the four-bar mechanism, as follows Figure 6 a, Figure 6 as shown in b. The left side in the figure shows the motion state of the sealing plate 22 and the four-bar mechanism, and the right side shows the displacement-time curve. Among them, the upper curve is the curve of the displacement of the sealing plate 22 changing with time, and the lower curve is the curve of the displacement of the first swing rod 231 changing with time. It can be clearly seen that during the process of the sealing plate 22 switching from a non-vertical state to a vertical state, due to the quick-return characteristic of the four-bar mechanism, the speed of the sealing plate 22 gradually becomes slow. In this way, it can be slowly closed when approaching the cavity opening, which not only reduces the impact wear on the components, but also makes the closing more tight.

[0054] Please refer to Figure 7 , in this embodiment, an ear seat 111 can be fixedly connected to the cross beam 11 by screws. The number of ear seats 111 corresponds to the number of transmission components 23, and each ear seat 111 is hinged to the corresponding ejector rod 233, thereby realizing the hinged connection between the ejector rod 233 and the cross beam 11. The ejector rod 233 and the ear seat 111 are connected by a second swing rod rotating shaft 505, and a swing rod pad 508 is used between the ear seat 111 and the second swing rod rotating shaft 505 to reduce wear and prevent shaking.

[0055] In addition, the production material of the sealing plate 22 is 7-series aluminum, while the main shaft 21 and the cavity are both made of stainless steel. When heated, the deformation amount of 7-series aluminum is greater than that of stainless steel. Therefore, the four-bar mechanism may be deformed due to the different deformation amounts of the sealing plate 22 and the main shaft 21, affecting the sealing reliability and the smoothness of movement. To solve the above problems, this embodiment can adjust the lengths of the first swing rod rotating shaft 504 and the second swing rod rotating shaft 505 so that the distance between the left side and the opening retaining ring 506 on the right side is slightly greater than the thickness of the middle four-bar mechanism, leaving an axial gap, which can largely offset the influence brought by thermal deformation.

[0056] The present invention realizes the fixation of part of the structure of the four-bar mechanism by setting the cross beam 11, that is, the installation of the ear seat 111 and the ejector rod 233. The cross beam 11 can ensure the integrity of the flap valve and eliminate the process of drilling holes in the vacuum coating cavity to install the four-bar mechanism.

[0057] Please refer to Figure 8 and Figure 9, for each drive assembly 23 of the present invention, the ejector rod 233 is selected from a set of ejector rods 233 of multiple models. The side of the ejector rod 233 close to the sealing plate 22 is an extrusion side 2331 parallel to the sealing plate 22. The distances A from the hinge axis at the hinge joint of each model of ejector rod 233 in the set to the extrusion side 2331 are different. By replacing the ejector rods 233 of different models in the set, the covering degree of the sealing plate 22 can be adjusted.

[0058] After assembling the valve gate on the vacuum coating chamber, the sealing effect of the sealing plate 22 in the extreme covering state can be judged by observation or relevant airtightness detection modules. If there is a gap between the sealing plate 22 and the opening on the chamber, then according to the size of the gap, each ejector rod 233 can be uniformly replaced with the ejector rod 233 model with a larger distance A as described above, and adjusted until the sealing plate 22 can tightly seal the chamber opening.

[0059] It should be noted that the ejector rods 233 of multiple drive assemblies 23 are all selected of the same model, that is to say, the structures of multiple drive assemblies 23 are the same.

[0060] In addition, the hinge hole opened at one end of the ejector rod 233 close to the corresponding ear seat 111 is an oblong hole 2332, and the corresponding hinge shaft is rotatably installed in the oblong hole 2332, so as to realize that the stage of the sealing plate 22 switching to the vertical state changes from rotation to horizontal translation motion. The specific principle is: when the sealing plate 22 is at the extreme open position, the hinge shaft abuts against one end of the oblong hole 2332. As the four-bar mechanism moves, at the last stage of the rotation of the sealing plate 22, the hinge shaft moves to the other end of the oblong hole 2332, thereby changing the sealing plate 22 from rotation to translation motion and compressing the sealing rubber ring to achieve sealing.

[0061] Furthermore, a limiting block 2333 extending outward can be integrally connected to the extrusion side 2331 of the ejector rod 233. The shape of the limiting block 2333 can be a triangular prism with an equilateral triangle cross-section. A limiting groove 222 matching the limiting block 2333 is opened on the sealing plate 22. Each drive assembly 23 further includes two pressing plates 234, and a notch 2341 is opened on each pressing plate 234. Of course, the notch 2341 can also be opened on the limiting block 2333. The notches 2341 of the two pressing plates 234 are respectively aligned with the two ends of the limiting block 2333 extending outward, and the two ends of the pressing plate 234 are fixedly connected to the sealing plate 22 by bolts, so as to realize pressing the limiting block 2333 into the limiting groove 222. During the actual installation process, the pressing plate 234 can generate a bending deformation when pressing the limiting block 2333. In this way, it is convenient to install and fix the ejector rod 233 and the sealing plate 22. At the same time, the limiting block 2333 causes the pressing plate 234 to generate an elastic deformation, thereby providing a pre-tightening force for the bolts at both ends of the pressing plate 234 and increasing the stability of the installation of the ejector rod 233 and the sealing plate 22.

[0062] In this embodiment, the cross beam 11 can be directly and fixedly installed on the cavity through two support seats 12. Specifically, a groove plane with a depth of 1 mm can be milled on the cavity for positioning the support seats 12, and then the support seats 12 can be fixed by cooperating with the threaded holes pre - opened on the outer wall of the cavity through bolts. Of course, this is for the case where the original structure of the cavity can be damaged.

[0063] When it is required not to damage the original structure of the cavity, it can be achieved through the component of the substrate 4. Specifically, one side of the substrate 4 can be detachably and fixedly connected to the original standard connecting piece provided on the cavity, and the other side can be detachably and fixedly connected to the two support seats 12. In this way, since the structure of the substrate 4 is simple and easy to manufacture, by adding the component of the substrate 4, the sealing device 2 can be applied to more models of cavities, and it is not necessary to damage the original outer wall structure of the cavity, reducing the installation difficulty of the valve.

[0064] Please refer to Figure 10 and Figure 11 , it should be noted that a through - hole 41 is opened on the substrate 4, which matches the opening of the cavity and has a coincident projection plane. And on the side of the substrate 4 close to the cavity, as well as on the sealing side 221 of the sealing plate 22, sealing rubber rings are provided. In this way, in the case of not adding the substrate 4, the sealing side 221 of the sealing plate 22 can squeeze its sealing rubber ring to eliminate the gap between it and the outer wall surface of the cavity to achieve sealing. And in the case of adding the substrate 4, after the substrate 4 fits with the cavity, it is equivalent to a whole, and the through - hole 41 on the substrate 4 can be regarded as the opening of the cavity, so that the sealing side 221 of the sealing plate 22 can seal the through - hole 41 of the substrate 4, thereby achieving cavity sealing.

[0065] Of course, in some embodiments, the sealing rubber ring can also be fixed on the cavity surface. The sealing rubber ring can be made of fluororubber. Fluororubber is a rubber material resistant to high temperature, but being in a high - temperature condition for a long time will still shorten the life of the rubber ring and increase the use cost of the valve. Therefore, in some embodiments, a sealing groove can be opened on the sealing side 221 of the sealing plate 22. The sealing groove can adopt the standard size requirements of a 40° dovetail groove in the vacuum design manual, and 0.2 - mm round corners are respectively adopted at the end and the outside of the dovetail groove to prevent scratching the rubber ring. Putting the rubber ring into the sealing groove of the sealing plate 22 can greatly reduce the time for the rubber ring to contact the high - temperature cavity and extend its service life.

[0066] Please refer to Figure 12 and Figure 13 , the driving device 3 is used to drive the main shaft 21 to rotate around its own axis. The driving device 3 can adopt various forms to directly or indirectly provide torque for the main shaft 21, such as a servo motor, a stepping motor, etc. In this embodiment, the driving device 3 includes a cylinder 31, a gearbox 32, a rack 33, and may also include a bracket 36.

[0067] The cylinder 31 and the gearbox 32 can be fixedly installed through four screws. Of course, in some embodiments, the two can be fixedly installed on the cavity together through the bracket 36, or can also be fixedly installed on the support seat 12 or the cross beam 11. In this embodiment, the cylinder 21 and the gearbox 32 are fixed to the cavity through the bracket 36, which can bear the weight and torque of the power structure and reduce the vibration generated during the movement. Reinforcing ribs can also be welded on the bracket 36 to improve the strength and anti-torque ability. Through holes can be drilled on the bracket 36 and connected to the cavity and the gearbox 32 through screws. In addition, a gearbox cap can be provided on the top of the gearbox 32, which is detachably installed through screws and can usually play a role in dust prevention. Opening the box cap can add lubricant to the bushing.

[0068] The piston end of the cylinder 31 extends into the gearbox 32 and can be fixedly connected with the cylindrical rack 33 by threading. There are two bushings between the cylindrical rack 33 and the inner wall of the gearbox 32, which can reduce part wear. An output shaft 35 is rotatably connected in the gearbox 32. A gear 34 meshing with the rack 33 is fixedly sleeved on the output shaft 35. The gear 34 is fixed to the output shaft 35 through a keyway, and the output shaft 35 can be coaxially fixed with the main shaft 21 through a coupling 501. Keyways can be provided on the coupling 501, the main shaft 21 and the output shaft 35 to transmit a large torque. The linear movement of the rack 33 is driven by the piston end of the cylinder 31, so as to drive the gear 34 to rotate, and further provide torque for the output shaft 35 and the main shaft 21.

[0069] In order to verify the valve seal effect disclosed in the present invention, in this embodiment, a helium leak detector is also used to perform multiple helium leak detection tests on the air tightness of the valve, as Figure 14 shown. When the sealing device 2 is in a sealed state, the final fixed number (i.e., the stable valve seat leakage rate value) of the helium leak detector is 1×10 -7 mbarls -1 , and the whole process remains lower than 1×10 -6 mbarls -1 , meeting the technical requirement of the valve seat leakage rate of 1×10 -5 mbarls -1 .

[0070] Embodiment 2

[0071] This embodiment provides a coating machine, including: a cavity and a valve installed at the opening of the cavity. The valve can adopt the valve in Embodiment 1. The sealing device 2 can be indirectly installed on the cavity through the substrate 4, or the substrate 4 can be cancelled and the sealing device 2 can be directly installed, which can be selected according to actual needs.

[0072] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the various technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered to be within the scope described in this specification.

[0073] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the appended claims.

Claims

1. A large valve of a high-speed switch, characterized in that include: A support device (1) comprising a crossbeam (11) and a support seat (12); two support seats (12) are provided and symmetrically distributed, and the two support seats (12) are fixedly mounted on the cavity; two ends of the crossbeam (11) are respectively fixedly connected to the two support seats (12); A sealing device (2), comprising a main shaft (21), a sealing plate (22), and at least one transmission assembly (23); the axial direction of the main shaft (21) is parallel to the extension direction of the cross beam (11) and the sealing plate (22), and the two ends of the main shaft (21) are respectively rotatably connected to the two support seats (12); each transmission assembly (23) comprises a first swing rod (231), a second swing rod (232), and a top rod (233); one end of the first swing rod (231) is fixedly sleeved on the main shaft (21), and the other end is hinged to one end of the second swing rod (232); the other end of the second swing rod (232) is hinged to one end of the top rod (233); the top rod (23 3) is hinged to the crossbeam (11); one side of the sealing plate (22) is a sealing side (221), and the other side is fixedly connected to a hinge between the top rod (233) and the second swing rod (232), and the sealing plate (22) and the top rod (233) are relatively fixed; wherein the first swing rod (231), the second swing rod (232), the top rod (233) and the crossbeam (11) together constitute a planar four-bar mechanism, and the sealing plate (22) is switched between a vertical state and a non-vertical state by rotating the main shaft (21), and the sealing side (221) of the sealing plate (22) is used to fit and seal the opening of the cavity when the sealing plate (22) is in the vertical state; and A driving device (3) for driving the main shaft (21) to rotate around its own axis; The push rod (233) of each transmission assembly (23) is selected from a kit consisting of a plurality of models of push rods (233); the side of the push rod (233) close to the sealing plate (22) is an extrusion side (2331) parallel to the sealing plate (22); the distances from the hinge axis of the hinge between the push rod (233) of each model in the kit and the second swing rod (232) to the extrusion side (2331) are different; and the covering degree of the sealing plate (22) can be adjusted by replacing push rods (233) of different models in the kit.

2. The large valve of the high-speed switch according to claim 1, characterized in that, The gate valve also includes: A base plate (4) is detachably fixedly connected to a standard connector provided on the cavity; one side of the base plate (4) is sealed against the cavity, and the other side is detachably fixedly connected to two support seats (12); a through opening (41) is provided on the base plate (4) that matches the opening of the cavity and whose projection surface overlaps with the opening of the cavity.

3. The large valve of the high-speed switch according to claim 2, characterized in that, A sealing rubber ring is provided on a side of the base plate (4) close to the cavity, and on a sealing side (221) of the sealing plate (22).

4. The large valve of the high-speed switch according to claim 1, characterized in that, The driving device (3) includes a cylinder (31), a gearbox (32), and a rack (33); the cylinder (31) is fixedly installed with the gearbox (32), and the piston end of the cylinder (31) extends into the gearbox (32) and is fixed to the rack (33); a output shaft (35) is rotatably connected in the gearbox (32); a gear (34) meshing with the rack (33) is fixedly sleeved on the output shaft (35), and the output shaft (35) is coaxially fixed to the main shaft (21).

5. The large valve of the high-speed switch according to claim 4, characterized in that, The driving device (3) further includes a bracket (36), one end of the bracket (36) is fixedly connected to both the gearbox (32) and the cylinder (31), and the other end is fixedly installed on the cavity.

6. The large valve of the high-speed switch according to claim 1, characterized in that, Both ends of the main shaft (21) are rotatably connected to two support seats (12) through bearings; a bearing end cover (121) is further fixedly installed on one side of each support seat (12) facing away from the main shaft (21).

7. The large valve of the high-speed switch according to claim 1, characterized in that, An ear seat (111) is fixedly connected to the cross beam (11) by screws; the number of ear seats (111) corresponds to the number of the transmission components (23), and each ear seat (111) is hinged to the corresponding ejector rod (233), thereby realizing the hinge connection between the ejector rod (233) and the cross beam (11).

8. The large valve of the high-speed switch according to claim 7, characterized in that, The hinge hole opened at one end of the ejector rod (233) close to the corresponding ear seat (111) is an oval hole (2332), and the corresponding hinge shaft is rotatably installed in the oval hole (2332), thereby realizing the translational movement from rotation to horizontal movement of the sealing plate (22) during the stage of switching to the vertical state.

9. The large valve of the high-speed switch according to claim 1, characterized in that, A plurality of groups of the transmission components (23) are provided, and the plurality of groups of transmission components (23) are arranged at equal intervals along the axial direction of the main shaft (21).

10. A coating machine, comprising: a cavity, and a valve, which is installed at the opening of the cavity; characterized in that the valve adopts the valve according to any one of claims 1 to 9.

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